CN101826479A - 非封闭式高速气流吸附传输装置 - Google Patents
非封闭式高速气流吸附传输装置 Download PDFInfo
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- CN101826479A CN101826479A CN 201010160044 CN201010160044A CN101826479A CN 101826479 A CN101826479 A CN 101826479A CN 201010160044 CN201010160044 CN 201010160044 CN 201010160044 A CN201010160044 A CN 201010160044A CN 101826479 A CN101826479 A CN 101826479A
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CN2010101600442A CN101826479B (zh) | 2010-04-30 | 2010-04-30 | 非封闭式高速气流吸附传输装置 |
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CN2010101600442A CN101826479B (zh) | 2010-04-30 | 2010-04-30 | 非封闭式高速气流吸附传输装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113247616A (zh) * | 2021-03-25 | 2021-08-13 | 昆山科亚迪自动化设备有限公司 | 用于薄状料件的吸附机构 |
WO2022041256A1 (zh) * | 2020-08-31 | 2022-03-03 | 重庆康佳光电技术研究院有限公司 | 转移装置与转移方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1996567A (zh) * | 2006-01-06 | 2007-07-11 | 东京毅力科创株式会社 | 基板搬送装置、基板搬送方法和计算机程序 |
CN101399217A (zh) * | 2007-09-28 | 2009-04-01 | 东京毅力科创株式会社 | 基板保持装置及保持方法、半导体制造装置及存储介质 |
CN101496159A (zh) * | 2006-07-31 | 2009-07-29 | Asm美国公司 | 贝努利棒 |
CN201655778U (zh) * | 2010-04-30 | 2010-11-24 | 沈阳富森科技有限公司 | 非封闭式高速气流吸附传输装置 |
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- 2010-04-30 CN CN2010101600442A patent/CN101826479B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1996567A (zh) * | 2006-01-06 | 2007-07-11 | 东京毅力科创株式会社 | 基板搬送装置、基板搬送方法和计算机程序 |
CN101552221A (zh) * | 2006-01-06 | 2009-10-07 | 东京毅力科创株式会社 | 基板搬送装置和基板搬送方法 |
CN101496159A (zh) * | 2006-07-31 | 2009-07-29 | Asm美国公司 | 贝努利棒 |
CN101399217A (zh) * | 2007-09-28 | 2009-04-01 | 东京毅力科创株式会社 | 基板保持装置及保持方法、半导体制造装置及存储介质 |
CN201655778U (zh) * | 2010-04-30 | 2010-11-24 | 沈阳富森科技有限公司 | 非封闭式高速气流吸附传输装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022041256A1 (zh) * | 2020-08-31 | 2022-03-03 | 重庆康佳光电技术研究院有限公司 | 转移装置与转移方法 |
CN113247616A (zh) * | 2021-03-25 | 2021-08-13 | 昆山科亚迪自动化设备有限公司 | 用于薄状料件的吸附机构 |
CN113247616B (zh) * | 2021-03-25 | 2022-07-26 | 昆山科亚迪自动化设备有限公司 | 用于薄状料件的吸附机构 |
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