CN101848802A - Lamination apparatus, hot platen for the same and process for manufacturing the hot platen - Google Patents
Lamination apparatus, hot platen for the same and process for manufacturing the hot platen Download PDFInfo
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- CN101848802A CN101848802A CN200880114992A CN200880114992A CN101848802A CN 101848802 A CN101848802 A CN 101848802A CN 200880114992 A CN200880114992 A CN 200880114992A CN 200880114992 A CN200880114992 A CN 200880114992A CN 101848802 A CN101848802 A CN 101848802A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/60—Thermal-PV hybrids
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Abstract
The temperature of hot platen at the operation of laminating can be controlled at a target temperature easily and securely. There is disclosed a lamination apparatus having a superior chamber and an inferior chamber partitioned by a press member, the inferior chamber provided with a hot platen (122), so that a workpiece is placed on the hot platen (122) and, by evacuating the inferior chamber and introducing atmospheric air in the superior chamber, the workpiece heated by the hot platen (122) is pressurized between the hot platen (122) and the press member to thereby attain lamination. The lamination apparatus is characterized in that the hot platen (122) includes a hot platen body (61) provided at its backside with an accommodation groove (63) and a sheath heater (62) embedded in the accommodation groove (63), and that at least either the accommodation groove (63) or the sheath heater (62) is deformed so as to achieve surface contact between the outer peripheral surface of the sheath heater (62) and the inner peripheral surface of the accommodation groove (63).
Description
Technical field
The manufacture method that the present invention relates on heating plate machined object such as configuration solar cell module and carry out laminated device, the heating plate that laminated device is used of lamination through the machined object of heating plate heating and make the heating plate that laminated device uses with heating plate and pressing component cramping.
Background technology
Owing to problems such as greenhouse gases, the solar cell that does not pollute the environment is attracted attention in recent years.Solar cell is by cover glass (cover glass), fills a plurality of parts such as material, solar battery cell (cell), back side material formation that overlaps each other.When making this solar cell, use laminated device (for example with reference to patent documentation 1).Laminated device will be carried out overlapping machined object heating that obtains and lamination in addition by the component parts of solar cell under vacuum state.Its result, machined object under the overlapping state of each component parts by gluing.Described laminated device has towards the top box of below (case) and has the nowel of heating plate.Described top box is made of the laminate (diaphragm) that expands freely.When solar cell is carried out lamination, at first, user's configuration that on heating plate, the component parts of solar cell overlapped each other.Secondly, make the formed space of top box and nowel become vacuum state.And then laminated device is in heating plate heating during as the component parts of the solar cell of machined object, to the inner atmospheric pressure that imports of top box.Via above-mentioned steps, laminated device carries out lamination by the component parts of laminate and heating plate cramping solar cell.
Being embedded with heating wire at the heating plate of laminated device is heating tube that metal covered, is so-called protective-cover type heating tube (sheath heater) across the insulation material.Via making the heating of protective-cover type heating tube, the heat of protective-cover type heating tube is transmitted to heating plate, the component parts of the solar cell of heater configuration on heating plate.And the temperature of heating plate is controlled to temperature controller and makes the component parts of solar cell be heated as proper temperature.More particularly, the temperature of the thermocouple measurement heating plate that is embedded in the appropriate depth position of distance heater plate surface.And measured temperature information is fed back to temperature controller.Temperature controller is according to the temperature information that is fed back, and the temperature of heating plate is controlled at suitable temperature.In other words, temperature controller rises the temperature of protective-cover type heating tube or it is cooled off naturally.Temperature controller rises via the temperature that makes the protective-cover type heating tube or cools off naturally and makes the temperature of heating plate remain on suitable temperature.
Fig. 9 is for showing the temperature variation of heating plate.In Fig. 9, the variations in temperature of the heating plate that characteristic line (characteristicline) (1) is obtained when carrying out lamination procedure for having disposed under the state of machined object on heating plate in above-mentioned laminated device.The temperature of heating plate is target temperature (for example 120 ℃～180 ℃) at the beginning.Seized by machined object owing to disposed the heat of machined object, heating plate on heating plate, the temperature of heating plate sharply descends.Descend in order to remedy this temperature, temperature controller carries out temperature control, and the temperature of heating plate is risen.Yet the temperature of heating plate is not easy to rise to target temperature in fixing heat time heating time (for example 5 minutes).And, in the lamination processing, be not easy to rise because heating plate is in the temperature of vacuum state, heating plate.In addition, the temperature of heating plate will substantially exceed target temperature and become transcend quantity (overshoot) when finishing the vacuum in back, releasing top box and the formed space of nowel the heat time heating time of machined object.Therefore, in existing laminated device, it is difficult that the temperature of heating plate is controlled at target temperature.And when if the temperature of heating plate has transcend quantity, the temperature of heating plate does not drop to target temperature can't dispose machined object on heating plate.Therefore, existing heating plate will produce the problem of the operating efficiency decline of lamination.Moreover in Fig. 9, characteristic line (2) is the variations in temperature that does not dispose the heating plate that is obtained when carrying out lamination procedure under the state of machined object on heating plate.Shown in Fig. 9 characteristic line (2), when lamination procedure begins, owing to contact with laminate, the temperature of heating plate will descend a little, just be controlled in target temperature thereafter.
Behind the existing laminated device of this case inventor probatio inspectionem pecuoarem, find: the reason that temperature of heating plate is not easy to rise and after finishing heat time heating time greatly the overshoot temperature become the reason of transcend quantity, relevant with the structure of heating plate.The 17 figure (a) simply illustrates the part sectional drawing of heating plate.Shown in the 17 figure (a), heating plate 160 has upper plate 161 and lower plate 162.And heating plate 160 has protective-cover type heating tube 163, and this protective-cover type heating tube 163 is by the accepting groove that forms at upper plate 161 back sides with at lower plate 162 surperficial formed accepting groove clampings.Therefore, can produce the slit between upper plate 161 and the protective-cover type heating tube 163 and between lower plate 162 and protective-cover type heating tube 163.Described slit is because the error of the processing dimension of the superimposed error of upper plate 161 and lower plate 162, accepting groove etc. cause.The slit that produces can reduce protective-cover type heating tube 163 to upper plate 161 and to the heat conduction efficiency of lower plate 162.Particularly in lamination procedure, have as mentioned above and make the operation that becomes vacuum state by top box and the formed space of nowel.In this operation, also can become vacuum state between upper plate 161 and the protective-cover type the heating tube 163 and slit that between lower plate 162 and protective-cover type heating tube 163, is produced.And the slit is in case also become vacuum state, will significantly descend to upper plate 161 and to the heat conduction efficiency of lower plate 162 from protective-cover type heating tube 163.Therefore, temperature controller will be difficult to control the temperature of heating plate 160.And the temperature of heating plate 160 also is difficult to be raised to target temperature in heat time heating time.Therefore, for the temperature that makes heating plate 160 rises, temperature controller carries out temperature control, the temperature of protective-cover type heating tube 163 is further risen, and the temperature of protective-cover type heating tube 163 will rise excessively.After finishing the heat time heating time of machined object,, also will be imported into air in above-mentioned slit in case removed vacuum state.Because the importing of air, air becomes heat catalysis, and the heat of protective-cover type heating tube 163 is transmitted to heating plate 160 (upper plate 161 and lower plate 162) more efficiently in the time of can be than vacuum state.Thereby the heat of the protective-cover type heating tube 163 that excessive temperature rises is transmitted to heating plate, makes heating plate 160 temperature overshoot temperature and form transcend quantity greatly.And, owing to there is the slit where and the place that comes in contact, can cause the temperature distributing disproportionation on heating plate 160 surfaces even, may the quality of the gluing of component parts in the lamination procedure etc. be exerted an influence.
