CN101904766A - 手术和非手术应用的硅刀片 - Google Patents
手术和非手术应用的硅刀片 Download PDFInfo
- Publication number
- CN101904766A CN101904766A CN2010102059497A CN201010205949A CN101904766A CN 101904766 A CN101904766 A CN 101904766A CN 2010102059497 A CN2010102059497 A CN 2010102059497A CN 201010205949 A CN201010205949 A CN 201010205949A CN 101904766 A CN101904766 A CN 101904766A
- Authority
- CN
- China
- Prior art keywords
- crystalline material
- topping machanism
- wafer
- material wafer
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 225
- 229910052710 silicon Inorganic materials 0.000 title claims description 225
- 239000010703 silicon Substances 0.000 title claims description 225
- 238000000034 method Methods 0.000 claims abstract description 219
- 238000005530 etching Methods 0.000 claims abstract description 65
- 239000000463 material Substances 0.000 claims abstract description 63
- 238000004519 manufacturing process Methods 0.000 claims abstract description 54
- 238000005520 cutting process Methods 0.000 claims description 120
- 238000012545 processing Methods 0.000 claims description 103
- 239000002178 crystalline material Substances 0.000 claims description 87
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 58
- 239000011248 coating agent Substances 0.000 claims description 51
- 238000000576 coating method Methods 0.000 claims description 51
- 230000008569 process Effects 0.000 claims description 51
- 239000000377 silicon dioxide Substances 0.000 claims description 29
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 19
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 17
- 239000013078 crystal Substances 0.000 claims description 16
- 238000007739 conversion coating Methods 0.000 claims description 14
- 235000012239 silicon dioxide Nutrition 0.000 claims description 14
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 14
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 13
- 229910010037 TiAlN Inorganic materials 0.000 claims description 13
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 229910052582 BN Inorganic materials 0.000 claims 12
- 238000005452 bending Methods 0.000 claims 4
- 238000002425 crystallisation Methods 0.000 abstract description 27
- 230000008025 crystallization Effects 0.000 abstract description 27
- 229910003460 diamond Inorganic materials 0.000 abstract description 13
- 239000010432 diamond Substances 0.000 abstract description 13
- 238000002406 microsurgery Methods 0.000 abstract description 11
- 208000002177 Cataract Diseases 0.000 abstract description 4
- 238000003672 processing method Methods 0.000 abstract description 4
- 238000001356 surgical procedure Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 196
- 238000005516 engineering process Methods 0.000 description 27
- 238000009434 installation Methods 0.000 description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 238000013461 design Methods 0.000 description 14
- 238000003754 machining Methods 0.000 description 13
- 230000008901 benefit Effects 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000000227 grinding Methods 0.000 description 9
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000005242 forging Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000002253 acid Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000002210 silicon-based material Substances 0.000 description 5
- 208000010392 Bone Fractures Diseases 0.000 description 4
- 206010017076 Fracture Diseases 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000002679 ablation Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 210000004872 soft tissue Anatomy 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000008520 organization Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 101000933173 Homo sapiens Pro-cathepsin H Proteins 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 102100025974 Pro-cathepsin H Human genes 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 210000004556 brain Anatomy 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 210000000887 face Anatomy 0.000 description 2
- 210000003128 head Anatomy 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000010979 ruby Substances 0.000 description 2
- 229910001750 ruby Inorganic materials 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- BLIQUJLAJXRXSG-UHFFFAOYSA-N 1-benzyl-3-(trifluoromethyl)pyrrolidin-1-ium-3-carboxylate Chemical compound C1C(C(=O)O)(C(F)(F)F)CCN1CC1=CC=CC=C1 BLIQUJLAJXRXSG-UHFFFAOYSA-N 0.000 description 1
