WO2009031674A1

WO2009031674A1 - Lamination apparatus, hot platen for the same and process for manufacturing the hot platen

Info

Publication number: WO2009031674A1
Application number: PCT/JP2008/066140
Authority: WO
Inventors: Masato Kasahara; Shin Nakamura; Kunio Takei; Takayuki Iguchi; Yoshinori Hosogaya
Original assignee: Nissinbo Industries, Inc.; Nihon Dennetsu Co., Ltd.
Priority date: 2007-09-07
Filing date: 2008-09-02
Publication date: 2009-03-12

Abstract

The temperature of hot platen at the operation of laminating can be controlled at a target temperature easily and securely. There is disclosed a lamination apparatus having a superior chamber and an inferior chamber partitioned by a press member, the inferior chamber provided with a hot platen (122), so that a workpiece is placed on the hot platen (122) and, by evacuating the inferior chamber and introducing atmospheric air in the superior chamber, the workpiece heated by the hot platen (122) is pressurized between the hot platen (122) and the press member to thereby attain lamination. The lamination apparatus is characterized in that the hot platen (122) includes a hot platen body (61) provided at its backside with an accommodation groove (63) and a sheath heater (62) embedded in the accommodation groove (63), and that at least either the accommodation groove (63) or the sheath heater (62) is deformed so as to achieve surface contact between the outer peripheral surface of the sheath heater (62) and the inner peripheral surface of the accommodation groove (63).

Description

Specification

Laminating apparatus, hot plate for laminating apparatus and method for manufacturing hot plate for laminating apparatus

Technical field

The present invention relates to a laminating apparatus in which a workpiece such as a solar cell module is disposed on a hot plate, and the workpiece heated by the hot plate is pressed by a hot plate and a pressing member to be laminated, and a hot plate for the laminating apparatus The present invention relates to a method for manufacturing a hot plate for a laminating apparatus. Background art

In recent years, solar cells that do not pollute the environment are attracting attention due to problems such as greenhouse gases. A solar battery is configured by overlapping a plurality of members such as a cover glass, a filler, a solar cell, and a back material. When manufacturing this type of solar cell, a laminating apparatus is used (for example, see Patent Document 1). The laminating apparatus performs laminating while heating the workpiece on which the constituent members of the solar cell are superposed in a vacuum state. As a result, the workpiece is bonded in a state in which the constituent members are overlapped. This laminating apparatus has an upper case having a diaphragm that is expandable downward, and a lower case having a heat plate. When laminating a solar cell, first, the user arranges the constituent members of the solar cell on the hot plate. Next, the laminating apparatus evacuates the space formed by the upper case and the lower case. Further, the laminating apparatus introduces atmospheric pressure into the upper case in a state where the constituent members of the solar cell, which is the workpiece, are heated by the hot plate. By doing so, the laminating apparatus laminates the constituent members of the solar cell with the diaphragm and the hot plate.

[Patent Document 1] Japanese Patent Laid-Open No. 2 0 0 4-2 3 8 1 9 6

[Patent Document 2] Japanese Patent Laid-Open No. 9-3 3 1 0 0 Disclosure of the Invention Problems to be Solved by the Invention

A heater called a sheath heater, in which the heating wire is covered with metal via an insulating material, is embedded in the hot plate of the laminating apparatus. By causing the sheath heater to generate heat, the heat of the sheath heater is transmitted to the hot plate, and the solar cell components arranged on the hot plate can be heated. The temperature of the hot plate is controlled by a temperature controller so as to be an appropriate temperature for heating the solar cell. More specifically, a thermocouple embedded at an appropriate depth from the surface of the hot plate measures the temperature of the hot plate. The measured temperature information is then fed to the temperature controller. Be packed. The temperature controller controls the temperature of the hot plate to an appropriate temperature based on the information on the temperature of the feed pack. That is, the temperature controller raises the temperature of the sheath heater or cools it naturally. The temperature controller increases the temperature of the sheath heater or allows it to cool naturally so that the temperature of the hot plate is maintained at an appropriate temperature.

FIG. 9 is a diagram showing the temperature transition of the hot plate. In FIG. 9, the characteristic line (1) is the temperature transition of the hot plate obtained when the laminating process is performed with the workpiece placed on the hot plate in the laminating apparatus described above. The temperature of the hot plate is initially a target temperature (eg, 120 ° C. to 180 ° C.). By placing the work piece on the hot plate, the heat of the hot plate is taken away by the work piece, and the temperature of the hot plate decreases rapidly. To catch this temperature drop? The display controller controls the temperature of the hot plate. However, the temperature of the hot plate does not easily reach the target temperature within a predetermined heating time (for example, 5 minutes). Also, during laminating, the hot plate is in a vacuum atmosphere; the temperature of the hot plate does not rise. Furthermore, when the heating time of the workpiece is finished and the vacuum state of the space formed by the upper case and the lower case is released, the temperature of the hot plate greatly exceeds the target temperature and overshoots. As described above, in the conventional laminating apparatus, it is difficult to control the temperature of the hot plate to the target temperature. Further, if the temperature of the hot plate is overshot, the workpiece cannot be placed on the hot plate until the temperature of the hot plate is lowered to the target temperature. Therefore, the conventional hot plate has a problem that the working efficiency of the laminate is lowered. In FIG. 9, the characteristic line (2) is the temperature transition of the hot plate obtained when the laminating process is performed in the state where the workpiece is not placed on the hot plate. As shown by the characteristic line (2) in Fig. 9, when the laminating process starts, the temperature of the hot plate decreases slightly due to contact with the diaphragm, but is then controlled to the target temperature.

Therefore, the inventors of the present application verified a conventional laminating apparatus. As a result, it was found that the reason why the hot plate temperature did not rise easily and the cause of overshooting exceeding the target temperature after the heating time ended were due to the structure of the hot plate. Fig. 17 (a) is a diagram showing a partial cross section of the hot plate in a simplified manner. As shown in FIG. 17 (a), the hot plate 1 60 has an upper plate 1 61 and a lower plate 1 6 2. In addition, the hot plate 160 has a sheath heater 16 3 provided between the receiving groove formed on the back surface of the upper plate 16 1 and the receiving groove formed on the upper surface of the lower plate 16 2. Have. Here, gaps were generated between the upper plate 1 6 1 and the sheath heater 1 6 3 and between the lower plate 1 6 2 and the sheath heater 1 6 3. This gap is due to an overlay error between the upper plate 16 1 and the lower plate 16 2, an error in the processing dimension of the receiving groove, and the like. Due to the generation of this gap, the efficiency of heat transfer from the sheath heater 16 3 to the upper plate 16 1 and the lower plate 16 2 is reduced. In particular, as described above, in the laminating process, there is a process in which the space formed by the upper case and the lower case is in a vacuum state. In this process, gaps generated between the upper plate 1 61 and the sheath heater 1 6 3 and between the lower plate 1 6 2 and the sheath heater 1 6 3 are also in a vacuum state. When a vacuum is reached, the sheath heater 1 6 3 The efficiency of heat transfer to the upper plate 1 6 1 and the lower plate 1 6 2 is significantly reduced. Therefore, it becomes difficult for the temperature controller to control the temperature of the hot plate 160. Also, the temperature of the hot plate 160 does not easily increase to the target temperature within the heating time. Accordingly, the temperature controller performs temperature control for further increasing the temperature of the sheath heater 16 3 in order to increase the temperature of the hot plate 160. Therefore, the temperature of the sheath heater 1 6 3 rises excessively. When the vacuum state is released after the workpiece heating time is completed, air is also introduced into the gaps described above. By introducing air, air becomes a medium, and the heat of the sheath heater 1 63 is transferred to the heat plate 1 60 (upper plate 16 1 and lower plate 16 2) more efficiently than before. Then, the heat of the sheath heater 16 3 that has risen excessively is transmitted to the hot plate, and the temperature of the hot plate 1 60 greatly exceeds the target temperature and causes overshoot. In addition, the temperature distribution on the surface of the hot plate 160 becomes non-uniform due to the presence of the location where the gap is generated and the location where it is in contact. Therefore, there is a risk of affecting the quality such as the adhesion of components in the laminating process.

