CN101909877A - Method for manufacturing double layer copper clad laminated board, and double layer copper clad laminated board - Google Patents

Method for manufacturing double layer copper clad laminated board, and double layer copper clad laminated board Download PDF

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Publication number
CN101909877A
CN101909877A CN2008801227941A CN200880122794A CN101909877A CN 101909877 A CN101909877 A CN 101909877A CN 2008801227941 A CN2008801227941 A CN 2008801227941A CN 200880122794 A CN200880122794 A CN 200880122794A CN 101909877 A CN101909877 A CN 101909877A
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copper clad
folding resistance
clad laminate
double layer
bilayer
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CN2008801227941A
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CN101909877B (en
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花房干夫
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JX Nippon Mining and Metals Corp
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Nippon Mining and Metals Co Ltd
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0277—Bendability or stretchability details
    • H05K1/028—Bending or folding regions of flexible printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0393—Flexible materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09—Treatments involving charged particles
    • H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105—Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • H05K3/16—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation by cathodic sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12431—Foil or filament smaller than 6 mils
    • Y10T428/12438—Composite
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12556—Organic component
    • Y10T428/12569—Synthetic resin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component
    • Y10T428/1291—Next to Co-, Cu-, or Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12944—Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

Provided is a method for manufacturing a double layer copper clad laminated board characterized in having improved folding endurance of 150 times or more, as a result of folding endurance test conforming to JIS C6471, by performing heat treatment at a temperature of 100 DEG C or higher but not higher than 175 DEG C to the double layer copper clad laminated board having a copper layer formed on a polyimide film by sputtering and plating. The method is provided for manufacturing the double layer copper clad laminated board (double layer CCL material) wherein the copper layer is formed on the polyimide film by sputtering and plating, folding endurance is improved and breakage of an outer lead section of a circuit is eliminated, and such double layer copper clad laminated board is also provided.

