CN101809729B - Direction change device and levitation transportation system including direction change device - Google Patents

Direction change device and levitation transportation system including direction change device Download PDF

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Publication number
CN101809729B
CN101809729B CN2008801001663A CN200880100166A CN101809729B CN 101809729 B CN101809729 B CN 101809729B CN 2008801001663 A CN2008801001663 A CN 2008801001663A CN 200880100166 A CN200880100166 A CN 200880100166A CN 101809729 B CN101809729 B CN 101809729B
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levitation
conveying device
drivingly
roller
height
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CN101809729A (en
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平田贤辅
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IHI Corp
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IHI Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

A levitation conveyance system has a first levitation transportation device for transporting an object in a first direction while levitating the object by fluid, a second levitation transportation device for transporting the object in a second direction while levitating the object, and a direction change device provided between the first levitation transportation device and the second levitation transportation device. The direction change device has a first transportation device constructed so as to transport the object in the first direction while being in contact with it, a second transportation device constructed so as to transport the object in the second direction while being in contact with it, a first levitation device having jet nozzles that are arranged along the first transportation device and jet the fluid in order to apply buoyant force to the object and controlling the levitation height of the object on the first transportation device between a first height at which the first transportation device is prevented from drivingly coming into contact with the object and a second height at which the first transportation device is permitted to drivingly come into contact with the object, and a second levitation device having jet nozzles that are arranged along the second transportation device and jet the fluid in order to apply buoyant force to the object and controlling, independent of the first levitation device, the levitation height of the object on the second transportation device between a first height at which the second transportation device is prevented from drivingly coming in contact with the object and a second height at which the second transportation device is permitted to drivingly come into contact with the object.

Description

Direction-changing device and have the levitation transportation system of direction-changing device
Technical field
The direction-changing device of conversion direction and have the levitation transportation system of direction-changing device when the present invention relates to be used to use fluid such as compressed air that object is suspended.
Background technology
In order to carry multiple floating carrier has been proposed as the thin material of glass substrate etc.These floating carriers are typically the levitation device that possesses the nozzle that fluids such as making air passes through.To the fluid generation pressure such as air that spray between levitation device and the object, object suspends by this pressure, and is subjected to the actuating force of conveying device and is transferred.
Above-mentioned floating carrier is suitable for linear fashion being necessary to set up direction-changing device to same direction object conveyor thing when the needs direction is changed in general.Disclose as lower device in Japan's patent disclosure communique 2005-75496 number: be provided for adjusting the supply gas shutter board of direction and be used as the unit, the combining and configuring by the different a plurality of unit of direction of will supplying gas realizes the direction conversion.
As above-mentioned direction-changing device in, therefore the direction of only coming the transforming object thing by the air of sending is difficult to control accurately its position and direction.
Summary of the invention
Deficiency in view of the above problems, the object of the present invention is to provide a kind of position of the thing of controlling object accurately and direction and converting objects object space to direction-changing device and have the levitation transportation system of such direction-changing device.
According to first scheme of the present invention, a kind of direction-changing device is provided, be used for object is suspended and changing the direction of this object by fluid.Described direction-changing device possesses: constitute first conveying device that contacts and described object is transported to first direction with described object; Constitute second conveying device that contacts and described object is transported to described second direction with described object; Has the squit hole that disposes and spray described fluid along described first conveying device for described object is applied buoyancy, between preventing first height that described first conveying device and described object contact drivingly and allowing described first conveying device and second height that described object contacts drivingly, first levitation device that the hoverheight of described object on described first conveying device controlled; And have along the configuration of described second conveying device and spray the squit hole of described fluid for described object is applied buoyancy, with first levitation device independently between preventing first height that described second conveying device and described object contact drivingly and allowing described second conveying device and second height that described object contacts drivingly, second levitation device that the hoverheight of described object on described second conveying device controlled.