In such a problem, there is a method of improving heat transfer by filling a gap between the upper plate 16 1 and the sheath heater 16 3 or between the lower plate 16 2 and the sheath heater 16 3. For example, as shown in FIG. 17 (b), there is a method in which a thermally conductive silicone sheet 1664 or a fluorine resin sheet is interposed in the gap. However, even such a method cannot completely fill the gap. In addition, the cost of the entire hot plate is increased.

On the other hand, when manufacturing a semiconductor or a liquid crystal display, there is a step of heat-treating a workpiece such as a semiconductor or a liquid crystal display. In this process, a hot platen for heating a workpiece is known (for example, see Patent Document 2). This hot platen has through holes formed in parallel to the inside of the platen. The through hole is provided with a heat conducting element having an outer portion, with the inner peripheral surface of the through hole and the outer peripheral surface of the outer portion of the heat conducting element being in close contact with each other. However, this hot plate is used in a device that does not enter a vacuum state as described above, in which the efficiency of heat transfer is significantly reduced. In addition, the hot platen disclosed in Patent Document 2 has not been considered so as to be able to cope with workpieces that are becoming larger in recent years.

The present invention has been made in view of the above-described problems, and is intended to enable easy and reliable control of the temperature of a hot plate to a target temperature in a laminating apparatus having a step of becoming a vacuum state. Objective. Means for solving the problem

The laminate apparatus according to the present invention includes an upper chamber and a lower chamber separated by a pressing member, and a workpiece is disposed on a hot plate provided in the lower chamber, and heated by the hot plate. A laminating apparatus for laminating a workpiece by vacuuming the lower champ and introducing air into the upper champ and sandwiching between the hot plate and the pressing member, the hot plate having a receiving groove on the back surface And a sheath heater embedded in the housing groove, the housing groove Further, at least one of the sheath heater is deformed so that the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove.

The hot plate can be configured to caulk a protrusion provided at an opening edge of the housing groove in an inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove. The hot plate may be configured such that the receiving groove is provided on a bottom surface of a concave groove provided on a back surface of the hot plate main body.

The hot plate can be configured such that a portion of the protruding portion provided at the opening edge of the receiving groove is caulked in the inner direction of the receiving groove so as to protrude from the back surface of the hot plate main body.

The hot plate can be configured by caulking the opening edge of the housing groove in the ridge side direction of the housing groove in a state where the sheath heater is embedded in the housing groove.

The hot plate may be configured to be provided directly on the back surface of the hot plate body in a state before the opening edge itself of the receiving groove is caulked.

The material of the hot plate body may be the same as the material of the outer peripheral member of the sheath heater. A plurality of sheath heaters may be embedded in the hot plate main body.

A plurality of housing grooves meandering along the surface direction are provided on the back surface of the hot plate main body, and a plurality of sheath heaters embedded in each of the plurality of housing grooves may be provided.

The plurality of sheathed heaters embedded in the same depth direction of the heat plate main body among the plurality of sheath heaters are arranged such that the position of going out from the housing groove is shifted in the width direction of the heat plate main body. It can also be configured.

The hot plate can be configured by combining a plurality of hot plate bodies.

The hot plate can also be configured to be connected by a fixing member from the surface side through a connecting member provided between adjacent hot plate bodies from the surface side to between the hot plate bodies.

The hot plate may include a hot plate body and a sheath heater embedded in the hot plate body, and the entire outer periphery of the sheath heater may be in contact with the hot plate body.

The hot plate may be configured to be embedded in the hot plate main body so that the entire outer periphery of the sheath heater is in contact with the hot plate main body.

The hot plate has a burying step of burying a sheath heater in a receiving groove provided on the back surface of the hot plate main body, and in the burying step, an outer peripheral surface of the sheath heater is placed on an inner peripheral surface of the receiving groove by a press machine. At least one of the housing groove and the sheath heater is deformed so as to come into surface contact, and the protrusion provided on the opening edge of the housing groove or the opening edge itself is clamped inward of the housing groove. Obtained by the manufacturing method.

The hot plate can also be obtained by a manufacturing method in which the sheath heater is embedded in the hot plate main body so that the entire outer periphery of the sheath heater is in contact with the hot plate main body. The invention's effect According to this effort, the heat of the sheath heater is efficiently transmitted to the main body of the hot plate, and the temperature of the hot plate in the laminating apparatus can be easily and reliably controlled to the target temperature. Further, the laminate quality of the product can be improved.

For example, in the hot plate, the protruding portion provided at the opening edge of the accommodation groove is caulked in the inner direction of the accommodation groove in a state where the sheath heater is embedded in the accommodation groove. In this case, the outer peripheral surface of the sheath heater can be maintained in pressure contact with the inner peripheral surface of the housing groove.

Further, for example, the housing groove can be provided on the bottom surface of the concave groove provided on the back surface of the hot plate main body. In this case, the cutting area can be reduced. Further, since the caulking portion can be positioned in the concave groove, the caulking portion does not protrude from the back surface of the hot plate main body, and another hot plate can be stacked on the back surface.

Further, for example, a portion where the projecting portion provided at the opening edge of the housing groove is caulked in the inner direction of the housing groove can protrude from the back surface of the hot plate main body. In this case, it is possible to reduce the cost of the press die used when caulking the protrusion.

Further, for example, the heat plate can be caulked with the opening edge of the housing groove in the inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove. In this case, since it is not necessary to form the protruding portion for caulking, the processing cost for processing the hot plate body can be reduced.

Further, for example, the housing groove can be provided directly on the back surface of the main body of the heat plate before the opening edge of the housing groove itself is caulked. In this case, the processing cost for processing the hot plate body can be reduced.

Further, for example, in the hot plate, the material of the hot plate main body and the material of the outer peripheral member of the sheath heater can be made the same. In this case, the efficiency of heat transfer from the sheath heater to the hot plate body can be improved.

Further, for example, the hot plate can embed a plurality of sheath heaters in the hot plate body. In this case, the entire hot plate can be heated uniformly.

Further, for example, a plurality of receiving grooves meandering along the surface direction may be provided on the back surface of the hot plate main body, and a plurality of sheath heaters embedded in each of the plurality of receiving grooves may be provided. In this case, the temperature distribution of the entire hot plate can be made constant.

