CN101824648A - Error processing system of automatic photoelectric crystal furnace and method thereof - Google Patents
Error processing system of automatic photoelectric crystal furnace and method thereof Download PDFInfo
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- CN101824648A CN101824648A CN201010162295A CN201010162295A CN101824648A CN 101824648 A CN101824648 A CN 101824648A CN 201010162295 A CN201010162295 A CN 201010162295A CN 201010162295 A CN201010162295 A CN 201010162295A CN 101824648 A CN101824648 A CN 101824648A
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- 239000013078 crystal Substances 0.000 title claims abstract description 78
- 238000012545 processing Methods 0.000 title claims abstract description 18
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- 238000001514 detection method Methods 0.000 claims abstract description 23
- 238000004891 communication Methods 0.000 claims description 5
- 230000036760 body temperature Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 230000010365 information processing Effects 0.000 abstract 1
- 238000003672 processing method Methods 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 238000004590 computer program Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Abstract
The invention relates to an error processing system of an automatic photoelectric crystal furnace, which is used for error information processing on a hardware module and a software module of the crystal furnace. The error processing system comprises a detection module, a judging module, a prompting module and a storage module, wherein the detection module is used for scanning the hardware module and the software module in set time, the judging module is used for judging whether the data scanned by the detection module exceeds a safe range or not, the prompting module is used for determining the hardware module information exceeding the safety range and sending the prompting information, the storage module is used for carrying out data backup when the software module is under a collapse state, and the detection module is connected with the prompting module and the storage module through the judging module. The invention can effectively ensure that the crystal furnace to be in a normal working state, and the occurrence of safety accidents can be avoided. At the same time, the invention also discloses an error processing method of the automatic photoelectric crystal furnace.
Description
Technical field
The present invention relates to a kind of error processing system and method thereof of automatic photoelectric crystal furnace.
Background technology
Artificial lens plays more and more important effect in science and technology and industrial production field, and the preparation equipment and the technology of preparing of artificial lens become the important bottleneck that restricts artificial lens output and quality.State-of-the-art artificial lens technology of preparing is grasped in developed country's hands such as the U.S., Germany, and corresponding apparatus level of automation height is easy to realize producing in batches.But its fancy price makes domestic enterprise and scientific research institutions hang back.Domestic have minority enterprise also can provide artificial lens to prepare equipment, but it is low often to exist level of automation, too relies on operator's experience, problem such as yield rate is low in the batch process.
The time that the crystal preparation needs is longer, complicated operation, and the centre tends to occur various mistakes.These mistakes had both comprised the mal-operation that takes place in the manual operation, had also comprised the system mistake that the crystal furnace software and hardware occurs owing to long-play.Because crystal in the past prepares in the equipment, does not have the error detection mechanism of automatization, so wrong location and eliminating often need operator individual dependence experience to judge.These mistakes tend to cause crystal mass to descend, and severe patient also security incident may take place.How to check these error messages timely, and notify at once, become the bottleneck that crystal preparing technology further develops to the operator.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, provide a kind of and can ensure effectively that crystal furnace is in the error processing system of the automatic photoelectric crystal furnace of normal operating conditions.
In addition, the present invention also provides a kind of error handling method of automatic photoelectric crystal furnace.
For achieving the above object, technical scheme of the present invention is: a kind of error processing system of automatic photoelectric crystal furnace, being used for the hardware module of crystal furnace and the error message of software module handles, it comprises the detection module that is used for timing scan hardware module and software module, judge whether data that detection module scans exceed the judge module of a safety range and determine to exceed the hardware module information of safety range and send the reminding module of information and the memory module of carrying out data backup when software module is absorbed in the collapse state, wherein, this detection module is connected with reminding module and memory module respectively by judge module.
This hardware module comprise the crystal of contactless intermediate frequency coil that body of heater is heated and intermediate frequency power supply, control crystal pull rate lift the crystal rotary module of module, control crystal speed of rotation, be used for crystal weight in the weighing body of heater electronic scales, be used to control furnace body temperature the temperature controller module, be used to control motor control module that crystal lifts module and crystal rotary module, be used to measure the displacement sensing module that lifts height and pull rate.
The data that detected comprise that crystal lifts pull rate and direction of motion, the rotating speed of crystal rotary module and temperature, the power of contactless intermediate frequency coil of module.
