CN101872002A - 探针检测装置及其方法 - Google Patents
探针检测装置及其方法 Download PDFInfo
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- CN101872002A CN101872002A CN201010187373A CN201010187373A CN101872002A CN 101872002 A CN101872002 A CN 101872002A CN 201010187373 A CN201010187373 A CN 201010187373A CN 201010187373 A CN201010187373 A CN 201010187373A CN 101872002 A CN101872002 A CN 101872002A
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- probe
- resistance
- pincushion
- detection
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- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
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Priority Applications (1)
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CN201010187373.6A CN101872002B (zh) | 2010-05-28 | 2010-05-28 | 探针检测装置及其方法 |
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CN201010187373.6A CN101872002B (zh) | 2010-05-28 | 2010-05-28 | 探针检测装置及其方法 |
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CN101872002A true CN101872002A (zh) | 2010-10-27 |
CN101872002B CN101872002B (zh) | 2016-01-20 |
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CN201010187373.6A Active CN101872002B (zh) | 2010-05-28 | 2010-05-28 | 探针检测装置及其方法 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102062847A (zh) * | 2010-11-08 | 2011-05-18 | 上海集成电路研发中心有限公司 | 半导体参数测量系统的检测方法 |
CN102156271A (zh) * | 2011-03-15 | 2011-08-17 | 上海宏力半导体制造有限公司 | 半导体参数测量系统的检测方法 |
CN103257274A (zh) * | 2013-05-23 | 2013-08-21 | 上海华力微电子有限公司 | 一种通过识别探针卡类型预防烧针的方法 |
CN103293503A (zh) * | 2013-05-24 | 2013-09-11 | 上海宏力半导体制造有限公司 | 探针卡的检测方法 |
CN103257274B (zh) * | 2013-05-23 | 2016-11-30 | 上海华力微电子有限公司 | 一种通过识别探针卡类型预防烧针的方法 |
CN111796148A (zh) * | 2020-07-31 | 2020-10-20 | 上海华力微电子有限公司 | 一种电阻测试结构 |
CN114155763A (zh) * | 2022-01-21 | 2022-03-08 | 上海域圆信息科技有限公司 | 一种针灸模拟训练装置、系统及训练方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10300823A (ja) * | 1997-04-30 | 1998-11-13 | Oki Electric Ind Co Ltd | プローバの点検方法 |
US20020088109A1 (en) * | 2001-01-10 | 2002-07-11 | Hugo Santini | Method for measuring fine structure dimensions during manufacturing of magnetic transducers |
US20050019966A1 (en) * | 2003-06-10 | 2005-01-27 | International Business Machines Corporation | Systems and methods for overlay shift determination |
US20050088191A1 (en) * | 2003-10-22 | 2005-04-28 | Lesher Timothy E. | Probe testing structure |
US20060028221A1 (en) * | 2004-07-26 | 2006-02-09 | Nec Electronics Corporation | Method and apparatus for contact resistance measurement |
CN101275994A (zh) * | 2007-03-27 | 2008-10-01 | 和舰科技(苏州)有限公司 | 监测探针卡状态的方法 |
US20080294365A1 (en) * | 2005-10-17 | 2008-11-27 | Capres A/S | Eliminating Inline Positional Errors for Four-Point Resistance Measurement |
US20090008641A1 (en) * | 2007-04-05 | 2009-01-08 | Nec Electronics Corporation | Probe resistance measurement method and semiconductor device with pads for probe resistance measurement |
-
2010
- 2010-05-28 CN CN201010187373.6A patent/CN101872002B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10300823A (ja) * | 1997-04-30 | 1998-11-13 | Oki Electric Ind Co Ltd | プローバの点検方法 |
US20020088109A1 (en) * | 2001-01-10 | 2002-07-11 | Hugo Santini | Method for measuring fine structure dimensions during manufacturing of magnetic transducers |
US20050019966A1 (en) * | 2003-06-10 | 2005-01-27 | International Business Machines Corporation | Systems and methods for overlay shift determination |
US20050088191A1 (en) * | 2003-10-22 | 2005-04-28 | Lesher Timothy E. | Probe testing structure |
US20060028221A1 (en) * | 2004-07-26 | 2006-02-09 | Nec Electronics Corporation | Method and apparatus for contact resistance measurement |
US20080294365A1 (en) * | 2005-10-17 | 2008-11-27 | Capres A/S | Eliminating Inline Positional Errors for Four-Point Resistance Measurement |
CN101275994A (zh) * | 2007-03-27 | 2008-10-01 | 和舰科技(苏州)有限公司 | 监测探针卡状态的方法 |
US20090008641A1 (en) * | 2007-04-05 | 2009-01-08 | Nec Electronics Corporation | Probe resistance measurement method and semiconductor device with pads for probe resistance measurement |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102062847A (zh) * | 2010-11-08 | 2011-05-18 | 上海集成电路研发中心有限公司 | 半导体参数测量系统的检测方法 |
CN102062847B (zh) * | 2010-11-08 | 2016-04-27 | 上海集成电路研发中心有限公司 | 半导体参数测量系统的检测方法 |
CN102156271A (zh) * | 2011-03-15 | 2011-08-17 | 上海宏力半导体制造有限公司 | 半导体参数测量系统的检测方法 |
CN102156271B (zh) * | 2011-03-15 | 2015-11-04 | 上海华虹宏力半导体制造有限公司 | 半导体参数测量系统的检测方法 |
CN103257274A (zh) * | 2013-05-23 | 2013-08-21 | 上海华力微电子有限公司 | 一种通过识别探针卡类型预防烧针的方法 |
CN103257274B (zh) * | 2013-05-23 | 2016-11-30 | 上海华力微电子有限公司 | 一种通过识别探针卡类型预防烧针的方法 |
CN103293503A (zh) * | 2013-05-24 | 2013-09-11 | 上海宏力半导体制造有限公司 | 探针卡的检测方法 |
CN103293503B (zh) * | 2013-05-24 | 2017-02-08 | 上海华虹宏力半导体制造有限公司 | 探针卡的检测方法 |
CN111796148A (zh) * | 2020-07-31 | 2020-10-20 | 上海华力微电子有限公司 | 一种电阻测试结构 |
CN114155763A (zh) * | 2022-01-21 | 2022-03-08 | 上海域圆信息科技有限公司 | 一种针灸模拟训练装置、系统及训练方法 |
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Publication number | Publication date |
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CN101872002B (zh) | 2016-01-20 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140514 |
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Effective date of registration: 20140514 Address after: 201203 Shanghai Zhangjiang hi tech park Zuchongzhi Road No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai Guo Shou Jing Road, Zhangjiang hi tech Park No. 818 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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