Be preferably, described direction-changing device further has: first lowering or hoisting gear that constitutes described first levitation device of lifting controllably; And second lowering or hoisting gear that constitutes described second levitation device of lifting controllably.More preferably, described first conveying device and described second conveying device have respectively by any parts of selecting the group that constitutes from ultrasonic motor, roller, clamper and ribbon conveyer.
According to alternative plan of the present invention, levitation transportation system possesses: described object is suspended and be transported to first floating carrier of described first direction; Described object is suspended and be transported to second floating carrier of described second direction; And the described direction-changing device between described first floating carrier and described second floating carrier.
Description of drawings
Fig. 1 is the vertical view of expression according to the levitation transportation system of embodiment of the present invention.
Fig. 2 is the vertical view of the direction-changing device of the described levitation transportation system of expression.
Fig. 3 is the end view that expression is observed from the III-III line of Fig. 2.
Fig. 4 is the end view that expression is observed from the IV-IV line of Fig. 2.
Fig. 5 is the vertical view of first floating carrier in the described levitation transportation system of expression.
Fig. 6 is the vertical view of second floating carrier in the described levitation transportation system of expression.
Embodiment
Below in conjunction with accompanying drawing embodiment of the present invention is described.In the scope and accompanying drawing of this specification, technical scheme, the place ahead, rear, left and the right-hand direction that is defined as respectively in the accompanying drawings with F, A, L and R institute mark.These definition are only lifted for convenience of description, and the present invention is not limited thereto.
And in the following description, illustrated as an example employed in the manufacturing of liquid crystal indicator, as the conveying of the thin and plane object of glass substrate etc., but the present invention might not be defined in this.With regard to object, need not to be plane universally, as long as at least a portion of its lower surface is plane.For object is suspended, utilized the fluid of air for example etc.
As shown in Figure 1, levitation transportation system 1 has by fluid and object W is suspended and this object W is transported to first floating carrier 3 of first direction D1 (in the drawings vertically), object W is suspended and is transported to second floating carrier 5 and the direction-changing device 7 between first floating carrier 3 and second floating carrier 5 of second direction D2 (in Fig. 2 laterally).Direction-changing device 7 suspends object W and is transformed into second direction D2 from first direction D1.Though first direction D1 and second direction D2 quadrature in the drawings also can be non-orthogonal.
As Fig. 5 and shown in Figure 1, first floating carrier 3 has, the base station 9 that extends along first direction D1, form respectively near left end on the base station 9 and the right-hand member row as first conveying roller 11 of conveying device, on base station 9 and first direction D1 and therewith two directions of the direction of quadrature form a plurality of levitation devices 15 of row.
Each roller 11 is connected with motor 13A, 13B by the suitable transmission mechanism (unspecified among the figure) of rotating shaft, worm gear and worm screw etc. respectively.Thus, each roller 11 rotates with same rotational speed by the actuating force that is subjected to motor 13A, 13B.The upper end of each roller 11 is configured to compare with the upper surface of levitation device 15 and is projected into the top a little and aligns on single.Object W also can contact with roller 11 under the state that suspends, so that be activated power.
Motor 13A, 13B need not to be provided with a pair of, the structure that the suitable bindiny mechanism of the roller about also can being by chain etc. is connected with single motor.And, also can be to utilize other proper device of coming the object conveyor thing by contact, for example the conveying device of ultrasonic motor etc. replaces conveying roller.Perhaps utilize conveying mechanism, replace conveying roller by the clamper (clamper) that object can be controlled and driven or ribbon conveyer etc.
Levitation device 15 is fixed on the base station 9, has the squit hole 17 of the ring-type of rectangle respectively.Squit hole 17 is connected with not shown compressed air feedway, and accepts the supply of this compressed air feedway and spray compressed air.The compressed air that is sprayed is created on the space that between the upper surface of the lower surface of object W and levitation device 15 uniform pressure takes place, and object W is subjected to buoyancy and suspends thus.Perhaps, also can be suitable for ultrasonic levitation device or electrostatic suspension device etc., replace utilizing compressed-air actuated levitation device 15.