- KIZQNNOULOCVDM-UHFFFAOYSA-M 2-hydroxyethyl(trimethyl)azanium;hydroxide Chemical compound [OH-].C[N+](C)(C)CCO KIZQNNOULOCVDM-UHFFFAOYSA-M 0.000 description 1
- 102100039164 Acetyl-CoA carboxylase 1 Human genes 0.000 description 1
- 101710190443 Acetyl-CoA carboxylase 1 Proteins 0.000 description 1
- 102100021641 Acetyl-CoA carboxylase 2 Human genes 0.000 description 1
- 101100268670 Caenorhabditis elegans acc-3 gene Proteins 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 101000677540 Homo sapiens Acetyl-CoA carboxylase 2 Proteins 0.000 description 1
- 101000894929 Homo sapiens Bcl-2-related protein A1 Proteins 0.000 description 1
- 101001017512 Homo sapiens Minor histocompatibility protein HMSD variant form Proteins 0.000 description 1
- 101001017510 Homo sapiens Serpin-like protein HMSD Proteins 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 102100033983 Serpin-like protein HMSD Human genes 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 208000013201 Stress fracture Diseases 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 description 1
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 229910001573 adamantine Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001725 carbon group compounds Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 210000004087 cornea Anatomy 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000002316 cosmetic surgery Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 230000005662 electromechanics Effects 0.000 description 1
- 150000002118 epoxides Chemical class 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000004899 motility Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 208000001491 myopia Diseases 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 210000003786 sclera Anatomy 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods
- A61B17/32—Surgical cutting instruments
- A61B17/3209—Incision instruments
- A61B17/3211—Surgical scalpels, knives; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/0095—Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods
- A61B2017/00526—Methods of manufacturing
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods
- A61B2017/00831—Material properties
- A61B2017/0088—Material properties ceramic
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
- A61F9/007—Methods or devices for eye surgery
- A61F9/013—Instruments for compensation of ocular refraction ; Instruments for use in cornea removal, for reshaping or performing incisions in the cornea
- A61F9/0133—Knives or scalpels specially adapted therefor
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Surgery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Public Health (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Micromachines (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US50345903P | 2003-09-17 | 2003-09-17 | |
| US60/503,459 | 2003-09-17 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004800293115A Division CN1863940B (zh) | 2003-09-17 | 2004-09-17 | 手术和非手术应用的硅刀片 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101904766A true CN101904766A (zh) | 2010-12-08 |
Family
ID=34375356
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102059497A Pending CN101904766A (zh) | 2003-09-17 | 2004-09-17 | 手术和非手术应用的硅刀片 |
| CN2004800293115A Expired - Lifetime CN1863940B (zh) | 2003-09-17 | 2004-09-17 | 手术和非手术应用的硅刀片 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004800293115A Expired - Lifetime CN1863940B (zh) | 2003-09-17 | 2004-09-17 | 手术和非手术应用的硅刀片 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1664384A4 (https=) |
| JP (1) | JP2007505706A (https=) |
| CN (2) | CN101904766A (https=) |
| CA (1) | CA2538164A1 (https=) |
| MX (1) | MXPA06002875A (https=) |
| RU (1) | RU2363771C2 (https=) |
| WO (1) | WO2005027729A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107611057A (zh) * | 2016-07-12 | 2018-01-19 | 乐金显示有限公司 | 用于处理基板的装置和使用该装置的显示设备 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5185260B2 (ja) * | 2007-04-27 | 2013-04-17 | マニー株式会社 | 剥離用ナイフ |
| JP5221916B2 (ja) * | 2007-09-05 | 2013-06-26 | 株式会社貝印刃物開発センター | 手術用刃物 |
| CN101804552B (zh) * | 2010-03-19 | 2011-06-15 | 浙江省金华市科迪仪器设备有限公司 | 病理一次性刀片的制造方法 |
| JP2011198765A (ja) * | 2011-05-20 | 2011-10-06 | Dainippon Printing Co Ltd | 金属箔シート |
| RU2483684C1 (ru) * | 2011-12-28 | 2013-06-10 | Федеральное государственное унитарное предприятие "Научно-исследовательский институт физических проблем имени Ф.В. Лукина" | Лезвие офтальмохирургическое |
