KR101004299B1 - Atmospheric pressure plasma generating device and atmospheric pressure plasma device for treating the surface having the same - Google Patents

Abstract

The present invention provides an atmospheric pressure plasma generator having a structure capable of further improving the cleaning efficiency of the surface of the object to be treated and an atmospheric pressure plasma surface treatment apparatus having the same. The atmospheric pressure plasma generator includes an atmospheric pressure plasma generator for converting a reaction gas introduced according to a high frequency electric field between opposite electrodes, the reaction space having a long slit-shaped injection hole formed at one end thereof; A power electrode and a ground electrode spaced apart from each other with the reaction space therebetween; A dielectric covering one surface of the power electrode facing the ground electrode; And a gas supply port forming a flow path for introducing a reaction gas into the reaction space, wherein the surface treatment apparatus is configured to transfer the atmospheric pressure plasma generator and the object to be treated to the plasma generator. The subject matter consists of a conveying means.

Atmospheric pressure plasma, cleaning, power supply electrode, ground electrode

Description

Atmospheric pressure plasma generating device and atmospheric pressure plasma device for treating the surface having the same}

The present invention relates to an atmospheric pressure plasma generating apparatus and an atmospheric pressure plasma surface treatment apparatus having the same. Specifically, an electrode structure capable of generating a plasma by discharge under atmospheric pressure and spraying it to the outside to perform surface treatment on an object to be processed. It relates to an atmospheric pressure plasma generator and an atmospheric pressure plasma surface treatment apparatus having the same.

Flat Panel Display (FPD), such as LCD (Liquid Crystal Display) and Plasma Display Panel (PDP), is a video interface device that provides information visually through a TV or PC monitor. The board is used as one of the key parts to realize.

As an example, in the process of manufacturing thin film transistor (TFT) LCD displays, the substrates used for the display are subjected to various processes such as chromium coating, black matrix (BM) coating, and ITO coating before cutting and liquid crystal injection. If the foreign matter is attached to the substrate prior to the coating process, a defect may occur. This foreign matter on the glass substrate has a fatal effect on the performance of the TFT LCD display and must be thoroughly removed through pretreatment. An apparatus for removing foreign matter from such a substrate is a substrate cleaning apparatus.

In general, the substrate cleaning apparatus may be classified into a wet treatment apparatus that sprays a cleaning liquid at a suitable pressure on a substrate surface to be treated, and a dry treatment apparatus that generates plasma at atmospheric pressure and uses the substrate to clean the substrate surface. Although it is sometimes necessary to select wet and dry cleaning depending on the treatment target, it is common to pretreat foreign substances on a substrate through wet cleaning and to perform finer surface treatment through dry plasma cleaning.

1 is a schematic view showing an atmospheric pressure plasma cleaning apparatus having a general vertical structure in a plasma cleaning apparatus used in a conventional dry cleaning.

Referring to FIG. 1, the vertical pressure plasma cleaning apparatus of the vertical structure includes a partition dielectric space 105 formed between a first dielectric 101 and a second dielectric 102 which generate plasma by charging and discharging a dielectric. Gas is introduced into the gas, and the first dielectric 101 and the second dielectric 102 are installed in a flat plate shape so as to form a vertically parallel counter type that faces the gas inlet and is perpendicular to the plasma injection direction. In order to apply an AC voltage on the first dielectric 101 and the second dielectric 102, a power electrode 104 is formed on the first dielectric 101 and a ground electrode 103 is formed on the second dielectric 102, respectively. Has a configuration.

According to the prior art, a gas is supplied to maintain a constant density between the first dielectric 101 and the second dielectric 102 and the plasma generated between the first dielectric 101 and the second dielectric 102 is supplied. By spraying downward through the gas outlet 106, the object to be processed 130 being transferred to one side is surface-treated by the transfer device 160 installed below the gas outlet 106.