As Fig. 6 and shown in Figure 1, second floating carrier 5 has the structure identical with first floating carrier 3 except direction is different.That is, second floating carrier 5 have the base station 19 that extends along second direction D2, near left end on the base station 19 and the right-hand member second direction D2 form respectively row as second conveying roller 21 of conveying device, on base station 19 second direction D2 and therewith two directions of the direction of quadrature form a plurality of levitation devices 25 of row.
Each roller 21 is connected with motor 23A, 23B by the suitable transmission mechanism (not detailed icon) of rotating shaft, worm screw and worm gear combination etc. respectively.The upper end of each roller 21 is configured to compare with the upper surface of levitation device 25 and is projected into the top a little and aligns on single.Motor 23A, 23B need not to be provided with a pair of, also can be the structures that roller is connected with single motor.And, also can be to utilize the device that comes the object conveyor thing by contact, for example the conveying device of ultrasonic motor etc. replaces roller.Perhaps utilize conveying mechanism, replace roller by the clamper that object can be controlled and driven or ribbon conveyer etc.
Levitation device 25 is fixed on the base station 19, has the squit hole 27 of the ring-type of rectangle respectively.Squit hole 27 is connected with not shown compressed air feedway, and accepts the supply of this compressed air feedway and spray compressed air.The compressed air that is sprayed is created on the space that between the upper surface of the lower surface of object W and levitation device 25 uniform pressure takes place, and thus, object W is subjected to buoyancy by this and suspends.Perhaps, also can be to be suitable for ultrasonic levitation device or electrostatic suspension device same as described abovely, replace utilizing compressed-air actuated levitation device 25.
Squit hole 17,27 is preferably near the upper surface of levitation device 15,25 inner inclination to rectangle.Ring-type and provide the controlled of object W hoverheight by compressed-air actuated flow control to the squit hole 17,27 of inner inclination.Because big more should tendency obvious more along with tilting, and if can cause the making difficulty of levitation device 15,25 when excessive, therefore tilt to be preferably for example 45 °, but be not limited to this.
Squit hole 17,27 is not limited to the ring-type of rectangle, also can be the inaccessible shape of the part of oval-shaped ring-type or ring or with other different shapes of a plurality of through holes of the annular arrangement of rectangle etc.Be preferably, a plurality of levitation devices 15,25 are aligned to respectively between its upper surface and form single plane.This helps the stabilisation of object W hoverheight.
As Fig. 2 and shown in Figure 1, direction-changing device 7 has base station 29, accept roller 31 and outlet roller 35 as conveying device near the periphery on the base station 29.Accept roller 31 and form row at first direction D1, outlet roller 35 forms row at second direction D2.Accept roller 31 and be connected with motor 33A, 33B, when contacting, object W is transported to the substantial middle of the direction-changing device 7 of first direction D1 with the object W that is transported to from first floating carrier 3 by suitable transmission mechanism (not detailed icon).Outlet roller 35 is connected with motor 37A, 37B by suitable transmission mechanism (not detailed icon), when contacting with the object W of the substantial middle that is transported to direction-changing device 7, and second floating carrier 5 of the second direction D2 that object W is transported to.And, can utilize the device that comes object conveyor by contact, for example the conveying device of ultrasonic motor etc. replaces roller.Perhaps utilize conveying mechanism, replace roller by the clamper that object can be controlled and driven or ribbon conveyer etc.
On base station 29,, be equipped with the portion that stops 39 that is used to prevent object W overrun upward at its front end.