This detection module comprises the casing temperature detecting module, and it is used to detect the temperature of casing, when temperature surpasses a certain limit, then can send instruction, powered-down by force.
This system also comprises the GPRS module, by network of communication, error message is reported to remote operator.
This system also comprises data logging and read module, and each error message that detection module is found writes data logging and read module.
The present invention also provides a kind of error handling method of automatic photoelectric crystal furnace, is used for the hardware module of crystal furnace and the error message of software module and handles, and it may further comprise the steps,
Whether a, system are by each hardware module of detection module timing scan and software module, working properly to check hardware module and software module;
B, inquire about the information of hardware module and software module each time, all can check hardware information and software module by judge module, whether the data that inquire by observation exceed safety range, judge whether it is working properly;
C, when mistake appears in the system hardware module, then send prompting to the operator immediately by reminding module, require the operator to get rid of; When system judges that software module is absorbed in the collapse state, then software data is backed up by memory module.
Compared with prior art, the present invention possesses following advantage,
The present invention is by the quantitative check of error processing system to hardware, and by the connection of quantitative check hardware, signal intelligence and parameter area can judge effectively whether each hardware module is working properly.Simultaneously, whether the parameter of computer software quantitative check self guarantees parameter in certain scope, working properly to judge software.
The present invention is by the important parameter in the timed backup software, the working order of having preserved computer program.In case the running software collapse then can recover rapidly, can not produce great effect to the crystal preparation.
The present invention has also designed the casing temperature detecting module, can guarantee that the casing temperature in safety range, avoided the generation of security incident.
The present invention has also comprised data logging and read module, can in time write down each found mistake, and handled easily the person safeguard equipment.
Description of drawings
Fig. 1 is the functional block diagram of the error processing system of automatic photoelectric crystal furnace.
Embodiment
The present invention is based on automatic photoelectric crystal furnace, proposed the processing and the recording mechanism of software and hardware mistake.Of the present invention auxiliary down, photoelectric crystal furnace has possessed the function that detects self working order, can report the mistake that takes place in the operational process.
For the crystal person of preparation, the present invention can effectively improve the security of crystal preparation process, improves the crystal yield rate.For the crystal device designer, the present invention can effectively help the planner that equipment is debugged, and constantly finds out the defective in the software and hardware, designs more safe and reliable crystal and prepares equipment.
The present invention is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1, the invention discloses a kind of error processing system of automatic photoelectric crystal furnace, being used for the hardware module of crystal furnace and the error message of software module handles, it comprises the detection module that is used for timing scan hardware module and software module, judge whether data that detection module scans exceed the judge module of a safety range and determine to exceed the hardware module information of safety range and send the reminding module of information and the memory module of carrying out data backup when software module is absorbed in the collapse state, wherein, this detection module is connected with reminding module and memory module respectively by judge module.
This hardware module comprise the crystal of contactless intermediate frequency coil that body of heater is heated and intermediate frequency power supply, control crystal pull rate lift the crystal rotary module of module, control crystal speed of rotation, be used for crystal weight in the weighing body of heater electronic scales, be used to control furnace body temperature the temperature controller module, be used to control motor control module that crystal lifts module and crystal rotary module, be used to measure the displacement sensing module that lifts height and pull rate.
The data that detected comprise that crystal lifts pull rate and direction of motion, the rotating speed of crystal rotary module and temperature, the power of contactless intermediate frequency coil of module.
This detection module comprises the casing temperature detecting module, and it is used to detect the temperature of casing, when temperature surpasses a certain limit, then can send instruction, and powered-down is avoided the generation of security incident by force.
This system also comprises the GPRS module, can pass through mobile communications network, and error message is reported to remote operator.So, the operator needn't also can in time recognize the erroneous condition of equipment in the scene.
This system also comprises data logging and read module, and each error message that detection module is found writes data logging and read module, and this has just made things convenient for instrument development and maintenance, helps to promote the stability and the security of crystal furnace equipment.
