TWM301693U - Apparatus of liquid circulating and recycling - Google Patents

Apparatus of liquid circulating and recycling Download PDF

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Publication number
TWM301693U
TWM301693U TW95207918U TW95207918U TWM301693U TW M301693 U TWM301693 U TW M301693U TW 95207918 U TW95207918 U TW 95207918U TW 95207918 U TW95207918 U TW 95207918U TW M301693 U TWM301693 U TW M301693U
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Taiwan
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liquid
conduit
recovery
machine
recovered
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TW95207918U
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Chinese (zh)
Inventor
Wen-Jie Tsai
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New Jein Ind Co Ltd
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Priority to TW95207918U priority Critical patent/TWM301693U/en
Publication of TWM301693U publication Critical patent/TWM301693U/en

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M301693 八、新型說明: " 【新型所屬之技術領域】 - 本新型是有關於一種液體回收裝置,特別是指—種將 待回收液在生產線上處理、回收後,即可使待回收液於線 上再度利用的液體循環回收裝置。 【先前技術】 - 一般產業界製作彩色濾光片、液晶板等元件時,其過 程需要利用旋轉塗佈的方式,在一塊基板上披覆一層例如 光阻劑、貴重溶劑等藥液,而為了使藥液可以均句地旋轉 塗佈在基板上,業者會先於基板上塗抹大量的藥液,使其 、旋轉後藥液能夠均勻披覆在整個基板上、然而要完整披覆 -片基板實際上只需要少量的藥液即可,所以過多的藥液 將錢轉塗佈的過程中直接被排入廢液槽,所以使用^量 ㈣液來塗佈基板將造成浪費,同時亦會衍生出生產成本 二了避免浪費藥液,另一作法則是在旋轉M301693 VIII, new description: " [New technology field] - This new type is related to a liquid recovery device, especially refers to the kind of liquid to be recovered in the production line after processing, recycling, then the liquid to be recovered A liquid recycling device that is reused online. [Prior Art] - When manufacturing a color filter, a liquid crystal panel, etc. in the general industry, the process needs to use a spin coating method to coat a substrate with a liquid such as a photoresist or a precious solvent. The liquid can be uniformly applied to the substrate on the substrate, and the manufacturer will apply a large amount of the chemical solution on the substrate so that the liquid can be evenly coated on the entire substrate after being rotated, but the film is completely covered. In fact, only a small amount of liquid medicine is needed, so too much liquid medicine is directly discharged into the waste liquid tank during the process of transferring the money, so using the amount (four) liquid to coat the substrate will waste, and will also be derived. The production cost is two to avoid wasting the liquid, and the other is to rotate

過知中’將%轉濺出的藥液利用回收桶裝起來回收,但 是行技術問題,时的藥液必需送回原供應廠商進 里:!能!回來再度使用,如此雖然可以避免藥 成本^ 疋將樂㈣回職作再生處理亦需增加生產 【新型内容】 因此,本新型之 並在線上作業時就可 目的,即在提供一種用於連接機台, 以回收、處理該機台排放出的待回收 M301693 液’再將處理過的該待回收液送回機台使用的液體循環回 收裝置。 於是,本新型液體循環回收裝置包含:一用於存放待 回收液的回收桶、-連接機台與回收桶並將待回收液自機 台輸送至該回收桶的第-連接單元、—連接機台與回收桶 並將檢測合格的待回收液輸送回機台的第二連接單元、一 δ又置在该回收桶上並用於攪拌待回收液的攪拌器、一連接In the past, the liquid that was spattered by % was used to collect and recycle it, but it was a technical problem. The liquid must be sent back to the original supplier: can! Come back to use again, so you can avoid the cost of medicine. 疋 疋 乐 (4) return to work for regeneration treatment also needs to increase production [new content] Therefore, the new type of online operation can be used, that is, to provide a connection machine The machine recovers and processes the M301693 liquid to be recovered discharged from the machine, and then returns the treated liquid to be recovered to the liquid recycling device used by the machine. Therefore, the novel liquid circulation recovery device comprises: a recovery barrel for storing the liquid to be recovered, a connection unit and a recovery barrel, and a first connection unit for conveying the liquid to be recovered from the machine to the recovery barrel, the connection machine And the recycling tank and the qualified liquid to be recovered are sent back to the second connecting unit of the machine, a δ is placed on the recycling barrel and used to stir the agitator to be recovered, and a connection

