CN101934933A - Apparatus for conveying electronic element - Google Patents

Apparatus for conveying electronic element Download PDF

Info

Publication number
CN101934933A
CN101934933A CN2009102059846A CN200910205984A CN101934933A CN 101934933 A CN101934933 A CN 101934933A CN 2009102059846 A CN2009102059846 A CN 2009102059846A CN 200910205984 A CN200910205984 A CN 200910205984A CN 101934933 A CN101934933 A CN 101934933A
Authority
CN
China
Prior art keywords
suction jig
anchor clamps
electronic component
height
turntable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2009102059846A
Other languages
Chinese (zh)
Other versions
CN101934933B (en
Inventor
北原徹
小野村敦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TESEK CO Ltd
Tesec Corp
Original Assignee
TESEK CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TESEK CO Ltd filed Critical TESEK CO Ltd
Publication of CN101934933A publication Critical patent/CN101934933A/en
Application granted granted Critical
Publication of CN101934933B publication Critical patent/CN101934933B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

Provided is an apparatus for conveying an electronic element, capable of adjusting the height of each absorbing clamp with high precision in a short time. The apparatus includes a rotating floor (2), a plurality of absorbing clamps (13), a pneumatic shuttle (18), an elevating device (14), and a control device (21) for controlling a descending amount of the absorbing clamps (13). The control device (21) comprises a height detection part (38) to detect a fiducial height of the absorbing clamps (13) by using a detection system different from that of the elevating device (14). The control device (21) comprises a correction part for correcting the descending amount of each absorbing clamp (13) so as to ensure the fiducial height of each absorbing clamp to be identical to the height of each absorbing clamp (13) detected by the elevating device (14).