On base station 29, at the area arrangement levitation device 41 that is surrounded by roller 31,35.Levitation device 41 has the squit hole 43 of the ring-type of rectangle.Squit hole 43 is connected with not shown compressed air feedway, and accepts this supply and spray compressed air.The compressed air that is sprayed is created on the space that between the upper surface of the lower surface of object W and levitation device 41 uniform pressure takes place, and object W is subjected to buoyancy and suspends thus.Also can be to be suitable for ultrasonic levitation device or electrostatic suspension device same as described abovely, replace utilizing compressed-air actuated levitation device 41.
In this levitation device 41, the levitation device 41T of end about being arranged in respectively is respectively along accepting roller 31 configurations in its vicinity.As shown in Figure 3, levitation device 41T is not fixed on the base station 29, but is supported by the guide portion 45 that allows its lifting.Further have, first cylinder 47 that controllably is driven into by compressed-air actuated air pressure, levitation device 41T are subjected to the driving of first cylinder 47 and lifting position of representing with double dot dash line in the drawings and the lifting of representing with solid line in the drawings between the down position.Because levitation device 41T is accepting near the roller 31, object W is also accepting lifting on the roller 31 along with the lifting of levitation device 41T.When levitation device 41T was positioned at lifting position, object W obtained higher hoverheight, can realize preventing contacting with object W thereby accept roller 31.At this moment, object W is not activated power from accepting roller 31.On the other hand, when levitation device 41T was positioned at down position, object W obtained lower hoverheight, contacts with object W thereby allow to accept roller 31.At this moment, object W can be driven by accepting roller 31.
Equally, the levitation device 41G that arranges respectively in the front and back end respectively along outlet roller 35 configurations in its vicinity.With reference to Fig. 4, levitation device 41G also liftably is supported on the guide portion 45, is subjected to the driving of second cylinder 49, thus lifting position of representing with double dot dash line in the drawings and the lifting of representing with solid line in the drawings between the down position.By the lifting of levitation device 41G, object W is also in lifting on 35 on the outlet roller, prevents and allows outlet roller 35 to contact with object W.
Utilize the object W hoverheight control of levitation device 41G and utilize the control of the hoverheight of levitation device 41T independently to carry out.Each hoverheight control also can utilize from the compressed-air actuated flow control of squit hole 43 ejections and carry out, and replaces the lifting of levitation device 41T, 41G.And the lifting of levitation device 41T, 41G also can utilize other suitable lowering or hoisting gears of hydraulic cylinder or electro-motor etc. to carry out, and replaces utilizing compressed-air actuated cylinder.
And the difference whether conveying device contacts with object W need not the difference of criticality as contact and the difference of separating.For example, look can confirm contact and contact pressure very hour, conveying device is in the state of idle running and can apply actuating force to object W.Otherwise because object is conducted oneself with dignity when having enough contact pressures, conveying device will apply actuating force to object W though look almost not contact.At this, will " contact " drivingly in this specification and technical scheme be defined as especially " apply actuating force enough contact ".That is, even when object is positioned at the state of higher hoverheight, object can keep non-driving, light contacting with conveying device.
Other levitation devices 41 except that levitation device 41T, 41G are configured in the zone that is surrounded by levitation device 41T, 41G.These levitation devices 41 are because of identical with above-mentioned levitation device 15,25, thereby omit this detailed description.In lifting position, the upper surface that is preferably all levitation devices 41 aligns on single plane at levitation device 41T, 41G.And the upper surface that this plane is preferably with the levitation device 15,25 of other floating carriers 3,5 is aligned to the single plane shape.
Utilize conveying and the direction conversion of the object W of levitation transportation system 1 as follows.At initial state, levitation device 41T, 41G state for having descended.By driving second cylinder 49 levitation device 41G is risen, prevent that the outlet roller 35 of both sides from contacting drivingly with object W.Before and after this, the drive compression air feeder makes squit hole 17,27,43 ejections of compressed air from all levitation devices 15,25,41, is in the state that applies suspending power to object W.Then CD- ROM drive motor 13A, 13B, 37A, 37B make roller 11 and accept roller 31 and rotate synchronously, and then object W is transferred at floating carrier 3 upper edge first direction D1, on the arrival direction conversion equipment 7.
