JP2014184717A - Laminate device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laminate device capable of easily performing lamination to a solar cell module or the like having a plurality of curve faces without generating bubbles and at high productivity.SOLUTION: Provided is a laminate device having: two diaphragms dividing the inside of a vacuum vessel into three small spaces; and a pump respectively evacuating the small spaces, in which the inside of the laminate device is evacuated before heating, thereafter, the object to be treated is pressurized while being heated and is laminated to suppress the generation of bubbles, and further, heating time to the object to be treated is reduced by a sheet-shaped heating means.

Description

  The present invention relates to a laminating apparatus such as a solar cell module having a plurality of curved surfaces.

  In recent years, solar cells have received a lot of attention as a clean energy source, and silicon solar cells with high power generation efficiency are the most promising candidates for electric power for high-end markets such as homes and cars. And construction sites are being studied.

  However, since most of the solar cell modules currently provided are of a flat type, the solar cell module is applied when used for applications such as automobile roofs, roof tile-integrated or building-material-integrated houses, and ships. There was a situation where the module and the installation site did not fit well.

  As a result, there has been a problem in that a space is generated in the attachment site, a useless space is generated, and the aesthetic appearance is also impaired. Therefore, it is desirable that the solar cell module has a curved surface structure corresponding to the curved surface shape of the construction site such as an automobile roof, but the conventional laminating apparatus has a curved surface shape for the purpose of creating a flat type solar cell module. It is not suitable for making solar cell modules.

  Various laminating apparatuses for solving the above problems have been proposed (for example, see Patent Document 1).

  FIG. 6 is a view showing a conventional laminating apparatus described in Patent Document 1. As shown in FIG.

  The conventional laminating apparatus is provided with a liquid container 102 having a diaphragm 105 that contains the heating fluid 103 and covers the surface of the heating fluid 103, and the liquid container 102 is airtightly coupled to the diaphragm 105 on the liquid container 102 side. And a means for evacuating between the diaphragm 105 on the liquid container 102 side and the diaphragm 105 on the sealing member 104 side when the liquid container 102 and the sealing member 104 are coupled.

  In addition, it is shown that the surface material, the filler, the interconnected solar cells, the filler, and the back material are stacked in this order between the diaphragm 105 on the liquid container 102 side and the sealing member 104 side, and heat-bonded.

JP-A-6-85307

  However, in the conventional laminating apparatus, since the object to be processed is pressurized and laminated by evacuating the diaphragm on the liquid container side and the diaphragm on the sealing member side while heating the object to be processed, There arises a problem that bubbles remain in the processed material.

  Furthermore, since the object to be processed is heated by a large amount of heating fluid stored in the liquid container, it takes time to reach the desired temperature when the heating temperature of the object to be processed is to be changed during pressurization, for example. Therefore, the problem that a tact becomes long and productivity will worsen generate | occur | produces.

  Therefore, in view of the above-described conventional problems, the present invention provides a laminating apparatus that can easily laminate a solar cell module having a plurality of curved surfaces without generation of bubbles and with high productivity. Objective.

  In order to solve the above-mentioned problems, the first invention of the present application includes two diaphragms that divide the inside of a vacuum vessel into three small spaces, a pump that evacuates each small space, a vacuum exhaust valve, and a large small space. An atmosphere release valve for setting the pressure to atmospheric pressure, and a heating means is disposed on the second diaphragm below the two diaphragms, and the surface facing the first diaphragm on the upper side of the second diaphragm, An object to be processed is arranged.

  By making such a laminating apparatus, each of the small spaces is evacuated before heating, and then the object to be processed can be pressurized and laminated while being heated, and bubbles are prevented from remaining on the object to be processed. can do.

  Furthermore, the second invention of the present application provides a laminating apparatus, wherein the heating means is a sheet heater.

  By using the laminating apparatus having such a configuration, when it is desired to change the heating temperature of the object to be processed, for example, during pressurization, the time can be shortened until the desired temperature is reached, thereby improving productivity. be able to.

