CN101952933A - The equipment and the method for the fuel supplying that adopts by emission-reducing system that effluent is effectively subdued - Google Patents
The equipment and the method for the fuel supplying that adopts by emission-reducing system that effluent is effectively subdued Download PDFInfo
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- CN101952933A CN101952933A CN200980105587XA CN200980105587A CN101952933A CN 101952933 A CN101952933 A CN 101952933A CN 200980105587X A CN200980105587X A CN 200980105587XA CN 200980105587 A CN200980105587 A CN 200980105587A CN 101952933 A CN101952933 A CN 101952933A
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- 239000000446 fuel Substances 0.000 title claims abstract description 331
- 238000000034 method Methods 0.000 title claims description 19
- 238000007599 discharging Methods 0.000 claims abstract description 28
- 230000009467 reduction Effects 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 8
- 230000001902 propagating effect Effects 0.000 claims 2
- 238000002485 combustion reaction Methods 0.000 description 53
- 239000007800 oxidant agent Substances 0.000 description 20
- 239000007921 spray Substances 0.000 description 18
- 230000001590 oxidative effect Effects 0.000 description 15
- 239000000203 mixture Substances 0.000 description 13
- 238000009826 distribution Methods 0.000 description 9
- 239000003570 air Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000005242 forging Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 150000001398 aluminium Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
- Gas Burners (AREA)
Abstract
A kind of equipment is used for that fuel is introduced electronic installation and makes effluent reduction of discharging instrument, comprising: manifold; Fuels sources, it is suitable for fuel is supplied to described manifold by fuel channel; With a plurality of nozzles, it is suitable for receiving fuel from described manifold; Wherein, described manifold is suitable for fuel is supplied to described nozzle with the speed fuel that is higher than flame speed.
Description
Technical field
The present invention generally is relevant to electronic installation and makes emission-reducing system, especially by this emission-reducing system fuel supplying to reduce discharging effluent.
Background technology
Traditional electronic devices manufacturing emission-reducing system is subdued effluent, to reduce toxicity, inflammability or other undesirable feature of effluent.This effluent may pass through the electronic installation manufacturing equipment (as, display panel, semiconductor, solar energy etc.) manufacturing.Some traditional emission-reducing systems can carry out trim process to effluent in the combustion zone, and this combustion zone combustion fuel is subdued required heat to provide to effluent.
Traditional emission-reducing system can use usually more than one nozzle with fuel spray to the combustion zone, and often this traditional emission-reducing system may not have uniform combustion zone or zone.Uneven combustion zone may be not enough to subdue effluent, and this may cause reducing discharging the unit and discharge not desired compounds.
Therefore, need be in order to combustion zone or the regional inhomogeneity method and apparatus that improves emission-reducing system.
Summary of the invention
On the one hand, provide a kind of equipment, be used for that fuel is introduced electronic installation and make effluent reduction of discharging instrument, having comprised: manifold; Fuels sources, it is suitable for fuel is supplied to described manifold by fuel channel; With a plurality of nozzles, it is suitable for receiving fuel from described manifold; Wherein, described manifold is suitable for fuel is supplied to described nozzle with the speed fuel that is higher than flame speed.
On the other hand, provide a kind of method, be used for operating electronic devices and make emission-reducing system, may further comprise the steps: make fuel flow into manifold by fuel channel from fuel supply; With make described fuel from described manifold flow through a plurality of nozzles; Wherein, described manifold is suitable for making fuel to flow to described nozzle with the speed fuel that is higher than flame speed.
Can understand further feature of the present invention and aspect by the following detailed description of the present invention, claims and accompanying drawing.
Description of drawings
Fig. 1 has described the schematic side elevation according to the embodiment of emission-reducing system of the present invention.
Figure 1B has described the upward view according to the embodiment of fuel manifold head of the present invention.
Fig. 1 C has described the upward view according to the embodiment of effluent inlet/fuel nozzle of the present invention bunch.
Fig. 2 has described the sectional view according to the embodiment of fuel manifold of the present invention.
Fig. 3 has described the stereogram according to cartridge in the embodiment of fuel manifold of the present invention.
