CN101937940B - 印刷磷源单步扩散法制作选择性发射结太阳电池工艺 - Google Patents
印刷磷源单步扩散法制作选择性发射结太阳电池工艺 Download PDFInfo
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- CN101937940B CN101937940B CN2010102636278A CN201010263627A CN101937940B CN 101937940 B CN101937940 B CN 101937940B CN 2010102636278 A CN2010102636278 A CN 2010102636278A CN 201010263627 A CN201010263627 A CN 201010263627A CN 101937940 B CN101937940 B CN 101937940B
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- Prior art keywords
- phosphorous
- diffusion
- slurry
- solar cell
- technology
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 38
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 238000005516 engineering process Methods 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- 239000002002 slurry Substances 0.000 claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims abstract description 9
- 238000007650 screen-printing Methods 0.000 claims abstract description 7
- 239000002904 solvent Substances 0.000 claims abstract description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 11
- 229910052698 phosphorus Inorganic materials 0.000 claims description 11
- 239000011574 phosphorus Substances 0.000 claims description 11
- 238000007639 printing Methods 0.000 claims description 8
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 abstract 2
- 229910019213 POCl3 Inorganic materials 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
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CN2010102636278A CN101937940B (zh) | 2010-08-26 | 2010-08-26 | 印刷磷源单步扩散法制作选择性发射结太阳电池工艺 |
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CN2010102636278A CN101937940B (zh) | 2010-08-26 | 2010-08-26 | 印刷磷源单步扩散法制作选择性发射结太阳电池工艺 |
Publications (2)
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CN101937940A CN101937940A (zh) | 2011-01-05 |
CN101937940B true CN101937940B (zh) | 2012-11-14 |
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CN2010102636278A Active CN101937940B (zh) | 2010-08-26 | 2010-08-26 | 印刷磷源单步扩散法制作选择性发射结太阳电池工艺 |
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CN (1) | CN101937940B (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8518170B2 (en) | 2008-12-29 | 2013-08-27 | Honeywell International Inc. | Boron-comprising inks for forming boron-doped regions in semiconductor substrates using non-contact printing processes and methods for fabricating such boron-comprising inks |
CN102646751A (zh) * | 2011-02-22 | 2012-08-22 | 中国科学院微电子研究所 | 具有超低纳米减反结构准黑硅高效太阳能电池的制备方法 |
CN102646750A (zh) * | 2011-02-22 | 2012-08-22 | 中国科学院微电子研究所 | 一种硅基纳米柱阵列太阳能电池的制备方法 |
CN102270701A (zh) * | 2011-07-25 | 2011-12-07 | 江苏伯乐达光伏有限公司 | 选择性发射极晶硅太阳能电池的一次性扩散工艺 |
US8629294B2 (en) | 2011-08-25 | 2014-01-14 | Honeywell International Inc. | Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants |
US8975170B2 (en) | 2011-10-24 | 2015-03-10 | Honeywell International Inc. | Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions |
CN103187474A (zh) * | 2011-12-27 | 2013-07-03 | 张博 | 一种降低选择性发射极太阳能电池发射极串联电阻的方法 |
CN102683487A (zh) * | 2012-04-27 | 2012-09-19 | 山东力诺太阳能电力股份有限公司 | 一种p型晶硅太阳电池双面扩散方法 |
CN102800757B (zh) * | 2012-08-28 | 2016-03-16 | 英利集团有限公司 | N型太阳能电池及其制造工艺 |
CN102931287A (zh) * | 2012-11-21 | 2013-02-13 | 英利能源(中国)有限公司 | 一种n型电池片及其制备方法 |
US20140166093A1 (en) * | 2012-12-18 | 2014-06-19 | Paul Loscutoff | Solar cell emitter region fabrication using n-type doped silicon nano-particles |
CN103280402B (zh) * | 2013-05-23 | 2015-09-02 | 苏州金瑞晨科技有限公司 | 一种含高聚磷纳米硅浆料的制备方法及其应用 |
CN103295886B (zh) * | 2013-05-23 | 2016-01-13 | 刘国钧 | 一种磷组合物包覆纳米硅浆料的制备方法及其应用 |
CN103280491B (zh) * | 2013-05-23 | 2015-11-04 | 苏州金瑞晨科技有限公司 | 一种多聚硼纳米硅复合浆料的制备方法及其应用 |
CN103280401B (zh) * | 2013-05-23 | 2016-01-27 | 刘国钧 | 一种硼组合物包覆硅纳米浆料的制备方法及其应用 |
CN103904141B (zh) * | 2014-02-20 | 2016-08-24 | 中国科学院电工研究所 | 低表面浓度轻掺杂区选择性发射极结构的制备方法 |
CN113035996B (zh) * | 2019-12-25 | 2023-04-14 | 新疆硅基新材料创新中心有限公司 | 一种基于含高浓度硼纳米硅浆的高效电池及制作方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101281939A (zh) * | 2008-05-26 | 2008-10-08 | 江苏天保光伏能源有限公司 | 一种制造高效硅太阳能电池片的方法 |
CN101339963A (zh) * | 2008-08-04 | 2009-01-07 | 常州天合光能有限公司 | 晶体硅太阳能电池的选择性一次扩散方法 |
CN101414647A (zh) * | 2007-10-17 | 2009-04-22 | 北京中科信电子装备有限公司 | 一种高效太阳能电池局域深浅结扩散方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8138070B2 (en) * | 2009-07-02 | 2012-03-20 | Innovalight, Inc. | Methods of using a set of silicon nanoparticle fluids to control in situ a set of dopant diffusion profiles |
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2010
- 2010-08-26 CN CN2010102636278A patent/CN101937940B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101414647A (zh) * | 2007-10-17 | 2009-04-22 | 北京中科信电子装备有限公司 | 一种高效太阳能电池局域深浅结扩散方法 |
CN101281939A (zh) * | 2008-05-26 | 2008-10-08 | 江苏天保光伏能源有限公司 | 一种制造高效硅太阳能电池片的方法 |
CN101339963A (zh) * | 2008-08-04 | 2009-01-07 | 常州天合光能有限公司 | 晶体硅太阳能电池的选择性一次扩散方法 |
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CN101937940A (zh) | 2011-01-05 |
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CB03 | Change of inventor or designer information |
Inventor after: Feng Zhiqiang Inventor after: Deng Weiwei Inventor after: Gao Jifan Inventor before: Feng Zhiqiang Inventor before: Deng Weiwei |
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CB03 | Change of inventor or designer information | ||
CP01 | Change in the name or title of a patent holder |
Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee after: TRINASOLAR Co.,Ltd. Address before: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee before: trina solar Ltd. |
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Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee after: trina solar Ltd. Address before: 213031, No. 2, Tianhe Road, Xinbei Industrial Park, Jiangsu, Changzhou Patentee before: CHANGZHOU TRINA SOLAR ENERGY Co.,Ltd. |
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