CN101876490B - Solar energy medium-high temperature selective heat absorbing coating - Google Patents
Solar energy medium-high temperature selective heat absorbing coating Download PDFInfo
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- CN101876490B CN101876490B CN200910214222A CN200910214222A CN101876490B CN 101876490 B CN101876490 B CN 101876490B CN 200910214222 A CN200910214222 A CN 200910214222A CN 200910214222 A CN200910214222 A CN 200910214222A CN 101876490 B CN101876490 B CN 101876490B
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- 238000000576 coating method Methods 0.000 title claims abstract description 56
- 239000011248 coating agent Substances 0.000 title claims abstract description 53
- 239000010410 layer Substances 0.000 claims abstract description 97
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000002360 preparation method Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000002131 composite material Substances 0.000 claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 239000011521 glass Substances 0.000 claims abstract description 9
- 239000002356 single layer Substances 0.000 claims abstract 3
- 239000002245 particle Substances 0.000 claims description 25
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 16
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 239000002105 nanoparticle Substances 0.000 abstract description 4
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- 239000004332 silver Substances 0.000 abstract description 2
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 27
- 229910017083 AlN Inorganic materials 0.000 description 14
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 9
- 238000001228 spectrum Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
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- 230000008021 deposition Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- 229910017150 AlTi Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002905 metal composite material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000000985 reflectance spectrum Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000010512 thermal transition Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018509 Al—N Inorganic materials 0.000 description 1
- 101100478231 Caenorhabditis elegans spr-2 gene Proteins 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
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- 239000011195 cermet Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- 238000002329 infrared spectrum Methods 0.000 description 1
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- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/225—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption for spectrally selective absorption
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
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Abstract
The invention provides a solar energy medium-high temperature selective heat absorbing coating which has high stability under an atmospheric condition. The coating which comprises an infrared reflection layer, an absorbing layer and a medium antireflection layer from bottom to top is to be coated on a substrate of a solar energy heat-collecting element. The coating is characterized in that: the absorbing layer is a silver nanoparticle absorbing layer which is a metal ceramic composite film formed by mixing silver nanoparticles and other transparent mediums; the absorbing layer is prepared by the following steps of: preparing monolayer transparent medium composite films which have different doping densities of the silver nanoparticles on a glass substrate by adopting a megnetron sputtering deposition method; and superimposing two layers of or more monolayer transparent medium composite films to obtain the absorbing layer. The solar energy medium-high temperature selective heat absorbing coating has high stability, high suitability for making use of medium-high temperature solar energy. Besides, the coating has simple preparation process, proper cost, and suitability for large-scale popularization in solar heat utilization.
Description
Technical field
The invention belongs to the solar energy utilization technique field, particularly utilize high-temperature selective heat absorbing coating in the solar energy of magnetron sputtered deposition technology preparation.
Technical background
Ceramic-metal composite is the important topic in investigation of materials field, and the compound special nature that produces of the dimensional effect of metal particle and material makes ceramic-metal composite have unique mechanical, optics and macroscopic property.1978, Switzerland scientist C.G.Granqvist and G.A.Niklasson were used as the solar selectively absorbing coating material with ceramic-metal composite first.Up to the present, the applied metal ceramic composite has been developed the solar energy heat absorbing coating of many function admirables, like Al-AlN, Ni-NiO, W-AlN, Cr-Cr
2O
3, Mo-Al
2O
3Deng.
Solar energy heat absorbing coating is applied on the solar energy heat collection equipment, is divided into low temperature, middle gentle high temperature utilizes coating.Operating temperature is high more, and its thermal transition efficient is also just high more, solar thermal utilization towards in the high temperature direction to develop be inexorable trend.Current China is possessing mature technique aspect the preparation of middle low-temperature solar energy heat absorbing coating, AlN/Al gradual change coating and SS-AlN interfere absorber coatings in the large scale application of solar vacuum-tube water heater field.But elevated temperature heat is utilized the field in solar energy, and the technology of China aspect production of coatings is still immature, and the solar energy heat absorbing coating that development has the high-temperature thermal stability performance is the direction that the field of solar energy worker endeavours always.
