CN101962775B - Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof - Google Patents
Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof Download PDFInfo
- Publication number
- CN101962775B CN101962775B CN201010296599XA CN201010296599A CN101962775B CN 101962775 B CN101962775 B CN 101962775B CN 201010296599X A CN201010296599X A CN 201010296599XA CN 201010296599 A CN201010296599 A CN 201010296599A CN 101962775 B CN101962775 B CN 101962775B
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- CN
- China
- Prior art keywords
- sulfuric acid
- micro
- etching solution
- ydrogen peroxide
- stablizer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 91
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000003381 stabilizer Substances 0.000 title abstract description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 150000001412 amines Chemical class 0.000 claims abstract description 15
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims description 54
- 150000002978 peroxides Chemical class 0.000 claims description 42
- 150000001875 compounds Chemical class 0.000 claims description 6
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical compound NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 claims description 6
- -1 terepthaloyl moietie Chemical compound 0.000 claims description 6
- KGWDUNBJIMUFAP-KVVVOXFISA-N Ethanolamine Oleate Chemical compound NCCO.CCCCCCCC\C=C/CCCCCCCC(O)=O KGWDUNBJIMUFAP-KVVVOXFISA-N 0.000 claims description 5
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 claims description 5
- 238000003756 stirring Methods 0.000 claims description 5
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 claims description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 3
- HCAJEUSONLESMK-UHFFFAOYSA-N cyclohexylsulfamic acid Chemical compound OS(=O)(=O)NC1CCCCC1 HCAJEUSONLESMK-UHFFFAOYSA-N 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 3
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 2
- 150000004985 diamines Chemical class 0.000 claims description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims description 2
- 229920000768 polyamine Polymers 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 11
- 238000000354 decomposition reaction Methods 0.000 abstract description 7
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 5
- 239000001257 hydrogen Substances 0.000 abstract description 5
- 125000004433 nitrogen atom Chemical group N* 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 125000004430 oxygen atom Chemical group O* 0.000 abstract description 3
- 235000011149 sulphuric acid Nutrition 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 description 19
- 125000003368 amide group Chemical group 0.000 description 14
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 11
- 230000005764 inhibitory process Effects 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 4
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QMBDPPLSBOIXKA-UHFFFAOYSA-N N,N-dimethylmethanamine phenylmethanamine Chemical compound C1(=CC=CC=C1)CN.CN(C)C QMBDPPLSBOIXKA-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- 239000012972 dimethylethanolamine Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- ICJBPZBRDLONIF-UHFFFAOYSA-N hexane-1,1,1,2,2,3-hexol Chemical compound CCCC(O)C(O)(O)C(O)(O)O ICJBPZBRDLONIF-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
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Abstract
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Priority Applications (1)
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CN201010296599XA CN101962775B (en) | 2010-09-29 | 2010-09-29 | Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof |
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CN201010296599XA CN101962775B (en) | 2010-09-29 | 2010-09-29 | Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof |
Publications (2)
Publication Number | Publication Date |
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CN101962775A CN101962775A (en) | 2011-02-02 |
CN101962775B true CN101962775B (en) | 2012-06-27 |
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CN201010296599XA Active CN101962775B (en) | 2010-09-29 | 2010-09-29 | Sulfuric acid/hydrogen peroxide microetchant stabilizer and preparation method thereof |
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CN (1) | CN101962775B (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103451716A (en) * | 2012-05-31 | 2013-12-18 | 际华三五二二装具饰品有限公司 | Plating layer stripping corrosion solution |
CN103572291B (en) * | 2012-07-25 | 2015-09-30 | 苏州协鑫光伏科技有限公司 | Electroplating diamond wire saw coating corrosive fluid and scroll saw connection of broken lines method |
CN104532240A (en) * | 2014-12-31 | 2015-04-22 | 东莞市富默克化工有限公司 | Coarse micro-etching agent used in circuit board and preparation method of coarse micro-etching agent |
CN105734571A (en) * | 2016-04-21 | 2016-07-06 | 广州恩源化工科技有限公司 | Metal surface micro-etching liquid |
CN107142711A (en) * | 2017-06-21 | 2017-09-08 | 清远市金沣顺助剂有限公司 | A kind of hydrogen peroxide cold bleaching catalyst and its preparation method and application |
CN110856348A (en) * | 2019-10-09 | 2020-02-28 | 广东利尔化学有限公司 | Neutralizing and reducing agent for PCB (printed circuit board) glue removal post-treatment |
CN112831774A (en) * | 2019-11-25 | 2021-05-25 | 惠东县建祥电子科技有限公司 | Copper deposition method suitable for copper-clad plate |
CN111041487A (en) * | 2019-12-31 | 2020-04-21 | 苏州天承化工有限公司 | Environment-friendly PCB electroplating rack copper stripping liquid and copper stripping method using same |
CN111020586A (en) * | 2019-12-31 | 2020-04-17 | 苏州天承化工有限公司 | Environment-friendly rack stripping solution for stripping copper and tin and copper and tin stripping method using environment-friendly rack stripping solution |
CN112342546A (en) * | 2020-10-23 | 2021-02-09 | 珠海隆康电子科技有限公司 | Microetching stabilizer and preparation method thereof |
CN113355674A (en) * | 2021-07-12 | 2021-09-07 | 广东恒锦通科技有限公司 | Stripping and hanging frame stabilizing agent |
CN114045495A (en) * | 2021-10-26 | 2022-02-15 | Tcl华星光电技术有限公司 | Copper etching solution and manufacturing method of array substrate |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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BE791457A (en) * | 1971-11-18 | 1973-05-16 | Du Pont | STABILIZED ACID SOLUTIONS OF OXYGENATED WATER |
JP2004300161A (en) * | 2004-07-27 | 2004-10-28 | Mitsubishi Rayon Co Ltd | Method for producing aminosulfonic acid-n,n-diacetic acid and its alkali metal salt |
CN100368598C (en) * | 2005-08-09 | 2008-02-13 | 广东省石油化工研究院 | Copper or copper alloy surface tiny-etching treatment fluid for smoothing |
CN101093363A (en) * | 2006-06-23 | 2007-12-26 | 天津晶岭电子材料科技有限公司 | Cleaning liquid in use for removing photoresist on integrate circuit |
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Effective date of registration: 20140625 Address after: 629000 No. 3 South Canal Road, Chuangxin Industrial Park, Suining, Sichuan Patentee after: Innoquick Electronics Technology Co., Ltd. Address before: 1, 3, room 15, 2 floor, COFCO real estate group, Baoan District, Baoan District, Guangdong, Shenzhen, 518101 Patentee before: ShenZhen JeCh Technology Co., Ltd. |
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Address after: 629000 No. 3 South Canal Road, Suining Innovation Industrial Park, Sichuan Patentee after: Sichuan tronica electronic Polytron Technologies Inc Address before: 629000 No. 3 South Canal Road, Suining Innovation Industrial Park, Sichuan Patentee before: Innoquick Electronics Technology Co., Ltd. |
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Effective date of registration: 20180628 Address after: 518000 Guangdong, Shenzhen, Baoan District, Sha Tin Street, Xinqiao New Bridge Industrial Zone Xinfa two road 13 Factory 1 1, 2, 3, 2 Patentee after: ShenZhen JeCh Technology Co., Ltd. Address before: 629000 No. 3 South Canal Road, Suining Innovation Industrial Park, Sichuan Patentee before: Sichuan tronica electronic Polytron Technologies Inc |
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