CN101947523B - Device for recycling silicon wafer cleaning wastewater - Google Patents
Device for recycling silicon wafer cleaning wastewater Download PDFInfo
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- CN101947523B CN101947523B CN2010105143751A CN201010514375A CN101947523B CN 101947523 B CN101947523 B CN 101947523B CN 2010105143751 A CN2010105143751 A CN 2010105143751A CN 201010514375 A CN201010514375 A CN 201010514375A CN 101947523 B CN101947523 B CN 101947523B
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- water
- recycle
- pressure
- liquid level
- level sensor
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- 239000002351 wastewater Substances 0.000 title claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 18
- 239000010703 silicon Substances 0.000 title claims abstract description 18
- 238000004064 recycling Methods 0.000 title claims abstract description 15
- 238000004140 cleaning Methods 0.000 title abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 101
- 239000007788 liquid Substances 0.000 claims abstract description 23
- 238000005406 washing Methods 0.000 claims description 10
- 239000003651 drinking water Substances 0.000 claims description 5
- 235000020188 drinking water Nutrition 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000011084 recovery Methods 0.000 abstract 1
- 238000007599 discharging Methods 0.000 description 4
- 230000003020 moisturizing effect Effects 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000008235 industrial water Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a device for recycling silicon wafer cleaning wastewater. The device comprises a recycled water reservoir, a booster water pump, a pressure water tank and a degumming machine water storage tank which are communicated with one another, wherein a first liquid level sensor is arranged in the recycled water reservoir; the pressure water tank is provided with a pressure sensor; the first liquid level sensor and the pressure sensor are electrically connected with an electric controller of the booster water pump; a second liquid level sensor is arranged in the degumming machine water storage tank; and the second liquid level sensor is electrically connected with a first electromagnetic valve and a second electromagnetic valve. The invention can make full use of the wastewater discharged by a cleaner for the degumming machine, thereby improving the recovery rate of the wastewater, effectively saving the production water and reducing wastewater discharge; moreover, the invention also can omit a wastewater recycling device carried by the cleaner and the degumming machine and save production cost as well as equipment cost.
Description
Technical field
The present invention relates to the silicon wafer cleaner of photovoltaic industry, specifically a kind of silicon chip washing waste water recycling device.
Background technology
In the silicon chip of solar energy production enterprise was produced, the silicon chip that cut will pass through multistage cleaning, and removal is attached to attachments such as the mortar of silicon chip surface, greasy dirt, dusts, to satisfy the processing technology requirement of later process.Used silicon wafer cleaner is multistage groove-type cleaning machine at present; Generally form by nine rinse baths; Use the design of staged groove position, and waste discharge that will five grooves in back partly is used for the moisturizing of one to four groove of front, realized the part reuse of waste discharge; But wastewater recycle rate less than 10%, and increased the manufacturing cost of every cleaning machine.
Summary of the invention
The present invention is directed to the problems referred to above, a kind of silicon chip washing waste water recycling device is provided, this device can make full use of the waste water of cleaning machine discharging, and cost is low.
According to technical scheme of the present invention: a kind of silicon chip washing waste water recycling device comprises recycle-water cistern, booster water pump, pressure water pot and degumming machine catch basin; Said recycle-water cistern is connected with the recycle-water water inlet pipe; Said recycle-water cistern is connected with said booster water pump through drinking-water pipe; Said booster water pump is connected with said pressure water pot through pressure water pot water inlet pipe; Said pressure water pot is connected with first magnetic valve through the pressure tank line; Said first magnetic valve is connected with said degumming machine catch basin through the recycle-water filling pipe, and said degumming machine catch basin is connected with the running water filling pipe, and said running water filling pipe is provided with second magnetic valve; Be provided with first liquid level sensor in the said recycle-water cistern, said pressure water pot is provided with pressure sensor, and said first liquid level sensor and said pressure sensor are electrically connected with the electric controller of said booster water pump; Be provided with second liquid level sensor in the said degumming machine catch basin, said second liquid level sensor is electrically connected with said first magnetic valve and said second magnetic valve.