What Chinese invention patent CN85100142 related to is a kind of Al-N/Al solar energy heat absorbing coating; Adopt single aluminium negative electrode, active gases is a high pure nitrogen, and solar absorptance is 0.93; Self thermal emissivity is 0.06 (100 ℃); This explained hereafter cycle is short, and cost is low, but the performance of coating descends bigger under elevated operating temperature.
Chinese invention patent CN1159553A relates to a kind of stainless steel-AlN solar energy heat absorbing coating; Adopt bipolar electrode co-sputtered preparation in nitrogen atmosphere; This technology is used to three senior executives' preparation; Be widely used in solar vacuum-tube water heater, but this coating can not be born too high temperature, the influence of interlayer diffusion couple coating performance is bigger under the high temperature.
Chinese invention patent CN1360084A relates to is a kind of [(AlN+TiN)/AlTi] and [(AlNO+TiNO)-AlTi/AlTi] solar energy heat absorbing coating; In air, still has good selective absorbability after the baking in 80 hours under 450 ℃ of temperature; But this explained hereafter cycle is long, and the influence of interlayer diffusion couple coating performance is bigger under the high temperature.
Summary of the invention
The purpose of this invention is to provide high-temperature selective heat absorbing coating in a kind of solar energy that under atmospheric condition, has a high stability.
The structure of high-temperature selective heat absorbing coating comprises three parts in the solar energy according to the invention, is followed successively by base metal infrared reflecting layer, absorbed layer, deielectric-coating antireflection layer to the surface end of from.
The infrared reflecting layer of bottom is metals such as Au, Pt, and its effect is a reflection absorption ftir spectroscopy, reduces the thermal emissivity of coating.
Said absorbed layer is the nano silver particles absorbed layer, employing be that Nano silver grain mixes the metal-ceramic composite film that forms with other transparent medium, the absorbed layer gross thickness is the 20-240 nanometer.Can be made up of heavily doped layer and two sublevels of low doped layer, every layer thickness is between the 10-120 nanometer.Heavily doped layer is made up of medium dopen Nano Ag particle, and its fill factor, curve factor is higher relatively, and generally between 0.2-0.6, (0.3～2.5 μ m) has stronger absorbability to solar spectrum.The composition of low doped layer is identical with heavily doped layer; Fill factor, curve factor is low relatively; Generally between 0.05-0.2; The refractive index size is between heavily doped layer and antireflection layer, and with antireflection layer and film structure that refractive index gradually changes of the common composition of heavily doped layer, the interference effect of generation further increases the absorptivity of coating.
Also can be Nano silver grain be blended among the transparent medium with the mode of grade doping the nano silver particles absorbed layer, and the Nano silver grain concentration in the substrate absorbed layer is high more, and is low more away from the Nano silver grain concentration in the substrate absorbed layer more.The fill factor, curve factor of Nano silver grain excursion from low to high is 0.05-0.6.
Said transparent medium is the oxide or the nitride of metallic aluminium, or the oxide of elemental silicon or nitride.
Antireflection layer is a deielectric-coating, and said medium can be Al
2O
3, AlN, SiO
2Deng material, below with Al
2O
3For example is narrated.Thickness through the control antireflection layer makes film tie up to the certain wave strong point and has antiradar reflectivity, further increases the absorptivity of coating.The acting in conjunction of whole film structure each several part final realizes that the height to solar spectrum absorbs and lower self infra-red heat emission.The thickness of antireflection layer is generally about the 20-100 nanometer.
Absorbed layer is mainly born the absorption to solar spectrum; Nano Ag particles has surface plasma body resonant vibration effect (SPR); Make it have the last one absworption peak at visible region, factors such as strong and full width at half maximum (FWHM) of its peak position, peak and doping content, particle diameter, shape of particle are closely related.Bilayer or multi-layer absorber layer structure can absorb peak position and interfere peak position to realize the height of solar spectrum is absorbed through regulating and control two-layer SPR separately.Because of the SPR absorbent properties of Ag nano particle, can under guaranteeing, reduce the doping content of metallic greatly to the high absorption of solar spectrum prerequisite, the reduction of metal ingredient can reduce the infra-red heat emissivity of coating self effectively, and then improves thermal transition efficient.
