CN101905490A - Breaking bar - Google Patents
Breaking bar Download PDFInfo
- Publication number
- CN101905490A CN101905490A CN2010101982606A CN201010198260A CN101905490A CN 101905490 A CN101905490 A CN 101905490A CN 2010101982606 A CN2010101982606 A CN 2010101982606A CN 201010198260 A CN201010198260 A CN 201010198260A CN 101905490 A CN101905490 A CN 101905490A
- Authority
- CN
- China
- Prior art keywords
- knife
- point
- breaking bar
- bar
- length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
Abstract
An object of the invention is to select the length of the tip of the breaking bar based on the length of the workpiece engraved line. Rotational shafts 11a and 11b are provided at both ends of the breaking bar 10, a polygon prism-shape braking part 12 is provided between the rotational shafts 11a and 11b. Tips 13a, 14a and 15a with different lengths are respectively provided on the regression edge part of the polygon prism-shape braking part. So that the tip lengths can be easily selected by rotating the breaking bar 10 along the rotational shafts 11a and 11b.
Description
Technical field
The present invention relates to a kind ofly cut off employed breaking bar in the cut-out step of processing steps etc. subtly at member to circle.
Background technology
When making semiconductor, discoideus wafer is divided in a plurality of tetragonal steps, usually wafer is fixed on the chip board, use the slicer that approaches, make the slicer rotation and, thus a plurality of chips are formed quadrangle scanning between the chip.
In addition, propose to have following semiconductor wafer processing device in patent documentation 1, it is delineated and ruptures along cleavage surface the surface of wafer when semiconductor wafer is cut into shaped like chips, thus this wafer is divided into a plurality of chips.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese patent laid-open 2003-282485 communique
Summary of the invention
Yet, in patent documentation 1, the square area of wafer surface is delineated and is ruptured and wafer cut off be processed into chip.Fig. 1 (a) is the plane of the cutting step of semiconductor wafer, and Fig. 1 (b), Fig. 1 (c) are respectively A-A line, B-B line sectional view.In Fig. 1, chip board 102 is attached on the brilliant ring 101 of cutting of toroidal, and wafer 103 is installed in cohering on the face of this chip board 102.At this moment, shown in Fig. 1 (a), on the foursquare part of workpiece 103, be pre-formed a plurality of cancellate delineation lines, and shown in Fig. 1 (b), Fig. 1 (c), must use the breaking bar 104,105 of regular length to rupture along this delineation line.
Herein, shown in Fig. 2 (a), if can cut out chip, then can not have and obtain chip lavishly, so efficient becomes good from the roughly whole zone of the circle of wafer 103.But this moment, the length of delineation line becomes unfixing.Shown in A-A line sectional view among Fig. 2 (b), when about equally breaking bar 106,107 of the radius that uses length and wafer 103, the part of A-A line can rupture.But the thickness of cutting brilliant ring 101 for example is thicker than the thickness (being approximately 0.8mm) of wafer 103 for 1.2mm～2.0mm, and therefore as B-B line sectional view among Fig. 2 (c) shown in, in B-B line part, breaking bar 107 is contacted with to cut and brilliantly encircles 101 and can't rupture.Therefore, existence must be changed the deficiency of breaking bar according to the length of delineation line.
The present invention finishes in view of above-mentioned previous problem, and its technical problem is to provide a kind of breaking bar of length of the point of a knife that can easily change breaking bar.
In order to solve described problem, breaking bar of the present invention comprises: pair of rotary shafts, and it is formed at the two ends of breaking bar; And the fracture portion of column, it is formed between the described rotating shaft; And on the outer peripheral face of the described column of described fracture portion, be formed with a plurality of points of a knife with different qualities with the central axes ground of described rotating shaft.
Herein, described fracture portion is the polygon prism shape, and described fracture portion is made as point of a knife with each crestal line portion of described polygon prism shape respectively, also can make the specification of point of a knife different because of each bar crestal line.
Herein, the two ends of the crestal line of described polygon-shaped portion have breach respectively, with between the breach as point of a knife, and the length that also can make point of a knife is different because of each bar crestal line.
Also can make the central part of the point of a knife on the length direction of described fracture portion in same position herein.
Herein, the front end of the point of a knife of described fracture portion also can have groove respectively.
[effect of invention]
According to the present invention, only make breaking bar just can easily change the length of the point of a knife of breaking bar along the rotating shaft rotation with described feature.Therefore, can obtain easily to select the point of a knife corresponding and the effect that ruptures with the length of the delineation line of the workpiece that should rupture.
