CN101962775B - Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof - Google Patents

Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof Download PDF

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CN101962775B
CN101962775B CN201010296599XA CN201010296599A CN101962775B CN 101962775 B CN101962775 B CN 101962775B CN 201010296599X A CN201010296599X A CN 201010296599XA CN 201010296599 A CN201010296599 A CN 201010296599A CN 101962775 B CN101962775 B CN 101962775B
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sulfuric acid
micro
etching solution
ydrogen peroxide
stablizer
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CN101962775A (en
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何世武
崔磊
李建光
李明军
吴超
王大定
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ShenZhen JeCh Technology Co., Ltd.
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SHENZHEN JECH TECHNOLOGY Co Ltd
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Abstract

The invention is applied in the field of microetching, and provides a sulfuric acid/hydrogen peroxide microetchant stabilizer and a preparation method thereof. The sulfuric acid/hydrogen peroxide microetchant stabilizer comprises the following components in percentage by weight: 3 to 6 percent of alcohol, 10 to 15 percent of organic amine, 2 to 5 percent of sulfonic acid and 40 to 85 percent of water. High-negativity O and N atoms of the alcohol, the organic amine and the sulfonic acid in the stabilizer form hydrogen bonds with free groups [HO.2] decomposed by hydrogen peroxide, so the sulfuric acid/hydrogen peroxide microetchant stabilizer effectively reduces the activity of the [HO.2], greatly reduces the decomposition of the hydrogen peroxide, maintains the concentration of the hydrogen peroxide in microetchant, and ensures stable microetching rate in the microetching process of the sulfuric acid/hydrogen peroxide (H2SO4/H2O2) microetchant, and smooth, uniform and non-black board surfaces after the microetching.