Fig. 4 has described to operate the flow chart that electronic installation of the present invention is made the method for emission-reducing system.
Embodiment
As mentioned above, traditional fuel combustion emission-reducing system has a plurality of nozzles, so that fuel or fuel/oxidant mixture are supplied to the combustion zone.For ease of explanation, these nozzles are called " nozzle " or " fuel nozzle " hereinafter, but please note that they can allow the fuel/oxidant mixture flow through, and perhaps only allow fuel flow through.The fuel nozzle of tradition emission-reducing system often makes fuel flow unevenly, therefore makes the temperature distributing disproportionation of combustion zone even.For example, a nozzle may spray fuel with the pressure more high or low than other fuel nozzle.Difference on the pressure may cause jet type to be different from the jet type of other nozzle.The difference of pressure also may cause being different from the fuel quantity that goes out from other nozzles spray from the fuel quantity that a nozzles spray goes out.The uneven temperature that different jet types that go out from different nozzles spray or different fuel amount may cause the combustion zone distributes.
Reduce discharging in the unit in tradition, have several reasons for supplying fuel to several fuel nozzles by different way.For example, usually by supply line, pipeline or pipeline, give nozzle with supply of fuel.These supply circuits have different length, structure, cross sectional shape, interior lights slippery and have other difference.In addition, traditional fuel combustion emission-reducing system adopts the backfire interceptor usually on each burning line.By preventing that flame front is back to burning line or fuels sources from the combustion zone by nozzle, this backfire interceptor can prevent that the fuel that is positioned at backfire interceptor upstream from being lighted.Each backfire interceptor is may be each other slightly different, and is furnished with the backfire interceptor at each cartridge and may makes fuel be dispensed to the combustion zone unevenly.Therefore, because above-mentioned and other reason, the combustion zone may not have uniform temperature and distribute.
Because this non-homogeneous burning, some effluent may not subdued from combustion zone dissipation.For example, combustion zone temperature distributes and may have a side in the combustion zone and form shape than the cold-zone.The chemicals of the effluent of heat part can be subdued effectively in the combustion zone, and the chemicals of the effluent of colder part then can't be subdued effectively in the combustion zone.Therefore, in the reduction of discharging unit of non-uniform combustion, some chemicals of not subdued may leave the combustion zone, and enter the discharging facility.
Therefore, be necessary in the combustion zone of electronic installation manufacturing effluent emission-reducing system, to provide more uniform temperature to distribute.
Method and apparatus provided by the invention system flows into a plurality of fuel flow rate and fuel pressures with the fuel nozzle of fuel spray to the combustion zone of emission-reducing system in order to balance.By equilibrating, do not make two fuel flow rates and/or two fuel pressures really become equality even be intended to do like this, but also reduced the difference between two fuel flow rates and/or two fuel pressures.Therefore, utilize the present invention, the reduction of discharging instrument can be realized even temperature distribution more in the combustion zone.Several aspects from the fuel of each nozzle stream can be balanced.For instance, but balance from the pressure and/or the flow rate of the fuel of each nozzle ejection.Additionally or alternatively, but balance from the spray distribution and/or the pattern of the fuel stream of each nozzle ejection.But balance is from other parameter of the fuel stream of each nozzle ejection, to reach more uniform combustion zone.
To distribute more uniformly in order reaching between a plurality of nozzles, to the invention provides a kind of fuel manifold with a plurality of burning lines, these burning lines are suitable for supplying fuel to equably or substantially equably each in a plurality of nozzles.Burning line may be in dimension (for example, length, girth etc.) aspect equalization, and like this, the fuel in each pipeline can be advanced all equidistant along channel-like.In addition, the burning line that can be different length is selected the dimension except that length, and feasible fuel from manifold arrives nozzle under the flow rate of equilibrium and/or pressure.Additionally or alternatively, the uniformity for the fuel stream that further promotes to flow to each nozzle can enter the mouth by single-fuel, and fuel is offered each burning line in the fuel manifold.For example, the single-fuel inlet can branch into burning line discrete more than two or two, and each burning line is connected to different spray nozzles.