Said recycle-water cistern is lower than ground.
Said recycle-water water inlet pipe is provided with filter screen.
Said recycle-water cistern is provided with overfall.
The higher limit of said pressure sensor is 0.3MPa, and its lower limit is 0.2MPa.
Technique effect of the present invention is: the waste water that the present invention can make full use of the cleaning machine discharging supplies degumming machine to use, and has improved wastewater recycle rate, can effectively practice thrift industrial water, reduces discharge of wastewater; The present invention can also save the wastewater recycling device that cleaning machine and degumming machine carry, and when saving production cost, also can practice thrift equipment cost.
Description of drawings
Fig. 1 is a structural representation of the present invention.
The specific embodiment
Be further described below in conjunction with the accompanying drawing specific embodiments of the invention.
Among Fig. 1, comprise recycle-water cistern 1, recycle-water water inlet pipe 11, filter screen 12, first liquid level sensor 13, overfall 14, drinking-water pipe 15, booster water pump 2, pressure water pot 3, pressure water pot water inlet pipe 31, pressure sensor 32, pressure tank line 33, degumming machine catch basin 4, first magnetic valve 41, recycle-water filling pipe 42, second liquid level sensor 43, second magnetic valve 44, running water filling pipe 45 etc.
As shown in Figure 1, the present invention is a kind of silicon chip washing waste water recycling device, comprises recycle-water cistern 1, booster water pump 2, pressure water pot 3 and degumming machine catch basin 4.
Recycle-water cistern 1 is lower than ground.Recycle-water cistern 1 is connected with recycle-water water inlet pipe 11, and recycle-water water inlet pipe 11 is provided with filter screen 12, filter screen 12 filtrations.The waste water of silicon wafer cleaner discharging adopts the gravity flow mode directly to be discharged into recycle-water cistern 1 through recycle-water water inlet pipe 11.Recycle-water cistern 1 is provided with overfall 14, just discharges through overfall 14 if surpass the highest liquid level.
Recycle-water cistern 1 is connected with booster water pump 2 through drinking-water pipe 15; Booster water pump 2 is connected with pressure water pot 3 through pressure water pot water inlet pipe 31; Pressure water pot 3 is connected with first magnetic valve 41 through pressure tank line 33; First magnetic valve 41 is connected with degumming machine catch basin 4 through recycle-water filling pipe 42, and degumming machine catch basin 4 is connected with running water filling pipe 45, and running water filling pipe 45 is provided with second magnetic valve 44.
Be provided with first liquid level sensor 13 in the recycle-water cistern 1, pressure water pot 3 is provided with pressure sensor 32, the first liquid level sensors 13 and pressure sensor 32 is electrically connected with the electric controller of booster water pump 2.Booster water pump 2 is controlled by first liquid level sensor 13 and pressure sensor 32 jointly, and the recycle-water in the recycle-water cistern 1 is squeezed in the pressure water pot 3.
Being provided with second liquid level sensor, 43, the second liquid level sensors 43 in the degumming machine catch basin 4 is electrically connected with first magnetic valve 41 and second magnetic valve 44.By opening of second liquid level sensor, 43 control first magnetic valves 41 and second magnetic valve 44, through recycle-water filling pipe 42, running water filling pipe 45 moisturizing in degumming machine catch basin 4.
The higher limit of pressure sensor 32 is 0.3MPa, and its lower limit is 0.2MPa.
