JP2009078547A - Lamination apparatus, hot platen for the same, and method of manufacturing hot platen for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable a temperature of a hot platen to control at a target temperature easily and securely when in the lamination process. <P>SOLUTION: A lamination apparatus has an upper chamber and a lower chamber partitioned by a press member, and conducts lamination by disposing a workpiece on a hot platen 122 provided in the lower chamber, heating the workpiece with the hot platen, vacuumising the lower chamber, introducing atmosphere into the upper chamber, and pressing the work piece heated with the hot platen 122 between the hot platen 122 and the press member. The hot platen 122 is provided with a hot-platen main body 61 having an accommodation groove 63 on the back face thereof, and a sheath heater 62 embedded in the accommodation groove 63 wherein the outer peripheral face of the sheath heater 62 is made to contact the inner peripheral face of the accommodation groove 63 by deforming at least any one of the accommodation groove 63 and the sheath heater 62. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a laminating apparatus in which a workpiece such as a solar cell module is disposed on a hot plate, and the workpiece heated by the hot plate is sandwiched between the hot plate and a pressing member to laminate the hot plate for the laminating apparatus And a method for manufacturing a hot plate for a laminating apparatus.

  Due to problems such as greenhouse gases in recent years, solar cells that do not pollute the environment are attracting attention. A solar battery is configured by overlapping a plurality of members such as a cover glass, a filler, a solar battery cell, and a back surface material. When manufacturing this type of solar cell, a laminating apparatus is used (for example, see Patent Document 1). The laminating apparatus performs laminating while heating the workpiece on which the constituent members of the solar cell are superposed in a vacuum state. As a result, the workpiece is bonded in a state where the constituent members are overlapped. This laminating apparatus has an upper case having a diaphragm that is expandable downward, and a lower case having a hot plate. When laminating a solar cell, the user first arranges the constituent members of the solar cell on the hot plate. Next, the laminating apparatus places the space formed by the upper case and the lower case in a vacuum state. Further, the laminating apparatus introduces an atmospheric pressure into the upper case in a state where the constituent members of the solar cell, which is the workpiece, are heated by the hot plate. By doing so, the laminating apparatus laminates the solar cell constituent members with the diaphragm and the hot plate.

JP 2004-238196 A JP-A-9-33170

  A heater called a sheath heater, in which a heating wire is covered with a metal via an insulating material, is embedded in the hot plate of the laminating apparatus. By causing the sheath heater to generate heat, the heat of the sheath heater is transmitted to the hot plate, and the constituent members of the solar cell disposed on the hot plate can be heated. Further, the temperature of the hot plate is controlled by a temperature controller so as to be an appropriate temperature for heating the solar cell. More specifically, a thermocouple embedded at an appropriate depth position from the surface of the hot plate measures the temperature of the hot plate. The measured temperature information is fed back to the temperature controller. The temperature controller controls the temperature of the hot plate to an appropriate temperature based on the fed back temperature information. That is, the temperature controller raises the temperature of the sheath heater or naturally cools it. The temperature controller raises the temperature of the sheath heater or naturally cools it so that the temperature of the hot plate is maintained at an appropriate temperature.

  FIG. 9 is a diagram showing temperature transition of the hot plate. In FIG. 9, the characteristic line (1) is the temperature transition of the hot plate obtained when the laminating process is performed in a state where the workpiece is arranged on the hot plate in the laminating apparatus described above. The temperature of the hot plate is initially a target temperature (for example, 120 ° C. to 180 ° C.). By disposing the work piece on the hot plate, the heat of the hot plate is taken away by the work piece, and the temperature of the hot plate rapidly decreases. In order to compensate for this temperature drop, the temperature controller performs temperature control for increasing the temperature of the hot plate. However, the temperature of the hot plate does not easily reach the target temperature within a predetermined heating time (for example, 5 minutes). Further, during the laminating process, since the hot plate is in a vacuum atmosphere, the temperature of the hot plate does not easily increase. Furthermore, when the heating time of the workpiece is finished and the vacuum state of the space formed by the upper case and the lower case is released, the temperature of the hot plate greatly exceeds the target temperature and overshoots. As described above, in the conventional laminating apparatus, it is difficult to control the temperature of the hot plate to the target temperature. Furthermore, if the temperature of the hot plate overshoots, the workpiece cannot be placed on the hot plate until the temperature of the hot plate falls to the target temperature. Therefore, the conventional hot plate has a problem that the working efficiency of the laminate is lowered. In FIG. 9, a characteristic line (2) is a temperature transition of the hot plate obtained when the laminating process is performed in a state where the workpiece is not arranged on the hot plate. As shown by the characteristic line (2) in FIG. 9, when the laminating process starts, the temperature of the hot plate slightly decreases due to contact with the diaphragm, but is thereafter controlled to the target temperature.

  Therefore, the inventors of the present application verified a conventional laminating apparatus. As a result, it has been found that the reason why the temperature of the hot plate does not rise easily and the cause of the overshoot exceeding the target temperature after the heating time is over are due to the structure of the hot plate. FIG. 17A is a diagram schematically showing a partial cross section of the hot plate. As shown in FIG. 17A, the hot plate 160 has an upper plate 161 and a lower plate 162. The heat plate 160 has a sheath heater 163 provided between a housing groove formed on the back surface of the upper plate 161 and a housing groove formed on the upper surface of the lower plate 162. Here, gaps are generated in some places between the upper plate 161 and the sheath heater 163 and between the lower plate 162 and the sheath heater 163. This gap is due to an overlay error between the upper plate 161 and the lower plate 162, an error in the processing dimension of the receiving groove, or the like. Due to the generation of this gap, the efficiency of heat transfer from the sheath heater 163 to the upper plate 161 and the lower plate 162 is lowered. In particular, as described above, in the laminating process, there is a process in which the space formed by the upper case and the lower case is in a vacuum state. In this step, gaps generated between the upper plate 161 and the sheath heater 163 and between the lower plate 162 and the sheath heater 163 are also in a vacuum state. When the gap is in a vacuum state in this way, the efficiency of heat transfer from the sheath heater 163 to the upper plate 161 and the lower plate 162 is significantly reduced. Therefore, it becomes difficult for the temperature controller to control the temperature of the hot plate 160. Further, the temperature of the hot plate 160 does not easily increase to the target temperature within the heating time. Therefore, the temperature controller performs temperature control for further increasing the temperature of the sheath heater 163 in order to increase the temperature of the hot plate 160. Therefore, the temperature of the sheath heater 163 increases excessively. When the vacuum state is released after the heating time of the workpiece is finished, air is also introduced into the gaps described above. By introducing air, air becomes a medium, and the heat of the sheath heater 163 is transmitted to the heat plate 160 (the upper plate 161 and the lower plate 162) more efficiently than before. Then, the heat of the sheath heater 163 that has risen excessively is transmitted to the hot plate, and the temperature of the hot plate 160 greatly exceeds the target temperature and causes overshoot. Moreover, the temperature distribution on the surface of the hot plate 160 becomes non-uniform due to the presence of the location where the gap is generated and the location where it is in contact. Therefore, there is a risk of affecting the quality such as adhesion of the constituent members in the laminating process.