A kind of error handling method of automatic photoelectric crystal furnace is used for the hardware module of crystal furnace and the error message of software module and handles, and it may further comprise the steps,
Whether a, system are by each hardware module of detection module timing scan and software module, working properly to check hardware module and software module;
B, inquire about the information of hardware module and software module each time, all can check hardware information and software module by judge module, whether the data that inquire by observation exceed safety range, judge whether it is working properly;
C, when mistake appears in the system hardware module, then send prompting to the operator immediately by reminding module, require the operator to get rid of; When system judges that software module is absorbed in the collapse state, then software data is backed up by memory module, then again after the restart routine, can reply data immediately, make the crystal growth operation proceed.
Error processing system can send the data query order to each hardware module every the regular hour, inquires about the working order of each hardware module.If the inquiry failure, then the connection error of communication interface has taken place in explanation.If communicate by letter successfully, then can detect the data that this hardware module is returned, and judge whether these data are in normal scope.In case program finds have data to exceed safety range, judges that then mistake has taken place this hardware module.In case computer program has been found hardware error, then can be presented at immediately on the screen, wait for that the operator handles.
Among the present invention, each hardware module all possesses the ability of debug.If hardware module finds, the communication between self and the system is in error condition for a long time, then can restart the communication function of this hardware module automatically, and continue the order that waiting system is sent.
Simultaneously, each important parameter that computer program also can trace routine inside sees whether exceeded normal range.If overrun can be sent same error reporting.
The crystal preparation needs very high temperature, so crystal furnace generally all comprises large power supply.So for the crystal preparation flow, the most serious fault is exactly to make a mistake with heating, hardware that water-cooled is relevant, causes temperature too high, and then causes disasters such as fire.For head it off, the present invention has designed the casing temperature detecting module.This module is used infrared temperature sensor, in the noncontact mode crystal furnace casing is carried out thermometric, at set intervals thermometric result is flowed to system.If single crystal growing furnace is working properly, under the recirculated water cooling, then the temperature of casing can be above 100 degrees centigrade.In case infrared temperature sensor finds that the casing temperature surpasses 100 degrees centigrade, then system can judge that temperature is too high, thereby powered-down is by force avoided the generation of security incident.
The present invention has also comprised data recording function.For each mistake that software module is found, program can be recorded into database to these error messages, and show in some way according to certain form, and handled easily the person check.The crystal furnace device designer can be improved the module of software and hardware of crystal furnace at these error loggings, makes it more stable work.
The present invention has also comprised remote communicating function, can not under at the scene the situation, notify the error message of system discovery to the operator at once the operator.This module has mainly comprised a GPRS module, and this module can be passed through mobile communications network, sends SMS message to a specified mobile phone.Program in the main frame can write database with error message on the one hand after finding error message, also this error message can be sent to the operator by the GPRS module on the other hand.Like this, no matter whether the operator is in the scene, can in time understand the operation conditions of crystal furnace.
Claims (7)
1. the error processing system of an automatic photoelectric crystal furnace, being used for the hardware module of crystal furnace and the error message of software module handles, it is characterized in that, comprise the detection module that is used for timing scan hardware module and software module, judge whether data that detection module scans exceed the judge module of a safety range and determine to exceed the hardware module information of safety range and send the reminding module of information and the memory module of carrying out data backup when software module is absorbed in the collapse state, wherein, this detection module is connected with reminding module and memory module respectively by judge module.
2. the error processing system of automatic photoelectric crystal furnace according to claim 1, it is characterized in that, this hardware module comprise the crystal of contactless intermediate frequency coil that body of heater is heated and intermediate frequency power supply, control crystal pull rate lift the crystal rotary module of module, control crystal speed of rotation, be used for crystal weight in the weighing body of heater electronic scales, be used to control furnace body temperature the temperature controller module, be used to control motor control module that crystal lifts module and crystal rotary module, be used to measure the displacement sensing module that lifts height and pull rate.
3. the error processing system of automatic photoelectric crystal furnace according to claim 2, it is characterized in that the data that detected comprise that crystal lifts pull rate and direction of motion, the rotating speed of crystal rotary module and temperature, the power of contactless intermediate frequency coil of module.
4. the error processing system of automatic photoelectric crystal furnace according to claim 1 is characterized in that, this detection module comprises the casing temperature detecting module, it is used to detect the temperature of casing, when temperature surpasses a certain limit, then can send instruction, powered-down by force.