The method that solves described problem can be: by between landfill upper plate 161 and the protective-cover type the heating tube 163 and slit between lower plate 162 and the protective-cover type heating tube 163, improve the heat conduction.The method shown in Figure 17 (b) for example: heat conductivity silicone resin film 164 or fluorine resin film are implanted the slit.But described method can't be with the complete landfill in slit.And, also will become the main cause that the whole cost of heating plate raises.
On the other hand, when making semiconductor or LCDs etc., the operation that has machined objects such as pair semiconductor and LCDs to heat-treat.In this operation, generally with known heating plate heating machined object (for example with reference to patent documentation 2).There is the through hole of parallel formation described heating plate inside, is provided with the heat-conduction component with contour part in the through hole, and the inner peripheral surface of through hole closely contacts with the outer peripheral face of the contour part of heat-conduction component.Yet described heating plate is to use in the device that can not become the obvious vacuum state that descends of above-mentioned heat conduction efficiency.Disclosed heating plate in the patent documentation 2 is not studied yet and how uses in maximization machined object in recent years.
Patent documentation 1: TOHKEMY 2004-238196 communique
Patent documentation 2: Japanese kokai publication hei 9-33170 communique
Summary of the invention
In view of the above problems, the objective of the invention is to: make the temperature of heating plate in the laminated device of operation also positively be controlled at target temperature easily with vacuum state.
Laminated device of the present invention has last process chamber and the following process chamber that separates by pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, and comes cramping to carry out lamination by the above-mentioned machined object of above-mentioned heating plate heating with above-mentioned heating plate and above-mentioned pressing component.Above-mentioned heating plate has: the back side is provided with the heating plate body of accepting groove and is embedded in protective-cover type heating tube in the above-mentioned accepting groove; At least one side of above-mentioned accepting groove and above-mentioned protective-cover type heating tube deforms, and the outer peripheral face of above-mentioned protective-cover type heating tube is contacted with the inner peripheral surface generating plane of above-mentioned accepting groove.
Above-mentioned heating plate can constitute: when above-mentioned protective-cover type heating tube was embedded in the above-mentioned accepting groove, the protuberance that is located at the opening edge of above-mentioned accepting groove gave calking at the interior side direction of above-mentioned accepting groove.
Above-mentioned heating plate can constitute: above-mentioned accepting groove is arranged on the bottom surface of the set groove in the above-mentioned heating plate body back side.
Above-mentioned heating plate can constitute: the protuberance side direction in above-mentioned accepting groove that is located at the opening edge of above-mentioned accepting groove is given prominence to from the above-mentioned heating plate body back side by the part of calking.
Above-mentioned heating plate can constitute: when above-mentioned protective-cover type heating tube was embedded in the above-mentioned accepting groove, this gave calking the opening edge of above-mentioned accepting groove on the interior side direction of above-mentioned accepting groove.
Above-mentioned heating plate can constitute: in the time of before the calking of the opening edge of above-mentioned accepting groove own, above-mentioned accepting groove is set directly at the above-mentioned heating plate body back side.
The material of the periphery parts of the material of above-mentioned heating plate body and above-mentioned protective-cover type heating tube can be identical.
Can be embedded with a plurality of protective-cover type heating tubes in the above-mentioned heating plate body.
The above-mentioned heating plate body back side can be provided with along a plurality of accepting grooves of the different bending of face direction, and above-mentioned a plurality of accepting grooves can be embedded with a plurality of protective-cover type heating tubes separately.
Above-mentioned heating plate can constitute: in above-mentioned a plurality of protective-cover type heating tube, at a plurality of protective-cover type heating tubes that the same depth direction of above-mentioned heating plate body is buried underground, it reaches outside position from above-mentioned accepting groove and staggers mutually on the width of above-mentioned heating plate body.
Above-mentioned heating plate can be by constituting after a plurality of heating plate bodies combinations.
Heating plate body adjacent to each other in above-mentioned a plurality of heating plate body can be by crossing over bonded block set between the heating plate body, come combination from face side with fixed part from face side.
Above-mentioned heating plate can have: heating plate body and be embedded in protective-cover type heating tube in the above-mentioned accepting groove; The whole outer peripheral face of above-mentioned protective-cover type heating tube can contact with above-mentioned heating plate body.
Above-mentioned heating plate, the whole mode that comes in contact with above-mentioned heating plate body of periphery that can above-mentioned protective-cover type heating tube is embedded in the heating plate body.
Above-mentioned heating plate can obtain according to following manufacture method: this manufacture method has the operation of burying underground of burying the protective-cover type heating tube in the set accepting groove in the heating plate body back side underground.Bury underground in the operation above-mentioned, by the mode that press comes in contact the inner peripheral surface face of the outer peripheral face of above-mentioned protective-cover type heating tube and above-mentioned accepting groove, at least one side of above-mentioned accepting groove and above-mentioned protective-cover type heating tube is out of shape and makes the protuberance of the opening edge that is located at above-mentioned accepting groove or the space that opening edge itself is filled side direction in the above-mentioned accepting groove.
Bury underground in the operation above-mentioned, above-mentioned protective-cover type heating tube also can bury by casting and be arranged in the above-mentioned heating plate body, and the periphery integral body of protective-cover type heating tube is contacted with the heating plate body.
According to the present invention,, the heat of protective-cover type heating tube can make the temperature of heating plate of laminated device be controlled at target temperature easily and positively thereby can being transmitted to the heating plate body effectively.And, can improve the lamination quality of machined object.
For example, when above-mentioned protective-cover type heating tube is embedded in the above-mentioned accepting groove, the protuberance that is located at the opening edge of above-mentioned accepting groove can give calking at the interior side direction of above-mentioned accepting groove, thereby can make the outer peripheral face of protective-cover type heating tube keep the state of the inner peripheral surface that is crimped on accepting groove.
Above-mentioned accepting groove can be arranged on the bottom surface of the set groove in the above-mentioned heating plate body back side, to reduce the area of cut.And owing to can make calking portion be positioned at groove, therefore, calking portion will can not give prominence to from the heating plate body back side, can go up overlapping other heating plates overleaf.
The protuberance side direction in above-mentioned accepting groove that is located at the opening edge of above-mentioned accepting groove can be given prominence to from the above-mentioned heating plate body back side by the part of calking, thus employed press die expense can cut down the calking protuberance time.
When above-mentioned protective-cover type heating tube was embedded in the above-mentioned accepting groove, the opening edge of above-mentioned accepting groove itself can calking on the interior side direction of above-mentioned accepting groove, thereby not needing to form is used for the protuberance of calking, the processing charges of cutting down processing heating plate body.
In the time of before the calking of the opening edge of above-mentioned accepting groove own, above-mentioned accepting groove can be set directly at the above-mentioned heating plate body back side, thereby cuts down the processing charges of heating plate body.
The material of the periphery parts of the material of above-mentioned heating plate body and above-mentioned protective-cover type heating tube can be identical, thereby can improve from the heat conduction efficiency of protective-cover type heating tube to the heating plate body.
Can be embedded with a plurality of protective-cover type heating tubes in the above-mentioned heating plate body, thus can be to the whole evenly heating of heating plate.
The above-mentioned heating plate body back side can be provided with along a plurality of accepting grooves of the different bending of face direction, and above-mentioned a plurality of accepting grooves can be embedded with a plurality of protective-cover type heating tubes separately, thereby can make the uniformity of temperature profile of heating plate integral body.
In above-mentioned a plurality of protective-cover type heating tube, a plurality of protective-cover type heating tubes of burying underground at the same depth direction of above-mentioned heating plate body, it reaches outside position from above-mentioned accepting groove and staggers mutually on the width of above-mentioned heating plate body, when a plurality of protective-cover type heating tubes is carried out distribution, can make the protective-cover type heating tube that reaches the outside from the heating plate body back side can intersection or overlapping not take place each other, and can cut down space at the above-below direction of heating plate downside at heating plate body downside.