  In such a problem, there is a method of improving heat transfer by filling a gap between the upper plate 161 and the sheath heater 163 or between the lower plate 162 and the sheath heater 163. For example, as shown in FIG. 17B, there is a method in which a heat conductive silicone sheet 164 or a fluorine resin sheet is interposed in the gap. However, even such a method cannot completely fill the gap. Moreover, it becomes a factor of the cost increase of the whole heat plate.

  On the other hand, when manufacturing a semiconductor or a liquid crystal display, there is a step of heat-treating a workpiece such as a semiconductor or a liquid crystal display. In this process, a hot platen for heating a workpiece is known (for example, see Patent Document 2). This hot platen has a through hole formed in parallel to the inside of the platen. A heat conducting element having an outer portion is provided in the through hole so that the inner peripheral surface of the through hole and the outer peripheral surface of the outer portion of the heat conducting element are in close contact with each other. However, this hot platen is used in an apparatus that does not enter a vacuum state as described above, in which the efficiency of heat transfer is significantly reduced. In addition, the hot platen disclosed in Patent Document 2 has not been considered so as to be able to cope with a workpiece to be enlarged in recent years.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to make it possible to easily and surely control the temperature of a hot plate in a laminating apparatus having a step of becoming a vacuum state to a target temperature.

The laminating apparatus of the present invention includes an upper chamber and a lower chamber partitioned by a pressing member, and a workpiece is disposed on a hot plate provided in the lower chamber and heated by the hot plate. A laminating apparatus for laminating an object by evacuating the lower chamber and introducing air into the upper chamber and sandwiching it between the hot plate and the pressing member, the hot plate having a receiving groove on the back surface A heat plate body and a sheath heater embedded in the housing groove, and deforming at least one of the housing groove and the sheath heater so that the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove It is characterized by doing so.
The hot plate can be configured to caulk a protrusion provided at an opening edge of the housing groove in an inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove.
The hot plate may be configured such that the receiving groove is provided on a bottom surface of a concave groove provided on a back surface of the hot plate main body.
The hot plate can be configured such that a portion of the protruding portion provided at the opening edge of the receiving groove is caulked in the inner direction of the receiving groove so as to protrude from the back surface of the hot plate main body.
The hot plate may be configured by caulking the opening edge of the housing groove in the inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove.
The hot plate may be configured to be provided directly on the back surface of the hot plate body in a state before the opening edge of the receiving groove itself is caulked.
The material of the hot plate main body may be the same as the material of the outer peripheral member of the sheath heater.
A plurality of sheath heaters can be embedded in the hot plate main body.
A plurality of housing grooves meandering differently along the surface direction are provided on the back surface of the hot plate main body, and a plurality of sheath heaters embedded in each of the plurality of housing grooves may be provided.
Among the plurality of sheath heaters, the plurality of sheath heaters embedded in the same depth direction of the heat plate main body are arranged such that the position of the heat plate coming out from the housing groove is shifted in the width direction of the heat plate main body. It can also be configured.
The hot plate can be configured by combining a plurality of hot plate bodies.
The said hot plate can also be comprised so that adjacent hot plate main bodies may be couple | bonded by a fixing member from the surface side via the coupling member provided ranging over between the hot plate main bodies from the surface side.
The hot plate may include a hot plate main body and a sheath heater embedded in the hot plate main body, and the entire outer periphery of the sheath heater may be in contact with the hot plate main body.
The hot plate may be configured to be embedded in the hot plate main body so that the entire outer periphery of the sheath heater is in contact with the hot plate main body.
The hot plate has a burying step of burying a sheath heater in a receiving groove provided on the back surface of the hot plate main body. In the burying step, the outer peripheral surface of the sheath heater is brought into contact with the inner peripheral surface of the receiving groove by a press machine. A manufacturing method in which at least one of the housing groove and the sheath heater is deformed so as to come into surface contact, and a protrusion provided on the opening edge of the housing groove or the opening edge itself is caulked in the inner direction of the housing groove. Is obtained.
The hot plate can also be obtained by a manufacturing method in which the sheath heater is embedded in the hot plate body by casting so that the entire outer periphery of the sheath heater is in contact with the hot plate body.

According to the present invention, the heat of the sheath heater is efficiently transmitted to the hot plate main body, and the temperature of the hot plate in the laminating apparatus can be easily and reliably controlled to the target temperature. In addition, the laminate quality of the workpiece can be improved.
For example, in the hot plate, the protruding portion provided at the opening edge of the housing groove is caulked in the inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove. In this case, it is possible to keep the outer peripheral surface of the sheath heater in pressure contact with the inner peripheral surface of the housing groove.
Further, for example, the housing groove can be provided on the bottom surface of the concave groove provided on the back surface of the hot plate main body. In this case, the cutting area can be reduced. Further, since the caulking portion can be positioned in the concave groove, the caulking portion does not protrude from the back surface of the hot plate main body, and another heat plate can be stacked on the back surface.
For example, the part which caulked the protrusion part provided in the opening edge of the accommodation groove in the inner direction of the accommodation groove can also protrude from the back surface of a hot plate main body. In this case, it is possible to reduce a press die cost used when caulking the protruding portion.
Further, for example, the hot plate can also caulk the opening edge of the housing groove in the inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove. In this case, since it is not necessary to form the protrusion part for crimping, the processing cost which processes a hot-plate main body can be reduced.
Further, for example, the housing groove can be provided directly on the back surface of the hot plate main body before the opening edge of the housing groove itself is caulked. In this case, the processing cost for processing the hot plate main body can be reduced.
Further, for example, in the hot plate, the material of the hot plate main body and the material of the outer peripheral member of the sheath heater can be the same. In this case, the efficiency of heat transfer from the sheath heater to the hot plate body can be improved.
Further, for example, the hot plate can embed a plurality of sheath heaters in the hot plate body. In this case, the entire hot plate can be heated uniformly.
Further, for example, the back surface of the hot plate main body may be provided with a plurality of housing grooves that meander differently along the surface direction, and a plurality of sheath heaters embedded in each of the plurality of housing grooves. In this case, the temperature distribution of the entire hot plate can be made constant.
Further, for example, among the plurality of sheath heaters, the plurality of sheath heaters embedded in the same depth direction of the hot plate main body can be shifted in the width direction of the hot plate main body from the housing groove. In this case, when wiring a plurality of sheath heaters, the sheath heaters coming out from the back surface of the hot plate body can be arranged so as not to cross or overlap each other on the lower side of the hot plate body. The space in the vertical direction on the side can be reduced.
Further, for example, the hot plate can be configured by combining a plurality of hot plate bodies. In this case, an accommodation groove | channel etc. can be processed for every hot-plate main body. Moreover, the operation | work which embeds a sheath heater in an accommodation groove | channel can be performed easily.
Further, for example, among the plurality of hot plate bodies, adjacent hot plate bodies are configured to be coupled from the surface side with a fixing member via a coupling member provided across the hot plate body from the surface side. You can also. In this case, since the operator can work from the front side with the coupling member placed between the hot plate bodies, the efficiency of the work of assembling the hot plate is improved.
Further, for example, the hot plate can be configured such that a sheath heater is embedded in the hot plate main body by casting. In this case, a hot plate in which the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove can be easily manufactured.

