CN101902131B - Supply power adjusting apparatus and semiconductor manufacturing apparatus - Google Patents
Supply power adjusting apparatus and semiconductor manufacturing apparatus Download PDFInfo
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- CN101902131B CN101902131B CN2009101710577A CN200910171057A CN101902131B CN 101902131 B CN101902131 B CN 101902131B CN 2009101710577 A CN2009101710577 A CN 2009101710577A CN 200910171057 A CN200910171057 A CN 200910171057A CN 101902131 B CN101902131 B CN 101902131B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/02—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc
- H02M5/04—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters
- H02M5/22—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M5/275—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M5/293—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
- G05F1/40—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
- G05F1/44—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only
- G05F1/45—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only being controlled rectifiers in series with the load
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
A semiconductor manufacturing apparatus for performing heat treatment by carrying a substrate holder, on which a plurality of substrates are loaded, into a reacting furnace. The semiconductor manufacturing apparatus is provided with a heater arranged on a circumference of the reacting furnace, and a supply power adjusting apparatus for adjusting a supplying power to the heater. The supply power adjusting apparatus is composed of a power IGBT converter for converting an alternating voltage from an alternating power supply into an alternating power in accordance with the frequency of a control signal and supplying the heater with the alternating power, and a regenerating IGBT converter for regenerating a back electromotive force generated by switching operation of the IGBT converter and returning the back electromotive force to the alternating power supply.
Description
The application is to be April 3, application number in 2006 the dividing an application for the application for a patent for invention of " supply power adjusting apparatus and semiconductor-fabricating device " that be 200680006206.9 (international application no is PCT/JP2006/307030), denomination of invention the applying date.
Technical field
The present invention relates to supply power adjusting apparatus and the semiconductor-fabricating device that has used this supply power adjusting apparatus to heater fed power.
Background technology
Fig. 3 represents the supply power adjusting apparatus that existing heater is used.The supply power adjusting apparatus 20 that heater is used has the receiving end daughter board 2 that is connected with AC power 1 at its input, have minute adapted terminal board 6 that is connected with heater 7 at its output.Be connected with power circuit breaker 3, power transformer 4 between receiving end daughter board 2 and minute adapted terminal board 6, control with thyristor 5 as the power of power governor.Be provided with temperature measuring thermocouple 8 in heater 7.
By receiving end daughter board 2 input ac powers 1, by power circuit breaker 3, to power transformer 4 supply powers.Carry out the power of transformation at power transformer 4, controlled with thyristor 5 by power and control, supplied with heater 7 from minute adapted terminal board 6.Thus, heater 7 is heated, and the temperature of heater 7 changes.Measure this heter temperature and input temp adjuster 9 by temperature measuring with thermocouple 8.Thermoregulator 9 is obtained the poor of the mensuration temperature measured with thermocouple 8 by temperature measuring and design temperature, and should supply with the quantity of power of heater 7 according to this temperature difference calculating.This result of calculation is scaled the phase control amount, outputs to power as control signal from thermoregulator 9 and controls with thyristor 5.Power is controlled the power supply heater 7 that use thyristor 5 will be corresponding with the sequential of this control signal.
Like this, the supply power adjusting apparatus 20 that heater is used, determined the sequential of output control signals by thermoregulator 9 after detecting heter temperature, and ordered pair power is controlled and carried out phase control with thyristor 5 during according to this, thereby the control heater temperature makes it equal design temperature.
The method of this phase control is shown in Fig. 4.(a) of Fig. 4 illustrates the voltage waveform of AC power, and (b) of Fig. 4 illustrates power ratio control and control the power control thyristor control signal of using thyristor.In phase control method, within each cycle of AC power, be made as power control period A during in the time of will controlling the no-voltage that plays power supply wave shape when producing with the thyristor control signal from power, be made as B during reactive power during when playing control signal in the time of will be from no-voltage and producing.And, required high-power maximum power when obtaining than temperature stabilization to power supply.Therefore, the effective power during temperature stabilization is limited in 60%～80% left and right of maximum power, is reactive power in addition, thereby makes the degradation in efficiency of power supply.
For improving this situation, carried out various trials, as adopting the phase advance capacitor that the zero crossing that does not produce reactive power on principle is controlled, the employing power-factor improvement is used, the ratio of effective power is brought up to more than 85%.
Zero crossing is controlled, and is identical with Fig. 3 on circuit, but difference is, generally controls as power and adopts SSR (solid state relay) rather than thyristor with element, and changed the content of its control signal.The method that this zero crossing is controlled is shown in Fig. 5.(a) of Fig. 5 illustrates the voltage waveform of AC power, and (b) of Fig. 5 illustrates the power control SSR control signal of controlling SSR.The triggering mode that employing makes SSR connect when the no-voltage of power supply wave shape, and with stipulated time (A+B) of AC power as one-period (circulation timei), will be in during this period output power with the SSR control signal and switching on during be made as power control period A, will be made as B during the non-energising of consumed power not during in addition.Because zero crossing is controlled just on/off power supply, therefore do not produce reactive power on principle.
In addition, adopt the control mode of phase advance capacitor to be shown in Fig. 6.The solid line of Fig. 6 (a) represents supply side AC power waveform W1, and dotted line represents to control side power supply wave shape W2.In addition, Fig. 6 (b) illustrates power control thyristor control signal.When controlling by this control signal the supply side AC power waveform W1 that represents with solid line, during reactive power, B is larger, and therefore, the power control example the during P1 of phase angle is as only being limited in 70%.But, when control with power with the thyristor control signal controlling by phase advance capacitor make phase place leading the control side power supply wave shape W2 that dots the time, during reactive power, B ' reduces the leading amount power of phase angle P2, power factor improves on the surface, and power is controlled and is increased to 90%.
But, in the situation that zero crossing is controlled, compare the larger SSR of turn-on voltage owing to power being controlled adopted to control with the such high speed power switched of insulated gate bipolar transistor IGBT (Insulated Gate Bipolar Transistor) with element with semiconductor, exist the problem that the response that makes heter temperature worsens.In addition, in the situation that adopt phase advance capacitor, due to the compensation that phase advance capacitor is arranged, need to carry out the power adjustments that is limited reaching maximum power curve before.This is because owing to carrying out phase lead compensation, just also will carry out phase-lag compensation as being raised to suddenly maximum power.Therefore, the convenience of use worsens.