In one embodiment, this single-fuel inlet can comprise the backfire interceptor.In such embodiments, this backfire interceptor can be coupled to fuel inlet, need not each burning line is all installed the backfire interceptor, side by side except may be because the fuel rheologyization of using different backfire interceptors to be caused to each burning line.Therefore, fuel can be supplied in the combustion zone more evenly by a plurality of nozzles with feature of the present invention.Therefore, the Temperature Distribution in the combustion zone can be than more even in traditional emission-reducing system.
Please refer to Fig. 1-4, all many-sides of the present invention are described below.
Fig. 1 has described embodiment according to emission-reducing system 100 provided by the invention with end view.Generally speaking, emission-reducing system 100 can be the processing emission-reducing system that burns/wash, comprise reducing discharging unit 101, it can make the fuel/oxidant mixture burns to reach high temperature, makes effluent/oxidant mixture 102 burnings to pass through the effluents of subduing to form in the combustion zone.Then can be passed to quench zone 104 through the effluent of subduing, wherein it can be cooled and/or purify, and can discharge by outlet 106 then and reduce discharging the unit.From exporting 106, reduce discharging effluent and can be further processed, purify or be disposed to atmosphere.
The effluent that can will be subdued from effluent source 108 provides to emission-reducing system 100.Effluent source 108 can be that the electronic installation of one or more any kinds is made processing unit (being designated hereinafter simply as " processing unit "), and it gives off the processing gas that can be subdued by emission-reducing system 100.More than one process chamber (not shown) may be contained in effluent source 108.Emission-reducing system 100 can be from more than one effluent source 108 (as 2,3,4,5,6 or more a plurality of sources) receive effluent.Can enter the mouth by effluent from the effluent in effluent source 108 and 110 to offer and reduce discharging unit 101.Can use more than one effluent inlet 110, and each effluent inlet can be connected to one or more effluent source 108.As shown in the figure, though effluent inlet 110 is suitable for effluent is caused combustion zone 102 by reducing discharging that side of unit, but in another embodiment (not shown), effluent inlet 110 can cause combustion zone 102 (seeing for details hereinafter) through fuel manifold head 112 with effluent.Fuel manifold head 112 can comprise fuel manifold 113, and as shown in Figure 1, it is comprised in the fuel manifold head 112.
Can fuel be offered from fuels sources 116 and reduce discharging unit 101, but these fuels sources 116 supply of hydrogen, methane or any other suitable fuel.Fuel can enter the fuel inlet 119 of fuel manifold 113 from fuels sources 116 by pipeline 118.In certain embodiments, fuels sources 116 can comprise, is suitable for the pump (not shown) of pressurized fuel.In certain embodiments, backfire interceptor 126 can be located between fuels sources 116 and the fuel inlet 119, and in these embodiments, the fuel backfire interceptor 126 of must flowing through before entering fuel manifold 113.
Can oxidant be offered from oxidizer source 120 and reduce discharging unit 101.Oxidizer source 120 can supply cleaning dry air, oxygen, oxygen-enriched air or any other suitable oxidant.In certain embodiments, from the oxidant of oxidizer source 120 can with the fuel mix from fuels sources 116, to improve the temperature of combustion zone top section.Based on the reason of safety, the amount of the oxidant of outer fuel mix can be restricted to an amount with reducing discharging the unit, and this amount makes fuel/air mixture that the fuel of enough content be arranged, and do not increase under the situation that more oxygen enters reduction of discharging unit 101 nonflammable.In certain embodiments, oxidant can enter the manifold (not shown), oxidant and fuel mix in the middle of manifold.In certain embodiments, oxidant can offer by pipeline 124 and reduce discharging unit 101.Offer the oxidant that reduces discharging unit 101 by pipeline 124 and can be introduced into combustion zone 102,102 central oxidants mix with fuel and effluent in the combustion zone, to form flammable mixture.In certain embodiments, oxidizer source 120 can comprise the pump (not shown) that is suitable for pressurized oxidant.
