CN101944429B - Electronic part - Google Patents
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- CN101944429B CN101944429B CN201010226985.1A CN201010226985A CN101944429B CN 101944429 B CN101944429 B CN 101944429B CN 201010226985 A CN201010226985 A CN 201010226985A CN 101944429 B CN101944429 B CN 101944429B
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Abstract
The invention provides an electronic part (1) which is provided with a part main body (2) and a coated film (3) formed on the surface of the part main body (2). The electronic part is characterized in that the coated film (3) is at least provided with a surface layer (3b) on a surface side of the coated film (3) and an internal layer (3a) on an internal side of the surface layer; a softening point of the surface layer glass components contained in the surface layer (3b) is higher than the softening point of the internal layer glass components contained in the internal layer (3a). The surface layer (3b) comprises crystalline material of which the melting point is higher than the softening point of the glass components in the internal layer.The electronic part with the coated film below can be provided according to the invention; and when forming the coated film, the defects and film thickness deviation of the coated film can be effectively prevented; and the situation that the foreign material is adhered on the coated film is prevented.
Description
Technical field
The present invention relates to the electronic components such as coil component, in more detail, relate to have effectively prevent that part from forming the in the situation that of being mutually adhered together or being attached to sintering furnace by the electronic component of overlay film.
Background technology
Along with the miniaturization of the coil component of an example as electronic component, in order to obtain needed characteristic, existing Ni-Zn magnetic core is studied to the use of Mn-Zn magnetic core.But Mn-Zn magnetic core, because its insulating properties is low, can not directly arrange electrode on the surface of magnetic core, is therefore necessary, on the surface of magnetic core, dielectric film is set.Dielectric film can adopt such as glass or resin etc.
Such dielectric film for example uses sleeve coating (barrel coating) method to form, and forms glass coating film (with reference to TOHKEMY 2001-237135 communique) on magnetic core surface, and the glass coating film forming is fired into.At this moment, glass coating film conventionally with it temperature more than softening point burn till.Therefore in the process of burning till, glass coating film is softening, likely occurs to be mutually adhered together between part or is attached to firing furnace and causes the defect of glass coating film or thickness deviation occurs.And also have foreign matter to be attached to the problem on softening glass coating film.
Even there is no the electronic component such as FERRITE CORE, piezo-resistance of conductivity, form in its surface the situation as diaphragm by overlay film in order to improve performance and the insulation property etc. of its tenable environment condition, also to have.Therefore require to obtain having on the whole surface of part, form by overlay film, be there is not defect etc. by overlay film, and the electronic component that thickness deviation and foreign matter adhere to do not occur.
Summary of the invention
The present invention makes in view of such actual conditions, and its object is, the generation that can effectively prevent by the defect of overlay film and thickness deviation is provided, and prevents the electronic component that the situations such as foreign matter adheres on by overlay film occur simultaneously.
To achieve these goals, the electronic component of the 1st form of the present invention, be have part main body and be formed in described part body surfaces by the electronic component of overlay film, it is characterized in that, described at least had and be present in describedly by the top layer of the face side of overlay film be present in the la m of inner side, this top layer by overlay film, and the softening point of skin glass composition that is contained in described top layer is higher than the softening point of la m glass ingredient that is contained in described la m.
In the 1st form, preferably higher than the softening point of described la m glass ingredient, and the temperature lower than the softening point of described skin glass composition forms described by overlay film.
If adopt the 1st form of the present invention, can think and form by the stage of overlay film, near the most surfaces whole or at least skin glass composition of skin glass composition, do not soften, or only reach softening initial stage (near the low state of viscosity of glass ingredient most surface).Therefore can effectively prevent to be mutually adhered together or to be attached between part firing furnace causes by the situation of overlay film defect and thickness deviation and occurs.And can effectively prevent that foreign matter from adhering on by overlay film.
And in the glass ingredient generation vitrifying that forms la m during by overlay film, the whole surface of cap piece main body, and can guarantee to be close to part main body.
And the skin glass composition on top layer also with than its same vitrifying of la m glass ingredient in the inner part also solidifies.That is to say that also there is the function of diaphragm on top layer.
Thereby, by implementing technical scheme as above, can solve the existing problems while formation by overlay film, can, according to desirable characteristic, give different characteristics to la m and top layer.
In the 1st form, preferably the content of the ornamental equivalent in described skin glass composition is less than the content of the ornamental equivalent in described la m glass ingredient.Ornamental equivalent, such as alkali metal oxide etc. in glass ingredient, the tendency that has the softening point that makes glass ingredient to reduce.Thereby, by implementing technical scheme as above, can improve the softening point of skin glass composition.Consequently, top layer is not easy to be invaded (resistance to plating) by plating solution.So, the constituent that inner glass composition also can select plating solution easily to invade, therefore the composition of inner glass composition is not defined.
In the 1st form, preferably the softening point of described skin glass composition is higher 30～100 DEG C than the softening point of described la m glass ingredient.By setting such temperature difference, can promote effect of the present invention.