Summary of the invention
As mentioned above, control as power at existing employing SSR with in the supply power adjusting apparatus of element, carry out zero crossing when controlling temperature power being controlled with thyristor, exist the problem that the response of temperature worsens.In addition, in the situation that adopt phase advance capacitor, must carry out power adjustments that the curve that reaches before maximum power is limited, thereby the convenience of using worsens.Further, although both can share, power source change and load variations are not taked any measure, therefore exist the problem for the stability deterioration of power source change and load variations.
The present invention makes for the problem that solves above-mentioned prior art, its purpose be to provide a kind of small-sized, temperature-responsive is good, to the stability of power source change and load variations also good, supply power adjusting apparatus and semiconductor-fabricating device that ease of use is good.
According to mode of the present invention, a kind of supply power adjusting apparatus is provided, the alternating voltage of AC power is converted to and the corresponding AC power of the frequency of control signal, adjust the supply power to load, it is characterized in that: power IGBT converter, its up and down two-stage series connection consists of together and by higher level's IGBT converter and the IGBT converter of subordinate; And power rectification circuit, above-mentioned ac voltage rectifier is become positive half-wave and negative half-wave, and be assigned to above-mentioned higher level's power use IGBT converter and the power IGBT converter of above-mentioned subordinate according to polarity, during above-mentioned alternating voltage was positive half-wave, above-mentioned higher level's IGBT converter was changed above-mentioned positive half-wave based on above-mentioned control signal; During above-mentioned alternating voltage was for negative half-wave, above-mentioned higher level's IGBT converter was set to closed condition, and during above-mentioned alternating voltage was positive half-wave, the IGBT converter of above-mentioned subordinate was set to closed condition; During above-mentioned alternating voltage was for negative half-wave, the IGBT converter of above-mentioned subordinate was changed above-mentioned negative half-wave based on above-mentioned control signal.
According to the embodiment of the present invention, can obtain a kind of small-sized, temperature-responsive is good, for the stability of power source change and load variations also good, supply power adjusting apparatus and semiconductor-fabricating device that ease of use is good.
Description of drawings
Fig. 1 is the block diagram of the supply power adjusting apparatus of one embodiment of the present invention.
Fig. 2 is the concrete block diagram of major part of the supply power adjusting apparatus of one embodiment of the present invention.
Fig. 3 is the block diagram of the supply power adjusting apparatus of conventional example.
Fig. 4 is the key diagram of existing power supply method based on phase control.
Fig. 5 is the key diagram of the power supply method of controlling based on zero crossing that shares of prior art and embodiment.
Fig. 6 is the key diagram of existing power-factor improvement based on the phase advance capacitor mode.
Fig. 7 is the major part figure of the supply power adjusting apparatus of one embodiment of the present invention.
Fig. 8 means the figure of the voltage waveform of the switching action of major part of supply power adjusting apparatus of one embodiment of the present invention and each point.
Fig. 9 is the specific description figure of power source change checkout gear 22, load variations checkout gear 23 and the changeable frequency circuit 15 of one embodiment of the present invention.
What Figure 10 meaned that the conduct of one embodiment of the present invention makes one of semi-conductive operation heat-treats the oblique view of an example of the annealing device of use to Semiconductor substrate.
Figure 11 means the cutaway view of an example of the reacting furnace of one embodiment of the present invention.
Embodiment
As realizing the above-mentioned purpose achievement in research, the inventor is considering IGBT in the situations such as power consumption, high speed switching, found the most suitable above-mentioned purpose technical scheme, if and then obtained by IGBT, alternating voltage being carried out the opinion that direct switching just need not to have rectification circuit, thereby cause foundation of the present invention.
Below, an execution mode of supply power adjusting apparatus of the present invention is described.
The supply power adjusting apparatus of present embodiment will carry out switching at a high speed the output of converter of action as the power supply heater, the device of this converter used as the high speed power switched control IGBT with element.By IGBT, the alternating voltage of AC power is directly switched and will carry out pulse modulated AC power and supply with heater, make reactive power almost nil, thereby effectively utilized power supply.
As shown in Figure 1, the supply power adjusting apparatus 21 of 7 supply powers from AC power 1 to heater has the receiving end daughter board 2 that is connected with AC power 1 at its input, has minute adapted terminal board 6 that is connected with heater 7 at its output.AC power 1 is for example the single-phase industrial power of frequency 50/60Hz, AC200V.Heater 7 is for example the resistance heater of molybdenum disilicide system.
Connect power circuit breaker 3 on receiving end daughter board 2, and then connect as required power transformer 4.At receiving end daughter board 2 input ac powers 1, by power circuit breaker 3, with power supply power transformer 4.According to the specification of heater 7, sometimes do not use this power transformer 4 yet.In addition, supply power adjusting apparatus 21 is also prepared a plurality of IGBT converters 11 sometimes, in order to heater 7 can be divided into a plurality of zones and carry out respectively power and control.
At the secondary side of power transformer 4, also have input side filter circuit 10, IGBT converter 11, power source change checkout gear 22, load variations checkout gear 23, variations in temperature checkout gear 24, frequency varying device (hereinafter referred to as the changeable frequency circuit) 15, outlet side filter circuit 30.By the power after power transformer 4 transformations, supply with the IGBT converter 11 of being controlled by changeable frequency circuit 15 by input side filter circuit 10, and put on the heater 7 that is connected on minute adapted terminal board 6 by outlet side filter circuit 30.
Below, with the major part figure of supply power adjusting apparatus shown in Figure 7, input side filter circuit 10, outlet side filter circuit 30 and IGBT converter 11 are described.
Input side filter circuit 10 is to have used the low pass filter of LC by filtering mode, has the structure of filtering key element by the arranged in order of CLC.Coil L is divided into L1-1 and L1-2 and inserts incoming line and common line.In addition, the capacitor C1-1 before LC is used for removing high fdrequency component that power supply wave shape is loaded with and for reducing loss, preferably the very little capacitor of electric capacity.The cut-off frequency of low pass filter is considered from the viewpoint of power supply wave shape, noise, and (being the number of times of IGBT conduction and cut-off within 1 second, is 20KHz in the present embodiment to be set as switching frequency.) 1/10～1/40 (500Hz～2KHz).Therefore, can end high frequency component and will supply with reliably heater 7 as the power about purpose industrial frequency (50Hz or 60Hz).