Fuel manifold 113 can receive fuel or fuel/air mixture by fuel inlet 119.For ease of explanation, " fuel " and " fuel/air mixture " can abbreviate " fuel " as hereinafter.A plurality of burning line (see figure 2)s of fuel manifold 113 can be delivered to by branch by the fuel that fuel inlet 119 receives, and fuel nozzle 114a-d can be provided for.Can be by fuel nozzle 114a-d with fuel spray to the combustion zone 102, in the middle of the combustion zone, effluent and fuel can combine with oxidant and with its reaction or burning.
A plurality of fuel nozzles 114 can be suitable for adopting the mode of expectation to spray fuel.For example, may expect that each of a plurality of fuel nozzle 114a-d is sprayed fuel with the spray distribution of fan-shaped (for example, triangular-section).In such embodiments, the fuel of each sprinkling from a plurality of fuel nozzle 114a-d can be overlapping before arriving combustion zone 102.Additionally or alternatively, a plurality of fuel nozzles 114 can be suitable under given fuel pressure, form fuel spray with special fuel speed.This speed fuel comparable in the combustion zone 102 flame speed faster.The flame speed of combustion zone can be the speed of flame propagation.Therefore, fuel can push away flame a plurality of fuel nozzles 114, can " backfire " not arrive in the fuel manifold 113 with the fuel of guaranteeing to light (flame).This speed fuel also can be subjected to other parameter influence, for example, and fuel viscosity, pressure etc.These other parameters also can be subjected to the influence of fuel manifold 113, will describe in detail later.
Figure 1B has described the upward view according to the embodiment of fuel manifold head 112 of the present invention.Fuel manifold head 112 can comprise one or more effluent inlet/fuel nozzle bunch 150a-d.Shown in Figure 1B, fuel manifold head 112 has four effluent inlet/fuel nozzle bunch 150a-d, but it should be understood that, fuel manifold head 112 can only have an effluent inlet/fuel nozzle bunch, maybe can have nearly two, three, five, six, seven, eight or more a plurality of effluent inlet/fuel nozzle bunch.Dotted line A represents the part further described by Fig. 1 C among Figure 1B.
Fig. 1 C describes the upward view according to the embodiment of effluent inlet/fuel nozzle of the present invention bunches 150.Effluent inlet/fuel nozzle bunches 150 can comprise effluent inlet 152.In certain embodiments, effluent inlet 152 can enter reduction of discharging unit 101 by manifold head 112 (also can in some cases by manifold 113).Shown in Fig. 1 C, effluent inlet 152 can be centered on by four fuel nozzle 114a-d.But should be appreciated that, can be with more or less fuel nozzle 114.
Fig. 2 is a schematic diagram, and it has described an embodiment of fuel manifold 113 of the present invention.As indicated above, from the fuel of fuels sources 116 pipeline 118 of can flowing through, and flow into fuel inlets 119 by backfire interceptor 126 alternatively.
Fuel manifold 113 is suitable for adopting through that select, that equate or almost equal flow rate and pressure, provides fuel to fuel nozzle 114a-d.Above-mentioned through provide that select, that equately or almost equal fuel to the mode of fuel nozzle 114a-d can make fuel nozzle with through jet type that select, that equate or almost equal with fuel spray to reducing discharging in the unit 101, particularly be sprayed in the combustion zone 102.The fuel of Pen Saing can produce compared to the combustion zone that tradition reduces discharging in the unit and have the more combustion zone of uniform temperature distribution like this, perhaps produces the combustion zone with the non-homogeneous Temperature Distribution through selecting.In certain embodiments, compared to prior art, fuel manifold of the present invention can reduce the mobile difference between a plurality of fuel nozzles.In addition, fuel manifold can be suitable under the unequal flow rate and/or pressure through selecting, and 114a-d provides fuel to fuel nozzle, to create the even or uneven Temperature Distribution of expectation in combustion zone 102.
