CN101842313A - 微机械系统 - Google Patents

微机械系统 Download PDF

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Publication number
CN101842313A
CN101842313A CN200880113985A CN200880113985A CN101842313A CN 101842313 A CN101842313 A CN 101842313A CN 200880113985 A CN200880113985 A CN 200880113985A CN 200880113985 A CN200880113985 A CN 200880113985A CN 101842313 A CN101842313 A CN 101842313A
Authority
CN
China
Prior art keywords
micro mechanical
substrate
mechanical system
suspension arrangement
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200880113985A
Other languages
English (en)
Chinese (zh)
Inventor
T·皮尔克
A·弗兰克
K·克尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of CN101842313A publication Critical patent/CN101842313A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
CN200880113985A 2007-11-02 2008-10-01 微机械系统 Pending CN101842313A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007052367.1 2007-11-02
DE200710052367 DE102007052367A1 (de) 2007-11-02 2007-11-02 Mikromechanisches System
PCT/EP2008/063116 WO2009056420A2 (de) 2007-11-02 2008-10-01 Mikromechanisches system

Publications (1)

Publication Number Publication Date
CN101842313A true CN101842313A (zh) 2010-09-22

Family

ID=40514303

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880113985A Pending CN101842313A (zh) 2007-11-02 2008-10-01 微机械系统

Country Status (4)

Country Link
CN (1) CN101842313A (de)
DE (1) DE102007052367A1 (de)
TW (1) TWI471258B (de)
WO (1) WO2009056420A2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102530827A (zh) * 2010-11-23 2012-07-04 霍尼韦尔国际公司 振动隔离内插器管芯
CN103213934A (zh) * 2012-01-23 2013-07-24 罗伯特·博世有限公司 微机械结构和用于制造微机械结构的方法
CN104418285A (zh) * 2013-08-26 2015-03-18 罗伯特·博世有限公司 微机械构件和用于制造微机械构件的方法
CN104422436A (zh) * 2013-08-26 2015-03-18 罗伯特·博世有限公司 微机械结构元件和用于制造微机械结构元件的方法
CN108872638A (zh) * 2017-05-08 2018-11-23 株式会社村田制作所 电容式微电子机械加速度计

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104891419B (zh) * 2015-06-29 2016-11-09 歌尔股份有限公司 一种mems惯性传感器及其制造方法
DE102021202573B3 (de) 2021-03-16 2022-07-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mems-schallwandler mit ausnehmungen und auskragungen

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
DE19526903B4 (de) * 1995-07-22 2005-03-10 Bosch Gmbh Robert Drehratensensor
US6330102B1 (en) * 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
US6632698B2 (en) * 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
KR100431004B1 (ko) * 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
US20050066728A1 (en) * 2003-09-25 2005-03-31 Kionix, Inc. Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
US7187100B2 (en) * 2004-04-20 2007-03-06 Advanced Numicro Systems, Inc. Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102530827A (zh) * 2010-11-23 2012-07-04 霍尼韦尔国际公司 振动隔离内插器管芯
CN103213934A (zh) * 2012-01-23 2013-07-24 罗伯特·博世有限公司 微机械结构和用于制造微机械结构的方法
CN104418285A (zh) * 2013-08-26 2015-03-18 罗伯特·博世有限公司 微机械构件和用于制造微机械构件的方法
CN104422436A (zh) * 2013-08-26 2015-03-18 罗伯特·博世有限公司 微机械结构元件和用于制造微机械结构元件的方法
CN108872638A (zh) * 2017-05-08 2018-11-23 株式会社村田制作所 电容式微电子机械加速度计
CN108872638B (zh) * 2017-05-08 2020-12-01 株式会社村田制作所 电容式微电子机械加速度计

Also Published As

Publication number Publication date
DE102007052367A1 (de) 2009-05-07
TWI471258B (zh) 2015-02-01
WO2009056420A3 (de) 2009-10-22
TW200927637A (en) 2009-07-01
WO2009056420A2 (de) 2009-05-07

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Application publication date: 20100922