Hereinafter, the laminating apparatus according to this embodiment will be described with reference to the drawings.
FIG. 1 is a diagram illustrating an overall configuration of a laminating apparatus 100 according to the present embodiment. FIG. 2 is a perspective view showing the overall configuration of the laminating apparatus 100. The laminating apparatus 100 includes an upper case 110, a lower case 120, and a conveyance belt 130 for conveying the workpiece 10. The conveyor belt 130 conveys the workpiece 10 between the upper case 110 and the lower case 120. The laminating apparatus 100 is provided with a carry-in conveyor 200 for conveying the workpiece 10 before laminating to the laminating apparatus 100. Further, the laminating apparatus 100 is provided with a carry-out conveyor 300 for carrying out the workpiece 10 after lamination from the laminating apparatus 100. The carry-in conveyor 200 and the carry-out conveyor 300 are connected in series. The workpiece 10 is transferred from the carry-in conveyor 200 to the conveyance belt 130 and from the conveyance belt 130 to the carry-out conveyor 300.

  As shown in FIG. 2, the laminating apparatus 100 is provided with an elevating device 150 composed of a cylinder, a piston rod, and the like. The elevating device 150 can elevate and lower the lower case 120 while maintaining the upper case 110 in a horizontal state. The elevating device 150 lowers the upper case 110 so that the internal space between the upper case 110 and the lower case 120 can be sealed.

Next, the workpiece 10 to be laminated by the laminating apparatus 100 will be described.
FIG. 3 is a cross-sectional view showing a configuration of a solar cell module using a crystal cell as the workpiece 10. As shown in the figure, the solar cell module has a configuration in which a string 15 is sandwiched between a transparent cover glass 11 and a back material 12 via fillers 13 and 14. A material such as polyethylene resin is used for the back material 12. For the fillers 13 and 14, EVA (ethylene vinyl acetate) resin or the like is used. The string 15 has a configuration in which solar cells 18 as crystal cells are connected between electrodes 16 and 17 via lead wires 19.

  Moreover, as the workpiece 10, not only the solar cell module described above but also a solar cell module generally called a thin film type can be targeted. In a typical structure example of this thin film solar cell module, a power generation element composed of a transparent electrode, a semiconductor, and a back electrode is deposited on a transparent cover glass in advance. In such a thin film solar cell module, the cover glass is disposed downward, and the power generation element on the cover glass is covered with a filler. Further, the back material is covered on the filler. The components of the thin film solar cell module are bonded by vacuum heating lamination in such a state. That is, the thin film solar cell module is merely changed to a power generation element in which the above-described solar cell module crystal cells are deposited. The basic sealing structure of the thin film solar cell module is the same as that of the solar cell module described above.

  Next, the configuration of the laminating unit 101 of the laminating apparatus 100 according to the present embodiment will be described more specifically. FIG. 4 is a side sectional view of a laminating unit 101 that laminates the workpiece 10 in the laminating apparatus 100. FIG. 5 is a side cross-sectional view of the laminating unit 101 during laminating.

  The upper case 110 is formed with a space opened downward. In this space, a diaphragm 112 is provided so as to partition the space horizontally. The diaphragm 112 is formed of heat-resistant rubber such as silicone rubber. As will be described later, the diaphragm 112 functions as a pressing member that presses the workpiece 10 and performs lamination. A space (upper chamber 113) partitioned by a diaphragm 112 is formed in the upper case 110.

  An intake / exhaust port 114 communicating with the upper chamber 113 is provided on the upper surface of the upper case 110. In the upper chamber 113, the inside of the upper chamber 113 can be evacuated and the atmosphere can be introduced into the upper chamber 113 via the intake / exhaust port 114.

  In the lower case 120, a space (lower chamber 121) opened upward is formed. In this space, a hot plate 122 (panel-shaped heater) is provided. The hot plate 122 is supported by a support member erected on the bottom surface of the lower case 120 so as to maintain a horizontal state. In this case, the hot plate 122 is supported so that the surface thereof is substantially level with the opening surface of the lower chamber 121.

  An intake / exhaust port 123 communicating with the lower chamber 121 is provided on the lower surface of the lower case 120. In the lower chamber 121, the inside of the lower chamber 121 can be evacuated and the atmosphere can be introduced into the lower chamber 121 through the intake / exhaust port 123.

  A conveyor belt 130 is movably provided between the upper case 110 and the lower case 120 and above the heat plate 122. The conveyor belt 130 receives the workpiece 10 before lamination from the carry-in conveyor 200 in FIG. 1 and conveys it to the center position of the laminating unit 101. Moreover, the conveyance belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300 in FIG.

  A release sheet 140 is provided between the upper case 110 and the lower case 120 and above the conveyor belt 130. The release sheet 140 prevents the fillers 13 and 14 from adhering to the diaphragm 112 when the fillers 13 and 14 (see FIG. 3) of the workpiece 10 are melted.

  Next, the laminating process by the laminating apparatus 100 according to the present embodiment will be described more specifically. First, as shown in FIG. 4, the conveyance belt 130 conveys the workpiece 10 to the center position of the laminate unit 101.

  Next, the lifting device 150 lowers the upper case 110. By lowering the upper case 110, the internal space between the upper case 110 and the lower case 120 is sealed as shown in FIG. That is, the upper chamber 113 and the lower chamber 121 can be kept sealed inside the upper case 110 and the lower case 120, respectively.

  Next, the laminating apparatus 100 evacuates the upper chamber 113 through the intake / exhaust port 114 of the upper case 110. Similarly, the laminating apparatus 100 evacuates the lower chamber 121 through the intake / exhaust port 123 of the lower case 120. Due to the evacuation of the lower chamber 121, the bubbles contained in the workpiece 10 are sent out of the workpiece 10. In this state, the workpiece 10 is heated by the hot plate 122, and the fillers 13 and 14 contained therein are melted.

  Next, the laminating apparatus 100 introduces air into the upper chamber 113 through the intake / exhaust port 114 of the upper case 110 while maintaining the vacuum state of the lower chamber 121. As a result, a pressure difference is generated between the upper chamber 113 and the lower chamber 121, so that the diaphragm 112 expands. Accordingly, the diaphragm 112 is pushed downward as shown in FIG. The workpiece 10 is sandwiched between the diaphragm 112 extruded downward and the hot plate 122, and the constituent members are bonded by the molten fillers 13 and 14.