Above-mentioned heating plate can by a plurality of heating plate bodies in conjunction with after constitute, thereby can process accepting groove etc. according to each heating plate body.And, the operation of burying the protective-cover type heating tube underground at accepting groove is carried out easily.
Heating plate body adjacent to each other in above-mentioned a plurality of heating plate body, can be by crossing over bonded block set between the heating plate body, come combination with fixed part from face side from face side, thereby the operating personnel can carry out operation from face side under the state that bonded block is placed between the heating plate body, improves heating plate assembling operation efficient.
Also can bury at the protective-cover type heating tube and to be arranged in the above-mentioned heating plate body, thereby can make heating plate easily, the outer peripheral face of protective-cover type heating tube and the inner peripheral surface face of accepting groove are come in contact by casting.
Description of drawings
Fig. 1 is the overall structure figure of laminated device.
Fig. 2 is the overall structure oblique view of laminated device.
Fig. 3 is the structure section figure as the solar cell module of machined object.
Fig. 4 is the side sectional drawing of the laminate part of laminated device.
Fig. 5 is laminated device adds the laminate part in man-hour at lamination a side sectional drawing.
Fig. 6 is heating plate and a peripheral structure oblique view thereof in the 1st embodiment.
Fig. 7 is the plane of heating plate in the 1st embodiment.
Fig. 8 is the structure chart of heating plate in the 1st embodiment.
Fig. 9 is the temperature variation of the temperature of heating plate of mensuration.
Figure 10 is the structure chart of heating plate in the 2nd embodiment.
Figure 11 is the structure chart of heating plate in the 3rd embodiment.
Figure 12 is the structure chart of heating plate in the 4th embodiment.
Figure 13 is a process chart of burying the protective-cover type heating tube in the 5th enforcement at the heating plate body underground.
Figure 14 is the structure chart of heating plate in the 6th embodiment.
Figure 15 is heating plate and a peripheral structure oblique view thereof in the 7th enforcement.
Figure 16 is the part back view of heating plate in the 1st embodiment.
Figure 17 is the heating board structure of existing laminated device and the heating board structure figure that intervention has the thermal conductivity silicone resin film.
The component symbol explanation:
10 machined objects
100 laminated devices
101 laminate part
110 top boxs
112 laminate
Process chamber on 113
120 nowels
121 times process chambers
122 heating plates
61 heating plate bodies
62 protective-cover type heating tubes
63 accepting grooves
65 back sides
67 bonded blocks
71 grooves
72 protuberances
73 calking portions
74 protrusions
75 datum levels
76 pars
77 protuberances
78 press dies
80 heating plates
81 heating plate bodies
82 protective-cover type heating tubes
83 accepting grooves
84 heating plates
85 heating plate bodies
86 heating plates
87 heating plate bodies
88 heating plates
89 heating plate bodies
91 heating plate bodies
92 back sides
98 heating plates
99 heating plate bodies
The specific embodiment
Below, with reference to accompanying drawing the laminated device in the present embodiment is described.
Fig. 1 is the overall structure figure of laminated device 100.Fig. 2 is the overall structure oblique view of laminated device 100.Laminated device 100 has: the conveyance band 130 of top box 110, nowel 120 and conveyance machined object 10.Conveyance band 130 comes conveyance machined object 10 between top box 110 and nowel 120.Also be provided with at laminated device 100 and move into conveyer belt 200, move into conveyer belt 200 and be used for 10 conveyances of the machined object before the lamination to laminated device 100.And, being provided with at laminated device 100 and taking out of conveyer belt 300, this is taken out of conveyer belt 300 and is used for taking out of machined object 10 behind the lamination from laminated device 100.Move into conveyer belt 200 and take out of conveyer belt 300 and be connected.Machined object 10 is sent conveyance band 130 from moving into conveyer belt 200, is sent from conveyance band 130 and takes out of conveyer belt 300.
As shown in Figure 2, laminated device 100 is provided with the lowering or hoisting gear 150 that constitutes with cylinder and piston rod etc.Lowering or hoisting gear 150 can make top box 110 maintain under the level nowel 120 is carried out lifting.Lowering or hoisting gear 150 can make the inner space of top box 110 and nowel 120 become sealing via top box 110 is descended.
Secondly, the machined object 10 that carries out lamination by laminated device 100 is described.
Fig. 3 is to use the structure section figure of system of crystallization battery unit (cell) as the solar cell module of machined object 10.As shown in the figure, the solar cell module has following structure: between transparent cover glass 11 and back side material 12, accompany solar cell tandem (string) 15 across filling material 13,14.Back side material 12 uses is material such as polyvinyl resin.What fill material 13,14 uses is EVA (ethylene-vinyl acetate copolymer) resin etc.Solar cell tandem 15 structures are: between the electrode 16,17 with the lead-in wire 19 solar battery cells (cell) 18 that connect as system of crystallization battery unit (cell).
And,, and be not only with above-mentioned solar cell module to be object, can be object with the solar cell module that is commonly referred to as diaphragm type also as machined object 10.The exemplary configuration example of thin-film type solar cell module is the generating element that is made of transparency electrode, semiconductor, back electrode on the prior evaporation of transparent cover glass.Such thin-film type solar cell module disposes cover glass down, and fills material covering on the generating element on the cover glass.On the filling material, be coated with back side material.According to the component parts gluing that makes the thin-film type solar cell module under such state via the heating in vacuum lamination.In other words, the thin-film type solar cell module only is to change into the system of crystallization generating element that evaporation has above-mentioned solar cell module.The basic hermetically-sealed construction of thin-film type solar cell module is identical with above-mentioned solar cell module.
Secondly, be described more specifically the structure of the laminate part 101 of the relevant laminated device 100 of present embodiment.Fig. 4 is the side sectional drawing of the laminate part of lamination machined object 10 in the laminated device 100.Fig. 5 is laminated device adds the laminate part 101 in man-hour at lamination a side sectional drawing.
And, on top box 110, be provided with the suction and exhaust ports 114 that is communicated with last process chamber 113.At last process chamber 113,, the air sucking-off of going up process chamber 113 inside can be made it become vacuum state or atmosphere import is gone up process chamber 113 inside via suction and exhaust ports 114.
Be formed with the space (following process chamber 121) of upward opening at nowel 120.Be provided with heating plate 122 (plate heater) in this space.Erect the support component that is provided with via the bottom surface at nowel 120, heating plate 122 is retained as level.At this moment, the opening surface of the surface of heating plate 122 and following process chamber 121 is substantially at equal height.
And, be provided with the suction and exhaust ports 123 that is communicated with following process chamber 121 in nowel 120 bottoms.At following process chamber 121,, make down the air sucking-off of process chamber 121 become vacuum state or atmosphere is imported to down process chamber 121 inside via suction and exhaust ports 123.
Between top box 110 and nowel 120 and above heating plate 122, be provided with the conveyance band 130 that moves freely.Conveyance band 130 from the moving into that conveyer belt 200 receives machined object 10 before the laminations of Fig. 1 and conveyance to middle position in laminate part 101.And conveyance band 130 is taken out of conveyer belt 300 with what the machined object behind the lamination 10 passed out to Fig. 1.
And, between top box 110 and nowel 120 and above conveyance band 130, be provided with high temperature sheet (release sheet) 140.Filling material 13,14 when high temperature sheet 140 prevents filling material 13,14 (with reference to Fig. 3) fusion of machined object 10 is attached on the laminate 112.