  Further, the third invention of the present application further includes a third diaphragm below the second diaphragm, and the heating means is stored between the second diaphragm and the third diaphragm. There is provided a laminating apparatus characterized by being a heated fluid.

  By using the laminating apparatus having such a configuration, the amount of heating fluid used can be minimized, the time can be shortened until a desired temperature is reached, and productivity can be improved.

  Furthermore, a fourth invention of the present application provides a laminating apparatus, characterized in that a second heating means is disposed on the upper diaphragm.

  By using the laminating apparatus having such a configuration, the workpiece can be heated from both the upper and lower surfaces, the time can be further shortened until the desired temperature is reached, and the productivity can be improved.

  As described above, according to the laminating apparatus of the present invention, after evacuating each of the small spaces before heating, the object to be processed can be pressurized while being heated and laminated. The heating time can be shortened. As a result, it is possible to realize a laminating apparatus that can easily suppress the generation of bubbles in a solar cell module or the like having a plurality of curved surfaces and can perform lamination with high productivity.

In the laminating apparatus according to Embodiment 1 of the present invention, (a) is a cross-sectional configuration diagram of the preparation step, (b) is a cross-sectional configuration diagram during the pre-lamination step, and (c) is a cross-sectional configuration diagram during the laminating step. Cross-sectional view of the structure when the workpiece is a solar cell module The flowchart which shows the lamination method in Embodiment 1 of this invention. In the laminating apparatus according to Embodiment 2 of the present invention, (a) is a cross-sectional configuration diagram during the pre-lamination process, and (b) is a cross-sectional configuration diagram during the laminating process. In the laminating apparatus according to the third embodiment of the present invention, (a) is a cross-sectional configuration diagram during the pre-lamination process, and (b) is a cross-sectional configuration diagram during the laminating process. Cross-sectional view of a conventional laminating apparatus

  Embodiments will be described below with reference to the drawings.

(Embodiment 1)
A structural cross-sectional view of the laminating apparatus according to the present embodiment is shown in FIG. FIG. 1A is a structural cross-sectional view during preparation, FIG. 1B is a structural cross-sectional view during a pre-lamination process, and FIG. 1C is a structural cross-sectional view during a laminating process. FIG. 2 is a structural cross-sectional view when the object to be processed is a solar cell module, and FIG. 3 is a flowchart showing the laminating method according to this embodiment.

  In FIG. 1, the laminating apparatus constitutes a vacuum container with an upper member 1, an intermediate member 2 and a lower member 3. The first diaphragm 4 includes an upper member 1 and an intermediate member 2 which are provided via packings (not shown) disposed in the respective openings, and the second diaphragm 5 also includes the intermediate member 2 and the lower member. The member 3 is configured to be provided via packing (not shown) disposed in each opening. The first diaphragm 4 and the second diaphragm 5 are made of a material having elasticity and heat resistance such as silicon rubber.

  The upper member 1 and the first diaphragm 4 constitute an upper small space 6, and the first diaphragm 4, the intermediate member 2 and the second diaphragm 5 constitute an intermediate small space 7, and the second diaphragm 5. The lower small space 8 is constituted by the lower member 3.

  An upper vacuum exhaust valve 9 is connected to the upper member 1 via a pipe, and the upper vacuum exhaust valve 9 is connected to a vacuum pump 12 via the pipe. When the vacuum pump 12 is operated, the upper vacuum exhaust valve 9 is connected. By opening 9, the upper small space 6 can be evacuated. An upper atmosphere release valve 13 is connected to the upper member 1 via a pipe. By opening the upper atmosphere release valve 13, the upper small space 6 can be opened to the atmosphere.

  An intermediate vacuum exhaust valve 10 is connected to the intermediate member 2 via a pipe, and the intermediate vacuum exhaust valve 10 is connected to a vacuum pump 12 via the pipe. When the vacuum pump 12 is operated, the intermediate part By opening the evacuation valve 10, the intermediate small space 7 can be evacuated. Moreover, the intermediate | middle part atmosphere release valve | bulb 14 is connected to the intermediate member 2 via piping, and the middle part small space 7 can be open | released by air | atmosphere by opening the intermediate | middle part atmosphere release valve | bulb 14. FIG.

