CN101916706A - Sample platform of scanning electronic microscope and scanning electronic microscope - Google Patents
Sample platform of scanning electronic microscope and scanning electronic microscope Download PDFInfo
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- CN101916706A CN101916706A CN2010102439496A CN201010243949A CN101916706A CN 101916706 A CN101916706 A CN 101916706A CN 2010102439496 A CN2010102439496 A CN 2010102439496A CN 201010243949 A CN201010243949 A CN 201010243949A CN 101916706 A CN101916706 A CN 101916706A
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Abstract
The invention discloses a sample platform of a scanning electronic microscope and the scanning electronic microscope. The sample platform of the scanning electronic microscope comprises an outer barrel and a jack platform, wherein the jack platform is arranged in and connected with the outer barrel and is provided with a jack for a micro-cutter to insert; and the internal diameter of the jack corresponds to the external diameter of a handle part of the micro-cutter. The sample platform of the scanning electronic microscope used in the scanning electronic microscope comprises the outer barrel and the jack platform arranged in the outer barrel, and the outer barrel has a certain height and the jack platform is provided with the jack, so that the micro-cutter can be directly and vertically inserted into the jack to detect the scanning electronic microscope, operation is more convenient, and conditions of the micro-cutter, such as abrasion, cracks and the like can be observed without damaging the micro-cutter. Therefore, the sample platform of the scanning electronic microscope is very suitable for detecting the micro-cutter and has good detection effect.
Description
Technical field
The present invention relates to microbit detection technique field, in particular, relate to a kind of min-cutter with sample platform of scanning electronic microscope and ESEM.
Background technology
ESEM is a kind of electron optics video picture instrument, adopt superfine electron beam to scan at sample surfaces, the reciprocation of high energy electron beam and material, various signals have been produced, these signals, after suitable detector (Detector) reception, amplify through amplifier (Amplifier), deliver to picture tube (Braun Tube) then and go up imaging.Characteristics such as it has that sample preparation is simple, the multiplication factor adjustable extent is wide, the resolution height of image, the depth of field are big.
The sample platform of scanning electronic microscope of existing ESEM all is to be platform or plane usually, and sample to be detected is placed on the sample platform of scanning electronic microscope and observes after the conduction.Sample platform of scanning electronic microscope of the prior art all is to be used for detection of particles shape object usually, and the sample platform of scanning electronic microscope that is applicable to min-cutters such as PCB microbit, mini milling cutter seldom.Because the space of sample platform of scanning electronic microscope is limited, when min-cutter being carried out the ESEM detection, must will waits to observe part and strike the disconnected sample platform of scanning electronic microscope of putting into; And, also need to use the carbon paste band that min-cutter is vertically fixing in order to observe the structure of min-cutter tip, not only fixing operation complexity, and be difficult to guarantee the enough vertical degree of min-cutter.
Summary of the invention
Technical problem to be solved by this invention provides a kind of sample platform of scanning electronic microscope that detects min-cutter and ESEM that has used this sample platform of scanning electronic microscope of being applicable to.
The objective of the invention is to be achieved through the following technical solutions:
A kind of sample platform of scanning electronic microscope wherein, comprises urceolus and is arranged on the jack platform that is connected with urceolus in the urceolus that described jack platform is provided with the jack that is used to insert min-cutter, and the external diameter of the internal diameter of described jack and the shank of min-cutter adapts.
Described jack is the through hole that runs through the jack platform.Such design makes the processing of jack more easy, and the shank of min-cutter can run through whole jack platform, the bottom in the arrival urceolus.Certainly, the jack of jack platform also can be designed to nonpenerative jack.
Regular distribution has the jack that has the different inner diameters size more than two on the described jack platform.Such design can be supported the detection to the min-cutter in different handles footpath, and all right a plurality of min-cutters of one-time detection are particularly useful for contrast and detect.Disposable to wearing and tearing or collapse scarce min-cutter and normal cutter carries out contrast simultaneously and detects, can contrast the performance of sample more easily, so that obtain one group of complete and effective test data.