Description

The electronic component carrying device
Technical field
The present invention relates to a kind of with the electronic component carrying device of electronic component with suction jig absorption conveyance.
Background technology
As existing this electronic component carrying device, for example record to some extent in patent documentation 1.The carrying device of 1 publicity of patent documentation comprises: support the turntable of a plurality of suction jig free liftings and be used for the jacking system of lifting suction jig.Described turntable is overlooked and is seen roundedly, and the axis that is driven around above-below direction by actuating device intermittently rotates.
Described suction jig equally spaced is arranged in described turntable peripheral part in a circumferential direction.Each suction jig, the peripheral part of perforation turntable on above-below direction.In the lower end of this suction jig, be formed for the adsorption plane of stick electronic components, in the upper end of suction jig, connecting the push rod of jacking system.
Described jacking system, it is configured to: convert the rotation of electrical motor to crank motion, the described push rod of lifting.This jacking system when suction jig is moved by described turntable driving along continuous straight runs, remains on the position of readiness that described suction jig rises.In addition, this jacking system (moves when placing) when the suction jig stick electronic components or when being positioned over electronic component in the portion of being placed, and falls suction jig.
No. 4057643 communique of [patent documentation 1] patent
The length of each suction jig has error during fabrication, so be difficult to form certain length.In addition, for turntable, the very high flatness of difficult more formation that maximizes more is so that the height of each suction jig department of assembly is easy to occur is inconsistent.And then because the long-time carrying device that uses, for example the dynamic contact surface (Zhe connects face) of rubber can wear and tear sometimes, thereby changes the height of suction jig.
Therefore, the carrying device that comprises 1 publicity of above-mentioned patent documentation, the electronic component of a plurality of suction jigs of turret supports with carrying device on, can produce following problem: certain for the adsorption plane height that makes the suction jig that turntable assembles, just must adjust operation highly at each suction jig.
The reason of carrying out the suction jig height adjustment is, when the aspect ratio altitude datum of described adsorption plane hangs down, when for example using the suction jig stick electronic components, may cause to surpass the load impact electronic component of permissible range.Have again, when the aspect ratio altitude datum of adsorption plane is high, may cause suction jig can not with the regulation pressing force contact electricity sub-element, absorption take place frequently unusually.In addition, for reducing the pressing force of suction jig, also can consider between suction jig and push rod, to add shock mount to electronic component.
But,, also can't when suction jig high speed impact electronic component, relax the impulsive force that is applied on the electronic component even adopt this structure.
Adjusting the operation of suction jig height must the staff use hand power tool that each suction jig is carried out one by one, so production time significantly extends.In addition, if finish this operation at short notice, then the deviation of adsorption plane height will become big.
Summary of the invention
The present invention is for addressing this problem, aim to provide a kind of can be with short time and the electronic component carrying device of accurately height of each suction jig being adjusted.
For reaching this purpose, electronic component carrying device provided by the present invention, comprise: the turntable of intermittent rotation, with the peripheral part that can be supported on this turntable up and down, at the first-class spaced a plurality of electronic component suction jigs of the circumferencial direction of described turntable, pneumatic shuttle with the adsorbed state that switches the electronic component that causes by described suction jig and the state of relieving, with contain the described suction jig function of lifting and contain the jacking system that detects suction jig height function simultaneously, and be connected with described jacking system and control the control setup of described suction jig slippage; Described control setup comprises: height detection portion and correction portion; Described height detection portion is arranged near the described turntable, utilizes the other checking system different with described jacking system to detect the altitude datum of each suction jig; Described correction portion is revised the slippage of each suction jig, so that under suction jig has descended the state of regulation slippage, by the altitude datum of detected each suction jig of described height detection portion and consistent by the height of detected each suction jig of described jacking system under this state.
The present invention, in aforementioned invention, described control setup, also comprise: the intermittence rotation by described turntable makes each suction jig move to the turntable control part of described test section and the jacking system control part that makes the suction jig that moves to described test section descend and rise then by described jacking system in turn.
The present invention, in aforementioned invention, described other checking system is made of sensor, and described sensor is used to detect the amount of movement that is adsorbed the detection module that anchor clamps push; Described correction portion, constitute by correction calculating part, correction preservation portion and correction execution portion, wherein, described correction calculating part, when the height of the suction jig that is gone out by described sensor is the preset reference height, relatively, calculate the correction that the difference of height of these height is become 0 necessary each suction jig by the height and the described altitude datum of the detected suction jig of jacking system; Described correction preservation portion stores described correction in the internal memory into; Described correction execution portion reads out described correction from described internal memory when jacking system moves, and based on the slippage of this each suction jig of correction correction.
The present invention, in aforementioned invention, also comprise: be arranged near the electronic component handing-over turntable of described turntable peripheral part, with along the circumferential direction uniformly-spaced arrange with the peripheral part of turntable in the handing-over of this electronic component, contain a plurality of anchor clamps of picking up of the adsorption plane relative with the adsorption plane of described suction jig; Described control setup comprises elevation measurement portion and high computational portion; Described elevation measurement portion, the suction jig of selecting as benchmark is dropped to and described picking up do not have the gap between the anchor clamps, under this state, with the height that detected the described suction jig that draws by described jacking system is benchmark, all is picked up anchor clamps detect the elevation measurement work of picking up the anchor clamps height; Described high computational portion is that benchmark is revised the height of described suction jig with the described revised slippage of suction jig, calculates at each suction jig and respectively picks up suction jig height when carrying out the electronic component handing-over between the anchor clamps.
The present invention, in aforementioned invention, the described anchor clamps of picking up can be arranged at electronic component handing-over turntable crank motion; Described electronic component also comprises with carrying device: with described to pick up anchor clamps relative, be arranged at described handing-over with near the electronic component supply unit the turntable, with have make described pick up the function of the relative described electronic component supply unit advance and retreat of anchor clamps and have detect pick up anchor clamps amount of movement function pick up the anchor clamps actuating device; Described control setup comprises: moving distance measuring portion and miles of relative movement storage part and driving device controls portion; Described moving distance measuring portion, between the described electronic component of picking up anchor clamps and electronic component supply unit during no gap, pick up anchor clamps at all, measure by the described anchor clamps of picking up and pick up the position of anchor clamps and pick up miles of relative movement between the anchor clamps initial position with actuating device is detected; Described miles of relative movement storage part, the miles of relative movement that all that this moving distance measuring portion is measured are picked up anchor clamps deposits internal memory in; Described driving device controls portion when respectively picking up anchor clamps and adsorb the electronic component of described electronic component supply unit, controls described action of picking up anchor clamps with actuating device, makes to pick up anchor clamps and move with the miles of relative movement that reads out from described internal memory.
By the present invention, by the height (altitude datum) of detected each suction jig of height detection portion, for containing the value of the error that the tolerance when making suction jig or the flatness of turntable etc. cause.By the present invention, can will contain the down maneuver of the altitude datum of suction jig and the control setup control jacking system of this error, the height adjustment of the suction jig when suction jig is descended becomes consistent height.