Description

A kind of sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer and preparation method thereof
Technical field
The invention belongs to little erosion field, relate in particular to a kind of sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer and preparation method thereof.
Background technology
In the printed circuit board course of processing, many technologies all need be carried out little loss pre-treatment, electroless copper plating, electric plating of whole board, graphic plating, the black oxidation of internal layer, hot air leveling or the like.The quality of little loss effect often influences the quality of next process.H 2SO 4/ H 2O 2Advantages such as micro-etching solution is more superior a kind of, and it has little erosion constant rate, and it is big to hold the copper amount, and aftertreatment is simple, and is pollution-free, but H 2SO 4/ H 2O 2Ydrogen peroxide 50 decomposes easily in the system, can make plate face blackout, and little erosion is inhomogeneous, thereby has improved the cost and the quantity discharged of material greatly, and the cl ions of trace also can make speed descend in the water, therefore, and H 2SO 4/ H 2O 2Being decomposed into of ydrogen peroxide 50 influences H in the micro-etching solution 2SO 4/ H 2O 2The big problem that micro-etching solution is used.
Summary of the invention
In view of this, the embodiment of the invention provides sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer, solves in the prior art owing to decomposing hydrogen dioxide solution causes the technical problem that etching speed is unstable, the etching panel turns black.
The embodiment of the invention is achieved in that
A kind of sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer, said sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer comprises following components in weight percentage content:
Figure GDA0000105635470000011
The embodiment of the invention also provides the preparation method of a kind of sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer, comprises the steps:
Following ingredients by weight percent is mixed, and stir process obtains the sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer of the embodiment of the invention,
Figure GDA0000105635470000021
The sulfuric acid of the embodiment of the invention/ydrogen peroxide 50 micro-etching solution stablizer is through the free group [HO of strong negativity O, N atom and the decomposing hydrogen dioxide solution of alcohol, organic amine and sulfonic acid in the stablizer 2] form hydrogen bond, effectively reduced [HO 2] activity, significantly reduced the decomposition of ydrogen peroxide 50, kept the concentration of ydrogen peroxide 50 in the micro-etching solution, simultaneously, the stablizer of present embodiment also has good resistance effect to cl ions.Therefore, the stablizer of present embodiment guarantees at sulfuric acid/ydrogen peroxide 50 (H 2SO 4/ H 2O 2) in little erosion process of micro-etching solution, little erosion rate stabilization, after little erosion, the plate face is smooth, evenly do not turn black.
The sulfuric acid of the embodiment of the invention/ydrogen peroxide 50 micro-etching solution stablizer preparation method, simple to operate, with low cost, free from environmental pollution, be fit to suitability for industrialized production.
Description of drawings
Fig. 1 is the etching effect figure of the embodiment of the invention and Comparative Examples.
Embodiment
In order to make the object of the invention, technical scheme and advantage clearer,, the present invention is further elaborated below in conjunction with accompanying drawing and embodiment.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
The embodiment of the invention provides a kind of sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer, and this sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer comprises following components in weight percentage content:
Figure GDA0000105635470000031
At sulfuric acid/ydrogen peroxide 50 (H 2SO 4/ H 2O 2) in the micro-etching solution, ydrogen peroxide 50 can decompose.H 2O 2Decomposition course be:
H 2O 2→2OH
(soon) reaction below taking place then:
OH+H 2O 2→H 2O+HO 2
2HO 2→H 2O 2+O 2
Ydrogen peroxide 50 can produce radical [HO in decomposition 2], the decomposing hydrogen dioxide solution speed of response will depend on living radical [HO 2] quantity.[HO 2] structure be [O-O-H], O-H key easy fracture forms [O 2] and [H].The sulfuric acid of the embodiment of the invention/ydrogen peroxide 50 micro-etching solution stablizer adds alcohol, organic amine, sulfonic acid.Contain strong negative O atom in the hydroxyl [OH] of alcohol, have strong electrophilic function; Have strong negative N atom in the amido of organic amine [NH-], have strong electrophilic function; Sulfonic group in the sulfonic acid-[SO 3H] contain strong negative O atom, have more high-strength electrophilic function.Above-mentioned strong negative O, N atom can with [HO 2] in the hydrogen evolution hydrogen bond, the electronic cloud on [O-O] will to [O-H] skew, thereby strengthened [O-H] key, reduced [HO 2] activity, significantly reduced the decomposition of ydrogen peroxide 50.
Particularly, the alcohol of the embodiment of the invention comprises various alcohol, and for example monohydroxy-alcohol, divalent alcohol or polyvalent alcohol use divalent alcohol or polyvalent alcohol, requires between the hydroxyl on divalent alcohol or the polyvalent alcohol not generation space inhibition.For example ethanol, propyl alcohol, 1,4 butyleneglycol, terepthaloyl moietie, propyl carbinol, Ucar 35, hexan-hexol are preferably in 1,4 butyleneglycol, terepthaloyl moietie, propyl carbinol, the Ucar 35 one or more, use two or more alcohol, and mass ratio separately is restriction not.The alcohol of the embodiment of the invention; Also comprise the alcohol that contains sulfonic group or amido; Thanomin for example, but generation space inhibition not between hydroxyl and sulfonic group or the amido, for example hydroxyl not can with sulfonic group generation space inhibition or hydroxyl not can with amido generation space inhibition.
The organic amine of the embodiment of the invention comprises one or more in monoamine, diamine and the polyamine; For example; Methylamine, ethamine, aniline, benzylamine, triethylene diamine, triethylamine, trimethylammonium benzylamine, dimethylethanolamine, methylenediphenyl diamines, PAH and polymine.But contain the organic amine of an amido, the organic amine of two or more amidos, comprise two or more amidos on the organic amine, require not exist between the amido steric restriction effect.Be preferably in thanomin, diethylolamine, n-Butyl Amine 99, the NSC 9824 one or more, use two or more organic amines, mass ratio separately is restriction not.The organic amine of the embodiment of the invention also comprises and contains for example amidosulfonic acid of hydroxyl or sulfonic organic amine, but generation space inhibition not between amido and hydroxyl or the sulfonic group, for example amido and hydroxyl, amido and sulfonic group can the generation space inhibitions.