The prior art has a structure formed in a straight line extended to cover the object to be conveyed by the transfer device, the object to be processed 130 having a flat surface, such as an LCD flat panel or a semiconductor substrate Although it is suitable to process the structure, the plasma gas which substantially performs the surface treatment on the object to be treated is released in a diffusion form to be provided on the surface of the object to be treated, and overall the cleaning quality is poor.

FIG. 2 is a schematic diagram of a remote type atmospheric pressure plasma generator as a plasma cleaning apparatus used in conventional dry cleaning.

In the remote type atmospheric pressure plasma generating device 200 shown in FIG. 2, the first dielectric 210 and the second dielectric 220 are installed in a vertical structure with a predetermined gap to form one large parallel plate. A good conductor is coupled to the first dielectric 210 and the second dielectric 220 to form a power electrode 211 and a ground electrode 221, and a partition dielectric space between the first dielectric 210 and the second dielectric ( A fine gas discharge hole 223 is formed in the entire second electrode 220 and the ground electrode 221 so that the plasma gas ions (cations, electrons, radicals, etc.) generated from the reaction gas introduced into the 230 are injected into the cleaning object. It has an evenly penetrated structure.

Plasma is uniformly formed throughout the partition dielectric space 230 by the power electrode 211 and the ground electrode 221 which are coupled to the entire surface of the first and second dielectrics 210 and 220. Plasma spraying is performed through the gas discharge port 223 through the dielectric 220 and the ground electrode 221, and is transferred to a position adjacent to the second dielectric 220 and the ground electrode 221. The object is cleaned.

The remote type atmospheric pressure plasma generator 200 has the advantage that the plasma gas is dispersed and discharged through the finely formed gas discharge hole 223, thereby enabling more stable plasma treatment over the object to be treated. Since the external injection is mainly performed only in the radical form, not in the ion form, the cleaning efficiency is lower than that of the vertical atmospheric pressure plasma, so there is a problem in treating the target object of the plate type.

The technical problem to be solved by the present invention has a structure that can further improve the injection pressure and speed of the plasma gas discharged through the injection hole, the atmospheric pressure plasma generation that can further improve the cleaning efficiency on the surface of the object to be treated An apparatus and an atmospheric pressure plasma surface treatment apparatus having the same are provided.

Another technical problem to be solved by the present invention is to adjust the angle of the plasma discharge port with respect to the surface of the object to be treated, and thus to adjust the plasma spraying area to be sprayed to the surface of the object, which can be cleaned through the plasma gas The present invention provides an atmospheric pressure plasma generator capable of adjusting a treatment area and an atmospheric pressure plasma surface treatment apparatus having the same.

According to an aspect of the present invention for solving the above technical problem, an atmospheric pressure plasma generator for plasma-forming the reaction gas introduced in accordance with the high-frequency electric field between the opposite electrodes, the long formed slit-shaped injection hole at one end A reaction space formed; A power electrode and a ground electrode spaced apart from each other with the reaction space therebetween; A dielectric covering one surface of the power electrode facing the ground electrode; And a gas supply port forming a flow path for introducing a reaction gas into the reaction space.

Here, the injection hole may be configured to have an inclination inclined with respect to the target surface of the object to be treated. In addition, it is preferable to configure the plasma gas discharged through the injection hole to have a predetermined pressure and speed suitable for surface treatment of the target object by configuring the diameter to be gradually narrowed as the target object is closer to the direction in which the target object exists. .

In addition, a cooling water supply line may be formed on at least one of the power electrode and the ground electrode. In this case, in performing the surface treatment on the object to be treated using the plasma gas generated through the atmospheric pressure plasma generating apparatus, it is possible to reduce the overheating of the device and the surface damage of the object to be treated.

As another aspect to solve the above technical problem, the present invention, an apparatus for performing a surface treatment for the object to be treated using a plasma gas, the atmospheric pressure plasma generating apparatus; And transfer means for transferring the object to be treated so that the surface of the object is exposed to the plasma gas injected through the injection hole of the atmospheric pressure plasma generator.

