CN101782373A - Method and device for measuring axial clearance of confocal lens group - Google Patents
Method and device for measuring axial clearance of confocal lens group Download PDFInfo
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- CN101782373A CN101782373A CN201010128405A CN201010128405A CN101782373A CN 101782373 A CN101782373 A CN 101782373A CN 201010128405 A CN201010128405 A CN 201010128405A CN 201010128405 A CN201010128405 A CN 201010128405A CN 101782373 A CN101782373 A CN 101782373A
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Abstract
The invention belongs to the technical field of optical precision measurement, in particular relates to method and device for measuring an axial clearance of a confocal lens group. The method comprises the following steps of: firstly, carrying out high-precision positioning to the surfaces of various lenses in a lens group by a confocal focusing principle and acquiring the position coordinate of confocal measuring heads at various positioning points; then, sequentially calculating various axial clearances in the lens group by utilizing a ray-tracking recursion formula; and shielding paraxial rays by guiding a circular pupil in a measuring light path to form a hollow measuring optical cone so as to lessen the influence of image errors on a measuring result. The invention carries out non-contact high-precision positioning to the surfaces of the lenses in the lens group by using the confocal optical cone and has the advantages of long working distance, high measuring speed, high measuring precision, avoidance of dismounting the measured lens group in the measuring process, and the like.
Description
Technical field
The invention belongs to technical field of optical precision measurement, can realize under the situation of not dismantling the mirror group that the contactless high-precision of end play in the mirror group is measured.
Technical background
In optical field, the measurement of end play is significant in the mirror group.In the assembling process of photo-etching machine objective lens, the contour performance optical system of camera space, need carry out accurate adjustment to lens end play, radial deflection and optical axis drift angle according to the radius-of-curvature and the refractive index of lens in the camera lens.With the photo-etching machine objective lens is example, and each signal-lens end play deviation all can cause aberrations such as the spherical aberration, astigmatism, coma, distortion of lithographic objective, influences the image quality of object lens.For axial deviation is controlled to minimum, need reach micron dimension to the measuring accuracy of lens end play.
At present, the gap in the mirror group between each lens mainly relies on the precision of machining and assembling to guarantee, can survey high method by contact in the assembling process, in conjunction with the gap between signal-lens THICKNESS CALCULATION lens.The Mirau interferometer can carry out hi-Fix to the single element lens outside surface in the installation process by replacing the contact method, realizes lens arrangement accurately, but can't go deep into mirror group inside a plurality of lens surfaces is carried out hi-Fix.
The method that domestic and international existing end play is measured can be divided into contact type measurement and non-contact measurement two big classes.
Contact type measurement has two kinds usually: the one, and the distance on the last summit of the last summit of the last lens of measurement and back one lens deducts lens thickness then.The 2nd, measure the distance of sphere summit to the microscope base end face.The major defect of contact type measurement is to scratch lens surface easily.For avoiding scratching, between measuring head and measured surface, add one deck protection sheet usually, so measuring accuracy is lower.Some is coated with the surface of special rete, forbids contact type measurement.For assembling the mirror group of finishing, then need to measure after the dismounting, dismantle and ressemble process and all can introduce error, so contact type measurement is not suitable for the high-acruracy survey in gap.
The non-contact gap measurement mainly contains image measurement method, the confocal method of white light and interferometric method.
In " based on the fit-up gap Research on on-line-measuring of image measurement technology " literary composition of delivering in " sensor technology " in 2005, introduced a kind of on-line measurement scheme based on image measurement technology, the picture that the gap becomes in ccd video camera by optical system is delivered image measurement software processes and analysis, provide the result by Survey Software.In the mirror assembling part, can measure the end play between a plurality of lens in real time.But owing to be subjected to the influence of video camera imaging system, CCD resolving power, clear picture degree and calibration coefficient degree of accuracy etc., be difficult to the measuring accuracy that reaches higher, measuring error is in 0.015mm.For assembling the mirror group of finishing, need to measure after the dismounting, simultaneously so the image measurement method is not suitable for the high-acruracy survey in mirror group gap yet.
In " Noncontact measurement of central lens thickness " literary composition of in " GLASS SCIENCE AND TECHNOLOGY ", delivering in 2005, adopt the confocal method of white light to measure lens center thickness.The probe that this method at first utilizes behind the white light scioptics axial aberration to form positions the measured lens surface vertices, then the thickness by measured lens upper and lower surface summit spectrum of reflected light information calculations lens.The method also can be applied to measure the end play between the mirror group, and its characteristics are to realize real-time measurement, but white light is an incoherent light, focuses sensitivity and resolution is lower, operating distance limited (30 μ m-25mm).Particularly be difficult to the refractive index of accurate known measured lens at the different wave length place, general all is by measuring the refractive index interpolation gained of certain wave strong point, because this parameter is bigger to the influence of measurement result, so this method is difficult to the measuring accuracy that reaches higher in actual applications.