Input side filter circuit 10 suppresses because making IGBT converter 11 switch with high speed, high frequency the electromagnetic noise that action produces.Therefore, can be suppressed at the electromagnetic noise of responding in the incoming line of the IGBT converter 11 that is connected with AC power 1 side, thereby can prevent from producing noise failure in AC power.
Outlet side filter circuit 30 and input side filter circuit 10 similarly, are to have used the low pass filter of LC by filtering mode, have the structure of filtering key element by the arranged in order of LCC.Coil L is divided into L2-1 and L2-2 and inserts outlet line and common line.In addition, the capacitor C2-2 after LC also as described in input side filter circuit 10, is for the capacitor of removing the high fdrequency component that power supply wave shape is loaded with.And then the cut-off frequency of this low pass filter is 500Hz～2KHz too.
Filtering (make its level and smooth) is carried out in 30 pairs of outputs of being switched by IGBT converter 11 and obtaining of outlet side filter circuit, and effectively removes high fdrequency component contained in output.
Interchange is directly switched with the basic carrier frequency of high speed, high frequency by above-mentioned IGBT2.For example based on the switching instant of PWM mode, from the interchange detection zero cross point of supply source, take this zero cross point as benchmark, calibrate control signal (pwm signal).Then, switch the interchange of supply source and obtain pulse modulated wave with the carrier frequency after calibration, it is supplied with heater 7 by outlet side filter circuit 30.From the control signal of changeable frequency circuit 15 outputs, change the duty ratio of the control signal on the grid (arm) that is applied to IGBT according to variation (temperature, power, load).
Fig. 8 is the figure that the voltage waveform of the switching action of major part of supply power adjusting apparatus shown in Figure 7 and each point ((a)～(e), (f)～(i)) is shown.Describe the effect of IGBT converter 11 in detail with Fig. 8.At first, as shown in (a) with the voltage waveform A supply side daughter board TB1 of industrial frequency AC power.The incoming frequency of the pwm signal that will apply IGBT converter 11 by arm is fixed on 20KHz (50 μ sec).The upper arm of IGBT2 and underarm are applied respectively copped wave section pwm signal as shown in (b), (c).The output voltage waveforms B of IGBT converter 11, only (when applying pwm signal) makes the energising of industrial frequency AC power when the IGBT2 conducting, when IGBT2 ends, the energising of industrial frequency AC power cut off, and therefore becomes (d) such output waveform.This output is carried out smothing filtering by outlet side filter circuit 30, and exports the voltage waveform C of the little industrial frequency of (e) such distortion by minute adapted terminal board (TB2) from outlet side filter circuit 30.The time of by change IGBT2 conducting like this, is controlled the voltage peak of the service voltage that outputs to final load.Therefore, utilize the pwm signal that IGBT2 is applied to using in IGBT converter 11, can not change the frequency of service voltage and only peak value be controlled in 0～70% scope and export to load.
In addition, when the pulsewidth of the copped wave section pwm signal that makes like that the upper arm that is applied to IGBT2 and underarm as (f), (g) during greater than the pulsewidth as shown in above-mentioned (b), (c), the output voltage waveforms B of IGBT converter 11 becomes (h) such waveform, voltage waveform C to the service voltage of final load output can make voltage peak greater than the peak value of above-mentioned (e) as (i).
Owing to by the IGBT2 that is assembled in IGBT converter 11, alternating voltage directly being switched, therefore the input side at IGBT converter 11 does not need the diode full-wave rectifying circuit.
As the IGBT2 of the switching device that consists of this IGBT converter 11, be the grid that voltage drives have been carried out the bipolar power transistor of combination, the consumption of grid driving power is applicable to switch at a high speed less.And owing to being high frequency and jumbo element, conducting voltage reduces significantly than MOSFET (SSR).Control this IGBT2 in order to reduce reactive power with high frequency.
Variations in temperature checkout gear 24 detects the variations in temperature of heater 7, and the feedback signal corresponding with this variation outputed to changeable frequency circuit 15.This variations in temperature checkout gear 24 has as the temperature measuring of temperature sensor to be used thermocouple 8 and is used for regulating the thermoregulator 9 of heter temperature.
Temperature measuring arranges required number near heater 7 with thermocouple 8, measure heter temperature according to thermo-electromotive force.Thermoregulator 9 is obtained the mensuration temperature of the heater 7 that is measured to thermocouple 8 by temperature measuring and the temperature difference (variations in temperature) of design temperature, calculate according to this temperature difference and should supply with the quantity of power of heater 7, and result of calculation is outputed to changeable frequency circuit 15 as feedback signal.In addition, when temperature anomaly being detected, thermoregulator 9 is gone back output alarm signal.
The variation that power source change checkout gear 22 detects from the power output of input side filter circuit 10 outputs to changeable frequency circuit 15 with the feed-forward signal corresponding with this variation.This power source change checkout gear 22 have the electric current that the output that is determined at input side filter circuit 10 flows through power pack 12, measure voltage determination circuit 13 and the supply voltage current feed-forward circuit 14 of voltage of the output line of input side filter circuit 10.Be to detect the variation of power output, supply voltage current feed-forward circuit 14 is obtained the poor of the mensuration electric current measured by power pack 12 and the mensuration voltage of setting difference between currents and being measured by voltage determination circuit 13 and setting voltage.These poor products (power) are exactly power source change.This power source change is outputed to changeable frequency circuit 15 as feed-forward signal.
Load variations checkout gear 23 detects the variation of the power output of supplying with heater 7, and the feedback signal corresponding with this variation outputed to changeable frequency circuit 15.This load variations checkout gear 23 has the voltage determination circuit 17 of the output voltage between lines of measuring outlet side filter circuit 30, the power pack 18 of measuring the electric current that flows through heater 7 and control feedback of voltage and current circuit 16.In order to detect load variations, control mensuration electric current and setting difference between currents that feedback of voltage and current circuit 16 is obtained the mensuration voltage measured by voltage determination circuit 17 and the poor of setting voltage and measured by power pack 18.These poor products (power) are exactly load variations.This load variations is outputed to changeable frequency circuit 15 as feedback signal.
In addition, for the variation of sensing lead electric current accurately, also power pack 18 can be arranged on by dividing heater 7 one sides in adapted terminal board 6 outsides.