Here, the atmospheric pressure plasma generating apparatus may further include an angle adjusting device for adjusting the spraying angle of the plasma gas injected to the surface of the object to be processed. In this case, since the plasma spraying area sprayed onto the surface of the object to be treated is controlled by adjusting the inclination angle of the plasma generator with respect to the surface of the object to be treated, surface treatment can be performed more effectively in response to the size of the object to be treated.

In the installation of the atmospheric pressure plasma generator, the two four-pressure plasma generators are installed to be symmetrical with respect to an arbitrary axis orthogonal to the plane perpendicular to the object to be processed moved through the transfer means, but the plasma gas is One end of the injection hole to be injected is disposed toward the arbitrary axis, and configured to have an inclined distance from the end of the injection hole to the other end gradually away from the object to be treated, thereby When the surface to be treated is a three-dimensional shape such as a regular or irregular pattern of irregularities, it is preferable to allow more effective cleaning to be performed.

According to the present invention described above, the air knife-shaped nozzle type has a structure capable of further improving the injection pressure and speed of the plasma gas discharged through the injection hole. That is, in performing the cleaning on the surface of the object to be treated, the cleaning quality of the object to be treated may be further improved due to the plasma gas emission having the improved injection pressure and speed.

In addition, it is possible to adjust the angle of the plasma injection port with respect to the surface of the object to be treated, it is possible to adjust the plasma injection area to be sprayed to the surface of the object to be treated, it is possible to adjust the processing area that can be cleaned through the plasma gas. As a result, it is also possible to create various surface treatment environments suitable for improving the cleaning quality by adjusting the angle of the plasma generator with respect to the object to be treated according to the area of the object to be treated.

In addition, as the air knife has a shape, since the device can be miniaturized as compared with the conventional vertical type or the remote type, there is another effect that there is no space limitation due to the installation in comparison with the conventional type.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 3 is a schematic configuration diagram schematically showing the overall configuration of the atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention.

Referring to FIG. 3, the atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention is an apparatus for performing surface treatment on an object to be treated using a plasma gas, and includes an atmospheric pressure plasma generating apparatus 100 and an atmospheric pressure plasma generation. And transfer means 200 for transferring the object to be treated to the injection region of the plasma gas emitted from the apparatus.

The atmospheric pressure plasma generator 100 converts the reaction gas introduced from the outside according to the high frequency electric field between the opposite electrodes, and the transfer means 200 is the atmospheric pressure plasma at a position spaced apart from the atmospheric pressure plasma generator 100. It has a structure that can be transported to one side while exposing the object 10 to be treated to the plasma gas emitted through the generator 100.

Referring to FIG. 3 again, the atmospheric pressure plasma generator 100 is spaced apart from each other with the reaction space 110 and the reaction space 110 formed at one end of the injection hole 112 having a long slit shape. And a gas supply port 140 that forms a flow path for introducing a reaction gas into the power electrode 120, the ground electrode 130, and the reaction space 110. The nozzle type structure has an air knife shape as a whole. Has

The power electrode 120 is made of a metal having excellent electrical reactivity, and is surrounded by the dielectric 125. The power electrode 120 has a reaction area that is sufficient to generate a plasma by electrically reacting with the ground electrode 130, and an electrical reaction may occur in the reaction space 110 between the ground electrodes 130. In order to be connected to an external high frequency low voltage or low frequency high voltage power supply, the power is supplied.

The dielectric 125 surrounding the power electrode 120 ensures insulation between each electrode to induce a stable electrical reaction between the power electrode and the ground electrode, and the power electrode 120 and the ground electrode made of a metal material. The plasma gas generated by the 130 mainly plays a role of preventing contamination of the substrate to be processed. In the present exemplary embodiment, the dielectric 125 is formed only on the power electrode 120, but in order to induce a more stable electrical reaction, the ground electrode facing the power electrode 120 and the reaction space 110 therebetween ( 130) It is preferable to form a dielectric (not shown) on one surface.