Secondly, further specify the lamination procedure of laminated device 100 relevant in the present embodiment.At first, as shown in Figure 4, conveyance band 130 with machined object 10 conveyances at the middle position of laminate part 101.
Secondly, lowering or hoisting gear 150 descends top box 110.Via top box 110 is descended, as shown in Figure 5, the inner space of top box 110 and nowel 120 is sealed.In other words, can make inside at top box 110 and nowel 120, on process chamber 113 and down process chamber 121 remain air-tight state separately.
Secondly, laminated device 100 comes the inner air of process chamber 113 in the sucking-off to make it become vacuum state via the suction and exhaust ports 114 of top box 110.Equally, laminated device 100 comes the inner air of process chamber 121 under the sucking-off to make it become vacuum state via the suction and exhaust ports 123 of nowel 120.Via descending the process chamber 121 air-breathing vacuum that become, contained bubble is sent the outside of machined object 10 in the machined object 10.At this moment, heat machined object 10 with heating plate 122, machined object 10 inner contained filling materials 13,14 are melted.
Secondly, laminated device 100, process chamber 121 keeps under the vacuum state making down, and via the suction and exhaust ports 114 of top box 110, upwards process chamber 113 imports atmosphere.Therefore, produce draught head between last process chamber 113 and the following process chamber 121, laminate 112 will expand.As shown in Figure 5, laminate 112 is released downwards.122 crampings of laminate 112 that machined object 10 is released downwards and heating plate, and fusion filling material 13,14 make each component parts gluing.
At this moment, the situation of material 13,14 from exposing between cover glass 11 and the back side material 12 takes place to fill sometimes.At this moment, the filling material 13,14 that exposes will be attached on the high temperature sheet 140.Jie of high temperature sheet 140 exists, and can prevent that the filling material 13,14 that exposes is attached on the laminate 112.Therefore, high temperature sheet 140 is preventing to fill material 13,14 and is attached to laminate 112 and prevents that it is attached to the machined object 10 that carries out lamination.And,, can remove accompanying filling material 13,14 by not shown wiper mechanism if when the filling material that exposes 13,14 is attached on the conveyance band 130.
After lamination procedure finishes, laminated device 100, via the suction and exhaust ports 123 of nowel 120, process chamber 121 imports atmosphere downwards.At this moment, lowering or hoisting gear 150 rises top box 110.As shown in Figure 4, top box 110 rises, and conveyance band 130 will be moved.Conveyance band 130 passes out to the machined object behind the lamination 10 and takes out of conveyer belt 300.
Embodiment one
Secondly, describe the heating plate 122 of laminated device 100 relevant in the present embodiment in detail.Fig. 6 is heating plate 122 and peripheral structure oblique view thereof.Heating plate 122 has a plurality of heating plate bodies 61 and a plurality of protective-cover type heating tube 62.The size of heating plate 122 is formed and is accommodated in nowel 120.The size of the heating plate 122 of present embodiment adapts to the machined object that maximizes day by day in recent years, specifically, heating plate 122 sizes, the about 4000mm of its amplitude when bigger size (with reference to W shown in Figure 6), the about 2000mm of depth (with reference to DE shown in Figure 6).
At the back side of each heating plate body 61, be formed with the accepting groove 63 that is used for burying underground protective-cover type heating tube 62.For the surface temperature distribution that makes heating plate body 61 is even, accepting groove 63 is bent the back side that is configured in heating plate body 61, across the whole back side.
Be embedded with protective-cover type heating tube 62 in the accepting groove 63.As described later shown in Fig. 8 (b), the center of protective-cover type heating tube 62 is to be processed into spiral helicine nichrome wire 62a, filled powder insulation material 62b such as magnesia around the nichrome wire 62a, around insulation material 62b, be coated with aluminum or aluminum alloy as sheath 62c (constituting the duct member of periphery).Because heating plate body 61 is to adopt same material to form with the sheath of protective-cover type heating tube 62, can improve in the heating plate 122 from the heat conduction efficiency of protective-cover type heating tube 62 to heating plate body 61.As shown in Figure 6, the protective-cover type heating tube of being buried underground at the accepting groove 63 of each heating plate body 61 62 will be connected to and be located at laminated device 100 inner or outside temperature controllers 64.The temperature of temperature controller 64 control heating plates 122 makes it reach target temperature.
Fig. 7 is the plane of heating plate 122.Among Fig. 7, dotted line is illustrated in the protective-cover type heating tube 62 that each heating plate body 61 is buried underground.Protective-cover type heating tube 62 owing to carry out temperature control independently, therefore is divided into 1～12 circuit (ch).Specifically, be embedded with 4 protective-cover type heating tubes 62 at each heating plate body 61.Each heating plate body 61, the protective-cover type heating tube 62 at both ends carry out temperature control as 1 circuit separately.In each heating plate body 61,2 protective-cover type heating tubes 62 of central authorities are used as 1 circuit and carry out temperature control.The protective-cover type heating tube of being buried underground at accepting groove 63 62 at Fig. 7 arrow place, reaches the outside from the back side of heating plate body 61, and the downside by heating plate 122 is connected to temperature controller 64.The configuration of protective-cover type heating tube and temperature controlled circuit (ch) are set, and are not limited to situation shown in Figure 7.
Protective-cover type heating tube 62, according to each circuit, its curved shape difference.The protective-cover type heating tube 62 of 5 circuit as shown in Figure 7 is substantially in 2 chain line L1 left-right symmetry, curved configuration.The protective-cover type heating tube 62 of 8 circuit as shown in Figure 7 is also substantially in 2 chain line L2 left-right symmetry, curved configuration.On the contrary, asymmetric, the curved configuration in protective-cover type heating tube 62 left and right sides of 1～4 circuit shown in Figure 7,6 circuit, 7 circuit, 9～12 circuit.The protective-cover type heating tube 62 of 1～3 circuit and the protective-cover type heating tube of 10～12 circuit 62 are substantially 2 chain line L3 left-right symmetry.The protective-cover type heating tube 62 of 4～6 circuit and the protective-cover type heating tube 62 of 7～9 circuit are also 2 chain line L3 left-right symmetry.Its objective is that the bulk temperature in order to make heating plate 122 is evenly distributed.For the Temperature Distribution that makes heating plate is identical, also can suitably adjust above-mentioned configuration.
Because bending shape is according to the difference of each circuit and difference, therefore, stagger mutually in the amplitude direction of heating plate 122 in the position that can make protective-cover type heating tube 62 reach the outside from the back side of heating plate body 61.Be that example is illustrated specifically with the heating plate body 61 of burying 10～12 circuit underground.Figure 16 is a rearview of burying the heating plate body 61 of 10～12 circuit underground.Same depth direction is embedded with protective-cover type heating tube 62A, 62B, 62C, 62D in heating plate body 61.In this, the protective-cover type heating tube that exposes to the outside from the back side of heating plate body 61 is shown with some chain lines.As shown in figure 16, each protective-cover type heating tube 62, except the combination of the protective-cover type heating tube 62B that constitutes 11 circuit and protective-cover type heating tube 62C, go out from the back side of heating plate body 61 each other to the position of the protective-cover type heating tube of outside and stagger mutually in the direction of width.In other words, select arbitrarily in a plurality of combinations of 2 protective-cover type heating tubes 62, to I haven't seen you for ages in 1 combination, the going out the direction that ties up to the width of heating plate body 61 to the position of outside from accepting groove 63 and stagger mutually of 2 protective-cover type heating tubes 62.