By IGBT being carried out FREQUENCY CONTROL and frequency is roughly changed continuously, thereby control the power that is applied on heater 7.The changeable frequency amplitude is more powerful controlled better.
Based on the FREQUENCY CONTROL of changeable frequency circuit 15, from changing on the frequency this point, control identical with the VF (variable frequency) that VVVF controls.In this FREQUENCY CONTROL, also comprise making that basic carrier frequency is constant and PWM that control duty ratio controls.Each that VF controls, PWM controls is to make the IGBT conducting when 0 voltage, is all therefore that zero crossing is controlled.
In the supply power adjusting apparatus 21 of above-mentioned execution mode, thermoregulator 9 and changeable frequency circuit 15 are controlled as follows so that the temperature of heater 7 becomes design temperature.
Thermoregulator 9 is obtained the temperature difference of measuring temperature and design temperature, and according to this temperature difference, calculating should be supplied with the quantity of power of heater 7, and result of calculation is outputed to changeable frequency circuit 15.Changeable frequency circuit 15, the grid control signal that will have the frequency corresponding with the output valve of thermoregulator 9 is applied to IGBT converter 11.IGBT converter 11 will be transformed to from the AC power of input side filter circuit 10 outputs the AC power of the frequency corresponding with the grid control signal of changeable frequency circuit 15, and supply with heater 7 by outlet side filter circuit 30.By to heater 7 supply powers, the temperature of heater 7 changes.
Detect → control by such variations in temperature calculating → output valve output → temperature variation → variations in temperature detection → ... such closed circuit carries out FEEDBACK CONTROL.Owing to determining output variables by thermoregulator 9 and changeable frequency circuit 15 after the detected temperatures state, thereby can carry out well FEEDBACK CONTROL.Therefore, can supply with stable power to heater 7 by the variations in temperature of proofreading and correct heater, and heater 7 can be remained on predetermined temperature.And, because FREQUENCY CONTROL is that zero crossing is controlled, therefore can there is no the high efficiency control of reactive power.
When as described above heter temperature being carried out FEEDBACK CONTROL well, if the voltage of AC power 1 changes, this change in voltage will show as curent change and change in voltage in the output of input side filter circuit 10.This curent change and change in voltage are measured by power pack 12 and voltage determination circuit 13, and are detected by supply voltage current feed-forward circuit 14.15 inputs change corresponding control signal with this power from supply voltage current feed-forward circuit 14 to the changeable frequency circuit.Changeable frequency circuit 15 utilizes this signal, the grid control signal of the frequency that output is corresponding with the difference of power and setting power.This grid control signal is applied to IGBT converter 11 IGBT converter 11 is carried out FREQUENCY CONTROL.Therefore, change in voltage that can corrected AC power supply 1 is supplied with stable power to heater 7.And, because FREQUENCY CONTROL is that zero crossing is controlled, thereby can there is no the high efficiency control of reactive power.By this feedfoward control, improved from input side filter circuit (AC power) 10 to temperature measuring with the response characteristic of thermocouple 8.
In addition, when as described above heter temperature being carried out FEEDBACK CONTROL well, (such as touching outside air etc.) or the character of heater slightly change and load are changed if get muddled on heater 7, show as the variation of the power output of IGBT converter 11.That is the load voltage that, flows through the load current of heater 7 and put on heater 7 changes.This curent change and change in voltage are detected by power pack 18 and voltage determination circuit 17, and measure by controlling feedback of voltage and current circuit 16.Change corresponding signal to 15 inputs of changeable frequency circuit with this power from controlling feedback of voltage and current circuit 16.Changeable frequency circuit 15 utilizes this signal, the grid control signal of the frequency that output is corresponding with the difference of power and setting power.This grid control signal is put on IGBT converter 11 line frequency of going forward side by side to be controlled.Therefore, can change to come to the heater 7 stable power of supply by revising load.And, because FREQUENCY CONTROL is that zero crossing is controlled, can there is no the high efficiency control of reactive power.
This load variations is controlled, and controls with the variations in temperature that detects these 3 steps by disorder → heter temperature variation → thermocouple and compares, and detects these 2 steps for disorder → power changes, and therefore can omit the step that thermocouple detects, thereby accelerate response speed.
In the above-described embodiment, have power source change checkout gear 22, load variations checkout gear 23, variations in temperature checkout gear 24, changeable frequency circuit 15 in supply power adjusting apparatus 21, no matter but this mode how, as for example regulating to the well-known power governor of load (heater) supply power and the device of output control signal, power source change checkout gear 22, load variations checkout gear 23, variations in temperature checkout gear 24, changeable frequency circuit 15 can be set and it is used in combination.
IGBT exported the processing of grid control signal with regard to another execution mode explanation changeable frequency circuit 15 according to the variable signal from power source change checkout gear 22, load variations checkout gear 23, variations in temperature checkout gear 24 with Fig. 9.
Power source change checkout gear 22, the voltage that the electric current of by AC/ DC transducer 22a, 22b, power pack 12 being measured respectively, voltage determination circuit 13 are measured is converted to DC from effective value (RMS), carried out the calculating of electric current (DC) * voltage (DC)=primary side power by calculator 22c, and be input to changeable frequency circuit 15 as primary side power source change feedback signal FB 1.
Load variations checkout gear 23, the voltage that the electric current of by AC/ DC transducer 23a, 23b, power pack 18 being measured respectively, voltage determination circuit 17 are measured is converted to DC from effective value (RMS), carried out the calculating of electric current (DC) * voltage (DC)=secondary side power by calculator 23c, and be input to changeable frequency circuit 15 as secondary side power source change feedback signal FB2.
Variations in temperature checkout gear 24 will be input to changeable frequency circuit 15 as power setting signal from the signal of thermoregulator 9 outputs.
In structure as above, when changeable frequency circuit 15 being inputted respectively primary side power source change feedback signal FB1 and secondary side load variations feedback signal FB2, primary side power source change feedback signal FB1 and secondary side load variations feedback signal FB2, adjust gain by power gain adjuster 15a, 15b, and be reversed to by inverter 15d, 15e and be input to adder 15f after negative.Then, in adder 15f, the feedback signal FB1 ' (FB2 ') during with power output setting signal in advance and feedback signal FB1 (FB2) compare, and its difference is as power source change (load variations) and power setting signal addition.
