CN101933403A - Atmospheric pressure plasma creating device - Google Patents
Atmospheric pressure plasma creating device Download PDFInfo
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- CN101933403A CN101933403A CN200880126087XA CN200880126087A CN101933403A CN 101933403 A CN101933403 A CN 101933403A CN 200880126087X A CN200880126087X A CN 200880126087XA CN 200880126087 A CN200880126087 A CN 200880126087A CN 101933403 A CN101933403 A CN 101933403A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
Abstract
An atmospheric pressure plasma creating device includes a discharge electrode (1), an earth-electrode (2), an ignition electrode and a gas infusing part. The discharge electrode (1) and the ignition electrode are coupled to an electrical source part, and the earth-electrode (2) is connected to an earth wire. The discharge electrode (1) has a side face of which side area is not the biggest, and the side face is faced to the earth-electrode (2). A disposed substance is provided between the earth-electrode (2) and the side face of which side area is not the biggest of the discharge electrode (1).
Description
A kind of atmospheric pressure plasma creating device technical field present invention be mainly used on plasma field, specifically a kind of atmospheric plasma device various materials surface dryness clean, surfaction.Background technology
General surface dryness is cleaned with surfaction field, is divided into chemical method and physical method.It is most of to be cleaned and surfaction by the method progress surface of chemistry, it can be produced with virose accessory substance after operation, easily cause environmental pollution, therefore the general physical method cleaned using dryness with surfaction.Cleaned and surfaction mode using the physics dryness of plasma, can substantially be divided into the atmospheric plasma engineering of operation under the plasma engineering and atmospheric pressure state of operation under vacuum state.Clean and surfaction on the surface of operation under vacuum state, more preferable treatment effect is had although being compared with atmospheric plasma, but need to be equipped with vacuum equipment, cost is higher, and there is the exchange sex chromosome mosaicism of other various equipment including vacuum environment, so it is difficult to original streamline directly use vacuum state under plasma apparatus, have certain limitation.
The application of atmospheric plasma includes clean surface dryness, surfaction, surface etching, surface coating, gas decomposition, gas synthesis etc., is just applying in various industrialization.Plasma dissolves different characteristics of plasma with different types of supply energy source and the quantity of energy for conveying to plasma, change, and most of atmospheric plasma is present in glow discharge（Glow Discharge) and arc discharge（Arc Discharge) between.The stimulating frequency used according to atmospheric plasma in order to generate plasma, can be categorized as using direct current（DC) and low electric wave atmospheric plasma（Low Frequency Discharge), radio frequency side electricity（RF Discharge), microwave discharge (Microwave Discharge).
It is divided into the arc plasma gun of continuous mode (Continuous Mode) and pulse mode (Pulse Mode) using continuous mode using the atmospheric plasma of dc source（Torch) middle part temperature is very high, can apply and brave connect, cuts need heat（Cutting), in the application field such as spraying.Have crown electric discharge using the discharge mode of dc source pulse mode, because crown discharge plasma volume very
It is small, it is possible to which that the area of processing is considerably less, and generation is called ribbon between electrode（Streamer arc microwave), can cause and handle uneven result.Make the electrode surface that is distributed in of these streamer out-of-order, the technology for how allowing it to carry out uniform treatment, i.e. dielectric substance barrier discharge（Dielectric Barrier Discharge, DBD) device.Insulator is equipped with dielectric substance barrier discharge device electrode, for stable generation plasma, generally the control of the distance between electrode within several centimeters.The atmospheric plasma electric discharge device of RF power supplys is using the electric field produced by RF coil circuits and the induced discharge in magnetic field in the prior art（Inductive Discharge) form inductive spray gun（ICP Torch) and two concentric electrodes and the atmospheric plasma stream that constitutes（Atmospheric Pressure Plasma Jet, APPJ) etc..ICP spray guns can apply power drive scope be 20KW between 1000KW, and can also apply in the field such as spectrum analysis or toxic offal treatment.The atmospheric plasma device of applied microwave has Microwave Induced Plasma（MIP :Microwave Induced Plasma), the plasma creating device of major applications microwave is made up of microwave power supply supply, magnet, circulator (circulator), fluctuation guiding, coordination system, ignition system, gas injection unit.