Therefore, when making suction jig drop to object height, can descend with the state of substantially getting rid of described error by the jacking system driving.That is, electronic component carrying device provided by the invention by detect the altitude datum of each suction jig with height detection portion, is revised the slippage that is caused by jacking system as mentioned above, can carry out substantial height adjustment to each suction jig.
In addition, the time that is spent when utilizing height detection portion to detect each suction jig altitude datum, the production time when adjusting the suction jig height than the staff one by one with hand power tool has remarkable shortening.
Therefore, by the present invention, can provide a kind of can and carry out the electronic component carrying device of each suction jig height adjustment accurately with the short time.
Description of drawings
Fig. 1 is the planar view of the electronic component that provides of the expression embodiment of the invention with the formation of carrying device.
Fig. 2 is the lateral plan of the formation of expression jacking system, suction jig and height detection unit.
Fig. 3 is the lateral plan of the action when being used to illustrate the height that detects suction jig, and the state before descending with figure (A) expression with the state of figure (B) expression reference for assembling height clamp, drops to suction jig with figure (C) expression the state of altitude datum.
The enlarged side view of anchor clamps propelling unit, suction jig and sensor module when Fig. 4 is the expression height detection with figure (A) expression readiness for action, drops to suction jig with figure (B) expression the state of altitude datum.
Fig. 5 is the element connection device of expression and the lateral plan of the formation of electronic component supply unit.
Fig. 6 is used to illustrate the lateral plan that detects the action of picking up the anchor clamps height, is adsorbed the state that anchor clamps adsorb with figure (A) expression button anchor clamps 67, is picked up the state that anchor clamps adsorb with figure (B) expression button anchor clamps 67.
Fig. 7 is used to illustrate the lateral plan of measuring the action of picking up anchor clamps miles of relative movement, with figure (A) expression readiness for action, is picked up the state of anchor clamps absorption with figure (B) expression electronic component.
Fig. 8 be used to illustrate and correcting unit between the lateral plan of action of detection height when carrying out the electronic component handing-over, with figure (A) expression readiness for action, contact the state of the top board of correcting unit with figure (B) expression suction jig, make the state that leaves necessary gap between suction jig rising and the electronic component with figure (C) expression, suction jig is reduced to the state of electronic component delivery position with figure (d) expression.
To be expression reduce to lateral plan with the top equal height state of the inlet guide of braid unit with suction jig to Fig. 9.
Figure 10 is that expression is reduced to suction jig and made electronic component moving be put into the section drawing of the position of braid unit.
Figure 11 is the block diagram of electronic component provided by the invention with carrying device.
Nomenclature
1... the electronic component carrying device, 2... turntable, 13... suction jig, 14... jacking system, 18... pneumatic shuttle, 21... control setup, 24... height detection unit, 31... the turntable control part, 32... jacking system control part, 39... correction portion, 42... sensor head, 43... detection module, 45... correction calculating part, 46... correction preservation portion, 47... revise execution portion, 48... internal memory, 51... electronic component supply unit, 52... picks up anchor clamps, 53... electronic component handing-over turntable, 55... pick up the anchor clamps actuating device, 61... elevation measurement portion, 62... is preservation portion highly, 63... high computational portion, 64... moving distance measuring portion, 65... miles of relative movement preservation portion, 66... driving device controls portion.
The specific embodiment
Below, by Fig. 1~Figure 11 the embodiment of electronic component provided by the invention with carrying device is described in detail.
Electronic component shown in Figure 1 uses and overlooks rounded turntable 2 with carrying device 1, with electronic component 3 (with reference to Fig. 7) conveyance to a plurality of processing equipment described later 4~10 places.
Turntable 2 is discoideus, is equipped on the base station 11 via actuating device 12 with the state of its orientation of its axis above-below direction.At the peripheral part of turntable 2, on the circumferencial direction of turntable 2, equally spaced arranging a plurality of suction jigs 13 that are used for stick electronic components 3.In the present embodiment, be provided with 30 (suction jigs 13 of #1~#30).
These suction jigs 13 liftably are supported on the turntable 2, make it lifting by jacking system 14 described later (with reference to Fig. 2).In addition, these suction jigs 13 as shown in Figure 2, by spring members 15 application of force upwards, remain on the regulation position of readiness usually.That is, suction jig 13 can be that the top position is supported on the turntable 2 up and down with the position of readiness.
In the bottom of these suction jigs 13, as shown in Figure 3, fixing rubber suction nozzle 16.Inside in this rubber suction nozzle 16 and suction jig 13 bottoms connects and is provided with the pore of not representing among the figure.The lower end of this pore, the adsorption plane upper shed in the lower end that is formed on rubber suction nozzle 16, the upper end is connected with the pneumatic shuttle 18 of the air hose 17 (with reference to Fig. 1) that contains each suction jig 13.
This pneumatic shuttle 18 from described pore aspirated air, is supplied with positive pressure air to described pore when electronic component 3 is adsorbed anchor clamps 13 relievings when electronic component 3 is adsorbed anchor clamps 13 absorption.The action of this pneumatic shuttle 18 is controlled by aftermentioned control setup 21 (with reference to Fig. 1 and Figure 11).
The actuating device 12 that described turntable is used constitutes as propulsion source with electrical motor (being expression among the figure), makes the angle of turntable 2 around the axis rotation regulation of above-below direction.The angle of this regulation is meant that the number of supposing suction jig 13 is N, then is equivalent to rotate the 1/N angle.The actuating device 12 of present embodiment, intermittent at every turn with 1/30 degree revolving-turret 2.The rotative speed of the turntable 2 when this actuating device 12 drives turntable 2, swing circle etc. are all by control setup 21 controls described later.
Described various processing equipment 4~10, as shown in Figure 1, can be that be used to supply with electronic component 3 rotary picked up unit 4 and the correcting unit 6 and being used to that is used to check the image unit 5 of electronic component 3 outward appearances and is used to revise absorption position, the angle of electronic component 3 reclaims 3 of substandard products and reclaims unit 7 and be used for electronic component 3 is accommodated into the discharger 8 of container and braid unit 9 etc.These devices are separately positioned near the peripheral part of turntable 2.Promptly, the electronic component of present embodiment carrying device 1, make by the rotary electronic component of supplying with unit 43 of picking up of aftermentioned and be adsorbed anchor clamps 13 absorption, intermittent revolving-turret 2, via image unit 5, correcting unit 6, reclaim unit 7 etc. the most at last these electronic component 3 conveyances to discharger 8 or braid unit 9.
Described jacking system 14 as shown in Figure 2, comprises from the relative anchor clamps propelling unit 22 of top and suction jig 13 and is used for driving at above-below direction the electrical motor 23 of this anchor clamps propelling unit 22.This jacking system 14 is arranged at the top of the processing equipment that is necessary lifting suction jig 13.That is, this jacking system 14 as shown in Figure 1, is arranged at the rotary top of unit 4 and top and the top of correcting unit 6 and top and the top of braid unit 9 and the top of aftermentioned height detection unit 24 of discharger 8 of image unit 5 of picking up respectively.
The described anchor clamps propelling unit 22 of jacking system 14, it is configured to the push rod 25 of direction extension up and down can be supported on the supporter 26 with moving freely on the above-below direction.Supporter 26 is fixed on the supporting frame 27.This supporting frame 27 is arranged on the top of described turntable 2 with the state that is held in described base station 11.Push rod 25 utilizes the upwards application of force of spring members 30, and its set cam follower 28 in upper end is contacted with the cam 29 of described electrical motor 23.
Described cam follower 28 and cam 29 convert the reciprocating device of above-below direction to for the rotation with electrical motor 23.Cam 29 is fixed in the shaft end of the S. A. 23a of electrical motor 23.Electrical motor 23 is fixed on the described supporting frame 27 with the diametric state of the orientation of its axis turntable 2 of S. A. 23a.This electrical motor 23 rotates described cam 29 with predetermined angular, and initial position is got back in the reversing sense rotation then.