Chinese patent " non-contact optical system airspace surveying work the method and apparatus " (patent No.: 01133730.3), adopt and interfere Positioning Principle, realized the non-cpntact measurement of airspace.In mirror group installation process, the method can replace the contact altimetry to guarantee the airspace between the lens in the mirror group, by mobile standard lens, can realize accurately location to the two lens upper surface summits that order is installed, the thickness of the lens of installing after deducting with the amount of movement of twice location of standard lens can obtain the airspace between two lens.This method is by the focus of standard lens location, and its bearing accuracy can reach λ/more than 20, have higher measuring accuracy.Simultaneously the method belongs to non-contact measurement, has measured lens not damaged, advantage such as easy to use.But then can't go deep into its inside and carry out clearance measurement for assembling the mirror group of finishing.
Use more polarization interference method in addition, for example: United States Patent (USP) " Optical gapmeasuring apparatus and the method " (patent No.: 5953125), propose a kind of high speed and measured the optical means and the device of two surface spacings, wherein first surface is the part of substantially transparent parts, second surface is a test object surface, earlier light beam is mapped to first surface by polarization member with an angle of inclination with lens, and measuring beam is positioned on the tested surface, utilize again that the luminous effect of closing of folded light beam makes light beam pass through the transparent component back reflection on first surface and the tested object surface, then, measure the intensity and the relative phase of the polarized component that limits by plane of incidence with polarization sensitive intensity detector and phase detector, analyze these measurement parameters, can obtain two surface gap.United States Patent (USP) " Gap measuring apparatususing interference fringes ofreflected the light " (patent No.: 4932781) in addition similarly.The characteristics of polarization interference method are that measuring speed is fast, measuring accuracy is high.Measure the tested person body surface with respect to the minim gap between the parallel surfaces of transparent component but this method is mainly used at present, can't realize the high-acruracy survey in axial gap between the interior a plurality of lens of mirror group.
In sum, still do not have a kind of technology so far, can mirror assembling join finish after, do not dismantle under the situation of mirror group, realize the high-acruracy survey of end play in the mirror group.
Realize that the key that end play is measured in the mirror group has 2 points, at first be to realize a kind of optical alignment technology with contactless chromatography ability of high precision, big operating distance, secondly be the calculation of Gap algorithm can the inner a plurality of lens of compensating glass group to measuring the influence of light path.
In recent years, the confocal technology fast development in micro-imaging field is both at home and abroad compared with traditional measuring method and to be had good chromatography ability, higher axial location pointing accuracy, stronger environment interference.The present invention utilizes the confocal principle that focuses that lens surface in the mirror group is accurately located, and has realized the measurement of end play in the mirror group, and it has the measuring accuracy height, advantages such as measured lens group are grown, be need not to dismantle to operating distance.
Summary of the invention
The objective of the invention is in order to solve the contactless high-precision problems of measurement of end play in the mirror group, propose a kind of method and apparatus that utilizes confocal technology accurately to measure end play in the mirror group.
The objective of the invention is to be achieved through the following technical solutions.
Axial clearance of confocal lens group measuring method of the present invention may further comprise the steps:
(a) at first, adjust the measured lens group, make itself and confocal gauge head common optical axis;
(b) then, the confocal gauge head of the confocal light cone of outgoing moves along optical axis direction scanning, confocal system determines that by the maximum value of probe response signal the lens surface summit coincides in confocal light cone summit and the measured lens group, writes down the position coordinates z of each confocal gauge head in coincide point place successively
1, z
2..., z
m(m is the total light transmission face number of lens in the mirror group);
(c) according to known parameters: the numerical aperture angle α of confocal light cone
0, the radius-of-curvature r of a plurality of single element lens in the measured lens group
1～r
n, refractive index n
0～n
nPosition coordinates z with confocal gauge head
1～z
N+1, can be by the ray tracing recursion formula:
n＝1，2，…m-1
Obtain in the mirror group end play d between n light transmitting surface and n+1 the light transmitting surface
n=l
n'; Initial parameter: α wherein
0'=α
0, l
0'=| z
N+1-z
1|, d
0=0.
Measuring method of the present invention utilizes the method for curve fitting to ask for the maximum value of confocal response signal.
Measuring method of the present invention utilizes annular pupil to block paraxial rays, forms hollow measurement light cone, cuts down the influence of aberration to measurement result.