When from variations in temperature checkout gear 24 to changeable frequency circuit 15 power output setting signal, power setting signal is carried out gain-adjusted and is input to adder 15f by power setting fader 15c.When power source change or load variations occur when, the changing unit that changeable frequency circuit 15 will carry out the primary side power source change feedback signal FB1 of gain-adjusted and secondary side load variations feedback signal FB2 as described above in adder 15f with the power setting signal addition, and the power setting signal of the best is exported as grid control signal (IGBT frequency setting signal).
As using in this wise high frequency and jumbo IGBT control with the element of semiconductor variable parallel operation and have introduced in the FEEDBACK CONTROL to variations in temperature to the feedfoward control of power source change with to the FEEDBACK CONTROL of load variations as consisting of the high speed power switched, so temperature stability, extremely good to the stability of power conversion and load variations, thereby can make heter temperature obtain very high stability.Especially, mains voltage variations and load variations this point have also been introduced except variations in temperature, owing to adopting the IGBT as high frequency and large volume element just to become first possibility.
Fig. 2 is the specific description figure of above-mentioned input side filter circuit 10, IGBT converter 11, outlet side filter circuit 30.
Input side filter circuit 10 and outlet side filter circuit 30 are all to be made of conventional filter circuit.That is, input side filter circuit 10 by and the choke ACL1 that is connected in series of incoming line 31 and consisting of at a plurality of capacitor CF1～CF6 that are connected in parallel between with the incoming line 31 of IGBT converter 11a one side and common line 33 by power of choke ACL1.When consisting of input side filter circuit 10 by conventional filter circuit, can effectively make the electromagnetic noise decay of sewing from IGBT converter 11 to input side.
In addition, outlet side filter circuit 30 by and the choke ACL2 that is connected in series of incoming line 32 and choke ACL2 by the outlet line 32 of heater 7 one sides and common line 33 between a plurality of capacitor CF7～CF12 of being connected in parallel consist of.When consisting of outlet side filter circuit 30 by conventional filter circuit, can effectively contained high fdrequency component from the AC power of IGBT converter 11 outputs be removed.And, if do not establish the conventional filter of element on common line 33, just can effectively make the spiking component (back electromotive force) of high frequency return to regeneration IGBT converter 11b by heater 7 from common line 33.Consequently, do not have energy to discharge on common line 33, can effectively carry out regenerative power, thereby can improve the energy efficiency of AC power 1.
Power is made of prime commutation circuit IGBT1, the buffer circuit CRF1 of high speed rectification circuit FRD1, the up and down two-stage of connecting, the rear class commutation circuit IGBT2 (part of choke) of the up and down two-stage of connecting with IGBT converter 11a.In Fig. 2, because current flowing has much been prepared two IGBT.As changing method, power is controlled (pulse-width modulation) by PWM as described above and is carried out on/off control with IGBT converter 11a.The positive and negative judgement action of supply voltage is carried out in regeneration with IGBT converter 11b.Can be preferably that pure resistor load or the pure resistor load with inductive load count the circuit structure of regulating time of delay in switching action by load.
High speed rectification circuit FRD1 is made of the high speed rectifier cell that connects the centre cap type of incoming line 31 at centre cap, the AC rectification of the supply source that will apply from incoming line 31 is positive half-wave and negative half-wave, and is assigned to higher level and the subordinate of prime commutation circuit IGBT1 according to polarity.
Prime commutation circuit IGBT1 and rear class commutation circuit IGBT2, the IGBT of the Dual-arm that is comprised of series connection up and down two-stage consists of.Fly-wheel diode is being connected in parallel in each IGBT.Prime commutation circuit IGBT1 and rear class commutation circuit IGBT2 parallel running, respectively by higher level's IGBT to the positive half-wave that distributed by high speed rectification circuit FRD1, by the IGBT of subordinate, negative half-wave is directly switched.
Buffer circuit CRF1 is made of Dual-arm equally, be connected with rear class commutation circuit IGBT2 with prime commutation circuit IGBT1 and be connected, produce in circuit when being used for making each IGBT cut-off that consists of these circuit and the electric current that flows through by fly-wheel diode FWD falls as heat exhaustion.
Power is distributed the interchange that puts on input circuit 31 according to polarity by high speed rectification circuit FRD1 with IGBT converter 11a, switch by prime commutation circuit IGBT1 and rear class commutation circuit IGBT2 and obtain AC power, this AC power is put on outlet side filter circuit 30.The back electromotive force that will be produced in IGBT converter 11a at power by buffer circuit CRF1 in addition, becomes heat loss.
Regeneration with IGBT converter 11b by the commutation circuit IGBT3 of the Dual-arm of the high speed rectification circuit FRD2 that connects the centre cap type of common line 33 at centre cap, series connection up and down two-stage, and buffer circuit CRF2, the CRF3 of two single armed types that are connected in parallel at different levels of commutation circuit IGBT3 consist of.
Use in IGBT converter 11b in this regeneration, produce and return to next back electromotive force from common line 33 beyond being distributed in IGBT converter 11 by high speed rectification circuit FRD2 according to polarity, at different levels directly interchange the switching according to polarity by commutation circuit IGBT3 obtains regenerating power, and this regenerating power is returned to AC power 1 by power IGBT converter 11a, input side filter circuit 10.In addition, in buffer circuit CRF2, CRF3, the back electromotive force that will produce in regenerating with IGBT converter 11b becomes heat loss.
What one of semi-conductive operation was made in the conduct that Figure 10 illustrates one embodiment of the present invention heat-treats the oblique view of an example of annealing device 110 of the semiconductor-fabricating device of use to Semiconductor substrate.This annealing device 110 is the batch-type longitudinal type thermal treatment facility, has the housing 112 of configuration major part.
Back side upside in housing 112 disposes reacting furnace 140.The substrate keeper 130 that has loaded a plurality of substrates is sent in this reacting furnace 140 and heat-treated.
Figure 11 illustrates an example of the cutaway view of reacting furnace 140.This reacting furnace 140 has the reaction tube 142 of quartzy system.The drum that this reaction tube 142 opens wide for sealing bottom, upper end.Dispose the connecting portion 144 of quartzy system with supporting reaction tube 142 below this reaction tube 142.Consist of reaction vessel 143 by reaction tube 142 and connecting portion 144.In addition, the reaction tube except connecting portion 144 142 in reaction vessel 143 around dispose heater 146.