Description of drawings
Fig. 1 (a)～Fig. 1 (c) is that expression uses previous wafer processing apparatus will cut the figure of the state that the workpiece on the brilliant ring ruptured.
Fig. 2 (a)～Fig. 2 (c) is that expression uses rectangular breaking bar will cut the figure of the state that the workpiece on the brilliant ring ruptured.
Fig. 3 (a), Fig. 3 (b) are the stereogram and the side views of the breaking bar of expression the 1st example of the present invention.
Fig. 4 (a), Fig. 4 (b) are the stereogram and the side views of the breaking bar of expression the 2nd example of the present invention.
Fig. 5 (a), Fig. 5 (b) are the stereogram and the side views of the breaking bar of expression the 3rd example of the present invention.
Fig. 6 (a), Fig. 6 (b) are the stereogram and the side views of the breaking bar of expression the 4th example of the present invention.
Fig. 7 (a), Fig. 7 (b) are the stereogram and the side views of the breaking bar of expression the 5th example of the present invention.
Fig. 8 (a), Fig. 8 (b) are the stereogram and the side views of the breaking bar of expression the 6th example of the present invention.
Fig. 9 (a), Fig. 9 (b) are the stereogram and the side views of the breaking bar of expression the 7th example of the present invention.
Figure 10 (a)～Figure 10 (c) is the partial cross section figure of variation of point of a knife of the breaking bar of expression each example of the present invention.
Figure 11 (a), Figure 11 (b) are the figure of an example of the workpiece of expression when using the present invention to rupture.
Figure 12 (a)～Figure 12 (c) is that the figure of breaking bar of the present invention with the state of cutting workpiece used in expression.
[explanation of symbol]
10,20,30,40,50,60,70 breaking bars
11a, 11b, 21a, 21b, 31a, 31b, 41a, 41b, 71a, 71b rotating shaft
13a、14a、15a、23a、24a、25a、26a、33a、34a、35a、36a、37a、42a、43a、44a、
46a, 47a, 48a, 73,74 ... 76 points of a knife
13b、13c、14b、14c、15b、15c、23b、23c、24b、24c、25b、25c、26b、26c、33b、
33c、34b、34c、35b、35c、36b、36c、37b、37c、42b、42c、43b、43c、44b、44c、
46b, 46c, 47b, 47c, 48b, 48c breach
The specific embodiment
Fig. 3 (a) is the stereogram of an example of the breaking bar of expression the 1st example of the present invention, and Fig. 3 (b) is the side view of described breaking bar.As shown in these figures, the breaking bar 10 of the 1st example has the shape of triangular column, and is formed with circular rotating shaft 11a, 11b at two ends.And, the part of the triangular column of central authorities is made as fracture portion 12., the central portion of 1 crestal line is made as point of a knife 13a herein, and as shown in the figure the two ends of crestal line is made as breach 13b, 13c.Another crestal line of fracture portion 12 also in the same manner, middle body becomes point of a knife 14a, 15a, is provided with breach 14b, 14c, 15b, 15c at the two ends of the close rotating shaft of crestal line.Point of a knife 13a, 14a, 15a are with respect to the central point of the length direction of breaking bar and left-right symmetry, and the length of these points of a knife is different, and the length of point of a knife 13a is the shortest, and the length of point of a knife 15a is the longest.
Fig. 4 (a) is the stereogram of the breaking bar 20 of expression the 2nd example, and Fig. 4 (b) is the side view of this breaking bar 20.The two ends of the breaking bar 20 of this example have rotating shaft 21a, 21b, and the central portion of this breaking bar 20 becomes the fracture portion 22 of quadrangular shape.The middle body of each bar crestal line of fracture portion 22 becomes point of a knife 23a, 24a, 25a, 26a, and the part of the close rotating shaft of each bar crestal line is provided with breach 23b, 23c, 24b, 24c, 25b, 25c and 26b, the 26c identical with the 1st example.At this moment, the length of the point of a knife 23a～26a of the crestal line of central authorities also has nothing in common with each other, and the length of point of a knife 23a is the shortest, and the length of point of a knife 24a, 25a, 26a is elongated in regular turn.