The camb contour of described cam 29 can make anchor clamps propelling unit 22 rise or descend with the ratio of regulation at the rotation of cam 29.That is, this jacking system 14 when having lifting suction jig 13 functions, also has the function that detects suction jig 13 height.The angle (slippage of suction jig 13) of described electrical motor 23 rotations is controlled by the height of control setup 21 corresponding each suction jig 13 as described later.
Control setup 21, be used to control electronic component each actr of carrying device 1 and the action of described various device 4~9, as shown in figure 11, comprise: the turntable control part 31 that is used to control turntable 2 actions, with the jacking system control part 32 that is used to control jacking system 14 actions, with be used to control the rotary rotary control part 33 of picking up of picking up unit 4 actions, with the image unit control part 34 that is used to control image unit 5, with the correcting unit control part 35 that is used to control correcting unit 6 actions, with the discharger control part 36 that is used to control discharger 8 actions, with the braid unit controls portion 37 that is used to control 9 actions of braid unit, detect the height detection portion 38 of suction jig 13 height and be used to correction portion 39 of revising suction jig 13 height (slippage) or the like with being used to.
Suction jig 13 equally is assembled on the turntable 2 with the height of all suction jigs 13.But, when being assembled in each suction jig 13 on the turntable 2, there is tolerance in the height of suction jig 13 (height of lower end adsorption plane) or all forms unanimity because the turntable oneself height is difficult to the peripheral part All Ranges, so be difficult to equal when making owing to suction jig 13.
The electronic component that present embodiment provides carrying device 1, with aftermentioned height detection unit 24 (with reference to Fig. 1) detect height as each suction jig 13 benchmark (below, only be called altitude datum), to should the altitude datum correction by the slippage of the suction jig 13 of jacking system 14 operations.In the present embodiment, constitute the present invention's so-called " other checking system " by height detection unit 24.
Height detection unit 24 as Fig. 2 and shown in Figure 3, comprising: near pillar 41 that protrudes upward from base station 11 the peripheral part of turntable 2 and the sensor that is installed in these pillar 41 upper ends 42.Sensor 42 comprises from the relative detection module 43 of below and suction jig 13, is made of the touch sensor of the above-below direction position of detecting this detection module 43.In the present embodiment, constitute the so-called test section of the present invention by this sensor 42.At this, the method for utilizing height detection unit 24 to detect suction jig 13 height is described.
At first, set the height (altitude datum) that becomes suction jig 13 adsorption plane benchmark.Here, the height of described detection module 43 { height from the sky plate (upper surface) of base station 11 to detection module 43 upper ends } shown in Fig. 3 (A), is described for the situation of h1 at the elongation state (detection module 43 is in the highest state) of sensor 42 time.Under this state,, utilize anchor clamps 44 to make sensor 42 a contraction h2,, preset value h3 position highly is decided to be 0 point (altitude datum) { with reference to figure (C) } at this position as shown in the figure (B).This h3 is the position that the upper end position of the detection module 43 of the sensor 42 under the elongation state reduces h4.
For example, when supposing that h1 is 200mm, establishing h2 is that 5mm, h3 are 3.5mm.At this moment, altitude datum is 198.5mm, and the height of detection module 43 upper ends was altitude datum when the states of elongation reduced 1.5mm (h4) from sensor 42.
Suction jig 13 shown in Fig. 4 (A), is assembled on the turntable 2, makes in sensor 42 and during for elongation state, forms predetermined gap d 1 between detection module 43 and the suction jig 13.In addition, the anchor clamps propelling unit 22 of jacking system 14 is assembled on the supporting frame 27, and forms predetermined gap d 2 between the upper end of suction jig 13.
If under this state, by the driving of jacking system 14, anchor clamps propelling unit 22 descends, when at first anchor clamps propelling unit 22 has descended gap d 2, anchor clamps propelling unit 22 contacts with suction jig 13, and along with anchor clamps propelling unit 22 further decline gap d 1, suction jig 13 contacts with detection module 43.
By the driving of jacking system 14, anchor clamps propelling unit 22 further descends, and when sensor 42 was shunk (detection module 43 descends), sensor 42 detected 0 point.In the present embodiment, when the slippage of anchor clamps propelling unit 22 reached d1+d2+h4, sensor 42 detected 0 point.This moment, the height of suction jig 13 was " altitude datum ".
When sensor 42 detected at 0, the height detection portion 38 of control setup 21 made jacking system 14 stop like this.That is, this height detection portion 38 can utilize described sensor 42 to detect the altitude datum of suction jig 13.
On the other hand, the height of suction jig 13 of this moment can be tried to achieve by calculating according to the anglec of rotation of the cam 29 of jacking system 14.Below, this height by jacking system 14 detected suction jigs 13 only is called theoretical level.
The jacking system control part 32 of control setup 21, the action of control jacking system 14, the slippage that makes suction jig 13 descend and stipulate based on described theoretical level.
Control setup 21 comprises the described slippage of revising each suction jig 13, makes the corresponding to correction portion 39 of described altitude datum and described theoretical level (with reference to Figure 11).
This correction portion 39 as shown in figure 11, comprises correction calculating part 45 and correction preservation portion 46 and revises execution portion 47.
Correction calculating part 45 is under the state of altitude datum at the height by described sensor 42 a detected suction jig 13, at first, will be deposited in internal memory 48 (with reference to Figure 11) by the theoretical level of jacking system 14 detected suction jigs 13.Then, correction calculating part 45, more described theoretical level and described altitude datum calculate the deviant that becomes 0 necessary suction jig 13 for the difference of height that makes these height.This deviant has constituted the so-called correction of the present invention.
Correction preservation portion 46 deposits this deviant in the internal memory 48 in.
Described correction execution portion 47, (suction jig 13 by actual falling time) reads described deviant from described internal memory 48 when using jacking system 14, according to the described slippage of this deviant correction.
For example, when suction jig 13 is in altitude datum, when theoretical level is higher than altitude datum, increases described slippage and make theoretical level reduce this difference of height.Described deviant when suction jig 13 descends describes with Fig. 4, can be expressed as " position of readiness of anchor clamps propelling unit 22 "+" d1+d2+h4 "-" detect height " at 0 of each suction jig 13.
The electronic component that present embodiment provides to all suction jigs 13, is all implemented a series of height detection action of the above-mentioned preservation that detects deviant from altitude datum with carrying device 1.This moment, also by the driving of turntable control part 31, actuating device 12 is rotating table 2 intermittently, the action of jacking system control part 32 control jacking systems 14, lifting suction jig 13.Its result, in each suction jig 13, when reality descends, as the slippage correction of the target of jacking system 14 described deviant, can allow all suction jigs 13 drop to identical specified altitude.
In the present embodiment, be to try to achieve described deviant with the state that rubber suction nozzle 16 is housed on the suction jig 13.Therefore, the handing-over height of each suction jig 13 can be modified to the suitable handing-over height of setting height(from bottom) sum of errors rubber suction nozzle 16 individual differences that contain suction jig 13.
Electronic component that present embodiment provides utilizes above-mentioned deviant with carrying device 1, revise and various processing equipment 4~9 between element handing-over height when carrying out electronic component 3 handing-over.
(1) about with rotary handing-over of picking up the electronic component 3 of unit 4:
The rotary unit 4 of picking up as shown in Figure 5, makes and picks up anchor clamps 52 from the electronic component 3 that the attached electronic component supply unit 51 of a side draught keeps, and passes to the described suction jig 13 that is positioned at the top.Described electronic component supply unit 51 is to be used for keeping cutting apart a plurality of silicons that silicon chip forms in erected state, that is, the electronic component that present embodiment provides is described silicon with the electronic component 3 of carrying device 1 conveyance.
The rotary unit 4 of picking up that present embodiment provides, comprise: be arranged near the electronic component handing-over turntable 53 of described turntable 2 peripheral parts, use turntable 53 peripheral parts along the circumferential direction uniformly-spaced to arrange with joining at this electronic component, pick up anchor clamps 52 for 8 with adsorption plane relative with the adsorption plane of described suction jig 13, with be used for the described electronic component handing-over of intermittent rotation pick up with actuating device 54 with turntable 53 rotary and be used for moving pick up anchor clamps 52 pick up anchor clamps actuating device 55 etc.