The lower open of the reaction vessel 143 that is formed by reaction tube 142 and connecting portion 144 is in order to insert substrate keeper 130.This open section (fire door section) is sealed closing by the lower surface butt that makes fire door sealing plate 148 and connecting portion 144 bottom beads.Fire door sealing plate 148 is configured to support substrate keeper 130, and can with 130 1 liftings of substrate keeper.Substrate keeper 130 separates with the state of approximate horizontal that multilayer supporting with gap is a plurality of, 25～100 substrates 154 for example, and is seated in reaction tube 142.
Be provided with integratedly gas supply port 156 and gas discharge outlet 159 with connecting portion 144 on connecting portion 144.Be connected with gas introduction tube 160 on gas supply port 156, be connected with blast pipe 162 on gas discharge outlet 159 respectively.
Import the processing gas of gas supply port 156 from gas introduction tube 160, supply in reaction tube 142 by gas importing path 164, the nozzle 166 that is arranged on connecting portion 144 side wall portions.
Below, the effect of the annealing device 110 that consists of as described above is described.
In addition, the action that in the following description, consist of annealing device 110, namely is used for each one of the lining processor of heat-treating is controlled by controller 170.
At first, when the container 116 that will receive and keep a plurality of substrates 154 is placed on container plummer 114, by container conveyance apparatus 118, container 116 is transported to container shelf 120 from container plummer 114, is deposited on this container shelf 120.Then, by container conveyance apparatus 118, the container 116 that is deposited on this container shelf 120 is carried and is placed on container opener 122, by this container opener 122, the lid of container 116 is opened, and detect by substrate number detector 124 number that leaves the substrate 154 in container 116 in.
Then, take out substrate 154 and turn from the container 116 of the position that is in container opener 122 by the pliers 132 (Star イ one ザ) of substrate charging crane 126 and install to notch position aligner 128.At notch position aligner 128, Yi Bian make substrate 154 rotations, Yi Bian detect and aligned notches.Then, take out substrate 154 by the pliers 132 of substrate charging crane 126 from notch position aligner 128, and turn and install on substrate keeper 130.
Like this, a collection of substrate 154 is turned install to substrate keeper 130 after, the substrate keeper 130 that has loaded a plurality of substrates 154 is inserted in the reacting furnace 140 (reaction vessel 140) that for example is set as 600 ℃ of left and right temperature, and by fire door sealing plate 148 with the interior sealing of reacting furnace 140.Then, temperature in stove is warmed up to heat treatment temperature, and imports path 164 and nozzle 166 from gas introduction tube 160 by gas supply port 156, the gas that is arranged on connecting portion 144 side wall portions and will process gas and import in reaction tube 142.When substrate 154 is heat-treated, substrate 154 is heated to for example design temperature of 1000 ℃.When the supply power regulated in order to reach design temperature heater, the supply power adjusting apparatus of execution mode is used as the part of above-mentioned controller 170.
When the heat treatment of substrate 154 finishes, greenhouse cooling is after the temperature of for example 600 ℃ of left and right in stove, the substrate keeper 130 of the substrate 154 after supporting hot is processed is from the interior taking-up of reacting furnace 140, during cooling by all substrates 154 of substrate keeper 130 supportings, make substrate keeper 130 in the precalculated position standby.Then, when the substrate 154 of the substrate keeper 130 of standby is cooled to predetermined temperature, take out substrates 154 by substrate charging crane 126 from substrate keeper 130, carry and be stored in the container 116 that is placed on the sky on container opener 122.Then, the container 116 that will have been received and kept substrate 154 by container conveyance apparatus 118 is transported to container shelf 120 or container plummer 114, thereby completes a series of processing.
As mentioned above, according to the supply power adjusting apparatus of execution mode, can access following effect.
Owing to directly being switched the alternating voltage of AC power by the IGBT converter, thereby do not need the diode full-wave rectifying circuit of IGBT converter prime, thereby can realize small-sized supply power adjusting apparatus.
For example, although full-wave rectifying circuit also depends on its capacity, size is approximately 200 (W) * 350 (D) * 100 (H) in the 200A grade.Overall dimension with supply power adjusting apparatus of such full-wave rectifying circuit is approximately 600 (W) * 800 (D) * 1200 (H).In the present embodiment, owing to there is no full-wave rectifying circuit, thereby the whole size of supply power adjusting apparatus can be reduced to 80% of about its size.
In addition, the electromagnetic noise that produces in the IGBT converter is suppressed by the input side filter circuit, so can prevent that electromagnetic noise from sneaking into AC power.Therefore, can prevent from occuring noise failure in AC power.And, can be suppressed at inductive electromagnetic noise the input cable from AC power to the IGBT converter.
In addition, the high fdrequency component that contains in the output of IGBT converter is suppressed by the outlet side filter circuit, the high fdrequency component in the AC power of supplying with heater that therefore can decay.
In addition, owing to having regeneration with the IGBT converter and will regenerating and return to AC power at the back electromotive force that the IGBT converter produces in addition, therefore can improve the energy efficiency of AC power.Especially, the IGBT converter switches action with high-speed high frequency, and the frequency of back electromotive force also correspondingly increases, thereby carries out regenerative power continually, so help very much the raising of energy efficiency.
Owing to having introduced in the FEEDBACK CONTROL of variations in temperature, mains voltage variations is carried out feedfoward control, load variations is carried out FEEDBACK CONTROL, therefore can provide temperature stability good control system.And, can carry out stable power and control, the convenience of use improves.
Owing to being that zero crossing is controlled, there is no reactive power on principle, thereby can effectively utilize power, and high efficiency supply power adjusting apparatus can be provided.
Owing to adopting original thermoregulator 9, its output is applied to changeable frequency circuit 15 and exports the grid control signal of IGBT, thereby have interchangeability with existing system, only change just can change to native system from existing system at an easy rate a little.In addition, can thermoregulator not used original adjuster yet, and similarly computing function is transplanted in changeable frequency circuit 15 with the situation of power source change or load variations, make thermoregulator constitute the circuit that a detected temperatures changes.
By adopting the high speed switching device, can save power also can be without obtaining lavishly required power.Especially, due to the IGBT that uses as high-frequency component, thereby temperature-responsive is good, and is suitable for detesting near the heater control of instrumentation circuit of noise.