In the 1st form, preferably the thickness on described top layer described by 1/8～1/2 scope of the gross thickness of overlay film in.By being set as such skin depth, can promote effect of the present invention.
Again, to achieve these goals, the electronic component of the 2nd form of the present invention, be have part main body and be formed in described part body surfaces by the electronic component of overlay film, it is characterized in that, described at least had and be present in describedly by the top layer of the face side of overlay film be present in the la m of inner side, this top layer by overlay film, and the fusing point of crystalline material that is contained in described top layer is higher than the softening point of la m glass ingredient that is contained in described la m.
In the 2nd form, preferably higher than the softening point of described la m glass ingredient, and form described by overlay film than the low-melting temperature of described crystalline material.
If adopt the 2nd form of the present invention, can think and form by the stage of overlay film, near the most surfaces whole or at least crystalline material of the crystalline material comprising in top layer, do not melt (hardness of the most surface of crystalline material is constant), or only reach the initial stage (hardness of the most surface of crystalline material has some reductions) of fusing.Therefore can effectively prevent to be mutually adhered together or to be attached to firing furnace between part causes by the situation of overlay film defect and thickness deviation.And can effectively prevent that foreign matter from adhering on by overlay film.
Thereby, by implementing technical scheme as above, can solve the existing problems while formation by overlay film, can, corresponding to desirable characteristic, give different characteristics to la m and top layer.
In the 2nd form, preferably described crystalline material is at least one that select in pottery, metal and this group material of alloy.By selecting above-mentioned material, can increase above-mentioned effect, obtain desirable characteristic.
In the 2nd form, preferably the fusing point of described crystalline material is higher more than 30 DEG C than the softening point of described la m glass ingredient.By such temperature difference is set, can promote effect of the present invention.
In the 2nd form, preferably the particle diameter of described crystalline material be described by 1/8～1/2 scope of the gross thickness of overlay film in.By particle diameter being arranged in above-mentioned scope, can promote effect of the present invention.
brief description of the drawings
The profile of the coil component of Fig. 1 the present invention one example.
Fig. 2 is the general profile of sleeve arrangement that the coil component of the present invention's one example uses while manufacturing.
Fig. 3 is the profile of the coil component after coiling coil.
Fig. 4 be represent the present invention's one example coil component by near general profile overlay film.
Fig. 5 is the profile of the coil component of another example of the present invention.
The present invention will be described for example shown in reference to the accompanying drawings below.
the 1st example coil componentthe shape of the coil component of the present invention's one example is not particularly limited, for example, can be the shapes such as tabular, bar-shaped, tubular.In this example, coil component 1, as shown in Figure 1, forms cylindric core shapes, and the whole surface with part main body 2 forms by the structure of overlay film 3.
part main bodypart main body 2 has the wireline reel 4 of cylinder or polygon prism shape and a pair of blade of a sword portion 5 in both sides formation in aggregates along the direction of principal axis of this wireline reel 4.Blade of a sword portion 5 outer through larger than the external diameter of wireline reel 4, in the periphery of wireline reel 4, form by blade of a sword portion 5 around recess 6.And as shown in Fig. 3 below, the wire 10 of reeling in this recess 6.
The size of part main body 2 is not particularly limited, in this example, the external diameter of wireline reel 4 is 0.6～1.2mm, the axial width of wireline reel 4 is 0.3～1.0mm, the external diameter of blade of a sword portion 5 is 2.0～3.0mm, the thickness of blade of a sword portion 5 is 0.2～0.3mm, is 0.5～1.0mm from the outer surface of blade of a sword portion 5 to the degree of depth of the outer surface of wireline reel 4.Again, the shape of blade of a sword portion 5, except circle, can be also the shapes such as quadrangle, octangle.
The material of part main body 2 is not particularly limited, and in this example, is made up of conductivity magnetic materials such as the soft magnetic metals such as Mn-Zn ferrite, permalloy, metal dust stampings.
coatingin this example, as shown in Figure 1, coating 3 have be positioned at by the top layer 3b of overlay film face side and than this top layer la m 3a in the inner part the structure at film thickness direction superimposed layer.In Fig. 1, formed by 2 layers by overlay film, but also can form 3 layers of above structure, for example also can between la m 3a and top layer 3b, form different layers.
La m 3a and top layer 3b comprise glass ingredient, as described below, inner side film and face side film form by heat treatment, as glass component, the material forming as long as the material using fault-tolerant or as sintered glass ceramics, being not particularly limited, for example, can be also silicon boron glass.Specifically, can be such as lead borosilicate glass, borosilicic acid bismuth glass, zinc borosilicate glass etc.
Again, in this example, the softening point of the glass ingredient (skin glass composition) comprising in the 3b of top layer is higher than the softening point of the glass ingredient comprising in la m 3a (la m glass ingredient).By doing like this, in the operation that inner side film and face side film are heat-treated, can effectively prevent to be mutually adhered together between part or be attached to firing furnace and cause the defect of film or thickness deviation occurs.But also can effectively prevent that the situation that foreign matter is attached on film from occurring.The softening point of glass ingredient utilizes for example differential thermal analysis method to measure.