Fig. 5 (a) is the stereogram of the breaking bar 30 of expression the 3rd example, and Fig. 5 (b) is the side view of this breaking bar 30.The two ends of the breaking bar 30 of this example also have rotating shaft 31a, 31b, and the central portion of this breaking bar 30 becomes the fracture portion 32 of pentagonal prism shape.The middle body of each bar crestal line of fracture portion 32 becomes point of a knife 33a, 34a, 35a, 36a, 37a, and the part of the close rotating shaft of each bar crestal line is provided with breach 33b, 33c, 34b, 34c, 35b, 35c, 36b, 36c and 37b, the 37c identical with the 1st example.At this moment, the length of the point of a knife 33a～37a of the crestal line of central authorities also has nothing in common with each other, and the length of point of a knife 33a is the shortest, and the length of point of a knife 34a, 35a, 36a, 37a is elongated in regular turn.
Fig. 6 (a) is the stereogram of the breaking bar 40 of expression the 4th example, and Fig. 6 (b) is the side view of this breaking bar 40.The two ends of the breaking bar 40 of this example also have rotating shaft 41a, 41b, and the central portion of this breaking bar 40 becomes the fracture portion 42 of hexa-prism.The middle body of each bar crestal line of fracture portion 42 becomes point of a knife 43a, 44a, 45a, 46a, 47a, 48a, and the part of the close rotating shaft of each bar crestal line is provided with breach 43b, 43c, 44b, 44c, 45b, 45c, 46b, 46c, 47b, 47c and 48b, the 48c identical with the 1st example.At this moment, the length of the point of a knife 43a～48a of the crestal line of central authorities also has nothing in common with each other, and the length of point of a knife 43a is the shortest, and the length of point of a knife 44a, 45a, 46a, 47a, 48a is elongated in regular turn.
Fig. 7 (a), Fig. 8 (a) are the stereograms of representing the breaking bar 50,60 of the 5th, the 6th example respectively, and Fig. 7 (b), Fig. 8 (b) are the side views of these breaking bars 50,60.In these examples, except fracture portion was the aspect of seven prisms, eight prisms, other aspects were identical with described example and omit detailed explanation.These crestal lines with breaking bar of polygonal fracture portion become point of a knife similarly, and the length of their crestal line is different because of each bar crestal line respectively, and in addition, polygonal limit number can at random be set, and in addition, also is not limited to regular polygon.
In addition, be not limited to prism, as shown in Figure 9, also can be made as the structure that point of a knife is partly given prominence on the surface of cylindrical element.The two ends of this breaking bar 70 have pair of rotary shafts 71a, 71b, and the column part of central authorities becomes fracture portion 72.And, the fracture portion 72 in central authorities, the center of common length direction also is formed with point of a knife 73,74 symmetrically from the teeth outwards from the center ... 76.The length difference of these points of a knife, but these points of a knife all form abreast with the axle of rotating shaft 71a, 71b.In addition, the number of point of a knife can at random be selected.
Secondly, further specify the variation of the shape of point of a knife.In described each example, the cross section of the shape of point of a knife is a triangle, but when so that up and down point of a knife ruptures to workpiece, also any one point of a knife can be made as the cross section is leg-of-mutton point of a knife, another point of a knife is made as the point of a knife that has groove.Figure 10 will have the partial cross section figure that observes from the side after the point of a knife amplification of groove.If illustrate the breaking bar 40 of hexa-prism, then each point of a knife of this breaking bar 40 is the point of a knife 43a-1 that has stria shown in Figure 10 (a) along crestal line, and replaces the leg-of-mutton point of a knife of Fig. 6, for example point of a knife 43a.This groove is formed at the whole zone of point of a knife, and the width of groove is to select in the mode of the delineation spacing that is narrower than workpiece.Other points of a knife are also identical.
In addition, have in the point of a knife of groove, shown in point of a knife 43a-2 among Figure 10 (b), also can slot to the end of groove abreast with the bottom surface of groove.In addition, shown in point of a knife 43a-3 among Figure 10 (c), the part that also can make groove is outstanding and groove is set.Other points of a knife are also all identical.
In addition, in described example, make the length difference of point of a knife on the surface of each the bar crestal line that is arranged on polygon prism or cylinder, but for example when each bar crestal line that utilizes non-regular polygon during as point of a knife, or when the surface at cylinder shown in Figure 9 is provided with point of a knife, point of a knife cross section angle (convergent angle) is changed, in addition because of each point of a knife, when when having the point of a knife of groove, the width of groove or the degree of depth being changed because of each point of a knife for shown in Figure 10.
