CN101825237A - Light irradiation device - Google Patents

Light irradiation device Download PDF

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Publication number
CN101825237A
CN101825237A CN201010128372A CN201010128372A CN101825237A CN 101825237 A CN101825237 A CN 101825237A CN 201010128372 A CN201010128372 A CN 201010128372A CN 201010128372 A CN201010128372 A CN 201010128372A CN 101825237 A CN101825237 A CN 101825237A
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CN
China
Prior art keywords
light
light source
section
led
irradiation device
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201010128372A
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Chinese (zh)
Inventor
矢野一晃
羽田博成
芜木清幸
片冈研
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
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Ushio Denki KK
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Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN101825237A publication Critical patent/CN101825237A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0066Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form characterised by the light source being coupled to the light guide
    • G02B6/0068Arrangements of plural sources, e.g. multi-colour light sources
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033Means for improving the coupling-out of light from the light guide
    • G02B6/0035Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0066Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form characterised by the light source being coupled to the light guide
    • G02B6/0073Light emitting diode [LED]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133524Light-guides, e.g. fibre-optic bundles, louvered or jalousie light-guides
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336Illuminating devices
    • G02F1/133615Edge-illuminating devices, i.e. illuminating from the side
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3406Control of illumination source

Abstract

A kind of light irradiation device, even when there is deviation in the illumination characteristic of LED, also can make the illumination homogenising of plane of illumination, even and produce on certain LED that illumination reduces or during situation about not lighting, also can replenish this illumination and reduce, keep the illumination of expectation at irradiation area on the whole.Possesses the light source portion (3) that on same one side, disposes the LED (23) of the light of a plurality of radiation ultraviolet regions, to shine from the ejaculation light of this light source portion pair and the above-mentioned irradiation area (6) that is in relative position with one side, it is characterized by, light source portion constitutes the section light source by a plurality of LED and the light guide section (24) that is disposed on the same substrate (21), this section light source (2) alignment arrangements on the direction that this substrate extends is a plurality of, certain-length till this light guide section has from above-mentioned one side together to light emergence face, mixing is from the ejaculation light of the LED that is positioned at this section light source, and can not light shine the light emergence face of other section light source.

Description

Light irradiation device
Technical field
The present invention relates to light irradiation device, relate in particular to a kind of formation and possess the wire of a plurality of LED and even the light irradiation device of planar light source.
Background technology
As the light irradiation device that possesses LED, for example in patent documentation 1, record the ultraviolet lamp that on substrate alignment arrangements has a plurality of LED.This device is to put the LED element at whole upper berth full configuration of the such large-area substrate of the full-size that is equivalent to base plate of liquid crystal panel, and only lights the needed LED of sclerosis of predetermined sealant and the device that shines.And, in patent documentation 2, dispose light emitting diode with above-mentioned similarly recording on same substrate, and to the exposure device of the workpiece irradiates light of substrate under it etc.
Figure 15 is the concept map of the light irradiation device of LED alignment arrangements on substrate, and Figure 15 (a) is a key diagram of watching the Lights section from the front, and Figure 15 (b) is the key diagram from laterally watching.
In this light irradiation device, light source 100 is by a plurality of light emitting diodes (below, be called LED) 101 and constitute, and LED 101 is disposed on the light source platform 102 with being paved with.In with device, possess supply unit (not shown) to each LED 101 switched conductive/disconnections, cooperate the shape of workpiece 103 to select and the specified point bright area, give LED 101 power supplies by supply unit.For example, in the technology of patent documentation 1 record, workpiece 103 is base plate of liquid crystal panel.At this time, the picture frame along regulation between two pieces of substrates is formed with sealant with rectangular shape, and is filled with liquid crystal in its picture frame.In order to be sandwiched in the sclerosis of the sealant in the substrate, only supply of electric power to be given corresponding to the lighting a lamp regional LED 101 of rectangular shape and light a lamp.
Patent documentation 1: TOHKEMY 2006-235617 communique
Patent documentation 2: TOHKEMY 2002-303988 communique
Yet, as described above on substrate in the light irradiation device of alignment arrangements LED 101, result from the deviation of degradation characteristic of 101 of the deviation of illumination of 101 of each LED or LED, in irradiation area, have and can't realize light-struck equably situation.The parameter of this origin in the such making of membranous (thickness, the composition) of the element in the manufacturing process of LED 101 or membrance casting condition (Temperature Distribution, programming rate), even when a wafer is made a plurality of LED, it is also very difficult on reality that this parameter is made homogenising on the whole at wafer.So, even from the LED of same wafer fabrication, because the difference of the parameter in small making also produces the deviation on the characteristic.On the basis of above-mentioned condition, device as shown in figure 15 is such, with a plurality of LED 101 alignment arrangements in lip-deep device, for example for each LED 101 on light quantity, though be very little, on the spectrum (wavelength) of radiating light, can produce deviation.So, in irradiation area, be difficult to obtain uniform illumination, can't carry out desired illumination sometimes and penetrate.