And by overlay film (la m 3a and top layer 3b) due to vitrifying after the heat treatment, can work as the diaphragm of part main body.Further, in this example, so-called vitrifying is defined as continuous non-crystalline solids film, has the state with the rigidity of crystallization same degree.
Again, have insulating properties at the glass ingredient being comprised in overlay film, work as dielectric film, can prevent from being short-circuited between part main body and the wire of coiling.
The softening point of la m glass ingredient preferably 300 DEG C above, below 800 DEG C.Again, the softening point of skin glass composition preferably 300 DEG C above, below 920 DEG C.Again, 300 DEG C of above regulations according to being, the softening point of most glass ingredients is more than 300 DEG C.
Again, the softening point of skin glass composition to be to be advisable than high 30～100 DEG C of the softening point of la m glass ingredient, high 50～80 DEG C better.This is because if the difference of softening point is too small,, in the time of heat treatment, the glass powder (glass ingredient) comprising in face side film is excessively softening, has the tendency that is difficult to obtain effect of the present invention.Otherwise, if poor excessive, in order to make face side coated glass, must exceed the heating of inner side film needs.
Preferably make the content of ornamental equivalent in skin glass composition fewer than the content of the ornamental equivalent in la m glass ingredient again.By doing like this, can make the softening point of skin glass composition keep higher temperature, top layer is composed with resistance to plating.As la m glass ingredient, also can select the material of easy plated immersion erosion, therefore the composition of the glass ingredient of la m is unrestricted, can select most suitable glass ingredient according to part main body.
Here, so-called ornamental equivalent, is the composition that makes to be present in the combination reduction of the detailed outline structure in glass structure, if the content of this composition is many, forms the low tendency of softening point by glass.As ornamental equivalent, in this example, enumerate for example alkali metal oxide (Na
2o, K
2o), alkaline earth oxide (CaO, MgO) etc.
Be advisable with 1～30 micron by the thickness t 3 of overlay film 3,3～20 microns better.Again, the thickness t 2 of top layer 3b is to be advisable by 1/8～1/2 of overlay film gross thickness (thickness t 2 on the thickness t 1+ top layer of la m), and 1/5～1/3 of its gross thickness is better.By making by overlay film and forming by the thickness on the top layer of overlay film in above-mentioned scope, can improve above-mentioned effect.
The manufacture method of the coil component to this example example describes below.
First the raw material of the material of composition of preparation part main body 2.As raw material, the material of constituent part main body is in ferritic situation, as long as use the oxides such as iron oxide, zinc oxide.Or also can adopt the various compounds that obtain oxide after burning till.
Then raw material and the adhesive resin etc. of preparation are mixed, this mixture is shaped to the shape of regulation with known forming method.In this example, be shaped to cylinder type magnetic core shape, obtain the formed body of magnetic core portion 2.Further, also calcining raw materials as required, in order to form the form that is suitable for moulding, also can pulverize raw material, carries out granulation etc.Can remove as required again processing of adhesive etc. to this formed body.Then the formed body obtaining is burnt till, obtain sintered body (part main body 2).
In described in the above, be that the method that obtains part main body in ferritic situation is illustrated to part main body, even but part main body is in the situation of such as permalloy etc., as long as use known raw material, utilizes known method to obtain part main body.
Then use the sleeve shown in Fig. 2 (barrel) device 100 on the surface of the part main body 2 obtaining, to form the inner side film and the face side film that are formed by glass ingredient, adhesive resin etc.
On cylindrical sleeve 100a, form respectively inlet tube 103 and outlet 104.Can make to dry the inside that enters cylindrical sleeve 100a with gas from inlet tube 103, discharge the air of cylindrical sleeve inside from outlet 104.
On the axle core position of the inside of sleeved container 102, along direction of principal axis configuration rose 105, multiple part main bodys 2 that can store to the inside of sleeved container 102 from nozzle 105 spray slurries 106.Sleeved container 102 rotates up in arrow A side, and therefore part main body 2 exists with the state shown in Fig. 2, utilizes the rotation of sleeved container 102 to stir.
On the wall of sleeved container 102, form and be communicated with outside with inner multiple holes, the slurries 106 that the below of cylindrical sleeve 100a stores are also invaded the inside of sleeved container 102, part main body 2 can be impregnated in these slurries 106.Again, drying while circulating to outlet 104 by cylindrical sleeve 100a from inlet tube 103 with gas, also to the internal flow of sleeved container 102.
First, many part main bodys 2 are contained in to the inside of the sleeved container 102 shown in Fig. 2.Then make sleeved container 102 rotate, the set of stirring part main body 2 on one side, sprays (coating) slurries 106 from nozzle 25 on one side, forms inner side film and face side film.Remaining slurries 106 are discharged by not shown discharge pipe.