In addition, in the above-described embodiment, except variations in temperature is controlled, also introduced the control to mains voltage variations and load variations, but also can only control mains voltage variations in variations in temperature is controlled or only load variations be controlled in variations in temperature is controlled.For the former, thereby the change in voltage that can proofread and correct supply power obtains stable power.For the latter, can suppress the load variations of heater.
According to the embodiment of the present invention, the misoperation that can reduce to become use equipment damages and then the high speed of reason that becomes the misoperation of ancillary equipment produces when switching surge current or high-frequency noise, thereby can the little good sine wave of output distortion.
In addition, the supply power adjusting apparatus 21 of above-mentioned execution mode can be used for having the semiconductor-fabricating device by the reacting furnace of heater heating.Reacting furnace is made of the reactor of quartz ampoule and the tubular that this quartz ampoule heated from the outside.Use the supply power adjusting apparatus of execution mode in order to heat this heater.As use above-mentioned supply power adjusting apparatus in semiconductor-fabricating device, just can access stable heter temperature, therefore can access high performance semiconductor device.
Below, remarks optimal way of the present invention.
The first mode is a kind of supply power adjusting apparatus, it is characterized in that, comprising: the IGBT converter is the AC power corresponding with the frequency of control signal with the AC voltage conversion of AC power, and this AC power is supplied with heater; The input side filter circuit is arranged on the input side of above-mentioned IGBT converter, is used for being suppressed at the electromagnetic noise that above-mentioned IGBT converter produces; Outlet side filter circuit 30 is arranged on the outlet side of above-mentioned IGBT converter, is used for suppressing the high fdrequency component that contains from the AC power of above-mentioned IGBT converter output; The variations in temperature checkout gear, the variations in temperature of the above-mentioned heater of detection; The power source change checkout gear, the power source change of the above-mentioned AC power of detection from the alternating voltage of being supplied with above-mentioned IGBT converter by above-mentioned AC power; The load variations checkout gear detects load variations from the AC power of being supplied with above-mentioned heater by above-mentioned IGBT converter; And frequency varying device, each testing result according to said temperature change detecting device, above-mentioned power source change checkout gear and above-mentioned load variations checkout gear, calculating should be supplied with the quantity of power of above-mentioned heater, and controls the frequency of the above-mentioned control signal that puts on above-mentioned IGBT converter according to this result of calculation.
According to the manner, owing to directly being switched the alternating voltage of AC power by the IGBT converter, thereby do not need the rectification circuit of IGBT converter prime, thereby can realize small-sized power supply.
In addition, can be suppressed at the electromagnetic noise that produces in the IGBT converter by the input side filter circuit, thereby can prevent that electromagnetic noise from sneaking into AC power.
In addition, the high fdrequency component that contains in the output by outlet side filter circuit 30 inhibition IGBT converters, thereby can prevent from containing high fdrequency component in the AC power of supplying with heater.
In addition, by being changed by variations in temperature checkout gear detected temperatures, calculating the quantity of power corresponding with this testing result by frequency varying device, and according to this result of calculation, the IGBT converter is carried out FREQUENCY CONTROL, thereby can carry out FEEDBACK CONTROL to the supply power of heater accordingly with variations in temperature.Therefore, the temperature of heater can be remained on predetermined temperature well.
In addition, when AC power changed, this variation showed as the variation of power at the input side of IGBT converter.Change, calculate the quantity of power corresponding with this testing result and according to this result of calculation, the IGBT converter carried out FREQUENCY CONTROL by frequency varying device by detected this power by the power source change checkout gear, thereby can carry out feedfoward control to the supply power for power source change.Therefore, can be suppressed at when carrying out FEEDBACK CONTROL well the disorder to heter temperature that changes and make the supply power amount to heater change and produce due to power supply.
In addition, when load variations, this variation shows as the variation to the power of heater fed.Change, calculate the quantity of power corresponding with this testing result and according to this result of calculation, the IGBT converter carried out FREQUENCY CONTROL by frequency varying device by detected this power by the load variations checkout gear, thereby can carry out FEEDBACK CONTROL to the supply power for load variations.Therefore, can be suppressed at when carrying out FEEDBACK CONTROL well, load changes and produces the disorder of the heter temperature that very large disorder occurs because load variations makes control to the supply power amount of heater.
Like this, owing to adopting the IGBT converter and having introduced in the FEEDBACK CONTROL to variations in temperature to the feedfoward control of power source change with to the FEEDBACK CONTROL of load variations, so temperature stability, extremely good for the stability of power conversion and load variations, thereby can make heter temperature obtain very high stability.In addition, switch action owing to carrying out high speed in the IGBT converter, temperature-responsive is good.And owing to being control without the compensation of phase advance capacitor, the convenience of use also improves.And then owing to consisting of converter with IGBT, transient response is good especially.And, because the FREQUENCY CONTROL of IGBT is that zero crossing is controlled, can improve the efficient of power supply.
The second mode is another kind of supply power adjusting apparatus, it is characterized in that, above-mentioned IGBT converter has the regeneration IGBT converter that the back electromotive force that the switching action because of this IGBT converter is produced is regenerated and returned to above-mentioned AC power.
Return to AC power because the IGBT converter has regeneration with the IGBT converter and after regenerating as the back electromotive force that heat energy is emitted, can improve the energy efficiency of AC power.
Third Way is that the supply power adjusting apparatus of the first mode or the second mode is used the semiconductor-fabricating device of power supply as heater.Obtain the first mode of high stability or the supply power adjusting apparatus of the second mode owing to having the heter temperature of making, thereby can make high performance semiconductor device.