Description

The manufacture method of bilayer copper clad laminate and bilayer copper clad laminate
Technical field
The manufacture method of the bilayer copper clad laminate of the folding resistance of this laminate of raising and the bilayer copper clad laminate that obtains thus in the bilayer copper clad laminate that the present invention relates to utilize sputter and electroplating processes on Kapton, to be formed with the copper layer.
In addition, comprise in the above-mentioned bilayer copper clad laminate in order to increase bond strength and form thin intermediate layer, be called " bilayer copper clad laminate " of Kapton and copper layer in this intermediate layer is included in.
Background technology
In recent years, install as the drive IC of the LCD that requires the thin space circuit etc. and use circuit material, use is formed with bilayer copper clad laminate (the CCL:Cu Clad Laminate) material of copper layer on Kapton.(membrane of flip chip: in the double-deck CCL material that laminated material Chip On Film) uses, the double-deck CCL material that particularly utilizes sputter and electroplating processes to make causes concern as COF.
Double-deck CCL material be utilize sputter at Kapton (PI) and go up the copper layer that forms submicron order after, form by the copper sulphate electroplating processes that the copper layer obtains.Basis invention is as described in the following patent documentation 1.
Membrane of flip chip (Chip On Film) is used for slim TVs such as LCD TV, organic EL TV, the outer lead part bending of circuit and using, so the curved property (folding resistance) of folding must be higher.
But along with the carrying out of circuit thin spaceization, circuit width narrows down, and produces the problem that intensity descends.As a result, produce the problem of outer lead part broken string.
Patent documentation 1: No. 5685970 communique of United States Patent (USP)
Summary of the invention
In view of above problem, the purpose of the present application is to be provided in the bilayer copper clad laminate (double-deck CCL material) that utilizes sputter and electroplating processes to be formed with the copper layer on Kapton, and folding resistance improves, can prevent the manufacture method of the bilayer copper clad laminate that the outer lead part of circuit ruptures and the bilayer copper clad laminate that obtains thus.
The inventor etc. have carried out research extensively and profoundly in order to address the above problem, found that, when the manufacturing of the double-deck CCL material that on Kapton, is formed with the copper layer by sputter and electroplating processes,, can significantly improve folding resistance by heat-treating under given conditions.
Based on such discovery, the application provides following invention.
1) a kind of manufacture method of bilayer copper clad laminate of folding resistance raising, it is characterized in that, by more than 100 ℃ and under the temperature below 175 ℃ the bilayer copper clad laminate that utilizes sputter and electroplating processes to be formed with the copper layer on Kapton being heat-treated, and have by the folding resistance more than 150 times based on the folding resistance test determination of JIS C6471.
2) as above-mentioned 1) manufacture method of described bilayer copper clad laminate, wherein, form the NiCr alloy on the Kapton by sputtering at, and between Kapton and copper layer formation NiCr alloy-layer.
In addition, the application provides following invention.
3) a kind of bilayer copper clad laminate, the copper layer that has Kapton and form thereon is characterized in that, has by the folding resistance more than 150 times based on the folding resistance test determination of JIS C6471.
4) as above-mentioned 3) described bilayer copper clad laminate, it is characterized in that between described Kapton and copper layer, also having the NiCr alloy-layer.
The invention effect
The bilayer copper clad laminate that obtains according to the present invention, can effectively prevent the excellent results of the outer lead part fracture of circuit at the folding resistance that can be improved.
Description of drawings
Fig. 1 is the key diagram of the test film of use in the folding resistance test (JIS C6471).
The specific embodiment
About the bilayer copper clad laminate that obtains by the present invention, at first be arranged in the vacuum chamber and by plasma treatment with the Kapton surface active after, utilize sputter to adhere to the single metal layer of the Ni of 10～30nm, Co, Cr or comprise in them for example NiCr layer (20%Cr) of the two or more alloy-layers that form, utilize sputter to form the copper layer of submicron order afterwards.
The copper layer that obtains like this owing to be to be used for the seed that the cathode copper layer that carries out later forms, therefore is called copper seed layer.
Then, use copper seed layer to carry out electroplating processes.Electroplating processes is undertaken by copper sulphate plating etc.Current density, electrolyte temperature when electroplating by regulating can at random be regulated thickness of coating.Thus, can obtain the bilayer copper clad laminate of Kapton and copper layer.Electroplating processes can be used the applicant's electroplate liquid (with reference to WO2006/080148) of exploitation in the past.The surface roughness of coating uses contactless surface roughness meter (Veeco corporate system) to measure, its result, and Ra is 0.01-0.04, Rt is that 0.14-1.0, Rz are 0.1-0.90.
Form the copper layer of submicron order by sputter before, can form the articulamentum (Tie Coat) that comprises NiCr by sputtering at the Kapton surface.The plasma treatment on Kapton surface and articulamentum are being effective means aspect the raising cementability.The present application comprises these processing.
As previously mentioned, the present invention includes and form the articulamentum that thin intermediate layer promptly comprises NiCr in order to increase bond strength, together with this intermediate layer at interior " bilayer copper clad laminate " that is called Kapton and copper layer.
As long as the Kapton that uses in the double-deck CCL material of the present invention can realize that the present invention then is not particularly limited, preferably using BPDA-PPD is Kapton.
More than 100 ℃ and the bilayer copper clad laminate that obtains utilizing sputter and electroplating processes on Kapton, to form the copper layer under the temperature below 175 ℃ heat-treat.Thus, can have by the folding resistance more than 150 times based on the folding resistance test determination of JIS C6471.
Described heat-treat condition does not then all have the folding resistance more than 150 times if be lower than 100 ℃ or the temperature above 175 ℃.Therefore, need heat-treat more than 100 ℃ and under the temperature below 175 ℃.
As described below based on the experimental condition that the folding resistance of JIS C6471 is tested.
Use R=0.38, load 500gf, bending angle: 135 ° ± 5 °, 175cpm (bending of the ratio that per minute is 175 times), L/S are the folding resistance test film of 1mm, will be up to the number of times till the fracture as folding resistance.
When making test film, crimping dry film on the bilayer copper clad laminate after the described heat treatment forms pattern with its exposure, carries out etch processes and the unwanted part of removing copper.And, remove dry film at last, on Kapton, form circuit.Use the test film of making like this.
This circuit forming method is the method for carrying out usually, also can carry out other method.The etching solution that the etching solution of copper layer uses following liquid to form usually.
(liquid composition)
Copper chloride solution (CuCl 2), cupric oxide (CuO)
Hydrochloric acid (HCl): 3.50mol/L (in the scope of 0～6mol/L, regulating)
Hydrogen peroxide (H 2O 2): 30.0Cap (in the scope of 0～99.9Cap, regulating)
