CN101824648B - Error processing system of automatic photoelectric crystal furnace and method thereof - Google Patents

Error processing system of automatic photoelectric crystal furnace and method thereof Download PDF

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Publication number
CN101824648B
CN101824648B CN 201010162295 CN201010162295A CN101824648B CN 101824648 B CN101824648 B CN 101824648B CN 201010162295 CN201010162295 CN 201010162295 CN 201010162295 A CN201010162295 A CN 201010162295A CN 101824648 B CN101824648 B CN 101824648B
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module
crystal
hardware
software
crystal furnace
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CN101824648A (en
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王彪
李一伦
周子凡
朱允中
林少鹏
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Sun Yat Sen University
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Sun Yat Sen University
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Abstract

The invention relates to an error processing system of an automatic photoelectric crystal furnace, which is used for error information processing on a hardware module and a software module of the crystal furnace. The error processing system comprises a detection module, a judging module, a prompting module and a storage module, wherein the detection module is used for scanning the hardware module and the software module in set time, the judging module is used for judging whether the data scanned by the detection module exceeds a safe range or not, the prompting module is used for determining the hardware module information exceeding the safety range and sending the prompting information, the storage module is used for carrying out data backup when the software module is under a collapse state, and the detection module is connected with the prompting module and the storage module through the judging module. The invention can effectively ensure that the crystal furnace to be in a normal working state, and the occurrence of safety accidents can be avoided. At the same time, the invention also discloses an error processing method of the automatic photoelectric crystal furnace.