The internal diameter of the jack on the jack platform is less than the diameter of the collar on the min-cutter shank.The collar that such design makes min-cutter can relatedly be enclosed within on its tool shank together carries out the detection of ESEM.Not only when detecting, need not take off the collar, operate more conveniently, can also regulate the height that min-cutter exposes the jack platform by the position of the collar on the min-cutter handle of a knife; The different collars also can assist the microbit that is used for to different to identify difference.
The inwall of described urceolus is cylindrical, and inwall is provided with screw thread, corresponding, the outer wall of the described jack platform that is connected with urceolus also is provided with the screw thread that matches with urceolus; The circular surface of described jack platform is provided with groove, and described groove is arranged on the place, axle center of urceolus.Such design makes and can use instruments such as being similar to bottle opener, and the jack platform is changeed in the urceolus inward turning, with the height of auxiliary adjustment jack platform in urceolus, makes that detection is more convenient.
Described sample platform of scanning electronic microscope also comprises the saddle of round pie, and described saddle is arranged on the below of jack platform, and the outer wall that saddle is connected with urceolus also is provided with the screw thread that matches with urceolus.Such design, make min-cutter in the jack that is inserted into the jack platform after, the bottom is held by saddle, by the position adjustments of saddle, even min-cutter is not with the collar, also can regulate the height and position of min-cutter.
Be provided with label on each jack side on the described jack platform.It is to be used to identify each jack that label is set, so that min-cutter to be detected is identified difference.Described label can be the laser label of typewriting, or is the label writing paper that is provided with separately etc.
Described sample platform of scanning electronic microscope comprises a urceolus and two or more receptacle size, jack platform all inequality distributes.Each urceolus that is arranged so that like this can be equipped with the different jack platform of a plurality of jack specifications, and difference requires to adapt to, the detection of the min-cutter of different model.When min-cutter is detected, according to the difference of the shank external diameter of min-cutter, and the difference of the distribution of the jack that needs, select corresponding jack platform for use.
The outer wall of described urceolus is cylindrical, and described sample platform of scanning electronic microscope also comprises specimen holder, and specimen holder is provided with the cavity that is used to hold urceolus; Described cavity is cylindrical, adapts with the outer wall of urceolus; Urceolus is dismountable to be fixed in the cavity of specimen holder; The bottom of described cavity is the plane, and it is provided with the through hole that communicates with urceolus corresponding to place, urceolus axle center; The outer wall of described specimen holder is provided with at least one pair of plane parallel to each other.
A kind of ESEM, comprise sample platform of scanning electronic microscope, wherein, described sample platform of scanning electronic microscope comprises urceolus and is arranged on the jack platform that is connected with urceolus in the urceolus, described jack platform is provided with the jack that is used to insert min-cutter, and the external diameter of the internal diameter of described jack and the shank of min-cutter adapts.
The sample platform of scanning electronic microscope that uses in the ESEM described in the present invention includes urceolus and is arranged on the interior jack platform of urceolus, setting owing to jack on urceolus with certain altitude and the jack platform, make min-cutter can directly insert the detection of in jack, carrying out ESEM vertically, not only operate more convenient, but also the situation such as wearing and tearing, chipping that can under the situation of not destroying min-cutter, observe min-cutter, be fit to very much detect min-cutter, it is better to detect effect.
Description of drawings
Fig. 1 is the structural representation of specimen holder in the embodiment of the invention;
Fig. 2 is the schematic top plan view of specimen holder in the embodiment of the invention;
Fig. 3 is the structural representation of urceolus in the embodiment of the invention;
Fig. 4 is the structural representation of jack platform in the embodiment of the invention;
Fig. 5 is the schematic cross-section of jack platform in the embodiment of the invention;
Fig. 6 is the structural representation of saddle in the embodiment of the invention;
Fig. 7 is the schematic cross-section of saddle in the embodiment of the invention.
Wherein: 1, specimen holder; 11, plane; 12, cavity; 13, the bottom of cavity; 14, through hole; 15, screw; 2, urceolus; 21, the outer wall of urceolus; 22, the inwall of urceolus; 23, screw; 3, jack platform; 31, jack; 32, groove; 33, screw thread; 4, saddle; 41, groove; 42, screw thread.