The adhesive resin containing in slurries 106 preferably uses the mixture of polyvinyl alcohol (PVA), polyvinyl alcohol resin sex change body or these resins.By such operation, particularly inner side film, the close property excellence of itself and part main body 2.
Again, with respect to the glass powder in this slurries 106, the content of adhesive resin is advisable with 10～40 % by weight, and 15～25 % by weight are more desirable.
Solvent is preferably moisture.Solvent can be also water, when but the contact angle of the surface of glass powder and water is large, by with water-soluble alcohols such as certain proportion mixed ethanol, isopropyl alcohol (IPA), isobutanols (IBA), can suppress aggegation and the sedimentation of glass powder, be desirable method.
In this example, spray slurries 106 in part main body 2 time, in the early stage and latter stage, change the glass powder comprising in slurries 106.Specifically, in slurries in the early stage, add the glass powder that should comprise in the film of inner side, in latter stage, in slurries 106, add the glass powder that should comprise in face side film.That is to say, change glass powder, so that the softening point of the glass powder comprising in face side film is higher than the softening point of the glass powder comprising in the film of inner side.
By doing like this, can on the surface of part main body 2, form the inner side film and the face side film that comprise the different glass powder of softening point.
Further, the different glass powder of softening point also can change the kind making of glass powder.The diverse situation of glass powder, has the different situation of the such glass of lead glass and bismuth glass itself, also has amount or the diverse situation of additive (for example ornamental equivalent).
The processing time that sprays slurries 106 from nozzle 105 without particular limitation of, can be for example about 30～180 minutes.Further, replace the time of the glass powder in slurries according to the thickness decision of the la m 3a forming and top layer 3b.
Again, when spraying, the temperature of slurries 106 also has relation with solvent composition, preferably more than 40 DEG C below 100 DEG C.In the situation that using low-boiling solvent, preferably within the scope of said temperature, adopt lower temperature.
Then, spray slurries 106 simultaneously while film (inner side film and face side film) is carried out to drying and processing.In drying and processing, make to dry the inside that flows into cylindrical sleeve 100a with gas from inlet tube 103, discharge from outlet 104.The oven dry using in this drying and processing is the air of for example 50～100 DEG C of temperature with gas.Can after spray treatment, carry out again again for example drying and processing of 5～30 minutes.
Adopt said method once on the surface of a large amount of part main bodys 2, to be roughly formed uniformly by overlay film.
After drying and processing, the part main body 2 that forms film is taken out from sleeved container 102, heat-treat.Heat-treat condition is according to decisions such as the softening points of the glass powder containing in inner side film and face side film.In this example, softening point with the glass powder than comprising in the film of inner side (la m glass ingredient) is high, and the low temperature of softening point of the glass powder (skin glass composition) comprising in specific surface side film is heat-treated.Specifically, preferably 600～800 DEG C of heat treatment temperatures, heat treatment time is 5～30 minutes.
Can think, by doing like this, the surfaces whole or at least face side film of face side film are not softening, or only reach softening initial stage (the lower state of viscosity of film).Consequently, can effectively prevent to be mutually adhered together between part or be attached to firing furnace and cause the defect of film or thickness deviation occurs.But also can effectively prevent that the situation that foreign matter is attached on film from occurring.
And, although its reason may not be clear, can confirm the also vitrifying the same as inner glass composition and curing after heat treatment of skin glass composition.This is considered to because be subject to the vitrified impact of la m.
Heat treatment is preferably burnt till under the nitrogen atmosphere below 0.1% in partial pressure of oxygen.This is because by reducing partial pressure of oxygen, in the situation that for example part main body is made up of Mn-Zn based ferrite, can prevent the oxidation of part main body.Once the oxidation of Mn-Zn based ferrite, just forms di-iron trioxide (hematite), causes deterioration in characteristics.Again, also there is the problem of oxidation in Ni-Zn based ferrite due to the relation of composition.
After heat treatment, form vitrifiedly by overlay film 3 (la m 3a and top layer 3b) on the surface of part main body 2, obtain cylindrical shape magnetic core.
,, as shown in Figure 3, on the end face of a blade of a sword portion 5 of each part main body 2, form with methods such as printing, duplicating, dipping, sputter, platings the pair of terminal electrode 12 being formed by silver, titanium, nickel, chromium, copper etc. thereafter.Even if part main body 2 has conductivity, terminal electrode 12 is also owing to being insulated by the existence of overlay film 3.
, around wireline reel 4 coiling wires 10, welding method, the method for welding philosophies such as two ends for thermo-compressed, ultrasonic bonding, the laser welding of this wire be connected in to terminal electrode 12, complete the making of the coil component of the present invention's one example thereafter.
the 2nd examplein this example, except replacing skin glass composition, top layer contain fusing point than the high crystalline material of the softening point of inner glass composition outside, identical with the 1st example, repeat specification is omitted.