Described electronic component handing-over is discoideus with turntable 53, is horizontal state with its axis and rotatably is supported on the base station 11 by actuating device 54.This electronic component joins with the axis direction of turntable 53, is seen as the parallel direction of tangential direction with described turntable 2 peripheral parts from the front.
Pick up anchor clamps 52, its structure is identical with described suction jig 13, is provided with rubber suction nozzle 16 at leading section, is connected with pneumatic shuttle 18 simultaneously, is supported in electronic component with can move freely and joins on the usefulness turntable 53.
Pick up the direction that anchor clamps 52 move, be the diametric(al) of electronic component handing-over with turntable 53.In addition, pick up the leading section (leading section of rubber suction nozzle 16) of anchor clamps 52 at these, in the rotation by described turntable 2, rubber suction nozzle 16 moves under the state of position of points upwards, forms the adsorption plane relative with the adsorption plane of described suction jig 13.
The described anchor clamps of picking up are pushed the base end part of picking up anchor clamps 52 by cam 56 in the present embodiment with actuating device 55.Cam 56 is fixed on the S. A. 57 of the electrical motor of not representing among the figure, can try to achieve the amount of movement of picking up anchor clamps 52 according to its anglec of rotation.The action of this electrical motor is controlled by the rotary control part 33 (with reference to Figure 11) of picking up of control setup 21.That is, pick up anchor clamps with actuating device 55, existingly make the described function of picking up described relatively electronic component supply unit 51 advance and retreat of anchor clamps 52, also have the function that detects the amount of movement of picking up anchor clamps 52.
The rotary control part 33 of picking up of control setup 11, comprise: the elevation measurement portion 61 that is used to be set in suction jig 13 and picks up the height when carrying out electronic component 3 handing-over between the anchor clamps 52, with height preservation portion 62 and high computational portion 63 with moving distance measuring portion 64, miles of relative movement preservation portion 65 and the driving device controls portion 66 of the miles of relative movement when being used to control the electronic component 3 of picking up the described electronic component supply unit 51 of anchor clamps 52 absorption or the like.
At this, at first, at suction jig 13 and the establishing method of picking up the height of the suction jig 13 when carrying out electronic component 3 handing-over between the anchor clamps 52 describe.
Described elevation measurement portion 61 shown in Fig. 6 (A)~(B), will drop to and describedly pick up zero-lash position between the anchor clamps 52 as the suction jig 13 of selection reference (for example the #1 suction jig 13) in advance.At this moment, make the button anchor clamps 67 of suction jig 13 absorption preparations.The thickness of these button anchor clamps 67 is measured in advance well and is deposited in the internal memory 48.Suction jig 13 and pick up the detection that gap between the anchor clamps 52 disappears utilizes the flow counter (not shown) of pneumatic shuttle 18 to carry out.
Described height preservation portion 62 under the described detected state shown in Fig. 6 (B), will be deposited in the internal memory 48 (with reference to Figure 11) by the height (theoretical level) of jacking system 14 detected described suction jigs 13.In the present embodiment, to all anchor clamps 52 of picking up, carry out this height detection of picking up anchor clamps 52 and to internal memory 48 deposit in by.
Described high computational portion 63 is by calculating the height (height during the element handing-over) that can draw at #1 suction jig 13 (as the suction jig 13 of benchmark) and pick up the suction jig 13 when carrying out electronic component 3 handing-over between the anchor clamps 52.Describe in detail, high computational portion 63, described deviant according to #1 suction jig 13, each that reads out from internal memory 48 being picked up the described theoretical level of anchor clamps 52 revises, deduct the thickness of button anchor clamps 67 again, add the thickness of electronic component 3, obtain the height in element when handing-over of suction jig 13.
Described high computational portion 63, the height when utilizing the element handing-over of above-mentioned #1 suction jig 13, the height when calculating the element handing-over of #2 suction jig 13~#30 suction jig 13 are arranged again.Promptly, high computational portion 63, obtain the difference of the deviant of the deviant of each suction jig 13 and #1 suction jig 13, the corresponding described difference of height during element handing-over by will use #1 suction jig 13 time is revised, the height when obtaining the element handing-over of #2~#30 suction jig 13.Promptly, high computational portion 63, described revised slippage based on each suction jig 13 is revised the described height of picking up anchor clamps 52, tries to achieve at each suction jig 13 and respectively picks up the height of each suction jig 13 when carrying out electronic component 3 handing-over between the anchor clamps 52.
Consequently, can be to 8 240 kinds of combinations of picking up anchor clamps 52 and 30 suction jigs 13, the height when setting member joins respectively.
In the present embodiment, owing to be the height that on picking up anchor clamps 52, is equipped with when trying to achieve the element handing-over under the state of rubber suction nozzle 16, so comprised the individual difference of the setting height(from bottom) sum of errors rubber suction nozzle 16 of picking up anchor clamps 52, the height in the time of can joining to actual components in picking up anchor clamps 52 carries out correct correction.
At suction jig 13 with pick up and carry out the element height in when handing-over between the anchor clamps 52, describe with Fig. 6, can be expressed as " height the when absorption of the anchor clamps respectively picked up detects "+" thickness of button anchor clamps 67 "-" thickness of electronic component 3 "+" correction of the current suction jig that will join 13 "-" as the correction of the suction jig 13 of benchmark ".
Below, the establishing method of the amount of movement of picking up anchor clamps 52 when picking up the electronic component 3 of anchor clamps 52 stick electronic components supply units 51 describes.
The rotary moving distance measuring portion 64 that picks up control part 33 at first, allows and picks up anchor clamps 52 and advance to electronic component supply unit 51 from the initial position shown in Fig. 7 (A).And this moving distance measuring portion 64 shown in Fig. 7 (B), when picking up anchor clamps 52 and contact with electronic component 3, stops to pick up anchor clamps with actuating device 55.Pick up contacting of anchor clamps 52 and electronic component 3, utilize with the flow counter of picking up the pneumatic shuttle 18 that anchor clamps 52 are connected and detect.
Then, moving distance measuring portion 64 by calculating, determines it and picks up the position of anchor clamps 52 and pick up miles of relative movement between the initial position of anchor clamps 52 with actuating device 55 is detected by picking up anchor clamps when stopping.
Miles of relative movement preservation portion 65 will be deposited in the internal memory 48 by the miles of relative movement of picking up anchor clamps 52 that described moving distance measuring portion 64 calculates.The moving distance measuring portion 64 of present embodiment and miles of relative movement preservation portion 65 pick up anchor clamps 52 to 8 and measure described miles of relative movement respectively, and deposit in the internal memory 48.
Driving device controls portion 66, when respectively picking up the electronic component 3 of anchor clamps 52 actual stick electronic components supply units 51, from described internal memory 48, read out the described miles of relative movement that each picks up anchor clamps 52, control the described anchor clamps of picking up with the action of actuating device 55, make and pick up anchor clamps 52 and move the miles of relative movement that this reads out.
Pick up the miles of relative movement of anchor clamps 52, utilize Fig. 7 to describe, can be expressed as " the element absorption detection position of respectively picking up anchor clamps 52 "-" respectively picking up the initial position of anchor clamps 52 "-" thickness of electronic component 3 ".
(2) about the handing-over of correcting unit 6 and electronic component 3:
Correcting unit 6 as shown in Figure 8, comprising: place the top board 71 of electronic component 3 and from the clamp 72 of side direction clamping electronic component 3.Described clamp 72 is not described in Fig. 4, and it is configured to by clamping electronic component 3 from four direction, revises the position of electronic component 3 and around the angle of the axis of above-below direction.
And correcting unit 6 between the height of suction jig 13 when carrying out electronic component 3 handing-over, be that the upper surface with described top board 71 is that benchmark is set.That is, at first, shown in Fig. 8 (A)~(B), will slowly fall the height when obtaining the rubber suction nozzle 16 of this suction jig 13 and top board 71 and contacting as the suction jig 13 (for example the #1 suction jig 13) of benchmark.
Then, shown in Fig. 8 (C), height that will be when suction jig 13 has risen gap between necessary rubber suction nozzle 16 of timing and the electronic component 3 deposits in the internal memory 48 as the releasing position.The releasing position of other #2 suction jig 13~#30 suction jig 13 utilizes the releasing position of #1 suction jig 13 to try to achieve by calculating.That is, the releasing position of #2 suction jig 13~#30 suction jig 13 is corrected altitudes that the difference of the deviant of the deviant of #1 suction jig 13 and #2 suction jig 13~#30 suction jig 13 is disappeared.The releasing position of this revised #2~#30 suction jig 13 is also deposited in the internal memory 48.