With the difference of electron temperature and density, also gas temperature, the characteristics of plasma and supply energy source and gas flow condition that atmospheric plasma device is produced produce different qualities.Such as macromolecule surface processing needs 500K (Kelvins）Following low temperature, brave connect of metal needs more than 1500K high temperature.
In order to which atmospheric plasma is applied in terms of surface treatment, various gas treatments, spectroscopy, the atmospheric plasma device that selection is best suitable for application target is very important.The striation in discharge (Discharge Gap) of most of atmospheric plasma device is generally controlled within several millimeters in the prior art, and is designed to that the structure of planar materials processing can be carried out, so not only needing to improve striation in discharge（Expand）Structure and also need to produce applying on the treated object of variform for convenience, can be necessary with the atmospheric pressure plasma creating device of convenient change electrode structure shape.
Atmospheric pressure plasma creating device of the prior art is by gas nozzle（Gas can be made to keep certain orientation）, ignitor, sparking electrode, power unit constitute.When using linear sparking electrode on atmospheric pressure plasma creating device according to present invention, because prolonged operation, surrounding enviroment, operational error etc. generate locality plasma, heat can be produced on location, causes the electric discharge at this position
The problems such as electrode attenuates or is often blown.The sparking electrode fixed by some tension（RF electrodes）During the heat fusing being generated, the both threads of the linear RF electrodes disconnected are by the works for touching RF electrode perimeters, it is allowed to produce surge, great hidden danger is there is in security, and during using linear sparking electrode, although the treated object in plane can be handled easily, if necessary to processing stereochemical structure and the treated object with camber, it is necessary to using multiple plasma headend equipments or need to have more complicated structure design.Striation in discharge is flowed into by electrode with certain orientation by the gas of nozzle, is needed to generate plasma on the direction substantially vertical with electrode length direction, more gas is conveyed toward treated object moving direction.
Such as scheme la to show in the prior art using linear sparking electrode, the length of sparking electrode is 300 mm atmospheric pressure plasma creating device structural representation, is made up of plasma fore-end and power unit.Plasma fore-end is made up of gas injection part 4 and ignitor 3, sparking electrode 1, and gas injection part 4 includes gas nozzle 5.Low-frequency power or RF power supplys that power supply can repeatedly be flowed with usage cycles etc., but be made up of using power unit during RF power supplys RF makers 8 and RF coalignments 7 (RF Matching).In order to generate atmospheric plasma, gas is injected by gas injection part 4, the gas of injection is by forming the gas nozzle 5 of certain gradient, form certain direction to be flowed into striation in discharge by sparking electrode 1, described striation in discharge refers between sparking electrode 1 and grounding electrode 2 herein.The voltage that the periodicity of power supply unit can flow repeatedly is added between sparking electrode 1 and grounding electrode 2, the sparking electrode 1 is maintained a certain distance with the part of gas nozzle 5.According to power supply unit voltage, the plasma for starting generation on ignitor 3 follows linear sparking electrode to spread.With directive gas, promote the plasma generated since ignitor 3 successfully as sparking electrode 1 is moved, and reach the effect of cooling electrode.Figure lb is the sectional view of figure la plasma creating devices forward end gas flowing.The gas g injected part 4 is injected to gas on this device by forming (the inclination in yz planes of nozzle 5 of certain gradient）It is flowed into by sparking electrode 1 in striation in discharge, the gas g of injection is internally formed certain gradient in nozzle 5 and flowed along toward linear sparking electrode direction, treated object 9 is placed on grounding electrode 2, moved between grounding electrode 2 and sparking electrode 1, and along X-direction.Among the process that gas flows, due to the reflection with the generation such as ambient air and with treated object 9
The reflection that surface is produced, in the composition of linear sparking electrode length direction（Y-axis direction）On can increase vertical component, that is, along the moving direction of treated object 9（X-direction）Point air-flow.Component of the additional gas on the moving direction of treated object 9, the effect that the plasma area that the surface of treated object 9 is touched can be broadened just are generated like this.But in order to ensure plasma as electrode smoothly spreads, so length direction of the gas in linear sparking electrode（Y-axis direction）Mobility is more big more helpful.Generally speaking, it is flowed into linear electrode length direction on atmospheric pressure plasma creating device in order to obtain the plasma that circular form is stable（Y-axis direction）Gas amount of flow vertical direction less or on linear electrode（X-direction）Gas flowing it is bigger, gas required per hour will be more.