Embodiment
The invention will be further described below in conjunction with accompanying drawing and preferred embodiment.
The structure of the employed sample platform of scanning electronic microscope of ESEM described in the embodiment of the invention is shown in Fig. 1-7, and it comprises urceolus 2 and is arranged on the jack platform 3 that is connected with urceolus in the urceolus 2.Jack platform 3 is provided with the jack 31 that is used to insert min-cutter, and the internal diameter of jack 31 adapts with the external diameter of the shank that is placed on the min-cutter in the jack.The external diameter of the internal diameter of described jack and the shank of min-cutter adapts, be meant that the internal diameter of described jack is a bit larger tham the external diameter of the shank of min-cutter, make min-cutter to insert in jack easily, and the internal diameter of jack is enough to guarantee the vertical degree of the observation needs of min-cutter.
The inwall 22 of urceolus is cylindrical, and inwall is provided with internal thread, corresponding, the outer wall of the jack platform 3 that is connected with urceolus 2 also is provided with the screw thread 33 that matches with urceolus; Such design can make jack platform 3 regulate the height of jack platform 3 in urceolus 2, the detection of convenient various conditions by transferring in urceolus 2 inward turnings.And in order to select the jack platform to carry out condition more easily, also be provided with groove 32 in the bottom surface of jack platform corresponding to the position in the axle center of urceolus and the position of dodging jack, make and to use instruments such as being similar to bottle opener, the jack platform is changeed in the urceolus inward turning, with the height of auxiliary adjustment jack platform in urceolus, make that detection is more convenient.
Wherein, jack on the jack platform can be for running through the through hole of jack platform, also can be nonpenerative jack, jack in the present embodiment is preferably the through hole that runs through the jack platform, and its processing is more easy, and the design of through hole makes the shank of min-cutter can run through whole jack platform, arrive the bottom in the urceolus, with respect to the jack platform that must have enough thickness with the shank height that holds min-cutter, the jack of through hole can reduce the thickness of jack platform, reduces cost.
The internal diameter of the jack 31 on the jack platform is a bit larger tham the external diameter of the shank of detected min-cutter, and less than the diameter of the collar on the min-cutter shank, the collar that makes min-cutter can relatedly be enclosed within on its tool shank together carries out the detection of ESEM.Not only when detecting, need not take off the collar, operate more conveniently, can also regulate the height that min-cutter exposes the jack platform by the position of the collar on the min-cutter handle of a knife; The different collars also can assist the microbit that is used for to different to identify difference.As shown in Figure 4, the socket design on the jack platform is a plurality of, and the internal diameter size of its jack can be different, is distributed in regularly on the jack platform.PCB microbit, mini milling cutter that such design can be put different handles footpath carry out SEM, power spectrum EDS test, the all right a plurality of min-cutters of one-time detection, being particularly useful for contrast detects: disposable min-cutter to wear damage carries out contrast simultaneously with normal cutter and detects, can contrast the performance of sample more easily, so that obtain one group of complete and effective test data.Be provided with the label (not shown) on each jack side on the jack platform.It is to be used to identify each jack that label is set, so that min-cutter to be detected is identified difference.Label can be the laser label of typewriting, or is the label writing paper that is provided with separately etc.
In addition, sample platform of scanning electronic microscope can also comprise the saddle 4 of the round pie of a below that is arranged on jack platform 3.The same with the jack platform, the outer wall that saddle is connected with urceolus also is provided with the screw thread 42 that matches with urceolus, to regulate the height and position of saddle in urceolus; The bottom surface of saddle 4 also is provided with groove 41 corresponding to the position in the axle center of urceolus, makes to use instruments such as being similar to bottle opener, saddle is changeed, with the height of auxiliary adjustment saddle in urceolus in the urceolus inward turning.The design of saddle, make min-cutter in the jack that is inserted into the jack platform after, the bottom is held by saddle, by the position adjustments of saddle, even min-cutter is not with the collar, also can regulate the height and position of min-cutter.When the position of saddle and jack platform is regulated, because groove all is arranged on the bottom, can be as required, the use bottle opener regulates the position of jack platform earlier, regulates the position of saddle again.When carrying out the ESEM detection, can determine whether to select for use saddle as the case may be.
