CN102034733A - 互连结构及其形成方法 - Google Patents
互连结构及其形成方法 Download PDFInfo
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- CN102034733A CN102034733A CN2009100579704A CN200910057970A CN102034733A CN 102034733 A CN102034733 A CN 102034733A CN 2009100579704 A CN2009100579704 A CN 2009100579704A CN 200910057970 A CN200910057970 A CN 200910057970A CN 102034733 A CN102034733 A CN 102034733A
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- interconnection structure
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CN2009100579704A CN102034733A (zh) | 2009-09-28 | 2009-09-28 | 互连结构及其形成方法 |
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CN2009100579704A CN102034733A (zh) | 2009-09-28 | 2009-09-28 | 互连结构及其形成方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102044471A (zh) * | 2009-10-09 | 2011-05-04 | 中芯国际集成电路制造(上海)有限公司 | 互连结构及其形成方法 |
CN102412196A (zh) * | 2011-09-15 | 2012-04-11 | 上海华力微电子有限公司 | 金属铜大马士革互联结构的制造方法 |
CN102881649A (zh) * | 2012-10-22 | 2013-01-16 | 上海集成电路研发中心有限公司 | 一种大马士革结构的制作方法 |
CN108573912A (zh) * | 2017-03-07 | 2018-09-25 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
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2009
- 2009-09-28 CN CN2009100579704A patent/CN102034733A/zh active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102044471A (zh) * | 2009-10-09 | 2011-05-04 | 中芯国际集成电路制造(上海)有限公司 | 互连结构及其形成方法 |
CN102044471B (zh) * | 2009-10-09 | 2015-04-29 | 中芯国际集成电路制造(上海)有限公司 | 互连结构及其形成方法 |
CN102412196A (zh) * | 2011-09-15 | 2012-04-11 | 上海华力微电子有限公司 | 金属铜大马士革互联结构的制造方法 |
CN102881649A (zh) * | 2012-10-22 | 2013-01-16 | 上海集成电路研发中心有限公司 | 一种大马士革结构的制作方法 |
CN102881649B (zh) * | 2012-10-22 | 2017-11-07 | 上海集成电路研发中心有限公司 | 一种大马士革结构的制作方法 |
CN108573912A (zh) * | 2017-03-07 | 2018-09-25 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
CN108573912B (zh) * | 2017-03-07 | 2021-02-02 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20121112 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20121112 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation Applicant after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation |
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C12 | Rejection of a patent application after its publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20110427 |