Embodiment
Below, based on embodiment and comparative example feature of the present invention is specifically described.In addition, below explanation is used for easily understanding the present application, the invention is not restricted to this.That is, the present application also comprises distortion, embodiment and other example based on the technological thought of the present application.
(embodiment 1)
The Kapton of used thickness 34 μ m (Ube Industries, Ltd's system, UpilexSGA), adhere to the NiCr layer (20%Cr) of 25nm by sputter after, form the copper layer of thickness 8 μ m by sputter and electroplating processes.Use vacuum heat treatment furnace under 100 ℃, this bilayer copper clad laminate to be carried out heat treatment in 2 hours.
Laminating film on the bilayer copper clad laminate after this heat treatment, and its exposure formed pattern, the unwanted part of utilizing above-mentioned etching solution to remove copper by etch processes forms the circuit of L/S=1mm.
Then, remove dry film at last, make the test film of 15mm * 130mm size.Circuit on the Kapton constitutes by continuous one, turns back along the length direction of Kapton, becomes the parallel structure of 6 circuit side by side.The key diagram of test film as shown in Figure 1.
Use this test film, carry out folding resistance test based on JIS C6471.Use the testing machine of テ ス タ one industry system.Test is in R=0.38, load 500gf, bending angle: implement under the condition of 135 degree, 175cpm (bending of the ratio that per minute is 175 times).Comprise embodiment described later and comparative example, the result is as shown in table 1.
As shown in table 1, the folding resistance (MIT) till fracture is 154 times.This example has the folding resistance more than 150 times of the present application.
Table 1
The embodiment comparative example Embodiment 1 Embodiment 2 Embodiment 3 Embodiment 4 Comparative example 1 Comparative example 2 Comparative example 3
Heat treatment temperature (℃) 100 125 150 175 - 75 200
Folding resistance (MIT) 154 178 161 150 124 136 138
Folding resistance: MIT (bending times till fracture) ,-: no heat treatment
(embodiment 2)
Use vacuum heat treatment furnace, under 125 ℃, the bilayer copper clad laminate that uses in the foregoing description 1 is carried out heat treatment in 2 hours.
Laminating film on the bilayer copper clad laminate after this heat treatment forms pattern with its exposure more similarly to Example 1, and carries out etch processes and the unwanted part of removing copper, forms the circuit of width 1mm.
Then, carry out similarly to Example 1 testing based on the folding resistance of JIS C6471.As shown in table 1, the folding resistance (MIT) till fracture is 178 times.This example has the folding resistance more than 150 times of the present application.In addition, folding resistance (MIT) further improves than embodiment 1.
(embodiment 3)
Use vacuum heat treatment furnace, under 150 ℃, the bilayer copper clad laminate that uses in the foregoing description 1 is carried out heat treatment in 2 hours.
Laminating film on the bilayer copper clad laminate after this heat treatment similarly to Example 1, and its exposure formed pattern, and carry out etch processes and the unwanted part of removing copper, form the circuit of width 1mm.
Then, carry out similarly to Example 1 testing based on the folding resistance of JIS C6471.As shown in table 1, the folding resistance (MIT) till fracture is 161 times.This example has the folding resistance more than 150 times of the present application.In addition, folding resistance (MIT) further improves than embodiment 1.
(embodiment 4)
Use vacuum heat treatment furnace, under 175 ℃, the bilayer copper clad laminate that uses in the foregoing description 1 is carried out heat treatment in 2 hours.
Laminating film on the bilayer copper clad laminate after this heat treatment similarly to Example 1, and its exposure formed pattern, and carry out etch processes and the unwanted part of removing copper, form the circuit of width 1mm.
Then, carry out similarly to Example 1 testing based on the folding resistance of JIS C6471.As shown in table 1, the folding resistance (MIT) till fracture is 150 times.This example has the folding resistance more than 150 times of the present application, but folding resistance (MIT) descends than embodiment 2,3.
From above example as can be seen, 100～175 ℃ heat treatment improves folding resistance, but does not all almost improve near near the folding resistance lower limit or the upper limit as can be known.
Therefore, the condition of embodiment 2 and embodiment 3 can be described as more suitably condition.Carry out heat treatment in 2 hours among the embodiment, but because heat treatment is originally carried out, even therefore heat treatment time surpassed 2 hours and was the long time, folding resistance does not have almost to change yet under lower temperature.For a long time heat treatment is the reason of productivity ratio variation, we can say that therefore hope carries out in about 1 hour～about 5 hours scope.
(comparative example 1)
The bilayer copper clad laminate that uses in the foregoing description 1 do not heat-treated and as test film.Laminating film on this bilayer copper clad laminate similarly to Example 1, and its exposure formed pattern, and carry out etch processes and the unwanted part of removing copper, form the circuit of width 1mm.
Then, carry out similarly to Example 1 testing based on the folding resistance of JIS C6471.As shown in table 1, the folding resistance (MIT) till fracture is 124 times.This example does not have the folding resistance more than 150 times of the present application fully.This example is the bilayer copper clad laminate of prior art, can not tackle the problem that intensity descends owing to carry out the circuit thin spaceization to cause circuit width to narrow down, and can easily predict the fault that outer lead part produces broken string can take place.
(comparative example 2)
Use vacuum heat treatment furnace, under 75 ℃, the bilayer copper clad laminate that uses in the foregoing description 1 is carried out heat treatment in 2 hours.
Laminating film on the bilayer copper clad laminate after this heat treatment similarly to Example 1, and its exposure formed pattern, and carry out etch processes and the unwanted part of removing copper, form the circuit of width 1mm.
Then, carry out similarly to Example 1 testing based on the folding resistance of JIS C6471.As shown in table 1, the folding resistance (MIT) till fracture is 136 times.This example does not have the folding resistance more than 150 times of the present application.Therefore, can be confirmed to be because the heat treatment temperature deficiency.
(comparative example 3)
Use vacuum heat treatment furnace, under 200 ℃, the bilayer copper clad laminate that uses in the foregoing description 1 is carried out heat treatment in 2 hours.
Laminating film on the bilayer copper clad laminate after this heat treatment similarly to Example 1, and its exposure formed pattern, and carry out etch processes and the unwanted part of removing copper, form the circuit of width 1mm.
Then, carry out similarly to Example 1 testing based on the folding resistance of JIS C6471.As shown in table 1, the folding resistance (MIT) till fracture is 138 times.This example does not have the folding resistance more than 150 times of the present application.Therefore, even the too high folding resistance of heat treatment temperature also can variation as can be seen.
Industrial applicability
The bilayer copper clad laminate that obtains according to the present invention, can effectively prevent the excellent results of fracture of the outer lead part of circuit at the folding resistance that can be improved, and therefore is suitable as most the drive IC such as liquid crystal display that require the thin space circuit and installs and use circuit material.