Chinese patent Authorization Notice No. is CN1190544C, entitled《A kind of atmospheric low-temperature plasma processing unit for fiber surface modification》Disclose a kind of plasma processing apparatus being made up of plate sparking electrode 1, it uses plane discharge electrode 1, arc light and spark discharge puncturing to material strips can be avoided and damaged, but the sparking electrode 1 as a result of planar design so, it is in parallel relation with treated object 9, the problem of causing to handle uneven if handling the treated object 9 of surface irregularity, and the design of sparking electrode is complicated, it is necessary to which inputting very high voltage is used to generate plasma.
Chinese patent Authorization Notice No. CN2330496Y, it is entitled《Plastic film plasma surface modification equipment》Disclose a kind of sparking electrode 1 in arc surfaced, the arc surfaced sparking electrode 1 can be handled the soft body of treated object 9, and shortcoming is that the arc surfaced sparking electrode 1 face corresponding with earthing pole is cambered surface, cause machining area big, electric discharge is not enough concentrated, and wastes the energy, and it is possible uneven to discharge.
It is herein incorporated with incorporation way.The content of the invention
Another object of the present invention is to provide a kind of atmospheric pressure plasma creating device, sparking electrode 1 to solve to occur in the generation of existing atmospheric plasma be easily blown with supply voltage it is too high the problem of, and further can be uniformly distributed plasma by using gas guide groove 10.
To achieve these goals, the embodiment of the present invention provides a kind of atmospheric pressure plasma creating device, including power supply unit, it is characterised in that the atmospheric pressure plasma creating device also includes sparking electrode, grounding electrode, ignitor and gas injection unit；
The sparking electrode and ignitor are coupled to the power supply unit, the grounding electrode is connected with ground wire, the non-maximum side of area of the sparking electrode side is towards the grounding electrode, and treated object is placed between the grounding electrode and the non-maximum side of the sparking electrode area.
According to an a kind of further aspect of atmospheric pressure plasma creating device of the present invention, the sparking electrode is flat plate shape.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the sparking electrode is plate shape cuboid.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the non-maximum side of area of the sparking electrode side refers to the minimum side of the plate shape cuboid lateralarea or the small side of area time.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the grounding electrode horizontal positioned.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the sparking electrode refers to that the sparking electrode is vertical with the grounding electrode towards the grounding electrode.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the plate shape sparking electrode and grounding electrode change along the surface curvature positioned at treated object between the two.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the non-maximum side of area of the sparking electrode is curved surface.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the gas injection unit includes a plurality of nozzles, and the nozzle is arranged along the sparking electrode, and conveys gas to the treated object with default angle.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the sparking electrode is arranged at outside nozzle air taking port.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, a part for the sparking electrode is arranged in nozzle air taking port.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, also include gas guide groove, it is socketed on the gas injection unit and sparking electrode, the top of the gas guide groove is connected with the gas injection unit, the gas guide groove has a gap towards the side of the grounding electrode and the treated object, so that gas can be discharged from the gap.
Having according to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, inside the gas guide groove prevents the structure of stream swirl.
