CN101989538A - Liquid processing apparatus, liquid processing method, and storage medium - Google Patents

Liquid processing apparatus, liquid processing method, and storage medium Download PDF

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Publication number
CN101989538A
CN101989538A CN2010102435902A CN201010243590A CN101989538A CN 101989538 A CN101989538 A CN 101989538A CN 2010102435902 A CN2010102435902 A CN 2010102435902A CN 201010243590 A CN201010243590 A CN 201010243590A CN 101989538 A CN101989538 A CN 101989538A
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China
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mentioned
liquid
pipeline
supply pipeline
supply
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CN2010102435902A
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Chinese (zh)
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CN101989538B (en
Inventor
伊藤规宏
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority claimed from JP2009179283A external-priority patent/JP5220707B2/en
Priority claimed from JP2009179479A external-priority patent/JP5313074B2/en
Priority claimed from JP2009179456A external-priority patent/JP2011035133A/en
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN101989538A publication Critical patent/CN101989538A/en
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Publication of CN101989538B publication Critical patent/CN101989538B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Abstract

The invention provides a liquid processing apparatus, a liquid processing method and a storage medium. The liquid processing apparatus includes: a liquid supply mechanism; a supply line connected to the liquid supply mechanism, the supply line having a discharge opening for discharging a temperature-regulated liquid; a processing unit supporting the discharge opening of the supply line; a return line configured to return the liquid supplied to the supply line to the liquid supply mechanism; and a liquid-supply switching valve configured to switch between supply of the liquid, which is used in a processing of an object to be processed in the processing unit, and stoppage of the liquid supply. The liquid-supply switching valve is disposed on the supply line on a route of the liquid returning from the supply line to the liquid supply mechanism through the return line.

Description

Liquid handling device and method for treating liquids
Technical field
The present invention relates to use the liquid that has been conditioned temperature to handle the liquid handling device and the method for treating liquids of handled object.In addition, the invention still further relates to a kind of storage medium that stores the program that is used to carry out method for treating liquids, this method for treating liquids uses the liquid that has been conditioned temperature to handle handled object.
Background technology
In the past, extensively adopt semiconductor crystal wafer (hereinafter to be referred as wafer) on one side, glass substrate for display one side such as etch processes of implementing liquid from temperature to the handled object supply that be conditioned handles the technology (for example JP2007-123393A) of handled object.Usually, when the temperature of the liquid that is used to handle is higher, can activate the reaction of this liquid, processing is carried out easily.Thereby, by the liquid that heating is used to handle, can obtain to shorten such advantage of processing time.
In addition, the present inventor also found drying by heating IPA representatives such as (isopropyl alcohols) with liquid, can use the handled object withering advantage of liquid after this heating to constituting by wafer etc.Specifically, when the drying after will heating is used for that with liquid handled object carried out dried, can reduce the heat that absorbs from handled object during with liquid evaporation in drying, thereby the temperature that can be suppressed at handled object in the dried process descends.Thus, dewfall on the handled object can be suppressed at, thereby ripple (water mark) can be prevented from handled object, to produce effectively.
But, when the temperature of the liquid that is used to handle handled object is regulated, as mentioned above because the difference of the temperature of liquid, processing produce bigger variation.Thereby, from the aspect of the homogenizing of guaranteeing the processing between handled object, importantly be kept for the temperature of the liquid handled consistently.
In the JP2007-123393A communique, disclose following substrate board treatment, this device comprises stores jar that soup is arranged, a main pipe arrangement (soup is handled with supply pipe 163) that an end is connected with jar, independently many supply pipes forming of the other end branch of pipe arrangement (soup processing with supply pipe 64,83) and many processing units being connected with supply pipe.In this board device, on main pipe arrangement, be provided with the thermoregulation mechanism that is used to regulate fluid temperature, on each supply pipe, be provided with valve.So,, the soup that has been conditioned temperature can be supplied in the each processing unit by opening or closing valve.
In this kind substrate board treatment in the past, when having closed valve, the soup that has been conditioned temperature is no longer mobile in supply pipe.For example, by regulating temperature during heating liquid, if the processing in the processing unit stops, promptly stopping the liquid after processing unit is supplied with heating, then the temperature of supply pipe continues to descend.Therefore, when the liquid after this processing unit is supplied with heating again, the heat of the liquid after the heating is absorbed by the supply pipe that temperature has descended, thereby the temperature that is used in the liquid of handling that is supplied to descends.
Particularly, be located at the thermal capacity of the thermal capacity of the valve on the supply pipe much larger than pipe.Thereby, stop to processing unit supply with the liquid be conditioned temperature during in, if the temperature of supply pipe changes (for example descending) with the temperature of valve, then cause the temperature significant change of liquid again to this processing unit feed fluid the time.The degree of carrying out of the processing that handled object is carried out accordingly also becomes unstable.
Summary of the invention
The liquid handling device of a technical scheme of the present invention uses the liquid that has been conditioned temperature to come handled object is handled, and this liquid handling device comprises:
The liquid feed mechanism, it is used for feed fluid;
Supply pipeline, it is connected with the aforesaid liquid feed mechanism, and has the ejection opening that is used to spray the liquid that has been conditioned temperature;
Processing unit, it supports above-mentioned supply pipeline, and can use the liquid that has been conditioned temperature from the ejection of the ejection opening of above-mentioned supply pipeline to come above-mentioned handled object is handled;
Reflux pipeline, it is used for making the liquid that is fed into above-mentioned supply pipeline to turn back in the aforesaid liquid feed mechanism;
Liquid is supplied with transfer valve, and it is arranged on the above-mentioned supply pipeline, is used to switch supply with to above-mentioned ejection opening be used in the action of the liquid of above-mentioned processing unit for processing handled object and the action that stops to supply with this liquid;
Aforesaid liquid supply transfer valve is arranged in liquid is turned back on the path of aforesaid liquid feed mechanism via above-mentioned reflux pipeline from above-mentioned supply pipeline.
The method for treating liquids of a technical scheme of the present invention uses the liquid that has been conditioned temperature to come handled object is handled, and this method comprises following operation:
Make the liquid that has been conditioned temperature that flows in the supply pipeline from the liquid feed mechanism turn back in the aforesaid liquid feed mechanism via reflux pipeline, thereby the liquid that has been conditioned temperature is circulated in the path that comprises above-mentioned supply pipeline and above-mentioned reflux pipeline, regulate the temperature of above-mentioned supply pipeline thus;
Flow into the liquid that has been conditioned temperature in the above-mentioned supply pipeline from the ejection of the ejection opening of above-mentioned supply pipeline from the aforesaid liquid feed mechanism, above-mentioned handled object is handled;
This method is when regulating the temperature of above-mentioned supply pipeline, liquid is supplied with transfer valve and also is conditioned temperature, this liquid is supplied with transfer valve and is arranged on the above-mentioned supply pipeline, is used to switch supply with to above-mentioned ejection opening be used in the action of the liquid of above-mentioned processing unit for processing handled object and the action that stops to supply with this liquid.
The storage medium stores of a technical scheme of the present invention has the program of utilizing control device to carry out, this control device is controlled liquid handling device, this liquid handling device uses the liquid that has been conditioned temperature to handle handled object, by utilizing above-mentioned control device to carry out said procedure, make liquid handling device implement the method for treating liquids of a technical scheme of the invention described above.
Description of drawings
Fig. 1 is the integrally-built figure that roughly represents the liquid handling device of one embodiment of the present invention.
Fig. 2 is near the figure of the pipe arrangement class A of geometric unitA the processing unit of liquid handling device of presentation graphs 1.
Fig. 3 is the longitudinal section of processing unit of the liquid handling device of presentation graphs 1.
Fig. 4 is the vertical view of supporting member of the processing unit of Fig. 1.
Fig. 5 is the flow chart that is used to illustrate an example of the method for treating liquids that the liquid handling device that adopts Fig. 1 is implemented.
Fig. 6 is the flow chart of action that is used to illustrate the liquid handling device of the Fig. 1 when handled object is implemented liquid handling.
Fig. 7 is and the corresponding figure of Fig. 2 one variation of express liquid processing unit.
Fig. 8 is and the corresponding figure of Fig. 2 another variation of express liquid processing unit.
Fig. 9 is the figure of the variation of the arm (partition member) that is used to illustrate supporting member.
Embodiment
Below, with reference to the description of drawings one embodiment of the present invention.In addition, in the accompanying drawing that this specification added, diagram and understanding for convenience, the engineer's scale of appropriate change material object and size in length and breadth than etc. and represent turgidly.
Fig. 1～Fig. 6 is the figure that is used to illustrate one embodiment of the present invention, and Fig. 7～Fig. 9 is the figure of variation that is used for the execution mode of key diagram 1～shown in Figure 6 in addition.Wherein Fig. 1 is the integrally-built figure of express liquid processing unit roughly.Fig. 2 will represent the figure in this zone in more detail with the amplification of chain-dotted line area surrounded among Fig. 1.Fig. 3 and Fig. 4 represent to be encased in 1 longitudinal section and vertical view in the processing unit in the liquid handling device respectively.
In addition, in following execution mode, expression is applied in the present invention the example of the clean of semiconductor crystal wafer (example of handled object).And,, be that discoideus wafer is implemented the processing of adopting soup to carry out, processing and the dry processing of carrying out with liquid of employing of adopting pure water to carry out to handled object as clean.Wherein, drying is used to the temperature that is higher than soup and pure water with liquid heat.But the present invention is not limited in the clean that is applied in wafer certainly.