| RU2484781C1 (ru) * | 2011-12-28 | 2013-06-20 | Федеральное государственное унитарное предприятие "Научно-исследовательский институт физических проблем имени Ф.В. Лукина" | Лезвие офтальмохирургическое |
| US9808944B2 (en) | 2014-06-17 | 2017-11-07 | The Gillette Company Llc | Methods of manufacturing silicon blades for shaving razors |
| RU2607280C2 (ru) * | 2014-12-25 | 2017-01-10 | Юрий Иванович Петров | Хирургические ножницы |
| RU2602931C1 (ru) * | 2015-07-22 | 2016-11-20 | Закрытое акционерное общество "ГРУППА КРЕМНИЙ ЭЛ" | Способ изготовления микрохирургического лезвия |
| CN106175879B (zh) * | 2016-08-31 | 2018-08-07 | 易波 | 末端多自由度超声刀 |
| RU2703624C2 (ru) * | 2017-11-10 | 2019-10-21 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный университет имени М.В. Ломоносова" (МГУ) | Коаксиальные регулярные нано-мезоструктуры, способ их получения и способ получения микрокапсул из этих структур |
| EP3895861A1 (en) * | 2020-04-16 | 2021-10-20 | GFD Gesellschaft für Diamantprodukte mbH | Shaving device |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3543402A (en) * | 1968-04-15 | 1970-12-01 | Coors Porcelain Co | Ceramic cutting blade |
| EP0191203A3 (en) * | 1985-01-16 | 1988-02-17 | Jerome Hal Lemelson | Cutting tool structures, apparatus and method for making same |
| US5056227A (en) * | 1990-03-19 | 1991-10-15 | The Gillette Company | Razor blade technology |
| US5048191A (en) * | 1990-06-08 | 1991-09-17 | The Gillette Company | Razor blade technology |
| US5317938A (en) * | 1992-01-16 | 1994-06-07 | Duke University | Method for making microstructural surgical instruments |
| US5579583A (en) * | 1992-09-22 | 1996-12-03 | Micromed, Incorporated | Microfabricated blades |
| DE4413352C1 (de) * | 1994-04-18 | 1995-05-04 | Braun Ag | Verfahren zur Herstellung eines Messers für eine Schneideinrichtung eines elektrischen Rasierapparates oder Bartschneiders |
| US5619889A (en) * | 1994-10-11 | 1997-04-15 | Fed Corporation | Method of making microstructural surgical instruments |
| US5842387A (en) * | 1994-11-07 | 1998-12-01 | Marcus; Robert B. | Knife blades having ultra-sharp cutting edges and methods of fabrication |
| GB9909463D0 (en) * | 1999-04-23 | 1999-06-23 | Gillette Co | Safety razors |
| IL138710A0 (en) * | 1999-10-15 | 2001-10-31 | Newman Martin H | Atomically sharp edge cutting blades and method for making same |
| US6615496B1 (en) * | 2000-05-04 | 2003-09-09 | Sandia Corporation | Micromachined cutting blade formed from {211}-oriented silicon |
| WO2002053332A1 (en) * | 2000-12-28 | 2002-07-11 | Tsukatani Hamono Mfg. Co., Ltd. | Flexible die and method of manufacturing the flexible die |
| BRPI0308319B1 (pt) * | 2002-03-11 | 2015-06-09 | Beaver Visitec Int Us Inc | Método para fabricar um dispositivo de corte de material cristalino e método para fabricar uma lâmina cirúrgica de material cristalino |
| JP2004141360A (ja) * | 2002-10-23 | 2004-05-20 | Mitsuchika Saito | 単結晶材料刃、単結晶材料刃を備えた刃物および単結晶材料刃の製造方法 |
-
2004
- 2004-09-17 CN CN2010102059497A patent/CN101904766A/zh active Pending
- 2004-09-17 CA CA002538164A patent/CA2538164A1/en not_active Abandoned
- 2004-09-17 JP JP2006527068A patent/JP2007505706A/ja active Pending
- 2004-09-17 EP EP04784418A patent/EP1664384A4/en not_active Withdrawn
- 2004-09-17 WO PCT/US2004/030550 patent/WO2005027729A2/en not_active Ceased
- 2004-09-17 RU RU2006112594/02A patent/RU2363771C2/ru not_active IP Right Cessation
- 2004-09-17 CN CN2004800293115A patent/CN1863940B/zh not_active Expired - Lifetime
- 2004-09-17 MX MXPA06002875A patent/MXPA06002875A/es unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107611057A (zh) * | 2016-07-12 | 2018-01-19 | 乐金显示有限公司 | 用于处理基板的装置和使用该装置的显示设备 |
| US10748771B2 (en) | 2016-07-12 | 2020-08-18 | Lg Display Co., Ltd. | Apparatus for processing a substrate and display device by using the same |
| CN107611057B (zh) * | 2016-07-12 | 2021-01-01 | 乐金显示有限公司 | 用于处理基板的装置和使用该装置的显示设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007505706A (ja) | 2007-03-15 |
| EP1664384A2 (en) | 2006-06-07 |
| EP1664384A4 (en) | 2010-04-28 |
| CN1863940B (zh) | 2010-08-18 |
| RU2006112594A (ru) | 2007-11-10 |
| WO2005027729A2 (en) | 2005-03-31 |
| CA2538164A1 (en) | 2005-03-31 |
| RU2363771C2 (ru) | 2009-08-10 |
| MXPA06002875A (es) | 2006-06-05 |
| WO2005027729A3 (en) | 2005-08-04 |
| AU2004273978A1 (en) | 2005-03-31 |
| CN1863940A (zh) | 2006-11-15 |
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