In certain embodiments, the present invention can be by comprising each the burning line 202a-d at each fuel nozzle 114a-d, and require each burning line 202a-d being equal to each other aspect length, cross-sectional area and/or other parameter, supply of fuel (volume and pressure) more uniformly is provided.Should be appreciated that burning line can comprise a plurality of sections.For example, burning line 202a can comprise elementary section 204, secondary section 206a and tertiary area section 208a.Similarly, cartridge 202b can comprise elementary section 204, secondary section 206a and tertiary area section 208b.What should understand is, can use more or less section, and this depends on the quantity of nozzle 114 and fuel inlet 119.Be shown as straight line though also should be understood that burning line 202a-d, burning line can be any suitable shape, and is for example, crooked or circular.In certain embodiments, each section level (that is, elementary section and secondary section or the like) of coming from fuel inlet branch can have different cross-sectional areas, and it will more go through later.In certain embodiments, one or more section level can have along the length of section level and the cross section that changes.
In optional embodiment, the present invention can be by comprising each burning line 202a-d at each fuel nozzle 114a-d, and by selecting the parameter of each cartridge 202a-d, for example, length, area of section or the like, make each fuel nozzle receive the fuel of selected amount, the supply of fuel through selecting is provided with selected speed and selected pressure.
In certain embodiments, burning line 202a-d can have inner surface level and smooth or polishing, with the difference of minimizing to the frictional force of the fuel of the burning line of flowing through.
Can adopt each the geometric shape of fuel stream that can make to equate from non-combustion zone 102, (for example form, processing, forging etc.) primary fuel line section 204, secondary fuel line section 206a, each of b and three grades of burning line section 208a-d.For example, each fuel nozzle 114a-d is to secondary fuel line section 206a, and the width of b and length can equate.In addition, secondary fuel area under control section 206a, other geometry of each of b (for example, radius of corner, inside diameter surface roughness etc.) also can equate.The geometry of change such as this also can be used for three grades of cartridge section 208a-d.In certain embodiments, fuel manifold 113 of the present invention can have than more fuel nozzle 114 shown in Fig. 1 and Fig. 2.For example, fuel manifolds more of the present invention can reach about 24 or more a plurality of fuel nozzle.The reader can understand, more fuel nozzle may need the burning line section level of greater number, promptly surpasses three burning line section levels shown in Figure 2 (elementary, secondary and three grades).
Fig. 3 is a schematic diagram, and it has described an embodiment of fuel manifold 113 of the present invention.Specifically, Fig. 3 blocks stereogram, and the inner space 300 that it has been described according to fuel manifold 113 of the present invention comprises: the fuel nozzle 114 that can be communicated with inner space 300 fluids.In essence, Fig. 3 has illustrated the surface profile in space of the sky of the burning line in the body that can be formed on fuel manifold 113.Structure shown in Figure 3 can comprise primary fuel line section 204, and it can be communicated with fuel inlet 119 (Fig. 1) and with secondary fuel spool section 206a fluid.Then, secondary fuel line section 206a can be communicated with three grades of burning line section 208b fluids, and three grades of burning line section 208b can be communicated with fuel nozzle 114a-d fluid.Inner space 300 can be by machine work, forge or cast out fuel manifold 113 (Fig. 3 does not show).Inner space 300 can comprise three grades of burning line section 208b, blocks though it is shown as A-A along the line in the drawings, can be the mirror image of terminal fuel rail line 308a.
In optional embodiment, the branch's burning line that is comprised in the manifold head 112 as shown in Figures 2 and 3 can be positioned at manifold head 112 outside (not shown)s.Through last branch, burning line can be simply directly by manifold head 112 and end at fuel nozzle 114.
When work, see figures.1.and.2, fuel can be supplied to fuel manifold 113 through backfire interceptor 126 and fuel inlet 119 from fuels sources 116.In certain embodiments, can provide the single-fuel inlet 119 that is connected with single backfire interceptor 126.This backfire interceptor 126 can be suitable for preventing that (for example, in fuels sources 116) fuel is on fire in the upstream.For example, just in case the fuel in fuel manifold 113 is on fire, backfire interceptor 126 can prevent from thisly on firely to cause that the fuel of backfire interceptor 126 upstreams is on fire.Therefore, except will be described in more detail later in fuel manifold 113 the existing safety measure, backfire interceptor 126 also can provide security feature.