  At this time, the fillers 13 and 14 may protrude from between the cover glass 11 and the back surface material 12. At this time, the protruding fillers 13 and 14 stick to the release sheet 140. By interposing the release sheet 140 in this way, the protruding fillers 13 and 14 are prevented from adhering to the diaphragm 112. Therefore, the release sheet 140 prevents the fillers 13 and 14 from adhering to the workpiece 10 to be laminated next from the diaphragm 112. Further, when the protruding fillers 13 and 14 adhere to the conveyor belt 130, the attached fillers 13 and 14 are removed by a cleaning mechanism (not shown).

  After the laminating process is thus completed, the laminating apparatus 100 introduces air into the lower chamber 121 through the intake / exhaust port 123 of the lower case 120. At this time, the lifting device 150 raises the upper case 110. By raising the upper case 110, the conveyor belt 130 can be moved as shown in FIG. The conveyor belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300.

  Next, the hot plate 122 of the laminating apparatus 100 according to this embodiment will be described in detail. FIG. 6 is a perspective view showing the configuration of the hot plate 122 and its surroundings. The hot plate 122 has a plurality of hot plate bodies 61 and a plurality of sheath heaters 62. The size of the hot plate 122 is formed to fit in the lower case 120. The hot plate 122 of the present embodiment is formed in a size corresponding to the size of a workpiece that has been increasing in size in recent years. Specifically, as the size of the hot plate 122 increases, the width becomes about 4000 mm (shown in FIG. 6). W) and a depth of about 2000 mm (see DE shown in FIG. 6).

  The hot plate main body 61 is formed in a panel shape from aluminum or an aluminum alloy. The hot plate 122 of the present embodiment is configured by arranging four hot plate bodies 61 in the width direction. Adjacent hot plate main bodies 61 are connected to each other on the back side of these hot plate main bodies 61 by a fixing member such as a bolt from the front side via a connecting member 67 provided across adjacent hot plate main bodies 61. ing. By dividing and configuring in this way, it is possible to process each hot plate main body 61 when processing a housing groove to be described later. Further, when a sheath heater described later is embedded in the accommodation groove, the sheath heater may be embedded for each hot plate main body 61. Therefore, for example, it is not necessary to use a large press that embeds the sheath heater in the entire hot plate, and the processing cost can be reduced. Furthermore, transportation and assembly work of the hot plate 122 are facilitated. Further, by further combining the hot plate main body 61, a hot plate corresponding to a larger workpiece can be easily configured. The hot plate 122 is not limited to the case of being constituted by a plurality of hot plate main bodies 61, and may be constituted by a single hot plate main body 61.

  An accommodation groove 63 for embedding the sheath heater 62 is formed on the back surface of each hot plate main body 61. The accommodation groove 63 is formed so as to meander over the entire back surface in order to make the temperature distribution on the surface of the hot plate main body 61 uniform.

  A sheath heater 62 is embedded in the accommodation groove 63. The sheath heater 62 is a nichrome wire 62a whose center is processed in a coil shape, as shown in FIG. The sheath heater 62 has an insulating material 62b filled with powder of magnesium oxide or the like around the nichrome wire 62a. Further, the sheath heater 62 is covered with aluminum or an aluminum alloy around the insulating material 62b as a material of the sheath 62c (tube member forming the outer periphery). Thus, the hot plate main body 61 and the sheath of the sheath heater 62 are formed of the same material. Therefore, the heat plate 122 can improve the efficiency of heat transfer from the sheath heater 62 to the heat plate main body 61. The sheath heater 62 embedded in the accommodation groove 63 of each hot plate main body 61 is connected to a temperature controller 64 installed inside or outside the laminating apparatus 100 as shown in FIG. The temperature controller 64 controls the temperature so that the temperature of the hot plate 122 becomes the target temperature.

  FIG. 7 is a plan view of the hot plate 122. In FIG. 7, the sheath heater 62 embedded in each hot plate main body 61 is indicated by a broken line. The sheath heater 62 is divided into 1 to 12 channels (ch) for temperature control independently. Specifically, four sheath heaters 62 are embedded in each hot plate main body 61. Each hot plate main body 61 is temperature-controlled with the sheath heaters 62 at both ends as one channel. In addition, each hot plate main body 61 is temperature-controlled using two central sheath heaters 62 as one channel. The sheathed heater 62 embedded in the housing groove 63 is taken out from the back surface of the hot plate main body 61 at the point of the arrow in FIG. 7, passes through the lower side of the hot plate 122, and is connected to the temperature controller 64. The arrangement of the sheath heater and the temperature control channel (ch) setting are not limited to those shown in FIG.

  The sheath heater 62 has a different bent shape for each channel. As shown in FIG. 7, the 5-channel sheath heater 62 meanders so as to be substantially symmetrical with respect to the two-dot chain line L1. Further, as shown in FIG. 7, the 8-channel sheath heater 62 meanders so as to be substantially symmetrical with respect to the two-dot chain line L2. On the other hand, the 1-4, 6, 7 and 9-12 sheath heaters 62 shown in FIG. 7 meander so as to be asymmetrical. Further, the 1 to 3 channel sheath heater 62 and the 10 to 12 channel sheath heater 62 are substantially symmetrical with respect to the two-dot chain line L3. The 4-6 channel sheath heater 62 and the 7-9 channel sheath heater 62 are substantially symmetrical with respect to the two-dot chain line L3. This is particularly configured to make the temperature distribution of the entire hot plate 122 uniform. These shapes can be set as appropriate so as to make the temperature distribution of the hot plate uniform.

  Further, since the meandering form is different for each channel, the position where the sheath heater 62 comes out from the back surface of the hot plate main body 61 can be shifted in the width direction of the hot plate 122. Concretely, the hot plate main body 61 in which 10 to 12 channels are embedded will be described as an example. FIG. 16 is a view of the hot plate main body 61 in which the channels 10 to 12 are embedded as seen from the back side. In the hot plate main body 61, sheath heaters 62A, 62B, 62C, and 62D are embedded in the same depth direction. Here, the sheath heater which goes out from the back surface of the hot plate main body 61 is indicated by a one-dot chain line. As shown in FIG. 16, in each sheath heater 62, except for the combination of the sheath heater 62B and the sheath heater 62C constituting 11 channels, the positions of the sheath heaters that are exposed to the outside from the back surface of the hot plate main body 61 are shifted in the width direction. In other words, in a combination of at least one of a plurality of combinations in which the two sheath heaters 62 are arbitrarily selected, the positions of the two sheath heaters 62 coming out of the housing grooves 63 are shifted in the width direction of the hot plate main body 61.