As Fig. 1～shown in Figure 4, liquid handling device 10 comprises the 1st supply pipeline 30 that the 1st liquid feed mechanism 15 that is used to supply with the 1st liquid, the 2nd liquid feed mechanism 40 that is used to supply with the 2nd liquid, an end be connected with the 1st liquid feed mechanism 15, the 2nd supply pipeline 45 that an end is connected with the 2nd liquid feed mechanism 40 and utilizes the 1st liquid and the 2nd liquid is handled the processing unit 50 of wafer W.In addition, liquid handling device 10 also comprises reflux pipeline 35, and an end of this reflux pipeline 35 is connected with pipeloop 20, is used for making the 1st liquid that is fed into the 1st supply pipeline 30 to turn back in the 1st liquid feed mechanism 15.In addition, liquid handling device 10 also comprises the action of each member of formation that is used for controlling liquid processing unit 10, the control device 12 of liquid flow path.In illustrated embodiment, in liquid handling device 10, be provided with many (for example 8) processing unit 50, the 1 supply pipelines 30 and the 2nd supply pipeline 45 and extend in the each processing unit 50.
Wherein, feed system from the 1st liquid to processing unit 50 that supply with at first is described.In addition, in following example, supply with dry with liquid be the 1st liquid, more specifically to supply with IPA (isopropyl alcohol) be the 1st liquid.
As shown in Figure 1, the 1st liquid feed mechanism 15 comprises the pipeloop 20 of ring-type and is arranged on conveying mechanism (for example pump) 26 on the pipeloop 20.Wherein, the circulating path 24 that pipeloop 20 comprises the 1st liquid supply source 22 that is used to supply with the 1st liquid that has been conditioned temperature and the 1st liquid of the temperature that can make from being conditioned of supplying with of the 1st liquid supply source 22 circulates.
The supplementary mechanism (not shown) that the 1st liquid supply source 22 comprises the storage facility 22a that can store the 1st liquid and is used for replenishing to storage facility 22a the 1st liquid that has been conditioned temperature.Storage facility 22a for example is made of jar.The two ends of circulating path 24 are connected with storage facility 22a, can make the 1st liquid circulation of supplying with from the 1st liquid supply source 22.
In addition, the 1st liquid feed mechanism 15 supplies to the 1st liquid respectively in many processing units 50 via the 1st supply pipeline 30.And along with the 1st liquid from the pipeloop 20 of the 1st liquid feed mechanism 15 is consumed, the supplementary mechanism of the 1st liquid supply source 22 replenishes the 1st liquid to pipeloop 20.As an example, can make supplementary mechanism in trend storage facility 22a, replenish the 1st liquid according to the liquid measure in the storage facility 22a.
In illustrated embodiment, the 1st liquid supply source 22 also comprises the thermoregulation mechanism 22b of the temperature that is used to regulate the 1st liquid in the storage facility 22a.Promptly, the 1st liquid supply source 22 can not only replenish the 1st liquid that has been conditioned temperature, can also just regulate in circulating path 24 temperature of the 1st liquid of circulation and then the 1st liquid is supplied in the circulating path 24 according to needs to pipeloop 20.In addition, as mentioned above, in the present embodiment, thermoregulation mechanism 22b constitutes heating arrangements, heats the 1st liquid and is used as adjustment that the 1st liquid is carried out.Thereby, in following present embodiment, also thermoregulation mechanism 22b is called heating arrangements 22b.
Conveying mechanism 26 for example is made of pump, and is installed on the circulating path 24.Conveying mechanism 26 drives the 1st liquid, circulates in circulating path 24 can make the 1st liquid after the 1st liquid supply source 22 is fed into heating in the circulating path 24.Thereby the 1st liquid that utilizes conveying mechanism 26 to export can circulate in pipeloop 20 and be back to conveying mechanism 26 once more.
Next, the 1st supply pipeline 30 and reflux pipeline 35 are described.As shown in Figure 1, circulating path 24 branches of many articles the 1st supply pipeline 30 self-loopa pipelines 20 and extend to pairing processing unit 50.With each the 1st supply pipeline 30 many reflux pipelines 35 are set accordingly.The 1st liquid that each reflux pipeline 35 can make self-loopa pipeline 20 flow in pairing the 1st supply pipeline 30 turns back in the pipeloop 20.
As shown in Figures 2 and 3, the 1st supply pipeline 30 has the ejection opening 30a that is used to spray the 1st liquid.Ejection opening 30a constitutes the nozzle of arm 62 supportings of processed unit 50, and as described later, can spraying the 1st liquid after opening 30a will heat certainly, to spray to handled object be wafer W.
As shown in Figure 2, than the link position of the 1st supply pipeline 30 and reflux pipeline 35 by at least one interval in the position of upstream side in, the 1st supply pipeline 30 is separated into many pipeline ground extensions.Control device 12 is operated by the switching to many pipelines, can control the amount that self-loopa pipeline 20 flows into the 1st liquid in the 1st supply pipeline 30.
In example shown in Figure 2, the 1st supply pipeline 30 is separated into 2 pipelines i.e. the 1st pipeline 31a and the 2nd pipeline 31b that extends side by side with the 1st pipeline 31a.On the 1st pipeline 31a, be provided with and regulate the flow control valve (for example needle-valve) 32 of aperture in manual mode in advance.In addition, the link position of the position outside the interval on the 1st supply pipeline 30, that be divided into many pipeline 31a, 31b and ratio the 1st supply pipeline 30 and reflux pipeline 35 leans on the position of upstream side also to be provided with and can regulate the flow control valve 37 of aperture in manual mode in advance.In addition, as shown in Figure 2, near the 1st supply pipeline 30 the upstream side of flow control valve 37, be provided with the flowmeter 36 of the amount that is used to measure the 1st liquid that in the 1st supply pipeline 30, flows.
On the other hand, on the 2nd pipeline 31b, be provided with the open and close valve 33 that can utilize the stream pressure to drive and carry out on-off action.Open and close valve 33 for example carries out on-off action by utilizing air to press driving pneumatic operated valve (air-operated valve) constitutes.On-off action by control device 12 these open and close valves 33 of control.
Adopt said structure,, the 1st liquid is flowed with two kinds of different flows in the 1st supply pipeline 30 only by open and close valve 33 is opened or closed.Specifically, utilize flow control valve 32 that the maximum stream flow of the 1st pipeline 31a is set at A (l/min), and utilize flow control valve 37 that the maximum stream flow of the 1st supply pipeline 30 is set at B (l/min).In addition, the 2nd pipeline 31b is designed to make liquid with (B-A) (l/min) above traffic flow.In this example, can open and close valve 33 open during in make B (l/min) the 1st liquid in the 1st supply pipeline 30, flow.In addition, the 1st liquid is flowed in the 1st supply pipeline 30 with the flow of A (l/min).In addition, here " A " and " B " is the numerical value of expression flow (l/min).
On the other hand, as shown in Figures 2 and 3, the end of the upstream side of each reflux pipeline 35 is connected via stream controlling organization 38 and pairing the 1st supply pipeline 30 midway.That is to say, each reflux pipeline 35 is connected with pairing the 1st supply pipeline 30 on a certain position between the ejection opening 30a of the end of a side that is connected with pipeloop 20 of pairing the 1st supply pipeline 30 and pairing the 1st supply pipeline 30, in the present embodiment, especially there is being the above-mentioned one interval position of a plurality of pipeline 31a, 31b to be connected by the downstream than cutting apart.Control device 12 can control whether spray the 1st liquid from the ejection opening 30a of the 1st supply pipeline 30 by control stream controlling organization 38 (liquid that more specifically is stream controlling organization 38 described later is supplied with transfer valve 38a).
In illustrated embodiment, stream controlling organization 38 can flow into self-loopa pipeline 20 liquid selective ground in the 1st supply pipeline 30 and keep any one state in the following state: further flow in the 1st supply pipeline 30 and flow to the state of ejection opening 30a and do not flow to the state that sprays opening 30a but flow to reflux pipeline 35.As a concrete example of above-mentioned stream controlling organization, illustrated stream controlling organization 38 comprises the triple valve 38a that is arranged on the 1st supply pipeline 30 and also is connected with an end of reflux pipeline 35 and is arranged on open and close valve 38b on the reflux pipeline 35.Can utilize fluid pressure actuated and carry out the valve of on-off action as equal, triple valve 38a and open and close valve 38b are for example by being pressed the pneumatic operated valve that drives and carry out on-off action to constitute by air.
Triple valve 38a can keep following state: the state that makes the 1st supply pipeline 30 of state that reflux pipeline 35 is communicated with the 1st supply pipeline 30 of upstream side (pipeloop 20 sides) and upstream side not only be communicated with but also be communicated with the 1st supply pipeline 30 of downstream (processing unit 50 sides) with reflux pipeline 35.Promptly, in illustrated embodiment, triple valve 38a supplies with transfer valve as the liquid that switches following actions and plays a role: supply with the action of the liquid that is used for handling handled object in processing unit and the action that stops to supply with this liquid.Thereby the triple valve 38a that also will constitute stream controlling organization 38 is called liquid and supplies with transfer valve 38a.
The change action of the two states of 12 pairs of liquid supplies of control device transfer valve (triple valve) 38a and the on-off action of open and close valve 38b are controlled.Specifically, the action of controlling liquid supply transfer valve 38a and open and close valve 38b as described as follows.In that being maintained in, stream controlling organization 38 make self-loopa pipeline 20 flow into that liquid in the 1st supply pipeline 30 further flows in the 1st supply pipeline 30 and when flowing to the state of ejection opening 30a, liquid is supplied with transfer valve 38a and is retained three direction opened state, and open and close valve 38b is retained closed condition.Promptly, be held in three direction opened state by liquid being supplied with transfer valve 38a, can guarantee will supply with than liquid transfer valve 38a supply with the stream that transfer valve 38a couples together by the 1st supply pipeline 30 in downstream by the 1st supply pipeline 30 of upstream side and than liquid, thereby form the state that the 1st liquid that is used for handling trap apparatus can be supplied to processing unit 50.
In addition, preferably supply with transfer valve 38a and dispose open and close valve 38b contiguously with liquid.This be because, supply with at liquid that transfer valve 38a is retained three direction opened state and open and close valve 38b is under the closing state, the 1st liquid that can not rests between triple valve 38a and the open and close valve 38b.