  A lower vacuum exhaust valve 11 is connected to the lower member 3 via a pipe, and the lower vacuum exhaust valve 11 is connected to a vacuum pump 12 via the pipe. When the vacuum pump 12 is in operation, the lower vacuum exhaust valve 11 is connected. By opening 11, the lower small space 8 can be evacuated. Further, a lower atmosphere release valve 15 is connected to the lower member 3 via a pipe, and the lower small space 8 can be opened to the atmosphere by opening the lower atmosphere release valve 15.

  A first sheet-like heater 16 is disposed on the second diaphragm 5 as a heating means, and the workpiece 17 can be heated from the lower surface.

  In addition, a second sheet-like heater 18 is disposed under the first diaphragm 4 as a heating means, and the workpiece 17 can be heated from the upper surface.

  As the first sheet-like heater 16 and the second sheet-like heater 18, a heater having flexibility and elasticity such as a silicon rubber heater is used.

  Next, a laminating method in the case where the object to be processed 17 is a solar cell module having a curved surface using the above laminating apparatus will be described.

  As shown in FIG. 2, the object to be processed 17 includes a plurality of solar cells 21, and these solar cells 21 are light receiving surface electrodes (not shown) of one adjacent solar cell 21. In addition, the back electrode (not shown) of the other solar battery cell 21 is electrically connected by the connection body 22 so that they are electrically connected in series with each other.

  Further, on the light receiving surface side of the plurality of solar cells 21, tempered glass in which an antireflection film is formed via a sealing material 23 such as EVA, polycarbonate in which an antireflection film and a gas barrier layer are formed, and the like A back sheet 25 made of a resin such as Tedlar laminated on an aluminum foil is disposed on the back side through a sealing material 23 such as EVA.

  First, as a preparation step, the intermediate member 2 and the lower member 3 are separated, and the workpiece 17 is placed on the first sheet heater 16 on the second diaphragm 5 (step S1). At this time, the object to be processed 17 having a curved surface is brought into close contact with the first sheet-like heater 16 due to the weight of the object to be processed 17, so that the object to be processed 17 can be heated uniformly during heating.

  Next, as a pre-lamination process, the intermediate member 2 and the lower member 3 are brought into close contact with each other (step S2). At this time, the second sheet-like heater 18 disposed under the first diaphragm 4 is installed on the workpiece 17.

  Thereafter, the upper atmosphere release valve 13, the middle atmosphere release valve 14 and the lower atmosphere release valve 15 are closed and the vacuum pump 12 is operated, and then the upper vacuum exhaust valve 9, the intermediate vacuum exhaust valve 10 and the lower vacuum exhaust valve 11 are operated. (Step S3), the upper small space 6, the intermediate small space 7 and the lower small space 8 are brought into a vacuum state.

  At this time, the upper subspace 6, the intermediate subspace 7 and the lower subspace 8 are measured with a vacuum gauge (not shown), and vacuuming is performed while adjusting the vacuum so that the same vacuum is obtained during the vacuuming process. It is desirable to do.

  In this way, before heating the object 17 to be processed, the space between the solar cells 21, the connection body 22, the sealing material 23, the substrate 24 and the back sheet 25 is evacuated to suppress the generation of bubbles after lamination. can do.

  After the upper small space 6, the intermediate small space 7, and the lower small space 8 are in a vacuum state (step S4), the workpiece 17 is sealed by the first sheet heater 16 and the second sheet heater 18. It heats to the temperature which the fixing material 23 softens (step S5, step S6).

  When the sealing material 23 is in a softened state, the flexibility is increased, and when the solar battery cell 21 follows the curved surface of the substrate 24 during pressurization in a laminating process described later, the solar battery cell 21 is cracked. Can be suppressed.