According to a kind of another further aspect of atmospheric pressure plasma creating device of the present invention, the structure for preventing stream swirl includes, and the diameter of the gas guide groove towards the side opening of grounding electrode one is less than or equal to two wall spacing of the gas guide groove.
The beneficial effect of the embodiment of the present invention is, original linear sparking electrode is modified to flat plate shape sparking electrode, strengthen the durability of electrode, it is effective to have distributed the heat occurred from electrode, reduce input voltage, simpler generation plasma, and this method can be easy to change over flat plate shape various shapes electrode, can very easily apply on the treated object of various shapes.And it is mounted with to control the gas of various gas directions to be oriented on plasma creating device, can very stable generation plasma, the various gas injection rates needed during generation plasma can also be reduced, and can be the plasma being locally generated in shaped form sparking electrode, as sparking electrode is swimmingly diffused away.Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, does not constitute limitation of the invention.In the accompanying drawings：
Figure la is to use linear sparking electrode in the prior art, and electrode length is 300 mm atmospheric pressure plasma creating device structural representation；
Figure lb is the sectional view of figure la plasma creating devices forward end gas flowing；
Fig. 2 a are the plate shape electric discharge electricity for the atmospheric pressure plasma creating device that effective width of the present invention is 300 mm
The partial schematic diagram of pole 1；
Fig. 2 b are the plasma front elevational sectional views of gas flowing of the present invention；
Fig. 2 c are the stereograms of front end sparking electrode 1 of atmospheric pressure plasma creating device of the present invention；Fig. 3 is that the atmospheric pressure plasma creating device sparking electrode 1 that effective width of the present invention is 300 mm uses the sectional view of curved surface with 2-side of grounding electrode；
Fig. 4 a are that the atmospheric pressure plasma creating device that effective width of the present invention is 300 mm uses the schematic diagram of L shaped plate shape sparking electrode 1；
Fig. 4 b are the plasma front elevational sectional views of gas flowing of the present invention；
Fig. 4 c are the atmospheric pressure plasma creating device schematic diagrames of making based on Fig. 4 a；Fig. 5 is that the atmospheric pressure plasma creating device schematic diagram that gas is oriented to is mounted with Fig. 4 a of the present invention；Fig. 6 a_6c are the embodiment schematic cross-sections of gas guide groove 10 of the present invention；
Schematic diagram when Fig. 7 is the atmospheric pressure plasma creating device work with Fig. 5.Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, with reference to embodiment and accompanying drawing, the present invention is described in further details.Here, the exemplary embodiment of the present invention and its illustrate to be used to explain the present invention, it is but not as a limitation of the invention.
The present invention uses the flat plate shape sparking electrode 1 vertical with grounding electrode to solve these problems, compared with linear sparking electrode and improve the durability of sparking electrode 1, it is effective to distribute the heat that electrode is distributed when plasma is generated, it ensure that the security of plasma, and the plate shape sparking electrode 1 vertical by changing and the shape of the respective end of grounding electrode 2, can easily be applied to the treated object 9 of processing variform.The gas guide groove 10 of various gas directions can be controlled by being installed on plasma creating device, it is allowed to the generation plasma more stablized, and the gas injection rate needed during plasma generation can be reduced, and for the generation plasma that shaped form electrode can only be local, be allowed to change over the plasma creating device that can fully spread with sparking electrode 1.