On the other hand, when stream controlling organization 38 being maintained in the state that makes the flow direction reflux pipeline 35 in self-loopa pipeline 20 inflows the 1st supply pipeline 30, liquid is supplied with transfer valve 38a and is retained a both direction opened state, and open and close valve 38b is retained open state.Promptly, be maintained in 30 states that are connected with reflux pipeline 35 of the 1st supply pipeline by upstream side that make than liquid supply transfer valve 38a by liquid being supplied with transfer valve 38a, can cut off and to supply with transfer valve 38a than liquid and supply with the stream that transfer valve 38a couples together by the 1st supply pipeline 30 in downstream, thereby form state from the 1st liquid that is used to handle trap apparatus to processing unit 50 that to supply with by the 1st supply pipeline 30 of upstream side and than liquid.
In addition, in example shown in Figure 1, many reflux pipelines 35 collaborate each other and are connected with the pipeloop 20 of the 1st liquid feed mechanism 15.More specifically, the end of reflux pipeline 35 is connected with the circulating path 24 of pipeloop 20.Collaborate each other and when being connected at above-mentioned like that many reflux pipelines 35, can effectively save and be used to be provided with the required space of many reflux pipelines 35 with pipeloop 20.But the present invention is not limited to this example, many reflux pipeline 35 also can be connected with the 1st liquid feed mechanism 15 respectively independently, in addition, reflux pipeline 35 can also be at the position except that circulating path 24, for example in storage facility 22a, be connected and the 1st liquid turned back among the storage facility 22a with the 1st liquid feed mechanism 15.
As shown in Figure 1, the link position of reflux pipeline 35 and pipeloop 20 than pipeloop 20 with many link position of the 1st supply pipeline 30 in article the 1st supply pipeline 30, the downstream of pipeloop 20 by the downstream.On the pipeloop 20 between the link position of the 1st supply pipeline 30 in the link position of reflux pipeline 35 and pipeloop 20 and pipeloop 20 and downstream, be provided with the 1st overflow valve 39a.In addition, on the reflux pipeline 35, preferably with the link position of pipeloop 20 near reflux pipeline 35 on be provided with the 2nd overflow valve 39b.And the setting pressure of the 1st overflow valve 39a is than the setting pressure height of the 2nd overflow valve 39b.Promptly, the pressure of the 1st liquid in the reflux pipeline 35 be configured to than with zone that the 1st supply pipeline 30 is connected in pipeloop 20 in the pressure of the 1st liquid low.
In addition, be upstream side and the downstream that benchmark is judged pipeloop 20 with the liquid stream of the 1st liquid in pipeloop 20 after the heating.Be benchmark promptly, with the liquid stream the 1st liquid, in pipeloop 20 that is fed into from the 1st liquid supply source 22 in the circulating path 24, regard storage facility 22a and the link position of the pipeline that constitutes circulating path 24 the upstream side of pipeloop 20 as, will be from this link position (upstream side position) the liquid diffluence along the 1st liquid towards regard as go downstream towards.
Next, the feed system that is used for the 2nd liquid is supplied to processing unit 50 is described.As mentioned above, supply with the 2nd liquid from the 2nd liquid feed mechanism 40.Between the 2nd liquid feed mechanism 40 and each processing unit 50, be respectively equipped with the 2nd supply pipeline 45.As shown in Figure 3 and Figure 4, the 2nd supply pipeline 45 has the ejection opening 45a that is used to spray the 2nd liquid.Ejection opening 45a constitutes the nozzle of arm 62 supportings of processed unit 50.
In the present embodiment of the cleaning device that constitutes wafer W, the 2nd liquid feed mechanism 40 can be supplied with and for example be used for wafer W is carried out the soup (diluted hydrofluoric acid, ammoniacal liquor/hydrogen peroxide (SC1), hydrogen peroxide/hydrochloric acid (SC2)) that soup handles and is used for wafer W is washed the water of processing, particularly pure water (DIW) as the 2nd liquid.
In addition, can adopt known feed system, omit further detailed description here as the feed system that is used for the 2nd liquid is supplied to processing unit 50.
Next, the processing unit 50 that uses the 1st liquid and the 2nd liquid to handle wafer W is described.As shown in Figure 3 and Figure 4, each processing unit 50 comprises: maintaining body 52, and it is used to keep wafer W; Supporting member 60, it is used to support the ejection opening 30a of the 1st supply pipeline 30 and the ejection opening 45a of the 2nd supply pipeline 45; Partition wall 54, its delimitation are used for process chamber that handled object is handled.
As shown in Figure 3, maintaining body 52 can be so that the surface of wafer W keeps wafer W along general horizontal direction ground, and can to make the wafer W that kept be that axis is rotated with the center of the wafer W that is made of discoideus shape.
As shown in Figure 3 and Figure 4, supporting member 60 be constituted as the ejection opening 30a, the 45a that are supported can be to the processing position (position among Fig. 4 shown in the solid line) that is held the wafer W feed fluid that mechanism 52 keeps and handle certainly between the non-processing position (position among Fig. 4 shown in the double dot dash line) of position deviation and move.
In illustrated embodiment, supporting member 60 comprises rotatable tubular shaft component 64 and the arm 62 that is connected and can swings along with the rotation of tubular shaft component 64 with tubular shaft component 64.The ejection opening 45a of the ejection opening 30a of the 1st supply pipeline 30 and the 2nd supply pipeline 45 is supported among zone (zone of the leading section) 62a of an end of arm 62.One end of the tubular shaft component 64 that arm 62 extends with running through partition wall 54 in the 62b of the zone (zone of base end part) of the other end is connected.Tubular shaft component 64 is cylindric, and to be retained can be center rotation with the central axis of this tubular shaft component 64.Adopt said structure, as shown in Figure 4, ejection opening 30a, the 45a that is supported member 60 supportings can be configured in as handle the position, face on the position at wafer W center from the top.In addition, ejection opening 30a, 45a can be configured in as non-processing position, from the upper area of wafer W along on the position of lateral run-out wafer W.
Can be in processing procedure ejection opening 30a, the 45a of supply pipeline 30,45 the mode above the wafer W of being configured in will be sprayed among the front end region 62a that opening 30a, 45a be bearing in arm 62.Therefore, as shown in Figure 3 and Figure 4, near the part of opening 30a, 45a that sprays at least in the supply pipeline 30,45 is extended along supporting member 60.In the present embodiment, the 1st supply pipeline 30 and the 2nd supply pipeline 45 roughly extend along arm 62 side by side.But as shown in Figure 3, the 1st supply pipeline 30 extends in a side of arm 62, and the 2nd supply pipeline 45 extends at the opposite side of arm 62.Promptly, the arm 62 of supporting member 60 constitutes the partition member 63 that extends between the 1st supply pipeline 30 and the 2nd supply pipeline 45, be used to separate the path of the 1st supply pipeline 30 and the path that the 2nd supply pipeline 45 is passed through.Specifically, the 1st supply pipeline 30 extends at the upside of partition member 63 with the state that is separated member 63 supportings, and the 2nd supply pipeline 45 extends at the downside of partition member 63 with the state that is separated member 63 supportings.
In addition, as shown in Figure 3 and Figure 4, the part of supporting member 60 constitutes tubular cylindrical portion 66.And, one square tube of the 1st supply pipeline 30 and the 2nd supply pipeline 45 crosses the inside of cylindrical portion 66 of supporting member 60 and the opposing party of extending to pairing liquid feed mechanism 15,40, the 1 supply pipelines 30 and the 2nd supply pipeline 45 outside by the cylindrical portion 66 of supporting member 60 extends to pairing liquid feed mechanism 15,40.
Specifically, the tubular shaft component 64 of supporting member 60 forms the position of cylindrical portion 66.And, the base end part of the arm 62 that is connected with tubular shaft component 64 zone 62b, be the position that the part of partition member 63 forms cylindrical portion 66.And the 2nd supply pipeline 45 is by the inside of this cylindrical portion 66.Specifically, as shown in Figure 3, the 2nd supply pipeline 45 is supported with the arm 62 of ejection opening 45a certainly by the inside that is formed on the cylindrical portion 66 on the arm 62 front end region 62a extends to base end part zone 62b.And, as shown in Figure 3, the inside of the cylindrical portion 66 that is made of the part of arm 62 is connected with the inside of the cylindrical portion 66 that is made of tubular shaft component 64, and the inside of the cylindrical portion 66 that the part of the 2nd supply pipeline 45 free arms 62 constitutes extends into the inside of the cylindrical portion 66 that is made of tubular shaft component 64.Afterwards, as shown in Figure 3, the 2nd supply pipeline 45 crosses the partition wall 54 of processing unit 50 by the inside of the cylindrical portion 66 that is made of tubular shaft component 64.
On the other hand, as shown in Figure 3 and Figure 4, the outside of the cylindrical portion 66 that the 1st supply pipeline 30 constitutes by the part by arm 62 and extend to base end part zone 62b from the front end region 62a of arm 62.The 1st supply pipeline 30 leaves and runs through partition wall 54 from supporting member 60 at the base end part of arm 62 zone 62b.In addition, the part that does not form cylindrical portion 66 of arm 62 (partition member 63) is tabular.As mentioned above, forming in the tabular zone of arm 62 (partition member 63), also arm 62 (partition member 63) is clipped between the 1st supply pipeline 30 and the 2nd supply pipeline 45 and separate configuration the 1st supply pipeline 30 and the 2nd supply pipeline 45.
In addition, control device 12 is connected with the input/output unit that is made of keyboard, display etc., this keyboard waits the operations such as input of carrying out order with management liquid handling device 10 for the process management person, and this display shows the operational situation of liquid handling device 10 visually.In addition, control device 12 can access storage media 13, and this storage medium 13 stores the program that is used to realize to utilize the processing that liquid handling device 10 carries out etc.Can utilize known program recorded medium formation storage mediums 13 such as disk storage medium such as memories such as ROM and RAM, hard disk, CD-ROM, DVD-ROM and floppy disk.
