CN102025340B - Sonic wave resonator and processing method thereof - Google Patents
Sonic wave resonator and processing method thereof Download PDFInfo
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- CN102025340B CN102025340B CN 201010513559 CN201010513559A CN102025340B CN 102025340 B CN102025340 B CN 102025340B CN 201010513559 CN201010513559 CN 201010513559 CN 201010513559 A CN201010513559 A CN 201010513559A CN 102025340 B CN102025340 B CN 102025340B
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
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- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4050795A4 (en) * | 2019-10-26 | 2022-12-21 | Rofs Microsystem (Tianjin) Co., Ltd | Bulk acoustic resonator, filter, and electronic device |
EP4050796A4 (en) * | 2019-10-26 | 2023-01-04 | Rofs Microsystem (Tianjin) Co., Ltd. | Bulk acoustic wave resonator and manufacturing method therefor, filter, and electronic device |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102291095A (en) * | 2011-04-27 | 2011-12-21 | 庞慰 | complex acoustic wave resonator |
CN102931941A (en) * | 2012-10-29 | 2013-02-13 | 天津理工大学 | FBAR (film bulk acoustic resonator) substrate and preparation method thereof |
CN104104357B (en) * | 2014-07-18 | 2017-07-21 | 天津大学 | The processing method of resonator and resonator |
CN104124938B (en) * | 2014-07-18 | 2017-11-14 | 天津大学 | The resonant frequency of resonator and resonator regulates and controls method |
CN104320102A (en) * | 2014-10-24 | 2015-01-28 | 中国电子科技集团公司第五十五研究所 | Composite dielectric film surface acoustic wave device |
CN105680813B (en) * | 2016-02-25 | 2018-12-07 | 锐迪科微电子(上海)有限公司 | A kind of thin film bulk acoustic wave resonator and its manufacturing method |
US10439589B2 (en) | 2016-06-24 | 2019-10-08 | Samsung Electro-Mechanics Co., Ltd. | Bulk acoustic wave resonator and filter including the same |
US10965271B2 (en) * | 2017-05-30 | 2021-03-30 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method for fabricating the same |
US11418168B2 (en) * | 2017-05-30 | 2022-08-16 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method for manufacturing the same |
CN108281363B (en) * | 2018-01-17 | 2020-04-14 | 上海科技大学 | Low-cost piezoelectric resonator/sensor packaging process method |
CN109302159B (en) * | 2018-08-01 | 2021-02-26 | 广州市艾佛光通科技有限公司 | Composite substrate and method for manufacturing film bulk acoustic resonator by using same |
CN109474253A (en) * | 2018-09-30 | 2019-03-15 | 天津大学 | A kind of flexible substrates thin film bulk acoustic wave resonator and forming method |
CN112039460B (en) | 2019-07-19 | 2022-05-10 | 中芯集成电路(宁波)有限公司 | Film bulk acoustic resonator and manufacturing method thereof |
CN111092604B (en) * | 2019-12-16 | 2021-07-20 | 见闻录(浙江)半导体有限公司 | Cavity structure of bulk acoustic wave resonator and manufacturing method |
CN111245387B (en) * | 2020-02-14 | 2021-05-25 | 见闻录(浙江)半导体有限公司 | Structure and manufacturing process of solid assembled resonator |
CN112039465B (en) * | 2020-03-10 | 2024-03-12 | 中芯集成电路(宁波)有限公司 | Film bulk acoustic resonator and manufacturing method thereof |
CN114531126A (en) * | 2021-12-31 | 2022-05-24 | 河源市艾佛光通科技有限公司 | Preparation method of broadband film bulk acoustic resonator |
CN116707477B (en) * | 2023-08-02 | 2024-04-02 | 深圳新声半导体有限公司 | Method for manufacturing Film Bulk Acoustic Resonator (FBAR) filter device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1254986A (en) * | 1998-11-10 | 2000-05-31 | 株式会社村田制作所 | Surface acoustic wave (SAW) device |
CN1606233A (en) * | 2004-09-20 | 2005-04-13 | 南京大学 | Bulk acoustic wave device composed of multilayer heterostructure and method for making same |
-
2010
- 2010-10-21 CN CN 201010513559 patent/CN102025340B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1254986A (en) * | 1998-11-10 | 2000-05-31 | 株式会社村田制作所 | Surface acoustic wave (SAW) device |
CN1606233A (en) * | 2004-09-20 | 2005-04-13 | 南京大学 | Bulk acoustic wave device composed of multilayer heterostructure and method for making same |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4050795A4 (en) * | 2019-10-26 | 2022-12-21 | Rofs Microsystem (Tianjin) Co., Ltd | Bulk acoustic resonator, filter, and electronic device |
EP4050796A4 (en) * | 2019-10-26 | 2023-01-04 | Rofs Microsystem (Tianjin) Co., Ltd. | Bulk acoustic wave resonator and manufacturing method therefor, filter, and electronic device |
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CN102025340A (en) | 2011-04-20 |
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