At this moment, because of levitation device 41G is positioned at lifting position, outlet roller 35 can not contact drivingly with object W, and object W crosses outlet roller 35 with enough hoverheights.Therefore on the other hand,, accept roller 31 and contact drivingly, with controlling object thing W mobile slidably not with object W because of levitation device 41T is positioned at down position.
When object W arrives the position of representing with double dot dash line among Fig. 1 and Fig. 2, stop motor 33A, 33B and make the rotation of accepting roller 31 stop.Do not slide because of being controlled so as to, so object W is parked in the regular position of representing with double dot dash line.Perhaps, also can prevent overrun by the portion of stopping 39.
Make levitation device 41G descend by driving second cylinder 49, allow the outlet roller 35 of both sides to contact with object W drivingly.Simultaneously, make levitation device 41T rise, prevent that the roller 31 of accepting of both sides from contacting drivingly with object W by driving first cylinder 47.Then, CD- ROM drive motor 23A, 23B, 33A, 33B, when rotating roller 21 and outlet roller 35 synchronously, object W carries at direction-changing device 7 upper edge second direction D2, passes out on the floating carrier 5.
At this moment,, accept roller 31 and can not contact drivingly, thereby object W crosses with enough hoverheights and accepts roller 31 with object W because of levitation device 41T is positioned at lifting position.On the other hand, when levitation device 41G was positioned at down position, outlet roller 35 contacted drivingly with object W, with moving of controlling object thing W slidably not.
Object W be subjected to joining roller 21 actuating force and be transferred at floating carrier 5 upper edge second direction D2.
Based on above-mentioned action, levitation transportation system 1 is in the position of controlling object thing W accurately and direction and object conveyor thing W in the conversion direction.Because of can certainty ground, position and the direction of controlling object thing W accurately, so need not to revise these mechanism, levitation transportation system 1 has easy structure.And, because of can guaranteeing the precision of position and direction, thereby can further improve the transporting velocity of object W.
In the above description illustration with the structure of right angle conversion direction, also can carry out direction conversion beyond the right angle according to the configuration of suitable each key element of change.Can carry out FEEDBACK CONTROL in position by the position and the transducer setting highly that will be used for detected object thing W, can make above-mentioned action realize automation.
Though describe the present invention with reference to suitable execution mode, the present invention is not limited to the content of above-mentioned execution mode.Based on the content of above announcement, those skilled in the art also can be by revising execution mode and even being out of shape and implementing the present invention.
Utilizability on the industry
Can provide a kind of position of the thing of controlling object accurately and direction and the direction-changing device of conversion direction and the levitation transportation system of the direction-changing device that bag has sample by the present invention.

Claims (4)

1. a direction-changing device is used for by compressed air object being suspended and conversion direction, it is characterized in that possessing:
Constitute first conveying device that contacts and be transported to first direction with described object;
Constitute second conveying device that contacts and be transported to second direction with described object;
Have along described first conveying device configuration and for described object is applied buoyancy and sprays described compressed-air actuated squit hole, between preventing first height that described first conveying device and described object contact drivingly and allowing described first conveying device and second height that described object contacts drivingly, first levitation device that the hoverheight of described object on described first conveying device controlled; And
Have along described second conveying device configuration and for described object is applied buoyancy and sprays described compressed-air actuated squit hole, with first levitation device independently between preventing first height that described second conveying device and described object contact drivingly and allowing described second conveying device and second height that described object contacts drivingly, second levitation device that the hoverheight of described object on described second conveying device controlled.
2. direction-changing device according to claim 1 is characterized in that,
Also possess: first lowering or hoisting gear that constitutes described first levitation device of lifting controllably; And
Constitute second lowering or hoisting gear of described second levitation device of lifting controllably.