Next, one example of the method for treating liquids that can adopt liquid handling device 10 execution that are made of said structure is described.In the method for treating liquids of following explanation, as shown in Figure 5, in 1 processing unit 50, the wafer W as handled object is implemented clean.And, the use in a series of method for treating liquids shown in Figure 5 among the treatment process S3 of the 1st liquid, use the 1st liquid after the heating that the 1st liquid feed mechanism 15 of aforesaid liquid processing unit 10 is supplied with that wafer W is handled.In the following description, with reference to flow chart shown in Figure 5 the method for treating liquids of in 1 processing unit 50 wafer W being implemented is described roughly on one side at first on one side, the action of the liquid handling device 10 that is associated with the treatment process S 3 that has used the 1st liquid is described then.
In addition, according to the program in the program recorded medium 13 of being stored in advance from controlling device 12 output control signals and being used to carry out the action of each member of formation of following method for treating liquids according to this control signal control.
As shown in Figure 5, the wafer W that at first will be implemented clean puts into the each processing unit 50 of liquid handling device 10, and utilizes maintaining body 52 that wafer W is remained in the each processing unit 5 (operation S1).
Next, use the 2nd liquid to implement the operation S2 that wafer W is handled.Concrete example as the processing of having used the 2nd liquid carries out following processing.At first, supply with diluted hydrofluoric acid (DHF) as the 2nd liquid from the 2nd liquid feed mechanism 40, thereby wafer W is carried out etch processes.Then, supply with pure water (DIW) as the 2nd liquid from the 2nd liquid feed mechanism 40, thereby wafer W is washed processing.Like this, can use two kind of the 2nd liquid that wafer W is implemented to handle.In addition, in this example, do not heat the 2nd liquid of supplying with from the 2nd liquid feed mechanism 40 and use the 2nd liquid in processing unit 50, wafer W to be handled.
Then, the operation S3 (operation S3) that uses the 1st liquid enforcement after heating that wafer W is handled.As the concrete example that uses the 1st liquid to handle, the wafer W that handles to the flushing of etch processes that has been implemented diluted hydrofluoric acid (DHF) and pure water supplies with the IPA that is heated to about 45～60 ℃.Thus, the pure water that remains on the wafer W is replaced to IPA, and further make IPA go up evaporation from wafer W.Promptly, use the IPA after heating that wafer W is implemented dried.By using the IPA after heating, can when being evaporated, reduce IPA the heat that absorbs from wafer W on wafer W.Thereby the temperature that can suppress wafer W descends, and is difficult for producing on wafer the dewfall that can cause ripple.
By aforesaid operations, the clean of the wafer W in 1 processing unit 50 that is through with is handled unit 50 certainly and is taken out of the wafer W (operation S4) that disposes.
Next, illustrate with use heating after the action that comes liquid handling device 10 that the operation S3 that wafer W handles is associated of the 1st liquid.
At first, as shown in Figure 6, before the above-mentioned operation S3 that the 1st liquid after using heating is handled wafer W in processing unit, these two preparatory process of operation Sp2 that the 1st liquid after implementing to be used to prepare the operation Sp1 of the 1st liquid earlier and using heating carries out preheating.
In addition, see aftermentioned for details, these two preparatory process of operation Sp2 that the 1st liquid after preparing the operation Sp1 of the 1st liquid and using heating carries out preheating can not influence the wafer W that above-mentioned use the 2nd liquid carries out treatment process S2, wafer W move into operation S1.On the other hand, must be used for finishing two preparatory process Sp1, Sp2 before the operation S3 that in processing unit 50, uses the 1st liquid to come wafer W is handled.Thereby, these two operations of operation Sp2 that the 1st liquid after preparing the operation Sp1 of the 1st liquid and using heating carries out preheating both can the above-mentioned operation S1 that moves into wafer W, use the 2nd liquid that wafer W is handled operation S2 before carry out, also can carry out simultaneously with above-mentioned operation S1, S2.
At first, the operation Sp1 that is used to prepare the 1st liquid is described.In this operation Sp1, the 1st liquid filling in pipeloop 20, is extended many 1st supply pipelines 30 that are connected with each processing unit 50 respectively on this pipeloop 20.Specifically, the not shown supplementary mechanism from the 1st liquid supply source 22 supplies to the 1st liquid in the storage facility 22a.Preferably the 1st liquid in supplementary mechanism supplies to storage facility 22a is heated to set point of temperature in advance.In addition, heating arrangements 22b also heats the 1st liquid that is fed in the storage facility 22a.Like this, can be in the storage facility 22a and circulating path 24 of pipeloop 20 with the 1st liquid filling after the heating.In addition, in this example, after having filled the 1st liquid or when filling the 1st liquid, make conveying mechanism 26 actions, thereby the 1st liquid is circulated in pipeloop 20.
In addition, after operation in, under the state that the 1st liquid after the driving that utilizes conveying mechanism 26 makes heating circulates in the pipeloop 20 of the 1st liquid feed mechanism 15, the 1st liquid after the heating is flowed in each pipeline of many articles the 1st supply pipelines 30 from the pipeloop 20 of the 1st liquid feed mechanism 15.Then, spray the 1st liquid and continue to consume the 1st liquid from the ejection opening 30a of the 1st supply pipeline 30.In this period, be encased in not shown supplementary mechanism in the 1st liquid feed mechanism 15, the 1st liquid supply source 22 and replenish the 1st liquid to pipeloop 20, and the 1st liquid in the heating arrangements 22b heat cycles pipeline 20 becomes temperature in the desired temperatures territory thereby can continue adjustment with the 1st liquid.
Then, the 1st liquid heat after the use heating is used for supplying with to processing unit 50 feed system (operation Sp2) of the 1st liquid.Specifically, just in the pipeloop 20 at the 1st liquid feed mechanism 15 under the state of circulation, the 1st liquid self-loopa pipeline 20 is flowed in the 1st supply pipeline 30 at the 1st liquid after the heating.So, utilize the 1st liquid after the heating that the stream that the stream of the 1st liquid is preheating to the 1st liquid is reached the temperature identical with the temperature of the 1st liquid.
As mentioned above, liquid handling device 10 has and is used for making the 1st liquid that flows into the 1st supply pipeline 30 to turn back to reflux pipeline 35 in the pipeloop 20.And, in during the operation Sp 1 before operation Sp2 is carried out in this operation Sp2 and above-mentioned being about to, be arranged on the 1st supply pipeline 30 and stream controlling organization 38 between the reflux pipeline 35 position of supplying with transfer valve (triple valve) 38a than the liquid that constitutes stream controlling organization 38 is connected with reflux pipeline 35 by the 1st supply pipeline 30 of upstream side.In addition, utilize the 1st overflow valve 39a and the 2nd overflow valve 39b that the pressure of the 1st liquid in the reflux pipeline 35 is adjusted to the pressure that is lower than in the pipeloop 20.As a result, the 1st liquid that self-loopa pipeline 20 is flowed in the 1st supply pipeline 30 turns back in the pipeloop 20 once more through reflux pipeline 35.Promptly, with the circulating path of the 1st liquid that constitutes by pipeloop 20 differently forms in addition the part of the part that comprises pipeloop 20, the 1st supply pipeline 30 and reflux pipeline 35, heating is with the 2nd circulating path of (using for preheating in the present embodiment), and the 1st liquid after the heating is stably circulated in the 2nd circulating path.
By the 1st liquid after the heating is circulated in circulating path in preheating, can be used for to part feed system, that constitute the circulating path that preheating uses that processing unit 50 is supplied with the 1st liquid be heated to heat after the identical temperature of temperature of the 1st liquid.Promptly, the part of the 1st supply pipeline 30 and reflux pipeline 35 can be heated to heat after the identical temperature of temperature of the 1st liquid.In addition, the liquid of stream controlling organization 38 is supplied with transfer valve (triple valve) 38a and open and close valve 38b also is arranged on preheating with on the circulating path.Promptly, in this operation Sp2, can carry out preheating to the bigger valve class A of geometric unitA of thermal capacity.
In addition, in this preheating procedure Sp2, the open and close valve 33 that is arranged on the 2nd pipeline 31b of the 1st supply pipeline 30 is in open mode.Thereby the 1st liquid flows in the mode of all passing through in the 1st pipeline 31a and these 2 pipelines of the 2nd pipeline 31b.By the flow control valve 37 of regulating manual type in advance, can set self-loopa pipeline 20 and flow into the flow of the 1st liquid in the 1st supply pipeline 30 and can utilize flowmeter 36 these flows of monitoring.
In addition, in this example, in above-mentioned filling work procedure Sp1, liquid is supplied with transfer valve (triple valve) 38a and is also stopped to supply with the 1st liquid to processing unit 50, therefore the upstream side of the 1st supply pipeline 30 is connected with reflux pipeline 35.Thereby, in filling work procedure Sp1, can utilize a part and valve 38a, the 38b of the 1st liquid heat the 1st supply pipeline 30 of heating equally while filling.In this, also can implement to be used to the operation Sp2 for preparing the operation Sp 1 of the 1st liquid and use the 1st liquid preheating the 1st supply pipeline 30 simultaneously.
After preheating procedure Sp2, transfer valve 38a, 38b and the 1st liquid after the ejection opening 30a of the 1st supply pipeline 30 ejection heating is implemented the above-mentioned operation S3 that wafer W is handled.Specifically, the liquid of stream controlling organization 38 supply transfer valve 38a makes the upstream side of the 1st supply pipeline 30 be connected with the downstream of the 1st supply pipeline 30 but not is connected with reflux pipeline 35.At this moment, the wafer W in the processing unit 50 are held mechanism 52 and keep and be held mechanism 52 driving and rotating.So, can be supported certainly member 60 be bearing in rotate in 1st liquid of ejection opening 30a after wafer W ejection heating of the processing position faced of wafer W.