該回收桶並提供調和液至回收桶與待回收液混合的調和單 元,及一連接該回收桶並檢測存放於回收桶中的待回收液 的檢測單元。 S待回收液在回收桶中檢測合格後是往該機台輸送並 且再利用,當待回收液檢測不合格時,將調和液與待回收 液此曰後並再—人檢測,以改善待回收液的性質直到檢測合 格為止,再將檢測合格的待回收液由第二連接單元送回機 台使用,所以本新型可以配合生產線之線上作業,使待回 收液於線上直接作再生回收處理並重複使用,故確實能夠 達到降低生產成本之優點。 【實施方式】 有關本新型之前述及其他技術内容、特點與功效,在 以下配合參考圖式之二個較佳實施例的詳細說明中,將可 清楚的呈現。 在本新型被詳細描述之前,要注意的是,在以下的說 明内容中,類似的元件是以相同的編號來表示。 參閱圖1、2、3,本新型液體循環回收裝置之第一較佳 M301693 實施例是與-機台8連接,該機台8上設置有—基板8ΐ, 而基板81上塗佈大量藥液’並藉由機台8運轉使藥液可以 均句披覆於基板81上,多餘的藥液即成為待回收液並自機 台8排出,而本新型液體循環回收裝置可以將一調和液與 該待回收液混合作再生處理,並將待时液輸送回機台8 重複使用,此外,本新型亦可供新的藥液隨時補充並供應 至機台8。The recycling tank further provides a mixing unit for mixing the mixing liquid to the recovery tank and the liquid to be recovered, and a detecting unit that connects the recovery tank and detects the liquid to be recovered stored in the recovery tank. S After the test liquid is tested and passed in the recovery tank, it is transported to the machine table and reused. When the liquid to be recovered is unqualified, the liquid to be recovered and the liquid to be recovered are tested and then tested again to improve the recovery. The nature of the liquid is up to the test, and the qualified liquid to be recovered is sent back to the machine by the second connecting unit. Therefore, the new type can be used in line with the production line, so that the liquid to be recovered is directly recycled and recycled on the line and repeated. It is used, so it can really achieve the advantage of reducing production costs. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. Referring to Figures 1, 2, and 3, the first preferred embodiment of the liquid circulation recovery apparatus of the present invention is connected to a machine table 8, which is provided with a substrate 8A, and a large amount of liquid medicine is coated on the substrate 81. 'And by the operation of the machine 8, the liquid medicine can be uniformly coated on the substrate 81, and the excess chemical liquid becomes the liquid to be recovered and discharged from the machine 8, and the new liquid circulation recovery device can combine a liquid and a liquid The liquid to be recovered is mixed for regeneration, and the time-lapse liquid is sent back to the machine table 8 for repeated use. In addition, the present invention is also available for the new liquid medicine to be replenished and supplied to the machine table 8 at any time.

該液體循環回收裝置包含:一回收桶i、一第一連接單 兀2、一第二連接單元3、一攪拌器4、一調和單元$、一 檢測單元6,以及一新液單元7。 本實施例之回收桶1的容量約3〇〜4〇公升,用於存放 自機台8排出的待回收液,並包括一底壁u、一與底壁“ 上下間隔的頂壁12、一連接在底壁u與頂壁12間的圍繞 壁13、設置在圍繞壁π上的二個回收液入口 14、一出口 15、一調和液入口 16、一排廢口 17與一新液入口 18,以 及數個设在頂壁12上的清洗液入口丨9。本新型在實施時, 不以該等出、入口及排廢口 14〜19的設置位置為限。 該第一連接單元2是連接在機台8與回收桶丨之回收 液入口 14間,用於將機台8排出的待回收液輸送至回收桶 1,並包括一條連接機台8與回收桶1之其中一個回收液入 口 I4的第一導管21,以及一設置在第一導管21管路上的 第一幫浦22。 該第二連接單元3是連接在機台8與回收桶1之出口 15間’用於將檢測合格的待回收液自回收桶1輸送至機台 M301693 8,並包括一條連接機台8與回收桶丨之出口 i5的第二導 管3丨,以及一設置在第二導管31管路上的第二幫浦32。 本實施例之攪拌器4是用於攪拌待回收液,包括一設 置在回收桶1之頂f 12上的馬達41,以及一伸入回收桶i 内並受馬達41驅動’而可轉動及攪拌待回收液的長條狀授 拌件42 A為和單元5連接該回收桶丨並用於提供調和液 回收桶1與待回收液混合,包括一個用來存放調和液的 調和液供應桶51、-連接調和液供應桶51與回收桶i之調 和液入口 16的第五導管53,以及一設置在第五導管Μ管 路上的定量幫浦52,該定量幫浦52是用於控制調和液流入 回收桶1的流量。 而本實施例之檢測單元6是設置在回收桶丨上,並檢 測存放於回收们中的待回收液,包括—個檢測待回收液 之黏度的黏度彳61,以及-個檢測待回收液之溫度的溫度 計62。 本實施例之新液單元7是同時連接機台8與回收桶工, 並可選擇性地供應新的藥液至機台8或者回收们中,包 括一用於容裝新的藥液的新液供應桶71、一連接新液供應 桶71與回收桶}之新液入口 18的第六導管72、一設置在 苐導盲72笞路上並將新的藥液輸送至回收桶1的第六幫 浦73、一連接新液供應桶71與機台8的第七導管74、一 設置在第七導管74管路上並將新的藥液輸送至機台8的第 七幫浦75。 本新型在使用時,首先啟動第一幫浦22,將機台8運 M3 01693 轉所產生的待回收液經由第一導# 21輸送至回收们,而 且機台8在多次運轉後產生的待回收液皆先暫時儲存於該 回收桶1中,直到回收桶1内的待回收液達到一定的量再 開始進行檢測。檢測時先使用攪拌器4來攪拌該待回收液 使其均勻,靜置一段時間後,再利用溫度計62與黏度計Μ 分別檢測待回收液的溫度及黏度,如果該待回收液的檢測 結果合格,即可暫時保存於回收桶丨中,再使用第二幫浦 32及第二導管31輸送至機台8使用,如果待回收液的檢測 結果不合格,則需要進一步處理該待回收液。 一般而言,黏度是該待回收液回收使用時,影響其品 質最重要的因素,而待回收液經過機台8使用後,部分成 分會揮發而造成待回收液黏度過高,超出可使用的範圍, 所以當檢測不合格時,將原切儲存於調和液供應桶51中 的調和液,經由定量幫浦52控制流量,並輸送至回收桶i 中:待回收液混合以降低其黏度。在混合時亦必需利用攪 拌器4稅拌,使待回收液與調和液得以充分且均勻地混合 ,攪拌後同樣再靜置一段時間,並重複檢測動作。當該第 二次檢測的待回收液檢測合格後,即可供機台8運轉時再 利用。 故本實施例之待回收液是一併於回收桶i中作暫存及 檢測的動作。此外’在回收桶i及調和液供應桶51上,都 可設置-重量# 63,用於量測液體重量變化並藉此來定量 更進步1¾日月月待回收液與調和液混合及檢測的 M301693 動作可以重複多次,如果待回收液在多次處理及檢測後仍 ^無去達到合格標準,就無法回收使用而成為廢液,所述 廢液是經由回收桶1的排廢口丨7排出。