Described sample platform of scanning electronic microscope also comprises specimen holder 1, and specimen holder 1 is provided with the cavity 12 that is used to hold urceolus 2; Described cavity 12 adapts with the outer wall 21 of urceolus, and it is smooth cylindrical that the outer wall 21 of described urceolus is, cavity 12 correspondences also cylindrical, and urceolus 2 is by in the dismountable cavity 12 that is fixed on specimen holder 1 of screw and screw 15,23.The bottom 13 of cavity 12 is the plane, and it is provided with the through hole 14 that communicates with urceolus corresponding to place, urceolus axle center, by through hole 14, can regulate the jack platform of bottommost in the urceolus or the height of saddle; And the outer wall of specimen holder is provided with at least one pair of plane parallel to each other 11, better specimen holder is gripped.
Because ESEM detects need be to the examining object conductive processing, the specimen holder of sample platform of scanning electronic microscope, urceolus, jack platform and saddle all can adopt conductor to make, and in the cavity of min-cutter and specimen holder bottom (not using saddle) or with upper surface (use saddle) the position contacting place of saddle, it is fixing also can to use conducting resinl such as carbon paste band to assist, better be that min-cutter is switched on.
Every suit sample platform of scanning electronic microscope includes a urceolus, but can have a plurality of specifications different, the jack size, jack platform all inequality distributes.Each urceolus is by being equipped with the different jack platform of a plurality of jack specifications, and difference requires to adapt to, the detection of the min-cutter of different model.
Before using above-mentioned sample platform of scanning electronic microscope to carry out the ESEM detection, elder generation is according to the difference of the shank external diameter of min-cutter, and the difference of the distribution of the jack that needs, and selects corresponding jack platform for use; In jack platform precession urceolus, the jack platform is threaded to default position by aids such as bottle openers; Use saddle if desired, after adjusting the jack platform, can in saddle also precession urceolus, saddle be threaded to default position as required at the surface arrangement conducting resinl of saddle by aids such as bottle openers; Urceolus is placed in the cavity of specimen holder again, and fixes; If do not use saddle, can on the bottom surface of cavity, arrange conducting resinl as required; After being fixed to urceolus in the specimen holder, also can be by instruments such as bottle openers, the through hole via on the specimen holder cavity bottom surface is insinuated in the cavity, and externally the jack platform of tube bottom or the position of saddle are adjusted.After saying that specimen holder, urceolus, jack platform and saddle all set, specimen holder can be gripped the predetermined position of ESEM.
When using ESEM to carry out the detection of min-cutter, can directly the min-cutter shank descended, the tip is in the jack of the last jack platform that is placed into sample platform of scanning electronic microscope, and the collar of the shank of min-cutter need not take off, and can detect in the lump.Detect simultaneously if any a plurality of min-cutters, can carry out record to min-cutter with reference to the label of each jack on the collar of min-cutter or the jack platform, to avoid occurring batch mixing.After one or more min-cutters are placed, can carry out the detection processing procedure of ESEM.
Use above-mentioned sample platform of scanning electronic microscope, min-cutter can directly insert the detection of carrying out ESEM in jack vertically, not only operate more convenient, but also the situation such as wearing and tearing, chipping that can under the situation of not destroying min-cutter, observe min-cutter, the detection effect is better, the height of detected sample can also be regulated easily, once many samples can be detected simultaneously, and can batch mixing.
Above content be in conjunction with concrete preferred implementation to further describing that the present invention did, can not assert that concrete enforcement of the present invention is confined to these explanations.For the general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, can also make some simple deduction or replace, all should be considered as belonging to protection scope of the present invention.
Claims (10)
1. a sample platform of scanning electronic microscope is characterized in that, comprises urceolus and is arranged on the jack platform that is connected with urceolus in the urceolus, and described jack platform is provided with the jack that is used to insert min-cutter, and the external diameter of the internal diameter of described jack and the shank of min-cutter adapts.