By doing like this, can think in heat treatment step, does not melt on the surfaces whole or at least particle of crystalline material of the particle of the crystalline material comprising in face side film, or only reach the state of the initial stage (hardness of particle has some to reduce) of fusing.Consequently, can effectively prevent to be mutually adhered together between part or be attached to firing furnace and cause the defect of film or thickness deviation occurs.But also can effectively prevent that the situation that foreign matter is attached on film from occurring.
Again, the fusing point of crystalline material is preferably set as higher more than 30 DEG C than the softening point of inner glass composition.If because the difference of softening point is too small, the fusing of crystalline material is excessive.
As such crystalline material, as long as there is the fusing point higher than the softening point of inner glass composition, be not particularly limited, but preferably described crystalline material is at least one that select in pottery, metal and this group material of alloy.
As ceramic material, there are such as aluminium oxide, zirconia, magnesium oxide, mullite etc.Crystalline material comprises in ceramic situation, except above-mentioned effect, can also improve insulating properties and abrasion performance, can make ion migration be not easy to occur simultaneously.
As metal, can enumerate for example gold, platinum, silver, copper, nickel etc.Can enumerate such as molybdenum alloy, nickel alloy, copper alloy etc. as alloy.Make part main body there is insulating properties, in the situation that crystalline material comprises metal or alloy, except having above-mentioned effect, can also prevent the generation of static.
The crystalline material comprising in top layer also can be formed as the solid film on the whole surface that covers la m 3a, but in this example, as shown in Figure 4, the particle of crystalline material is present in as point on the surface of la m 3a, forms top layer 3c.
That is to say, in top layer, the particle of crystalline material needn't have no to exist with gap, as long as shown in Figure 4, crystalline material particle exists and forms top layer in the mode of point, just can obtain effect of the present invention.And can be as shown in Figure 4, the particle of crystalline material exists highlightedly from la m 3a.
Further, in Fig. 4, the particle of crystalline material and la m can clearly be distinguished and come, but also can have for example particle and la m all to exist with transparent state, the indefinite situation in its border.
The same with the 1st example by the thickness of overlay film 3, be advisable with 1～30 micron, 3～20 microns are more desirable.Again, the particle diameter of the crystalline material comprising in top layer is to be advisable by 1/8～1/2 of the gross thickness of overlay film (particle diameter of the thickness+crystalline material of la m), and 1/5～1/3 better.Make the particle diameter of crystalline material in above-mentioned scope, can improve above-mentioned effect.
In this example, can use the method identical with the 1st example, on the surface of part main body, form by overlay film (la m and top layer).
That is to say, as long as replace the glass powder comprising in the top layer in the 1st example, in slurries, add the particle of above-mentioned crystalline material, make heat treatment temperature higher than the softening point of the glass component comprising in la m, and make its fusing point than crystalline material low.Owing to doing like this, in heat treatment step, the particle of crystalline material does not melt, and therefore in top layer, crystalline material exists with graininess.
Specifically, preferably heat treatment temperature is 500～850 DEG C, and heat treatment time is 5～30 minutes.
Can think, owing to doing like this, does not melt on the surfaces whole or at least crystalline material particle of crystalline material particle, or just reach the initial stage (state that the hardness of particle is slightly low) of melting.Consequently, can effectively prevent to be mutually adhered together between part or be attached to firing furnace and cause the defect of film or the situation of thickness deviation occurs.But also can effectively prevent that the situation that foreign matter is attached on film from occurring.
the 3rd examplein above-mentioned example, by 2 layers of formation for overlay film, but also can as shown in Figure 5, form above with 3 layers.In this example, la m forms with 2 layers (the 1st la m 3a and the 2nd la m 3b), except forming film, the mechanical strength that makes the 2nd inner side film forming on the 1st inner side film than the mechanical strength that is formed at the 1st inner side film in part body surfaces greatly outside, the same with the 1st example or the 2nd example, repeat specification is omitted.
Like this, on by the film thickness direction of overlay film, intensity difference is set, make face side layer strength ratio part main body one side layer intensity little, using this make face side layer (a 2nd la m 3b) work as sacrifice layer.So, even in the situation that part is in contact with one another, there is defect in the 2nd la m 3b (and top layer 3c), also, owing to there being high-intensity the 1st la m 3a to stay, can obtain effect of the present invention.
And if there is the 1st la m to stay, in heat treatment step, the 2nd la m of the surrounding of defect part or top layer are softening, are repaired by the thin part of overlay film, solidify, and can obtain more uniformly by overlay film.
As the means that intensity difference as above is set, can enumerate the softening point that for example makes the glass ingredient comprising in the 2nd la m than the high method of softening point of the glass ingredient comprising in the 1st la m.That is to say, make the relation of the 1st la m and the 2nd la m, identical with the relation on la m in the 1st example and top layer.
Can in the time spraying slurries for formation la m, change again the content of adhesive resin.That is to say, in the time forming the 1st inner side film, increase the content of adhesive resin, in the time forming the 2nd inner side film, reduce the content of adhesive resin.