At correcting unit 6, actual when carrying out the handing-over of electronic component 3, shown in Fig. 8 (d), each suction jig 13 is dropped to the high position of electronic component 3 thickness from described releasing position.And, after this height (element release altitude) suction jig 13 is decontroled electronic component 3, carried out the position of components correction by correcting unit 6, produce negative pressure by 18 pairs of suction jigs of pneumatic shuttle 13, it is adsorbed to make electronic component 3 be adsorbed anchor clamps 13.
The height (element release altitude) of the suction jig 13 when carrying out electronic component 3 handing-over at correcting unit 6, utilize Fig. 8 to describe, can be expressed as " releasing position "-" height of electronic component 3 "+(" correction of each suction jig 13 "-" correction of #1 suction jig 13 ").
(3) about electronic component 3 handing-over to braid unit 9;
Braid unit 9 as Fig. 9 and shown in Figure 10, is accommodated into the element that is seated in inlet guide 73 belows with electronic component 3 and takes in being with in 74.Height when being accommodated into electronic component 3 in this braid unit 9 for setting, at first, as shown in Figure 9, at suction jig 13 (for example the #1 suction jig 13) as benchmark, the height of the suction jig 13 when obtaining contact inlet guide 73 upper surfaces (below, claim this highly to be the releasing position).The releasing position of this #1 suction jig 13 is deposited in the internal memory 48.
The releasing position of #2~#30 suction jig 13 is as the corrected altitude of the disappearance of the difference between the deviant of the described deviant that makes #1 suction jig 13 and #2 suction jig 13~#30 suction jig 13.The releasing position of this revised #2~#30 suction jig 13 also deposits in the internal memory 48.
And, with electronic component 3 is actual when being accommodated in the belt, as shown in figure 10, suction jig 13 being dropped to the lower position of predetermined altitude from described releasing position, this suction jig 13 is decontroled electronic component 3.
The height of the suction jig 13 when electronic component 3 is accommodated into braid unit 9 (element release altitude) utilizes Figure 10 to describe, and can be expressed as " releasing position "+" correction of each suction jig 13 "-" correction of #1 suction jig 13 ".In addition, the situation that electronic component 3 is accommodated into discharger 8 is also tried to achieve with braid unit 9 and the releasing position of the #1 suction jig 13 when contacting as the face of benchmark in the same manner, utilizes this releasing position to try to achieve the releasing position of other suction jig 13.
The electronic component of above-mentioned formation is with in the carrying device 1, by the height (altitude datum) of height detection unit 24 detected each suction jig 13, and the value of the tolerance when making, the error that causes by the flatness of turntable 2 etc. for containing suction jig 13.By present embodiment, can allow the altitude datum of the suction jig 13 that contains this error and in the down maneuver of control setup 21 control jacking systems 14, the height (theoretical level) of the suction jig 13 when suction jig 13 is descended is consistent.
Therefore, when driving, when suction jig 13 is dropped to object height, can descend with the state of the described error of substantial eliminating by jacking system 14.That is, the electronic component that present embodiment provides uses height detection unit 24 to detect the altitude datum of each suction jig 13 with carrying device 1, causes slippage by above-mentioned correction by jacking system 14, and each suction jig 13 is implemented substantial height adjustment.In addition, the required time when utilizing height detection unit 24 to detect the altitude datum of each suction jig 13 is compared during operation when utilizing hand power tool to adjust the height of suction jig 13 one by one with the staff, can significantly shorten.
Therefore, present embodiment can provide a kind of with the short time and carry out the electronic component carrying device of the height adjustment of each suction jig 13 accurately.
The control setup 21 of present embodiment, comprise: by intermittently rotating described turntable 2, make each suction jig 13 move to the turntable control part 31 of described height detection unit 24 and the jacking system control part 32 that the suction jig 13 that moves to described height detection unit 24 is risen after descending by described jacking system 14 in turn.
Therefore, the electronic component that the embodiment of the invention provides carrying device 1, because can be to all suction jigs 13, automatically carry out the detection action of altitude datum with height detection unit 24, so, for example each production unit, every certain hour of crossing, or change suction jig 13, rubber suction nozzle 16, and after the height of suction jig 13 has taken place to change, can carry out the height adjustment of suction jig 13 automatically.
Therefore, in the present embodiment, because the loss of suction jig 13 or other elements when causing the altitude datum of suction jig 13 that variation has taken place, can be carried out the height adjustment of suction jig 13 at this variation.Its result can prevent damage, the unusual generation of absorption of electronic component 3 really, so the high electronic component carrying device of reliability when the element conveyance can be provided.
The described height detection unit 24 that present embodiment provides, the sensor that is adsorbed the amount of movement of the detection module 43 that anchor clamps 13 push by detection constitutes.
In addition, the described correction portion 39 of present embodiment comprises: correction calculating part 45 and correction preservation portion 46 and correction execution portion 47; Wherein, described correction calculating part 45, height at the suction jig 13 that is gone out by described sensor is when being scheduled to altitude datum, relatively, calculate each suction jig 13 these differences of height are highly become 0 o'clock necessary deviant (correction) by the height and the described altitude datum of jacking system 14 detected suction jigs 13; Described correction preservation portion 46 deposits described deviant in internal memory 48; Described correction execution portion 47 reads out described deviant from described internal memory 48 when suction jig 13 descends, and according to this deviant each suction jig 13 is revised slippages.
Therefore, electronic component that present embodiment provides is with carrying device 1, when revising the slippage of suction jig 13, can or subtract each other described slippage with the deviant addition that reads out from internal memory 48.So, the electronic component that present embodiment provides is with carrying device 1, owing to revising described slippage at short notice by simple calculating, therefore, turntable 2 need not be stopped or jacking system 14 just can be revised slippage, the conveyance of electronic component 3 can be carried out efficiently.
The electronic component that present embodiment provides carrying device 1, detect #1 suction jig 13 and 8 height when picking up the handing-over of anchor clamps 52 elements, according to the described height of deviant correction of each suction jig 13, the height when trying to achieve the element handing-over at all suction jigs 13.
Therefore, can get rid of tolerance when picking up anchor clamps 52 and making, electronic component handing-over with the error that the flatness of turntable 53 etc. causes, try to achieve in all suction jigs 13 and all and pick up the height that carries out the suction jig 13 of electronic component 3 when joining between the anchor clamps 52.
In addition, in the present embodiment, adjusted by the staff with all height of picking up anchor clamps 52, all suction jigs 13 of actual measurement and all are picked up the situation of the distance between the anchor clamps 52 and are compared, can be with the short time and correctly try to achieve the height in element when handing-over of each suction jig 13.
Therefore, present embodiment can provide a kind of electronic component carrying device that can always correctly carry out electronic component 3 handing-over in the electronic component handing-over with picking up of turntable 53 between the anchor clamps 52.
The electronic component that present embodiment provides carrying device 1, the miles of relative movement of picking up anchor clamps 52 during with the electronic unit 3 of picking up anchor clamps 52 stick electronic components supply units 51 deposits in the internal memory 48, when anchor clamps 52 are picked up in use, move with the miles of relative movement that from described internal memory 48, reads out and to pick up anchor clamps 52.
Therefore, in the present embodiment, can eliminate tolerance when picking up anchor clamps 52 and make, the electronic component handing-over caused deviations of picking up the position of anchor clamps 52 such as flatness with turntable 53, each picks up the electronic component 3 that anchor clamps 52 can not damage no abnormal ground stick electronic components supply unit 51.
In the above-described embodiments, with the altitude datum with touch sensor detection suction jig 13 is that example describes, as test section of the present invention, for example also can adopt and take pictures to suction jig 13 with as the parts of altitude datum simultaneously, and try to achieve the structure of altitude datum with this image with photographic camera.