Secondly, the action when using breaking bar of the present invention that the workpiece of circle is ruptured describes.Shown in the central longitudinal sectional view of the plane of Figure 11 (a), Figure 11 (b), on the bottom surface of cutting brilliant ring 101, chip board 102 is installed, be pasted with circular workpiece 110 at the upper surface of chip board 102.On this circular workpiece 110, be pre-formed clathrate and be roughly circular delineation line on the whole.Figure 12 (a) is the front view of the cut-out step of this workpiece 110, and Figure 12 (b), Figure 12 (c) are respectively A-A line, B-B line sectional view., use the breaking bar 40 of fracture portion 42 to rupture herein with described hexa-prism, as shown in figure 12, at a pair of breaking bar of configuration up and down of workpiece.The length of the point of a knife of the breaking bar when herein, line L1～L6 represents to rupture.That is the line that point of a knife contacted when, line L1 is to use the shortest point of a knife 43a to rupture.At this moment, as shown in figure 12, use identical breaking bar 40 up and down,, for example only push away on the top of breaking bar 40 in figure with the below and rupture any one breaking bar 40.Thus, the breaking bar 40 of top does not contact just and can rupture with the face of cutting brilliant ring 101.And, make workpiece only move the spacing of delineation line.
Then, in the time will being ruptured than the line L2 that this line L1 grows slightly, make 60 ° of breaking bar up and down 40 rotations, using then, the point of a knife 44a of weak point ruptures.Below identical, at line L3, L4, L5, L6 and use 45a, 46a, 47a, 48a to rupture respectively.Thus, only make the breaking bar rotation just can select the point of a knife of Len req, therefore need not to change breaking bar, thereby can simplify manufacturing step, shorten manufacturing time according to the length of point of a knife.
In addition, in this example, represented the step of using identical breaking bar to rupture up and down, but but also only any one use Fig. 3～breaking bar shown in Figure 8, be the breaking bar of the point of a knife with trough of belt shown in Figure 10 and another person uses the cross section.
[utilizability on the industry]
The present invention is for the step of round member being cut off processing, can provide and can easily change according to the length of delineation line the point of a knife of breaking bar, and cut-out is processed with usefulness.
Claims (5)
1. breaking bar, it comprises:
Pair of rotary shafts, it is formed at the two ends of breaking bar; And
The fracture portion of column, it is formed between the described rotating shaft; And
Described fracture portion is formed with a plurality of points of a knife with different qualities with the central axes ground of described rotating shaft on the outer peripheral face of described column.
2. breaking bar according to claim 1 is characterized in that:
Described fracture portion is the polygon prism shape, and
Described fracture portion is made as point of a knife with each crestal line portion of described polygon prism shape respectively, and makes the specification of point of a knife different because of each bar crestal line.
3. breaking bar according to claim 2 is characterized in that:
The two ends of the crestal line of described polygon prism shape have breach respectively, with between the breach as point of a knife, and the length that makes point of a knife is different because of each bar crestal line.
4. breaking bar according to claim 1 is characterized in that:
The central part that makes the point of a knife on the length direction of described fracture portion is in same position.
5. according to each described breaking bar in the claim 1 to 4, it is characterized in that:
The front end of the point of a knife of described fracture portion has groove respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-136427 | 2009-06-05 | ||
| JP2009136427A JP5310278B2 (en) | 2009-06-05 | 2009-06-05 | Break bar |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101905490A true CN101905490A (en) | 2010-12-08 |
| CN101905490B CN101905490B (en) | 2013-06-05 |
Family
ID=43261150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101982606A Expired - Fee Related CN101905490B (en) | 2009-06-05 | 2010-06-04 | Breaking bar |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5310278B2 (en) |
| KR (1) | KR101103260B1 (en) |
| CN (1) | CN101905490B (en) |
| TW (1) | TWI437626B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102658055A (en) * | 2012-06-07 | 2012-09-12 | 王洪福 | Polygon prism stirring rod |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5589899B2 (en) * | 2011-03-03 | 2014-09-17 | 株式会社デンソー | Substrate dividing method and dividing apparatus |