In addition, also can spray certainly opening 30a spray the 1st liquid during in make supporting member 60 swing so that ejection opening 30a from the face of the position of the central part of wafer W to position scanning in the face of the circumference of wafer W.In addition, also can near ejection opening 30a, be provided for spraying the ejiction opening of non-active gas (for example nitrogen), thereby can spray non-active gas, can promote further that thus the 1st liquid is dried with the 1st liquid.
As mentioned above, in the preheating procedure Sp2 that carries out in advance, the 1st supply pipeline 30 and liquid supply with transfer valve 38a be preheated to heat after the roughly the same temperature of temperature of the 1st liquid.And, as shown in Figure 3, be used to form preheating and near ejection opening 30a, be connected with the 1st supply pipeline 30 with the reflux pipeline 35 of circulating path.
In addition, in this treatment process S3, the open and close valve 33 that is arranged on the 2nd pipeline 31b of the 1st supply pipeline 30 is in closed condition.Thereby the 1st liquid only flows by the 1st pipeline 31a ground among the 1st pipeline 31a and the 2nd pipeline 31b.And,, can set self-loopa pipeline 20 and flow into the flow of the 1st liquid in the 1st supply pipeline 30 and can utilize flowmeter 36 these flows of monitoring by the flow control valve 32 of regulating manual type in advance.
Promptly, when in processing unit 50 and when being untreated wafer W, among pipeline 31a, the 31b more than 2 in many pipelines that the 1st liquid extends side by side in an interval that constitutes the 1st supply pipeline 30 by flowing.On the other hand, when in processing unit 50, handling wafer W, among a part of pipeline 31a in many pipelines that the 1st liquid only extends side by side in an interval that constitutes the 1st supply pipeline 30, that above-mentioned pipeline 31a, 31b more than 2 contained by flowing.The result, amount when wafer W is handled in the time per unit of the 1st liquid of the ejection opening 30a of pairing the 1st supply pipeline 30 ejection is compared, and the amount in the time per unit of the 1st liquid that flows in each reflux pipeline 35 during preheating the 1st supply pipeline 30 is more.
Adopt this kind method, can be with the 1st an amount of liquid handling wafer W.In addition, when preheating, can make the 1st liquid after the heating flow into the preheating that comprises the 1st supply pipeline 30 and reflux pipeline 35 and constitute with in the circulating path, can at short notice preheating be heated to the temperature identical with the temperature of the 1st liquid with circulating path thus with big flow.
And, the pipeline 31a that can pass through for the 1st liquid when using the 1st liquid to handle wafer W is the pipeline that constitutes preheating usefulness circulating path during at preheating the 1st supply pipeline 30, when beginning to handle, this pipeline 31a can be heated to the temperature identical with the temperature of the 1st liquid.Thereby the temperature that can suppress the 1st liquid changes when using the 1st liquid handling wafer W, and the degree of treatment that can suppress wafer W thus effectively produces deviation.
In addition, the 1st supply pipeline 30 and temperature 2nd supply pipeline 45 different with the 1st liquid for the 1st liquid flow after the heating extends in the each processing unit 50.And the 1st supply pipeline 30 and the 2nd supply pipeline 45 all are supported member 60 supportings, and roughly extend side by side.Wherein, in the present embodiment, the 2nd supply pipeline 45 extends in the mode of passing through in the inside of the cylindrical portion 66 of supporting member 60, and the 1st supply pipeline 30 extends in the mode of passing through in the outside of the cylindrical portion 66 of supporting member 60.Particularly the 2nd supply pipeline 45 crosses the partition wall 54 that is used to delimit process chamber by the inside of cylindrical portion 66, extends outside the path setting degree of freedom of the 1st supply pipeline 30,45 significantly is higher than process chamber in the process chamber then.And between the 1st supply pipeline 30 and the 2nd supply pipeline 45, just extended to form the partition member 63 that constitutes by arm 62 originally, thereby being separated member 63, the path of the path of the 1st supply pipeline 30 and the 2nd supply pipeline 45 separates.Promptly, among the front end region 62a of the arm that is not formed with cylindrical portion 66 62 in supporting member 60, the 1st supply pipeline 30 and the 2nd supply pipeline 45 clip the partition member 63 that is made of arm 62 and extend in a mutually different side of partition member 63.Adopt said structure, can be suppressed at the heat that takes place between the 2nd interior liquid of the 1st liquid and the 2nd supply pipeline 45 in the 1st supply pipeline 30 extremely effectively and move.Thereby, can spray the 1st liquid with desired temperatures from the ejection opening 30a of the 1st supply pipeline 30, and can spray the 2nd liquid with desired temperatures from the ejection opening 45a of the 2nd supply pipeline 45.
The liquid supply transfer valve 38a that utilization is set on the 1st supply pipeline 30 makes the 1st supply pipeline 30 of upstream side be connected with reflux pipeline 35, thereby stop the 1st liquid after processing unit 50 is supplied with heating, finish the above-mentioned treatment process S3 that has used the wafer W of the 1st liquid thus.At this moment, the open and close valve 38b on the reflux pipeline 35 supplies with the action of transfer valve 38a along with liquid and opens.The result, can form the adjustment circulating path (heating circulating path) that contains the 1st supply pipeline 30 and reflux pipeline 35 once more, thereby the 1st liquid that self-loopa pipeline 20 is flowed in the 1st supply pipeline 30 is used in the circulating path in this heating mobile.
Promptly, as shown in Figure 6, begin to carry out adjustment operation (heating process) Sp2 once more.Can in the following period, carry out this heating process Sp2, promptly, should processed wafer be transported to the next one in the processing unit 50 and the use that finishes this wafer W is carried out after the processing of the 2nd liquid before processing (operation S3) beginning of using the 1st liquid should processed wafer W to the next one to carry out.Like this, by carrying out heating process Sp2 and the treatment process S3 that has used the 1st liquid repeatedly, keep the 1st supply pipeline 30 and liquid in can be between the implementation period of the treatment process S3 that has used the 1st liquid and supply with the temperature of transfer valve 38a, as a result, the temperature that can effectively suppress the 1st liquid supplied with to wafer W in the treatment process S3 that has used the 1st liquid changes.
As mentioned above, the liquid handling device 10 of present embodiment comprises: the 1st liquid feed mechanism 15, and it is used for feed fluid; The 1st supply pipeline 30, it is connected with the 1st liquid feed mechanism 15 and has the ejection opening 30a that is used to spray the liquid that has been conditioned temperature; Processing unit 50, it supports the 1st supply pipeline 30, and can use from the liquid that has been conditioned temperature of the ejection opening 30a of the 1st supply pipeline 30 ejection trap apparatus is handled; Reflux pipeline 35, it is used for making the liquid that is fed into the 1st supply pipeline 30 to turn back in the 1st liquid feed mechanism 15; Liquid is supplied with transfer valve 38a, 34, it is arranged on the 1st supply pipeline 30, be used for switching supplying with to ejection opening 30a and be used for handling the action of liquid of trap apparatus and the action that stops to supply with this liquid at processing unit 50, liquid is supplied with transfer valve 38a, 34 and is arranged in from the 1st supply pipeline 30 and turns back to via reflux pipeline 35 on the path of liquid of the 1st liquid feed mechanism 15.In addition, the method for treating liquids of present embodiment comprises following operation: make the liquid that has been conditioned temperature that flows in the 1st supply pipeline 30 from the 1st liquid feed mechanism 15 turn back in the 1st liquid feed mechanism 15 via reflux pipeline 35, thereby the liquid that has been conditioned temperature is circulated in the path that comprises the 1st supply pipeline 30 and reflux pipeline 35, regulate the temperature of the 1st supply pipeline 30 thus; And, trap apparatus is handled from the liquid that has been conditioned temperature of the ejection opening 30a of the 1st supply pipeline 30 ejection in the 1st liquid feed mechanism 15 inflows the 1st supply pipeline 30.This processing method is when regulating the temperature of the 1st supply pipeline 30, liquid is supplied with transfer valve 38a, 34 and also is conditioned temperature, this liquid is supplied with transfer valve 38a, 34 and is arranged on the 1st supply pipeline 30, is used for switching supplying with to ejection opening 30a being used for handling the action of liquid of trap apparatus and the action that stops to supply with this liquid at processing unit 50.
Promptly, in the present embodiment, make self-loopa pipeline 20 flow into the 1st liquid in the 1st supply pipeline 30 to turn back to reflux pipeline 35 in the pipeloop 20 owing to be provided with, therefore the 1st liquid after the heating can not only circulate in pipeloop 20 and can also circulate in the circulating path that comprises the 1st supply pipeline 30 and reflux pipeline 35.Thereby, bring into use before the 1st liquid handles wafer W at processing unit 50, can use after the heating the 1st liquid with at least a portion in the 1st supply pipeline 30 be preheating to heat after the identical temperature of temperature of the 1st liquid.
Particularly in the present embodiment, liquid supply with transfer valve 38a be arranged in from the 1st supply pipeline 30 turns back to the 1st liquid feed mechanism 15 via reflux pipeline 35 the preheating of the 1st liquid with circulating path on, this liquid is supplied with transfer valve 38a and is switched following actions, promptly, supply with and be used for handling the action of the 1st liquid of wafer W and the action that stops to supply with the 1st liquid at processing unit 50.And need not to supply with transfer valve 38a at the ratio liquid of the 1st supply pipeline 30 that extends usually in processing unit 50 leans on the position in downstream that the valve class A of geometric unitA is set in addition.Thereby shown in present embodiment, liquid is supplied with transfer valve 38a and form the valve class A of geometric unitA that is arranged on downstream on the 1st supply pipeline 30 from the 1st liquid to processing unit 50 that supply with.Therefore, before processing unit 50 begins to handle wafer W and processing unit 50 handle wafer W during in, can heat all the valve class A of geometric unitA on the 1st supply pipeline 30 that (preheating) be used for the 1st liquid after processing unit 50 is supplied with heating.Usually, the thermal capacity of valve class A of geometric unitA is much larger than the thermal capacity of the tubing member that constitutes the 1st supply pipeline 30.Thereby, adopt the above-mentioned present embodiment that can make the temperature stabilization of valve class A of geometric unitA, to compare with apparatus and method in the past, the temperature that can suppress to be used for to handle the 1st liquid after the heating of wafer W extremely effectively in processing unit 50 changes.