  Accordingly, the plurality of sheath heaters 62 that are exposed to the outside from the back surface of each hot plate main body 61 can be arranged so as to cross each other on the lower side of the hot plate main body 61 or overlap each other. That is, if the position where the sheath heater 62 is exposed to the outside is the same in the width direction of the hot plate 122, the sheath heaters 62 cross and overlap each other because they are wired to the temperature controller 64 through the same path. A vertical space is required on the lower side of the hot plate main body 61. As in this embodiment, the position where the sheath heater 62 is exposed to the outside is shifted in the width direction of the hot plate 122 so that they do not cross or overlap each other, so the space below the hot plate 122 is used effectively. be able to. In FIG. 16, the positions of the sheath heater 62B and the sheath heater 62C constituting the 11 channel that are exposed to the outside from the back surface of the hot plate main body 61 are the same in the width direction, but are also arranged differently between the two. Thus, the space below the hot plate 122 can be used effectively.

  Further, as shown in FIG. 7, a thermocouple 66 for measuring the temperature of the hot plate 122 is embedded in the center of each channel. The thermocouple 66 is embedded at an appropriate depth position from the front surface of the hot plate main body 61, and is connected to the temperature controller 64 from the back surface of the hot plate 122. The temperature of the hot plate 122 measured by the thermocouple 66 is fed back to the temperature controller 64. The temperature controller 64 controls the heat generation of the sheath heater 62 so that the temperature of the hot plate 122 becomes the target temperature.

  Next, the relationship between the accommodation groove 63 of the hot plate main body 61 and the sheath heater 62 will be described in detail. FIG. 8 is a diagram for explaining the configuration of the hot platen according to the first embodiment. FIG. 8A is a cross-sectional view of the AA cross section in FIG. 7 as seen from the direction of the arrow, and shows a state in which the sheath heater 62 is embedded in the accommodation groove 63. As shown in FIG. 8A, the outer peripheral surface of the sheath heater 62 is in pressure contact with the inner peripheral surface of the housing groove 63 so as to be in surface contact so that there is no gap.

FIG. 8B is a diagram illustrating a state before the sheath heater 62 is embedded in the accommodation groove 63. As shown in FIG. 8B, the accommodation groove 63 is formed on the bottom surface of the concave groove 71 processed into a concave shape on the back surface 65 of the hot plate main body 61. Protruding portions 72 are provided on both sides of the opening edge of the accommodation groove 63. When the accommodation groove 63 shown in FIG. 8B is formed, cutting is performed from the back surface of the hot plate main body 61. At this time, the concave groove 71 and the protruding portion 72 are similarly cut.
Next, when the sheath heater 62 is embedded in the housing groove 63, the outer peripheral surface of the sheath heater 62 is pressed against the inner peripheral surface of the housing groove 63 by a press using a press die that matches the shape of the concave groove 71.

  FIG. 8C is a diagram illustrating a state after the sheath heater 62 is embedded in the accommodation groove 63. When the sheath heater 62 is pressed against the inner peripheral surface of the housing groove 63 by the press, the outer peripheral surface (sheath) of the sheath heater 62 is plastically deformed so as to follow the inner peripheral surface of the housing groove 63. Then, the outer peripheral surface of the sheath heater 62 and the inner peripheral surface of the housing groove 63 are in close contact with each other so as not to form a gap. Further, the pressing machine simultaneously presses the sheath heater 62 and plastically deforms the protruding portion 72 provided in the receiving groove 63 toward the inner side of the receiving groove 63 so as to close the opening of the receiving groove 63, thereby forming the caulking portion 73. Form. The caulking portion 73 is formed with a raised portion 74 (a portion indicated by an ellipse) that bulges downward from the bottom surface of the concave groove 71. Thus, by caulking, the state where the outer peripheral surface of the sheath heater 62 is in pressure contact with the inner peripheral surface of the housing groove 63 can be maintained. The back surface 65 of the hot plate main body 61 in which the housing groove 63 is formed serves as an attachment surface when the hot plate 122 is attached to the lower chamber 121. By forming the accommodation groove 63 on the bottom surface of the concave groove 71, the caulked portion 73 when the projecting portion 72 is caulked remains positioned in the concave groove 71. Accordingly, the caulking portion 73 does not protrude from the back surface 65 of the hot plate main body 61.

Here, when the outer peripheral surface of the sheath heater 62 is pressed into contact with the inner peripheral surface of the housing groove 63 using a press die, the outer peripheral surface of the sheath heater 62 is formed using a press die having substantially the same shape as the bent shape of the sheath heater 62. It is brought into pressure contact with the inner peripheral surface of the accommodation groove 63 at a time. Thus, by pressing, a gap can be eliminated between the outer peripheral surface of the sheath heater 62 and the inner peripheral surface of the housing groove 63. Thereby, the heat transfer from the sheath heater to the hot plate body is improved, and the temperature controllability of the hot plate is improved. Further, the temperature distribution on the surface of the hot plate 122 can be made uniform when the sheath heater 62 is heated. Therefore, the phenomenon that the temperature of the hot plate 122 greatly overshoots the target temperature can be prevented.
In order to maintain the uniformity of the caulking state and eliminate the distortion of the hot plate main body 61, it is desirable to caulk the entire surface at once as described above. However, since the hot plate main body 61 becomes larger because the hot plate 122 is enlarged, a method of caulking the hot plate main body 61 by dividing it into several times may be used in view of the capability of the press equipment. . In addition, when using the method which divides and crimps, the process of removing distortion bending deformation is needed.

  Next, the case where the workpiece 10 is laminated by the hot plate 122 of this embodiment will be described. Note that the temperature transition of the hot plate 122 measured when the laminating process is performed in a state where the workpiece 10 is not disposed on the hot plate 122 according to the present embodiment is the conventional hot plate (characteristics) shown in FIG. The same as the line (2)).

  In FIG. 9, a characteristic line (3) is a temperature transition of the hot plate 122 measured when the laminating process is performed in a state where the workpiece 10 is disposed on the hot plate 122 according to the present embodiment. Similar to the conventional hot plate (characteristic line (1)), by placing the workpiece 10 on the hot plate 122, the heat of the hot plate 122 is taken away by the workpiece 10, and the temperature of the hot plate 122 is Decreases rapidly. In order to compensate for this temperature drop, temperature control for increasing the temperature of the hot plate 122 is performed. As indicated by the characteristic line (3), the temperature of the hot plate 122 increases rapidly toward the target temperature. Therefore, this improves the heating work efficiency. When the target temperature is reached, there is no significant error between the temperature of the hot plate 122 and the temperature of the sheath heater 62. This is because the outer peripheral surface of the sheath heater 62 is press-contacted so as to come into surface contact with the inner peripheral surface of the housing groove 63, and no gap is generated between the sheath heater 62 and the housing groove 63. That is, even when the lower chamber 121 is in a vacuum state, the heat of the sheath heater 62 is directly transmitted to the hot plate main body 61, and the temperature of the sheath heater 62 is immediately reflected on the hot plate 122. As described above, the temperature controller 64 can easily and surely control the temperature of the hot plate 122 to the target temperature by increasing the temperature of the sheath heater 62 or naturally cooling the sheath heater 62.