Fig. 2 a to Fig. 2 c are the structural representation for the linear form of sparking electrode 1 being replaced on existing atmospheric plasma device basic the plate shape form vertical with grounding electrode 2 respectively.At this moment the plate shape sparking electrode 1 used is to be formed with thickness for 0. 1 millimeters of metal material, and wherein plate shape sparking electrode 1 is in flat rectangular-shape（Can also be flat other shapes）Bottom refers to that rectangular bulk area is minimum or secondary small face, the thickness of bottom is 0. 1 millimeters in this example, grounding electrode 2 is in yz planes, the sparking electrode 1 is perpendicular to the place plane of grounding electrode 2, the bottom of plate shape sparking electrode 1 is towards the side of grounding electrode 2, that is, real discharge portion.The integrative installation technology ignitor 3 on above-mentioned plate shape sparking electrode 1.To the gas injection injection of part 4 gas on atmospheric pressure plasma creating device, the voltage inputted according to power supply unit starts to generate plasma on ignitor 3, and plasma is with electrode diffusion.At this moment the plasma generated is in the bottom of plate shape sparking electrode 1（That is plate shape sparking electrode 1 is towards the side of grounding electrode 2）Generated in striation in discharge between grounding electrode 2, treated object 9 is (not shown）Between sparking electrode 1 and grounding electrode 2.The benefit of this electrode structure is, in that context it may be convenient to which 3-body of ignitor is installed on sparking electrode 1 or can also more conveniently fixed sparking electrode 1.And sparking electrode 1 side corresponding with grounding electrode 2 can be changed according to the surface configuration of treated object 9 and be in line or the shape such as curve（As shown in Figure 3）.The plasma generated using plate shape sparking electrode 1 is maintained between grounding electrode 2 and sparking electrode 1, the length direction with the part diffusion of plasma at the bottom connection of sparking electrode 1 to sparking electrode 1.Using this plate shape sparking electrode 1, the part being in contact with plasma is the side relative with grounding electrode 2 of sparking electrode 1, will not expose remaining part of sparking electrode 1（That is opposite side of the plate shape sparking electrode 1 relative to the bottom）, so compared with linear sparking electrode, can be with significantly more efficient cooling sparking electrode 1 using the gas g of lasting injection.Linear sparking electrode can be easy to be blown by amount of localized heat is too high, and use plate shape sparking electrode 1, will not be easily blown because of amount of localized heat because the entire area of sparking electrode 1 is relatively large.Therefore compared with linear sparking electrode, there is superior durability among lasting plasma creation process using the atmospheric plasma device of plate shape sparking electrode 1, can effectively extend maintenance period.On the other hand, because sparking electrode 1 and the corresponding side of grounding electrode 2 are real discharge portion, thus with parallel to grounding electrode 2
Plate shaped sparking electrode 1 compare, with very high voltage need not can just producing plasma, and sparking electrode design is simple, the advantage that discharge effect is good.
Plate shape sparking electrode 1 can be manufactured with conductive various materials, and the thickness of electrode can be changed as needed from some tens of pm in the range of several centimeters.As shown in Figure 2 c, and nozzle 5 is maintained a certain distance, and is vertically disposed in the surface of grounding electrode 2 in yz planes for the position of sparking electrode 1, or maintains certain angle is inclined to place with the surface of grounding electrode 2.As shown in Figure 2 a, a part for sparking electrode 1 is inserted into inside gas nozzle 5, although the sparking electrode 1 outside gas nozzle 5 needs to be fixed on the outside that gas injects part 4, but the sparking electrode 1 inside nozzle 5 is inserted into the inside of nozzle 5, the design atmospheric plasma device being so more prone to.When generating plasma, physical reflection can be produced between electronics, ion, the particle of spike and sparking electrode 1, in order to prevent the electrode material therefore brought from sputtering（Sputtering) phenomenon, can use the material for being not easy sputtering, or plated film can be carried out on the surface of sparking electrode 1 or surfaction is carried out.For example, when guiding discharge electrode 1 being become into pollution sources in itself because of the particle that sparking electrode 1 is produced, particularly applying is needing in the semiconductor applications of high cleanliness, the sputtering of of sparking electrode 1 itself may become problem points, so electrode material to be not easy to the material of sputtering instead.