Thereby, can make to go out from the back side of each heating plate body 61 to cross one another or overlap each other in that the downside of heating plate body 61 is rare to a plurality of protective-cover type heating tubes 62 of outside.In other words, if it is identical in the amplitude direction of heating plate 122 that protective-cover type heating tube 62 goes out to the position of outside, then come distribution temperature controller 64 with same path, therefore, protective-cover type heating tube 62 will intersect each other or be overlapping, thereby the space of above-below direction must be arranged at the downside of heating plate body 61.But according to present embodiment, protective-cover type heating tube 62 is gone out to the position of outside stagger in the amplitude direction of heating plate 122, reduce the situation that crosses one another or overlap each other, then can effectively utilize the lower side space of heating plate 122.In addition, in Figure 16, the protective-cover type heating tube 62B of 11 circuit and protective-cover type heating tube 62C go out from heating plate body 61 back sides to the position of outside that the direction with respect to width is identical, also can make configuration between the two different mutually, thus more effective lower side space of utilizing heating plate 122.
As shown in Figure 7, at the central portion of each circuit, be embedded with the thermocouple 66 that is used for measuring heating plate 122 temperature.Thermocouple 66 is by the appropriate depth position of landfill on distance heating plate body 61 surfaces, is connected to temperature controller 64 from the back side of heating plate 122.The temperature of the heating plate 122 that thermocouple 66 is measured is fed back to temperature controller 64.62 heating of temperature controller 64 control protective-cover type heating tubes make the temperature of heating plate 122 reach target temperature.
Below, describe the accepting groove 63 of heating plate body 61 and the relation of protective-cover type heating tube 62 in detail.Fig. 8 is the structure chart of heating plate in explanation the 1st embodiment.Fig. 8 (a) is a sectional drawing of observing the A-A section of Fig. 7 from the arrow direction, and expression accepting groove 63 is embedded with the state of protective-cover type heating tube 62.Shown in Fig. 8 (a), the outer peripheral face of protective-cover type heating tube 62 makes it can not produce the slit with the mode of face contact and the inner peripheral surface crimping of accepting groove 63.
Fig. 8 (b) is illustrated in accepting groove 63 to bury protective-cover type heating tube 62 state diagram before underground.Shown in Fig. 8 (b), accepting groove 63 is formed on the bottom surface of groove 71, and this groove 71 forms by being processed into concavity at the back side 65 of heating plate body 61.Both sides at the opening edge of accepting groove 63 are provided with protuberance 72.By the back side of machining heating plate body 61, form the accepting groove 63 shown in Fig. 8 (b).Groove 71 and protuberance 72 also form by machining.
When accepting groove 63 is buried protective-cover type heating tube 62 underground, with and the press die that adapts of groove 71 shapes, by press the outer peripheral face of protective-cover type heating tube 62 is crimped onto the inner peripheral surface of accepting groove 63.
Fig. 8 (c) is illustrated in accepting groove 63 and buries protective-cover type heating tube 62 state diagram afterwards underground.When by press protective-cover type heating tube 62 being crimped on the inner peripheral surface of accepting groove 63, the outer peripheral face of protective-cover type heating tube 62 (sheath) will produce plastic deformation and be embedded into accepting groove 63 inner peripheral surfaces.Therefore, will become between the inner peripheral surface of the outer peripheral face of protective-cover type heating tube 62 and accepting groove 63 and connect airtight seamless surface contact state.Press makes protuberance 72 side direction in accepting groove 63 that is arranged in the accepting groove 63 produce plastic deformation, thereby forms calking portion 73, in order to stop up the opening of accepting groove 63 in crimping protective-cover type heating tube 62.Be formed with the protrusion 74 (part shown in the ellipse) that swells to downside from the bottom surface of groove 71 in the calking portion 73.By calking, the outer peripheral face of protective-cover type heating tube 62 can be kept the state of the inner peripheral surface that is crimped on accepting groove 63.Be formed with the back side 65 of the heating plate body 61 of accepting groove 63, will become the installed surface when heating plate 122 is installed to down process chamber 121.Because the bottom surface at groove 71 forms accepting groove 63, the calking portion 73 during with protuberance 72 calkings still remains in groove 71 inside.Therefore, calking portion 73 can be not outstanding from the back side 65 of heating plate body 61.
When the outer peripheral face of protective-cover type heating tube 62 being crimped onto the inner peripheral surface of accepting groove 63 with press die, use the press die identical substantially, once the outer peripheral face of protective-cover type heating tube 62 is crimped onto the inner peripheral surface of accepting groove 63 with the curved shape of protective-cover type heating tube 62.After the crimping, can make between the inner peripheral surface of the outer peripheral face of protective-cover type heating tube 62 and accepting groove 63 and can not produce the slit, thereby make the protective-cover type heating tube will become good to the heat conduction of heating plate body, the temperature that improves heating plate is controlled; And, can make the surface temperature distribution of protective-cover type heating tube 62 adstante febre heating plates 122 even.Therefore, the temperature that can prevent heating plate 122 overshoot temperature and become the phenomenon of transcend quantity greatly.
For homogeneity that keeps the calking state and the crooked buckling deformation of eliminating heating plate body 61, should carry out whole calking once as above-mentioned.Yet because the maximization of heating plate 122, heating plate body 61 also becomes greatly, and therefore, the ability that is subject to press apparatus also can adopt and a heating plate body 61 is divided into several carries out calking.If adopt the method for gradation calking, the operation of removing crooked buckling deformation will necessitate.
Secondly, the situation of coming lamination machined object 10 according to the heating plate 122 of present embodiment is described.In addition, the variations in temperature of measured heating plate 122 when not carrying out lamination procedure under the state of configuration machined object 10 on the heating plate 122 of present embodiment is with existing heating plate (characteristic line (2)) is identical as shown in Figure 9.
Among Fig. 9, characteristic line (3) is the variations in temperature that has disposed heating plate 122 measured when carrying out lamination procedure under the state of machined object 10 on the heating plate 122 of present embodiment.Identical with existing heating plate (characteristic line (1)), behind the configuration machined object 10, the heat of heating plate 122 is that machined object 10 seizes and causes the temperature of heating plate 122 sharply to descend on heating plate 122.In order to remedy the reduction of temperature, carry out temperature control, heating plate 122 temperature are risen.Shown in characteristic line (3), the temperature of heating plate 122 rises sharp to target temperature.Therefore, described heating will improve operating efficiency.When reaching target temperature, the temperature of the temperature of heating plate 122 and protective-cover type heating tube 62 does not produce big error.This is because the outer peripheral face of protective-cover type heating tube 62 is crimped, does not produce the slit between protective-cover type heating tube 62 and accepting groove 63 with the mode that face contacts with the inner peripheral surface of accepting groove 63.In other words, even process chamber 121 is in vacuum state down, because the heat of protective-cover type heating tube 62 is directly transferred to heating plate body 61, the temperature of protective-cover type heating tube 62 will be passed to heating plate 122 immediately.Therefore, temperature controller 64 rises the temperature of protective-cover type heating tube 62 or it is cooled off naturally, can be easily and positively the temperature of heating plate 122 is controlled at target temperature.
When the end heat time heating time (for example 5 minutes) of machined object, when the vacuum state of process chamber 121 is disengaged down, the temperature of protective-cover type heating tube 62 rises and can not rise above temperature of heating plate by heating plate as existing.In other words, can not make the temperature of heating plate 122 greatly become transcend quantity above target temperature.Therefore, use the heating plate 122 of present embodiment, temperature can be remained on target temperature.And existing heating plate (characteristic line (1)) because the temperature of transcend quantity rises the excessive temperature of heating plate, therefore, when carrying out machined object 10 laminations of next time, must wait the temperature decline of heating plate after lamination procedure finishes.Yet, if use the heating plate 122 of present embodiment, do not rise owing to can not produce excessive temperature, can carry out machined object 10 laminations of next time immediately, improve operating efficiency.
According to present embodiment, can be when lamination procedure the temperature of heating plate 122 be controlled at target temperature easily and positively.Therefore, can prevent at the component parts generation gluing of the solar cell of lamination procedure bad etc., thereby improve the lamination quality, and improve the operating efficiency of lamination.