The preparation method of Nano silver grain absorbed layer is following: adopt the magnetron sputtering deposition method, the individual layer Ag-Al that preparation has different nano Ag particles doping contents on glass substrate
2O
3Laminated film.When doping content is respectively 0.20,0.24,0.28,0.33,0.38,0.42 and 0.47; The peak position of pairing SPR absworption peak is respectively 385nm, 395nm, 399nm, 401nm, 406nm, 409nm and 412nm, and full width at half maximum (FWHM) is respectively 131nm, 275nm, 282nm, 417nm, 491nm, 506nm and 528nm.Along with the increase of nano Ag particles doping content, the full width at half maximum (FWHM) of SPR absworption peak increases and the peak position red shift.Be Al with transparent medium below
2O
3For example is described further.Be doped in Al for the Ag particle
2O
3In the matrix, theoretical according to MieShi, its extinction coefficient is:
F is the fill factor, curve factor of Ag particle in the formula, ε
0Be parent matrix Al
2O
3Dielectric constant, study in the wave-length coverage in the present invention, can be approximately constant.ε m=ε
1+ i ε
2Dielectric constant for the Ag particle.Can know that from formula K is directly proportional with f, the intensity of absworption peak strengthens with the increase of fill factor, curve factor.Ag-Al
2O
3The microstructural image of film shows that the Ag nano particle is not to be distributed in Al very equably
2O
3In the parent, average grain diameter is greater than 10nm, and some particle and adjacent particles are connected together.In the top formula, work as ε
1+ 2 ε
0=0 o'clock, the K value was maximum, and corresponding wavelength is the SPR peak position.About the dielectric constant of metal particle, draw by the Drude model:
ε in the formula
∞Be the high-frequency dielectric constant that the electronics band-to-band transition causes, ω
PBe plasma frequency, τ is an electronic collision time.When Ag average particle size during greater than a certain threshold value (10nm), SPR absorbs peak position (λ
SPR) red shift with the increase of particle diameter.Along with the continuous increase of fill factor, curve factor, the particle that is connected increases.The particle that is connected has bigger particle diameter, makes Ag-Al
2O
3Have multiple different particle diameter in the laminated film and distribute, the different-grain diameter silver particles surface plasma body resonant vibration absorb the increase that causes SPR absworption peak full width at half maximum (FWHM).When Ag average particle size during greater than a certain value (20nm), full width at half maximum (FWHM) also increases with the increase of particle diameter.So through changing the middle Ag-Al of coating structure
2O
3The preparation condition of absorbed layer, the doping content of control Ag particle can be regulated and control moving and intensity of absworption peak effectively, achieves the optimal absorption to solar spectrum.
Adopt magnetron sputtered deposition technology, the Ag-Al that preparation has four-layer structure on glass and stainless steel substrate
2O
3The solar absorption hot coating.The base metal infrared reflecting layer guarantees thickness greater than 100nm, realizes the height of solar spectrum is absorbed through the doping content and the thickness of each layer in the regulation and control intermediate absorption layer, and be to have certain thickness Al at last on the top layer
2O
3Antireflective coating through optimizing the thickness of antireflection layer, further increases the absorption of coating to solar spectrum.Different parameter is prepared the solar energy heat absorbing coating with different performance; Through changing heavily doped layer thickness and concentration; Can regulate and control the intensity of interfering minimal point with the infrared spectrum place that moves on spectral absorption limit; And then the optimized coatings performance, in addition, factors such as low doped layer thickness and doping content and antireflection layer thickness all affect the performance of whole coating.In conjunction with individual layer Ag-Al
2O
3Relation between laminated film preparation parameter and its optical characteristics is optimized the preparation technology of heat absorbing coating, prepares the solar energy heat absorbing coating of excellent performance.