此時則需要再補充 T的藥液於回收桶丨中以供應機台8使用,且在補充新的 藥液之則,先將本新型液體循環回收裝置内部的桶壁、管 路等清洗乾淨,以避免殘留的廢液污染新的藥液。清洗的 方=是自回收桶1之清洗液入口 19導入清洗液來清洗,為 了節省擺放空間及成本,該清洗液是可以使用與調和液相 同的液體。 當清洗完成後,啟動新液單元7之第六幫浦73,將儲 存於新液供應桶71中的新的藥液,自第六導管72輸送至 回收桶1内’再由回收桶i之出σ 15將藥液輸送至機台8 。此外,亦可將新的藥液藉由該第七幫浦75及第七導管74 直接輸送至機台8使用,直到機台8 #業後又累積有一定 量的待回收液,就可以再繼續利用本新型來進行回收、檢 測的工作。 由以上說明可知’本新型主要是藉由設置該檢測單元6 來檢測待回收液的黏度、溫度等性質,並且當待回收液檢 測不合格時,即可馬上利用調和液供應桶51輸入調和液與 待回收液混合,改善待回收液的性質直到合格為止,再將 待回收液送回到機纟8再度湘,亦即本新型可以配合生 產線之線上(in-line)作f,使待回收液於線上經過再生處理 並立即回收使用,如此可以避免浪費藥液,以及藥液收回 後需要送回原廠作再生處理的缺失,故本新型液體循環回 \ 10 M301693 收裝置確實能夠達到降低生產成本之優點。 參閱圖1、4,本新型液體循環回收裝置之第二較佳實 施例亦包含:一回收桶1、一連接在機台8與回收桶丨之回 收液入口 14間的第一連接單元2、一連接在機台8與回收 桶1之出口 15間的第二連接單元3、一攪拌器4、一調和 單元5、一檢測單元6,以及一新液單元7。 本實施例之回收桶1是省略設置該新液入口,而該第 -連接單元2包括-用於暫存自機台8排出且尚未檢測的 待回收液的第-暫存桶23、—連接機台8與第—暫存桶Μ 的第一導管21、一設置在第一導管21管路上的第一幫浦 22、-連接第-暫存桶23與回收桶1的第三導管24,以及 一設置在第三導管24管路上的第三幫浦25,且該第三導管 24之一端是連接回收桶}之回收液入口 14。 本實把例之第一連接單元3包括一用於暫存檢測合格 的待回收液的第二暫存桶33、—連接回收桶i之出口 _ 苐二暫存桶33的第二導管31、—設置在第二導管η管路 ^的弟一幫浦32、—連接第二暫存桶33與機台8的第四導 & 3 4、^一没置在第四導答1 # 士 導吕34管路上的第四幫浦%,以及 暫;第—暫存桶33上的溫度控制器36,當暫存於第二 用:声」3且核測合袼之待回收液有氣泡產生時,可以利 =度控制器36加熱以排出氣泡,使待回收液的品質更為 而本實施例之新液單元 新的藥液至第二暫存桶33中&連接第二暫存桶33並供應 中,包括一個新液供應桶71、一 \ 11 M3 01693 條連接該新液供應桶71與第二暫存桶33的第六導管72, 以及一個設置在第六導管72管路上的第六幫浦73。The liquid circulation recovery apparatus comprises: a recovery tank i, a first connection unit 2, a second connection unit 3, an agitator 4, a reconciliation unit $, a detection unit 6, and a new liquid unit 7. The recovery tank 1 of the present embodiment has a capacity of about 3 〇 4 〇 liter, and is used for storing the liquid to be recovered discharged from the machine table 8, and includes a bottom wall u, a top wall 12 and a bottom wall which are spaced apart from each other. a surrounding wall 13 connected between the bottom wall u and the top wall 12, two recovery liquid inlets 14 disposed on the surrounding wall π, an outlet 15, a conditioned liquid inlet 16, a row of waste ports 17 and a new liquid inlet 18 And a plurality of cleaning liquid inlet ports 9 provided on the top wall 12. The present invention is not limited to the setting positions of the outlets, the inlets, and the waste ports 14 to 19. The first connecting unit 2 is It is connected between the machine 8 and the recovery liquid inlet 14 of the recovery tank, and is used for conveying the liquid to be recovered discharged from the machine 8 to the recovery tank 1, and includes one of the connection machine 8 and one of the recovery tanks 1 a first conduit 21 of I4, and a first pump 22 disposed on the conduit of the first conduit 21. The second connection unit 3 is connected between the machine 8 and the outlet 15 of the recovery tank 1 for testing The liquid to be recovered is transported from the recovery tank 1 to the machine M301693 8, and includes an outlet of the connecting machine 8 and the recycling barrel a second conduit 3 of i5, and a second pump 32 disposed on the conduit of the second conduit 31. The agitator 4 of the present embodiment is for agitating the liquid to be recovered, including a top disposed on the top of the recovery tank 1 The motor 41 on the 12, and a long strip-shaped mixing member 42 A that extends into the recovery tank i and is driven by the motor 41 to rotate and stir the liquid to be recovered is connected to the recovery tank and is used to provide a reconciliation The liquid recovery tank 1 is mixed with the liquid to be recovered, and includes a tempering liquid supply tank 51 for storing the conditioned liquid, a fifth conduit 53 connecting the conditioned liquid supply tank 51 and the condensing liquid inlet 16 of the recovery tank i, and a a quantitative pump 52 on the fifth conduit conduit, the quantitative pump 52 is used to control the flow of the conditioned liquid into the recovery tank 1. The detection unit 6 of the embodiment is disposed on the recovery drum and is detected and stored. The liquid to be recovered in the recovered ones includes