In addition, the liquid handling device 10 of present embodiment comprises: pipeloop 20, and it comprises the 1st liquid supply source 22 that is used to supply with the liquid that has been conditioned temperature and can make circulating path 24 from the liquid circulation of the 1st liquid supply source 22; Many articles the 1st supply pipelines 30, it is that circulating path 24 branches of self-loopa pipeline 20 form; A plurality of processing units 50, itself and each the 1st supply pipeline 30 are provided with accordingly and can use from the liquid that has been conditioned temperature of each the 1st supply pipeline 30 ejection and handle trap apparatus; And many reflux pipelines 35, its liquid that is used for making self-loopa pipeline 20 to flow into each the 1st supply pipeline 30 turns back in the pipeloop 20, each reflux pipeline 35 than pipeloop 20 with many link position of supply pipeline in the downstream in article the 1st supply pipeline 30 and lean on the position in downstream to be connected with pipeloop 20.In addition, the method for treating liquids of present embodiment comprises following operation: with liquid filling in pipeloop 20, the 1st liquid supply source 22 that this pipeloop 20 comprises the circulating path 24 that extends to form many articles the 1st supply pipelines 30 that are connected with each processing unit 50 respectively and is used for supplying with to circulating path 24 liquid that has been conditioned temperature; The liquid self-loopa pipeline 20 that has been conditioned temperature is flowed in each the 1st supply pipeline 30.This method the liquid that has been conditioned temperature flow in the 1st supply pipeline 30 during in, respectively in above-mentioned a plurality of processing units, make self-loopa pipeline 20 flow into the liquid that has been conditioned temperature in the 1st supply pipeline 30 via reflux pipeline 35 than pipeloop 20 with many link position of supply pipeline in the downstream in article the 1st supply pipeline 30 and turn back in the pipeloop 20 by the position in downstream, thereby the liquid that has been conditioned temperature is circulated in the path that comprises the 1st supply pipeline 30 and reflux pipeline 35, can regulate the temperature of the 1st supply pipeline 30 thus, the liquid that has been conditioned temperature that flows in the 1st supply pipeline 30 from the ejection opening 30a of the 1st supply pipeline 30 ejection self-loopa pipeline 20 is handled trap apparatus then.
Promptly, reflux pipeline 35 than pipeloop 20 with many link position of the 1st supply pipeline 30 in the downstream in article the 1st supply pipeline 30 and are connected with pipeloop 20 by the position in downstream, be that benchmark is determined above-mentioned downstream to be fed into the liquid stream of liquid in pipeloop 20 in the circulating path from the 1st liquid supply source 22.Thereby the 1st liquid that is used to preheating that temperature may not be able to be descended in preheating procedure Sp2 is directly inputted in another processing unit 50 and uses the 1st liquid handling wafer W in this processing unit 50.The 1st liquid that has been used to preheating after by supplementary heating liquid and via the 1st liquid supply source 22 that is provided with heating arrangements 22b once more self-loopa pipeline 20 flow in any one article of the 1st supply pipeline 30.Therefore, though in liquid handling device 10, be provided with many processing units 50 and manage throughout in the unit 50 and wafer W is handled, can make self-loopa pipeline 20 be fed into the temperature stabilization of the 1st liquid in each the 1st supply pipeline 30 in the different respectively moment.Promptly, the processing that wafer W is carried out that can be suppressed in 1 processing unit 50 influences the processing of implementing to wafer W in another processing unit 50.Thus, manage throughout in the unit 50, can use the 1st liquid after the heating to carry out stable treated, suppress to occur following phenomenon between the unit 50 effectively, promptly, use the degree of the processing that the 1st liquid after the heating carries out wafer W to change thereby can manage throughout.
In addition, owing to corresponding to the 1st supply pipeline 30 that is connected with each processing unit 50 and with pipeloop 20 reflux pipeline 35 is set independently respectively, therefore reflux pipeline 35 is connected near the ejection opening 30a of pairing the 1st supply pipeline 30 with the 1st supply pipeline 30.Thus, the temperature that can suppress the 1st liquid effectively descends when this processing unit 50 begins to handle wafer W.In addition, circulate at the circulating path that comprises the 1st supply pipeline 30 and reflux pipeline 35, therefore can not increase the consumption of the 1st liquid owing to be used for heated liquid.
According to the above description as can be known, adopt present embodiment, the temperature of the 1st liquid after can suppressing to heat handle 1 wafer W during in change, and can also be suppressed at the 1st liquid generation temperature deviation used when handling different wafer W in the same processing unit 50 or different processing unit 50 in.As a result, can stably implement the less processing of degree deviation to wafer W.
In addition, adopt present embodiment, amount in the time per unit of the 1st liquid that the ejection opening 30a from the 1st supply pipeline 30 during with processing wafer W in processing unit 50 sprays is compared, and the amount in the time per unit of the 1st liquid that flows in reflux pipeline 35 when not handling wafer W in processing unit 50 is more.Thereby, can carry out preheating to the circulating path that comprises the 1st supply pipeline 30 and reflux pipeline 35 at short notice.Even promptly when the short time in processing unit 50 and when handling off and on, also can carry out preheating to the circulating path that comprises the 1st supply pipeline 30 and reflux pipeline 35 fully, thereby the temperature that can effectively suppress the 1st liquid descends when handling beginning.
In addition, the liquid handling device 10 of present embodiment comprises: the 1st supply pipeline 30, and it is used to supply with the 1st liquid and has the ejection opening 30a that is used to spray the 1st liquid; The 2nd supply pipeline 45, it is used for supplying temperature 2nd liquid different with the 1st liquid and has the ejection opening 45a that is used to spray the 2nd liquid; And processing unit 50, it has the supporting member 60 that is used to support the 1st supply pipeline 30 and the 2nd supply pipeline 45, and can use the 1st liquid and the 2nd liquid that trap apparatus is handled.The side that supporting member 60 has partition member 63, the 1 supply pipelines 30 and the 2nd supply pipeline 45 extends in a side of partition member 63, and the opposing party of the 1st supply pipeline 30 and the 2nd supply pipeline 45 extends at the opposite side of partition member 63.In addition, the method for treating liquids of present embodiment comprises following operation: use the 1st liquid of supplying with from the 1st supply pipeline 30 that trap apparatus is handled; Before or after the operation of using the 1st liquid handling trap apparatus, use the temperature 2nd liquid handling trap apparatus of supplying with from the 2nd supply pipeline 45 different with the 1st liquid.This method is when using the 1st liquid handling trap apparatus, the 1st liquid sprays the 1st liquid from the ejection opening 30a of the 1st supply pipeline 30 that is supported member 60 supportings, when using the 2nd liquid handling trap apparatus, ejection opening 45a from the 2nd supply pipeline 45 of supporting member 60 supportings that are used to support the 1st supply pipeline 30 sprays the 2nd liquid, one side of the 1st supply pipeline 30 and the 2nd supply pipeline 45 extends in a side of the partition member 63 of at least a portion that constitutes supporting member 60, and the opposing party of the 1st supply pipeline 30 and the 2nd supply pipeline 45 extends at the opposite side of partition member 63.
In recent years, the liquid handling device that is used to handle handled object is provided with many feed tube for liquid lines mostly, and the temperature of the liquid supplied with via this feed tube for liquid line can be set at all temps.And, in order to use different liquids that handled object is handled continuously, usually many supply pipelines are arranged to path arranged side by side, and dispose the ejection opening that is used to spray liquid of each feed tube for liquid line side by side.In this kind device, when the liquid that temperature is differed from one another supplies in many supply pipelines, may between the liquid of different temperatures heat exchange take place.At this moment, the liquid that promptly allows to be adjusted to preferred temperature is input in the supply pipeline, but reality is different with preferred temperature from the temperature of the liquid that is used to handle that sprays the opening ejection.
At the problems referred to above, adopt present embodiment, make a square tube of the 1st supply pipeline 30 and the 2nd supply pipeline 45 cross supporting member 60 partition member 63 a side and extend to pairing liquid feed mechanism 15,40, and the opposite side of the opposing party who makes the 1st supply pipeline 30 and the 2nd supply pipeline 45 by the partition member 63 of supporting member 60 extends to pairing liquid feed mechanism 15,40.Thereby the heat that can suppress effectively between the 2nd interior liquid of the 1st liquid and the 2nd supply pipeline 45 in the 1st supply pipeline 30 moves.As a result, can supply with the 1st liquid, and can supply with the 2nd liquid with desired temperatures with desired temperatures.
In addition, can apply various changes to above-mentioned execution mode.Below, a variation is described.
For example, in the above-described embodiment, the example that can be arranged on the flow control valve 37 that manual mode is regulated aperture on the 1st supply pipeline 30 that is branched into before the 1st pipeline 31a and the 2nd pipeline 31b has been described, but the present invention is not limited thereto, as an example, also can shown in double dot dash line among Fig. 2, like that this flow control valve be arranged on the 2nd pipeline 31b.In this variation, utilize the flow control valve 32 that is arranged on the 1st pipeline 31a to determine the liquid measure that can in the 1st pipeline 31a, pass through, utilize the flow control valve that is arranged on the 2nd pipeline 31b to determine the liquid measure that can in the 2nd pipeline 31b, pass through.
In addition, in the above-described embodiment, the example that an interval of the 1st supply pipeline 30 is divided into 2 pipeline 31a, 31b has been described, but the present invention is not limited thereto.For example also an interval of the 1st supply pipeline 30 can be divided into the pipeline more than 3.In addition, equally also can make the plural interval of the 1st supply pipeline 30 be divided into many pipelines and extend.Adopt above-mentioned variation,, the flow that capable of self-circulating pipeline 20 flows into the 1st liquid in the 1st supply pipeline 30 can be become various values by suitably changing the combination of the pipeline of closing or opening.