Again can be in the kind that changes adhesive resin midway of spraying slurries.For example reduce the molecular weight of the adhesive resin in the 1st la m, strengthen the molecular weight of the adhesive resin in the 2nd la m.
Again can be at the particle diameter that changes glass powder midway of spraying slurries.Glass powder adopts the powder of specified particle diameter, can control debinding dosage.
Implement means described above, between the 1st inner side film and the 2nd inner side film, produce intensity difference, therefore, in heat treatment step, the 2nd inner side film works as expendable film.
Again, preferably the intensity ratio of the 2nd inner side film and the 1st inner side film is more than 2 times.By being set as more than 2 times, can improve the effect of the 2nd inner side film as expendable film.Further, intensity difference can utilize and for example followingly grasp test determination.
Grasping test is by the blade (replacing blade that the HA-F30 that design cutter (design knife)/コ Network ヨ manufactures uses) being linked on force cell) vertically by being pressed on the each inner side film and/or face side film forming on the surface of the part main body of testing use, grasp test, utilize force cell to measure until the power that expose on the surface of part main body.
Further, the invention is not restricted to above-mentioned example, can have within the scope of the invention various changes.
For example, in above-mentioned example, each border on la m and top layer is clear and definite, but again can be necessarily clear and definite.Slowly change at the composition that makes slurries, form by the situations such as overlay film, these borders may not be clear and definite.Thereby, as long as by the softening point of the face side of overlay film or fusing point high by the softening point of overlay film than part main body one side.
Again, as the part main body of utilizing method processing of the present invention, being not limited to the part main body 2 of coil component, can be also the magnetic core of the inductance components such as transformer.Again, the material of magnetic core is not particularly limited, and can be also that such as ferrite, aluminium oxide, iron etc. form.And with ceramic laminated chip element, Nd-Fe that the part of method processing of the present invention can be also piezo-resistance, thermistor, capacitor, coil etc. be metal magnet etc.Example
Further according to detailed embodiment, the present invention will be described below.But the invention is not restricted to these embodiment.
In this material powder, add the PVA as adhesive resin, granulation forms particle.By this particle extrusion forming, obtain cylindric form forming magnetic core body.
Then, this formed body is burnt till in air and nitrogen atmosphere, obtain the part main body as sintered body.Part main body 2, the diameter of its blade of a sword is 3mm, the thickness of the blade of a sword is 0.25mm, to part main body 2 formation as described below obtaining by overlay film.
First manufacture the silica-based glass powder of 1.5 microns of 740 DEG C of average grain diameters of softening point, with the weight ratio that specifies by this glass powder and PVA mixed with resin.The solid state component obtaining (glass powder with PVA mixture) is mixed with the weight ratio of regulation with solvent, the ball milling carrying out 16 hours mixes again, preparation the 1st slurries.The solution that solvent adopts water to mix with the ratio of 8: 2 with ethanol.With respect to the glass powder in the 1st slurries, the content of adhesive resin is 17 % by weight.Utilizing the softening point of the film of the 1st slurries formation is 740 DEG C.
Again, except with respect to glass powder, the content of adhesive resin is outside 8 % by weight, manufactures the 2nd slurries the samely with the 1st slurries.Utilizing the softening point of the film of the 2nd slurries formation is 740 DEG C.
Also manufacture the silica-based glass powder of 780 DEG C of softening points, 1.0 microns of average grain diameters, except with respect to glass powder, the content of adhesive resin is outside 10 % by weight, manufactures top layer slurries the samely with the 1st slurries.Utilizing the softening point of the film that top layer slurries form is 780 DEG C, compares highly 40 DEG C with the 1st slurries with the 2nd slurries, confirms high 30～100 DEG C.
Then use sleeve (barrel) device, carry out spray treatment on the surface of part main body 2 with above-mentioned the 1st slurries, form the 1st inner side film of 10 microns of thickness.Then use the 2nd slurries to carry out spray treatment, form thickness as the 2nd inner side film of 10 microns taking this.Then utilize top layer slurries to carry out spray treatment, formation thickness is the face side film of 5 microns again.That is to say, the gross thickness of film is 25 microns.
To 1000 part main bodys 2, utilize the surface of visual means investigation part main body 2 to have the number of the part main body 2 of the defect (matrix visual defects) that can see.The incidence that has the part main body 2 of matrix visual defects is 0.0%.Utilize again grasp the 1st inner side film that obtains of test with respect to the ratio of the film-strength (before heat treatment) of the 2nd inner side film be 2.0 times, more than 2 times.
,, at 760 DEG C, the part main body 2 that forms film is carried out to the heat treatment of 1 hour thereafter.Its treatment temperature is than the softening point of inner side film (740 DEG C) height, and the temperature (780 DEG C) of the softening point of specific surface side film is low.