The course of work of the present invention is following: the water level in recycle-water cistern 1 is greater than setting height (apart from 25 centimetres of recycle-water cistern 1 bottoms); And when the pressure of pressure water pot 3 was lower than the minimum (0.2 MPa) of setting, booster water pump 2 was squeezed into the water in the recycle-water cistern 1 in the pressure water pot 3 through drinking-water pipe 15; Water level in recycle-water cistern 1 is lower than sets minimum altitude (apart from 5 centimetres of recycle-water cistern 1 bottoms), and when perhaps pressure water pot 3 pressure reached the maximum (0.3 MPa) of setting, booster water pump 2 stopped automatically.When the liquid level in the degumming machine catch basin 4 was lower than the low liquid level of setting, the magnetic valve 41,44 of recycle-water filling pipe 42 and running water filling pipe 45 was opened simultaneously, and the two-way pipeline is given 4 moisturizings of degumming machine catch basin simultaneously.
The water consumption of general degumming machine is four times of cleaning machine, and the allocation ratio of cleaning machine and degumming machine is 2:1, so the recycle-water of cleaning machine can only satisfy the half the water consumption of degumming machine at most, all the other water consumptions also need be supplied with running water.After using the present invention, the waste water that can make full use of the cleaning machine discharging supplies degumming machine to use, and has improved wastewater recycle rate, can effectively practice thrift industrial water, reduces discharge of wastewater; The waste water reuse system that degumming machine carries can; Can the waste discharge of degumming machine overflow potcher be disposed to the recycle-water cistern; Handle together by the present invention; The wastewater recycling device that cleaning machine and degumming machine carry can be saved like this, when saving production cost, also equipment cost can be practiced thrift.
Claims (5)
1. a silicon chip washing waste water recycling device is characterized in that: comprise recycle-water cistern (1), booster water pump (2), pressure water pot (3) and degumming machine catch basin (4); Said recycle-water cistern (1) is connected with recycle-water water inlet pipe (11); Said recycle-water cistern (1) is connected with said booster water pump (2) through drinking-water pipe (15); Said booster water pump (2) is connected with said pressure water pot (3) through pressure water pot water inlet pipe (31); Said pressure water pot (3) is connected with first magnetic valve (41) through pressure tank line (33); Said first magnetic valve (41) is connected with said degumming machine catch basin (4) through recycle-water filling pipe (42); Said degumming machine catch basin (4) is connected with running water filling pipe (45), and said running water filling pipe (45) is provided with second magnetic valve (44); Be provided with first liquid level sensor (13) in the said recycle-water cistern (1); Said pressure water pot (3) is provided with pressure sensor (32), and said first liquid level sensor (13) and said pressure sensor (32) are electrically connected with the electric controller of said booster water pump (2); Be provided with second liquid level sensor (43) in the said degumming machine catch basin (4), said second liquid level sensor (43) is electrically connected with said first magnetic valve (41) and said second magnetic valve (44).
2. according to the described silicon chip washing waste water recycling of claim 1 device, it is characterized in that: said recycle-water cistern (1) is lower than ground.
3. according to claim 1 or 2 described silicon chip washing waste water recycling devices, it is characterized in that: said recycle-water water inlet pipe (11) is provided with filter screen (12).
4. according to claim 1 or 2 described silicon chip washing waste water recycling devices, it is characterized in that: said recycle-water cistern (1) is provided with overfall (14).