Solar energy heat absorbing coating of the present invention, at room temperature, coating reaches more than 0.91 the absorptivity of solar spectrum, and heat emission is controlled at about 0.06.Heat treatment is after 70 hours under the high temperature that is placed on 400 ℃ with being coated with, and coating absorptivity and Re Fa lead basically and remain unchanged, and explains that this coating has high stability, extremely is fit to the middle high temperature utilization of solar energy.Another one major technique advantage of the present invention is, preparation technology is simple, and cost is moderate, is adapted in the solar thermal utilization large tracts of land and promotes.
Description of drawings
Fig. 1 is a solar energy heat absorbing coating structural representation according to the invention.Be substrate 1, metallic reflector 2, highly doped absorbed layer 3, low-doped absorbed layer 4 and surperficial antireflection layer 5 from the substrate to the surface, wherein 3 and 4 form the middle double absorbed layers jointly;
Fig. 2 is a reflectance spectrum comparison diagram before and after the embodiment of the invention 1 solar energy heat absorbing coating heat treatment, and solid line is the reverberation spectrogram before the heat treatment, and dotted line is the reverberation spectrogram after the heat treatment
Fig. 3 is the embodiment of the invention 1 individual layer Ag-Al
2O
3Microstructural image under the metal-ceramic composite film transmission electron microscope
The specific embodiment
Below in conjunction with accompanying drawing and embodiment content of the present invention is described further.Following examples only are used to explain the present invention, and unrestricted the present invention.
The magnetron sputtering mode is adopted in the preparation of rete.Three cathodic sputtering targets are installed in the sputtering chamber, are respectively silver-colored target, aluminium oxide target and copper target.Adopt non-reacted spatter film forming.At first the copper film of the about 120nm of deposition one layer thickness adopts the mode of silver-colored target and aluminium oxide target co-sputtering to prepare Ag-Al as infrared reflecting layer then on substrate of glass
2O
3Metal-ceramic composite film.The sputtering power of constant aluminium oxide is constant; Adjust the sputtering power of silver-colored target; Earlier the about 100nm of preparation one layer thickness, Nano silver grain fill factor, curve factor are 0.33 heavily doped layer, then prepare the about 46nm of a layer thickness, Nano silver grain fill factor, curve factor again and be 0.17 low doped layer.Antireflection layer forms aluminum oxide film through direct sputter aluminium oxide target, and thicknesses of layers is 20nm.To be coated with and be placed on aging cooling naturally after 70 hours in 400 degrees centigrade of atmospheric environments.Test result shows that the coating absorptivity is 0.95, and thermal emissivity is 0.04, and coating has good heat endurance.
As shown in Figure 1, the present embodiment coating structure is: from the substrate to the surface substrate 1, metallic reflector 2, highly doped absorbed layer 3, low-doped absorbed layer 4 (the 3 and 4 common middle double absorbed layer of forming) and surperficial antireflection layer 5,
Fig. 2 is the contrast of coating reflectance spectrum before and after the heat treatment, and solid line is the reverberation spectrogram before the heat treatment, and dotted line is the reverberation spectrogram after the heat treatment.
Fig. 3 is individual layer Ag-Al
2O
3The images of transmissive electron microscope of cermet composite membrane.Show among the figure that argent is distributed in the aluminium oxide ceramics medium with the form of nanoparticles disperse.
The magnetron sputtering mode is adopted in the preparation of rete.Three cathodic sputtering targets are installed in the sputtering chamber, are respectively silver-colored target, silicon oxide target and copper target.Adopt non-reacted spatter film forming.At first the copper film of the about 120nm of deposition one layer thickness adopts the mode of silver-colored target and silicon oxide target cosputtering to prepare Ag-SiO as infrared reflecting layer then on substrate of glass
2Metal-ceramic composite film.The sputtering power of constant silica is constant; Adjust the sputtering power of silver-colored target; Earlier the about 15nm of preparation one layer thickness, Nano silver grain fill factor, curve factor are 0.58 heavily doped layer, then prepare the about 120nm of a layer thickness, Nano silver grain fill factor, curve factor again and be 0.06 low doped layer.Antireflection layer forms silicon oxide film through direct sputter silicon oxide target, and thicknesses of layers is 25nm.Test result shows that the coating absorptivity is 0.91, and thermal emissivity is 0.12 under the normal temperature.