  Further, when the heating time of the workpiece (for example, 5 minutes) is finished and the vacuum state of the lower chamber 121 is released, the temperature of the sheath heater 62 is excessively higher than the temperature of the hot plate as in the conventional hot plate. It has not risen. That is, the temperature of the hot plate 122 does not overshoot greatly exceeding the target temperature. Thus, according to the hot plate 122 of the present embodiment, the target temperature can be reliably maintained. Further, in the case of a conventional hot plate (characteristic line (1)), after the laminating process is finished, an excessive temperature rise of the hot plate due to overshoot has occurred. It was necessary to wait for the temperature of the hot plate to drop. However, according to the hot plate 122 of the present embodiment, an excessive temperature rise does not occur, so that the next workpiece 10 can be laminated immediately, and work efficiency is improved.

According to this embodiment, the temperature of the hot plate 122 can be easily and reliably controlled to the target temperature during the laminating process. Therefore, it is possible to prevent the adhesion failure of the constituent members of the solar cell in the laminating step and improve the laminating quality. Further, the working efficiency of the laminate can be improved.
According to the present embodiment, when the outer peripheral surface of the sheath heater 62 is pressed against the inner peripheral surface of the housing groove 63 by a press machine, it is necessary to use a dedicated press die that matches the shape of the concave groove 71 in FIG. There is. Therefore, a dedicated press die cost or the like is required for each hot plate type, and an initial cost is required. However, when the accommodation groove 63 is formed in the hot plate main body 61, the cutting area may be smaller than that in a third embodiment of FIG. That is, according to the present embodiment, the processing cost and the like of the hot plate body can be reduced, so that the running cost can be reduced. Thus, this embodiment is an embodiment suitable for small-scale mass production.

FIG. 10 is a diagram illustrating a configuration of a hot platen according to the second embodiment. In the present embodiment, the housing groove 83 formed on the back surface of the hot plate main body 81 is formed in a wedge shape having a substantially triangular shape that tapers toward the surface of the hot plate main body 81. In this case, the wedge-shaped tip has an angle of approximately 60 degrees. On the other hand, the sheath heater 82 embedded in the accommodation groove 83 is formed in a wedge shape having a substantially triangular cross section. The outer peripheral surface of the sheath heater 82 is pressed against the inner peripheral surface of the housing groove 83 by a press machine. Then, the outer peripheral surface of the sheath heater 82 is plastically deformed so as to be in surface contact with the inner peripheral surface of the housing groove 83 without a gap. At this time, as shown in FIG. 10, the caulking portion 73 is formed with a raised portion 74 that rises downward from the bottom surface of the groove 71.
Also in the present embodiment, as in the first embodiment, the outer peripheral surface of the sheath heater 82 and the inner periphery of the housing groove 83 are formed by caulking the protrusion provided on the opening edge of the housing groove 83 to form the caulking portion 73. Surface contact between the surfaces can be maintained. Further, it is possible to prevent the sheath heater 82 from falling out of the housing groove 83. As described above, in the present embodiment, the shape of the cross section of the sheath heater 82 is substantially triangular, and the cross section of the housing groove 83 is substantially triangular. Accordingly, the triangular flat surface of the sheath heater 82 and the triangular flat surface of the receiving groove 83 can be easily brought into surface contact.

  FIG. 11 is a diagram illustrating a configuration of a hot platen according to the third embodiment. In the embodiments described so far, the case where the concave groove 71 is processed in the back surface 65 of the hot plate body as shown in FIGS. 8 and 10 and the accommodating grooves 63 and 83 are formed in the concave groove 71 has been described. In the present embodiment, a flat portion 76 protruding from the back surface 65 of the hot plate main body 85 is provided without processing the concave groove, and the accommodation groove 63 is formed in the flat portion 76.

As shown in FIG. 11, the housing groove 63 is formed in a flat portion 76 that is formed by projecting from the back surface 65 of the hot plate main body 85 into a protruding convex shape. Protruding portions are provided on both sides of the opening edge of the accommodation groove 63 as in the embodiment shown in FIG. A back surface 65 of the hot plate main body 85 shown in FIG. 11 serves as a reference surface 75 when the hot plate 122 is attached to the lower chamber 121. When forming the accommodation groove | channel 63, it cuts from the back surface of the hot plate main body 85 by cutting. At this time, the reference surface 65, the flat portion 76, and the protruding portion are similarly cut.
Next, when the sheath heater 62 is embedded in the accommodation groove 63, the outer peripheral surface of the sheath heater 62 is pressed against the inner peripheral surface of the accommodation groove 63 using a press. At the same time, the press machine caulks protrusions provided on the opening edge of the housing groove 63 in the inner direction of the housing groove 63 so as to close the opening of the housing groove 63 to form a caulking portion 73. As a result, as shown in FIG. 11, the hot plate 84 has a shape having a raised portion 74 on a flat portion 76 protruding from the back surface 65 of the hot plate main body 85.

  According to the present embodiment, in order to perform cutting so as to form the reference surface 75, the accommodation groove 63, and the protruding portion, it is necessary to perform cutting over the entire back surface of the hot plate main body 85. Therefore, the material cost and processing cost of the hot plate main body 85 are required. However, in the present embodiment, since the protruding portion is provided on the flat portion 76 of the back surface 65 of the hot plate main body 85, the space to be caulked by the groove or the like is not limited. Therefore, the press die for caulking can be made into a simple shape such as a flat plate, and the die cost of the press die can be greatly reduced. That is, the present embodiment does not require a dedicated press die cost for each type of hot plate, so that the initial cost can be reduced. Thus, this embodiment is an embodiment suitable for multi-model small-volume production.

  FIG. 12 is a diagram for explaining a configuration of a hot platen according to the fourth embodiment. FIG. 12A is a cross-sectional view of the AA cross section in FIG. 7 as viewed from the direction of the arrow, and shows a state in which the sheath heater 62 is embedded in the accommodation groove 63. As shown in FIG. 12A, the outer peripheral surface of the sheath heater 62 is in pressure contact with the inner peripheral surface of the housing groove 63 so as to be in surface contact so that there is no gap.

  FIG. 12B is a diagram showing a state before the sheath heater 62 is embedded in the accommodation groove 63. As shown in FIG. 12B, the accommodation groove 63 is formed in a concave shape directly on the back surface 92 of the hot plate main body 91. Further, on both sides of the opening edge of the accommodation groove 63, the surface of the opening edge and the back surface of the hot plate main body 91 are formed on the same surface. That is, in the present embodiment, the protrusions described in the first to third embodiments are not formed. Here, the diameter d of the sheath heater 62 shown in FIG. 12B is formed smaller than the inner diameter D (see the broken line shown in FIG. 12B) of the groove bottom of the accommodation groove 63. Accordingly, the sheath heater 62 can be easily accommodated in the accommodation groove 63. From the state in which the sheath heater 62 is housed in the housing groove 63, the outer peripheral surface of the sheath heater 62 is pressed against the inner peripheral surface of the housing groove 63 by a press using a press die.