Further, for example, among the plurality of sheath heaters, the plurality of sheath heaters embedded in the same depth direction of the hot plate main body can be shifted in the width direction of the hot plate main body from the housing groove. In this case, when wiring a plurality of sheath heaters, the sheath heaters that have come outside from the back of the hot plate body can be arranged so that they do not cross or overlap each other on the lower side of the hot plate body. The space in the vertical direction on the lower side can be reduced. Further, for example, the hot plate can be configured by combining a plurality of hot plate bodies. In this case, an accommodation groove or the like can be processed for each hot plate body. In addition, it is possible to easily embed a sheath heater in the accommodation groove. Further, for example, among the plurality of hot plate bodies, adjacent hot plate bodies are configured to be coupled by a fixing member from the surface side via a coupling member provided across from the surface side to the hot plate body. You can also. In this case, the operator can work from the surface side with the coupling member between the hot plate bodies, so that the efficiency of the work of assembling the hot plate is improved.

Further, for example, the hot plate can be configured such that a sheath heater is embedded in the hot plate main body. In this case, a hot plate in which the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove can be easily manufactured.

Brief Description of Drawings

FIG. 1 is a diagram showing the overall configuration of the laminating apparatus.

FIG. 2 is a perspective view showing the overall configuration of the laminating apparatus.

FIG. 3 is a cross-sectional view showing a configuration of a solar cell module as a workpiece.

'Fig. 4 is a sectional side view of the laminating part of the laminating device.

FIG. 5 is a cross-sectional side view of the laminating portion during laminating of the laminating apparatus. FIG. 6 is a perspective view showing the configuration of the hot plate and its periphery according to the first embodiment.

FIG. 7 is a plan view of the hot platen according to the first embodiment.

FIG. 8 is a diagram for explaining the configuration of the hot platen according to the first embodiment.

FIG. 9 is a diagram showing a temperature transition obtained by measuring the temperature of the hot plate.

FIG. 10 is a diagram showing the configuration of the hot platen according to the second embodiment.

FIG. 11 is a diagram showing a configuration of a hot plate according to the third embodiment.

FIG. 12 is a diagram for explaining a configuration of a hot platen according to the fourth embodiment.

FIG. 13 is a view for explaining a process of embedding a sheath heater in the hot plate body according to the fifth embodiment.

FIG. 14 is a diagram showing the configuration of the hot platen according to the sixth embodiment.

FIG. 15 is a perspective view showing the configuration of the hot plate and its periphery according to the seventh embodiment.

FIG. 16 is a view showing the back surface of a part of the hot platen according to the first embodiment.

Fig. 17 is a diagram showing the configuration of the hot plate of a conventional laminating apparatus and the configuration in which a heat conductive silicone sheet is interposed in the hot plate, which has been found by the verification. Explanation of reference numerals

1 0 Workpiece

1 0 0 Laminator

1 0 1 Laminate section

1 1 0 Upper case

1 1 2 Diaphragm

1 1 3 Upper chamber 1 2 0 Lower case

1 2 1 Lower Champa

1 2 2 Hot plate

6 1 Hot plate body

6 2 Sheath heater

6 3 Housing groove

6 5 reverse side

6 7 Connecting member

7 1 赚

7 2 Protrusion

7 3 Caulking section

7 4 Top

7 5 Reference plane

7 6 Flat part

7 7 Protrusion

7 8 Press mold

8 0 Hot plate

8 1 Heat Body

8 2 Sheath heater

8 3 Housing groove

8 4 Hot plate

8 5 Hot plate body

8 6 Ripe plate

8 7 Hot plate body

8 8 Hot plate

8 9 Hot plate body

9 1 Hot plate body

9 2 reverse side

9 8 Hot plate

9 9 Hot plate body

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a laminating apparatus according to the present embodiment will be described with reference to the drawings.

FIG. 1 is a diagram showing an overall configuration of a laminating apparatus 100 according to the present embodiment. FIG. 2 is a perspective view showing the overall configuration of the laminating apparatus 100. The laminating apparatus 1 0 0 includes an upper case 1 1 0, a lower case 1 2 0, and a conveyor belt 1 for conveying the workpiece 1 0. 3 0 and The transport belt 1 3 0 transports the workpiece 10 between the upper case 1 1 0 and the lower case 1 2 0. The laminating apparatus 100 is provided with a carry-in competitor 2 00 for conveying the workpiece 10 before laminating to the laminating apparatus 1100. Further, the laminating apparatus 100 is provided with a carry-out conveyor 300 for carrying out the workpiece 10 after lamination from the laminating apparatus 100. The carry-in conveyor 2 00 and the carry-out conveyor 3 0 0 are connected in series. The workpiece 10 is transferred from the carry-in conveyor 20 0 to the transfer pelt 1 3 0, and is transferred from the transfer belt 1 3 0 to the carry-out conveyor 3 0 0.

As shown in FIG. 2, the laminating apparatus 100 is provided with an elevating apparatus 150 composed of a cylinder, a piston rod, and the like. The lifting device 15 50 can lift and lower the upper case 1 10 with respect to the lower case 1 2 0 while maintaining the horizontal state. The elevating device 1 5 0 lowers the upper case 1 1 0 so that the internal space between the upper case 1 1 0 and the lower case 1 2 0 can be sealed. .

Next, the workpiece 10 to be laminated by the laminating apparatus 100 will be described.

FIG. 3 is a cross-sectional view showing a configuration of a solar cell module using a crystal cell as a workpiece 10. As shown in the figure, the solar cell module has a configuration in which a string 15 is sandwiched between a transparent power par glass 11 and a back material 12 via fillers 13 and 14. For the back material 1 2, a material such as polyethylene resin is used. E VA resin is used for fillers 1 3 and 1 4. The string 15 has a configuration in which solar cells 18 as crystal cells are connected between electrodes 16 and 17 via lead wires 19.

Further, as the work piece 10, not only the solar cell module ^ / described above but also a solar cell module generally called a thin film type can be targeted. In a typical structure example of this thin-film solar cell module, a power generating element composed of a transparent electrode, a semiconductor, and a back electrode is previously deposited on a transparent power par glass. In such a thin-film solar cell module, the cover glass is disposed downward, and the filler is placed on the negative electrode on the cover glass. Furthermore, it has a structure in which a back material is put on the filler. In this state, the constituent members of the thin-film solar cell module are bonded by vacuum heating lamination. That is, the thin film solar cell module is merely changed to a power generation element on which the above-described solar cell module crystal cells are deposited. The basic sealing structure of the thin-film solar cell module is the same as that of the solar cell module described above.

Next, the configuration of the laminating unit 1001 of the laminating apparatus 100 according to this embodiment will be described more specifically. FIG. 4 is a side cross-sectional view of the laminate portion 1001 for laminating the workpiece 10 in the laminating apparatus 100. FIG. 5 is a cross-sectional side view of the laminating portion 100 1 during laminating.

The upper case 110 is formed with a space opened downward. In this space, a diaphragm 1 1 2 is provided to horizontally partition the sky. Diaphragm 1 1 2 is molded from heat-resistant rubber such as silicone rubber. As will be described later, The flam 1 1 2 functions as a pressing member that presses the workpiece 10 and performs lamination. In the upper case 110, a space (upper champ 1 1 3) partitioned by the diaphragm 1 1 2 is formed.

In addition, on the upper surface of the upper case 110, an intake / exhaust port 14 14 communicating with the upper chamber 1 13 is provided. In the upper champ 1 1 3, the upper champ 1 1 3 內 can be evacuated and vacuumed or air can be introduced into the upper champ 1 1 3 via the intake and exhaust ports 1 1 4. . The lower case 1 2 0 is formed with a space (lower champ 1 2 1) opened upward. In this space, a hot plate 1 2 2 (panel heater) is provided. The hot plate 1 2 2 is supported by a support member erected on the bottom surface of the lower case 1 2 20 so as to maintain a horizontal state. In this case, the heat plate 1 2 2 is supported so that the surface thereof is almost the same height as the opening surface of the lower champ 1 2 1.