Description

The error processing system of automatic photoelectric crystal furnace and method thereof
Technical field
The present invention relates to a kind of error processing system and method thereof of automatic photoelectric crystal furnace.
Background technology
Artificial lens plays more and more important effect in science and technology and field of industrial production, and the Preparation equipment of artificial lens and technology of preparing become the important bottleneck that restricts artificial lens output and quality.State-of-the-art artificial lens technology of preparing rests in developed country's hands such as the U.S., Germany, and corresponding automation degree of equipment is high, is easy to realize batch production.But its fancy price makes domestic enterprise and scientific research institutions hang back.Domestic have minority enterprise also can provide the artificial lens Preparation equipment, but it is low often to exist level of automation, too relies on operator's experience, the problem such as yield rate is low in the batch production.
The time that the crystal preparation needs is longer, complicated operation, and the centre tends to occur various mistakes.These mistakes had both comprised the mal-operation that occurs in the manual operation, had also comprised the system mistake that the crystal furnace software and hardware occurs owing to long-play.Owing in the crystal Preparation equipment in the past, do not have the error detection mechanism of automatization, wrong location and eliminating often need operator individual dependence experience to judge.These mistakes tend to cause crystal mass to descend, and severe patient also security incident may occur.How to check timely these error messages, and notify at once to the operator, become the bottleneck that crystal preparing technology further develops.
Summary of the invention
The object of the invention is to overcome deficiency of the prior art, provide a kind of energy effective guarantee crystal furnace to be in the error processing system of the automatic photoelectric crystal furnace of normal operating conditions.
In addition, the present invention also provides a kind of error handling method of automatic photoelectric crystal furnace.
For achieving the above object, technical scheme of the present invention is: a kind of error processing system of automatic photoelectric crystal furnace, being used for the hardware module of crystal furnace and the error message of software module processes, it comprises the detection module for timing scan hardware module and software module, judge whether data that detection module scans exceed the judge module of a safety range and determine to exceed the hardware module information of safety range and send the reminding module of information and the memory module of carrying out data backup when software module is absorbed in the collapse state, wherein, this detection module is connected with reminding module and memory module respectively by judge module.
This hardware module comprise the crystal of contactless intermediate frequency coil that body of heater is heated and intermediate frequency power supply, control crystal pull rate lift the Crystal Rotation module of module, control Crystal Rotation speed, be used for crystal weight in the weighing body of heater electronic scales, be used for the control furnace body temperature the temperature controller module, be used for motor control module that the control crystal lifts module and Crystal Rotation module, be used for measuring the displacement sensing module that lifts height and pull rate.
The data that detect comprise that crystal lifts pull rate and direction of motion, the rotating speed of Crystal Rotation module and temperature, the power of contactless intermediate frequency coil of module.
This detection module comprises the casing temperature detecting module, and it when temperature surpasses a certain limit, then can send instruction, by force powered-down for detection of the temperature of casing.
This system also comprises the GPRS module, by network of communication, error message is reported to remote operator.
This system also comprises data logging and read module, and each error message data writing that detection module is found records and read module.
The present invention also provides a kind of error handling method of automatic photoelectric crystal furnace, is used for the hardware module of crystal furnace and the error message of software module and processes, and it may further comprise the steps,
Whether a, system are by each hardware module of detection module timing scan and software module, working properly to check hardware module and software module;
B, inquire about the information of hardware module and software module each time, all can check hardware information and software module by judge module, whether the data that inquire by observation exceed safety range, judge whether it is working properly;
C, when mistake appears in the system hardware module, then send prompting to the operator immediately by reminding module, require the operator to get rid of; When system judges that software module is absorbed in the collapse state, then by memory module software data is backed up.
Compared with prior art, the present invention possesses following advantage,
The present invention is by the quantitative check of error processing system to hardware, and by the connection of quantitative check hardware, signal intelligence and parameter area can judge effectively whether each hardware module is working properly.Simultaneously, whether the parameter of computer software quantitative check self guarantees parameter in certain scope, working properly to judge software.
The present invention is by the important parameter in the timed backup software, the working order of having preserved computer program.In case the running software collapse then can recover rapidly, can not produce great effect to the crystal preparation.
The present invention has also designed the casing temperature detecting module, can guarantee that the casing temperature in safety range, avoided the generation of security incident.
The present invention has also comprised data logging and read module, can in time record each found mistake, and handled easily the person safeguard equipment.
Description of drawings
Fig. 1 is the functional block diagram of the error processing system of automatic photoelectric crystal furnace.
Embodiment
The present invention is based on automatic photoelectric crystal furnace, proposed processing and the recording mechanism of software and hardware mistake.Of the present invention auxiliary lower, photoelectric crystal furnace has possessed the function that detects self working order, can report the mistake that occurs in the operational process.