In addition, in the above-described embodiment, the example that makes reflux pipeline 35 and the example that is connected of the 1st supply pipeline 30 midway, promptly is connected with the 1st supply pipeline 30 in ejection opening 30a and position between the pipeloop 20 has been described, but the present invention is not limited thereto.For example, as shown in Figure 7, reflux pipeline 35 is connected with the ejection opening 30a of the 1st supply pipeline 30.In addition, here said " connection " not only refers to being connected under the state that reflux pipeline 35 and the ejection opening 30a of the 1st supply pipeline 30 contacted, and also finger-type becomes liquid to flow into connection on this aspect of the stream in the reflux pipeline 35 from the ejection opening 30a of the 1st supply pipeline 30.
In example shown in Figure 7, the end 35a that forms cup-shaped of reflux pipeline 35 can be connected with the ejection opening 30a of the 1st supply pipeline 30 that is positioned at non-processing position.The cup-shaped end 35a of reflux pipeline 35 can be relatively moved with respect to the ejection opening 30a that is positioned at non-processing unit, thereby can and leave ejection opening 30a near ejection opening 30a.In addition, the cup-shaped end 35a of reflux pipeline 35 can be connected with the state of sealing with the ejection opening 30a of the 1st supply pipeline 30 that is positioned at non-processing position.So when carrying out heating process Sp 2,35 pairs of the 1st liquid from the ejection opening 30a of the 1st supply pipeline 30 ejection of reflux pipeline reclaim.In addition, in this example, on the 1st supply pipeline 30, be provided with the open and close valve 34 of fluid pressure actuated mode.This open and close valve 34 is supplied with transfer valve as the liquid that switches following actions and is played a role, promptly, supply with and be used for handling the action of liquid of handled objects and the action that stops to supply with this liquid at processing unit 50.And, adopt this example, the 1st supply pipeline 30 of whole length can be included in heating with in the circulating path and heat the 1st supply pipeline 30.Promptly, can make and supply with all valve class A of geometric unitA headed by the transfer valve (open and close valve) 34, that be located on the 1st supply pipeline 30 with liquid and be positioned at heating with on the circulating path, thereby this valve class A of geometric unitA is heated.
In addition, in variation shown in Figure 7, a part of 35b that constitutes the pipeline of reflux pipeline 35 has flexibility, retractility, moves can make cup-shaped end 35a.In addition, other structures in the variation shown in Figure 7 are identical with above-mentioned execution mode, therefore omit repeat specification here.
In addition, in the above-described embodiment, the stream controlling organization 38 that can reach following purpose has been described, promptly, can with in the 1st supply pipeline 30, flow to stream controlling organization 38 the 1st liquid selective be maintained in the 1st supply pipeline 30 and further flow and only flow to the state of ejection opening 30a and only flow to any one state in the state of reflux pipeline 35, but the present invention is not limited thereto.For example, as shown in Figure 8, also can constitute the stream controlling organization 38 that can reach following purpose, promptly, can with in the 1st supply pipeline 30, flow to stream controlling organization 38 the 1st liquid selective be maintained in and flow to ejection opening 30a and flow to the state of reflux pipeline 35 these both directions and only flow to any one state in the state of reflux pipeline 35.In example shown in Figure 8, stream controlling organization 38 comprises the triple valve 38a and the flow control valve 38c that is arranged on the reflux pipeline 35 of fluid pressure actuated mode, and above-mentioned triple valve 38a is arranged on the 1st supply pipeline 30 and with an end of reflux pipeline 35 and is connected.The valve (for example mass flow controller) that utilization is built-in with driving arrangement constitutes flow control valve 38c, and this driving arrangement can be according to the aperture of regulating this flow control valve 38c from the control signal of control device 12.In addition, in this variation, identical with above-mentioned execution mode, triple valve 38a supplies with transfer valve as the liquid that switches following actions equally and plays a role, promptly, supply with and be used for handling the action of liquid of handled objects and the action that stops to supply with this liquid at processing unit 50.
In above-mentioned variation, utilize flow control valve 37 that the flow that self-loopa pipeline 20 flows into the 1st liquid in the 1st supply pipeline 30 is remained constant basis (for example A (l/min)).And, when triple valve 38a only is connected the upstream side of the 1st supply pipeline 30 with reflux pipeline 35, set the aperture of flow control valve 38c, so that can flow through the 1st above flow of liquid mistake of constant basis (for example A (l/min)) of flow control valve 37.On the other hand, when triple valve 38a makes 3 directions open, set the aperture of flow control valve 38c, only can make the 1st flow of liquid mistake less than the flow (for example B (l/min)) of the constant basis that can flow through flow control valve 37 (for example A (l/min)).At this moment, the flow that can make blowing go out the 1st liquid of opening 30a ejection is poor (for example (A-B) (l/min)) of the flow (for example B (l/min)) of flow (for example A (l/min)) that can flow into the 1st liquid in the 1st supply pipeline 30 and the 1st liquid that can flow in reflux pipeline 35.
In this variation, use the 1st liquid handling wafer W during in, the 1st liquid after the heating is circulated in circulating path in the heating that comprises reflux pipeline 35 and the 1st supply pipeline 30.Thereby, manage throughout in the unit 50, even carry out heating process Sp2 and treatment process S3 repeatedly, can prevent substantially also that comprising reflux pipeline 35 and the 1st supply pipeline 30 temperature of the 1st liquid that the temperature of the 1st liquid that circulates in the heating that constitutes is with circulating path changes and circulates changes in pipeloop 20.Thus, the temperature of the 1st liquid after the heating that can suppress more effectively to be used to handle changes.
In addition, other structures in the variation shown in Figure 8 are identical with above-mentioned execution mode, and therefore the repetitive description thereof will be omitted here.
In addition, in the above-described embodiment, the 2nd supply pipeline 45 has been described at the example that extend the inside of the cylindrical portion 66 that is made of a part partition member 63 and the 1st supply pipeline 30 extends in the outside of this cylindrical portion 66, but the present invention is not limited thereto.The 1st supply pipeline 30 is extended in the inside of cylindrical portion 66, the 2nd supply pipeline 45 is extended in the outside of this cylindrical portion 66.In addition, as shown in Figure 9, the 1st supply pipeline 30 is extended in the inside of the 1st cylindrical portion 66a, the 2nd supply pipeline 45 is extended in the inside of the 2nd cylindrical portion 66b different with the 1st cylindrical portion 66a.In variation shown in Figure 9, utilize partition member 63 to form the boundary portion of the 1st cylindrical portion 66a and the 2nd cylindrical portion 66b.In addition, Fig. 9 is the figure of variation that is used to illustrate the arm 62 (partition member) of supporting member 60, with the cross section of the length direction quadrature of arm 62 on expression supporting member 60.Other structures in the variation shown in Figure 9 are identical with above-mentioned execution mode, and therefore the repetitive description thereof will be omitted here.
In addition, in the above-described embodiment, the example that does not heat the 2nd liquid has been described, but the present invention is not limited thereto.Even heat the 2nd liquid, also can obtain above-mentioned useful action effect.
In addition, in the above-described embodiment, the example that heating arrangements 22b is encased in the 1st liquid feed mechanism 15 and the 1st liquid in the storage facility 22a is heated has been described, but the present invention is not limited thereto.For example, also can add the heating arrangements of the circulating path 24 that is used for heat cycles pipeline 20.In addition, can also add the heater that is used to heat the 1st supply pipeline 30, reflux pipeline 35.
In addition, in the above-described embodiment, illustrated the processing of carrying out the 2nd liquid earlier, after the example of processing of the 1st liquid after heating, but the present invention is not limited thereto, the processing of the 1st liquid after also can heating earlier, after carry out the processing of the 2nd liquid.
In addition, in the above description, some variation that above-mentioned execution mode is carried out have been described, but can certainly have used the present invention in a plurality of variation of appropriate combination ground.
In addition, as described in the beginning of this specification, also the present invention can be applied in the processing except that the clean of wafer, also can use in addition except that dry and answer heated the 1st liquid with the conduct of the liquid the liquid.
The reference of association request
The priority of Japanese Patent Application 2009-179283 number of advocating to submit to of the present invention, Japanese Patent Application 2009-179456 number and Japanese Patent Application 2009-179479 number on July 31st, 2009, and with reference to the full content of Japanese Patent Application 2009-179283 number, Japanese Patent Application 2009-179456 number and Japanese Patent Application 2009-179479 number and this full content is comprised in the present invention.

Claims (19)

1. liquid handling device, the liquid that its use has been conditioned temperature comes handled object is handled, and this liquid handling device comprises:
The liquid feed mechanism, it is used for feed fluid;
Supply pipeline, it is connected with the aforesaid liquid feed mechanism, and has the ejection opening that is used to spray the liquid that has been conditioned temperature;
Processing unit, it supports above-mentioned supply pipeline, and can use from the liquid that has been conditioned temperature of the ejection opening of above-mentioned supply pipeline ejection above-mentioned handled object is handled;
Reflux pipeline, it turns back in the aforesaid liquid feed mechanism liquid that is fed in the above-mentioned supply pipeline;
Liquid is supplied with transfer valve, and it is arranged on the above-mentioned supply pipeline, is used to switch supply with to above-mentioned ejection opening be used in the action of the liquid of above-mentioned processing unit for processing handled object and the action that stops to supply with this liquid;
Aforesaid liquid is supplied with transfer valve and is arranged in from above-mentioned supply pipeline and turns back to via above-mentioned reflux pipeline on the path of liquid of aforesaid liquid feed mechanism.
2. liquid handling device according to claim 1, wherein,
Aforesaid liquid is supplied with transfer valve and is constituted triple valve, and this triple valve is set on the above-mentioned supply pipeline and with an end of above-mentioned reflux pipeline and is connected.