Further, an intake / exhaust port 1 2 3 communicating with the lower champ 1 2 1 is provided on the lower surface of the lower case 1 2 0. In the lower champ 1 2 1, the inside of the lower champ 1 2 1 can be vacuumed through the intake / exhaust port 1 2 3 to create a vacuum, or the atmosphere can be introduced to the lower champ 1 2 1 . Between the upper case 1 1 0 and the lower case 1 2 0, above the hot plate 1 2 2, the conveyor belt

1 3 0 is movably provided. The conveying beret 1 30 receives the workpiece 10 before lamination from the loading conveyor 20 0 force of FIG. 1 and conveys it to the central position of the laminating section 1 0 1. Further, the conveyor belt 1 30 delivers the workpiece 10 after lamination to the carry-out conveyor 30 in FIG.

A release sheet 1 40 is provided between the upper case 1 1 0 and the lower case 1 2 0 and above the conveyor belt 1 3 0. Separation sheet 1 4 0 is the workpiece 1 0 filler 1 3

When 1 4 (see Fig. 3) is melted, fillers 1 3 and 1 4 are prevented from adhering to diaphragm 1 1 2.

Next, the laminating process by the laminating apparatus 100 according to this embodiment will be described more specifically. First, as shown in FIG. 4, the conveyance belt 1 30 conveys the workpiece 10 to the center position of the laminating portion 10 1.

Next, the lifting device 1 5 0 lowers the upper case 1 1 0. By lowering the upper case 110, the internal space between the upper case 110 and the lower case 120 is sealed as shown in FIG. That is, the upper and lower champs 1 1 3 and 1 2 1 can be kept sealed in the upper case 1 1 0 and the lower case 1 2 0, respectively.

Next, the laminating apparatus 100 performs evacuation of the upper chamber 1 1 3 through the intake / exhaust port 1 1 4 of the upper case 1 1 0. Similarly, the laminating apparatus 100 evacuates the lower chamber 1 2 1 through the intake / exhaust port 1 2 3 of the lower case 1 2 0. By vacuuming the lower champ 1 2 1, the bubbles contained in the work piece 10 are sent out of the work piece 10. In this state, the work piece 10 is heated by the hot plate 12 2 and the fillers 13 and 14 contained therein are melted. Next, the laminating apparatus 100 introduces air to the upper chamber 1 1 3 through the intake / exhaust port 1 1 4 of the upper case 1 1 0 while keeping the vacuum state of the lower chamber 1 2 1. As a result, a pressure difference is generated between the upper champ 1 1 3 and the lower champ 1 2 1, so that the diaphragm 1 1 2 expands. Accordingly, the diaphragm 1 1 2 is pushed downward as shown in FIG. The workpiece 10 is pressed between the diaphragm 1 1 2 pushed downward and the hot plate 1 2 2, and the constituent members are bonded to each other by the melted fillers 1 3 and 14.

At this time, the fillers 1 3 and 1 4 may protrude from between the power par glass 1 1 and the back material 1 2. At this time, the protruding fillers 13 and 14 adhere to the release sheet 140. By interposing the release sheet 140 in this way, the protruding fillers 13 and 14 are prevented from adhering to the diaphragm 11. Therefore, the release sheet 140 prevents the fillers 13 and 14 from adhering to the workpiece 10 to be laminated next from the diaphragm 1 12. In addition, when the protruding filler 13 or 14 force S adheres on the conveying belt 130, the adhering filler 13 or 14 is removed by a cleaning mechanism (not shown).

After the laminating process is completed in this way, the laminating apparatus 100 introduces air into the lower chamber 1 2 1 via the intake / exhaust port 1 2 3 of the lower case 1 2 0. At this time, the lifting / lowering device 1 5 0 raises the upper case 1 1 0. By raising the upper case 110, the conveyor belt 130 can be moved as shown in FIG. The conveyor belt 1 3 0 delivers the laminated workpiece 10 to the carry-out conveyor 3 0 0. First embodiment

Next, the hot plate 1 2 2 of the laminating apparatus 100 according to the first embodiment will be described in detail. FIG. 6 is a perspective view showing the configuration of the hot plate 1 2 2 and its periphery. The hot plate 1 2 2 has a plurality of hot plate bodies 61 and a plurality of sheath heaters 62. The size of the hot plate 1 2 2 is formed to fit in the lower case 1 2. The hot plate 1 2 2 of this embodiment is formed in a size corresponding to the size of a workpiece that has been increasing in size in recent years. Specifically, the hot plate 1 2 2 has a width of about 40 when the size of the hot plate 1 2 2 is increased. 0 O mm (see W in Fig. 6) and depth of about 200 O mm (see DE in Fig. 6).

The hot plate body 61 is formed in a panel shape from aluminum or an aluminum alloy. The hot plate 1 2 2 of this embodiment is configured by arranging four hot plate bodies 61 in the width direction. Adjacent hot plate bodies 61 are fixed to each other on the back side of these hot plate bodies 61 with bolts or the like from the front side via coupling members 67 provided between adjacent hot plate bodies 61. Connected by members. By dividing and configuring in this way, it is possible to process each heating plate main body 61 in the case of processing an accommodation groove to be described later. Further, when a sheath heater described later is embedded in the receiving groove, a sheath heater may be embedded for each hot plate main body 61. Therefore, for example, it is not necessary to use a large press machine that embeds a sheath heater in the entire hot plate, and the processing cost can be reduced. In addition, transportation and assembly work of the hot plate 1 2 2 is easy. The Further, by further joining the hot plate body 61, a hot plate corresponding to a larger workpiece can be easily configured. The hot plate 1 2 2 is not limited to being constituted by a plurality of hot plate main bodies 61, and may be constituted by one hot plate main body 61.

A receiving groove 63 for embedding the sheath heater 62 is formed on the back surface of each hot plate main body 61. In order to make the temperature distribution on the surface of the hot plate body 61 uniform, the receiving groove 63 is formed on the entire back surface! : It is formed to meander.

A sheath heater 62 is embedded in the receiving groove 63. The sheath heater 62 is a nichrome wire 62a whose center is processed into a coil shape, as shown in FIG. The sheath heater 6 2 has an insulating material 6 2 b filled with powder such as magnesium oxide around the nichrome wire 6 2 a. Further, the sheath heater 62 is covered with aluminum or an aluminum alloy around the insulating material 62 b as a material of the sheath 62 c (tube member forming the outer periphery). Thus, the hot plate body 61 and the sheath of the sheath heater 62 are made of the same material. Therefore, the heat plate 12 2 can improve the efficiency of heat transfer from the sheath heater 62 to the heat plate body 61. The sheath heater 6 2 embedded in the receiving groove 63 of each hot plate body 61 is connected to a temperature controller 64 installed inside or outside the laminating apparatus 100 as shown in FIG. . This temperature controller 64 controls the temperature so that the temperature of the hot plate 1 2 2 becomes the target temperature.