And in this device, certain LED 101 only also exists and replenishes the difficult problem of illumination of being scheduled to remaining LED 101 under situation about not lighting.On concrete, under the situation that a LED 101 does not light, even promote the input of the LED 101 around it, the influence of its input also can arrive N/R LED zone, even obtain the illumination of regulation in the led section of not lighting, also can become high Illumination Distribution in adjacent part, the result damages whole uniformity of illuminance.
For the problems referred to above, the shortcoming of the LED little for fear of light-emitting area, that irradiation angle range is narrow is considered the countermeasure of taking to be provided with in the front of LED concavees lens etc.Yet,, limited by the light quantity that other LED can replenish by this technology.Therefore, originally have deviation or illumination to reduce in advance or produce under the situation of the LED that does not light, in irradiation area, make the illumination homogenising, and to keep this homogenising be difficult in the illumination of LED.Particularly, in predetermined irradiation area, on the purposes that must keep the Illumination Distribution that sets, this illumination reduction meeting becomes problem to bringing considerable influence on workpiece or the operation.
Summary of the invention
Even when the object of the present invention is to provide a kind of illumination characteristic to have deviation, also can make the light irradiation device of the illumination homogenising of plane of illumination at LED.
And, produce on certain LED that illumination reduces or during situation about not lighting, also can replenish this illumination and reduce even another object of the present invention is to provide a kind of, keep the light irradiation device of the illumination of expectation on the whole at irradiation area.
The present invention is in order to solve above-mentioned problem, technical scheme 1 is a kind of light irradiation device, possesses light source portion, this light source portion disposes the LED of the light of a plurality of radiation ultraviolet regions on same one side, this light irradiation device will shine from the ejaculation light of this light source portion pair and the above-mentioned irradiation area that is in relative position with one side, this light irradiation device is characterised in that, above-mentioned light source portion constitutes the section light source by a plurality of LED and the light guide section that is disposed on the same substrate, this section light source alignment arrangements on the direction that aforesaid substrate extends is a plurality of and constitute, certain-length till above-mentioned light guide section has from above-mentioned one side together to light emergence face, mixing is from the ejaculation light of the LED that is positioned at this section light source, and can not light shine the light emergence face of other section light source.
The light irradiation device of technical scheme 2 is on the basis of technical scheme 1, and above-mentioned section light source can carry out the switching of conducting/disconnection to each of each section light source.
The light irradiation device of technical scheme 3 is on the basis of technical scheme 1 or 2, and above-mentioned section light source can be respectively carries out electric power control to each of each section light source.
The light irradiation device of technical scheme 4 is on the basis of any of technical scheme 1~3, and above-mentioned section light source possesses light amount detection unit.
The light irradiation device of technical scheme 5 is on the basis of technical scheme 4, this light irradiation device possesses feedback control unit, this feedback control unit is by utilizing the detected light quantity of above-mentioned light amount detection unit, is that the mode of predefined light quantity is controlled with this section light source.
The invention effect
According to technical scheme 1 described invention, even in the difference that has on the LED on the characteristic because mix and radiation from the light of a plurality of LED, thereby can suppress the deviation of the illumination of irradiation area.
According to technical scheme 2 described inventions,, thereby can only shine workpiece face (irradiation area) and need the part of irradiation and used because each section light source has the switching mechanism that can carry out the switching of conducting/disconnection.
According to technical scheme 3 described inventions, change is connected in the electric current of section light source, and can change light quantity with section light source unit, thereby can set the illumination of irradiation area as expectation, can obtain uniform illumination at irradiation area.
According to technical scheme 4 described inventions,, also can detect this situation apace even produce the deterioration of the LED of a part, situation about not lighting.
According to technical scheme 5 described inventions,, the illumination of irradiation area can be maintained A-stage by feedback control unit.
Description of drawings
Fig. 1 is the figure of the schematic configuration of the light irradiation device 1 that the present invention relates to of expression.
Fig. 2 is the stereogram that is shown in the section light source 2 of Fig. 1.