a viscosity 彳61 for detecting the viscosity of the liquid to be recovered, and a thermometer 62 for detecting the temperature of the liquid to be recovered. The new liquid unit 7 of the present embodiment is simultaneously connected to the machine 8 and Recycling buckets and optionally supplying new ones The liquid medicine to the machine 8 or the recycling machine includes a new liquid supply tank 71 for accommodating a new liquid medicine, a sixth duct 72 for connecting the new liquid supply tank 71 and the new liquid inlet 18 of the recovery tank}, a sixth pump 73 disposed on the guide channel 72 and transporting the new liquid to the recovery tank 1, a seventh conduit 74 connecting the new liquid supply tank 71 and the machine 8, and a seventh conduit 74 pipeline and the new liquid is delivered to the seventh pump 75 of the machine 8. In the use of the new type, the first pump 22 is started first, and the liquid to be recovered generated by the machine 8 is transported by M3 01693 The first guide # 21 is sent to the recyclers, and the liquid to be recovered generated by the machine 8 after multiple operations is temporarily stored in the recovery tank 1 until the liquid to be recovered in the recovery tank 1 reaches a certain amount and then starts. Test. In the test, the stirrer 4 is first used to stir the liquid to be recovered to be uniform, and after standing for a certain period of time, the temperature and viscosity of the liquid to be recovered are respectively detected by the thermometer 62 and the viscometer, if the test result of the liquid to be recovered is qualified. It can be temporarily stored in the recovery tank, and then sent to the machine 8 using the second pump 32 and the second conduit 31. If the detection result of the liquid to be recovered is unsatisfactory, the liquid to be recovered needs to be further processed. Generally speaking, the viscosity is the most important factor affecting the quality of the liquid to be recovered when it is recycled, and after the liquid to be recovered is used by the machine 8, some components will volatilize and the viscosity of the liquid to be recovered is too high, which is beyond the usable. Scope, so when the test fails, the conditioned liquid which is stored in the conditioned liquid supply tank 51 is controlled, and the flow rate is controlled via the quantitative pump 52, and is sent to the recovery tank i: the liquid to be recovered is mixed to lower the viscosity. It is also necessary to use the agitator 4 to mix the mixture during the mixing, so that the liquid to be recovered and the mixture are sufficiently and uniformly mixed, and after stirring, the mixture is allowed to stand for a further period of time, and the detection operation is repeated. When the second detected liquid to be recovered is qualified, it can be reused when the machine 8 is operated. Therefore, the liquid to be recovered in this embodiment is temporarily stored and detected in the recovery tank i. In addition, 'on the recovery tank i and the blending liquid supply tank 51, can be set - weight # 63, used to measure the change in liquid weight and thereby quantify the more and more 13⁄4 days of the month to be recovered and mixed with the solution and detection M301693 The action can be repeated many times. If the liquid to be recovered still fails to meet the eligibility criteria after repeated treatment and testing, it cannot be recycled and used as waste liquid. The waste liquid is discharged through the waste bin of the recovery tank. discharge. At this time, it is necessary to replenish the liquid of T in the recovery tank to be used by the supply machine 8, and in the case of replenishing the new liquid, the barrel wall, the pipeline, etc. inside the liquid circulation recovery device are first cleaned. To avoid residual waste liquid contaminating new liquids. The cleaning side = is the cleaning liquid inlet from the recovery tank 1 and is introduced into the cleaning