| JP6047392B2 (en) * | 2012-12-13 | 2016-12-21 | 株式会社ディスコ | Dividing device and dividing method |
| JP6185812B2 (en) * | 2013-09-30 | 2017-08-23 | 三星ダイヤモンド工業株式会社 | Method and apparatus for breaking brittle material substrate |
| JP6689023B2 (en) * | 2014-08-28 | 2020-04-28 | 三星ダイヤモンド工業株式会社 | Break device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010041387A1 (en) * | 2000-05-11 | 2001-11-15 | Satoshi Tateiwa | Semiconductor wafer dividing method |
| CN1359784A (en) * | 2000-12-19 | 2002-07-24 | 三星钻石工业股份有限公司 | Method and device for dividing brittle substrate |
| WO2006073098A1 (en) * | 2005-01-05 | 2006-07-13 | Thk Co., Ltd. | Method and device for breaking work, method for scribing and breaking work, and scribing device with breaking function |
| CN101203362A (en) * | 2005-06-02 | 2008-06-18 | 康宁日本有限公司 | Plate material cutting unit, cutting device having the cutting unit, and cutting facility having the cutting device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0817766A (en) * | 1994-06-28 | 1996-01-19 | Hitachi Ltd | Braking device of semiconductor wafer |
| US7851241B2 (en) * | 2002-04-01 | 2010-12-14 | Mitsuboshi Diamond Industrial Co., Ltd. | Method for severing brittle material substrate and severing apparatus using the method |
| KR101140164B1 (en) * | 2005-10-28 | 2012-04-24 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Method?of?forming?scribe?line?on?substrate?of?brittle?material?and?scribe?line?forming?apparatus |
| JP4855097B2 (en) * | 2006-02-14 | 2012-01-18 | 株式會社塩山製作所 | Semiconductor chip separator |
-
2009
- 2009-06-05 JP JP2009136427A patent/JP5310278B2/en not_active Expired - Fee Related
-
2010
- 2010-05-24 TW TW099116543A patent/TWI437626B/en not_active IP Right Cessation
- 2010-06-04 CN CN2010101982606A patent/CN101905490B/en not_active Expired - Fee Related
- 2010-06-04 KR KR1020100052803A patent/KR101103260B1/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010041387A1 (en) * | 2000-05-11 | 2001-11-15 | Satoshi Tateiwa | Semiconductor wafer dividing method |
| CN1359784A (en) * | 2000-12-19 | 2002-07-24 | 三星钻石工业股份有限公司 | Method and device for dividing brittle substrate |
| WO2006073098A1 (en) * | 2005-01-05 | 2006-07-13 | Thk Co., Ltd. | Method and device for breaking work, method for scribing and breaking work, and scribing device with breaking function |
| CN101203362A (en) * | 2005-06-02 | 2008-06-18 | 康宁日本有限公司 | Plate material cutting unit, cutting device having the cutting unit, and cutting facility having the cutting device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102658055A (en) * | 2012-06-07 | 2012-09-12 | 王洪福 | Polygon prism stirring rod |
| CN102658055B (en) * | 2012-06-07 | 2015-09-09 | 王洪福 | Polygon prism stirring rod |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201104733A (en) | 2011-02-01 |
| JP2010280043A (en) | 2010-12-16 |
| KR20100131384A (en) | 2010-12-15 |
| CN101905490B (en) | 2013-06-05 |
| TWI437626B (en) | 2014-05-11 |
| JP5310278B2 (en) | 2013-10-09 |
| KR101103260B1 (en) | 2012-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101905490B (en) | Breaking bar | |
| ES2379327T3 (en) | Satin and embossing device packing sheets | |
| KR900700071A (en) | Tri-scored Drug Tablets | |
| ES2672697T3 (en) | Multilayer body | |
| NO842445L (en) | THERMISTORS AND PROCEDURES FOR THEIR PREPARATION | |
| US8882010B2 (en) | Herb grinder | |
| BR0017106B1 (en) | continuous process for the production of poly (trimethylene terephthalate). | |
| JP2006505747A (en) | Precision machinery transmission | |
| KR101779053B1 (en) | Method for dividing multi-layered ceramic substrate | |
| HRP20191498T1 (en) | Multipack container | |
| CN103260801A (en) | Cutting insert having structured tool flanks | |
| WO2011081309A3 (en) | Resistance change memory device, and manufacturing method and driving method for same | |
| CA2409541A1 (en) | Limited slip differential | |
| TWI507955B (en) | Touch panel and touch display device | |
| JPWO2018159824A1 (en) | Sanitary thin paper | |
| KR102090684B1 (en) | Multi-step tactile pressure sensor | |
| USD534831S1 (en) | Stone cut | |
| JPH10210924A (en) | Scraper for noodle-cutting roll | |
| CN101810934A (en) | Method for manufacturing building blocks | |
| JP4056628B2 (en) | PTP package | |
| JP5848051B2 (en) | Packaging box | |
| JP3989483B2 (en) | Folding ruled line blade used for manufacturing plastic sheet with bent ruled line | |
| KR20120017110A (en) | Finger tongs | |
| CN207594099U (en) | Scribing wheel and cutter device | |
| JP2007150923A (en) | Piezoelectric wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Termination date: 20150604 |
|
| EXPY | Termination of patent right or utility model |