Fig. 3 is figure and a cutaway view of watching the section light source 2 that is shown in Fig. 1 from rear side.
Fig. 4 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 3.
Fig. 5 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 4.
Fig. 6 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 5.
Fig. 7 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 6.
Fig. 8 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 7.
Fig. 9 is the figure that expression possesses the section light source 2 of seven LED 23.
Figure 10 is the figure that expression possesses the section light source 2 of seven LEDs 23 different with the configuration of Fig. 9.
Figure 11 is the stereogram of structure of the light source cell group 3 of expression alignment arrangements a plurality of sections light sources 2.
Figure 12 is the stereogram of structure that expression possesses light source cell group 3 light irradiation devices of a plurality of Figure 13 of being illustrated in.
Figure 13 is the vertical view and the cutaway view of the different workpiece of the application pattern of sealant (base plate of liquid crystal panel).
Figure 14 is the vertical view of the structure of the different workpiece of expression substrate size or cover size.
Figure 15 is the concept map of the light irradiation device of LED alignment arrangements on substrate.
Description of symbols
1: light irradiation device
2: the section light source
21: substrate
22: translucent resin
23:LED
24: light guide section
241: reflecting surface
242: light emergence face
25: the heat transmission fin
26: photodiode
27: the light transmission lenticular body
271: outgoing plane
28,281,282: integral lens
2821: light emergence face
3: light source cell group (light source portion)
4: platform
5: workpiece
6: irradiation area
7: control part
71: conducting/disconnection control part
72: the electric power control part
8: gripper shoe
9: cooled plate
91: the water-cooled hole
10: power subsystem
11: sealant
12: glass substrate
13: screen mask
The specific embodiment
With reference to accompanying drawing an embodiment of the invention are described.
Fig. 1 is the figure of expression relevant for the schematic configuration of the light irradiation device 1 of the invention of this example.
Shown in figure, this light irradiation device 1 possesses the light source cell group 3 (light source portion) that alignment arrangements has a plurality of sections (segment) light sources 2, and at the opposite face of light source cell group 3, is formed with configuration by the irradiation area 6 of mounting in the workpiece 5 of platform 4.
Fig. 2 be shown in Fig. 1 the section light source 2 stereogram, Fig. 3 (a) be from rear side watch be shown in Fig. 1 the section light source 2 figure, Fig. 3 (b) be from the A-A cutting plane of Fig. 3 (a) watch the section light source 2 cutaway view.
As shown in these figures, a section light source 2 possesses for example five LED elements 23 (hereinafter referred to as LED 23) that are molded to translucent resin 22 on same substrate 21, and is vertical with substrate 21 and towards the light emission direction, light guide section 24 leap certain-lengths are formed extended at both sides.LED 23 is the LED of the light of radiation ultraviolet region, radiates the light of about same wave-length coverage.In addition, comprise extreme ultraviolet light (light of the about 200~300nm of wavelength), black light (light of the about 300~400nm of wavelength) in this what is called " light of ultraviolet region ".And, in practical application, also comprise the dominant wavelength (365nm, 405nm, 436nm) of mercury vapor lamp, thereby the LED of the light of the wavelength region may that needs of selective emission (mix the light of R, G, B in advance and the situation that becomes white light is inequality therewith) suitably.
So, when possessing the LED 23 of a plurality of same wavelength region may,, also can carry out revisal to this by exporting from other the light of LED 23 even have one to be under the situation about not lighting in hypothesis.In addition, so-called same wavelength region may does not also mean that the on all four situation of spatial distribution, can carry out the degree of mutual revisal to light as if reaching LED 23 in a section, even exist deviation to have no relations yet.Light guide section 24 side within it has the reflecting surface 241 that the light from LED 23 radiation is reflected, and constituting can leak light in the outer direction of light guide section 24.In addition, be provided with heat transmission fin 25, constitute and to carry out heat release to the heat of emitting from LED 23 at the back side of substrate 21.For light guide section 24, thereby thereby can use to the surface of metallic plate carry out the mirror finish side of being shaped as shape cylindrical body the hollow tube-shape body device or form vapor-deposited film at the substrate surface of glass, resin etc. and form the device of minute surface or the proper device such as device that constitute, light are carried out total reflection by edge reflection by column transparent bar etc.