The sulfonic group compound of the embodiment of the invention comprise in one in alkylsulphonic acid, aryl sulfonic acid, the amidosulfonic acid or more than; Contain a sulfonic group, two or more sulfonic sulfonic group compounds.Use comprises two or more sulfonic sulfonic acid, requires between the sulfonic group not generation space inhibition.Be preferably in hexanaphthene sulfonic acid, amidosulfonic acid, the Trimetylene sulfonic acid one or more, use two or more sulfonic group compounds, mass ratio separately is restriction not.The sulfonic group compound of the embodiment of the invention also comprises the sulfonic acid that contains hydroxyl or amido, cyclohexylamine sulfonic acid for example, Trimetylene sulfonic acid, tosic acid, amidosulfonic acid.But generation space inhibition not between sulfonic group and hydroxyl or the amido for example can the generation space inhibition between sulfonic group and hydroxyl, sulfonic group and the amido.
Further, the H of the embodiment of the invention 2SO 4/ H 2O 2In the micro-etching solution stablizer, comprise that also weight percentage is the sulfuric acid of 2-5%, vitriolic concentration is restriction not, is preferably 98% sulfuric acid.Through in stablizer, adding sulfuric acid, can prevent the volatilization of organic amine, keep the effect of embodiment of the invention stablizer.Make the stablizer and the sulfuric acid/ydrogen peroxide 50 micro-etching solution of the embodiment of the invention have good intermiscibility simultaneously.
Sulfuric acid/ydrogen peroxide 50 (H of the embodiment of the invention 2SO 4/ H 2O 2) the micro-etching solution stablizer, through the free group [HO of the strong negativity O in the stablizer, N atom and decomposing hydrogen dioxide solution 2] form hydrogen bond, significantly reduced the decomposition of ydrogen peroxide 50, kept the concentration of ydrogen peroxide 50 in the micro-etching solution, simultaneously, the stablizer of the embodiment of the invention has good resistance effect to the cl ions in the micro-etching solution, guarantees at sulfuric acid/ydrogen peroxide 50 (H 2SO 4/ H 2O 2) in little erosion process of micro-etching solution, little erosion rate stabilization, after little erosion, the plate face is smooth, all with not turn black.
The embodiment of the invention also provides the preparation method of a kind of sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer, and step is following:
Following ingredients by weight percent is mixed, and stir process obtains the sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer of the embodiment of the invention,
Figure GDA0000105635470000051
Further, among the preparation method of the sulfuric acid of the embodiment of the invention/ydrogen peroxide 50 micro-etching solution stablizer, after the said components mixing, add the sulfuric acid of 3-5% again, this vitriolic concentration is restriction not, is preferably 98% sulfuric acid.Above-mentioned stir process is carried out at normal temperatures and pressures, and the time is restriction not, preferably under the 0.8-1.3 atmospheric pressure, stirs 30-60 minute.
The preparation method of the sulfuric acid of the embodiment of the invention/ydrogen peroxide 50 micro-etching solution stablizer, simple to operate, raw materials cost is cheap, is suitable for suitability for industrialized production.
Sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer below in conjunction with specific embodiment is set forth in detail.
Embodiment one
The micro-etching solution stablizer of present embodiment, its component and weight percent are following:
1,4 butyleneglycol 3%
Thanomin 3%, n-Butyl Amine 99 7%
Amidosulfonic acid 2%
Sulfuric acid 3%
Water 83%.
According to the aforementioned proportion preparation, the ratio of content 0.5-2 ‰ is added to H with above-mentioned micro-etching solution stablizer by weight 2O 2Concentration is 12g/L, H 2SO 4Concentration is in the micro-etching solution of 120g/L, measures little erosion speed when temperature is 30 ℃.
Embodiment two
The micro-etching solution stablizer of present embodiment, its component and weight percent are following:
1,4 butyleneglycol 5%
NSC 9824 12%
Trimetylene sulfonic acid 3%
Sulfuric acid 3%
Water 77%.
According to the aforementioned proportion preparation, the ratio of content 0.5-2 ‰ is added to H with above-mentioned micro-etching solution stablizer by weight 2O 2Concentration is 12g/L, H 2SO 4Concentration is in the micro-etching solution of 120g/L, measures little erosion speed when temperature is 30 ℃.
Embodiment three
A kind of micro-etching solution stablizer, its component and weight percent are following:
Terepthaloyl moietie 5%
Thanomin 8%, n-Butyl Amine 99 7%
Cyclohexylamine sulfonic acid 5%
Sulfuric acid 5%
Water 70%.
According to the ratio preparation, be added to H by 0.5-2 ‰ 2O 2Concentration is 12g/L, H 2SO 4Concentration is when 30 ℃ of temperature, to measure little erosion speed in the micro-etching solution of 120g/L.
Comparative Examples
Use H 2O 2Concentration is 12g/L, H 2SO 4Concentration be the micro-etching solution of 120g/L as blank, when temperature is 30 ℃, measure little erosion speed.Little erosion speed is 7, and plate face blackout has seal, when opening cylinder with tap water, and plate face blackout, little erosion speed is 0.
See also Fig. 1, Fig. 1 shows the embodiment of the invention and the little erosion effect of Comparative Examples situation, in embodiment one, embodiment two and embodiment three; Increase along with stabilizer concentration of the present invention; Little erosion speed of micro-etching solution is more than 10, and little erosion speed of micro-etching solution is increasing gradually, and ascendant trend is in line.In Comparative Examples, do not add stablizer of the present invention, so its little erosion speed has only 7.This micro-etching solution stablizer that proves absolutely the embodiment of the invention has active effect to reducing the decomposition of ydrogen peroxide 50.
The above is merely preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of within spirit of the present invention and principle, being done, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.