  Next, as a laminating process, the upper vacuum exhaust valve 9 and the lower vacuum exhaust valve 11 are closed, and then the upper atmosphere release valve 13 and the lower atmosphere release valve 15 are opened (step S7), and the upper small space 6 and the lower small space 8 are opened. Is set to atmospheric pressure (step S8). At the same time, the first sheet-like heater 16 and the second sheet-like heater 18 heat the workpiece 17 to a temperature at which the sealing material 23 melts (step S9).

  By setting the upper small space 6 and the lower small space 8 to atmospheric pressure, the first diaphragm 4 is in close contact with the second sheet-shaped heater 18, and the first diaphragm 4 and the second diaphragm 5 are the first one. The workpiece 17 is pressurized through the sheet heater 16 and the second sheet heater 18.

  At this time, it is desirable to measure the degree of vacuum of the upper small space 6 and the lower small space 8 with a vacuum gauge (not shown), and to introduce the atmosphere while adjusting the degree of vacuum to be the same in the process of introducing the atmosphere.

  Thus, by laminating the first sheet-like heater 16 and the second sheet-like heater 18 in close contact with the workpiece 17, the time until the workpiece 17 reaches a desired laminating temperature is shortened. Productivity can be improved.

  The solar cell module having a curved surface can be laminated by the above steps.

(Embodiment 2)
FIG. 4 is a structural cross-sectional view of the laminating apparatus according to this embodiment. FIG. 4A is a structural cross-sectional view during the pre-laminating process, and FIG. 4B is a structural cross-sectional view during the laminating process.

  In the present embodiment, a third diaphragm 31 is further provided below the second diaphragm 5 as heating means, and the heating fluid 33 is stored between the second diaphragm 5 and the third diaphragm 31. Yes.

  Further, as a second heating means, a fourth diaphragm 32 is further provided on the upper side of the first diaphragm 4, and the heating fluid 33 is stored between the first diaphragm 4 and the fourth diaphragm 32.

  As the heating fluid 33, a fluorine-based heat medium that can be heated to about 200 ° C. is used.

  The heating fluid 33 is heated between the second diaphragm 5 and the third diaphragm 31, and the heating fluid 33 is heated between the first diaphragm 4 and the fourth diaphragm 32 by separate pipes (not shown). It is connected to a cooling circulation device (not shown) and can be controlled by the heating / cooling circulation device to a desired temperature such as a temperature at which the sealing material 23 softens or a temperature at which the sealing material 23 melts. it can.

  Other configurations are the same as those of the first embodiment.

  With such a configuration, the heating fluid 33 is provided between the second diaphragm 5 and the third diaphragm 31, between the first diaphragm 4 and the fourth diaphragm 32, piping, and heating / cooling circulation. Since it becomes the capacity | capacitance in an apparatus, the usage-amount of the heating fluid 33 can be minimized, time can be shortened until it reaches desired temperature, and productivity can be improved.

  Next, the laminating method of the to-be-processed object 17 is demonstrated using the laminating apparatus of a present Example.

  First, as a preparation step, the intermediate member 2 and the lower member 3 are separated, and the workpiece 17 is placed on the second diaphragm 5. At this time, the workpiece 17 having a curved surface due to its own weight is in close contact with the heating means including the second diaphragm 5, the heating fluid 33 and the third diaphragm 31. Can be heated.

  Next, as a pre-lamination process, the intermediate member 2 and the lower member 3 are brought into close contact with each other.

  Thereafter, the upper atmosphere release valve 13, the middle atmosphere release valve 14 and the lower atmosphere release valve 15 are closed and the vacuum pump 12 is operated, and then the upper vacuum exhaust valve 9, the intermediate vacuum exhaust valve 10 and the lower vacuum exhaust valve 11 are operated. And the upper small space 6, the intermediate small space 7, and the lower small space 8 are brought into a vacuum state.

  At this time, the upper subspace 6, the intermediate subspace 7 and the lower subspace 8 are measured with a vacuum gauge (not shown), and vacuuming is performed while adjusting the vacuum so that the same vacuum is obtained during the vacuuming process. It is desirable to do.