The ground electrode 130 is spaced apart from the power electrode 120 with the reaction space 110 interposed therebetween, and the power electrode 120 is supplied by a low frequency high voltage or high frequency low voltage power supplied to the power electrode 120. React with Therefore, when the reaction gas is introduced into the reaction space 110 through the gas supply port 140, the reaction gas introduced by the electrical reaction between the power electrode 120 and the ground electrode 130 in a plasma state Can be converted.

The gas supply port 140 forms a flow path toward the reaction space 110 so that the reaction gas can be introduced into the reaction space 110 between the power electrode 120 and the ground electrode 130. Reaction gas introduced into the device through the gas supply port 140 passes through the reaction space 110 formed between the dielectric 125 and the ground electrode 130, and the power electrode 120. The plasma is converted into a plasma state by an electrical reaction between the ground electrodes 130 and is processed on the transfer means via a long and slits-type injection hole 112 formed at one open end of the reaction space 110. Sprayed to the surface of the object (10).

The injection hole 112 may include a reaction space 110 between the power electrode 120 and the ground electrode 130 to allow the plasma gas generated by the reaction of the power electrode 120 and the ground electrode 130 to pass therethrough. Communication is formed. As illustrated in FIG. 3, the injection hole 112 is disposed from one end of the injection hole 112 into which the plasma gas is injected to the other end connected to the gas supply port 140. It is preferable to be configured to have an inclination inclination with respect to the processing target surface of the object to be treated, so that the spaced distance from and gradually increases. As such, when the injection hole 112 has an inclination inclined with respect to the object to be treated, the area where the plasma gas injected through the injection hole 112 contacts the surface of the object to be treated 10 is more dispersed. As a result, the plasma treatment area can be further expanded.

Preferably, the atmospheric pressure plasma generating apparatus 100 is controlled by the conveying means 200 through an angle adjusting device (not shown) so as to adjust the spraying angle of the plasma gas sprayed onto the surface of the object 10 to be processed. It is preferable to configure the angle of inclination with respect to the surface of the object 10 to be conveyed freely adjustable. In this case, the plasma spraying area sprayed onto the surface of the object 10 to be processed and the processing area that can be cleaned through the plasma gas may be adjusted by adjusting the angle of the atmospheric pressure plasma generator 100.

FIG. 4 illustrates a modification of the atmospheric pressure plasma generating apparatus, and implements the atmospheric pressure plasma surface treatment apparatus by configuring the injection hole 112 to be gradually narrowed toward the outlet side facing outward.

As shown in the figure, when the injection hole 112 is formed so that its diameter gradually narrows toward the outlet side facing outward, the plasma gas discharged through the injection hole 112 may maintain a predetermined pressure and speed. Therefore, in performing the cleaning on the surface of the object 10 to be treated, the cleaning quality of the object 10 may be further improved due to the plasma gas discharge having the improved injection pressure and speed.

In performing the surface treatment on the object to be treated using the plasma gas generated through the atmospheric pressure plasma generator 100, there is a possibility that the device may be overheated during the electrical reaction between the electrodes, and thus, the injection hole There is a fear that the temperature of the plasma gas injected into the object 10 to be processed through 112 increases the damage of the object to be processed. Therefore, a cooling water supply line 150 is formed on the power electrode 120 or the ground electrode 130 to perform surface treatment on the object to be treated using the plasma gas generated through the atmospheric pressure plasma generator 100. In carrying out, it is preferable to prevent the device overheating and the surface damage of the object 10 to be treated.

The cooling water supply line 150 mainly plays a role of cooling the electrode to a predetermined temperature using cooling water (PCW, Process Collin Water), and the preferred embodiment for this purpose, as shown in FIGS. 120 may be installed so as to penetrate the inside or to be connected to the electrode surface, so that the coolant flowing along the coolant supply line 150 may absorb heat generated from the electrode.