FIG. 7 is a plan view of the hot plate 1 2 2. In FIG. 7, the sheath heater 62 embedded in each hot plate body 61 is indicated by a broken line. The sheath heater 62 is divided into 1 to 12 channels (c h) for independent temperature control. Specifically, four sheath heaters 62 are embedded in each hot plate body 61. Each hot plate main body 61 is controlled in temperature by the sheath heaters 62 at both ends as one channel. In addition, each hot plate main body 61 is controlled in temperature by using two center heaters 62 as one channel. The sheathed heater 6 2 embedded in the receiving groove 6 3 is taken out from the back surface of the hot plate main body 61 at the point of the arrow in FIG. Connected to. Note that the sheath heater placement and temperature control channel (c h) settings are not limited to those shown in FIG.

The bending shape of the sheath heater 62 is different for each channel. As shown in Fig. 7, the 5-channel sheath heater 62 is meandering so as to be substantially symmetrical with respect to the two-dot chain line L1. Further, as shown in FIG. 7, the 8-channel sheath heater 62 meanders so as to be substantially symmetrical with respect to the two-dot chain line L 2. On the other hand, the 1 to 4 channel, 6 channel, 7 channel, and 9 to 12 channel sheath heaters 6 2 shown in FIG. 7 meander so as to be asymmetrical. The 1 to 3 channel / ^ sheath heater 6 2 and the 10 to 12 channel sheath heater 6 2 are substantially symmetrical with respect to the two-dot chain line L 3. The 4-6 channel sheath heater 6 2 and the 7-9 channel sheath heater 62 are substantially symmetrical with respect to the two-dot chain line L 3. This is especially to make the temperature distribution across the hot plate 1 2 2 uniform. It is configured. These shapes can be appropriately set so that the temperature distribution of the hot plate is uniform.

Further, since the form of meandering is different for each channel, the position where the sheath heater 62 is exposed to the outside from the back surface of the hot plate body 61 can be shifted in the width direction of the hot plate 12. Specifically, a description will be given by taking as an example a hot plate body 61 in which channels 10 to 12 are embedded. FIG. 16 is a view of the hot plate body 61 in which the channels 10 to 12 are embedded as seen from the back side. In the hot plate body 61, sheath heaters 6 2 A, 6 2 B, 6 2 C, and 6 2 D are embedded in the same depth direction. Here, the sheathed heater that goes out from the back surface of the hot plate body 61 is indicated by a one-dot chain line. As shown in Fig. 16, each sheath heater 62 is composed of 1 sheath heater 6 2 B and sheath heater 6 2 C, except for the combination of sheath heater 6 2 C. Is shifted in the width direction. In other words, in the combination of at least one of a plurality of combinations in which two sheath heaters 6 2 are arbitrarily selected, the position of the two sheath heaters 6 2 coming out from the receiving grooves 63 is the width of the hot plate body 61. It is shifted in the direction. As a result, the plurality of sheath heaters 62 that are exposed to the outside from the back surface of each hot plate main body 61 can be arranged so as to cross each other on the lower side of the hot plate main body 61 or to overlap each other. . That is, if the position where the sheath heater 6 2 is taken out is the same in the width direction of the hot plate 12 2 2, the sheath heater 6 2 crosses or overlaps with each other because it is wired to the temperature controller 6 4 through the same route. As a result, a vertical space is required below the hot plate body 61. As in this embodiment, the position where the sheath heater 6 2 is exposed to the outside is less likely to cross or overlap each other by shifting in the width direction of the hot plate 1 2 2, so the space below the hot plate 1 2 2 Can be used effectively. In FIG. 16, the positions of the sheath heater 6 2 B and the sheath heater 6 2 C constituting the channel 1 that are exposed to the outside from the rear surface of the hot plate body 6 1 are the same in the width direction. Further, the space below the hot plate 1 2 2 can be used effectively by arranging them differently.

In addition, as shown in FIG. 7, a thermocouple 66 for measuring the temperature of the hot plate 12 2 2 is embedded in the center of each channel. The thermocouple 66 is embedded at an appropriate depth position from the front surface of the hot plate main body 61 and is connected to the temperature controller 64 from the back surface of the hot plate 1 2 2. The temperature of the hot plate 1 2 2 measured by the thermocouple 6 6 is feed-packed to the temperature controller 6 4. The temperature controller 6 4 controls the heat generation of the sheath heater 6 2 so that the temperature of the hot plate 1 2 2 becomes the target temperature.

Next, the relationship between the accommodation groove 63 of the hot plate body 61 and the sheath heater 62 will be described in detail. FIG. 8 is a diagram for explaining the configuration of the hot plate maintained in the first embodiment. FIG. 8A is a cross-sectional view of the AA cross section in FIG. 7 as viewed from the direction of the arrow, and shows a state in which the sheath heater 6 2 is embedded in the housing groove 63. As shown in FIG. 8 (a), the outer peripheral surface of the sheath heater 62 is pressed into contact with the peripheral surface of the housing groove 63 so that there is no gap. FIG. 8 (b) is a diagram showing a state before the sheath heater 62 is embedded in the accommodation groove 63. As shown in FIG. 8 (b), the receiving groove 63 is formed on the bottom surface of the groove 71 processed into a concave shape on the back surface 65 of the hot plate main body 61. Protruding portions 72 are provided on both sides of the opening edge of the receiving groove 63. When the accommodation groove 63 shown in FIG. 8B is formed, cutting is performed from the back surface of the hot plate main body 61. At this time, the concave groove 71 and the protruding portion 72 are also cut in the same manner.

Next, when embedding the sheath heater 62 in the accommodation groove 63, the outer peripheral surface of the sheath heater 62 is moved around the circumference of the accommodation groove 63 with a press using a press die that matches the shape of the recess groove 71. Press against the surface.

FIG. 8 (c) is a view showing a state after the sheath heater 62 is embedded in the accommodation groove 63. When the sheath heater 62 is pressed against the inner peripheral surface of the receiving groove 63 by the press machine, the outer peripheral surface (sheath) of the sheath heater 62 is plastically deformed so as to follow the inner peripheral surface of the receiving groove 63. . As a result, the outer peripheral surface of the sheath heater 62 and the inner peripheral surface of the receiving groove 63 are in close contact with each other so that no gap is formed. In addition, the pressing machine simultaneously presses the sheath heater 62 and plastically deforms the protruding portion 72 provided in the receiving groove 63 in the lateral direction of the receiving groove 63 so as to close the opening of the receiving groove 63. The caulking portion 7 3 is formed. In the caulking portion 73, a raised portion 7 4 (a portion indicated by an ellipse) that bulges downward from the bottom surface of the groove 71 is formed. Thus, by caulking, it is possible to maintain a state in which the outer peripheral surface of the sheath heater 62 is in pressure contact with the peripheral surface of the housing groove 63. The back surface 65 of the hot plate main body 61 in which the housing groove 63 is formed serves as an attachment surface when the hot plate 1 2 2 is attached to the lower champ 1 2 1. By forming the receiving groove 63 on the bottom surface of the concave groove 71, the caulking portion 73 when the projecting portion 72 is caulked remains positioned in the concave groove 71. Accordingly, the caulking portion 73 does not protrude from the back surface 65 of the hot plate main body 61.

Here, when the outer peripheral surface of the sheath heater 62 is pressed into contact with the circumferential surface of the receiving groove 63 using a press die, the sheath heater is used using a press die having substantially the same shape as the bent shape of the sheath heater 62. 6 2 The outer peripheral surface of 2 is pressed into contact with the inner peripheral surface of the receiving groove 63 at a time. Thus, by pressing, it is possible to eliminate a gap between the outer peripheral surface of the sheath heater 62 and the peripheral surface of the housing groove 63. This improves heat transfer from the sheath heater to the hot plate body, and improves the temperature controllability of the hot plate. In addition, when the sheath heater 62 is heated, the temperature distribution on the surface of the hot plate 12 2 can be made uniform. Therefore, it is possible to prevent a phenomenon in which the temperature of the hot plate 12 2 exceeds the target temperature and overshoots.