For the crystal person of preparation, the security that the present invention can Effective Raise crystal preparation process improves the crystal yield rate.For the crystal device designer, the present invention can effectively help the planner that equipment is debugged, and constantly finds out the defective in the software and hardware, designs more safe and reliable crystal Preparation equipment.
The present invention is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1, the invention discloses a kind of error processing system of automatic photoelectric crystal furnace, being used for the hardware module of crystal furnace and the error message of software module processes, it comprises the detection module for timing scan hardware module and software module, judge whether data that detection module scans exceed the judge module of a safety range and determine to exceed the hardware module information of safety range and send the reminding module of information and the memory module of carrying out data backup when software module is absorbed in the collapse state, wherein, this detection module is connected with reminding module and memory module respectively by judge module.
This hardware module comprise the crystal of contactless intermediate frequency coil that body of heater is heated and intermediate frequency power supply, control crystal pull rate lift the Crystal Rotation module of module, control Crystal Rotation speed, be used for crystal weight in the weighing body of heater electronic scales, be used for the control furnace body temperature the temperature controller module, be used for motor control module that the control crystal lifts module and Crystal Rotation module, be used for measuring the displacement sensing module that lifts height and pull rate.
The data that detect comprise that crystal lifts pull rate and direction of motion, the rotating speed of Crystal Rotation module and temperature, the power of contactless intermediate frequency coil of module.
This detection module comprises the casing temperature detecting module, and it when temperature surpasses a certain limit, then can send instruction for detection of the temperature of casing, and powered-down is avoided the generation of security incident by force.
This system also comprises the GPRS module, can pass through mobile communications network, and error message is reported to remote operator.So, the operator needn't in the scene, also can in time recognize the erroneous condition of equipment.
This system also comprises data logging and read module, and with each error message data writing record and read module that detection module is found, this has just made things convenient for instrument development and maintenance, helps to promote stability and the security of crystal furnace equipment.
A kind of error handling method of automatic photoelectric crystal furnace is used for the hardware module of crystal furnace and the error message of software module and processes, and it may further comprise the steps,
Whether a, system are by each hardware module of detection module timing scan and software module, working properly to check hardware module and software module;
B, inquire about the information of hardware module and software module each time, all can check hardware information and software module by judge module, whether the data that inquire by observation exceed safety range, judge whether it is working properly;
C, when mistake appears in the system hardware module, then send prompting to the operator immediately by reminding module, require the operator to get rid of; When system judges that software module is absorbed in the collapse state, then by memory module software data is backed up, then again after the restart routine, can reply immediately data, so that the crystal growth operation is proceeded.
Error processing system can send the data query order to each hardware module whenever at regular intervals, inquires about the working order of each hardware module.If inquire about unsuccessfully, then the connection error of communication interface has occured in explanation.If communicate by letter successfully, then can detect the data that this hardware module is returned, and judge whether these data are in normal scope.In case program finds have data to exceed safety range, judges that then mistake has occured this hardware module.In case computer program has been found hardware error, then can be presented at immediately on the screen, wait for that the operator processes.
Among the present invention, each hardware module possesses the ability of debug.If hardware module finds, the communication between self and the system is in error condition for a long time, communication function that then can this hardware module of autoboot, and continue the order that waiting system is sent.
Simultaneously, each important parameter that computer program also can trace routine inside sees whether exceeded normal range.If overrun can be sent same error reporting.
The crystal preparation needs very high temperature, so crystal furnace generally all comprises large power supply.So for the crystal preparation flow, the most serious fault is exactly to make a mistake with heating, hardware that water-cooled is relevant, causes excess Temperature, and then causes the disasters such as fire.For head it off, the present invention has designed the casing temperature detecting module.This module is used infrared temperature sensor, with cordless the crystal furnace casing is carried out thermometric, at set intervals the result of thermometric is flowed to system.If single crystal growing furnace is working properly, under circulating water, then the temperature of casing can be above 100 degrees centigrade.In case infrared temperature sensor finds that the casing temperature surpasses 100 degrees centigrade, then excess Temperature can be judged by system, thereby powered-down is by force avoided the generation of security incident.
The present invention has also comprised data recording function.For each mistake that software module is found, program can be recorded into database to these error messages, and show in some way according to certain form, and handled easily the person check.The crystal furnace device designer can be improved the module of software and hardware of crystal furnace for these error loggings, makes it more stable work.
The present invention has also comprised remote communicating function, can not at the scene the situation, notify the error message of system discovery to the operator at once the operator.This module has mainly comprised a GPRS module, and this module can be passed through mobile communications network, sends SMS message to the mobile phone of an appointment.Program in the main frame can with the error message write into Databasce, also can with this error message, send to the operator by the GPRS module on the one hand on the other hand after finding error message.Like this, no matter whether the operator is in the scene, can in time understand the operation conditions of crystal furnace.