The invention provides the axial clearance of confocal lens group measurement mechanism, comprise collimated light source, it is characterized in that: comprise beam splitting system, object lens, confocal system, length measurement system and moving guide rail; Wherein beam splitting system, object lens and measured lens group are successively placed on collimated light source emergent ray direction, confocal system is placed on the beam splitting system reflection direction, lens surface in the measured lens group with beam splitting system with beam reflection to confocal system, and cooperate confocal light cone to realize the location on interior each the lens surface summit of measured lens group; Collimated light source, beam splitting system, object lens and confocal system are common to constitute confocal gauge head, and is installed on the moving guide rail with length measurement system.
Confocal system can be made of lens, pin hole and ccd detector in the measurement mechanism of the present invention; Light enters confocal system after lens converge at the pin hole place, and survey confocal response signal by the ccd detector behind the pin hole.
Confocal system can be made of lens and ccd detector in the measurement mechanism of the present invention; Light enters confocal system after lens are assembled, at the lens focus place by the confocal response signal of ccd detector direct detection.
Confocal system can be made of lens, microcobjective and ccd detector in the measurement mechanism of the present invention; Light enters confocal system after lens and microcobjective at the ccd detector surface imaging, and are surveyed confocal response signal by ccd detector.
Measurement mechanism of the present invention can also comprise annular pupil, is placed between collimated light source and the beam splitting system, forms hollow measurement light cone.
Measurement mechanism of the present invention can also comprise main control computer and electromechanical controlling device; Main control computer obtains confocal response signal; Main control computer controller controller for electric consumption makes it drive confocal gauge head and moves along optical axis direction scanning.
Measurement mechanism of the present invention can also comprise adjustment rack, in order to fixing measured lens group and adjust the optical axis of measured lens group.
Beneficial effect
The present invention contrasts prior art and has following innovative point:
1. this mirror group end play measuring method need not to dismantle the measured lens group, utilizes confocal light cone that lens surface in the mirror group is realized the contactless high-precision location, and to measured lens group not damaged, operating distance is long.
2. in light path, introduce annular pupil, block paraxial rays, form hollow measurement light cone, cut down the influence to measurement result of aberration.
The present invention contrasts prior art and has following remarkable advantage:
1. utilize the good chromatography ability of confocal system to realize the accurate location of lens surface in the mirror group.
2. utilize the method for curve fitting to ask for the maximum value of confocal response signal, improved measuring accuracy.
3. in this measuring method, confocal principle, is compared with image, interference fringe and is had higher stability as the measuring method of orientation criterion as focusing criterion with the light intensity response curve.
Description of drawings
Fig. 1 is the synoptic diagram of axial clearance of confocal lens group measuring method of the present invention;
Fig. 2 is the synoptic diagram of confocal system of the present invention;
Fig. 3 is the synoptic diagram of confocal system of the present invention;
Fig. 4 is the synoptic diagram of confocal system of the present invention;
Fig. 5 is the synoptic diagram of the confocal gauge head of the present invention;
Fig. 6 is the synoptic diagram of axial clearance of confocal lens group measurement mechanism of the present invention;
Fig. 7 measures the synoptic diagram of embodiment for axial clearance of confocal lens group of the present invention;
Fig. 8 measures the confocal response curve of embodiment for axial clearance of confocal lens group of the present invention.
Wherein: 1-annular pupil, 2-beam splitting system, 3-object lens, 4-measured lens group, the confocal light cone of 5-summit, 6-confocal system, 7-CCD detector, 8-pin hole, 9-lens, 10-CCD detector, 11-lens, 12-CCD detector, 13-microcobjective, 14-lens, 15-collimated light source, the confocal gauge head of 16-, 17-adjustment rack, 18-moving guide rail, 19-length measurement system, 20-connecting rod, 21-electromechanical controlling device, 22-main control computer.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Basic thought of the present invention is to utilize confocal light cone to each lens surface summit hi-Fix in the mirror group, realizes that the contactless high-precision of end play in the mirror group is measured.In measuring light path, introduce annular pupil simultaneously, block paraxial rays, form hollow measurement light cone, cut down the influence of aberration measurement result.
Embodiment one
As Fig. 2, Fig. 5 and shown in Figure 7, the axial clearance of confocal lens group measuring method, its measuring process is:
At first, start the Survey Software in the main control computer (22), import the design parameter of measured lens group (4), comprise the radius-of-curvature of each lens in the mirror group, be followed successively by from left to right: r
1=195.426mm, r
2=-140.270mm, r
3=-140.258mm, r
4=-400.906mm; Refractive index is followed successively by from left to right: n
0=1, n
1=1.5143, n
2=1, n
3=1.668615.