  In this way, before heating the object 17 to be processed, the space between the solar cells 21, the connection body 22, the sealing material 23, the substrate 24 and the back sheet 25 is evacuated to suppress the generation of bubbles after lamination. can do.

  After the upper small space 6, the intermediate small space 7, and the lower small space 8 are in a vacuum state, the first diaphragm 4, the heating fluid 33, and the The degree of vacuum in the upper small space 6 is adjusted so that the heating means including the fourth diaphragm 32 comes into close contact with the workpiece 17 without applying pressure.

  Thereafter, the heated fluid 33 between the second diaphragm 5 and the third diaphragm 31 and the heated fluid 33 between the first diaphragm 4 and the fourth diaphragm 32 are heated to thereby treat the workpiece 17. Is heated to a temperature at which the sealing material 23 softens.

  When the sealing material 23 is in a softened state, the flexibility is increased, and when the solar battery cell 21 follows the curved surface of the substrate 24 during pressurization in a laminating process described later, the solar battery cell 21 is cracked. Can be suppressed.

  Next, as the laminating process, the upper vacuum exhaust valve 9 and the lower vacuum exhaust valve 11 are closed, and then the upper atmospheric release valve 13 and the lower atmospheric release valve 15 are opened, and the upper small space 6 and the lower small space 8 are brought to atmospheric pressure. To do. At the same time, the heating fluid 33 between the second diaphragm 5 and the third diaphragm 31 and the heating fluid 33 between the first diaphragm 4 and the fourth diaphragm 32 are heated to thereby treat the workpiece 17. Is heated to a temperature at which the sealing material 23 melts.

  By setting the upper small space 6 and the lower small space 8 to atmospheric pressure, the heating means including the first diaphragm 4, the heating fluid 33, and the fourth diaphragm 32, the second diaphragm 5, the heating fluid 33, and the third The object to be processed 17 is pressurized with a heating means including a diaphragm 31.

  At this time, it is desirable to measure the degree of vacuum of the upper small space 6 and the lower small space 8 with a vacuum gauge (not shown), and to introduce the atmosphere while adjusting the degree of vacuum to be the same in the process of introducing the atmosphere.

  The solar cell module having a curved surface can be laminated by the above steps.

(Embodiment 3)
A sectional view of the structure of the laminating apparatus according to the embodiment of the present invention is shown in FIG. FIG. 5A is a structural cross-sectional view during the pre-laminating process, and FIG. 5B is a structural cross-sectional view during the laminating process.

  In the present embodiment, as the heating means, a second sheet-like heater 18 is disposed under the first diaphragm 4 as the heating means, and the workpiece 17 can be heated from the upper surface. A fourth diaphragm 32 is further provided on the upper side of the first diaphragm 4, and the heating fluid 33 is stored between the first diaphragm 4 and the fourth diaphragm 32.

  A first sheet-like heater 16 is disposed on the second diaphragm 5 as a heating means, and the workpiece 17 can be heated from the lower surface. A third diaphragm 31 is further provided below the second diaphragm 5, and the heating fluid 33 is stored between the second diaphragm 5 and the third diaphragm 31. As the heating fluid 33, a fluorine-based heat medium that can be heated to about 200 ° C. is used as in the second embodiment. The heating fluid 33 is heated between the second diaphragm 5 and the third diaphragm 31, and the heating fluid 33 is heated between the first diaphragm 4 and the fourth diaphragm 32 by separate pipes (not shown). It is connected to a cooling circulation device (not shown) and can be controlled by the heating / cooling circulation device to a desired temperature such as a temperature at which the sealing material 23 softens or a temperature at which the sealing material 23 melts. it can.

  Other configurations are the same as those of the first embodiment.

  With such a configuration, the workpiece 17 is placed between the first sheet heater 16, the second sheet heater 18, the second diaphragm 5, and the third diaphragm 31, and between the first diaphragm 4 and the first diaphragm 4. And the fourth diaphragm 32 is heated in a short time by the heating fluid 33.

