CN101748393B - Heating control method of production line equipment and device - Google Patents
Heating control method of production line equipment and device Download PDFInfo
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- CN101748393B CN101748393B CN200910241956A CN200910241956A CN101748393B CN 101748393 B CN101748393 B CN 101748393B CN 200910241956 A CN200910241956 A CN 200910241956A CN 200910241956 A CN200910241956 A CN 200910241956A CN 101748393 B CN101748393 B CN 101748393B
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Abstract
The present invention discloses a heating control method of production line equipment, which comprises the following steps: pressure value in a chamber is gained; and heating operation is started if the pressure value in the chamber is in the range of preset pressure value. On the basis that hardware is not excessively added, the present invention can eliminate a fire striking phenomenon when a heating unit is started. Thus, the cost is reduced, and the easy using ability of the production line equipment is improved.
Description
Technical field
The present invention relates to the technical field of apparatus for production line control, particularly relate to a kind of method for heating and controlling of apparatus for production line and a kind of heating control apparatus of apparatus for production line.
Background technology
Apparatus for production line is to accomplish various product production, manufacturing or the indispensable hardware device of technological process in the modern life; For reducing cost as far as possible and raising the efficiency, generally all dispose of the operation of control corresponding system with the control apparatus for production line for apparatus for production line.Accomplish in the process of various product production, manufacturing or technology at the control apparatus for production line, need control temperature usually.
With the present preparation crystal silicon solar batteries PECVD equipment (plasma reinforced chemical vapour deposition equipment) that adopt is example more; Generally be provided with preheating cavity in the PECVD equipment; The function of preheating cavity mainly is preliminary vacuum and heating; Its inside is provided with heating unit, is used for substrate is heated, and makes the temperature of substrate reach the required temperature of technology in the short period of time.For the temperature that makes substrate is maintained, also need heat and reach identical temperature in the lump to the support plate of carrying substrates.
The arc discharge principle that heating unit commonly used at present is based on mostly realizes that comparatively typical a kind of heating unit is an infrared lamp.Below be example with the infrared lamp, the principle of work of brief account arc discharge heating unit.Infrared lamp can produce the infrared radiation energy of certain wavelength after energising; Characteristics with HS, high hot effect, high-penetrability, less energy-consumption; It has characteristics such as heating efficiency height, heat-up rate be fast, pollution-free than traditional type of heating (like the heating of common electrical heat pipe, fuel Heating, combustion gas heating etc.), is fit to very much PECVD equipment and is used for heating silicon chip and support plate thereof.For the speed that improves heating and the support plate homogeneity of temperature up and down,, specifically as shown in Figure 1 to the modes that support plate 11 adopts up and down double-deck infrared lamp 12 to heat usually.
Because the filament material of infrared lamp be tungsten filament mostly, tungsten filament differs greatly in cold conditions and the resistivity when hot, therefore, in the infrared lamp start-up course, owing to tungsten filament cold resistance rate is little, the electric current the when starting current of fluorescent tube will be much larger than works better.Because starting current is excessive, the possibility that sparking takes place between the wiring copper post that makes in the PECVD chamber is become big, thereby cause hidden trouble of equipment.
Be the sparking situation that the starting current that reduces this heating unit causes greatly, the solution that prior art provides specifically can be with reference to the reduced-voltage starting circuit structure diagram of employing power regulating eqiupment shown in Figure 2 for adopting thyristor power regulating eqiupment reduced-voltage starting.In start-up course; Through progressively changing the phase shifting angle of power tube in the power regulating eqiupment 21; Thereby the voltage effective value on the infrared lamp 12 is progressively risen, and the voltage during owing to startup is lower, and starting current is corresponding to be reduced; Avoided crossing the appearance of great start-up current, thereby reduced the frequency of the spark phenomenon that causes.