Again to the part main body 2 of similar number measure after heat treatment by the thickness deviation of overlay film, with respect to 10 microns of average film thickness, represent that the standard deviation of thickness deviation is 0.90, confirm that the deviation of thickness is also little.
Again to the part main body 2 of same number measure after heat treatment by the adhering to of the foreign matters such as dust on overlay film, the ratio that is observed the part that foreign matter adheres to is 0.1%, confirms that foreign matter adheres to few.
embodiment 2except manufacturing, using top layer slurries, making the softening point of the face side film that utilizes top layer slurries formation is outside 850 DEG C, in the same manner as in Example 1, in multiple part main bodys 2, forms film, the incidence of investigation matrix visual defects.The incidence that has the part main body 2 of matrix visual defects is 0.0%.In the same manner as in Example 1 the part main body that form film heat-treated thereafter.
Further, in order to make it have the softening point different from embodiment 1, slurries manufacture as described below for top layer.To the 2nd slurries, reduce the addition of the ornamental equivalent (alkali metal oxide or alkaline earth oxide) in glass ingredient, the slurries that obtain are like this used with slurries as top layer.
Again to part main body 2 measure after heat treatment by the thickness deviation of overlay film, with respect to 10 microns of average film thickness, represent that the standard deviation of thickness deviation is 0.93, confirm that the deviation of thickness is little.
Again to part main body 2 measure after heat treatment by the adhering to of the foreign matters such as dust on overlay film, the ratio that is observed the part that foreign matter adheres to is 0.1%, confirms that foreign matter adheres to few.
comparative example 1do not use top layer slurries and the 2nd slurries, only with the 1st slurries, only form the 1st inner side film on the surface of part main body 2, in addition in the same manner as in Example 1, the incidence of investigation matrix visual defects, then heat-treats in the same manner as in Example 1.The incidence that has the part main body 2 of matrix visual defects is 2.2%.
Under state before heat treatment, utilize again the coating strength that grasps pilot survey the 1st inner side film, result is 28N.After heat treatment, utilize again the film-strength that grasps pilot survey the 1st inner side film, result is 32N.
Again to part main body 2 measure after heat treatment by the thickness deviation of overlay film, with respect to 10 microns of average film thickness, represent that the standard deviation of thickness deviation is 2.8, confirm that thickness deviation is large.
Again to part main body 2 measure after heat treatment by the adhering to of the foreign matters such as dust on overlay film, the ratio that is observed the part that foreign matter adheres to is 70%, confirms that foreign matter adheres to many.
comparative example 2do not use top layer slurries and the 1st slurries, only with the 2nd slurries, form the 2nd inner side film on the surface of part main body 2, in addition in the same manner as in Example 1, the incidence of investigation matrix visual defects, then heat-treats in the same manner as in Example 1.The incidence that has the part main body 2 of matrix visual defects is 20.7%.
Under state before heat treatment, utilize again the coating strength that grasps pilot survey the 2nd inner side film, result is 14N.After heat treatment, utilize again the film-strength that grasps pilot survey the 2nd inner side film, result is 35N.
Again part main body 2 is measured the thickness deviation of the 2nd inner side film after heat treatment, with respect to 10 microns of average film thickness, represented that the standard deviation of thickness deviation is 2.2, confirm that the deviation of thickness is large.
Again part main body 2 is measured adhering to of the foreign matters such as dust on the 2nd inner side film after heat treatment, the ratio that is observed the part that foreign matter adheres to is 70%, confirms that foreign matter adheres to many.
comparative example 3except manufacturing, use top layer slurries, making the softening point of the face side film that utilizes top layer slurries formation is outside 680 DEG C, in the same manner as in Example 1, in part main body, forms film, the incidence of investigation matrix visual defects, then heat-treats in the same manner as in Example 1.The incidence that has the part main body 2 of matrix visual defects is 92%.
Under state before heat treatment, utilize and grasp pilot survey by the coating strength of overlay film again, result is 28N.After burning till, utilize and grasp pilot survey by the coating strength of overlay film again, result is 22N.
Again to part main body 2 measure after heat treatment by the thickness deviation of overlay film, with respect to 10 microns of average film thickness, represent that the standard deviation of thickness deviation is 5.8, confirm that the deviation of thickness is large.
Again to part main body 2 measure after heat treatment by the adhering to of the foreign matters such as dust on overlay film, the ratio that is observed the part that foreign matter adheres to is 100%, confirms that foreign matter adheres to many.
embodiment 3replace the silica-based glass powder comprising in slurries for top layer, be used as the alumina powder of crystalline material, change the following stated condition, in addition in the same manner as in Example 1, in multiple part main bodys 2, form film, investigation matrix visual defects incidence.The incidence that has the part main body 2 of matrix visual defects is 0.0%.Then in the same manner as in Example 1 the part main body that forms film is heat-treated.
Further, the particle diameter of aluminium oxide is 0.4 trifling, and fusing point is about 2020 DEG C.Again, on top layer, with in slurries, the ratio of alumina powder is 5 % by weight, and with respect to alumina powder, the content of adhesive resin is 5 % by weight.