  In addition, the heating fluid 33 between the second diaphragm 5 and the third diaphragm 31 and between the first diaphragm 4 and the fourth diaphragm 32 is used as a cooling fluid so that it is cooled in a short time after heating. Can do. Furthermore, the heating fluid of either the second diaphragm 5 and the third diaphragm 31 or between the first diaphragm 4 and the fourth diaphragm 32 is used as a cooling fluid, so that the workpiece 17 Lamination can be performed with a temperature difference between the front and back sides.

  Next, a method of laminating the workpiece 17 made of a material with one surface having inferior heat resistance with a temperature difference between the front and back using the laminating apparatus of this embodiment will be described.

  First, as a preparation step, the intermediate member 2 and the lower member 3 are separated, and the object to be processed 17 is placed on the first sheet-like heater 16. At this time, the workpiece 17 having a curved surface is in close contact with the first sheet-like heater 16 by its own weight, and the first sheet-like heater 16 is a heating composed of the second diaphragm 5, the heating fluid 33 and the third diaphragm 31. Since it is in close contact with the means, the workpiece 17 can be heated, kept warm, and cooled uniformly and rapidly during heating and cooling.

  Next, as a pre-lamination process, the intermediate member 2 and the lower member 3 are brought into close contact with each other, and the second sheet-like heater 18 under the first diaphragm 4 is placed on the workpiece 17.

  Thereafter, the upper atmosphere release valve 13, the middle atmosphere release valve 14 and the lower atmosphere release valve 15 are closed and the vacuum pump 12 is operated, and then the upper vacuum exhaust valve 9, the intermediate vacuum exhaust valve 10 and the lower vacuum exhaust valve 11 are operated. And the upper small space 6, the intermediate small space 7, and the lower small space 8 are brought into a vacuum state.

  After the upper small space 6, the intermediate small space 7, and the lower small space 8 are in a vacuum state, the upper vacuum exhaust valve 9 and the upper atmospheric release valve 13 are opened / closed to open and close the second sheet heater 18 and the first The degree of vacuum of the upper small space 6 is adjusted so that the heating means comprising the diaphragm 4, the heating fluid 33 and the fourth diaphragm 32 adhere to the workpiece 17 without pressurizing it.

  Thereafter, by heating the heating fluid 33 between the second sheet-shaped heater 18, the first diaphragm 4 and the fourth diaphragm 32, the workpiece 17 is heated to a temperature at which the sealing material 23 is softened. To do. At this time, the temperature of the heating fluid 33 between the first sheet-like heater 16, the second diaphragm 5, and the third diaphragm 31 is controlled so that one surface of the workpiece 17 is equal to or lower than the heat resistant temperature. . The heating fluid 33 between the first sheet-like heater 16, the second diaphragm 5, and the third diaphragm 31 has a small capacity including the inside of the pipe (not shown), so that it is a heating / cooling circulation device (not shown). ), The temperature can be controlled successively and accurately.

  Next, as the laminating process, the upper vacuum exhaust valve 9 and the lower vacuum exhaust valve 11 are closed, and then the upper atmospheric release valve 13 and the lower atmospheric release valve 15 are opened, and the upper small space 6 and the lower small space 8 are brought to atmospheric pressure. To do. At the same time, by heating the second sheet-like heater 18 and the heating fluid 33 between the first diaphragm 4 and the fourth diaphragm 32, the workpiece 17 is heated to a temperature at which the sealing material 23 melts. To do.

  When the difference between the heat-resistant temperature of the workpiece 17 and the sealing material melting temperature is large, the energization of the first sheet-like heater 16 is stopped and the cooling fluid is provided between the second diaphragm 5 and the third diaphragm 31. It is also possible to prevent the one surface of the object to be processed 17 from reaching the heat resistant temperature or higher by flowing 33.

  By setting the upper small space 6 and the lower small space 8 to atmospheric pressure, the heating means including the second sheet heater 18 and the second diaphragm 5, the heating fluid 33 and the third diaphragm 31, and the first diaphragm 4. Then, the workpiece 17 is pressurized by the cooling means comprising the cooling fluid 33 and the fourth diaphragm 32.