5. according to claim 1 or 2 described silicon chip washing waste water recycling devices, it is characterized in that: the higher limit of said pressure sensor (32) is 0.3MPa, and its lower limit is 0.2MPa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105143751A CN101947523B (en) | 2010-10-21 | 2010-10-21 | Device for recycling silicon wafer cleaning wastewater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105143751A CN101947523B (en) | 2010-10-21 | 2010-10-21 | Device for recycling silicon wafer cleaning wastewater |
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| Publication Number | Publication Date |
|---|---|
| CN101947523A CN101947523A (en) | 2011-01-19 |
| CN101947523B true CN101947523B (en) | 2012-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105143751A Active CN101947523B (en) | 2010-10-21 | 2010-10-21 | Device for recycling silicon wafer cleaning wastewater |
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| Country | Link |
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| CN (1) | CN101947523B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102363146A (en) * | 2011-08-09 | 2012-02-29 | 太仓协鑫光伏科技有限公司 | Flushing device capable of recycling water |
| CN102615077B (en) * | 2012-04-13 | 2014-08-27 | 保定天威英利新能源有限公司 | Solar battery silicon chip cleaning machine and control method thereof |
| CN102698989A (en) * | 2012-06-11 | 2012-10-03 | 协鑫阿特斯（苏州）光伏科技有限公司 | Method for precleaning silicon wafer |
| CN112775089A (en) * | 2020-12-30 | 2021-05-11 | 四川永祥硅材料有限公司 | Silicon chip washs effluent disposal system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1298992A (en) * | 1999-12-07 | 2001-06-13 | 王雅庭 | Domestic pressurizing equipment for reusing life sewage |
| CN1343002A (en) * | 2000-09-05 | 2002-04-03 | 东京広化工业株式会社 | Supply system for cleaning mixture |
| CN101295622A (en) * | 2007-04-24 | 2008-10-29 | 中芯国际集成电路制造(上海)有限公司 | Device and method for cleaning wafer |
| CN101549913A (en) * | 2008-10-30 | 2009-10-07 | 浙江东洋环境工程有限公司 | Process and system for recovering reduction scribing waste water |
| CN201882932U (en) * | 2010-10-21 | 2011-06-29 | 高佳太阳能股份有限公司 | Device for reusing cleaning waste water of silicon chips |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10261608A (en) * | 1997-03-18 | 1998-09-29 | Furontetsuku:Kk | System and method for cleaning |
| US7658856B2 (en) * | 2007-08-15 | 2010-02-09 | Ronald De Strulle | Environmentally-neutral processing with condensed phase cryogenic fluids |
-
2010
- 2010-10-21 CN CN2010105143751A patent/CN101947523B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1298992A (en) * | 1999-12-07 | 2001-06-13 | 王雅庭 | Domestic pressurizing equipment for reusing life sewage |
| CN1343002A (en) * | 2000-09-05 | 2002-04-03 | 东京広化工业株式会社 | Supply system for cleaning mixture |
| CN101295622A (en) * | 2007-04-24 | 2008-10-29 | 中芯国际集成电路制造(上海)有限公司 | Device and method for cleaning wafer |
| CN101549913A (en) * | 2008-10-30 | 2009-10-07 | 浙江东洋环境工程有限公司 | Process and system for recovering reduction scribing waste water |
| CN201882932U (en) * | 2010-10-21 | 2011-06-29 | 高佳太阳能股份有限公司 | Device for reusing cleaning waste water of silicon chips |
Non-Patent Citations (1)
| Title |
|---|
| JP特开平10-261608A 1998.09.29 |
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| CN101947523A (en) | 2011-01-19 |
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Effective date of registration: 20211022 Address after: No. 381-8, Zhenghe Avenue, Huigu entrepreneurship Park, Huishan Economic Development Zone, Wuxi, Jiangsu 214000 Patentee after: Wuxi Pinyuan Technology Consulting Co.,Ltd. Address before: 214174 No. 168 Yanfeng Road, Yanqiao street, Huishan District, Wuxi City, Jiangsu Province Patentee before: KONCA SOLAR CELL Co.,Ltd. |
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Effective date of registration: 20240426 Address after: 214000 Zhenghe Avenue 381-10, district a, Huigu Pioneer Park, Huishan District, Wuxi City, Jiangsu Province Patentee after: Jiangsu Pinyuan Intellectual Property Operation Co.,Ltd. Country or region after: China Address before: No. 381-8, Zhenghe Avenue, Huigu entrepreneurship Park, Huishan Economic Development Zone, Wuxi, Jiangsu 214000 Patentee before: Wuxi Pinyuan Technology Consulting Co.,Ltd. Country or region before: China |
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