Fuel is by backfire interceptor 126 and after entering fuel manifold 113, can be between burning line 202a-d mean allocation, burning line 202a-d ends at fuel nozzle 114a-d.According to the present invention, that a plurality of burning line 202a-d can have at one or more attribute (for example, length, cross-sectional area, angle, internal table surface roughness etc.) aspect is also controlled/or selectable difference.Therefore, fuel can be provided to manifold 112 with by identical or much at one burning line 202a-d with identical much at one or similar flow rate and/or pressure distribution to fuel nozzle 114a-d.In certain embodiments, the quantity of fuel nozzle 114 can equal the quantity of burning line 202.Fuel can be by the manifold 113 that acts as a fuel a part and/or enter combustion zone 102 with the fuel nozzle 114a-d of fuel manifold 113 couplings.Therefore, because the comparable tradition reduction of discharging of the fuel flow rate at fuel nozzle 114a-d place and pressure unit is more even, so also can be more even from the fuel jet of a plurality of fuel nozzle 114a-d.
In addition, fuel manifold 113 can influence fuel is sprayed onto other parameter in the combustion zone 102 from fuel nozzle 114a-d.For example, the speed fuel expectation of the fuel that sprays from fuel nozzle 114a-d can be subjected to primary fuel line section 204, secondary fuel line section 206a, the influence of the feature of b and three grades of burning line section 208a-d.For example, if high-order burning line section (promptly more close fuel nozzle 114) has than the narrower diameter of low order burning line section (promptly more close fuel inlet 119), in the time of then in fuel flows into high-order burning line section and fuel nozzle 114, can cause speed fuel to raise.Therefore, by suitably selecting primary fuel line section 204, secondary fuel line section 206a, the dimension of b and three grades of burning line section 208a-d can be set at speed fuel the flame speed of the effluent, fuel and the oxidant mixture that are higher than in combustion zone 102.When reducing discharging the flame speed that the speed fuel that uses the unit is higher than the fuel combustion of spraying from fuel nozzle 114, then flame front can't be near a plurality of fuel nozzles 114, and therefore can prevent that flame from returning fuel nozzle 114.
Fig. 4 is a schematic diagram, and it has described method 400 of the present invention.This method starts from step 402, wherein makes fuel flow into manifold from fuel supply by pipeline.In step 404, make fuel from manifold with the speed fuel that is higher than flame speed a plurality of nozzles of flowing through.Method 400 extendible optional steps 406 and 408.In step 406, the fuel that flows into manifold from the fuel supply single-fuel inlet of flowing through.In step 408, flow into the backfire interceptor that the fuel of manifold is flowed through single from fuel supply.
Above-mentioned explanation only discloses exemplary embodiment of the present invention.It will be appreciated by those skilled in the art that fall in the category of the present invention to the equipment of above announcement and the modification of method.For example, if fuel manifold 113 do not need to be designed to backfire interceptor 126, then can not use backfire interceptor 126.Therefore,, should understand that other embodiment can also fall in the purport of the present invention and category that defines as claim though the present invention has obtained announcement by exemplary embodiment.
Claims (15)
1. an equipment is used for that fuel is introduced electronic installation and makes effluent reduction of discharging instrument, comprising:
Manifold;
Fuels sources, it is suitable for fuel is supplied to described manifold by fuel channel; With
A plurality of nozzles, it is suitable for receiving fuel from described manifold;
Wherein, described manifold is suitable for fuel is supplied to described nozzle with the speed fuel that is higher than flame speed.
2. equipment as claimed in claim 1 also comprises the single backfire interceptor between described manifold and described fuels sources, and described backfire interceptor is suitable for preventing that flame from propagating to described fuels sources from described manifold.
3. equipment as claimed in claim 1, wherein, described manifold also is suitable for making speed fuel between nozzle with minimum speed fuel and the nozzle with the highest speed fuel differently is reduced to about 20% littler than described the highest speed fuel.