Claims (4)

1. the manufacture method of the bilayer copper clad laminate of a folding resistance raising is characterized in that,
By more than 100 ℃ and under the temperature below 175 ℃ to utilize sputter and electroplating processes being formed with surface roughness (Rz) on the Kapton be more than the 0.1 μ m and the bilayer copper clad laminate of the copper layer below the 0.9 μ m is heat-treated, and have by the folding resistance more than 150 times based on the folding resistance test determination of JIS C6471.
2. the manufacture method of bilayer copper clad laminate as claimed in claim 1, wherein,
By sputtering at the single metal layer that forms Ni, Co or Cr on the Kapton or comprise alloy-layers two or more in them, and then to utilize sputter and electroplating processes to form surface roughness (Rz) be the copper layer that 0.1 μ m is above and 0.9 μ m is following.
3. bilayer copper clad laminate, the copper layer that has Kapton and form thereon is characterized in that,
The surface roughness of copper layer (Rz) is that 0.1 μ m is above and below the 0.9 μ m, and has by the folding resistance more than 150 times based on the folding resistance test determination of JIS C6471.
4. bilayer copper clad laminate as claimed in claim 3 is characterized in that,
Between described Kapton and copper layer, also have the single metal layer of Ni, Co or Cr or comprise alloy-layers two or more in them.
CN2008801227941A 2007-12-27 2008-12-15 Method for manufacturing double layer copper clad laminated board, and double layer copper clad laminated board Expired - Fee Related CN101909877B (en)

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JP2007337026 2007-12-27
JP2007-337026 2007-12-27
PCT/JP2008/072754 WO2009084412A1 (en) 2007-12-27 2008-12-15 Method for manufacturing double layer copper clad laminated board, and double layer copper clad laminated board

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CN101909877A true CN101909877A (en) 2010-12-08
CN101909877B CN101909877B (en) 2013-03-06

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KR20100075665A (en) 2010-07-02
JP4440340B2 (en) 2010-03-24
TW200932939A (en) 2009-08-01
US8470450B2 (en) 2013-06-25
WO2009084412A1 (en) 2009-07-09

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