  FIG. 12C is a diagram illustrating a state after the sheath heater 62 is embedded in the accommodation groove 63. When the sheath heater 62 is pressed against the inner peripheral surface of the housing groove 63 by the press, the outer peripheral surface (sheath) of the sheath heater 62 is plastically deformed so as to follow the inner peripheral surface of the housing groove 63. Then, the outer peripheral surface of the sheath heater 62 and the inner peripheral surface of the housing groove 63 are in close contact with each other so as not to form a gap. In addition, the press machine presses the sheath heater 62 and simultaneously plastically deforms the opening edge of the receiving groove 63 inward of the receiving groove 63 so as to close the opening of the receiving groove 63 to form the caulking portion 73. FIG. 12C shows the shape of the press die 93 that plastically deforms the sheath heater 62 and the opening edge. The press die 93 has inclined portions 95a and 95b that are inclined toward the center from the protrusions 94a and 94b on both sides that are spaced apart from each other. Therefore, when the press die 93 presses the back surface 92 of the hot plate main body 91, the inclined portions 95 a and 95 b deform the opening edge of the receiving groove 63 toward the inner side of the receiving groove 63. The press die 93 has small protrusions 97 a and 97 b at locations corresponding to minute recesses formed at the boundary between the sheath heater 62 and the opening edge of the hot plate main body 91.

Here, when the sheath heater 62 and the opening edge portion are plastically deformed by the press die 93, a concave groove 96 is simultaneously formed as shown in FIG. Accordingly, the caulking portion 73 does not protrude from the back surface 92 of the hot plate main body 91.
In addition, according to this embodiment, it is necessary to use a dedicated press die that plastically deforms the opening edge portion and forms the concave groove 96, and the initial cost is increased. However, when the accommodation groove 63 is formed in the hot plate main body 91, it is only necessary to process the accommodation groove 63 in the hot plate main body 91. Therefore, according to this embodiment, there is no need for cutting such as protrusions and grooves, and the running cost can be reduced.

  FIG. 13 is a diagram for explaining a process of embedding the sheath heater 62 in the hot plate main body 87 according to the fifth embodiment. In the first to fourth embodiments described above, the sheath heater 62 is pressed against the inner peripheral surface of the housing groove 63 and is plastically deformed so that the outer peripheral surface of the sheath heater 62 follows the inner peripheral surface of the housing groove 63. Explained. In the present embodiment, the inner circumferential surface of the housing groove 63 is plastically deformed so as to follow the outer circumferential surface of the sheath heater 62. For example, as shown in FIG. 13, protrusions 77 having inclined portions on the outer surface are provided on both sides of the opening edge of the accommodation groove 63 of the hot plate main body 87. Then, a press die 78 for caulking is used, which has an inclined portion on the inner surface with a gentler angle than the angle of the inclined portion of the protruding portion 77. The press presses the hot plate main body 87 in a state where the sheath heater 62 is accommodated in the accommodation groove 63 by the press die 78. Then, the protrusion 77 (inner peripheral surface) of the housing groove 63 is plastically deformed along the outer peripheral surface of the sheath heater 62 by the action of the protrusion 77 and the inclined portion of the press die 78. Thus, according to this embodiment, the outer circumferential surface of the sheath heater 62 can be brought into surface contact with the inner circumferential surface of the housing groove 63 by plastically deforming the housing groove 63.

  FIG. 14 is a diagram illustrating a configuration of a hot platen according to the sixth embodiment. In the first to fifth embodiments described above, the case where the outer peripheral surface of the sheath heater 62 is brought into surface contact with the inner peripheral surface of the housing groove 63 using a press machine has been described. In the present embodiment, the sheath heater 62 is cast by an aluminum casting or the like, rather than being processed by a press, and is embedded in the hot plate body 89. Specifically, in a state where the sheath heater 62 is disposed at a predetermined position of the mold, the molten aluminum is poured into the mold, thereby casting the casting that constitutes the hot plate main body on the entire outer periphery of the sheath heater 62. The sheath 62c of the sheath heater 62 is made of a material higher than the melting point of the casting poured into the mold. Here, the material of the sheath 62c is preferably, for example, an iron pipe, a stainless steel pipe, a pipe using Incoloy or Inconel, or the like.

  FIG. 14 is a diagram showing a configuration of the hot plate 88 formed by the above-described casting process. As shown in FIG. 14, the entire outer periphery of the sheath heater 62 is surrounded so as to be in surface contact with the hot plate main body 89. Therefore, the heat of the sheath heater 62 is efficiently transmitted to the hot plate main body 89. In the method of casting the casting material into the mold, since the casting material contains gas, pores are formed when the casting is solidified. Accordingly, the contact between the sheath heater 62 and the hot plate main body 89 is inferior compared to the hot plate that is caulked by the press machine described above. However, as compared with the conventional method shown in FIG. 17, heat transfer is sufficiently performed even when the hot plate 88 is evacuated during lamination, and the temperature controllability of the hot plate 88 is sufficiently secured.

FIG. 15 is a perspective view showing a configuration of a hot plate and its surroundings according to the seventh embodiment. FIG. 15 is a perspective view showing the configuration of the hot plate 98 and its surroundings. The hot plate 122 described in the first embodiment includes the coupling members 67 provided between the adjacent hot plate main bodies 61 on the back side of the hot plate main bodies 61. Via a fixing member such as a bolt from the surface side.
The heat plate 98 of the present embodiment is configured so that the adjacent heat plate main bodies 99 are connected to each other on the surface side of the heat plate main bodies 99 via a coupling member 67 provided between the adjacent heat plate main bodies 99. From the surface side of the hot plate 98 by a fixing member such as a bolt. By configuring in this way, the operator can work from the surface side in a state where the coupling member 67 is placed between the hot plate bodies 99, so that the efficiency of the work of assembling the hot plate 98 is improved.

  As described above, the temperature controllability of the hot plate can be remarkably improved by using the hot plate of the present invention in a laminating apparatus that is in a vacuum state in the laminating step. That is, when the hot plate of the present invention is used in a laminating apparatus that is in a vacuum state in the laminating step, the heat of the sheath heater can be efficiently transferred to the hot plate main body. The hot plate of the present invention is particularly suitable for use in a laminating apparatus that is in a vacuum state in the laminating process, and can exert a remarkable effect when used in such a laminating apparatus.

  Moreover, the hot plate of this invention can improve the temperature distribution of a hot plate markedly compared with the method described in FIG. 17 which is a prior art. In the conventional method shown in FIG. 17, groove processing is performed on two plates, an upper plate 161 and a lower plate 162, and a sheath heater 163 is embedded in the groove. It is not easy to embed the sheath heater 163 having a complicated bent shape. That is, it is necessary to improve the accuracy of machining the upper and lower two grooves, and further, it is necessary to improve the bending accuracy of the sheath heater 163. Therefore, in the prior art, a linear sheath heater 163 is embedded by processing a linear groove on two upper and lower plates.

  On the other hand, in the hot plate of the present invention, since the housing groove of the sheath heater has only to be processed in a single hot plate body, the housing groove can easily realize a complicated curved shape as shown in FIG. Therefore, if the bending shape of the sheath heater is appropriately set, the temperature distribution of the hot plate can be made uniform.