liquid for cleaning. In order to save space and cost, the cleaning liquid can use the same liquid as the conditioning liquid. When the cleaning is completed, the sixth pump 73 of the new liquid unit 7 is activated, and the new chemical liquid stored in the new liquid supply tank 71 is transported from the sixth conduit 72 to the recovery tank 1 and then by the recovery tank i. The syrup 15 is delivered to the machine table 8. In addition, the new liquid medicine can be directly transported to the machine table 8 by the seventh pump 75 and the seventh duct 74, until a certain amount of liquid to be recovered is accumulated after the machine 8#, and then it can be continued. The present invention is used for recycling and testing. It can be seen from the above description that the present invention mainly detects the viscosity, temperature and the like of the liquid to be recovered by providing the detecting unit 6, and when the detection of the liquid to be recovered is unqualified, the blending liquid can be immediately input into the blending liquid supply tank 51. Mixing with the liquid to be recovered, improving the properties of the liquid to be recovered until it is qualified, and then returning the liquid to be recovered back to the casing 8 again, that is, the new type can be matched with the in-line of the production line to make the waste to be recycled. The liquid is regenerated on the line and immediately recycled. This avoids wasting the liquid and the need to return it to the original factory for recycling after the liquid is recovered. Therefore, the new liquid circulation back to the 10 M301693 can indeed reduce production. The advantage of cost. Referring to Figures 1 and 4, a second preferred embodiment of the present invention further comprises: a recovery tank 1, a first connection unit 2 connected between the machine 8 and the recovery liquid inlet 14 of the recovery tank; A second connecting unit 3 connected between the machine table 8 and the outlet 15 of the recycling tub 1, a stirrer 4, a blending unit 5, a detecting unit 6, and a new liquid unit 7. The recycling tank 1 of the present embodiment omits the setting of the new liquid inlet, and the first connecting unit 2 includes a first temporary storage tank 23 for temporarily storing the liquid to be recovered discharged from the machine 8 and not yet detected, and the connection a first conduit 21 of the machine 8 and the first temporary storage tank, a first pump 22 disposed on the pipeline of the first conduit 21, a third conduit 24 connecting the first-temporary bucket 23 and the recovery tank 1, And a third pump 25 disposed on the third conduit 24, and one end of the third conduit 24 is a recovery liquid inlet 14 connected to the recovery tank. The first connecting unit 3 of the present embodiment includes a second temporary storage bucket 33 for temporarily storing the qualified liquid to be recovered, and a second conduit 31 connecting the outlet of the recovery tank i to the temporary storage bucket 33. - set in the second conduit η pipe ^ brother a pump 32, - the second temporary storage bucket 33 and the machine 8 of the fourth guide & 3 4, ^ one is not placed in the fourth guide 1 #士The fourth pump % on the lead 34 pipeline, and the temporary temperature controller 36 on the temporary storage tank 33, when temporarily stored in the second use: sound "3" and the nuclear recovery combined liquid has bubbles When generated, the controller 36 can be heated to discharge the air bubbles, so that the quality of the liquid to be recovered is further, and the new liquid of the new liquid unit of the embodiment is connected to the second temporary storage tank 33 and the second temporary storage is connected. The tub 33 is supplied and includes a new liquid supply tank 71, a \11 M3 01693 sixth conduit 72 connecting the new liquid supply tank 71 and the second temporary storage tank 33, and a pipe disposed on the sixth conduit 72. The sixth pump 73.