Then, open collimated light source (15), the directional light of its ejaculation is the annular pupil (1) of 6.8mm-9.6mm by transmission diameter, see through beam splitting system (2), through vertex focal length is that the object lens (3) of 35mm are focused at the focal position, forms hollow cone simultaneously, and light is again by after the interior reflextion from lens surface of measured lens group (4), enter confocal system (6) by object lens (3) and beam splitting system (2) reflection once more, lens (9) converge at pin hole (8) back lighting ccd detector (7) in confocal system (6).
Then,, make measured lens group (4) and confocal gauge head (16) common optical axis, avoid the measuring error that causes because of light shaft offset by adjusting adjustment rack (17).
In the measuring process, electromechanical controlling device (21) drives confocal gauge head (16) and moves in optical axis direction scanning along moving guide rail (18), confocal system (6) determines that by the maximum value of surveying the confocal response signal of ccd detector (7) confocal light cone summit (5) overlaps with the interior lens surface of measured lens group (4) summit, and writes down the position coordinates z of the confocal gauge head in each coincide point place (16) successively
1～z
4Response signal as shown in Figure 8, I
1(z)～I
4(z) the corresponding z of difference
1～z
4The confocal response signal at some place, wherein the maximum value of response signal is tried to achieve by the higher order polynomial fitting method.
Position coordinates z with confocal gauge head (16)
1～z
4, sending main control computer (22) to, the Survey Software in the main control computer (22) is calculated each end play in the mirror group in conjunction with the parameter of measured lens group (4) successively by following ray tracing recursion formula:
n＝1，2，3
Known parameters comprises the numerical aperture angle α of confocal light cone in the formula
0, the radius-of-curvature r of a plurality of single element lens in the mirror group (4)
1～r
4, refractive index n
0～n
3Position coordinates z with confocal gauge head (16)
1～z
4Starting condition is: α
0'=α
0, l
0'=| z
N+1-z
1|, d
0=0.Its iteration result is the end play d between n light transmitting surface and n+1 the light transmitting surface
n=l
n'.
As Fig. 2, Fig. 5 and shown in Figure 7, the axial clearance of confocal lens group measurement mechanism, comprise collimated light source (15), be successively placed on annular pupil (1), beam splitting system (2) and the object lens (3) of collimated light source (15) outgoing directional light direction, also comprise the confocal system (6) that is placed on beam splitting system (2) reflection direction, wherein to confocal system (6), lens (9) converge at pin hole (8) back lighting ccd detector (7) in confocal system (6) with beam reflection for interior lens surface of measured lens group (4) and beam splitting system (2).
Collimated light source (15), annular pupil (1), beam splitting system (2), object lens (3) and confocal system (6) constitute confocal gauge head (16) jointly, are installed on the moving guide rail (18) by connecting rod (20).Measured lens group (4) is fixed on the adjustment rack (17).Main control computer (22) obtains confocal response signal; Main control computer (22) is connected with electromechanical controlling device (21), makes it drive confocal gauge head (16) and moves in optical axis direction scanning, cooperates confocal system (6) and length measurement system (19) can obtain each surperficial positional information in the mirror group.
The confocal gauge head of present embodiment gained (16) is followed successively by along optical axis direction scanning gained position coordinates: z
1=0.1397mm, z
2=-7.9175mm, z
3=-8.2509mm, z
4=-14.5506mm.After the recursion formula iterative computation, can get the end play d=0.3187mm between two lens.
Embodiment two
As Fig. 3, Fig. 5 and shown in Figure 7, the confocal system (6) among embodiment one Fig. 2 is replaced with confocal system (6) among Fig. 3, can constitute embodiment two.Different is with embodiment one, and light enters confocal system (6) after lens (11) are assembled, at the lens focus place by the confocal response signal of ccd detector (10) direct detection.All the other measuring methods are identical with embodiment one with device.
Embodiment three
As Fig. 4, Fig. 5 and shown in Figure 7, the confocal system (6) among embodiment one Fig. 2 is replaced with confocal system (6) among Fig. 4, can constitute embodiment three.Different is with embodiment one, and light enters confocal system (6) after lens (14) and microcobjective (13) at ccd detector (12) surface imaging, and are surveyed confocal response signal by ccd detector (12).All the other measuring methods are identical with embodiment one with device.
This embodiment has realized the contactless high-precision measurement of end play in the mirror group by a series of measure, realized the method and apparatus that axial clearance of confocal lens group is measured, had advantages such as measured lens group not damaged, measuring accuracy height, operating distance are long, easy to use.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on claim of the present invention basis all is protection scope of the present invention.