Claims (5)

1. an electronic component carrying device is characterized in that, comprising:
The turntable of intermittent rotation and
Liftably be supported in the peripheral part of this turntable, the first-class spaced a plurality of electronic components of described turntable circumferencial direction use suction jig and
The pneumatic shuttle of the adsorbed state of the electronic component that switching is caused by described suction jig and the state of relieving and
Contain the described suction jig function of lifting contain simultaneously the jacking system that detects suction jig height function and
Be connected with described jacking system, and control the control setup of described suction jig slippage;
Described control setup comprises: height detection portion and correction portion,
Described height detection portion is arranged near the described turntable, utilizes the other checking system different with described jacking system to detect the altitude datum of each suction jig,
Described correction portion is revised the slippage of each suction jig, so that under suction jig has descended the state of regulation slippage, by the altitude datum of detected each suction jig of described height detection portion and consistent by the height of detected each suction jig of described jacking system under this state.
2. electronic component carrying device according to claim 1 is characterized in that, described control setup also comprises: the intermittence rotation by described turntable make each suction jig move in turn described test section the turntable control part and
The jacking system control part that makes the suction jig that moves to described test section descend and to rise then by described jacking system.
3. electronic component carrying device according to claim 1 is characterized in that, described other checking system is made of sensor, and described sensor is used to detect the amount of movement that is adsorbed the detection module that anchor clamps push;
Described correction portion, constitute by correction calculating part, correction preservation portion and correction execution portion, wherein, described correction calculating part, when the height of the suction jig that is gone out by described sensor is the preset reference height, relatively, calculate the correction that the difference of height of these height is become 0 necessary each suction jig by the height and the described altitude datum of the detected suction jig of jacking system
Described correction preservation portion stores described correction in the internal memory into,
Described correction execution portion reads out described correction, according to the slippage of this each suction jig of correction correction from described internal memory when jacking system moves.
4. electronic component carrying device according to claim 1 is characterized in that, described device also comprises: be arranged near the described turntable peripheral part electronic component handing-over use turntable and
Use the peripheral part of turntable along the circumferential direction uniformly-spaced to arrange in this electronic component handing-over, contain a plurality of anchor clamps of picking up of the adsorption plane relative with described suction jig adsorption plane;
Described control setup comprises: elevation measurement portion and high computational portion,
Described elevation measurement portion, drop to and described when picking up between the anchor clamps zero-lash position at the suction jig that will select in advance as benchmark, all are picked up the elevation measurement action that anchor clamps detect height, wherein, described height is the height by the detected described suction jig of described jacking system
Described high computational portion is that benchmark is revised the height of described suction jig with the described revised slippage of suction jig, calculates at each suction jig and respectively picks up the height of the suction jig when carrying out the electronic component handing-over between the anchor clamps.
5. electronic component carrying device according to claim 4 is characterized in that, the described anchor clamps of picking up, but crank motion be arranged at electronic component handing-over with on the turntable,
Described electronic component carrying device also comprises:
With described to pick up anchor clamps relative, be arranged at described handing-over with near the electronic component supply unit the turntable and
Have make described pick up the function of the described relatively electronic component supply unit of anchor clamps advance and retreat and have detect pick up anchor clamps amount of movement function pick up the anchor clamps actuating device;
Described control setup comprises: moving distance measuring portion, miles of relative movement storage part and driving device controls portion,
Described moving distance measuring portion, between the described electronic component of picking up anchor clamps and electronic component supply unit during no gap, pick up anchor clamps at all, measure by described and pick up the position of picking up anchor clamps that anchor clamps detected with actuating device and pick up miles of relative movement between the anchor clamps initial position
Described miles of relative movement storage part, the miles of relative movement that all that this moving distance measuring portion is measured are picked up anchor clamps deposits internal memory in,
Described driving device controls portion when respectively picking up anchor clamps and adsorb the electronic component of described electronic component supply unit, controls described action of picking up anchor clamps with actuating device, makes to pick up anchor clamps and move with the miles of relative movement that reads out from described internal memory.
CN 200910205984 2009-06-30 2009-11-30 Apparatus for conveying electronic element Active CN101934933B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009154827A JP2011014583A (en) 2009-06-30 2009-06-30 Electronic component transfer device
JP2009-154827 2009-06-30