由於本實施例之第一連接單元2增設該第一暫存桶23 ,所以機台8運轉所產生的待回收液,可以在第一暫存桶 23中累積到一定的1時,再輸送至回收桶i中檢測及回收 ,且在檢測待回收液之同時,仍可繼續自機台8排放新的 待㈣液至第-暫存桶23中存放。而第二連接單元3增設 該第二暫存桶33,則是用於暫存檢測合格的待回收液。 本實施例之液體循環回收裝置在使用時,當待回收液 在多次處理後仍然無法達到合格標準時, 排廢…出。此時第二暫存桶33中如果還存:有二 合格的待回收液就可以持續供應機台8使用,如果已沒有 暫存的待回收液,就直接自新液單元7提供新的藥液至第 二暫存桶33中,如此同樣可以隨時供應機台8作業之需求 。而回收自1中則必須再輸入新的待回收液以繼續檢測、 回收,所以要先將回收们清洗乾淨,再直接由第一暫存 桶23輸人原先已暫存於其中的待回收液,即可於回收桶工 中繼續進行回收檢測工作。 亦即’本實施例是藉由該第—暫存桶23冑時儲存尚未 檢測的㈣收液’而該第三暫存桶則是隨時儲存有 格的待回收液’使本新型及機台8得以循環不息的運作: 且藉由該回收桶i、第一暫存桶23及第二暫存桶 ==Γ格的待回收液分開保存,提高檢測合 待液之保存品質,故本實施例同樣具有在線上直Since the first temporary storage unit 2 is added to the first temporary storage unit 2, the liquid to be recovered generated by the operation of the machine 8 can be accumulated to a certain 1 in the first temporary storage tank 23, and then sent to The detection and recovery of the recovery tank i, and while detecting the liquid to be recovered, can continue to discharge the new (four) liquid from the machine 8 to the first temporary storage bucket 23 for storage. The second connecting unit 3 is provided with the second temporary storage tank 33, which is used for temporarily checking the qualified liquid to be recovered. When the liquid circulation recovery device of this embodiment is used, when the liquid to be recovered still fails to meet the qualification standard after repeated treatment, it is discharged. At this time, if the second temporary storage tank 33 still exists: there are two qualified liquids to be recovered, and the supply machine 8 can be continuously used. If there is no temporary liquid to be recovered, the new liquid is directly supplied from the new liquid unit 7. The liquid is supplied to the second temporary storage tank 33, so that the operation of the machine 8 can be supplied at any time. In the case of recycling from 1, the new liquid to be recovered must be input to continue the detection and recovery. Therefore, the recycling should be cleaned first, and then the first temporary storage tank 23 directly inputs the liquid to be recovered which has been temporarily stored therein. The recycling test can be continued in the recycling bucket. That is, the present embodiment is to store the undetected (four) liquid collection by the first temporary storage bucket 23 and the third temporary storage bucket is to store the liquid to be recovered at any time to make the new type and the machine stand. 8 can be continuously operated: and separately stored by the recycling bucket i, the first temporary storage bucket 23 and the second temporary storage bucket == Γ格, to improve the preservation quality of the detection collateral liquid, The embodiment also has straight on line

12 M301693 接再生處理待回收液、避免藥液浪費,以及降低生產成本 之優點。 准以上所述者,僅為本新型之較佳實施例而已,當不 ^以此限定本新型實施之範圍,即大凡依本新型申請專利 範圍及新型說明内容所作之簡單的等效變化與修飾,皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1疋立體圖,主要顯示本新型液體循環回收裝置 之較佳實施例之-回收桶,與部份其他構件的相對 圖2 圖3 簡圖;及 是該回收桶與部份其他構件的局部剖視圖; 是該第-較佳實施例之各個元件相對關係的裝置 第二較佳實施例 圖4疋本新型液體循環回收裝置之 的農置簡圖。12 M301693 Recycling treatment to recover liquid, avoiding waste of liquid, and reducing production costs. The above-mentioned ones are only the preferred embodiments of the present invention, and do not limit the scope of the present invention, that is, the simple equivalent changes and modifications made in accordance with the scope of the new patent application and the new description. , are still within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view mainly showing a preferred embodiment of the liquid circulation recovery device of the present invention - a recovery barrel, which is opposite to some other members, Fig. 2, Fig. 3; and the recovery barrel and the portion A partial cross-sectional view of another component; a second preferred embodiment of the device in the relative preferred embodiment of the first preferred embodiment. FIG. 4 is an agricultural schematic diagram of the novel liquid recycling device.