5. the error processing system of automatic photoelectric crystal furnace according to claim 1 is characterized in that, this system also comprises the GPRS module, by network of communication, error message is reported to remote operator.
6. the error processing system of automatic photoelectric crystal furnace according to claim 1 is characterized in that, this system also comprises data logging and read module, and each error message that detection module is found writes data logging and read module.
7. the error handling method of an automatic photoelectric crystal furnace is used for the hardware module of crystal furnace and the error message of software module and handles, and it is characterized in that, may further comprise the steps,
Whether a, system are by each hardware module of detection module timing scan and software module, working properly to check hardware module and software module;
B, inquire about the information of hardware module and software module each time, all can check hardware information and software module by judge module, whether the data that inquire by observation exceed safety range, judge whether it is working properly;
C, when mistake appears in the system hardware module, then send prompting to the operator immediately by reminding module, require the operator to get rid of; When system judges that software module is absorbed in the collapse state, then software data is backed up by memory module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201010162295 CN101824648B (en) | 2010-04-27 | 2010-04-27 | Error processing system of automatic photoelectric crystal furnace and method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010162295 CN101824648B (en) | 2010-04-27 | 2010-04-27 | Error processing system of automatic photoelectric crystal furnace and method thereof |
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| CN101824648A true CN101824648A (en) | 2010-09-08 |
| CN101824648B CN101824648B (en) | 2013-01-16 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568369A (en) * | 2016-01-26 | 2016-05-11 | 中山大学 | Crystal feeding method for Czochralski method crystal growth and automatic crystal feeding equipment |
| CN117568940A (en) * | 2024-01-17 | 2024-02-20 | 天津伍嘉联创科技发展股份有限公司 | Continuous production method and system for crystals |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08301689A (en) * | 1995-05-02 | 1996-11-19 | Komatsu Electron Metals Co Ltd | Detection of optimum melting liquid temperature in production process of semiconductor single crystal |
| US5886737A (en) * | 1996-12-11 | 1999-03-23 | Komatsu Electronic Metals Co., Ltd. | Method for detecting the optimal melt temperature in the single-crystal semiconductor manufacturing process and apparatus thereof |
| CN1510176A (en) * | 2002-12-20 | 2004-07-07 | 北京有色金属研究总院 | Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof |
| CN200952048Y (en) * | 2006-07-25 | 2007-09-26 | 嘉兴学院 | Program control crystal growing device |
| CN201301357Y (en) * | 2008-10-30 | 2009-09-02 | 上虞晶盛机电工程有限公司 | Automatic detection device for heat-sealing state between crystal and molten silicon liquid-level in straight pull-type mono-crystal furnace |
-
2010
- 2010-04-27 CN CN 201010162295 patent/CN101824648B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08301689A (en) * | 1995-05-02 | 1996-11-19 | Komatsu Electron Metals Co Ltd | Detection of optimum melting liquid temperature in production process of semiconductor single crystal |
| US5886737A (en) * | 1996-12-11 | 1999-03-23 | Komatsu Electronic Metals Co., Ltd. | Method for detecting the optimal melt temperature in the single-crystal semiconductor manufacturing process and apparatus thereof |
| CN1510176A (en) * | 2002-12-20 | 2004-07-07 | 北京有色金属研究总院 | Single crystal growing furnace three-dimensional thermal field distributing automatic testing system and method thereof |
| CN200952048Y (en) * | 2006-07-25 | 2007-09-26 | 嘉兴学院 | Program control crystal growing device |
| CN201301357Y (en) * | 2008-10-30 | 2009-09-02 | 上虞晶盛机电工程有限公司 | Automatic detection device for heat-sealing state between crystal and molten silicon liquid-level in straight pull-type mono-crystal furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568369A (en) * | 2016-01-26 | 2016-05-11 | 中山大学 | Crystal feeding method for Czochralski method crystal growth and automatic crystal feeding equipment |
| CN105568369B (en) * | 2016-01-26 | 2018-10-30 | 中山大学 | A kind of lower crystal method for method of crystal growth by crystal pulling and automatic lower brilliant equipment |
| CN117568940A (en) * | 2024-01-17 | 2024-02-20 | 天津伍嘉联创科技发展股份有限公司 | Continuous production method and system for crystals |
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