3. direction-changing device according to claim 1 is characterized in that,
Described first conveying device and described second conveying device possess any parts of selecting respectively from the group that is made of ultrasonic motor, roller, clamper and ribbon conveyer.
4. a levitation transportation system is characterized in that,
Possess: described object is suspended and be transported to first floating carrier of described first direction;
Described object is suspended and be transported to second floating carrier of described second direction; And
The described direction-changing device of claim 1 between described first floating carrier and described second floating carrier.
CN2008801001663A 2007-07-27 2008-07-03 Direction change device and levitation transportation system including direction change device Active CN101809729B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007-196554 2007-07-27
JP2007196554A JP4900115B2 (en) 2007-07-27 2007-07-27 Conveyance direction changing device and levitating conveyance system
PCT/JP2008/062089 WO2009016918A1 (en) 2007-07-27 2008-07-03 Direction change device and levitation transportation system including direction change device

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CN101809729A CN101809729A (en) 2010-08-18
CN101809729B true CN101809729B (en) 2011-12-14

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JP (1) JP4900115B2 (en)
KR (1) KR101238216B1 (en)
CN (1) CN101809729B (en)
TW (1) TW200918428A (en)
WO (1) WO2009016918A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446403B2 (en) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ Conveyance direction changing device and levitating conveyance system
JP5549311B2 (en) * 2010-03-26 2014-07-16 株式会社Ｉｈｉ Levitation transport device and direction change device
TW201134778A (en) * 2010-04-08 2011-10-16 Tae Sung Eng Co Ltd Apparatus for transferring of glass panel
JP5445863B2 (en) * 2010-08-04 2014-03-19 株式会社ダイフク Plate-shaped body transfer device
CN102730405B (en) * 2012-06-04 2015-04-15 江苏神农灭菌设备股份有限公司 Transfer mechanism at 90-degree corner of conveyor track
CN104401767B (en) * 2014-11-14 2017-03-15 广州兴森快捷电路科技有限公司 PCB corners transmitting device and method
EP3562770A4 (en) 2016-12-27 2020-09-02 ABB Schweiz AG Conveying system
US10457497B1 (en) * 2018-04-13 2019-10-29 Laitram, L.L.C. Electromagnetic conveyor system
CN109638122B (en) * 2018-12-20 2019-08-27 广东工业大学 A method of using ultrasonic standing wave manipulation Micro-LED flood tide transfer
WO2021154528A1 (en) * 2020-01-27 2021-08-05 Corning Incorporated Method and apparatus for trimming edges of glass substrates during inline processing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005145633A (en) * 2003-11-14 2005-06-09 Mitsubishi Materials Techno Corp Air conveyance device
JP2006315849A (en) * 2005-05-16 2006-11-24 Mitsubishi Materials Techno Corp Double-line air flow conveyance device
EP1770032A1 (en) * 2004-06-28 2007-04-04 Kabushiki Kaisha Watanabe Shoko Levitation transportation device and levitation transportation method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62130925A (en) * 1985-11-29 1987-06-13 Mitsubishi Electric Corp Carrier apparatus
JP2004077592A (en) * 2002-08-12 2004-03-11 Dainippon Printing Co Ltd Method and apparatus for processing work, and conveying apparatus for glass substrate
JP4754885B2 (en) * 2004-11-30 2011-08-24 株式会社ダイヘン Substrate transfer device
KR100713811B1 (en) * 2005-07-07 2007-05-02 주식회사 태성기연 Apparatus for turning of direction of glass panel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005145633A (en) * 2003-11-14 2005-06-09 Mitsubishi Materials Techno Corp Air conveyance device
EP1770032A1 (en) * 2004-06-28 2007-04-04 Kabushiki Kaisha Watanabe Shoko Levitation transportation device and levitation transportation method
JP2006315849A (en) * 2005-05-16 2006-11-24 Mitsubishi Materials Techno Corp Double-line air flow conveyance device

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