Publications (2)

Publication Number Publication Date
CN101934933A true CN101934933A (en) 2011-01-05
CN101934933B CN101934933B (en) 2013-05-08

Family

ID=43388548

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200910205984 Active CN101934933B (en) 2009-06-30 2009-11-30 Apparatus for conveying electronic element

Country Status (2)

Country Link
JP (1) JP2011014583A (en)
CN (1) CN101934933B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106697908A (en) * 2017-03-01 2017-05-24 广州明森科技股份有限公司 Intelligent card transferring device
TWI619951B (en) * 2015-02-25 2018-04-01 Seiko Epson Corp Electronic component transfer device and electronic component inspection device
CN118529490A (en) * 2024-07-26 2024-08-23 厦门普诚半导体科技有限公司 Go up unloading check out test set

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013084297A1 (en) * 2011-12-06 2013-06-13 上野精機株式会社 Post-operation processing device, transportation device for externally placed unit, and electronic component transportation device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002284341A (en) * 2001-03-23 2002-10-03 Tokyo Weld Co Ltd Turntable control system and control method for turntable control system
JP3846262B2 (en) * 2001-10-29 2006-11-15 松下電器産業株式会社 Method for detecting nozzle suction height in electronic component mounting apparatus
JP3771909B2 (en) * 2002-02-21 2006-05-10 ペンタックス株式会社 Retractable zoom lens barrel and method for retracting zoom lens barrel
JP2004281958A (en) * 2003-03-19 2004-10-07 Juki Corp Component mounting method and device
CN1592574B (en) * 2003-09-01 2010-06-09 重机公司 Adsorption position corrector of electronic device in electronic device mounting machine
TW200628029A (en) * 2004-12-06 2006-08-01 Matsushita Electric Ind Co Ltd Component mounting apparatus and component mounting method
JP4798757B2 (en) * 2005-07-14 2011-10-19 上野精機株式会社 Semiconductor device taping apparatus and method
JP4057643B2 (en) * 2005-08-04 2008-03-05 上野精機株式会社 Electronic component manufacturing apparatus, control method and control program for electronic component manufacturing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI619951B (en) * 2015-02-25 2018-04-01 Seiko Epson Corp Electronic component transfer device and electronic component inspection device
CN106697908A (en) * 2017-03-01 2017-05-24 广州明森科技股份有限公司 Intelligent card transferring device
CN118529490A (en) * 2024-07-26 2024-08-23 厦门普诚半导体科技有限公司 Go up unloading check out test set

Also Published As

Publication number Publication date
JP2011014583A (en) 2011-01-20
CN101934933B (en) 2013-05-08

Similar Documents

Publication Publication Date Title
CN101794721B (en) Alignment apparatus for semiconductor wafer
CN100461996C (en) Correcting method and apparatus for electronic components mounting apparatus
KR101548557B1 (en) Electronic component mounting apparatus
CN101743480B (en) An improved ball mounting apparatus and method
CN106031327B (en) Element fixing apparatus
CN1882242B (en) Element mounting device
JP6422499B2 (en) Mounting apparatus and measuring method
CN109896283A (en) A kind of glass bracket installation detecting device
CN101934933B (en) Apparatus for conveying electronic element
CN109643684A (en) Tilt plummer system
CN105532083B (en) Element fixing apparatus
CN115810967A (en) Automatic test equipment for serial plugging and unplugging and working method thereof
CN110446424A (en) Multi-functional double-station flexibility Welding head mechanism
JP6372911B2 (en) Electronic component posture correction apparatus and electronic component posture correction method for IC handler
JPH07263517A (en) Positioning apparatus for ic socket
CN108705889A (en) 3C screen machining production lines
CN204855735U (en) Circuit board automated inspection equipment
JP4921346B2 (en) Adsorption position correction method in component mounting apparatus
CN1189070C (en) Device for positioning electronic circuits arranged on foil
CN102651965A (en) Electronic part installation device and installation method thereof
CN108594050A (en) A kind of new and effective golden finger test device
CN108773549A (en) Full-automatic high precision also expects equipment
JP2017073431A (en) Image recognizer
CN106604563B (en) Mechanical corrector and method for chip mounter
CN115648132A (en) High-bearing precision motion platform for flip chip bonding

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant