WO2010140705A1

WO2010140705A1 - Laminating device

Info

Publication number: WO2010140705A1
Application number: PCT/JP2010/059726
Authority: WO
Inventors: 真規中村
Original assignee: 日清紡メカトロニクス株式会社
Priority date: 2009-06-05
Filing date: 2010-06-02
Publication date: 2010-12-09
Also published as: JP2010280172A; TW201111170A

Abstract

The temperature within a workpiece in a laminating process can be made uniform. A laminating device has upper and lower chambers partitioned by a pressing member. In the laminating device, a workpiece (10) is placed on a heating plate (122) provided in the lower chamber. The lower chamber is brought into a vacuum state and atmosphere is introduced into the upper chamber, and then the workpiece (10) heated by the heating plate (122) is pressured between the heating plate (122) and the pressing member, thereby obtaining a laminate. The heating plate (122) includes periphery heating regions (S2 to S5) for heating the periphery portion of the workpiece (10) and an inside heating region (S1) inside the periphery portion of the workpiece (10), which are separately temperature-controlled, so that the periphery portion and inside portion of the workpiece (10) are heated substantially to the same temperature.

Description

Laminating equipment

The present invention relates to a laminating apparatus in which a workpiece such as a solar cell module is disposed on a hot plate, and the workpiece heated by the hot plate is sandwiched between a hot plate and a pressing member for lamination.

Conventionally, when manufacturing a solar cell module, a laminating apparatus has been used (see Patent Documents 1 and 2). The laminating apparatus has an upper case having a diaphragm that is expandable downward, and a lower case having a hot plate. When laminating a solar cell module, first, the solar cell module on which the constituent members are superimposed is transported to a space formed by the upper case and the lower case. Next, the laminating apparatus evacuates the space formed by the upper case and the lower case, arranges the solar cell module on the hot plate, and then heats the constituent members, and then converts the atmospheric pressure inside the upper case. Is introduced. By doing in this way, a solar cell module is pinched by a diaphragm and a hot plate, is laminated, and each constituent member of the solar cell module is bonded by a molten filler.
JP 2008-47766 A JP 2004-31739 A

Here, the conventional laminating apparatus is set so that the upper surface of the hot plate is divided into a plurality of heating regions, and a uniform temperature is obtained in any heating region. However, the space formed by the upper case and the lower case is already heated by the hot plate. Therefore, when the solar cell module is transported to the space, the peripheral portion of the solar cell module is separated from the hot plate due to the temperature difference between the upper and lower surfaces of the cover glass, which is a constituent member of the solar cell module. It will warp in a manner. In the solar cell module warped in this way, only the inner part (center part) of the solar cell module is grounded on the hot plate, and then the peripheral part is grounded behind the inner part due to the pressing of the diaphragm. And since a heat plate takes heat to the solar cell module from the location which the solar cell module grounded, temperature will change suddenly according to the location and its timing which a solar cell module grounds. In such a case, it becomes a problem whether the temperature of the hot plate is made uniform based on which temperature of the heating region, and it takes a considerable time to make the temperature of all the heating regions uniform. In addition, in all the heating regions of the hot plate, the temperature is different between the inner part and the peripheral part in the solar cell module until the temperature is uniform, and the peripheral part is hot and the peripheral part is filled. The material melts first, and the phenomenon that the temperature of the inner part is low and the filler does not melt occurs. That is, the temperature differs between the peripheral portion and the inner portion of the solar cell module, and a time lag occurs in the time when the filler starts to melt.
Here, with reference to FIG. 12, the temperature change in the solar cell module 91 when the solar cell module 91 is heated with the hot plate 90 of the conventional laminating apparatus will be described.
FIG. 12A is a plan view of a state in which a solar cell module 91 is placed at the center of a hot plate 90 of a conventional laminating apparatus. The hot plate 90 shown in FIG. 12A has three heating regions 93 that are all heated to the same temperature. Moreover, FIG.12 (b) is a figure which shows the graph which measured the temperature of the

measurement points

91a, 91b, 91c of the surface of the solar cell module 91 shown to Fig.12 (a). Here, the solar cell module 91 has a width w of about 1100 mm and a depth d of about 1400 mm. Moreover, the measurement point 91a is a point located 10 mm inside from the corner 92 of the solar cell module 91 in the width and depth directions. The measurement point 91b is a point located 10 mm inward in the width direction from the center of one long side of the solar cell module 91. The measurement point 91 c is a point located at the center of the solar cell module 91. In FIG. 12B, the temperature change at the measurement point 91a corresponds to the characteristic line indicated by the solid line, the temperature change at the measurement point 91b corresponds to the characteristic line indicated by the broken line, and the temperature change at the measurement point 91c is indicated by the alternate long and short dash line. Corresponds to the characteristic line.
When the heating plate 90 is heated so as to have a uniform temperature, it takes time to reach a uniform temperature in all the heating regions as described above, and the temperature of the heating plate is equal to the solar temperature until the heating plate 90 reaches a uniform temperature. It differs in the area | region which heats the peripheral part and inner side part of a battery module. Therefore, as shown in FIG. 12 (b), in the vacuum process in the laminating process, the temperature of the inner part (measurement point 91c) of the solar cell module 91 is high, or in the latter half of the pressurizing process, the peripheral edge of the solar cell module. The temperature difference Δt between the inner side portion and the peripheral portion of the solar cell module 91 becomes approximately 10 ° C. at the time when the temperature of the portion (

measurement points

91a, 91b) is increased and the pressurizing step is completed. . Thus, the temperature differs between the central portion and the peripheral portion of the solar cell module 91, and a time lag occurs in the time when the filler starts to melt. If the filler at the peripheral edge of the solar cell module 91 is first melted, the air inside the solar cell module 91 cannot be degassed, and bubbles remain in the solar cell module 91. . If the solar cell module 91 in which bubbles remain is installed outdoors, the bubbles expand and adversely affect the solar cell module 91.
The laminating apparatus described in Patent Document 1 described above divides the upper surface of the heater panel as a hot plate into a plurality of heating regions, and the temperature of the heating region where the solar cell module M is placed is always in any heating region. It is controlled to be the same. Therefore, similarly to the hot plate 90 shown in FIG. 12A, the temperature difference between the inner portion and the peripheral portion of the solar cell module cannot be eliminated.
In addition, the laminating apparatus described in Patent Document 2 described above adsorbs a translucent substrate disposed on the upper surface of the heater panel by a plurality of vacuum suction holes on a peripheral portion where warpage of the translucent substrate of the heater panel occurs. By doing so, the warp of the translucent substrate is prevented. Thus, the temperature rise in the solar cell module is made uniform by preventing the translucent substrate from warping. However, it is necessary to make a plurality of vacuum suction holes in the heater panel, which not only complicates the structure, but also limits the degree of freedom of heater arrangement in the heater panel.
Moreover, as a filler of a solar cell module, EVA (ethylene vinyl acetate) resin, PVB (polyvinyl butyral) resin, or other fillers are properly used according to material costs, processing characteristics, required strength, and the like. . In this case, characteristics such as the melting temperature differ depending on the filler used. Therefore, since the melting temperature varies depending on the type of filler used, in addition to the difference in temperature between the peripheral portion and the inner portion of the solar cell module as described above, the filler starts to melt. It becomes difficult to control the time to perform uniformly.
The present invention has been made in view of the above-described problems, and an object of the present invention is to make it possible to uniformize the temperature in the workpiece during lamination.

In order to achieve the above object, a laminating apparatus of the present invention has an upper chamber and a lower chamber partitioned by a pressing member, and disposes a workpiece on a hot plate provided in the lower chamber, and A laminating apparatus for laminating the workpiece heated by a plate by vacuuming the lower chamber and introducing air into the upper chamber and sandwiching and pressing between the hot plate and the pressing member. The peripheral heating area for heating the peripheral edge of the workpiece and the inner heating area inside the peripheral edge of the workpiece are separately temperature controlled, and the peripheral edge and the inner edge of the workpiece are substantially the same. Heating to temperature.
In the hot plate, the temperature of the peripheral heating region and the inner heating region are separately controlled, and a time for starting the melting of the filler in the workpiece between the peripheral portion and the inner portion of the workpiece is set. It is characterized by being substantially identical.
The hot plate can be configured separately from a peripheral hot plate main body corresponding to the peripheral heating region and an inner hot plate main body corresponding to the inner heating region.
The hot plate may be configured by connecting a peripheral hot plate main body corresponding to the peripheral heating region and an inner hot plate main body corresponding to the inner heating region via a mounting plate on which a workpiece is placed. it can.
The peripheral hot plate body corresponding to the peripheral heating region can be configured separately for each side of the workpiece disposed in the peripheral heating region.

According to the present invention, the temperature in the workpiece during lamination can be made uniform.
Further, for example, in the hot plate, the peripheral heating region for heating the peripheral portion of the workpiece and the inner heating region inside the peripheral portion of the workpiece are separately temperature controlled, The peripheral part and the inner part are heated to substantially the same temperature. In this case, since the filler constituting the workpiece can be melted almost simultaneously in the workpiece, bubbles can be prevented from remaining in the workpiece.
Further, for example, in the hot plate, the peripheral heating area and the inner heating area are separately temperature controlled, and the filler in the workpiece starts to melt at the peripheral edge and the inner edge of the workpiece. The time to do is made substantially the same. In this case, it is possible to prevent bubbles from remaining in the workpiece.
For example, the said hot plate is comprised separately by the peripheral hot plate main body corresponding to the said peripheral heating area | region, and the inner side hot plate main body corresponding to the said inner side heating area | region. In this case, temperature control between the peripheral heating region and the inner heating region is facilitated, and processing for attaching a heat transfer body such as a sheath heater to the peripheral heating region and the inner heating region can be easily performed.
Further, for example, the hot plate is configured such that a peripheral hot plate main body corresponding to the peripheral heating region and an inner hot plate main body corresponding to the inner heating region are connected via a mounting plate for mounting a workpiece. Has been. In this case, the peripheral hot plate main body corresponding to the peripheral heating region and the inner hot plate main body corresponding to the inner heating region can be easily connected.
Further, for example, the peripheral hot plate main body corresponding to the peripheral heating region is configured separately for each side of the workpiece disposed in the peripheral heating region. In this case, the process etc. which attach a heat transfer body, such as a sheath heater, to a peripheral heat-plate main body can be performed easily.

FIG. 1 is a cross-sectional view showing a configuration of a solar cell module as a workpiece.
FIG. 2 is a diagram showing the overall configuration of the laminating apparatus.
FIG. 3 is a side sectional view of the laminating portion of the laminating apparatus.
FIG. 4 is a cross-sectional side view of the laminating unit during laminating by the laminating apparatus.
FIG. 5 is a view for explaining the temperature control region of the hot plate and the configuration of the temperature control device.
FIG. 6 is a diagram showing a detailed configuration of the hot plate.
FIG. 7 is a diagram for explaining a method of embedding a heat transfer body in the hot plate body.
FIG. 8 is a diagram for explaining a change in the surface temperature of the workpiece heated by the hot platen according to the present embodiment.
FIG. 9 is a view showing a hot plate in which a hot plate main body for heating the peripheral heating region is integrally formed.
FIG. 10 is a view showing a hot plate configured by connecting hot plate bodies.
FIG. 11 is a diagram showing a hot plate configured by one hot plate main body.
FIG. 12 is a diagram for explaining a change in the surface temperature of a workpiece heated by a conventional hot platen.

10 Workpiece (solar cell module)
DESCRIPTION OF SYMBOLS 11

Cover glass

13, 14 Filler 20 Mounting plate 30 Hot plate main body 31-35 1st hot plate main body-5th hot plate main body 41-45, 50 Sheath heater 70 Temperature control apparatus 100 Laminating apparatus 101 Laminating part 110 Top Case 112 Diaphragm 113 Upper chamber 120 Lower case 121 Lower chamber 122 Hot plate 150 Hot plate 151 Hot plate main body 152 Second hot plate main body 153 Sheath heater 160 Hot plate 161 Mounting plate 170 Hot plate 171 Hot plate main body S1 Inner heating area S2 ~ S5 Edge heating area

Hereinafter, the laminating apparatus according to this embodiment will be described with reference to the drawings.
Here, first, the workpiece 10 to be laminated by the laminating apparatus will be described.
FIG. 1 is a cross-sectional view showing a configuration of a solar cell module using a crystal cell as a workpiece 10. As shown in the drawing, the solar cell module 10 has a configuration in which a string 15 is sandwiched between a transparent cover glass 11 and a back material 12 via

fillers

13 and 14. A material such as polyethylene resin is used for the back material 12. Further, EVA (ethylene vinyl acetate) resin, PVB (polyvinyl butyral) resin, or the like is used for the

fillers

13 and 14. The string 15 has a configuration in which solar cells 18 as crystal cells are connected between

electrodes

16 and 17 via lead wires 19.
Moreover, as the workpiece 10, not only the solar cell module described above but also a solar cell module generally called a thin film type can be targeted. In a typical structure example of this thin film solar cell module, a power generation element composed of a transparent electrode, a semiconductor, and a back electrode is deposited on a transparent cover glass in advance. In such a thin film solar cell module, the cover glass is disposed downward, and the power generation element on the cover glass is covered with a filler. Further, the back material is covered on the filler. The components of the thin film solar cell module are bonded by vacuum heating lamination in such a state. That is, the thin film solar cell module is merely changed to a power generation element in which the above-described solar cell module crystal cells are deposited. The basic sealing structure of the thin film solar cell module is the same as that of the solar cell module described above.
FIG. 2 is a diagram illustrating an overall configuration of the laminating apparatus 100 according to the present embodiment. The laminating apparatus 100 includes an upper case 110, a lower case 120, and a conveyance belt 130 for conveying the workpiece 10. The conveyor belt 130 conveys the workpiece 10 between the upper case 110 and the lower case 120. The laminating apparatus 100 is provided with a carry-in conveyor 200 for conveying the workpiece 10 before laminating to the laminating apparatus 100. Further, the laminating apparatus 100 is provided with a carry-out conveyor 300 for carrying out the workpiece 10 after lamination from the laminating apparatus 100. The carry-in conveyor 200 and the carry-out conveyor 300 are connected in series. The workpiece 10 is transferred from the carry-in conveyor 200 to the conveyance belt 130 and from the conveyance belt 130 to the carry-out conveyor 300.
The laminating apparatus 100 is provided with a lifting device (not shown) composed of a cylinder, a piston rod, and the like. The lifting device can lift and lower the upper case 110 with respect to the lower case 120 while maintaining the horizontal state. The elevating device lowers the upper case 110 so that the internal space between the upper case 110 and the lower case 120 can be sealed.
Next, the configuration of the laminating unit 101 of the laminating apparatus 100 according to the present embodiment will be described more specifically. FIG. 3 is a side sectional view of a laminating unit 101 that laminates the workpiece 10 in the laminating apparatus 100. FIG. 4 is a cross-sectional side view of the laminating unit 101 during laminating.
The upper case 110 is formed with a space opened downward. In this space, a diaphragm 112 is provided so as to partition the space horizontally. The diaphragm 112 is formed of heat-resistant rubber such as silicone rubber. As will be described later, the diaphragm 112 functions as a pressing member that presses the workpiece 10 and performs lamination. A space (upper chamber 113) partitioned by a diaphragm 112 is formed in the upper case 110.
An intake / exhaust port 114 communicating with the upper chamber 113 is provided on the upper surface of the upper case 110. In the upper chamber 113, the inside of the upper chamber 113 can be evacuated and the atmosphere can be introduced into the upper chamber 113 via the intake / exhaust port 114.
In the lower case 120, a space (lower chamber 121) opened upward is formed. In this space, a hot plate 122 (panel-shaped heater) is provided. The hot plate 122 is supported by a support member erected on the bottom surface of the lower case 120 so as to maintain a horizontal state. In this case, the hot plate 122 is supported so that the surface thereof is substantially level with the opening surface of the lower chamber 121.
An intake / exhaust port 123 communicating with the lower chamber 121 is provided on the lower surface of the lower case 120. In the lower chamber 121, the inside of the lower chamber 121 can be evacuated and the atmosphere can be introduced into the lower chamber 121 through the intake / exhaust port 123.
A conveyor belt 130 is movably provided between the upper case 110 and the lower case 120 and above the heat plate 122. The conveyor belt 130 receives the workpiece 10 before lamination from the carry-in conveyor 200 of FIG. 2 and accurately conveys it to the central position of the laminating unit 101, that is, the central part of the hot plate 122. Moreover, the conveyance belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300 in FIG.
A release sheet 140 is provided between the upper case 110 and the lower case 120 and above the conveyor belt 130. The release sheet 140 prevents the

fillers

13 and 14 from adhering to the diaphragm 112 when the fillers 13 and 14 (see FIG. 1) of the workpiece 10 are melted.
Next, the laminating process by the laminating apparatus 100 according to the present embodiment will be described more specifically. First, as shown in FIG. 3, the conveyance belt 130 conveys the workpiece 10 to the center position of the laminate unit 101. At this time, the workpiece 10 is held at a position spaced apart from the hot plate 122 by raising a holding pin (not shown) which is arranged in the lower chamber 121 and the hot plate 122 and can move up and down. May be.
Next, the lifting device lowers the upper case 110. By lowering the upper case 110, the internal space between the upper case 110 and the lower case 120 is sealed as shown in FIG. That is, the upper chamber 113 and the lower chamber 121 can be kept sealed inside the upper case 110 and the lower case 120, respectively.
Next, the laminating apparatus 100 evacuates the upper chamber 113 through the intake / exhaust port 114 of the upper case 110. Similarly, the laminating apparatus 100 evacuates the lower chamber 121 through the intake / exhaust port 123 of the lower case 120 (vacuum process). Due to the evacuation of the lower chamber 121, the bubbles contained in the workpiece 10 are sent out of the workpiece 10. When the workpiece 10 is held at a position separated from the hot plate 122 by a holding pin (not shown) that can move up and down, the holding pin is lowered from substantially the second half of the vacuum process to move the workpiece 10. Is placed on the hot plate 122.
Since the workpiece 10 is heated by the hot plate 122 heated by the temperature control of a temperature control device described later, the

fillers

13 and 14 included in the workpiece 10 are also heated.
Next, the laminating apparatus 100 introduces air into the upper chamber 113 through the intake / exhaust port 114 of the upper case 110 while maintaining the vacuum state of the lower chamber 121. As a result, a pressure difference is generated between the upper chamber 113 and the lower chamber 121, so that the diaphragm 112 expands. Accordingly, the diaphragm 112 is pushed downward as shown in FIG. 4 (pressurizing step). The workpiece 10 is sandwiched between the diaphragm 112 extruded downward and the hot plate 122, and the constituent members are bonded to each other by the

fillers

13 and 14 melted by heating. The laminating apparatus 100 according to this embodiment is a so-called all-crosslinking type laminating apparatus in which the

fillers

13 and 14 are completely melted and the respective constituent members are bonded.
At this time, although the

fillers

13 and 14 may protrude from between the cover glass 11 and the back surface material 12, the protruding

fillers

13 and 14 stick to the release sheet 140. By interposing the release sheet 140 in this way, the protruding

fillers

13 and 14 are prevented from adhering to the diaphragm 112. Therefore, the release sheet 140 prevents the

fillers

13 and 14 from adhering to the workpiece 10 to be laminated next from the diaphragm 112. Further, when the protruding

fillers

13 and 14 adhere to the conveyor belt 130, the attached

fillers

13 and 14 are removed by a cleaning mechanism (not shown).
After the laminating process is thus completed, the laminating apparatus 100 introduces air into the lower chamber 121 through the intake / exhaust port 123 of the lower case 120. At this time, the lifting device raises the upper case 110. By raising the upper case 110, the conveyor belt 130 can be moved as shown in FIG. The conveyor belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300.
Next, the configuration of the hot plate 122 of the laminating apparatus 100 according to this embodiment will be described. FIG. 5 is a diagram illustrating the heat plate 122 and the temperature control device 70 that controls the temperature of the heat plate 122. FIG. 5 is a plan view of the hot plate 122, and a placement surface 21 on which the solar cell module 10 as a workpiece is placed appears.
The heat plate 122 has a size that fits in the lower case 120 as a whole, and is larger than the solar cell module 10 indicated by a two-dot chain line in FIG. Here, the dimensions of the hot plate 122 of the present embodiment are a width Wh of about 1200 mm and a depth Dh of about 1500 mm. The solar cell module 10 heated by the hot plate 122 has a width w of about 1100 mm and a depth d of about 1400 mm, and is rectangular in plan view.
The hot plate 122 includes an inner heating region S1 that heats the inner portion (center portion) of the solar cell module 10 when the solar cell module 10 is placed at the center of the hot plate 122, and a peripheral portion of the solar cell module 10. Peripheral heating regions S2 to S5.
Inner heating area | region S1 is an area | region which consists of only one, Comprising: It is smaller than the area of the whole solar cell module 10, and is 70% or more of the area of the whole solar cell module 10. FIG. Here, the dimensions of the inner heating region S1 of the present embodiment are a width Wa of about 940 mm and a depth Da of about 1250 mm, and are substantially rectangular in plan view. The shape of the inner heating region S1 is substantially similar to the solar cell module 10. Further, the area of the inner heating region S1 of the present embodiment is 76% of the area of the entire solar cell module 10.
As described above, the inner heating region S1 of the hot plate 122 heats the inner portion, that is, the central portion of the solar cell module 10.
In addition, it is preferable that the dimension of inner side heating area | region S1 is an area | region substantially the same as the range where the solar cell module 10 is earth | grounded to the heat plate 122, when the solar cell module 10 curves by the influence of heat. Therefore, the dimension of the inner heating region S1 is changed depending on the size of the solar cell module 10.
On the other hand, the peripheral heating regions S2 to S5 are located outside the inner heating region S1 and heat the entire periphery of the peripheral portion of the solar cell module 10. In addition, the peripheral heating regions S2 to S5 are only one region as a whole, but are divided into a plurality in this embodiment. The first peripheral heating region S 2 heats one side of the long side in the peripheral portion of the solar cell module 10. In addition, the second peripheral heating region S 3 heats the other side of the long side of the peripheral portion of the solar cell module 10. As shown in FIG. 5, the first peripheral heating region S2 and the second peripheral heating region S3 have an elongated, substantially rectangular shape that is long in the depth direction in plan view. Further, the third peripheral heating region S 4 heats one side of the short side of the peripheral part of the solar cell module 10. In addition, the fourth peripheral heating region S 5 heats the other side of the short side of the peripheral portion of the solar cell module 10. As shown in FIG. 5, the third peripheral heating region S4 and the fourth peripheral heating region S5 have an elongated, substantially rectangular shape that is long in the width direction in plan view. As described above, the peripheral heating regions S1 to S5 are generally continuous from one side of the long side of the peripheral part of the solar cell module 10 to one side of the short side, the other side of the long side, and the other side of the long side. It is an area.
The dimensions of the peripheral heating regions S2 to S5 are preferably substantially the same region as the range in which the solar cell module 10 is not grounded to the heat plate 122 when the solar cell module 10 is warped due to heat. . Accordingly, the dimensions of the peripheral heating regions S2 to S5 are changed depending on the size of the solar cell module 10.
Temperature sensors such as thermocouples are respectively embedded in the inner heating area S1 and the peripheral heating areas S2 to S5. Then, the temperature control device 70, based on the temperature data detected by the temperature sensor, sets the inner heating region S1 and the peripheral edge so that the inner heating region S1 and the peripheral heating regions S2 to S5 have the same set temperature. The temperature of the heating regions S2 to S5 can be controlled separately. As described above, the peripheral heating area of the hot plate 122 according to the present embodiment is divided into the first peripheral heating area S2 to the fourth peripheral heating area S5. The temperature can be separately controlled between the peripheral heating region S2 and the fourth peripheral heating region S5.
Next, the configuration of the hot plate 122 will be described in more detail with reference to FIG. FIG. 6A is a plan view of the hot plate 122. FIG. 6B is a front view of the hot plate 122. FIG. 6C is a bottom view of the hot plate 122.
The heating plate 122 includes a mounting plate 20 having a mounting surface 21 on which the solar cell module 10 shown by the two-dot chain line in FIGS. 6A and 6B is mounted, and a mounting surface 21 of the mounting plate 20. A hot plate main body 30 (first hot plate main body 31 to fifth hot plate main body 35) attached to the mounting surface 22 opposite to the above is connected.
As shown in the front view of FIG. 6B, the mounting plate 20 is disposed on the upper side of the hot plate main body 30. Moreover, the mounting plate 20 is formed in the panel shape which can mount the to-be-processed object 10 with aluminum or aluminum alloy.
On the other hand, the hot plate main body 30 is attached to the mounting surface 22 of the mounting plate 20 via a fixing screw or the like. Similarly, the hot plate main body 30 is made of aluminum or an aluminum alloy. As shown in FIG. 6C, the hot plate main body 30 of the present embodiment includes a first hot plate main body 31 to a fifth hot plate main body 35. Since the first hot plate body 31 to the fifth hot plate body 35 are formed with the same thickness Tp, the entire hot plate 122 is also formed with a constant thickness Th (see FIG. 6B). ).
Here, the first hot plate body 31 is attached to the center of the mounting plate 20 when the hot plate 122 is viewed from the back side. In other words, the first hot plate body 31 has a role of heating the above-described inner heating region S1 and has the same size as the inner heating region S1.
A plurality of housing grooves are processed on the back surface of the first hot plate body 31, and a sheath heater 41 as a heat transfer body for heating the first hot plate body 31 is formed in the housing groove. Buried. In the first hot plate body 31 of the present embodiment, three sheath heaters 41 formed by bending in a U shape when viewed from the back surface are embedded in parallel. In addition, although not shown in figure, each sheath heater 41 is connected to the temperature control apparatus 70 mentioned above from each accommodation groove | channel. Therefore, the temperature control device 70 can control the entire inner heating region S1 to a uniform temperature via the first hot plate main body 31 by heating the sheath heater 41.
On the other hand, the second hot plate main body 32 to the fifth hot plate main body 35 surround the periphery of the first hot plate main body 31 when the hot plate 122 is viewed from the back side. It is attached. That is, the second hot plate main body 32 to the fifth hot plate main body 35 have a role of heating the peripheral heating regions S2 to S5, respectively, and have the same size as the peripheral heating regions S2 to S5, respectively. is there.
On the back surfaces of the second hot plate main body 32 to the fifth hot plate main body 35, the receiving grooves are respectively processed into a substantially linear shape or a substantially elongated ring shape, and the second hot plate main body 32 is respectively provided in the receiving grooves. ~ Sheath heaters 42 to 45 as heat transfer bodies for heating the fifth hot plate main body 35 are embedded. In the second hot plate main body 32 and the third hot plate main body 33 of the present embodiment,

sheath heaters

42 and 43 formed in a substantially linear shape are respectively embedded. In addition,

sheath heaters

44 and 45 formed by bending into a substantially elongated ring shape when viewed from the back surface are embedded in the fourth hot plate main body 34 and the fifth hot plate main body 35 of the present embodiment, respectively. Although not shown, the sheath heaters 42 to 45 are connected to the above-described temperature control device 70 from each housing groove. Therefore, the temperature control device 70 heats the sheath heaters 42 to 45 so that the entire peripheral heating regions S2 to S5 are brought to a uniform temperature via the second hot plate main body 32 to the fifth hot plate main body 35. Can be controlled. In some cases, the temperature controller 70 controls the temperatures of the second hot plate main body 32 to the fifth hot plate main body 35, respectively, and separately controls the temperatures of the peripheral heating region S2 to the peripheral heating region S5. May be. Note that there is a slight gap between the first hot plate main body 32 and the fifth hot plate main body 35 so that the temperatures of the adjacent hot plate main bodies do not interfere with each other.
Next, a method of embedding a heat transfer body in the hot plate body will be described with reference to FIGS. 7 (a) and 7 (b). FIGS. 7A and 7B are views showing a partial cross section of the hot plate 122. Here, the heat transfer body is the sheath heater 50. The sheath heater 50 includes a nichrome wire 51 processed in a coil shape at the center, an insulating material 52 such as magnesium oxide filled around the nichrome wire 51, and a sheath 53 (an outer skin forming the outer periphery) covering the entire circumference of the insulating material 52. ).
FIG. 7A is a cross-sectional view showing a heat plate 122 in which the sheath heater 50 is embedded by crimping the sheath heater 50 in the accommodation groove 61 of the heat plate main body 30. In the embedding method shown in FIG. 7A, first, the sheath heater 50 is housed in the housing groove 61 that has been processed in advance with substantially the same dimensions as the sheath heater 50. Thereafter, in a state where the sheath heater 50 is housed in the housing groove 61, the opening edge of the housing groove 61 and the sheath heater 50 are crimped from the back surface of the hot plate main body 30. By doing in this way, the sheath heater 50 can be embed | buried in the accommodation groove | channel 61, as shown to Fig.7 (a). Thereafter, the hot plate main body 30 is attached to the mounting surface 22 of the mounting plate 20 using the fixing screw 65. As described above, the sheath heaters 41 to 45 are similarly embedded in the first hot plate main body 31 to the fifth hot plate main body 35 and attached to the mounting surface 22 of the mounting plate 20. By connecting the first hot plate main body 31 and the second hot plate main body 32 to the fifth hot plate main body 35 via the mounting plate 20, the hot plate 122 can be easily manufactured. The unevenness of the mounting surface assumed when the hot plate main body 122 is simply connected to form the hot plate 122 can be eliminated. Further, as in the present embodiment, the first hot plate main body 31 and the second hot plate main body 32 to the fifth hot plate main body 35 are configured separately, so that the receiving groove 61 of each hot plate main body is provided. It is possible to easily embed a heat transfer body.
FIG. 7B is a cross-sectional view showing a hot plate 122 in which the sheath heater 50 is embedded by sandwiching the sheath heater 50 between the upper and lower

hot plate bodies

30a and 30b. In the embedding method shown in FIG. 7B, the sheath heaters 50 are accommodated in the

accommodation grooves

61a and 61b that are previously processed in the upper and lower hot plate bodies 30 (30a and 30b) in the same dimensions as the substantially semicircular shape of the sheath heater 50, respectively. Thereafter, the sheath heater 50 is screwed with bolts 66 or the like with the

hot plate bodies

30a and 30b and sandwiched from above and below, so that the sheath heater 50 can be embedded in the receiving

grooves

61a and 61b as shown in FIG. . Thereafter, the hot plate main body 30 (30a, 30b) is attached to the mounting surface 22 of the mounting plate 20 using the fixing screw 65. In this manner, for the first hot plate main body 31 to the fifth hot plate main body 35, the sheath heaters 41 to 45 are similarly embedded and attached to the mounting surface 22 of the mounting plate 20, whereby the hot plate 122 is manufactured. can do.
The method of embedding the sheath heater 50 in the hot plate body 30 is not limited to the method described above. For example, the sheath heater 50 may be embedded in the hot plate main body 30 by casting a casting material such as aluminum constituting the hot plate main body 30 around the sheath heater 50.
Moreover, although the case where the sheath heater 50 is used as a heat transfer body embedded in the hot plate body 30 has been described, the present invention is not limited to this case. For example, a heat pipe (not shown) can be used as the heat transfer body. The heat pipe is composed of a hollow tube member and a heat transfer medium such as heated oil flowing in the tube member. The heat plate 122 can be manufactured by embedding such a heat pipe in the heat plate main body 30 in the same manner as the embedding method and the embedding method shown in FIGS. In this case, the heat pipe is connected to the temperature control device 70, and the temperature control device 70 controls the temperature of the heat plate 122 by adjusting the temperature of the heat transfer medium flowing in the tube member.
Next, with reference to FIG. 8, the temperature change in the solar cell module 10 when the solar cell module 10 is heated with the laminating apparatus 100 of this embodiment is demonstrated.
Fig.8 (a) is a top view of the state which mounted the solar cell module 10 in the center of the mounting surface 21 of the hot plate 122 of the laminating apparatus 100 of this embodiment. FIG.8 (b) is a figure which shows the graph which measured the temperature of the

measurement points

81a, 81b, 81c of the surface of the solar cell module 10 shown to Fig.8 (a). Here, the dimensions of the hot plate 122, the inner heating area S1, the peripheral heating areas S2 to S5, and the solar cell module 10 are the same as those described in FIG. Further, the measurement point 81a is a point located 10 mm inside from the corner 82 of the solar cell module 10 in the width and depth directions. The measurement point 81b is a point located 10 mm inward in the width direction from the center of one long side of the solar cell module 10. That is, the

measurement points

81a and 81b are heated by the peripheral heating region S2 of the hot plate 122. The measurement point 81 c is a point located at the center of the solar cell module 10. That is, the measurement point 81 c is heated by the inner heating region S 1 of the hot plate 122. In FIG. 8B, the temperature change at the measurement point 81a corresponds to a characteristic line indicated by a solid line, the temperature change at the measurement point 81b corresponds to a characteristic line indicated by a broken line, and the temperature change at the measurement point 81c is indicated by a one-dot chain line. Corresponds to the characteristic line. FIG. 8C is a diagram showing a graph in which the temperature of the hot plate 122 controlled by the temperature control device 70 is measured. In FIG. 8C, the temperature change in the peripheral heating region S2 corresponds to a characteristic line indicated by a solid line, and the temperature change in the inner heating region S1 corresponds to a characteristic line indicated by a one-dot chain line.
8 (b) and 8 (c), the temperature change graph is shown by the rise of a holding pin (not shown) that can be moved up and down and arranged in the lower chamber 121 or the hot plate 122 until substantially the first half of the vacuum process. This is a result when the workpiece 10 is laminated by a laminating apparatus 100 of a type that holds the workpiece 10 at a position separated from the hot plate 122.
First, when the vacuum process is started, the temperature controller 70 heats the inner heating region S1 and the peripheral heating regions S2 to S5 of the hot plate 122 in the same manner as shown in FIG. By controlling, as shown by the first half of the vacuum process in FIG. 8B, the temperature rises at the

measurement points

81a, 81b, 81c of the solar cell module 10 with a similar gradient although there is a temperature difference.
Thereafter, when the solar cell module 10 is placed on the hot plate 122 by the lowering of the holding pins in the second half of the vacuum process, as shown in the c1 part of FIG. 8C, the inner heating region S1 of the hot plate 122. Only the temperature drops rapidly. This is because when the holding pin is raised and the solar cell module 10 is separated from the hot plate 122 in the first half of the vacuum process, due to the temperature difference between the upper and lower sides of the cover glass 11 of the solar cell module 10, This is because the peripheral edge has warped in a direction further away from the hot plate 122. That is, only the inner part of the solar cell module 10 is grounded on the hot plate 122 to the inner heating region S 1, and the heat of the inner heating region S 1 of the hot plate 122 is taken away by the solar cell module 10. Therefore, as shown in part c2 of FIG. 8B, the temperature of the inner part (measurement point 81c) of the solar cell module 10 rapidly increases in the latter half of the vacuum process.
Next, from the vacuum process to the pressurization process, the temperature controller 70 heats the inner heating area S1 so as to compensate for the temperature of the deprived inner heating area S1, as indicated by a portion c3 in FIG. 8C. Increase the temperature of S1.
On the other hand, as shown in FIG. 8C, the peripheral heating region S2 of the hot plate 122 is not grounded to the solar cell module 10 even in the latter half of the vacuum process, so the temperature of the peripheral heating region S2 does not decrease. However, as shown in the a1 part of FIG. 8C, when the pressurization process is started, the temperature of the peripheral heating region S2 of the hot plate 122 is rapidly lowered. This is because the peripheral portion of the solar cell module 10 is grounded to the peripheral heating region S2 by the diaphragm 112, and the heat of the peripheral heating region S2 of the hot plate 122 is taken away by the solar cell module 10. Therefore, as shown in the a2 portion of FIG. 8B, the temperature of the peripheral portion (