When the surface that Fig. 3 show treated object 9 is curved surface, using the schematic cross-section of the atmospheric plasma device of plate shape sparking electrode 1.With reference to coordinate system in figure, X-direction is the moving direction of treated object 9, and the surface configuration of treated object 9 is irregular curved surface, and certain spacing is left between sparking electrode 1 and treated object 9.Plasma as shown in Figure 3 can be generated using sparking electrode 1 described above, the plasma uniformly spreads and maintained with the surface configuration of treated object 9.On atmospheric pressure plasma creating device, gas nozzle 5 is designed to y-axis direction and maintains certain even angle to arrange, gas keeps certain inflow angle when being flowed into grounding electrode 2.But the angle of gas injection can not be 0 degree, i.e. can not be parallel with y-axis, because when being flowed into the gas injector angle of grounding electrode 2 close to 0 degree, it is impossible to sufficiently spread plasma, concentration is gathered in some ad-hoc location and is easy to damage sparking electrode 1 by plasma.When the shaping surface of treated object 9 is rounder and more smooth, the diffusion of plasma can be easy to.
As shown in fig. 4 a, when the unexpected generation of the surface slope of treated object 9 drastically changes, the plasma on turning change periphery is difficult with electrode diffusion.The gas injector angle for preferably reaching the surface of treated object 9 is all similar on all positions, and result of which is conducive to the uniformity and security of plasma.Although processing shaped form treated object 9 can be removed using the atmospheric plasma front end of 2 linear sparking electrodes, but need to manufacture 2 plasma front ends, and two plasma front ends are difficult to match with the joining relation of RF power supplys, and the uneven phenomenon of processing occurs in treated object 9 on the line of demarcation of 2 plasma front ends.When using plasma front end, and the surface of treated object 9 is when being in big bending curvature, gas injector angle be difficult be designed to it is same or like with other positions injector angle.For example, it is that the atmospheric pressure plasma creating device that effective width of the present invention is 300 mm uses the schematic diagram of L shaped plate shape sparking electrode 1 as shown in fig. 4 a, the bottom of plate shape sparking electrode 1 is using the radian identical curved surface with treated object 9, and gas injects part 4 as plate shape sparking electrode 1 is distributed.In view of the direction of nozzle 5, change gas in order in the part of bending and flow into angle, the environment similar with straight panel electrode case is produced as possible.Gas from the outflow of nozzle 5 is in the knee of sparking electrode 1, the component on the surface of vertical injection grounding electrode 2 can be produced, in this case the diffusion that plasma can not be actively, the plasma of generation can only localized clusters get up, plasma can not be spread on rare occasion as illustrated in fig. 4 c, and meeting locality gathers together, it can generally start to produce heat in the place of plasma focus, can so cause the damage of sparking electrode 1.If it is desired to allow local plasma as gas flow direction actively spreads, it is necessary at plasma focus, placement can allow the gas guide groove that length direction of the plasma along sparking electrode 1 is moved.Fig. 4 b show that grounding electrode 2 and sparking electrode 1 are all with treated object deformation, but the distance between sparking electrode 1 and treated object keep constant, with Fig. 2 c-sample in terms of sectional view when treated object 9 is L-shaped.
In the present invention in preferred embodiment, the gas injection side of part 4 for being illustrated in figure 5 Fig. 4 a structures is mounted with the structural representation of gas guide groove 10, and the gas guide groove 10 guides diffusion into the surface flowing of the gas on the surface of treated object 9 along treated object 9.Generally speaking, the plasma that will be locally generated in Fig. 4 c, can well spread in the presence of the gas guide groove 10 preferably installed on the length direction of sparking electrode 1.