In order to maintain the uniformity of the caulking state and eliminate the distortion and deformation of the hot plate body 61, it is desirable to caulk the entire surface at once as described above. However, since the hot plate 1 2 2 has become larger, the hot plate main body 6 1 also becomes larger. Therefore, due to the capacity of the press equipment, a method of caulking one hot plate main body 6 1 in several steps is used. It may be used. In addition, when the method of caulking by dividing is used, a process of removing strain, deformation and deformation is necessary. Next, the case where the workpiece 10 is laminated by the hot plate 12 2 of this embodiment will be described. The temperature transition of the hot plate 1 2 2 measured when the lamination process is performed in a state where the work piece 10 is not arranged on the hot plate 1 2 2 according to the present embodiment is shown in FIG. It is the same as the conventional hot plate (special% (2)).

In FIG. 9, the characteristic line (3) indicates the temperature transition of the hot plate 1 2 2 measured when the laminating process is performed with the workpiece 10 placed on the hot plate 1 2 2 according to this embodiment. It is. Similar to the conventional hot plate (characteristic line (1)), by placing the work piece 10 on the hot plate 1 2 2, the heat of the hot plate 1 2 2 is deprived by the work piece 10; The temperature of the hot plate 1 2 2 drops rapidly. In order to catch this temperature drop, temperature control is performed to raise the temperature of the hot plate 1 2 2. As indicated by the characteristic line (3), the temperature of the hot plate 1 2 2 rises rapidly toward the target temperature. Therefore, this improves the heating work efficiency. When the target temperature is reached, there is no large error between the temperature of the hot plate 12 2 and the temperature of the heater 6 2. This is because the outer peripheral surface of the sheath heater 62 is pressed against the circumferential surface of the force receiving groove 6 3 so that there is no gap between the sheath heater 62 and the receiving groove 63. Because. That is, even when the lower champ 1 2 1 is in the vacuum state, the heat of the sheath heater 6 2 is directly transferred to the hot plate body 61, so that the temperature of the sheath heater 6 2 immediately reaches the hot plate 1 2 2. It is reflected in. As described above, the temperature controller 64 can easily and reliably control the temperature of the hot plate 12 2 2 to the target temperature by increasing the temperature of the sheath heater 62 2 or by naturally cooling it.

Furthermore, when the heating time of the workpiece (for example, 5 minutes) ends and the vacuum state of the lower chamber 1 2 1 is released, the sheath heater 6 2 is excessively exceeded the temperature of the hot plate as in the conventional hot plate. The temperature has not increased. In other words, the temperature of the hot plate 1 2 2 does not exceed the target temperature and overshoots. Thus, according to the hot plate 12 of this embodiment, the target temperature can be reliably maintained. Also, in the case of the conventional hot plate (characteristic line (1)), after the lamination process was completed, an excessive temperature rise of the hot plate was caused by overshooting, so the next workpiece 10 was laminated. It was necessary to wait for the temperature of the hot plate to drop. However, according to the hot plate 1 2 2 of this embodiment, since an excessive temperature rise does not occur, the next workpiece 10 can be laminated immediately, and the working efficiency is improved.

According to this embodiment, the temperature of the hot plate 1 2 2 can be easily and reliably controlled to the target temperature during the laminating process. Accordingly, it is possible to prevent the adhesion failure of the constituent members of the solar cell in the laminating process and improve the laminating quality. In addition, the working efficiency of the laminate can be improved.

According to the present embodiment, when the outer peripheral surface of the sheath heater 62 is pressed against the inner peripheral surface of the receiving groove 6 3 by a press machine, a dedicated press die that matches the shape of the concave groove 71 in FIG. Must be used. Therefore, a dedicated press die or the like is required for each hot plate type, and the initial cost is applied. However, when the receiving groove 63 is formed in the hot plate main body 61, the cutting area may be smaller than that in a third embodiment of FIG. Five

That is, according to the present embodiment, the processing cost of the hot plate body can be reduced, and the running cost can be reduced. Thus, this embodiment is suitable for mass production of small models. Second embodiment

FIG. 10 is a diagram showing the configuration of the hot platen according to the second embodiment. In the present embodiment, the housing groove 83 formed on the back surface of the hot plate body 81 is formed in a wedge shape that is tapered toward the front surface of the hot plate body 81. In this case, the wedge-shaped tip has an angle of approximately 60 degrees. On the other hand, the sheath heater 8 2 embedded in the receiving groove 83 is formed in a wedge shape having a substantially triangular cross section. The outer peripheral surface of the sheath heater 82 is brought into pressure contact with the inner peripheral surface of the receiving groove 83 by a press machine. Then, the outer peripheral surface of the sheath heater 82 is plastically deformed so as to be in surface contact with the inner peripheral surface of the housing groove 83 without any gap. At this time, as shown in FIG. 10, the caulking portion 7 3 is formed with a raised portion 74 that is raised from the bottom surface of the groove 1.

Also in the present embodiment, as in the first embodiment, the outer peripheral surface of the sheath heater 82 and the housing groove 8 are formed by caulking the protrusion provided on the opening edge of the housing groove 83 to form the caulking portion 73. Surface contact with the inner peripheral surface of 3 can be maintained. Further, it is possible to prevent the sheath heater 82 from falling out of the receiving groove 83. Thus, in the present embodiment, the shape of the cross section of the sheath heater 82 is substantially triangular, and the cross section of the housing groove 83 is substantially triangular. Therefore, the triangular flat surface of the sheath heater 82 and the triangular flat surface of the receiving groove 83 can be easily brought into surface contact.

Third embodiment

FIG. 11 is a diagram showing a configuration of a hot plate according to the third embodiment. In the embodiment so far, as shown in FIG. 8 and FIG. 10, the groove 71 is formed on the back surface 65 of the hot plate body, and the storage grooves 63, 83 are formed in the groove 71. Explained when to do. In the present embodiment, a flat portion 76 extending from the back surface 65 of the hot plate main body 85 is provided without processing the HQ groove, and the accommodation groove 63 is formed in the flat portion 76.

As shown in FIG. 11, the receiving groove 63 is formed in a flat portion 76 that is formed by projecting from the back surface 65 of the hot plate main body 85 into a protruding convex shape. Protruding portions are provided on both sides of the opening edge of the receiving groove 63, as in the embodiment shown in FIG. 8 (b). The rear surface 6 5 of the hot plate main body 85 shown in FIG. 11 serves as a reference surface 7 5 when the hot plate 1 2 2 is attached to the lower chamber 1 2 1. When the accommodation groove 6 3 is formed, it is cut from the back surface of the hot plate main body 85. At this time, the reference surface 65, the flat portion 76, and the protruding portion are similarly cut.

Next, when the heater 62 is embedded in the receiving groove 63, the outer peripheral surface of the sheath heater 62 is pressed against the inner peripheral surface of the receiving groove 63 using a press machine. Housing groove 6 3 The projecting portion provided on the opening edge of the housing is caulked inwardly of the housing groove 63 so as to close the opening of the housing groove 63 to form the crimping portion 73. As a result, as shown in FIG. 11, the hot plate 84 has a shape having a raised portion 74 on a flat portion 76 extending from the rear surface 65 of the hot plate main body 85.