measurement points

81a and 81b) of the solar cell module 10 rises.
Next, as shown in the a3 part of FIG. 8C, the temperature control device 70 is heated to compensate for the temperature of the deprived peripheral heating region S2, and the temperature of the peripheral heating region S2 becomes the target temperature. The heating control is performed.
At this time, as shown in part c4 of FIG. 8C, the temperature control device 70 heats and raises the temperature of the inner heating region S1 so as to match the increase in the temperature of the peripheral heating region S2.
By performing such temperature control, in the latter half of the pressurization step, as shown in FIG. 8B, the peripheral portion (

measurement points

81a, 81b) and the inner portion (measurement point 81c) of the solar cell module 10 The temperature can be made uniform. In the present embodiment, the temperature difference between the

measurement points

81a, 81b, 81c of the solar cell module 10 with respect to the set temperature can be within ± 5%. Specifically, the temperature at the final measurement point 81a shown in FIG. 8B is 147.5 ° C., the temperature at the measurement point 81b is 149.3 ° C., and the temperature at the measurement point 81c is 151.3 ° C. ° C.
As described above, even if the temperature decreases due to the time difference between the inner heating region and the peripheral heating region of the hot plate 122 due to the movement of heat among the solar cell module 10, the hot plate 122, and the diaphragm 112, the temperature Since the inner heating region and the peripheral heating region are separately temperature controlled by the control device 70, it is possible to perform quick temperature control corresponding to each temperature change. Therefore, the laminating apparatus 100 can cause the temperature of the inner heating region to follow the temperature of the peripheral heating region or the temperature of the peripheral heating region to the temperature of the inner heating region by the temperature control device 70. The temperature in the module 10 can be made uniform. That is, by making the temperature of the filler in the peripheral part and the inner part in the solar cell module 10 substantially the same, the time for the filler to start melting can be made substantially the same, and high quality in which no bubbles are generated inside. The solar cell module 10 can be provided.
Even if the temperature control device 70 increases the temperature of the hot plate 122 more rapidly so that the filler can start melting in a short time, the inner heating region and the peripheral heating region of the hot plate 122 are separated separately. By controlling the temperature, the time for the filler to start melting in the solar cell module 10 can be made substantially the same. Therefore, even if the temperature of the hot plate 122 is suddenly increased, the temperature can be controlled to be uniform, so that the tact time for producing a high-quality solar cell module in which no bubbles are generated can be easily reduced.
Moreover, since the temperature control apparatus 70 can control the temperature around the solar cell module 10 and the amount of supplied heat, it can reduce the deterioration of the temperature distribution of the solar cell module 10 due to warping.
In addition, the process in which the temperature control device 70 described above controls the temperature of the inner heating region and the peripheral heating region of the hot plate 122 is not limited to the above description, and the temperature in the solar cell module 10 is made uniform. Any temperature control can be used as long as it is possible. For example, assuming that the temperature is lowered in advance in the inner heating region and the peripheral heating region of the hot plate 122 in advance, respectively, immediately before the temperature is lowered so that the temperature does not decrease in the inner heating region and the peripheral heating region. You may control temperature which raises the temperature of a heating area | region and a periphery heating area | region.
Further, the results of the temperature change graphs shown in FIGS. 8A and 8B described above indicate that the workpiece 10 is held at a position separated from the hot plate 122 by a holding pin or the like until approximately the first half of the vacuum process. It was a result when using a laminating apparatus of the type. However, the present invention is not limited to such a laminating apparatus, and the conveying belt 130 can be applied to a laminating apparatus of the type in which the solar cell module 10 is placed on the hot plate 122 from the beginning.
Various kinds of fillers for the solar cell module 10 are used. That is, the characteristics of the filler are different, for example, the melting temperature is different depending on the type of the filler. In the laminating apparatus of the present embodiment, the temperature is quickly controlled according to the temperature change between the inner heating area and the peripheral heating area of the hot plate 122, as described above, assuming that the fillers are different. Therefore, the solar cell module 10 having stable quality can be manufactured even if the characteristics of the filler are different.
In the above-described embodiment, the case where the hot plate main body for heating the peripheral heating region is configured by a plurality of the second hot plate main body 32 to the fifth hot plate main body 35 has been described. I can't. For example, a hot plate main body for heating the peripheral heating region may be integrally formed.
Here, the configuration of the hot plate 150 integrally configured with the hot plate main body 30 for heating the peripheral heating region S2 will be described with reference to FIG. FIG. 9A is a plan view of the hot plate 150. FIG. 9B is a front view of the heat plate 150. FIG. 9C is a bottom view of the hot plate 150. In addition, the same code | symbol is attached | subjected about the component same as the hot platen 122 shown in FIG. 6, and this description is abbreviate | omitted.
The hot plate 150 includes a mounting plate 20 having a mounting surface 21 on which the solar cell module 10 is mounted, and a hot plate main body 151 (first plate) attached to a mounting surface 22 opposite to the mounting surface 21 of the mounting plate 20. The first hot plate main body 31 and the second hot plate main body 152) are connected to each other.
Further, as shown in FIG. 9C, the hot plate main body 151 is configured to include a first hot plate main body 31 and a second hot plate main body 152.
The first hot plate main body 31 is attached to the center of the mounting plate 20 when the hot plate 151 is viewed from the back side. That is, the first hot plate body 31 is the same size as the inner heating region S1.
A plurality of housing grooves are processed on the back surface of the first hot plate main body 31 over the entire back surface, and a sheath heater 41 similar to that shown in FIG. 6 is embedded in the housing groove.
The second hot plate main body 152 has a mouth shape that surrounds the first hot plate main body 31 when the hot plate 150 is viewed from the back side. There is a slight gap between the second hot plate main body 152 and the first hot plate main body 31. The second hot plate main body 152 has a role of heating the peripheral heating region S2, and has the same size as the peripheral heating region S2. A sheath heater 153 is embedded in the back surface of the second hot plate main body 152. The sheath heater 153 is embedded at substantially the center in the width direction of each side of the second hot plate main body 152. Although not shown, the sheath heater 153 is connected to the temperature control device 70 described above from the accommodation groove. Therefore, the temperature control device 70 can control the entire peripheral heating region S2 to a uniform temperature via the second hot plate main body 152 by heating the sheath heater 153.
Further, in the hot plate 122 shown in FIG. 6 described above, the first hot plate main body 31 for heating the inner heating region and the hot plate main body for heating the peripheral heating region (the second hot plate main body 32 to the fifth hot plate). Although the case where the main body 35) is connected via the mounting plate 20 has been described, the mounting plate 20 may be omitted and the hot plate main bodies may be connected to each other.
Here, the configuration of the hot plate 160 in which the hot plate bodies are connected to each other will be described with reference to FIG. FIG. 10A is a plan view of the hot plate 160. FIG. 10B is a front view of the hot plate 160. FIG. 10C is a bottom view of the hot plate 160. Here, the same components as those of the hot plate 150 shown in FIG. 9 described above are denoted by the same reference numerals, and description thereof is omitted.
As shown in FIGS. 10A, 10 B, and 10 C, the hot plate 160 includes the first hot plate main body 31 and the second hot plate main body 152. Is not included. Therefore, the solar cell module 10 is placed directly on the first hot plate main body 31 and the second hot plate main body 152.
Then, the first hot plate main body 31 and the second hot plate main body 152 are directly connected via the mounting plate 161 shown in FIGS. 10B and 10C. Specifically, as shown in the partial cross-sectional enlarged view of the portion C in FIG. 10B, the fixing is performed through the mounting plate 161 straddling the first hot plate main body 31 and the second hot plate main body 152. Screws 162 are screwed to the first hot plate main body 31 and the second hot plate main body 152.
By configuring the hot plate 160 in this way, the first hot plate main body 31 and the second hot plate main body 152 can be connected without using the mounting plate.
In addition, the above-described hot plate 122 shown in FIG. 6 has been described with respect to a case where the hot plate 122 includes a plurality of hot plate bodies (first hot plate body 31 to fifth hot plate body 35) and the mounting plate 20. You may comprise a hot plate with one hot plate main body.
Here, the configuration of the hot plate 170 constituted by one hot plate main body 171 will be described with reference to FIG. FIG. 11A is a plan view of the hot plate 170. FIG. 11B is a front view of the hot plate 170. FIG. 11C is a bottom view of the heat plate 170. Here, the same components as those of the hot plate 150 shown in FIG. 9 described above are denoted by the same reference numerals, and description thereof is omitted.
A sheath heater 41 for heating the inner heating region S1 is embedded in the back side of the hot plate main body 171. In addition, a sheath heater 153 for heating the peripheral heating region S2 is embedded on the back side of the hot plate main body 171. The temperature control device 70 can control the inner heating region S1 and the peripheral heating region S2 to uniform temperatures by heating the