3. liquid handling device according to claim 2, wherein,
This liquid handling device also comprises open and close valve, and this open and close valve is set on the above-mentioned reflux pipeline.
4. liquid handling device according to claim 2, wherein,
This liquid handling device also comprises flow control valve, and this flow control valve is set on the above-mentioned reflux pipeline and can regulates the flow of the liquid that can pass through in above-mentioned reflux pipeline.
5. liquid handling device according to claim 1, wherein,
Above-mentioned processing unit comprises: maintaining body, and it is used to keep handled object; Supporting member, it is used to support the above-mentioned ejection opening of above-mentioned supply pipeline;
Above-mentioned supporting member is constituted as the above-mentioned ejection opening that can make above-mentioned supply pipeline and can moving to the processing position of the handled object feed fluid that is kept by above-mentioned maintaining body and between the non-processing position of above-mentioned processing position deviation;
Above-mentioned reflux pipeline can be connected with the above-mentioned ejection opening that is positioned at above-mentioned non-processing position.
6. liquid handling device according to claim 1, wherein,
This liquid handling device also comprises control device, this control device is the flow of controlling liquid in the following manner: the amount in the time per unit of the liquid of the above-mentioned ejection opening ejection of above-mentioned supply pipeline when handling above-mentioned handled object in above-mentioned processing unit is compared, and the amount in the time per unit of flowing liquid in above-mentioned reflux pipeline when not handling above-mentioned handled object in above-mentioned processing unit is more.
7. liquid handling device according to claim 6, wherein,
Above-mentioned supply pipeline is to many mode of a pipeline and extending by being divided at least one interval of upstream side than the link position of it and above-mentioned reflux pipeline;
Above-mentioned control device is controlled the switching of above-mentioned many pipelines in the following manner: when not handling above-mentioned handled object in above-mentioned processing unit, liquid flows in the mode of passing through in the pipeline more than 2, when handling above-mentioned handled object in above-mentioned processing unit, liquid flows in the mode of only passing through in above-mentioned a part of pipeline that pipeline was comprised more than 2.
8. liquid handling device according to claim 1, wherein,
The aforesaid liquid feed mechanism has pipeloop, and this pipeloop comprises the liquid supply source and can make circulating path from the liquid circulation of aforesaid liquid supply source;
From the above-mentioned circulating path branch of above-mentioned pipeloop many above-mentioned supply pipelines are set;
With above-mentioned many supply pipelines above-mentioned processing unit and above-mentioned reflux pipeline are set accordingly respectively.
9. liquid handling device according to claim 8, wherein,
Each reflux pipeline is being connected with above-mentioned pipeloop than the link position of above-mentioned pipeloop and the above-mentioned supply pipeline that manys the downstream in the supply pipeline position by the downstream.
10. liquid handling device according to claim 9, wherein,
Position between the link position of supply pipeline in above-mentioned pipeloop, above-mentioned pipeloop and above-mentioned downstream and the link position of above-mentioned pipeloop and above-mentioned reflux pipeline is provided with the 1st overflow valve;
Be provided with the 2nd overflow valve on above-mentioned reflux pipeline, the pressure of the 2nd overflow valve is configured to be lower than the setting pressure of above-mentioned the 1st overflow valve.
11. liquid handling device according to claim 1, wherein,
This liquid handling device comprises also and is used for supplying temperature and the 2nd supply pipeline from the 2nd different liquid of the temperature of the liquid of the above-mentioned ejection opening ejection of above-mentioned supply pipeline that the 2nd supply pipeline has the ejection opening that is used to spray above-mentioned the 2nd liquid;
Above-mentioned processing unit has the supporting member that is used to support above-mentioned supply pipeline and above-mentioned the 2nd supply pipeline;
Above-mentioned supporting member has partition member, and the side in above-mentioned supply pipeline and above-mentioned the 2nd supply pipeline extends in a side of above-mentioned partition member, and the opposing party in above-mentioned supply pipeline and above-mentioned the 2nd supply pipeline extends at the opposite side of above-mentioned partition member.
Come handled object is handled 12. a method for treating liquids, its use have been conditioned the liquid of temperature, comprise following operation:
Make the liquid that has been conditioned temperature that flows in the supply pipeline from the liquid feed mechanism turn back in the aforesaid liquid feed mechanism via reflux pipeline, thereby the liquid that has been conditioned temperature is circulated in the path that comprises above-mentioned supply pipeline and above-mentioned reflux pipeline, regulate the temperature of above-mentioned supply pipeline thus;
And flow into the liquid that has been conditioned temperature in the above-mentioned supply pipeline from the aforesaid liquid feed mechanism from the ejection of the ejection opening of above-mentioned supply pipeline, above-mentioned handled object is handled,
This method is when regulating the temperature of above-mentioned supply pipeline, liquid is supplied with transfer valve and also is conditioned temperature, this liquid is supplied with transfer valve and is arranged on the above-mentioned supply pipeline, is used to switch to above-mentioned ejection opening supply with the action of the liquid that is used to handle handled object and the action that stops to supply with this liquid.
13. method for treating liquids according to claim 12, wherein,
Above-mentioned reflux pipeline is supplied with transfer valve through the aforesaid liquid that is made of triple valve and from the branch midway of above-mentioned supply pipeline, and is provided with open and close valve on above-mentioned reflux pipeline;
When regulating the temperature of above-mentioned supply pipeline, the liquid that flows in the above-mentioned supply pipeline is supplied with the above-mentioned triple valve of transfer valve and is flowed into above-mentioned reflux pipeline via being used for constituting aforesaid liquid, flows by above-mentioned open and close valve then;
When handling above-mentioned handled object, the liquid that flows in the above-mentioned supply pipeline is supplied with the above-mentioned triple valve of transfer valve and further mobile at above-mentioned supply pipeline by being used for constituting aforesaid liquid, is sprayed from above-mentioned ejection opening then.
14. method for treating liquids according to claim 12, wherein,
Above-mentioned reflux pipeline is supplied with transfer valve through the aforesaid liquid that is made of triple valve and from the branch midway of above-mentioned supply pipeline, and be provided with flow control valve on above-mentioned reflux pipeline, this flow control valve can be regulated the flow of the liquid that can pass through in above-mentioned reflux pipeline;
When regulating the temperature of above-mentioned supply pipeline, the liquid that flows in the above-mentioned supply pipeline is supplied with the above-mentioned triple valve of transfer valve and is flowed into above-mentioned reflux pipeline via being used for constituting aforesaid liquid, flows by above-mentioned flow control valve then;
When handling above-mentioned handled object, the liquid that flows in the above-mentioned supply pipeline is supplied with the above-mentioned triple valve of transfer valve and further mobile at above-mentioned supply pipeline by being used for constituting aforesaid liquid, is ejected from above-mentioned ejection opening then;
Handle above-mentioned handled object during in the aperture of above-mentioned flow control valve less than the temperature of regulating above-mentioned supply pipeline during in the aperture of above-mentioned flow control valve.
15. method for treating liquids according to claim 12, wherein,
The above-mentioned ejection opening of above-mentioned supply pipeline is configured in can be to the processing position of handled object feed fluid when handling above-mentioned handled object, when the above-mentioned ejection opening of above-mentioned supply pipeline is configured in the temperature of regulating above-mentioned supply pipeline from the non-processing position of above-mentioned processing position deviation;
When regulating the temperature of above-mentioned supply pipeline, above-mentioned reflux pipeline is connected with the ejection opening that is positioned at above-mentioned non-processing position, is conditioned temperature thereby be arranged on aforesaid liquid supply transfer valve on the above-mentioned supply pipeline, that be made of open and close valve.
16. method for treating liquids according to claim 12, wherein,
Compare with the amount in the time per unit of the liquid of above-mentioned ejection opening ejection when handling above-mentioned handled object, the amount in the time per unit of flowing liquid in above-mentioned reflux pipeline when regulating the temperature of above-mentioned supply pipeline is more.
17. method for treating liquids according to claim 12, wherein,
Above-mentioned supply pipeline extends in the mode that is divided into many pipelines at least one interval;
When regulating the temperature of above-mentioned supply pipeline, liquid flows in the mode of passing through in the pipeline more than 2;
When handling above-mentioned handled object, liquid flows in the mode of only passing through in above-mentioned a part of pipeline that pipeline was comprised more than 2.
18. method for treating liquids according to claim 12, wherein,
The aforesaid liquid feed mechanism has pipeloop, and this pipeloop comprises the liquid supply source and can make circulating path from the liquid circulation of aforesaid liquid supply source;
With respect to a plurality of processing units from the above-mentioned circulating path branch of above-mentioned pipeloop many above-mentioned supply pipelines are set;
In each supply pipeline, regulate the temperature of this supply pipeline respectively and use the liquid handling handled object of supplying with from this supply pipeline that has been conditioned temperature.
19. method for treating liquids according to claim 18, wherein,
Respectively in above-mentioned a plurality of processing units, the liquid that has been conditioned temperature that flows in the above-mentioned supply pipeline from above-mentioned pipeloop is being turned back in the above-mentioned pipeloop than the link position of above-mentioned pipeloop and the above-mentioned supply pipeline that manys the downstream in the supply pipeline position by the downstream via reflux pipeline, thereby the liquid that has been conditioned temperature is circulated in the path that comprises above-mentioned supply pipeline and above-mentioned reflux pipeline, regulate the temperature of above-mentioned supply pipeline thus, flow into the liquid that has been conditioned temperature in the above-mentioned supply pipeline from the ejection of the ejection opening of above-mentioned supply pipeline from above-mentioned pipeloop then, handle above-mentioned handled object.
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CN108025336B (en) * 2015-09-11 2020-12-18 株式会社平出精密 Three-dimensional conveying type bench cleaning device

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TWI571313B (en) 2017-02-21
KR101401693B1 (en) 2014-05-29
US20110023909A1 (en) 2011-02-03
US8950414B2 (en) 2015-02-10
KR101371107B1 (en) 2014-03-10

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