From the radiating light of each LED 23 of the section of being built in light source 2, mixed by repeated reflection in light guide section 24, when the light emergence face 242 of light guide section 24 penetrates, can the section of shining light source 2 be shone predetermined, be in the section in the irradiation area 6.At this moment, the structure of irradiation area 6 of the section light source 2 by the local irradiation adjacency even also can not reduce illumination in the crack of section part, and can be shone irradiation area 6.The length of light guide section 24 constitutes the certain-length till having from LED 23 (substrate 21) to light emergence face 242, by make this total length and from light guide section 24 to irradiation area the length variations till 6, can change the uniformity of illumination according to expectation.By section light source 2, mix the light that penetrates from a plurality of LED 23, then pairing irradiation area 6 (section zone) is shone, thereby can suppress the illumination deviation brought by the characteristic of LED 23, can be with the illumination of expectation to workpiece 5 irradiates lights.
And, as shown in Figure 1, this light irradiation device 1 has and possesses conducting/control part 7 of disconnection control part 71 and electric power control part 72, Duan Guangyuan 2 utilizes the switching that conducting/disconnection control part 71 can be lit a lamp individually, be turned off the light, and the part corresponding with the size of workpiece 5 or needed irradiation area 6 lighted.And, by electric power control part 72, come from the characteristic of LED 23 and make under the situation of deficiency in light quantity from section light source 2 arbitrarily, by increasing the current value of this section light source 2, can promote the illumination of this section light source 2, the illumination that can obtain to expect.Particularly, five LED 23 that are connected in series in section light source 2 change the electric power amount of connecting in section light source 2.At this, even change arbitrarily the current value of section light source 2, as long as when the irradiation area 6 of main its section area illumination is the section zone that is predetermined, to other irradiation areas 6 to influence meeting less.Therefore, the illumination of irradiation area 6 integral body can be maintained the state of expectation.
Fig. 4 is that expression has the figure to the structure of the section light source 2 of the different structure of shown in Figure 3 section light source 2 with Fig. 2, and the cutaway view of Fig. 4 (a) section of being light source 2, Fig. 4 (b) are the figure during from the rear side section of watching light source 2.
As shown in these figures, this section light source 2 possesses the photodiode (PD) 26 as light amount detection unit in section light source 2.At this, photodiode 26 is adjacent to each LED 23 and is installed on substrate 21.When the ejaculation light time that photodiode 26 detects from each LED 23, light quantity is converted to the signal of telecommunication and sends to control part shown in Figure 1 (FEEDBACK CONTROL portion) 7, compare with initial value and according to difference, to the 72 output indications of electric power control part with the change magnitude of current.Even if a LED 23 is under the situation about not lighting, when increasing the electric current of section light source 2, the LED 23 that is in outside the LED23 of illuminating state not increases light quantity respectively, in light guide section 24, be under the state of mixing, because from light emergence face 242 radiating lights, so the illumination of irradiation area 6 can be maintained A-stage.On the other hand, change easily in the device of LED, perhaps have in the device of strong low-cost restriction, do not need the control of large-scale FEEDBACK CONTROL or electric power in the restriction that does not have the intermittent time.At this moment, photodiode only is installed,, can be carried out this detection, so can arresting stop and change LED even LED is in the state do not lighted or produces under the situation that light quantity reduces.Therefore, can reduce as far as possible and result from that LED does not light or unfavorable condition that light quantity reduces.
Fig. 5 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 4.The cutaway view of Fig. 5 (a) section of being light source 2, Fig. 5 (b) are the figure during from the rear side section of watching light source 2.
As shown in these figures, this section light source 2 possesses a photodiode 26 as light amount detection unit in light emergence face 242 sides of light guide section 24.This photodiode 26 detects the mixed light of the light that is radiated from each LED 23.In order to detect mixed light, photodiode 26 preferred disposition are near light emergence face 242.
Fig. 6 is that expression has the figure in the structure of the section light source 2 of the different structure of the section light source 2 of Fig. 2 to Fig. 5 with figure, and Fig. 6 (a) is the figure during from the rear side section of watching light source 2, and Fig. 6 (b) is the cutaway view of the section light source 2 when the A-A cutting plane of Fig. 6 (a) is watched.
As shown in these figures, this section light source 2 possesses the photodiode 26 as light amount detection unit in the centre position of light guide section 24, and these photodiodes 26 detect from the mixed light of the light of each LED 23 radiation.
Fig. 7 is the figure of the structure of the section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 6, and Fig. 7 (a) is the figure during from the rear side section of watching light source 2, and Fig. 7 (b) is the cutaway view of section light source 2 when the A-A cutting plane of Fig. 7 (a) is watched.