sheath heaters

41 and 153, respectively.
By configuring the hot plate 170 in this way, the configuration of the hot plate can be simplified.
Further, the peripheral heating area and the inner heating area of the hot plate of the present embodiment are configured according to the size of the solar cell module 10. Therefore, when heating solar cell modules 10 having different sizes in one laminating apparatus 100, for example, two or more laminate portions are stacked in the vertical direction, and the inner heating region and the peripheral heating region having different sizes in each step. You may provide the hot plate 122 which has. Further, two or more hot plates having inner heating regions and peripheral heating regions of different sizes may be provided adjacent to one hot plate. Moreover, you may comprise so that it can replace | exchange with the hot plate | board which has an inner side heating area | region and peripheral heating area | region of a different magnitude | size.
Moreover, the laminating apparatus 100 of this embodiment may incorporate the temperature control apparatus 70. FIG. Alternatively, the temperature control device 70 may be separated and a laminating system including the laminating device 100 and the temperature control device 70 may be used.

Claims

An upper chamber and a lower chamber, which are partitioned by a pressing member, are arranged on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is placed in the lower chamber. A laminating apparatus for laminating by vacuuming and introducing air into the upper chamber and sandwiching between the hot plate and the pressing member,
In the hot plate, the peripheral heating area for heating the peripheral edge of the workpiece and the inner heating area inside the peripheral edge of the workpiece are separately temperature-controlled, and the peripheral edge of the workpiece A laminating apparatus that heats the inner part to substantially the same temperature.
In the hot plate, the temperature of the peripheral heating region and the inner heating region are separately controlled, and a time for starting the melting of the filler in the workpiece between the peripheral portion and the inner portion of the workpiece is set. The laminating apparatus according to claim 1, wherein the laminating apparatus is substantially the same.
The said hot plate is comprised separately by the peripheral hot plate main body corresponding to the said peripheral heating area | region, and the inner side hot plate main body corresponding to the said inner side heating area | region. Laminating equipment.
The hot plate is configured such that a peripheral hot plate main body corresponding to the peripheral heating region and an inner hot plate main body corresponding to the inner heating region are connected via a mounting plate for mounting a workpiece. The laminating apparatus according to claim 3.
5. The peripheral hot plate body corresponding to the peripheral heating region is configured separately for each side of the workpiece disposed in the peripheral heating region. Laminating equipment.