2. sample platform of scanning electronic microscope as claimed in claim 1 is characterized in that, described jack is the through hole that runs through the jack platform.
3. sample platform of scanning electronic microscope as claimed in claim 1 is characterized in that, regular distribution has the jack that has the different inner diameters size more than two on the described jack platform.
4. as claim 2 or 3 described sample platform of scanning electronic microscope, it is characterized in that the internal diameter of the jack on the jack platform is less than the diameter of the collar on the min-cutter shank.
5. sample platform of scanning electronic microscope as claimed in claim 1 is characterized in that the inwall of described urceolus is provided with screw thread, corresponding, the outer wall of the described jack platform that is connected with urceolus also is provided with the screw thread that matches with urceolus; The circular surface of described jack platform is provided with groove, and described groove is arranged on the place, axle center of urceolus.
6. sample platform of scanning electronic microscope as claimed in claim 5 is characterized in that described sample platform of scanning electronic microscope also comprises the saddle of round pie, and described saddle is arranged on the below of jack platform, and the outer wall that saddle is connected with urceolus also is provided with the screw thread that matches with urceolus.
7. sample platform of scanning electronic microscope as claimed in claim 3 is characterized in that, is provided with label on each jack side on the described jack platform.
8. sample platform of scanning electronic microscope as claimed in claim 3 is characterized in that, described sample platform of scanning electronic microscope comprises a urceolus and two or more receptacle size, jack platform all inequality distributes.
9. sample platform of scanning electronic microscope as claimed in claim 1 or 2 is characterized in that the outer wall of described urceolus is cylindrical, and described sample platform of scanning electronic microscope also comprises specimen holder, and specimen holder is provided with the cavity that is used to hold urceolus; Described cavity is cylindrical, adapts with the outer wall of urceolus; Urceolus is dismountable to be fixed in the cavity of specimen holder; The bottom of described cavity is the plane, and it is provided with the through hole that communicates with urceolus corresponding to place, urceolus axle center; The outer wall of described specimen holder is provided with at least one pair of plane parallel to each other.
10. ESEM, comprise sample platform of scanning electronic microscope, it is characterized in that, described sample platform of scanning electronic microscope comprises urceolus and is arranged on the jack platform that is connected with urceolus in the urceolus, described jack platform is provided with the jack that is used to insert min-cutter, and the external diameter of the internal diameter of described jack and the shank of min-cutter adapts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010243949 CN101916706B (en) | 2010-08-03 | 2010-08-03 | Sample platform of scanning electronic microscope and scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010243949 CN101916706B (en) | 2010-08-03 | 2010-08-03 | Sample platform of scanning electronic microscope and scanning electronic microscope |
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| Publication Number | Publication Date |
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| CN101916706A true CN101916706A (en) | 2010-12-15 |
| CN101916706B CN101916706B (en) | 2013-09-04 |
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| CN 201010243949 Active CN101916706B (en) | 2010-08-03 | 2010-08-03 | Sample platform of scanning electronic microscope and scanning electronic microscope |
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Cited By (5)
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| CN103730312A (en) * | 2014-01-09 | 2014-04-16 | 东北大学 | Sample platform for nanomechanic test system and using method thereof |
| CN103858204A (en) * | 2011-10-05 | 2014-06-11 | 株式会社日立高新技术 | Inspection or observation device and specimen inspection or observation method |
| CN105699408A (en) * | 2016-04-15 | 2016-06-22 | 南京大学 | Sample stage for electron backscatter diffraction instruments |
| CN108872281A (en) * | 2018-07-06 | 2018-11-23 | 中国电子科技集团公司第四十六研究所 | A kind of array fast preparation method of energy spectrum analysis powder sample |
| CN114509462A (en) * | 2022-02-18 | 2022-05-17 | 中国核动力研究设计院 | Scanning electron microscope shielding sample holder and system for radioactive test sample |
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| CN114509462A (en) * | 2022-02-18 | 2022-05-17 | 中国核动力研究设计院 | Scanning electron microscope shielding sample holder and system for radioactive test sample |
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| CN101916706B (en) | 2013-09-04 |
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