According to the present embodiment, the entire back surface of the hot plate body 85 is cut to form the reference surface 75, the receiving groove 63, and the protruding portion! : Need to cut. Therefore, the material cost and processing cost of the hot plate body 85 are required. However, in the present embodiment, since the protruding portion is provided on the flat portion 76 of the back surface 65 of the hot plate main body 85, the space to be caulked by the concave groove or the like is not limited. Accordingly, the press die for caulking can be made into a simple shape such as a flat plate, and the die cost of the press die can be greatly reduced. In other words, the present embodiment can reduce the initial cost because there is no need for a dedicated press die cost for each type of hot plate. Thus, this embodiment is an embodiment suitable for multi-model small-volume production.

Fourth embodiment

FIG. 12 is a diagram for explaining a configuration of a hot platen according to the fourth embodiment. FIG. 12 (a) is a cross-sectional view of the AA cross section in FIG. 7 as seen from the direction of the arrow, and shows a state in which the sheath heater 62 is embedded in the receiving groove 63. As shown in FIG. 12 (a), the outer peripheral surface of the sheath heater 62 is pressed against the peripheral surface of the housing groove 63 so that there is no gap. FIG. 12 (b) is a view showing a state before the sheath heater 62 is embedded in the accommodation groove 63. As shown in FIG. 12 (b), the receiving groove 63 is formed in a concave shape directly on the back surface 92 of the hot plate main body 91. Further, on both sides of the opening edge of the housing groove 63, the surface of the opening edge and the back surface of the hot plate main body 91 are formed on the same surface. That is, in the present embodiment, the protruding portion described in the first to third embodiments is not formed. Here, the diameter d of the sheath heater 62 shown in FIG. 12 (b) is smaller than the diameter D of the groove bottom of the receiving groove 63 (see the broken line shown in FIG. 12 (b)). Therefore, the sheath heater 62 can be easily accommodated in the accommodation groove 63. From the state in which the sheath heater 62 is housed in the housing groove 63, the outer peripheral surface of the sheath heater 62 is brought into pressure contact with the inner peripheral surface of the housing groove 63 using a press die using a press die.

FIG. 12 (c) is a view showing a state after the sheath heater 62 is embedded in the accommodation groove 63. When the sheath heater 62 is pressed against the inner peripheral surface of the receiving groove 63 by the press, the outer peripheral surface (sheath) of the sheath heater 62 is plastically deformed so as to follow the inner peripheral surface of the receiving groove 63. As a result, the outer peripheral surface of the sheath heater 62 and the inner peripheral surface of the receiving groove 63 are in close contact with each other so that no gap is formed. In addition, the pressing machine simultaneously presses the sheath heater 62 and plastically deforms the opening edge of the receiving groove 6 3 inwardly of the receiving groove 63 so as to close the opening of the receiving groove 63. Form 3 FIG. 12 (c) shows the shape of the press die 93 that plastically deforms the sheath heater 62 and the opening edge. The press mold 9 3 is provided with inclined portions 9 5 a, 9 which are inclined toward the center from the protrusions 9 4 a, 9 4 on both sides which are spaced apart from each other. 5 b. Therefore, when the press die 9 3 presses the back surface 9 2 of the hot plate main body 9 1, the inclined portions 9 5 a and 9 5 b extend the opening edge of the receiving groove 6 3 toward the inner side of the receiving groove 6 3. Deform to face. In addition, the press die 93 has small protrusions 9 7 a and 9 7 b at locations corresponding to minute recesses formed at the boundary between the sheath heater 62 and the opening edge of the hot plate body 91. is doing.

Here, when the sheath heater 62 and the opening edge are plastically deformed by the press die 93, the concave groove 96 is simultaneously formed as shown in FIG. 12 (c). Therefore, the caulking portion 73 does not protrude from the back surface 92 of the hot plate main body 91.

Note that according to the present embodiment, it is necessary to use a dedicated press die that plastically deforms the opening edge and forms the concave groove 96, and the initial cost is increased. However, when the receiving groove 63 is formed in the hot plate main body 91, it is only necessary to process the receiving groove 63 in the hot plate main body 91. Therefore, according to the present embodiment, there is no need for cutting such as protrusions and grooves, and the running cost can be reduced. Fifth embodiment

FIG. 13 is a view for explaining a process of embedding the sheath heater 62 in the hot plate main body 87 according to the fifth embodiment. In the first to fourth embodiments described above, the sheath heater 62 is pressed against the inner peripheral surface of the receiving groove 63, and the outer peripheral surface of the sheath heater 62 is copied to the inner peripheral surface of the receiving groove 63. The case of plastic deformation was described. In this embodiment, the inner circumferential surface of the housing groove 63 is plastically deformed so as to follow the outer circumferential surface of the sheath heater 62. For example, as shown in FIG. 13, protrusions 77 having inclined portions on the outer surface are provided on both sides of the opening edge of the receiving groove 63 of the hot plate main body 87. Then, a press die 78 for caulking is used which has an inclined portion on the inner surface with a gentler angle than the angle of the inclined portion of the protruding portion 77. The pressing machine presses the hot plate main body 87 in a state where the sheath heater 62 is accommodated in the accommodation groove 63 by the press die 78. Then, the protrusions 7 7 and the inclined portions of the press die 78 are plastically deformed so that the protrusions 7 7 (inner peripheral surface) of the receiving groove 63 are along the outer peripheral surface of the sheath heater 62. Thus, according to this embodiment, the accommodation groove

By plastically deforming 63, the outer peripheral surface of the sheath heater 62 can be brought into surface contact with the inner peripheral surface of the housing groove 63. Sixth embodiment

FIG. 14 is a diagram showing the configuration of the hot platen according to the sixth embodiment. In the first to fifth embodiments described above, the case where the outer peripheral surface of the sheath heater 62 is brought into surface contact with the inner peripheral surface of the housing groove 63 using a press machine has been described. In this embodiment, instead of processing by a press machine, the sheath heater 62 is inserted into the hot plate main body 89 by inserting it with an aluminum casing or the like. Specifically, in a state where the sheath heater 62 is disposed at a predetermined position of the saddle shape, by pouring aluminum melted into the saddle shape, the entire outer periphery of the sheath heater 62 is heated. The material constituting the plate body is inserted. The sheath 6 2 c of the sheath heater 62 is made of a material having a melting point higher than that of the container poured into the bowl. Here, the material of the sheath 6 2 c is preferably, for example, an iron pipe, a stainless steel pipe, a pipe using Incoloy or Inconel.

FIG. 14 is a diagram showing a configuration of the hot plate 88 formed by the above-described swaging process. As shown in FIG. 14, the entire outer periphery of the sheath heater 62 is surrounded so as to be in surface contact with the hot plate main body 89. Accordingly, the heat of the sheath heater 62 is efficiently transmitted to the hot plate main body 89. In the method of pouring the porcelain material into the mold, since the porcelain material contains gas, pores are formed when the porcelain solidifies. Therefore, the contact between the heater 62 and the hot plate main body 89 is inferior to that of the hot plate caulked by the press machine described above. However, compared with the conventional method shown in Fig. 17, heat transfer is sufficient even when the hot plate 8 8 is evacuated during lamination, and the temperature controllability of the hot plate 8 8 is sufficiently secured. .