  Further, an elastic sheet-like heat insulating material 34 provided with a plurality of through holes between the first sheet-like heater 16 and the second diaphragm 5 that are in contact with the surface of the workpiece 17 having a low heat-resistant temperature is inserted. The heat transfer coefficient between the first sheet-like heater 16 and the second diaphragm 5 can be adjusted by the pressure.

  Thus, when the upper small space 6, the intermediate small space 7, and the lower small space 8 are in a vacuum state, the heat transfer coefficient between the first sheet-like heater 16 and the diaphragm 5 is small, and heat escape is small. When the upper small space 6 and the lower small space 8 are at atmospheric pressure, there are a plurality of through holes due to the pressure, the elastic sheet-like heat insulating material 34 is crushed, and the space between the first sheet-like heater 16 and the diaphragm 5 is reduced. The heat flow can be adjusted to increase the heat transfer coefficient and increase the cooling effect.

  In the third embodiment, means capable of heating and cooling are arranged on both sides of the object to be processed 17, but there are means capable of heating on the sealing material 23 side of the object to be processed 17. The same purpose can be achieved even if a heat radiating plate made of a metal or ceramic block is arranged as a means for heating and cooling on the side having low heat resistance.

  Due to the above process, the temperature of the sealing material 23 is melted on both sides of the conventional object to be processed 17, so that the characteristics and functions are deteriorated due to the heat and lamination is difficult. The solar battery cell can be laminated to a laminated glass containing a resin having low heat resistance, a resin whose one surface is coated with a hard coat film having low heat resistance, or the like.

  The laminating apparatus of the present invention has a feature that it can suppress the generation of bubbles in a workpiece having a plurality of curved surfaces and can perform lamination with high productivity, and a solar cell module that has to suppress cell cracking, It can also be used for in-vehicle glass lamination.

DESCRIPTION OF SYMBOLS 1 Upper member 2 Intermediate member 3 Lower member 4 1st diaphragm 5 2nd diaphragm 6 Upper small space 7 Middle small space 8 Lower small space 9 Upper vacuum exhaust valve 10 Middle vacuum exhaust valve 11 Lower vacuum exhaust valve 12 Vacuum Pump 13 Upper atmosphere release valve 14 Middle portion atmosphere release valve 15 Lower atmosphere release valve 16 First sheet heater 17 Processed object (solar cell module)
18 Second sheet heater

Claims (8)

Two diaphragms that divide the vacuum vessel into three small spaces;
In a laminating apparatus having a pump for evacuating each of the small spaces,
Each of the small spaces is provided with a first valve for evacuating the space and a second valve for bringing the space to atmospheric pressure. Of the two diaphragms, the second diaphragm below has heating means. An object to be processed is disposed on the surface of the second diaphragm facing the upper first diaphragm among the second diaphragms;
Laminating apparatus characterized by The laminating apparatus according to claim 1, wherein the heating means is a sheet heater. A third diaphragm is further provided below the second diaphragm;
The laminating apparatus according to claim 1 or 2, wherein the heating means is a heating fluid stored between the second diaphragm and the third diaphragm. The laminating apparatus according to claim 1, wherein a second heating means is disposed on the first diaphragm. The laminating apparatus according to claim 4, wherein the second heating means is a sheet heater. 5. A fourth diaphragm is further provided on the upper side of the first diaphragm, and the second heating means is a heating fluid stored between the first diaphragm and the fourth diaphragm. The laminating apparatus described. A third diaphragm and a second diaphragm are disposed as heating means and cooling means on the opposite side of the first sheet heater disposed so as to contact the workpiece,
The laminating apparatus according to claim 1, further comprising a heating fluid and a cooling fluid between the third diaphragm and the second diaphragm. The laminating apparatus according to claim 7, wherein an elastic sheet-like heat insulating material provided with a plurality of through holes between the first sheet heater and the second diaphragm is disposed.

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