Claims (9)
1. supply power adjusting apparatus is converted to the alternating voltage of AC power with the corresponding AC power of the frequency of control signal and adjusts supply power to load, it is characterized in that, comprising:
At two power IGBT converters that prime and rear class are connected in parallel, it is made of up and down two-stage series connection higher level's together IGBT converter and the IGBT converter of subordinate respectively; With
The power rectification circuit becomes positive half-wave and negative half-wave with above-mentioned ac voltage rectifier, and according to polarity, it is distributed to above-mentioned two power with two IGBT converters of the above-mentioned higher level of IGBT converter and two IGBT converters of above-mentioned subordinate,
In two IGBT converters of the above-mentioned higher level of above-mentioned two power use IGBT converter and two IGBT converters of above-mentioned subordinate, distributed two IGBT converters of the positive half-wave of above-mentioned alternating voltage with rectification circuit by above-mentioned power, during above-mentioned alternating voltage is positive half-wave, based on above-mentioned control signal, above-mentioned positive half-wave is changed; During above-mentioned alternating voltage is for negative half-wave, be set to closed condition,
In two IGBT converters of the above-mentioned higher level of above-mentioned two power use IGBT converter and two IGBT converters of above-mentioned subordinate, distributed two IGBT converters of the negative half-wave of above-mentioned alternating voltage with rectification circuit by above-mentioned power, during above-mentioned alternating voltage is positive half-wave, be set to closed condition; During above-mentioned alternating voltage is for negative half-wave, based on above-mentioned control signal, above-mentioned negative half-wave is changed.
2. supply power adjusting apparatus according to claim 1, is characterized in that,
Also comprise buffer circuit,
Utilize above-mentioned buffer circuit that above-mentioned two power are consumed as heat with the back electromotive force that two IGBT converters of two IGBT converters of the above-mentioned higher level of IGBT converter and above-mentioned subordinate produce when cutting out.
3. supply power adjusting apparatus according to claim 1, is characterized in that,
Also comprise regeneration IGBT converter,
Above-mentioned regeneration is changed and obtains regenerating power with the back electromotive force that the IGBT converter returns producing in above-mentioned load-side, and this regenerating power is returned to above-mentioned AC power via above-mentioned two power with the IGBT converter.
4. supply power adjusting apparatus according to claim 3, is characterized in that,
Above-mentioned regeneration comprises the IGBT converter of together, the IGBT converter higher level of up and down two-stage series connection and subordinate with the IGBT converter,
Also comprise above-mentioned back electromotive force is rectified into positive half-wave and negative half-wave, and according to polarity, it distributed to above-mentioned regeneration with the regeneration rectification circuit of the IGBT converter of the above-mentioned higher level's of IGBT converter IGBT converter and above-mentioned subordinate,
In the higher level's of above-mentioned regeneration use IGBT converter IGBT converter and the IGBT converter of subordinate, the IGBT converter of the positive half-wave of above-mentioned back electromotive force is provided with rectification circuit by above-mentioned regeneration, during above-mentioned back electromotive force is positive half-wave, this positive half-wave is changed and obtained regenerating power, and this regenerating power is returned to above-mentioned AC power via above-mentioned two power with the IGBT converter, during above-mentioned back electromotive force is for negative half-wave, be set to closed condition
In the higher level's of above-mentioned regeneration use IGBT converter IGBT converter and the IGBT converter of subordinate, the IGBT converter of the negative half-wave of above-mentioned back electromotive force is provided with rectification circuit by above-mentioned regeneration, during above-mentioned back electromotive force is positive half-wave, be set to closed condition; During above-mentioned back electromotive force is for negative half-wave, this negative half-wave is changed and obtained regenerating power, and this regenerating power is returned to above-mentioned AC power via above-mentioned two power with the IGBT converter.
5. supply power adjusting apparatus according to claim 4, is characterized in that,
Also comprise and be connected in respectively above-mentioned two power in parallel with the fly-wheel diode on two IGBT converters of two IGBT converters of the above-mentioned higher level of IGBT converter and above-mentioned subordinate.
6. supply power adjusting apparatus according to claim 5, is characterized in that,
Also comprise buffer circuit, this buffer circuit makes above-mentioned two power produce when cutting out with two IGBT converters of the above-mentioned higher level of IGBT converter or two IGBT converters of above-mentioned subordinate, and mobile electric current consumes as heat by above-mentioned fly-wheel diode.
7. supply power adjusting apparatus according to claim 1, is characterized in that,
Also comprise:
The temperature change checkout gear, its temperature change to above-mentioned load detects;
Power supply change checkout gear, it offers above-mentioned two power according to above-mentioned AC power and detects the power supply change of above-mentioned AC power with the AC power of IGBT converter; And
The load change checkout gear, it detects load change according to the AC power that offers above-mentioned load.
8. supply power adjusting apparatus according to claim 7, is characterized in that,
Also comprise frequency varying device, the detection that this frequency varying device changes checkout gear, above-mentioned power supply change checkout gear and above-mentioned load change checkout gear according to said temperature exports to control the frequency of above-mentioned control signal.
9. a semiconductor-fabricating device, is characterized in that,
Has the supply power adjusting apparatus that in claim 1-8, the described supply power adjusting apparatus conduct of any one is regulated the supply power that offers heater.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2005107931 | 2005-04-04 | ||
| JP107931/2005 | 2005-04-04 |
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| CN2006800062069A Division CN101128972B (en) | 2005-04-04 | 2006-04-03 | Supply power adjusting apparatus and semiconductor manufacturing apparatus and its manufacture method |
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| CN101902131B true CN101902131B (en) | 2013-06-26 |
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| CN2006800062069A Active CN101128972B (en) | 2005-04-04 | 2006-04-03 | Supply power adjusting apparatus and semiconductor manufacturing apparatus and its manufacture method |
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| CN201010546627.9A Active CN102122892B (en) | 2005-04-04 | 2006-04-03 | Supply power adjusting apparatus and semiconductor manufacturing apparatus |
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| JP (2) | JP5204481B2 (en) |
| KR (2) | KR100966375B1 (en) |
| CN (3) | CN101902131B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20090042874A (en) | 2009-04-30 |
| CN101128972A (en) | 2008-02-20 |
| HK1112536A1 (en) | 2008-09-05 |
| JPWO2006107013A1 (en) | 2008-09-25 |
| CN101902131A (en) | 2010-12-01 |
| JP2013118385A (en) | 2013-06-13 |
| CN102122892A (en) | 2011-07-13 |
| CN101128972B (en) | 2010-12-29 |
| JP5204481B2 (en) | 2013-06-05 |
| KR100966375B1 (en) | 2010-06-28 |
| CN102122892B (en) | 2014-02-12 |
| KR20070102571A (en) | 2007-10-18 |
| WO2006107013A1 (en) | 2006-10-12 |
| KR100940306B1 (en) | 2010-02-05 |
| HK1157078A1 (en) | 2012-06-22 |
| JP5727450B2 (en) | 2015-06-03 |
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