It is a figure which shows the structure of the whole lamination apparatus. It is a perspective view which shows the whole structure of a laminating apparatus. It is sectional drawing which shows the structure of the solar cell module as a to-be-processed object. It is a sectional side view of the lamination part of a laminating apparatus. It is a sectional side view of the lamination part at the time of the lamination process of a laminating apparatus. It is a perspective view which shows the structure of the hotplate which concerns on 1st Embodiment, and its periphery. It is a top view of the hot platen concerning a 1st embodiment. It is a figure for demonstrating the structure of the hot platen which concerns on 1st Embodiment. It is a figure which shows the temperature transition which measured the temperature of the hotplate. It is a figure which shows the structure of the hot platen concerning 2nd Embodiment. It is a figure which shows the structure of the hot platen which concerns on 3rd Embodiment. It is a figure for demonstrating the structure of the hot platen which concerns on 4th Embodiment. It is a figure for demonstrating the process of embedding a sheathed heater in the hotplate main body which concerns on 5th Embodiment. It is a figure which shows the structure of the hot platen concerning 6th Embodiment. It is a perspective view which shows the structure of the hotplate which concerns on 7th Embodiment, and its periphery. It is a figure which shows the back surface of the hot plate part which concerns on 1st Embodiment. It is a figure which shows the structure which interposed the heat conductive silicone sheet in the structure of the heat | fever plate of the conventional lamination apparatus which became clear by verification, and a heat | fever plate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Workpiece 100 Laminating apparatus 101 Laminating part 110 Upper case 112 Diaphragm 113 Upper chamber 120 Lower case 121 Lower chamber 122 Hot plate 61 Hot plate main body 62 Sheath heater 63 Housing groove 65 Back surface 67 Joining member 71 Concave groove 72 Protruding part 73 Caulking part 74 Embankment 75 Reference surface 76 Flat part 77 Projection part 78 Press die 80 Hot plate 81 Hot plate body 82 Sheath heater 83 Housing groove 84 Hot plate 85 Hot plate body 86 Hot plate 87 Hot plate body 88 Hot plate 89 Hot plate body 91 Heat Plate body 92 Back surface 98 Heat plate 99 Heat plate body

Claims (17)

An upper chamber and a lower chamber, which are partitioned by a pressing member, are arranged on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is placed in the lower chamber. A laminating apparatus for laminating by vacuuming and introducing air into the upper chamber and sandwiching between the hot plate and the pressing member,
The hot plate is a hot plate body provided with a receiving groove on the back surface;
A sheath heater embedded in the housing groove,
A laminating apparatus, wherein at least one of the housing groove and the sheath heater is deformed so that the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove.   2. The laminating apparatus according to claim 1, wherein in a state where the sheath heater is embedded in the housing groove, a protrusion provided on an opening edge of the housing groove is caulked in an inner direction of the housing groove.   The laminating apparatus according to claim 1 or 2, wherein the housing groove is provided on a bottom surface of a concave groove provided on a back surface of the hot plate main body.   The laminating apparatus according to claim 2, wherein a portion where the projecting portion provided on the opening edge of the housing groove is caulked in the inner direction of the housing groove projects from the back surface of the hot plate main body.   2. The laminating apparatus according to claim 1, wherein an opening edge of the housing groove is caulked in an inner direction of the housing groove in a state where the sheath heater is embedded in the housing groove.   The laminating apparatus according to claim 5, wherein the housing groove is provided directly on the back surface of the hot plate main body in a state before the opening edge of the housing groove itself is caulked.   The laminating apparatus according to any one of claims 1 to 6, wherein a material of the hot plate main body and a material of an outer peripheral member of the sheath heater are the same.   The laminating apparatus according to claim 1, wherein a plurality of sheath heaters are embedded in the hot plate body. The back surface of the hot plate body is provided with a plurality of receiving grooves that meander differently along the surface direction,
The laminating apparatus according to claim 1, comprising a plurality of sheath heaters embedded in each of the plurality of receiving grooves.   Among the plurality of sheath heaters, the plurality of sheath heaters embedded in the same depth direction of the hot plate main body is characterized in that the position of going out from the housing groove is shifted in the width direction of the hot plate main body. The laminating apparatus according to claim 9.   The laminating apparatus according to any one of claims 1 to 10, wherein the hot plate is configured by combining a plurality of hot plate bodies.   Among the plurality of hot plate bodies, adjacent hot plate bodies are connected by a fixing member from the surface side through a connecting member provided between the hot plate bodies from the surface side. The laminating apparatus according to claim 11. An upper chamber and a lower chamber, which are partitioned by a pressing member, are arranged on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is placed in the lower chamber. A laminating apparatus for laminating by vacuuming and introducing air into the upper chamber and sandwiching between the hot plate and the pressing member,
The hot plate is a hot plate body,
A sheath heater embedded in the hot plate body,
A laminating apparatus characterized in that the entire outer periphery of the sheath heater is in contact with the hot plate body. It has an upper chamber and a lower chamber partitioned by a pressing member. A workpiece is placed on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is vacuumed in the lower chamber. And a hot plate for a laminating apparatus for laminating by introducing air into the upper chamber and sandwiching between the pressing members,
A hot plate body provided with a receiving groove on the back surface;
A sheath heater embedded in the housing groove,
A hot plate for a laminating apparatus, wherein at least one of the housing groove and the sheath heater is deformed so that the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove. It has an upper chamber and a lower chamber partitioned by a pressing member. A workpiece is placed on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is vacuumed in the lower chamber. And a hot plate for a laminating apparatus for laminating by introducing air into the upper chamber and sandwiching between the pressing members,
The hot plate is
On the hot plate body,
A heat plate for a laminating apparatus, wherein the entire outer periphery of a sheath heater is embedded so as to be in contact with the main body of the heat plate. An upper chamber and a lower chamber, which are partitioned by a pressing member, are arranged on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is placed in the lower chamber. A method of manufacturing a hot plate for a laminating apparatus for laminating a vacuum by introducing air into the upper chamber and sandwiching between the pressing members,
Having a burying step of burying a sheath heater in a receiving groove provided on the back surface of the hot plate body,
In the embedding step, at least one of the housing groove and the sheath heater is deformed so that the outer peripheral surface of the sheath heater is in surface contact with the inner peripheral surface of the housing groove by a press, and the opening of the housing groove The manufacturing method characterized by caulking the protrusion provided on the edge or the opening edge itself toward the inside of the housing groove. It has an upper chamber and a lower chamber partitioned by a pressing member, and a workpiece is placed on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is evacuated to the lower chamber. A method for producing a hot plate for a laminating apparatus for introducing air into an upper chamber and laminating by pressing between the pressing members,
A manufacturing method comprising embedding the sheath heater in the hot plate body by casting so that the entire outer periphery of the sheath heater is in contact with the hot plate body.

Images