Claims (8)

1. sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer, said sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer comprises following components in weight percentage content:
Figure FDA0000137787580000011
2. sulfuric acid as claimed in claim 1/ydrogen peroxide 50 micro-etching solution stablizer is characterized in that, said alcohol be in monohydroxy-alcohol, divalent alcohol or the polyvalent alcohol more than one.
3. sulfuric acid as claimed in claim 1/ydrogen peroxide 50 micro-etching solution stablizer is characterized in that said alcohol is more than one in 1,4 butyleneglycol, terepthaloyl moietie, propyl carbinol, the Ucar 35.
4. sulfuric acid as claimed in claim 1/ydrogen peroxide 50 micro-etching solution stablizer is characterized in that said organic amine is more than one in monoamine, diamine and the polyamine.
5. sulfuric acid as claimed in claim 1/ydrogen peroxide 50 micro-etching solution stablizer is characterized in that said organic amine is more than one in thanomin, diethylolamine, n-Butyl Amine 99, the NSC 9824.
6. sulfuric acid as claimed in claim 1/ydrogen peroxide 50 micro-etching solution stablizer is characterized in that, said sulfonic group compound is more than one in alkylsulphonic acid, aryl sulfonic acid, the amidosulfonic acid.
7. sulfuric acid as claimed in claim 1/ydrogen peroxide 50 micro-etching solution stablizer is characterized in that, said sulfonic group compound is more than one in cyclohexylamine sulfonic acid, the Trimetylene sulfonic acid.
8. sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer preparation method comprises the steps:
Following ingredients by weight percent is mixed, and stir process obtains sulfuric acid/ydrogen peroxide 50 micro-etching solution stablizer,
Figure FDA0000137787580000012
Figure FDA0000137787580000021
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CN104532240A (en) * 2014-12-31 2015-04-22 东莞市富默克化工有限公司 Coarse micro-etching agent used in circuit board and preparation method of coarse micro-etching agent
CN105734571A (en) * 2016-04-21 2016-07-06 广州恩源化工科技有限公司 Metal surface micro-etching liquid
CN107142711A (en) * 2017-06-21 2017-09-08 清远市金沣顺助剂有限公司 A kind of hydrogen peroxide cold bleaching catalyst and its preparation method and application
CN110856348A (en) * 2019-10-09 2020-02-28 广东利尔化学有限公司 Neutralizing and reducing agent for PCB (printed circuit board) glue removal post-treatment
CN112831774A (en) * 2019-11-25 2021-05-25 惠东县建祥电子科技有限公司 Copper deposition method suitable for copper-clad plate
CN111041487A (en) * 2019-12-31 2020-04-21 苏州天承化工有限公司 Environment-friendly PCB electroplating rack copper stripping liquid and copper stripping method using same
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CN112342546A (en) * 2020-10-23 2021-02-09 珠海隆康电子科技有限公司 Microetching stabilizer and preparation method thereof
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