Claims (5)

1. the error processing system of an automatic photoelectric crystal furnace, being used for the hardware module of crystal furnace and the error message of software module processes, it is characterized in that, comprise the detection module for timing scan hardware module and software module, judge whether data that detection module scans exceed the judge module of a safety range and determine to exceed the hardware module information of safety range and send the reminding module of information and the memory module of carrying out data backup when software module is absorbed in the collapse state, wherein, this detection module is connected with reminding module and memory module respectively by judge module;
This hardware module comprise the crystal of contactless intermediate frequency coil that body of heater is heated and intermediate frequency power supply, control crystal pull rate lift the Crystal Rotation module of module, control Crystal Rotation speed, be used for crystal weight in the weighing body of heater electronic scales, be used for the control furnace body temperature the temperature controller module, be used for motor control module that the control crystal lifts module and Crystal Rotation module, be used for measuring the displacement sensing module that lifts height and pull rate;
The data that detect comprise that crystal lifts pull rate and direction of motion, the rotating speed of Crystal Rotation module and temperature, the power of contactless intermediate frequency coil of module.
2. the error processing system of automatic photoelectric crystal furnace according to claim 1 is characterized in that, this detection module comprises the casing temperature detecting module, it is for detection of the temperature of casing, when temperature surpasses a certain limit, then can send instruction, by force powered-down.
3. the error processing system of automatic photoelectric crystal furnace according to claim 1 is characterized in that, this system also comprises the GPRS module, by network of communication, error message is reported to remote operator.
4. the error processing system of automatic photoelectric crystal furnace according to claim 1 is characterized in that, this system also comprises data logging and read module, and each error message data writing that detection module is found records and read module.
5. the error handling method of an automatic photoelectric crystal furnace is used for the hardware module of crystal furnace and the error message of software module and processes, and it is characterized in that, may further comprise the steps,
Whether a, system are by each hardware module of detection module timing scan and software module, working properly to check hardware module and software module;
B, inquire about the information of hardware module and software module each time, all can check hardware information and software module by judge module, whether the data that inquire by observation exceed safety range, judge whether it is working properly;
C, when mistake appears in the system hardware module, then send prompting to the operator immediately by reminding module, require the operator to get rid of; When system judges that software module is absorbed in the collapse state, then by memory module software data is backed up.
CN 201010162295 2010-04-27 2010-04-27 Error processing system of automatic photoelectric crystal furnace and method thereof Expired - Fee Related CN101824648B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105568369B (en) * 2016-01-26 2018-10-30 中山大学 A kind of lower crystal method for method of crystal growth by crystal pulling and automatic lower brilliant equipment
CN117568940A (en) * 2024-01-17 2024-02-20 天津伍嘉联创科技发展股份有限公司 Continuous production method and system for crystals

Citations (4)

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Publication number Priority date Publication date Assignee Title
US5886737A (en) * 1996-12-11 1999-03-23 Komatsu Electronic Metals Co., Ltd. Method for detecting the optimal melt temperature in the single-crystal semiconductor manufacturing process and apparatus thereof
CN1510176A (en) * 2002-12-20 2004-07-07 北京有色金属研究总院 Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof
CN200952048Y (en) * 2006-07-25 2007-09-26 嘉兴学院 Program control crystal growing device
CN201301357Y (en) * 2008-10-30 2009-09-02 上虞晶盛机电工程有限公司 Automatic detection device for welding state of crystal and molten silicon liquid surface in straight pulling type single crystal furnace

Family Cites Families (1)

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Publication number Priority date Publication date Assignee Title
JP3655355B2 (en) * 1995-05-02 2005-06-02 コマツ電子金属株式会社 Method for detecting optimum melt temperature in semiconductor single crystal manufacturing process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5886737A (en) * 1996-12-11 1999-03-23 Komatsu Electronic Metals Co., Ltd. Method for detecting the optimal melt temperature in the single-crystal semiconductor manufacturing process and apparatus thereof
CN1510176A (en) * 2002-12-20 2004-07-07 北京有色金属研究总院 Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof
CN200952048Y (en) * 2006-07-25 2007-09-26 嘉兴学院 Program control crystal growing device
CN201301357Y (en) * 2008-10-30 2009-09-02 上虞晶盛机电工程有限公司 Automatic detection device for welding state of crystal and molten silicon liquid surface in straight pulling type single crystal furnace

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