5 is a view showing another embodiment of the atmospheric pressure plasma surface treatment apparatus according to the present invention. In installing the atmospheric pressure plasma generating apparatus 100 as described above, as shown in FIG. 5, through the transfer means 200. One end of which the injection hole is formed while being symmetrical with respect to an arbitrary axis L perpendicularly perpendicular to the processing target surface of the object to be moved 10 has an inclined slope to face the arbitrary axis L. It is preferable to construct. In this case, effective cleaning can be performed even when the surface to be treated is a three-dimensional shape such as a regular or irregular concave-convex pattern through the plasma gas bidirectional spraying on the object to be treated 10 based on the arbitrary axis L. have.

According to the embodiment of the present invention, the plasma generating apparatus for generating a plasma for the surface treatment of the object is made of a nozzle type of the air knife shape as a whole, and the injection pressure of the plasma gas discharged through the injection hole 112 and The speed is significantly higher than in the prior art. Accordingly, in performing the cleaning on the surface of the object to be treated 10, due to the emission of plasma gas having an improved injection pressure and speed, the cleaning quality of the object to be treated may be further improved.

In addition, according to an embodiment of the present invention, as a structure capable of adjusting the angle of the plasma injection hole 112 with respect to the surface of the object to be treated, it is possible to adjust the plasma spraying area to be sprayed to the surface of the object to be treated, the cleaning process through the plasma gas The processing area can be adjusted. As a result, there is an advantage that the surface treatment environment suitable for improving the cleaning quality can be variously formed by adjusting the angle of the plasma generator with respect to the object to be treated according to the area of the object to be treated.

Moreover, as a whole has an air knife shape, since the device can be miniaturized as compared with the conventional vertical type or the remote type, there is an effect of reducing the space constraints due to the installation relative to the conventional structure.

In the above described and described with respect to a specific embodiment with respect to the present invention, the present invention will be variously modified and changed without departing from the spirit or scope of the present invention provided by the claims below. It will be appreciated that one of ordinary skill in the art can readily understand that the present invention can be used.

1 is a schematic configuration diagram of an atmospheric pressure plasma cleaning apparatus of a conventional general vertical structure.

2 is a schematic configuration diagram of a conventional general Remote type atmospheric pressure plasma cleaning device.

Figure 3 is a schematic configuration diagram schematically showing the overall configuration of the atmospheric pressure plasma surface treatment apparatus according to an embodiment of the present invention.

4 is a schematic configuration diagram according to a modification of the atmospheric pressure plasma generator shown in FIG. 3.

Figure 5 is a schematic diagram schematically showing the configuration of an atmospheric pressure plasma surface treatment apparatus according to another embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

10.Object to be processed 100 ... Atmospheric plasma generator

110 Reaction space 112 Injection hole

120 Power electrode 125 Dielectric

130 Grounding electrode 140 Gas supply port

150 ... cooling water supply line 200 ... transfer

Claims (8)

A reaction space formed at one end with a long slit-shaped injection hole, a power electrode and a ground electrode spaced apart from each other with the reaction space interposed therebetween, a dielectric covering one surface of the power electrode facing the ground electrode; In the atmospheric pressure plasma generating apparatus comprising a gas supply port for forming a flow path for introducing a reaction gas into the reaction space, At least one of the power electrode and the ground electrode, the atmospheric pressure plasma generator, characterized in that the cooling water supply line is formed. delete delete delete An apparatus for performing a surface treatment on a target object using a plasma gas, The atmospheric pressure plasma generating device of claim 1, further comprising an angle adjusting device configured to adjust an injection angle of the plasma gas injected onto the surface of the object to be processed; And And transfer means for transferring the object to be treated so that the surface of the object is exposed to the plasma gas injected through the injection hole of the atmospheric pressure plasma generator. delete The method of claim 5, The atmospheric pressure plasma generator, Atmospheric pressure plasma surface treatment apparatus characterized in that it is installed to be symmetrical with respect to any axis perpendicular to the perpendicular to the treatment target surface of the object to be treated. The method of claim 7, wherein The atmospheric pressure plasma generator symmetric with respect to the arbitrary axis, One end of the injection hole in which the plasma gas is injected is disposed toward the arbitrary axis, and the inclined distance from the end of the injection hole toward the other end gradually away from the target object Atmospheric pressure plasma surface treatment apparatus.

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