The magnetron sputtering mode is adopted in the preparation of rete.Three cathodic sputtering targets are installed in the sputtering chamber, are respectively silver-colored target, aluminium nitride target and copper target.Adopt non-reacted spatter film forming.At first the copper film of the about 150nm of deposition one layer thickness adopts the mode of silver-colored target and aluminium nitride target co-sputtering to prepare the Ag-AlN metal-ceramic composite film as infrared reflecting layer then on substrate of glass.The sputtering power of constant aluminium nitride is constant; Adjust the sputtering power of silver-colored target; Earlier the about 90nm of preparation one layer thickness, Nano silver grain fill factor, curve factor are 0.38 heavily doped layer, then prepare the about 20nm of a layer thickness, Nano silver grain fill factor, curve factor again and be 0.15 low doped layer.Antireflection layer forms aluminium nitride film through direct sputter aluminium nitride target, and thicknesses of layers is 25nm.Test result shows that the coating absorptivity is 0.95, and thermal emissivity is 0.05 under the normal temperature.
With embodiment 3, difference is to change the aluminium nitride target into silicon nitride target, adopts the mode of silver-colored target and silicon nitride target cosputtering to prepare the Ag-SiNx metal-ceramic composite film.Test result shows that the coating absorptivity is 0.96, and thermal emissivity is 0.07 under the normal temperature.
The magnetron sputtering mode is adopted in the preparation of rete.Three cathodic sputtering targets are installed in the sputtering chamber, are respectively silver-colored target, aluminium oxide target and copper target.Adopt non-reacted spatter film forming.At first the copper film of the about 120nm of deposition one layer thickness adopts the mode of silver-colored target and aluminium oxide target co-sputtering to prepare Ag-Al as infrared reflecting layer then on substrate of glass
2O
3Metal ceramic gradient doped and compounded film.Concrete preparation technology is following: the sputtering power of constant aluminium oxide is constant; Divide six stages to increase silver-colored target sputtering power gradually, the phase I: doping content 0.57, the about 70nm of thickness, second stage: doping content 0.47, the about 10nm of thickness; Phase III: doping content 0.42, the about 10nm of thickness; Stage: doping content 0.33, the about 10nm of thickness, five-stage: doping content 0.26, the about 10nm of thickness, the 6th stage: doping content 0.05, the about 15nm of thickness.Antireflection layer forms aluminum oxide film through direct sputter aluminium oxide target, and thicknesses of layers is 100nm.Test result shows that the coating absorptivity is 0.94, and thermal emissivity is 0.04 under the normal temperature.
Claims (1)
1. high-temperature selective heat absorbing coating in the solar energy; Be coated on the substrate of glass of solar collection element; Coating comprises infrared reflecting layer, absorbed layer, medium antireflection layer from bottom to top; It is characterized in that described absorbed layer is the nano silver particles absorbed layer, employing be that Nano silver grain mixes the metal-ceramic composite film that forms with other transparent medium; Nano silver grain in the said absorbed layer is blended among the transparent medium with the mode of grade doping, and the Nano silver grain concentration in the substrate absorbed layer is high more, and is low more away from the Nano silver grain concentration in the substrate absorbed layer more; The fill factor, curve factor of Nano silver grain excursion from low to high is 0.05-0.6; Said absorbed layer adopts following method preparation: adopt the magnetron sputtering deposition method, the single-layer and transparent complex thin film that preparation has different nano silver particles doping contents on substrate of glass promptly gets absorbed layer after the multilayer stack; Transparent medium in the said absorbed layer is the nitride of metallic aluminium or elemental silicon.
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