As shown in fig. 7, plasma is not assembled in specific place's locality, opposite plasma is by active diffusion.In order to the gas guide groove 10 for controlling gas direction and setting can be made into it is variously-shaped, but above all to control the gas flowed out from nozzle 5 successfully can be flowed along grounding electrode and treated object, and gas guide groove 10 can not be designed to cause to the structure of air whirl, the structure of gas guide groove 10 as shown in Fig. 6 a- Fig. 6 c is to prevent the structural representation of the air whirl in gas guide groove 10, having in the prior art much can be with the method and structure of mode air whirl, these examples are only enumerated in the present invention, other gas guide groove structures are similarly included in technical scheme.Because plasma often spreads with the flow path of gas, in order to maintain stability, spread also for plasma can be made with sparking electrode 1, need to design the guide groove structure for controlling gas flow paths, the gas for so flowing out nozzle 5 by the design of gas guide groove 10 is uniformly injected on the surface of treated object 9.As Fig. 6 a- Fig. 6 c show the embodiment schematic cross-section of gas guide groove 10 of the present invention, in order to which the gas between nozzle 5 and gas guide groove 10 does not produce vortex, nozzle 5 that 3 kinds of modes design and the structure of gas guide groove 10 is employed to reduce air whirl phenomenon, here preferred embodiment is only used as, in the prior art on reducing the design that the technical scheme of stream swirl is all applied to the gas guide groove of the present invention.If using gas guide groove 10, curved treated object 9 can also be handled with a plasma front end, curved treated object 9 can not only be handled with simple structure, and can also simply be matched with RF power supplys.
When widening the effective width of atmospheric pressure plasma creating device（Widen along Fig. 2 b y-axis direction）, it is identical with the above, if equipped with gas guide groove 10, gas injection rate can be not only reduced, metastable plasma can also be generated.The length of sparking electrode 1 is longer, and being flowed by gas is influenceed, and the sparking electrode 1 of gas contact easily produces resonance.The vibrations of this electrode not only result in plasma front end and the connection of RF power supplys produces change, and can cause to produce unstable plasma, and also produce noise.Particularly if using linear sparking electrode, can operationally produce the vibrations of sparking electrode 1.If it is intended to the vibrations of control sparking electrode 1, so need to reduce gas injection rate or the measure such as fix with physics mode, but if the unstable of plasma can be caused by reducing gas injection rate, so more practical with the method for physics mode fixed electrode.During using linear sparking electrode, linear put comparatively is fixed
The two ends of electrode facilitate the most, if sparking electrode 1 is fixed the opposite method using the fixed middle part of sparking electrode 1, the electrode middle part temperature then arrived in the medium contacted with ions of plasma creation process is higher, this part flows unimpeded structure with greater need for gas, so not too much preferable with physics mode fixed electrode central part.The fixing means for being directed to the plate shape sparking electrode 1 of the present invention is to be inserted into the fixed method in the inside of nozzle 5 with plate shape sparking electrode 1（As shown in Figure 2 a）.During using plate shape sparking electrode 1, because the position contacted with plasma is the bottom of sparking electrode 1（That is plate shape sparking electrode 1 is in rectangular-shape, and bottom refers to that rectangular bulk area is minimum or secondary small face）, so the electrode of insertion will be cooled down quickly by the gases affect flowed, therefore in the inside fixed electrode of nozzle 5, it is possible to the vibrations of effective coordination electrode.The flowing of control gas is very important among the electrode design for the atmospheric plasma device for expanding width.Due to the annexation between plasma front end and RF power supplys, become complicated with the increase of plasma front end quantity, whole atmospheric plasma apparatus structure is caused to become extremely complex, so the effective width for going to expand atmospheric pressure plasma creating device using minimum plasma front end is very important.
The beneficial effects of the present invention are using the atmospheric pressure plasma creating device of the atmospheric pressure plasma creating device of plate shape sparking electrode 1 linear sparking electrode compared with, more enhance durability, effectively distribute the heat that electrode occurs.Can be electrode fabrication into variform using the atmospheric pressure plasma creating device of plate shape sparking electrode 1, therefore the processing of variform treated object 9 can be carried out using this facility, and ignitor 3 and sparking electrode 1 are fabricated to integration, it is possible to constitute simpler atmospheric plasma device.On the atmospheric plasma device of plate shape sparking electrode 1, if the gas guide groove 10 of gas flow direction can be controlled by installing, the gas direction vertically moved on the surface of treated object 9 can be guided into and be flowed with the length direction of electrode.When generating plasma under the conditions of Same Efficieney, it is possible to use a small amount of gas generates plasma.