As shown in these figures, this section light source 2 also possesses the photodiode 26 as light amount detection unit in the centre position of light guide section 24, and these photodiodes 26 detect from the mixed light of the light of each LED 23 radiation.
Fig. 8 is the figure of the structure of section light source 2 of expression with structure different with the section light source 2 that is illustrated in Fig. 2 to Fig. 7.The cutaway view of Fig. 8 (a) section of being light source 2, Fig. 8 (b) be from the A-A cutting plane of Fig. 8 (a) watched the section light source 2 cutaway view.
As shown in these figures, in this section light source 2, each LED 23 is molded to light transmission lenticular body 27, light transmission lenticular body 27 has the function that the light that will radiate from LED 23 for example radiates as directional light, for example utilize integral lens (integrator lens) 28 (281,282) to mix and penetrate from the light that light transmission lenticular body 27 radiated by the light emergence face 2821 of light guide section 24.That is, in this section light source 2, light transmission lenticular body 27 and integral lens 28 possess mixing from the light of LED 23 and be used for the function of leaded light to light emergence face 2821.In this embodiment, be configured to photodiode 23 and for example be configured on the substrate 21, but the reverberation that detection boundaries reflects on the outgoing plane 271 of light transmission lenticular body 27.In addition, even be provided with under the situation of light transmission lenticular body 27, the configuration pattern of photodiode 26 also can adopt as Fig. 4 to pattern shown in Figure 7.
As mentioned above, section light source 2 as Fig. 1 be to shown in Figure 8, and mixing guides to the light guide section 24 of irradiation area 6 from the light of a plurality of LED 23 structure can make suitable structure.And the number of the LED 23 in section light source 2 also is not limited to five situation, can for example, as Fig. 9 or shown in Figure 10, also can be the section light source 2 that possesses seven LED 23 for more than five also, also can be other situations.
Figure 11 is the stereogram of structure of the light source cell group 3 of expression alignment arrangements a plurality of sections light sources 2.
As shown in the drawing, section light source 2 alignment arrangements are arranged a plurality of and a section light source 2 configuration is turned to one by the unit on the gripper shoe 8 that is formed with the lead (not shown) that can power respectively and fix, and formation light source cell group 3.On gripper shoe 8, be provided with the cooled plate 9 that forms water-cooled hole 91 overleaf, and dispose the power subsystem 10 that is connected in above-mentioned lead at its back portion.The size of this light source cell group 3 (d * e), for example be about 1130mm * 510mm.
Figure 12 is the stereogram of structure of the light irradiation device 1 of the expression light source cell group 3 that possesses a plurality of Figure 11 of being illustrated in.
As shown in the drawing, and the size of the irradiated area of this light irradiation device 1 (f * g) for for example in the G8 of base plate of liquid crystal panel substrate, forming the large tracts of land of about 2200mm * 2500mm.In this light irradiation device 1, each light source cell group 3 can be loaded and unloaded replacing, by the replaceable light source cell group 3 of the degradation of LED 23, thus, can constitute the flat light source that always has uniform illumination in light irradiation device 1.In this embodiment, light source cell group 3 is configured to Unit 5 * 2, i.e. 10 unit altogether.
Then, the situation that light irradiation device of the present invention is applied to the stickup of base plate of liquid crystal panel is described.
Figure 13 (a), Figure 13 (b) are the vertical views of the different workpiece (base plate of liquid crystal panel) of the application pattern of each sealant, and Figure 13 (c) is the cutaway view of the workpiece (base plate of liquid crystal panel) watched from the A-A cutting plane of Figure 13 (a).
As shown in these figures, in the purposes of the stickup of base plate of liquid crystal panel, workpiece (base plate of liquid crystal panel) 5 is sizes (picture frame) corresponding to liquid crystal panel and coat two pieces of glass substrates 12 of unhardened sealant 11.In workpiece 5, needing light-struck position only is the part of sealant 11.In order in such use, to produce liquid crystal image efficiently, even the inch number of the liquid crystal image that forms in the glass substrate of same size 12 or its configuration pattern also are of all kinds, even and in identical line (induction system), at the area of application of the sealant 11 of each workpiece, be that the change that the zone is penetrated in illumination also is common.When each section light source is not had the switch of switched conductive/disconnection control part, because only to the part irradiates light of sealant 11, need carry out shading with cover so light the light source of whole area, and because the zone beyond the sealant 11 also has electric power to connect in the section light source, so power attenuation is very big.To this, as the present invention, at every section setting conducting/disconnection control part 7 as shown in Figure 1, by selecting to light a lamp or turn off the light with change-over switch, select irradiation area to light a lamp to each workpiece 5,, can alleviate power attenuation thus not needing the light-off of light-struck zone and being used.And, need cover when being lighted in whole zone, but according to the present invention,, thereby can not need cover itself because by only the part of sealant 11 being lighted and can be carried out illumination and penetrate, can reduce production costs.On purposes relevant for this sclerosis (curing), for the sealant 11 that hardens fully, need a certain amount of above illumination to penetrate, the situation of illumination deficiency can not take place.Therefore, the light that is undertaken by photodiode 26 detects, and monitors light quantity, changes LED or section light source as required, or carries out FEEDBACK CONTROL, and it is bad to reduce sclerosis thus, can improve reliability.