Claims (10)
1. axial clearance of confocal lens group measuring method is characterized in that:
(a) at first, adjust the measured lens group, make itself and confocal gauge head common optical axis;
(b) then, the confocal gauge head of the confocal light cone of outgoing moves along optical axis direction scanning, confocal system determines that by the maximum value of surveying confocal response signal the lens surface summit coincides in confocal light cone summit and the measured lens group, writes down the position coordinates z of each confocal gauge head in coincide point place successively
1, z
2..., z
m(m is the total light transmission face number of lens in the mirror group);
(c) according to known parameters: the numerical aperture angle α of confocal light cone
0, the radius-of-curvature r of a plurality of single element lens in the measured lens group
1～r
n, refractive index n
0～n
nPosition coordinates z with confocal gauge head
1～z
N+1, can be by the ray tracing recursion formula:
n＝1，2，…m-1
Obtain in the mirror group end play d between n light transmitting surface and n+1 the light transmitting surface
n=l
n'; Initial parameter: α wherein
0'=α
0, l
0'=| z
N+1-z
1|, d
0=0.
2. axial clearance of confocal lens group measuring method according to claim 1 is characterized in that: utilize the method for curve fitting to ask for the maximum value of confocal response signal.
3. axial clearance of confocal lens group measuring method according to claim 1 and 2 is characterized in that: utilize annular pupil to block paraxial rays, form hollow measurement light cone, cut down the influence of aberration to measurement result.
4. the axial clearance of confocal lens group measurement mechanism comprises collimated light source, it is characterized in that: also comprise beam splitting system, object lens, confocal system, length measurement system and moving guide rail; Wherein beam splitting system, object lens and measured lens group are successively placed on collimated light source emergent ray direction, confocal system is placed on the beam splitting system reflection direction, lens surface in the measured lens group with beam splitting system with beam reflection to confocal system, and cooperate confocal light cone to realize the location on interior each the lens surface summit of measured lens group; Collimated light source, beam splitting system, object lens and confocal system are common to constitute confocal gauge head, and is installed on the moving guide rail with length measurement system.
5. axial clearance of confocal lens group measurement mechanism according to claim 4 is characterized in that: confocal system is made of lens, pin hole and ccd detector; Light enters confocal system after lens converge at the pin hole place, and survey confocal response signal by the ccd detector behind the pin hole.
6. axial clearance of confocal lens group measurement mechanism according to claim 4 is characterized in that: confocal system is made of lens and ccd detector; Light enters confocal system after lens are assembled, at the lens focus place by the confocal response signal of ccd detector direct detection.
7. axial clearance of confocal lens group measurement mechanism according to claim 4 is characterized in that: confocal system is made of lens, microcobjective and ccd detector; Light enters confocal system after lens and microcobjective at the ccd detector surface imaging, and are surveyed confocal response signal by ccd detector.
8. according to claim 4 or 5 or 6 or 7 described axial clearance of confocal lens group measurement mechanisms, it is characterized in that: comprise annular pupil, be placed between collimated light source and the beam splitting system, form hollow measurement light cone.
9. according to claim 4 or 5 or 6 or 7 or 8 described axial clearance of confocal lens group measurement mechanisms, it is characterized in that: comprise main control computer and electromechanical controlling device; Main control computer obtains confocal response signal; Main control computer controller controller for electric consumption makes it drive confocal gauge head and moves along optical axis direction scanning.
10. according to claim 4 or 5 or 6 or 7 or 8 or 9 described axial clearance of confocal lens group measurement mechanisms, it is characterized in that: comprise adjustment rack, in order to fixing measured lens group and adjust the optical axis of measured lens group.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109186479A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil laser differential confocal microscope group axial gap measurement method and device |
| CN110068268A (en) * | 2019-03-19 | 2019-07-30 | 天津大学 | Circular Nose Cutting Edge lathe tool geometric parameter three-dimensional detection system and method based on zoom measurement |
-
2010
- 2010-03-17 CN CN201010128405A patent/CN101782373A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109186479A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil laser differential confocal microscope group axial gap measurement method and device |
| CN109186479B (en) * | 2018-11-13 | 2020-05-12 | 北京理工大学 | Method and device for measuring axial clearance of rear-mounted pupil laser differential confocal lens group |
| CN110068268A (en) * | 2019-03-19 | 2019-07-30 | 天津大学 | Circular Nose Cutting Edge lathe tool geometric parameter three-dimensional detection system and method based on zoom measurement |
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Application publication date: 20100721 |