13 M301693 【主要元件符號說明】 I ...........回收桶 II .........底壁 12………頂壁 13………圍繞壁 14………回收液入口 15 .........出口 16 .........調和液入口 17………排廢口 18* —…新液入口 19………清洗液入口 2 .........第一連接單元 21………第一導管 22………第一幫浦 23………第一暫存桶 24………第三導管 25.........第三幫浦 3··.......第二連接單元 31………第二導管 32………第二幫浦 3 3......…第二暫存桶 34………第四導管 35 ·… •…·第四幫浦 36… 溫度控制器 4…… ••…攪拌器 41 .… -·…馬達 42 ·… .....攪拌件 5…… ••…調和單元 5卜… •—调和液供應 52 ·… …"定3:幫浦 53 *… …-第五導管 6" 檢測單元 61 *… .....黏度計 62 ·……"溫度計 63………重量計 1"…"…·新液單元 71.........新液供應桶 72………第六導管 73 -....."第六幫浦 74………第七導管 75………第七幫浦 8 —…*…機台 81 ·"……基板 1413 M301693 [Description of main component symbols] I ...........Recycling bin II ......... bottom wall 12......top wall 13......around wall 14......... Recycled liquid inlet 15 ... ... outlet 16 ... ... blending liquid inlet 17 ... ... discharge waste port 18 * - ... new liquid inlet 19 ... ... cleaning liquid inlet 2 . . . . the first connecting unit 21...the first duct 22...the first pump 23...the first temporary bucket 24...the third duct 25... ...the third pump 3··....the second connecting unit 31...the second duct 32...the second pump 3 3...the second temporary bucket 34.........fourth conduit 35 ·... •...·fourth pump 36... Temperature controller 4... ••...Agitator 41 .... -·...Motor 42 ·... ••...Reconciliation unit 5...•—Condition fluid supply 52 ·..."Set 3: Pump 53 *... - Fifth conduit 6" Detection unit 61 *..... Viscometer 62 ·... "thermometer 63.........weight 1"..."...·new liquid unit 71.........new liquid supply tank 72.........sixth conduit 73 -....." Seventh conduit 74 pump 75 ......... ......... seventh pump 8 - ... * ... machine 81 · " ...... substrate 14

Claims (1)

M301693 九、申請專利範圍: 1· 一種液體循環回收裝置,連接一機台,並可利用一調和 液來混合、處理自該機台排出的待回收液,包含: 一回收桶,用於存放待回收液; 一第一連接單元,連接機台與回收桶並用於將待回 收液自機台輸送至回收桶; 一第二連接單元,連接機台與回收桶並用於將經過 檢測且合格的待回收液自回收桶輸送至機台; 授拌器’設置在該回收桶上,用於擾拌待回收液 一調和單元,連接該回收桶並用於提供調和液至回 收桶與待回收液混合;及 一檢測單元,連接該回收桶並檢測存放於回收桶中 的待回收液; 田待回收液檢測合格後是供應機台再度利用,當該 待回收液檢測不合格時,利用調和單元將調和液與待回 收液混合並再次檢測。 2·依據申請專利範圍第丨項所述之液體循環回收裝置,其 中,該檢測單元包括—用於檢測待回收液的黏度的黏度 計。 3·依據申清專利範圍第2項所述之液體循環回收裝置,其 中,該檢測單元更包括一用於檢測待回收液的溫度的溫 度計。 4.依據巾請專利範圍第3項所述之液體循環回收裝置,其 15 M301693 中’該回收桶包括一與該第一連接單元連接的回收液入 口、一與該第二連接單元連接的出口、一與該調和單元 連接的調和液入口,以及一用於排放多次處理及檢測後 仍無法達到合格標準之待回收液的排廢口。 5·依據申請專利範圍第4項所述之液體循環回收裝置,其 中’該調和單元包括一個用來存放調和液的調和液供應 桶、一連接調和液供應桶與回收桶之調和液入口的第五 導管,以及一設置在第五導管管路上並用於控制調和液 流入回收桶的流量的定量幫浦。 6·依據申請專利範圍第5項所述之液體循環回收裝置,其 中’該第一連接單元包括一條連接機台與回收桶之回收 液入口的第一導管,以及一設置在第一導管管路上的第 一幫浦。 7 •依據申請專利範圍第6項所述之液體循環回收裝置,其 中’ 6亥第二連接單元包括一條連接機台與回收桶之出口 的第二導管,以及一設置在第二導管管路上的第二幫浦 〇 8 •依據申請專利範圍第7項所述之液體循環回收裝置,更 包含一新液單元,該新液單元包括一用於供新的藥液容 裝的新液供應桶、一連接新液供應桶與回收桶的第六導 管、一設置在第六導管管路上並將新的藥液輸送至回收 甬的苐/、幫浦、一連接新液供應桶與機台的第七導管、 。 又置在第七導管管路上並將新的藥液輸送至機台的第 七幫浦。 M3 01693 依據中4專利㈣第5項所述之液體循環回收裝置,龙 連接單元包括—用於暫存自機台排出的待回 攻、-暫存桶、-連接機台與第—暫存桶的第 管、-設置在第-導管管路上的第—幫浦、—連接第— 暫存桶與回收桶之回收液人σ的第三導管,以及_ 在第三導管管路上的第三幫浦。 •依據申睛專利範圍第9項所述之液體循環回收裝置,其 、"亥第一連接單元包括一用於暫存檢測合格的待回收 :的第二暫存桶、一連接回收桶之出口與第二暫存桶的 第官、一設置在第二導管管路上的第二幫浦、一連 接第_暫存桶與機台的第四導管,以及一設置在第四導 管管路上的第四幫浦。 依據申請專利範圍第1〇項所述之液體循環回收裝置,更 δ 連接苐二暫存桶並供應新的藥液至第二暫存桶中 的新液單元,該新液單元包括一個新液供應桶、一條連 接该新液供應桶與第二暫存桶的第六導管,以及一個設 置在第六導管管路上的第六幫浦。 12 依據申睛專利範圍第1至11項中任一項所述之液體循環 。收破置’其中’該擾拌器包括一設置在回收桶之一頂 ^ 的馬達,以及一伸入該回收桶内並受馬達驅動而轉 動並授拌待回收液的攪拌件。 17M301693 IX. Patent application scope: 1. A liquid circulation recovery device, which is connected to a machine, and can use a blending liquid to mix and process the liquid to be recovered discharged from the machine, comprising: a recycling barrel for storage a first connecting unit, connecting the machine table and the recycling barrel and for conveying the liquid to be recovered from the machine to the recycling barrel; a second connecting unit connecting the machine and the recycling barrel for using the tested and qualified The recovery liquid is sent from the recovery tank to the machine; the agitator is disposed on the recovery tank, and is used to disturb the recovery liquid to be reconciled unit, and is connected to the recovery tank and used to supply the mixing liquid to the recovery tank to be mixed with the liquid to be recovered; And a detecting unit, connecting the recycling barrel and detecting the liquid to be recovered stored in the recycling barrel; after the qualified recovery liquid is tested, the supply machine is reused, and when the detection of the liquid to be recovered is unqualified, the reconciling unit is used to reconcile The liquid is mixed with the liquid to be recovered and detected again. 2. The liquid recycling apparatus according to the above application, wherein the detecting unit comprises a viscosity meter for detecting the viscosity of the liquid to be recovered. 