According to present embodiment, when using press that the outer peripheral face of protective-cover type heating tube 62 is crimped onto the inner peripheral surface of accepting groove 63, must use the special-purpose press die that is fit to Fig. 8 further groove 71 shapes.Therefore, will become necessaryly according to the special-purpose press die expense of each heating plate machine etc., will spend current cost just.Yet, if form accepting grooves 63, to compare with the mode of the cutting datum level of the 3rd embodiment of Figure 11 described later at heating plate body 61, the area of cut is with fewer.In other words, according to present embodiment, owing to can cut down the processing charges etc. of heating plate body, can cutting down cost.Therefore, the suitable few machine of present embodiment is produced in a large number.
Embodiment two
Figure 10 represents the structure chart of heating plate in the 2nd embodiment.In the present embodiment, the accepting groove 83 at heating plate body 81 back sides is formed the wedge shape of the general triangular that attenuates towards heating plate body 81 surperficial tips.Wedge shaped tip is the angles of cardinal principle 60 degree.The protective-cover type heating tube 82 that is embedded in the accepting groove 83 is section wedge shape roughly triangular in shape.The outer peripheral face of protective-cover type heating tube 82 is crimped on the inner peripheral surface of accepting groove 83 with press.The outer peripheral face of protective-cover type heating tube 82 produces plastic deformation, with the inner peripheral surface of accepting groove 83 seamless face takes place and contacts.As shown in figure 10, be formed with the protrusion 74 that swells to downside from the bottom surface of groove 71 in calking portion 73.
Identical with the 1st embodiment, in the present embodiment,, can keep the face contact between the inner peripheral surface of the outer peripheral face of protective-cover type heating tube 82 and accepting groove 83 owing to set protuberance calking is formed with calking portion 73 to the opening edge of accepting groove 83.And can prevent that protective-cover type heating tube 82 from coming off from accepting groove 83.In the present embodiment, the section configuration of protective-cover type heating tube 82 is roughly triangle, and the section of accepting groove 83 also is roughly triangle, makes smooth of the triangle of protective-cover type heating tube 82 be easy to generate face with the leg-of-mutton tabular surface of accepting groove 83 and contacts.
Embodiment three
Figure 11 represents the structure chart of heating plate in the 3rd embodiment.In the above-described embodiment,, on the back side 65 of heating plate body, be processed to form groove 71, in groove 71, form accepting groove 63,83 as Fig. 8 and shown in Figure 10.In the present embodiment, be not processed to form groove, but be provided with the par 76 of giving prominence to, in this par 76, form accepting groove 63 from the back side 65 of heating plate body 85.
As shown in figure 11, accepting groove 63 is formed on the 65 outstanding pars 76 that are processed as convex and establish, the back side from heating plate body 85.With identical, be provided with protuberance in the opening edge both sides of accepting groove 63 as Fig. 8 (b) illustrated embodiment.The back side 65 of heating plate body 85 shown in Figure 11 will become the datum level 75 when heating plate 122 is installed in down process chamber 121.Form accepting groove 63 by machining at the back side of heating plate body 85.Datum level 65, par 76 and protuberance form by machining too.
When accepting groove 63 is buried protective-cover type heating tube 62 underground, adopt press the outer peripheral face of protective-cover type heating tube 62 to be crimped onto the inner peripheral surface of accepting groove 63.Simultaneously, the protuberance that press is provided with accepting groove 63 opening edges towards the in addition calking of the interior side direction of accepting groove 63, forms calking portion 73 in the mode of the opening that stops up accepting groove 63.Thus, as shown in figure 11, the back side 65 of the heating plate body 85 of heating plate 84 is extruded with par 76, has protrusion 74 on it.
According to present embodiment,, must carry out machining in the back side of heating plate body 85 integral body owing to carry out machining so that form datum level 75, accepting groove 63 and protuberance.Therefore, must spend the fee of material and the processing charges of heating plate body 85.But in the present embodiment, owing in the par 76 at the back side 65 of heating plate body 85 protuberance is set, therefore the space according to calking after the crimping such as groove is not restricted.Therefore, the press die that can make calking processing usefulness can be for example to be the simple shape of surface plate etc., and the metal die expense that can cut down press die significantly.In other words, in the present embodiment, owing to need therefore can not cut down current cost just according to the special-purpose press die expense of heating plate machine.Therefore, present embodiment is to be fit to multimachine kind produced in small quantities.
Embodiment four
Figure 12 represents the structure chart of heating plate in the 4th embodiment.Figure 12 (a) wherein, is embedded with protective-cover type heating tube 62 for from the sectional drawing of arrow direction at the A-A of Fig. 7 section in the accepting groove 63.Shown in Figure 12 (a), the outer peripheral face of protective-cover type heating tube 62 can not produce the slit with the inner peripheral surface crimping of the mode of face contact and accepting groove 63.
Figure 12 (b) is illustrated in accepting groove 63 and buries protective-cover type heating tube 62 state diagram before underground.Shown in Figure 12 (b), accepting groove 63 is the concavities that directly form on the back side 92 of heating plate body 91.The opening edge both sides of accepting groove 63, with the back side of the face of opening edge and heating plate body 91 on same plane.In other words, present embodiment does not form the protuberance in the 1st embodiment to the 3 embodiments.Therefore, shown in Figure 12 (b), the diameter d of protective-cover type heating tube 62 is less than the inside diameter D (with reference to dotted line shown in Figure 12 (b)) of accepting groove 63 bottom lands.Therefore, protective-cover type heating tube 62 can be accommodated in the accepting groove 63 simply.After protective-cover type heating tube 62 is accommodated in the accepting groove 63, use press die the outer peripheral face of protective-cover type heating tube 62 to be crimped onto the inner peripheral surface of accepting groove 63 with press.
Figure 12 (c) is illustrated in accepting groove 63 and is embedded with protective-cover type heating tube 62 state diagram afterwards.By press protective-cover type heating tube 62 is crimped onto the inner peripheral surface of accepting groove 63, plastic deformation will take place in the outer peripheral face of protective-cover type heating tube 62 (sheath), thereby be embedded into the inner peripheral surface of accepting groove 63.The outer peripheral face of protective-cover type heating tube 62 and the inner peripheral surface of accepting groove 63 become and connect airtight seamless face and contact.In press crimping protective-cover type heating tube 62, the opening edge of accepting groove 63 itself stops up the opening of accepting groove 63 to the interior side direction plastic deformation of accepting groove 63, thereby forms calking portion 73.Among Figure 12 (c), expression makes protective-cover type heating tube 62 and opening edge portion produce the shape of the press die 93 of plastic deformation.Press die 93 has two lateral process 94a, the 94b of separate configuration and rake 95a, the 95b that tilts to central authorities respectively from two lateral processes.Therefore, when press die 93 was pushed the back side 92 of heating plate body 91, rake 95a, 95b made opening edge side direction deformation in accepting groove 63 of accepting groove 63.Press die 93 also has kick 97a, 97b, the small pothole that forms corresponding to the boundary place of the opening edge of protective-cover type heating tube 62 and heating plate body 91.
Shown in Figure 12 (c), when making protective-cover type heating tube 62 and opening edge portion that plastic deformation take place, form groove 96 simultaneously by press die 93.Therefore, calking portion 73 can be not outstanding from the back side 92 of heating plate body 91.
According to present embodiment, must make the special-purpose press die of plastic deformation of opening edge portion and formation groove 96, must spend current cost just.Yet, if when heating plate body 91 forms accepting groove 63, can only be processed to form accepting groove 63 at hot plate body 91.Therefore, need not machining such as protuberance and grooves, thus can cutting down cost.