Again to part main body 2 measure after heat treatment by the thickness deviation of overlay film, with respect to 10 microns of average film thickness, represent that the standard deviation of thickness deviation is 0.93, confirm that thickness deviation is little.
Again to part main body 2 measure after heat treatment by the adhering to of the foreign matters such as dust on overlay film, the ratio that is observed the part that foreign matter adheres to is 0.1%, confirms that foreign matter adheres to few.
Also use sweep electron microscope (SEM) to observe by near the top layer of overlay film, as shown in Figure 4, confirming has alumina particle to exist with point-like in most surface side, forms top layer.
Claims (7)
1. a coil component, has part main body and to be formed at described part main body whole lip-deep by overlay film, it is characterized in that,
Described by overlay film at least have be present in described by the top layer of the face side of overlay film be present in the la m of inner side, this top layer,
The softening point of skin glass composition that is contained in described top layer is higher than the softening point of la m glass ingredient that is contained in described la m,
Higher than the softening point of described la m glass ingredient, and the temperature lower than the softening point of described skin glass composition, heat-treat so that described skin glass composition and the vitrifying of described la m glass ingredient form described by overlay film.
2. coil component according to claim 1, is characterized in that, the content of the ornamental equivalent in described skin glass composition is less than the content of the ornamental equivalent in described la m glass ingredient.
3. coil component according to claim 1 and 2, is characterized in that, the softening point of described skin glass composition is higher 50～100 DEG C than the softening point of described la m glass ingredient.
4. coil component according to claim 1 and 2, is characterized in that, the thickness on described top layer described by 1/8～1/2 scope of the gross thickness of overlay film in.
5. a coil component, has part main body and to be formed at described part main body whole lip-deep by overlay film, it is characterized in that,
Described by overlay film at least have be present in described by the top layer of the face side of overlay film be present in the la m of inner side, this top layer,
The fusing point of crystalline material that is contained in described top layer is higher than the softening point of la m glass ingredient that is contained in described la m,
Higher than the softening point of described la m glass ingredient, and than the low-melting temperature of described crystalline material, heat-treat so that the vitrifying of described la m glass ingredient, form described by overlay film,
Described crystalline material is pottery.
6. coil component according to claim 5, is characterized in that, the fusing point of described crystalline material is higher more than 30 DEG C than the softening point of described la m glass ingredient.
7. according to the coil component described in claim 5 or 6, it is characterized in that, the particle diameter of described crystalline material described by 1/8～1/2 scope of the gross thickness of overlay film in.
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| JP2014216495A (en) * | 2013-04-25 | 2014-11-17 | Tdk株式会社 | Soft magnetic material composition, magnetic core, coil type electronic component, and process of manufacturing compact |
| CN105023743B (en) * | 2015-07-29 | 2017-01-18 | 深圳顺络电子股份有限公司 | Manufacturing method of composite-structure iron powder core green body and manufacturing method of composite-structure iron powder core |
| CN114845860B (en) * | 2019-11-29 | 2024-04-23 | 大日本印刷株式会社 | Laminate, method for producing laminate, film for lamination, and image display device |
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| JP2780408B2 (en) * | 1990-01-18 | 1998-07-30 | 松下電器産業株式会社 | Square plate type chip resistor |
| JP2004071930A (en) * | 2002-08-08 | 2004-03-04 | Rohm Co Ltd | Electric component and manufacturing method therefor |
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| JPS5235860A (en) * | 1975-09-17 | 1977-03-18 | Hitachi Ltd | Thick film capacitor |
| JPS5325807A (en) * | 1977-06-20 | 1978-03-10 | Toshiba Corp | Laminate d core |
| JPH07312301A (en) * | 1994-03-24 | 1995-11-28 | Ngk Insulators Ltd | Resistor element |
| JP3460384B2 (en) * | 1995-05-31 | 2003-10-27 | 松下電器産業株式会社 | Composite electronic component and method of manufacturing the same |
| JP3620404B2 (en) * | 1999-12-14 | 2005-02-16 | 株式会社村田製作所 | Method for forming glass film, method for forming metal film, and method for manufacturing electronic component |
| US6738251B2 (en) * | 2000-01-28 | 2004-05-18 | Tdk Corporation | Conductive pattern incorporated in a multilayered substrate, multilayered substrate incorporating a conductive pattern, and a method of fabricating a multilayered substrate |
| JP4868019B2 (en) * | 2009-03-30 | 2012-02-01 | Ｔｄｋ株式会社 | Manufacturing method of electronic parts |
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|---|---|---|---|---|
| JP2780408B2 (en) * | 1990-01-18 | 1998-07-30 | 松下電器産業株式会社 | Square plate type chip resistor |
| JP2004071930A (en) * | 2002-08-08 | 2004-03-04 | Rohm Co Ltd | Electric component and manufacturing method therefor |
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