4. equipment as claimed in claim 1, wherein, described manifold also is suitable for making speed fuel between nozzle with minimum speed fuel and the nozzle with the highest speed fuel differently is reduced to about 10% littler than described the highest speed fuel.。
5. equipment as claimed in claim 1, wherein, described speed fuel is at least three times of described flame speed.
6. equipment as claimed in claim 1, wherein, described speed fuel is at least five times of described flame speed.
7. equipment as claimed in claim 1, wherein, described manifold also is suitable for receiving fuel by the single-fuel inlet.
8. equipment as claimed in claim 1, wherein, described manifold also comprises burning line, speed fuel and pressure different of the attribute that described burning line has through selecting to reduce described nozzle.
9. a method is used for operating electronic devices and makes emission-reducing system, may further comprise the steps:
Make fuel flow into manifold by fuel channel from fuel supply; With
Make described fuel from described manifold flow through a plurality of nozzles;
Wherein, described manifold is suitable for making fuel to flow to described nozzle with the speed fuel that is higher than flame speed.
10. method as claimed in claim 9, further comprising the steps of: make the fuel backfire interceptor of flowing through, described backfire interceptor and is suitable for preventing that flame from propagating to described fuels sources from described manifold between described manifold and described fuels sources.
11. method as claimed in claim 9 is further comprising the steps of: what make speed fuel between nozzle with minimum speed fuel and the nozzle with the highest speed fuel differently is reduced to about 20% littler than described the highest speed fuel.
12. method as claimed in claim 9 is further comprising the steps of: what make speed fuel between nozzle with minimum speed fuel and the nozzle with the highest speed fuel differently is reduced to about 10% littler than described the highest speed fuel.
13. method as claimed in claim 9 is further comprising the steps of: make described fuel with the velocity flow that is at least three times of described flame speeies through described fuel nozzle.
14. method as claimed in claim 9 is further comprising the steps of: make described fuel with the velocity flow that is at least five times of described flame speeies through described fuel nozzle.
15. method as claimed in claim 9, wherein, make described fuel further comprising the steps of by the step that described fuel channel flows into described manifold: to make described fuel flow into described manifold by single manifold fuel inlet from described fuel supply from described fuel supply.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2945208P | 2008-02-18 | 2008-02-18 | |
| US61/029,452 | 2008-02-18 | ||
| PCT/US2009/034336 WO2009105434A2 (en) | 2008-02-18 | 2009-02-17 | Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101952933A true CN101952933A (en) | 2011-01-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980105587XA Pending CN101952933A (en) | 2008-02-18 | 2009-02-17 | The equipment and the method for the fuel supplying that adopts by emission-reducing system that effluent is effectively subdued |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090214991A1 (en) |
| KR (1) | KR20100119805A (en) |
| CN (1) | CN101952933A (en) |
| TW (1) | TW200940909A (en) |
| WO (1) | WO2009105434A2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2516267B (en) * | 2013-07-17 | 2016-08-17 | Edwards Ltd | Head assembly |
| WO2019148241A1 (en) * | 2018-02-01 | 2019-08-08 | Hydroflex Technologies Pty Ltd | An exhaust after-treatment system and method |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2606066A (en) * | 1947-04-03 | 1952-08-05 | Bendix Aviat Corp | Automatic flow regulator |
| US2821992A (en) * | 1947-04-19 | 1958-02-04 | Gen Motors Corp | Fuel system for gas turbine |