Embodiment five
Figure 13 is a process chart of burying protective-cover type heating tube 62 in expression the 5th embodiment at heating plate body 87 underground.In above-mentioned the 1st embodiment to the 4 embodiments, protective-cover type heating tube 62 is crimped into the inner peripheral surface of accepting groove 63, thereby the outer peripheral face generation plastic deformation of protective-cover type heating tube 62 is embedded into the inner peripheral surface of accepting groove 63.In the present embodiment, thereby make the inner peripheral surface generation plastic deformation of accepting groove 63 be embedded into the outer peripheral face of protective-cover type heating tube 62.As shown in figure 13, be provided with protuberance 77 in the opening edge both sides of the accepting groove 63 of heating plate body 87, it has rake at lateral surface.Use has the calking processing press die 78 that the inner face of the rake that delays angle is arranged compared with the rake angle of protuberance 77.When press die 78 is housed in accepting groove 63 with protective-cover type heating tube 62, push heating plate body 87 by press die.Because the effect of the rake of protuberance 77 and press die 78, the protuberance 77 (inner peripheral surface) of accepting groove 63 is along the 62 outer peripheral face generation plastic deformations of protective-cover type heating tube.According to present embodiment,, the outer peripheral face of protective-cover type heating tube 62 is contacted with the inner peripheral surface generating plane of accepting groove 63 by the plastic deformation of accepting groove 63.
Embodiment six
Figure 14 represents the structure chart of heating plate in the 6th embodiment.Above-mentioned the 1st embodiment to the 5 embodiments have illustrated that the employing press makes protective-cover type heating tube 62 outer peripheral faces contact with accepting groove 63 inner peripheral surface generating planes.Present embodiment is not to use press to process, but waits and bury protective-cover type heating tube 62 underground heating plate body 89 by being cast into aluminium casting.Specifically, protective-cover type heating tube 62 is configured in the fixed position of mold, pours into the aluminium of fusion, constitute the foundry goods of heating plate body in the periphery whole cast of protective-cover type heating tube 62 to mold.The sheath 62c of protective-cover type heating tube 62 adopts fusing point to be higher than the material of the foundry goods that pours into mold.The material of sheath 62c is preferably and for example uses iron pipe, stainless steel tube or Xite pipe (INCOLOY) or inconel pipe (INCONEL).
Figure 14 represents according to the above-mentioned structure chart that is cast into the formed heating plate 88 of operation.As shown in figure 14, the whole outer peripheral face of protective-cover type heating tube 62 is with besieged with 89 modes that contact of heating plate body.Therefore, the thermal efficiency of protective-cover type heating tube 62 can be transmitted to heating plate body 89 well.When casting material is cast into mold, because air inclusion in the casting material will form pore when casting solidification.Therefore, protective-cover type heating tube 62 contacts with heating plate body 89, compares and will differ from the heating plate that above-mentioned press calking is processed.Yet, compare with the prior art of Figure 17, even when lamination adds that man-hour, heating plate 88 became vacuum state, also can carry out the heat conduction fully, guarantee that fully the temperature of heating plate 88 is controlled.
Embodiment seven
Figure 15 represents the oblique view of heating plate in the 7th embodiment and peripheral structure thereof.Figure 15 represents the oblique view of heating plate 98 and peripheral structure thereof.In the 1st embodiment in the heating plate 122, in the rear side of heating plate body 61, heating plate body 61 adjacent to each other comes combination from face side with fixed parts such as screws by bonded block 67 set between the heating plate body 61 across adjacency.
In the heating plate 98 of present embodiment, system with the heating plate body 99 of adjacency each other, in the face side of heating plate body 99, heating plate body 99 adjacent to each other is by coming combination from face side with fixed parts such as screws across 99 set bonded blocks 67 of heating plate body of adjacency.The operating personnel can place between the heating plate body 99, carry out operation from face side at bonded block 67, thereby improves the operating efficiency of assembling heating plate 98.
As mentioned above, in lamination procedure, exist and use heating plate of the present invention in the laminated device of vacuum state, can improve the Controllable Temperature of heating plate especially.In other words, heating plate of the present invention uses if exist in lamination procedure in the laminated device of vacuum state, can make the heat of protective-cover type heating tube be transmitted to the heating plate body efficiently.Heating plate of the present invention is particluarly suitable for existing in the lamination procedure in the laminated device of vacuum state and uses, and obtains positive effect.
Heating plate of the present invention is compared with art methods shown in Figure 17, can obviously improve the Temperature Distribution of heating plate.Existing prior art approach shown in Figure 17 is that two plates in upper plate 161 and lower plate 162 carry out groove processing and bury protective-cover type heating tube 163 underground in its groove.The crooked complicated protective-cover type heating tube 163 of shape is buried underground and is not easy.In other words, the precision of the groove processing of upper and lower two plates must be improved, and the bending machining precision of protective-cover type heating tube 163 must be improved.Therefore, in the prior art, be to process the protective-cover type heating tube 163 of burying rectilinear form underground at the groove that two plates up and down carry out rectilinear form.
In the heating plate of the present invention, need only the accepting groove at a heating plate body processing protective-cover type heating tube, this accepting groove can form the curve shape of complexity as shown in Figure 7.Therefore, if suitably set the curved shape of protective-cover type heating tube, also can make the uniformity of temperature profile of heating plate equally.
Claims (17)
1. laminated device, this laminated device has last process chamber and the following process chamber that separates by pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, come cramping to carry out lamination with above-mentioned heating plate and above-mentioned pressing component, it is characterized in that by the above-mentioned machined object of above-mentioned heating plate heating:
Above-mentioned heating plate has:
The back side be provided with accepting groove the heating plate body and
Be embedded in the protective-cover type heating tube in the above-mentioned accepting groove;
At least one side of above-mentioned accepting groove and above-mentioned protective-cover type heating tube deforms, and the outer peripheral face of above-mentioned protective-cover type heating tube is contacted with the inner peripheral surface generating plane of above-mentioned accepting groove.
2. laminated device according to claim 1 is characterized in that:
When above-mentioned protective-cover type heating tube was embedded in the above-mentioned accepting groove, the protuberance that is located at the opening edge of above-mentioned accepting groove gave calking at the interior side direction of above-mentioned accepting groove.
3. laminated device according to claim 1 and 2 is characterized in that:
Above-mentioned accepting groove is arranged on the bottom surface of the set groove in the above-mentioned heating plate body back side.
4. laminated device according to claim 2 is characterized in that:
The protuberance side direction in above-mentioned accepting groove that is located at the opening edge of above-mentioned accepting groove is given prominence to from the above-mentioned heating plate body back side by the part of calking.
5. laminated device according to claim 1 is characterized in that:
When above-mentioned protective-cover type heating tube was embedded in the above-mentioned accepting groove, this gave calking the opening edge of above-mentioned accepting groove on the interior side direction of above-mentioned accepting groove.
6. laminated device according to claim 5 is characterized in that:
In the time of before the calking of the opening edge of above-mentioned accepting groove own, above-mentioned accepting groove is set directly at the above-mentioned heating plate body back side.
7. according to each described laminated device of claim 1 to 6, it is characterized in that:
The material of the periphery parts of the material of above-mentioned heating plate body and above-mentioned protective-cover type heating tube is identical.
8. according to each described laminated device of claim 1 to 7, it is characterized in that:
Be embedded with a plurality of protective-cover type heating tubes in the above-mentioned heating plate body.
9. according to each described laminated device of claim 1 to 8, it is characterized in that:
The above-mentioned heating plate body back side of this laminated device is provided with along a plurality of accepting grooves of the different bending of face direction,
Above-mentioned a plurality of accepting groove is embedded with a plurality of protective-cover type heating tubes separately.