Above-described embodiment; the purpose of the present invention, technical scheme and beneficial effect are further described; it should be understood that; it the foregoing is only the embodiment of the present invention; the protection domain being not intended to limit the present invention; within the spirit and principles of the invention, any modification, equivalent substitution and improvements done etc., should be included in the scope of the protection.
Claims (14)
- Claims1. a kind of atmospheric pressure plasma creating device, including power supply unit, it is characterised in that the atmospheric pressure plasma creating device also includes sparking electrode, grounding electrode, ignitor and gas injection unit；The sparking electrode and ignitor are coupled to the power supply unit, the grounding electrode is connected with ground wire, the non-maximum side of area of the sparking electrode side is towards the grounding electrode, and treated object is placed between the grounding electrode and the non-maximum side of the sparking electrode area.2. a kind of atmospheric pressure plasma creating device according to claim 1, it is characterised in that the sparking electrode is flat plate shape.3. a kind of atmospheric pressure plasma creating device according to claim 2, it is characterised in that the sparking electrode is plate shape cuboid.4. a kind of atmospheric pressure plasma creating device according to claim 3, it is characterised in that the non-maximum side of area of the sparking electrode side refers to the minimum side of the plate shape cuboid lateralarea or the small side of area time.5. a kind of atmospheric pressure plasma creating device according to claim 1, it is characterised in that the grounding electrode horizontal positioned.6. a kind of atmospheric pressure plasma creating device according to claim 1 or 5, it is characterised in that the sparking electrode refers to that the sparking electrode is vertical with the grounding electrode towards the grounding electrode.7. a kind of atmospheric pressure plasma creating device according to claim 2, it is characterised in that the plate shape sparking electrode and grounding electrode change along the surface curvature positioned at treated object between the two.8. a kind of atmospheric pressure plasma creating device according to claim 4 or 7, it is characterised in that the non-maximum side of area of the sparking electrode is curved surface.9. a kind of atmospheric pressure plasma creating device according to claim 2 or 7, it is characterised in that the gas injection unit includes a plurality of nozzles, the nozzle is arranged along the sparking electrode, and conveys gas to the treated object with default angle.10. a kind of atmospheric pressure plasma creating device according to claim 9, it is characterised in that described Sparking electrode is arranged at outside nozzle air taking port.11. a kind of atmospheric pressure plasma creating device according to claim 9 a, it is characterised in that part for the sparking electrode is arranged in nozzle air taking port.12. a kind of atmospheric pressure plasma creating device according to claim 9, characterized by further comprising gas guide groove, it is socketed on the gas injection unit and sparking electrode, the top of the gas guide groove is connected with the gas injection unit, the gas guide groove has a gap towards the side of the grounding electrode and the treated object, so that gas can be discharged from the gap.13. a kind of atmospheric pressure plasma creating device according to claim 12, it is characterised in that having inside the gas guide groove prevents the structure of stream swirl.14. a kind of atmospheric pressure plasma creating device according to claim 13, it is characterized in that the structure for preventing stream swirl includes, the diameter of the gas guide groove towards the side opening of grounding electrode one is less than or equal to two wall spacing of the gas guide groove.
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| PCT/CN2008/070283 WO2009100616A1 (en) | 2008-02-04 | 2008-02-04 | Atmospheric pressure plasma creating device |
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| CN2330496Y (en) * | 1998-07-27 | 1999-07-28 | 北京理工大学 | Plastic film plasma surface modification equipment |
| CN1190544C (en) * | 2002-12-12 | 2005-02-23 | 东华大学 | Normal-pressure low-temperature plasma treater for modifying fiber surface |
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