Seventh embodiment

FIG. 15 is a perspective view showing a configuration of a hot plate and its periphery according to a seventh embodiment. FIG. 15 is a perspective view showing the configuration of the hot plate 98 and its surroundings. The hot plates 1 2 2 described in the first embodiment are provided so that adjacent hot plate bodies 61 are arranged between adjacent hot plate bodies 61 on the back side of these hot plate bodies 61. It was connected by a fixing member such as Porto from the surface side through the connecting member 67.

The hot plate 9 8 of the present embodiment is a coupling member 6 7 provided between adjacent hot plate main bodies 9 9 across the adjacent hot plate main bodies 9 9 on the surface side of these hot plate main bodies 9 9. From the surface side, a fixing member such as Porto is used to couple from the surface side of the hot plate 98. With this configuration, the operator can work from the front side with the coupling member 6 7 placed between the hot plate main bodies 9 9, so the efficiency of the work of assembling the hot plate 9 8 Will improve. Industrial applicability

As described above, the temperature controllability of the hot plate can be significantly improved by using the hot plate of the present invention in a laminating apparatus that is in a vacuum state in the laminating process. That is, when the hot plate of the present invention is used in a laminating apparatus that is in a vacuum state in the laminating process, the heat of the sheath heater can be efficiently transferred to the hot plate body. The hot plate of the present invention is particularly suitable for the use of a laminating apparatus that is in a vacuum state in the laminating process, and can exert a remarkable effect when used in such a laminating apparatus.

In addition, the hot plate of this effort can significantly improve the temperature distribution of the hot plate compared to the method shown in Fig. 17 which is the prior art. The method described in Fig. 17 which is the prior art is that a groove is formed in two plates, an upper plate 1 6 1 and a lower plate 1 6 2, and a sheath heater 1 6 3 is embedded in the groove. It was. It is not easy to embed a sheath heater 1 6 3 having a complicated bent shape. In other words, it is necessary to improve the accuracy of machining the upper and lower grooves, and it is also necessary to improve the accuracy of bending the sheath heater 16 3. Therefore, in the prior art, linear sheath heaters 16 3 were embedded by processing straight grooves on the upper and lower two plates.

On the other hand, in the hot plate of the present invention, since the housing groove of the sheath heater has only to be processed in one hot plate body, the housing groove can easily realize a complicated curved shape as shown in FIG. Therefore, the temperature distribution of the hot plate can be made uniform by appropriately setting the bending shape of the sheath heater.

Claims

The scope of the claims

An upper and lower champs partitioned by a pressing member, a work piece is disposed on a hot plate provided in the lower champ, and the work piece heated by the hot plate is placed on the lower champ. A laminating apparatus for laminating by vacuuming the front IE chamber with air and sandwiching between the hot plate and the pressing member,

The hot plate is a hot plate body provided with a receiving groove on the back surface,

A sheath heater embedded in the housing groove,

At least one of the accommodation groove and the sheath heater is deformed so that the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the accommodation groove.

2. The laminate according to claim 1, wherein in a state in which the sheath heater is embedded in the housing groove, a protrusion provided at an opening edge of the housing groove is caulked in an inner direction of the housing groove. apparatus.

The laminating apparatus according to claim 1 or 2, wherein the housing groove is provided on a bottom surface of a concave groove provided on a back surface of the hot plate main body.

3. The laminate according to claim 2, wherein a portion of the protruding portion provided at the opening edge of the receiving groove is caulked in an inner direction of the receiving groove, and is projected from a back surface of the hot plate main body. apparatus.

2. The laminating device according to claim 1, wherein an opening edge of the housing groove is caulked in a heel side direction of the housing groove in a state where the sheath heater is embedded in the housing groove.

6. The laminating apparatus according to claim 5, wherein the housing groove is provided directly on the back surface of the hot plate main body in a state before the opening edge of the housing groove itself is caulked.

The laminating apparatus according to any one of claims 1 to 6, wherein a material of the hot plate main body and a material of an outer peripheral member of the sheath heater are the same.

The laminating apparatus according to claim 1, wherein a plurality of sheath heaters are embedded in the hot plate body.

A plurality of receiving grooves meandering along the surface direction are provided on the back surface of the hot plate body.

9. The laminating apparatus according to claim 1, further comprising a plurality of sheath heaters embedded in each of the plurality of receiving grooves.

Among the plurality of sheath heaters, the plurality of sheath heaters embedded in the same depth direction of the hot plate main body is such that the position S coming out from the housing groove is shifted in the width direction of the hot plate main body. The laminating apparatus according to claim 9, wherein the laminating apparatus is characterized in that:

The laminating apparatus according to any one of claims 1 to 10, wherein the hot plate is configured by combining a plurality of hot plate bodies.

Among the plurality of hot plate bodies, adjacent hot plate bodies are coupled to each other by a fixing member from the surface side through a coupling member provided across the hot plate body from the surface side. The laminating apparatus according to claim 11.

An upper chamber partitioned by a pressing member and a lower champ; a workpiece is placed on a hot plate provided in the lower champ; and the workpiece heated by the hot plate is A laminating apparatus for laminating by vacuuming a chamber and introducing air into the upper chamber and sandwiching between the hot plate and the pressing member,

The hot plate is a hot plate body,

A sheath heater embedded in the hot plate body,

A laminating apparatus characterized in that the entire outer periphery of the sheath heater is in contact with the hot plate body.

An upper chamber and a lower champ separated by a pressing member; a work piece is disposed on a hot plate provided in the lower champ; and the work piece heated by the hot plate is A heating plate for a laminating apparatus that vacuums the yampa, introduces air into the upper champ, and sandwiches and laminates between the pressing members,

A hot plate body provided with a receiving groove on the back surface;

A sheath heater embedded in the housing groove,

At least one of the accommodation groove and the sheath heater is deformed so that the outer peripheral surface of the sheath heater is in surface contact with the peripheral surface of the accommodation groove.

An upper chamber and a lower champ separated by a pressing member; a work piece is disposed on a hot plate provided in the lower champ; and the work piece heated by the hot plate is A heating plate for a laminating apparatus that evacuates the amp and introduces air into the upper chamber and sandwiches it between the pressing members for lamination.

The hot plate is

On the hot plate body,

A heat plate for a laminating apparatus, wherein the entire outer periphery of a sheath heater is embedded so as to be in contact with the main body of the heat plate.

An upper chamber divided by a pressing member and a lower chamber; a workpiece placed on a hot plate provided in the lower champ; and the workpiece heated by the hot plate, A method for producing a hot plate for a laminating apparatus in which a vacuum is applied to a chamber and air is introduced into the upper chamber and is sandwiched between a pressing member and laminated.

Having a burying step of burying a sheath heater in a receiving groove provided on the back surface of the hot plate body, In the embedding step, at least one of the housing groove and the sheath heater is deformed by a pressing machine so that the outer circumferential surface of the sheath heater is in surface contact with the inner circumferential surface of the housing groove, and the housing groove The manufacturing method characterized by caulking the protruding portion provided at the opening edge of the housing or the opening edge itself toward the inside of the housing groove.

An upper champ and a lower champ separated by a pressing member are arranged, a work piece is disposed on a hot plate provided in the lower champ, and the work piece heated by the hot plate is placed on the lower champ. A method for producing a hot plate for a laminating apparatus for laminating by vacuuming and introducing air into the upper chamber and sandwiching and pressing between the pressing members,

A manufacturing method comprising embedding the sheath heater in the hot plate main body so as to contact the entire outer periphery of the sheath heater with the hot plate main body.