Then, the situation that light irradiation device of the present invention is applied to exposure device is described.
Figure 14 (a) is the vertical view of the structure of the different workpiece 5 of expression substrate size or cover size to Figure 14 (c).
As shown in the drawing, for example in the zone of the plate-making exposure that screen printing is used, according to substrate size (version size) difference of the employed workpiece 5 of purposes.Substrate size is until the wide size till the size of the 3300mm * 3700mm large item from the size of general 320mm * 320mm.And, in substrate, dispose the screen mask (screen mask) 13 that the pattern of distribution of being used in actual product etc. is described, but screen mask 13 is from adopting one, until a plurality of screen masks 13 are arranged in that being called as on the substrate adopts till the multiaspect by extensive practicability.In the trend of nearest a small amount of many kinds, the manufacture method of this employing multiaspect is extensively popularized.In the mode that adopts multiaspect, as shown in the drawing, a plurality of screen masks 13 are arranged across certain intervals each other with adjacent screen mask 13 on the employed substrate of reality.In this case, needing exposed areas only is the part of screen mask 13, and does not need irradiates light at the gap portion that does not dispose screen mask 13.In light irradiation device of the present invention, as shown in Figure 1, in each section, on conducting/disconnection control part 71, pass through the control change-over switch, under the situation of exposure according to the substrate of penetrating regional size that also will be little, or exposure is adopted under any situation under the situation of the maximum sized substrate that multiaspect uses, the section light source 2 of the exposed portion (cover part) corresponding to handled substrate is lighted, then turn off the light and use for other, thus, irradiates light and, can carry out luminous processing lavishly not corresponding to workpiece 5 miscellaneous.Like this, on the exposure purposes of substrate, the section by specify needs to light according to the size of substrate size or employed screen mask 13 thus, can reduce power attenuation significantly.In addition, on the exposure purposes, from being reduced in the viewpoint of the deviation between a plurality of goods, the uniformity of light quantity is very important.So, further monitor light quantity, change LED or section light source as required, or carry out FEEDBACK CONTROL, can reduce badly thus, and can improve reliability.

Claims (5)

1. light irradiation device, possesses light source portion, this light source portion disposes the LED of the light of a plurality of radiation ultraviolet regions on same one side, this light irradiation device will shine from the ejaculation light of this light source portion pair and the above-mentioned irradiation area that is in relative position with one side, this light irradiation device is characterised in that
Above-mentioned light source portion constitutes the section light source by a plurality of LED and the light guide section that is disposed on the same substrate, this section light source alignment arrangements on the direction that aforesaid substrate extends is a plurality of and constitute, certain-length till above-mentioned light guide section has from above-mentioned one side together to light emergence face, mixing is from the ejaculation light of the LED that is positioned at this section light source, and can not light shine the light emergence face of other section light source.
2. light irradiation device as claimed in claim 1 is characterized in that,
Above-mentioned section light source can carry out the switching of conducting/disconnection to each of each section light source.
3. light irradiation device as claimed in claim 1 or 2 is characterized in that,
Above-mentioned section light source can be respectively carries out electric power control to each of each section light source.
4. as each described light irradiation device of claim 1~3, it is characterized in that,
Above-mentioned section light source possesses light amount detection unit.
5. light irradiation device as claimed in claim 4 is characterized in that,
This light irradiation device possesses feedback control unit, and this feedback control unit is by utilizing the detected light quantity of above-mentioned light amount detection unit, is that the mode of predefined light quantity is controlled with this section light source.
CN201010128372A 2009-03-03 2010-03-03 Light irradiation device Pending CN101825237A (en)

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KR20100099651A (en) 2010-09-13
TWI464497B (en) 2014-12-11

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Application publication date: 20100908