| US2572445A (en) * | 1947-10-29 | 1951-10-23 | Emhart Mfg Co | Gas burner flame arrester |
| US2657702A (en) * | 1949-11-07 | 1953-11-03 | Bendix Aviat Corp | Flow distributor |
| US2806354A (en) * | 1951-04-05 | 1957-09-17 | Rolls Royce | Fuel system with means to compensate for variations in liquid head due to accelerations acting on the fuel system |
| US2728650A (en) * | 1951-11-09 | 1955-12-27 | Gulf Research Development Co | Process for producing gas comprising hydrogen |
| US2676461A (en) * | 1952-04-19 | 1954-04-27 | United Aircraft Corp | Head compensating valve for fuel nozzles |
| US3558249A (en) * | 1969-05-13 | 1971-01-26 | Electric Furnace Co | Method and application for preventing flashback in premix gas burner systems |
| US3607120A (en) * | 1969-09-29 | 1971-09-21 | Midland Ross Corp | Gas-treating apparatus |
| US3887324A (en) * | 1972-01-10 | 1975-06-03 | Zink Co John | Method for non-polluting combustion of waste gases |
| US3779689A (en) * | 1972-01-10 | 1973-12-18 | Zinc J Co | Method and apparatus for non-polluting combustion of waste gases |
| US4044549A (en) * | 1972-12-11 | 1977-08-30 | Zwick Eugene B | Low emission combustion process and apparatus |
| US3834627A (en) * | 1973-04-02 | 1974-09-10 | Avco Corp | Flat air-blast fuel injector |
| US5211005A (en) * | 1992-04-16 | 1993-05-18 | Avco Corporation | High density fuel injection manifold |
| FR2710688B1 (en) * | 1993-09-29 | 1995-11-03 | Snecma | Fuel distribution device between several injectors. |
| US5676712A (en) * | 1995-05-16 | 1997-10-14 | Atmi Ecosys Corporation | Flashback protection apparatus and method for suppressing deflagration in combustion-susceptible gas flows |
| EP0969192B1 (en) * | 1998-06-29 | 2005-01-05 | ALSTOM Technology Ltd | Method to equalize the fuel distribution in a gas turbine with several burners |
| US6726471B2 (en) * | 2001-08-27 | 2004-04-27 | The Esab Group, Inc. | Flashback arrestor for use with head of Oxy-fuel torch |
| US6845619B2 (en) * | 2002-12-11 | 2005-01-25 | Advanced Technology Materials, Inc. | Integrated system and process for effluent abatement and energy generation |
| GB0509163D0 (en) * | 2005-05-05 | 2005-06-15 | Boc Group Plc | Gas combustion apparatus |
| GB0509944D0 (en) * | 2005-05-16 | 2005-06-22 | Boc Group Plc | Gas combustion apparatus |
| DE102006027882B4 (en) * | 2005-09-02 | 2009-04-30 | Clean Systems Korea Inc., Seongnam | Scrubber for treating semiconductor waste gas |
| GB0613044D0 (en) * | 2006-06-30 | 2006-08-09 | Boc Group Plc | Gas combustion apparatus |
| US7654092B2 (en) * | 2006-07-18 | 2010-02-02 | Siemens Energy, Inc. | System for modulating fuel supply to individual fuel nozzles in a can-annular gas turbine |
| US7685807B2 (en) * | 2006-09-06 | 2010-03-30 | United Technologies Corporation | Three component injector for kerosene-oxygen rocket engine |
| DE102006051286A1 (en) * | 2006-10-26 | 2008-04-30 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Combustion device, has combustion chamber with combustion space and air injecting device including multiple nozzles arranged on circular line, where nozzles have openings formed as slotted holes in combustion space |
| CN101939079B (en) * | 2008-02-05 | 2013-06-12 | 应用材料公司 | Systems and methods for treating flammable effluent gases from manufacturing processes |
| US20100119984A1 (en) * | 2008-11-10 | 2010-05-13 | Fox Allen G | Abatement system |
-
2009
- 2009-02-17 CN CN200980105587XA patent/CN101952933A/en active Pending
- 2009-02-17 WO PCT/US2009/034336 patent/WO2009105434A2/en active Application Filing
- 2009-02-17 US US12/372,734 patent/US20090214991A1/en not_active Abandoned
- 2009-02-17 KR KR1020107021067A patent/KR20100119805A/en not_active Application Discontinuation
- 2009-02-18 TW TW98105173A patent/TW200940909A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US20090214991A1 (en) | 2009-08-27 |
| WO2009105434A3 (en) | 2009-10-15 |
| WO2009105434A2 (en) | 2009-08-27 |
| TW200940909A (en) | 2009-10-01 |
| KR20100119805A (en) | 2010-11-10 |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110119 |