10. laminated device according to claim 9 is characterized in that:
In above-mentioned a plurality of protective-cover type heating tube, at a plurality of protective-cover type heating tubes that the same depth direction of above-mentioned heating plate body is buried underground, it reaches outside position from above-mentioned accepting groove and staggers mutually on the width of above-mentioned heating plate body.
11., it is characterized in that according to each described laminated device of claim 1 to 10:
Above-mentioned heating plate by a plurality of heating plate bodies in conjunction with after constitute.
12. laminated device according to claim 11 is characterized in that:
Heating plate body adjacent to each other in above-mentioned a plurality of heating plate body is by crossing over bonded block set between the heating plate body, come combination from face side with fixed part from face side.
13. laminated device, this laminated device has last process chamber and the following process chamber that separates by pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, come cramping to carry out lamination with above-mentioned heating plate and above-mentioned pressing component, it is characterized in that by the above-mentioned machined object of above-mentioned heating plate heating:
Above-mentioned heating plate has:
The heating plate body and
Be embedded in the protective-cover type heating tube in the above-mentioned accepting groove;
The whole outer peripheral face of above-mentioned protective-cover type heating tube contacts with above-mentioned heating plate body.
14. heating plate that laminated device is used, this laminated device has last process chamber and the following process chamber that separates according to pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, come cramping to carry out lamination with above-mentioned heating plate and above-mentioned pressing component, it is characterized in that by the above-mentioned machined object of above-mentioned heating plate heating:
Above-mentioned heating plate has:
The back side be provided with accepting groove the heating plate body and
Be embedded in the protective-cover type heating tube in the above-mentioned accepting groove;
At least one side of above-mentioned accepting groove and above-mentioned protective-cover type heating tube deforms, and the outer peripheral face of above-mentioned protective-cover type heating tube is contacted with the inner peripheral surface generating plane of above-mentioned accepting groove.
15. heating plate that laminated device is used, this laminated device has last process chamber and the following process chamber that separates according to pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, come cramping to carry out lamination with above-mentioned heating plate and above-mentioned pressing component, it is characterized in that by the above-mentioned machined object of above-mentioned heating plate heating:
Above-mentioned heating plate is embedded in the heating plate body in the whole mode that comes in contact with above-mentioned heating plate body of the periphery of above-mentioned protective-cover type heating tube.
16. manufacture method of making laminated device with heating plate, this laminated device has last process chamber and the following process chamber that separates according to pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, come cramping to carry out lamination with above-mentioned heating plate and above-mentioned pressing component, it is characterized in that by the above-mentioned machined object of above-mentioned heating plate heating:
This manufacture method has the operation of burying underground of burying the protective-cover type heating tube in the set accepting groove in the heating plate body back side underground,
Bury underground in the operation above-mentioned, by the mode that press comes in contact the inner peripheral surface face of the outer peripheral face of above-mentioned protective-cover type heating tube and above-mentioned accepting groove, at least one side of above-mentioned accepting groove and above-mentioned protective-cover type heating tube is out of shape and make the protuberance of the opening edge that is located at above-mentioned accepting groove or opening edge this in above-mentioned accepting groove, give calking on the side direction.
17. manufacture method of making laminated device with heating plate, this laminated device has last process chamber and the following process chamber that separates according to pressing component, on the set heating plate of this time process chamber, dispose machined object, to make above-mentioned down process chamber be vacuum and import atmosphere to the above-mentioned process chamber of going up, come cramping to carry out lamination with above-mentioned heating plate and above-mentioned pressing component, it is characterized in that by the above-mentioned machined object of above-mentioned heating plate heating:
Above-mentioned protective-cover type heating tube buries by casting and is arranged in the above-mentioned heating plate body, and the periphery integral body of protective-cover type heating tube is contacted with the heating plate body.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007233298 | 2007-09-07 | ||
| JP2007-233298 | 2007-09-07 | ||
| JP2008-208054 | 2008-08-12 | ||
| JP2008208054A JP5374715B2 (en) | 2007-09-07 | 2008-08-12 | Laminating apparatus, hot plate for laminating apparatus, and method for manufacturing hot plate for laminating apparatus |
| PCT/JP2008/066140 WO2009031674A1 (en) | 2007-09-07 | 2008-09-02 | Lamination apparatus, hot platen for the same and process for manufacturing the hot platen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101848802A true CN101848802A (en) | 2010-09-29 |
Family
ID=40653659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880114992A Pending CN101848802A (en) | 2007-09-07 | 2008-09-02 | Lamination apparatus, hot platen for the same and process for manufacturing the hot platen |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5374715B2 (en) |
| KR (1) | KR20100080765A (en) |
| CN (1) | CN101848802A (en) |
| TW (1) | TW200919756A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102700132A (en) * | 2012-05-15 | 2012-10-03 | 苏州凯尔博精密机械有限公司 | Heating device for hydraulic tray welding machine |
| CN108523628A (en) * | 2017-10-13 | 2018-09-14 | 金华市康丽乐厨具有限公司 | The manufacture craft and pot of pot |
| CN112027252A (en) * | 2020-08-28 | 2020-12-04 | 湖南尚珂伊针纺有限公司 | Automatic packaging system for socks |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5558117B2 (en) * | 2010-01-08 | 2014-07-23 | 日清紡メカトロニクス株式会社 | Laminating equipment |
| JP2011235442A (en) * | 2010-04-30 | 2011-11-24 | Nisshinbo Mechatronics Inc | Hot plate for laminator and laminator using the same |
| WO2011154998A1 (en) * | 2010-06-09 | 2011-12-15 | 日立設備エンジニアリング株式会社 | Method and device for manufacturing laminated modules such as solar cell modules |
| CN104390350B (en) * | 2014-10-21 | 2017-11-14 | 上海交通大学 | Massive plate applied to moisture film covering uniformly heats and temperature control device |
| KR102412961B1 (en) * | 2015-09-11 | 2022-06-24 | 주성엔지니어링(주) | Supporting Apparatus for Laminator and Laminator |
| JP2018181586A (en) | 2017-04-12 | 2018-11-15 | 日本発條株式会社 | Sheath heater |
| JP6902382B2 (en) | 2017-04-12 | 2021-07-14 | 日本発條株式会社 | Heater unit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0724236B2 (en) * | 1987-06-18 | 1995-03-15 | 東芝ホームテクノ株式会社 | Electric cooker |
| JPH0933170A (en) * | 1995-05-15 | 1997-02-07 | Nippon Dennetsu Co Ltd | Heated plate |
| JP3759285B2 (en) * | 1997-05-01 | 2006-03-22 | 株式会社エヌ・ピー・シー | Laminating equipment |
-
2008
- 2008-08-12 JP JP2008208054A patent/JP5374715B2/en not_active Expired - Fee Related
- 2008-09-02 CN CN200880114992A patent/CN101848802A/en active Pending
- 2008-09-02 KR KR1020107005357A patent/KR20100080765A/en not_active Application Discontinuation
- 2008-09-05 TW TW97134207A patent/TW200919756A/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102700132A (en) * | 2012-05-15 | 2012-10-03 | 苏州凯尔博精密机械有限公司 | Heating device for hydraulic tray welding machine |
| CN108523628A (en) * | 2017-10-13 | 2018-09-14 | 金华市康丽乐厨具有限公司 | The manufacture craft and pot of pot |
| CN112027252A (en) * | 2020-08-28 | 2020-12-04 | 湖南尚珂伊针纺有限公司 | Automatic packaging system for socks |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5374715B2 (en) | 2013-12-25 |
| JP2009078547A (en) | 2009-04-16 |
| TW200919756A (en) | 2009-05-01 |
| KR20100080765A (en) | 2010-07-12 |
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Application publication date: 20100929 |