3. The liquid recycling apparatus according to claim 2, wherein the detecting unit further comprises a temperature meter for detecting the temperature of the liquid to be recovered. 4. The liquid circulation recovery device according to the third aspect of the invention, wherein the recycling bin comprises a recovery liquid inlet connected to the first connection unit and an outlet connected to the second connection unit. a blistering liquid inlet connected to the tempering unit, and a venting port for the liquid to be recovered which is not capable of meeting the eligibility criteria after being subjected to multiple treatments and tests. 5. The liquid recycling device according to claim 4, wherein the mixing unit comprises a blending liquid supply tank for storing the blending liquid, and a blending liquid inlet for connecting the blending liquid supply tank and the recovery tank. A five-catheter, and a dosing pump disposed on the fifth conduit line for controlling the flow of the conditioning fluid into the recovery tank. 6. The liquid recycling apparatus according to claim 5, wherein the first connecting unit comprises a first conduit connecting the recovery inlet of the machine and the recovery tank, and a first conduit is disposed on the first conduit The first pump. 7: The liquid recycling device according to claim 6, wherein the '6 ho second connecting unit comprises a second conduit connecting the machine and the outlet of the recovery bin, and a second conduit disposed on the second conduit The second liquid pump 8 according to the scope of claim 7 further includes a new liquid unit including a new liquid supply tank for the new liquid medicine storage, a sixth conduit connecting the new liquid supply tank and the recovery tank, a crucible disposed on the sixth conduit conduit and transporting the new chemical liquid to the recovery crucible, a pump, and a connection between the new liquid supply tank and the machine Seven catheters, . It is placed on the seventh conduit and delivers the new liquid to the seventh pump of the machine. M3 01693 According to the liquid circulation recovery device described in Item 5 of the fourth patent (4), the dragon connection unit includes: a temporary to be attacked for temporary storage from the machine, a temporary storage barrel, a connection machine and a first temporary storage a tube of the barrel, a first pump disposed on the first conduit conduit, a third conduit connecting the first storage tank and the recovery tank, and a third conduit on the third conduit conduit Pump. The liquid circulation recovery device according to claim 9, wherein the first connection unit includes a second temporary storage bucket for temporary storage inspection and a connection recovery bucket. An outlet and a second temporary storage bucket, a second pump disposed on the second conduit conduit, a fourth conduit connecting the first temporary storage bucket and the machine, and a fourth conduit disposed on the fourth conduit conduit The fourth pump. According to the liquid circulation recovery device described in the first aspect of the patent application, the δ is connected to the second temporary storage tank and supplies the new chemical liquid to the new liquid unit in the second temporary storage tank, the new liquid unit including a new liquid A supply tank, a sixth conduit connecting the new liquid supply tank and the second temporary storage tank, and a sixth pump disposed on the sixth conduit line. 12 The liquid circulation according to any one of claims 1 to 11. The scrambler includes a motor disposed at a top of the recovery tub, and a stirring member that extends into the recovery tub and is driven by the motor to rotate and feed the liquid to be recovered. 17
TW95207918U 2006-05-09 2006-05-09 Apparatus of liquid circulating and recycling TWM301693U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396058B (en) * 2008-07-25 2013-05-11 Chi Mei Corp Photoresist recovery cycle system
TWI483784B (en) * 2009-07-31 2015-05-11 Tokyo Electron Ltd Liquid treatment apparatus, liquid treatment method and storage medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396058B (en) * 2008-07-25 2013-05-11 Chi Mei Corp Photoresist recovery cycle system
TWI483784B (en) * 2009-07-31 2015-05-11 Tokyo Electron Ltd Liquid treatment apparatus, liquid treatment method and storage medium

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