But still there is following shortcoming in prior art:
1, needs the equipment of extra increase more, cause complex structure, and influence the safety performance and the stability of total system, also can significantly increase cost simultaneously;
2, after Hardware configuration is accomplished, can't carry out fine adjustments, thereby can't thoroughly eliminate the sparking problem;
3, along with ground growth duration of service, degradation hardware reason under the pumping speed of off-gas pump will cause the spark phenomenon of heating starting more and more serious, also can't carry out accommodation.
Therefore; Need the urgent technical problem that solves of those skilled in the art to be exactly at present: the heating controlling mechanism that how can propose a kind of apparatus for production line with innovating; In order on the basis of not extra increase hardware; Spark phenomenon when eliminating the heating unit startup, thus reduce cost, improve the easy-to-use ability of apparatus for production line.
Technical problem to be solved by this invention provides a kind of method for heating and controlling and device of apparatus for production line middle chamber; In order on the basis of not extra increase hardware; Spark phenomenon when eliminating the heating unit startup, thus reduce cost, improve the easy-to-use ability of apparatus for production line.
In order to solve the problems of the technologies described above, the embodiment of the invention discloses a kind of method for heating and controlling of apparatus for production line, comprising:
Obtain the force value in the chamber, said chamber is a preheating cavity;
If said preheating cavity internal pressure value is in the scope of set pressure value; Then start heating operation; Wherein, The scope of said set pressure value is based on paschen's law and draws, and improving gap breakdown voltage, and when pressure-controlling is in the scope of said set pressure value, starts said heating operation through the indoor pressure of control chamber; The lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa.
Preferably, before the step of obtaining the cavity indoor pressure value, also comprise:
Chamber is carried out the operation of bleeding according to the preset pumpdown time.
Preferably, described method also comprises:
Chamber is carried out the operation of bleeding;
The said step of obtaining the cavity indoor pressure value comprises:
Force value in the real-time detection chambers.
Preferably, the scope of said set pressure value comprises lower value and higher limit, and described method also comprises:
If said cavity indoor pressure value is lower than lower value, then carry out the charge operation of certain hour after, return the said step of obtaining the cavity indoor pressure value;
If said cavity indoor pressure value is higher than higher limit, after then continuing to carry out the operation of bleeding of certain hour, return the said step of obtaining the cavity indoor pressure value.
Preferably, according to the preset pumpdown time chamber is carried out the operation of bleeding through following steps:
Vacuum pump is opened;
The inflation valve of chamber is closed;
The extraction valve of chamber is opened;
Carry out the operation of bleeding of Preset Time.
Preferably, when said cavity indoor pressure value is lower than lower value, carry out the charge operation of certain hour through following steps:
The inflation valve of chamber is opened;
The extraction valve of chamber is closed;
Carry out the charge operation of certain hour;
When said cavity indoor pressure value is higher than higher limit, continue to carry out the operation of bleeding of certain hour through following steps:
Open at vacuum pump, the inflation valve of chamber is closed, and, under the state that the extraction valve of chamber is opened, proceed the operation of bleeding of certain hour.
Preferably, after starting heating operation, also comprise:
If opening, the inflation valve of chamber then closes inflation valve;
If opening, the extraction valve of chamber then closes extraction valve.
Preferably, described method also comprises:
After waiting for that Heating temperature reaches preset value, finish heating operation when front chamber.
Preferably, said apparatus for production line is a PECVD equipment, and the certain hour of said wait is 0.1 second.
The embodiment of the invention also discloses a kind of heating control apparatus of apparatus for production line, comprising:
The force value detecting unit is used to obtain the force value in the chamber, and said chamber is a preheating cavity;
The force value judging unit is used to judge that said preheating cavity internal pressure value is whether in the scope of set pressure value, if then trigger the heating starting unit;
The heating starting unit; Be used to start heating operation, wherein, the scope of said set pressure value is based on paschen's law and draws; Improving gap breakdown voltage, and when pressure-controlling is in the scope of said set pressure value, start said heating operation through the indoor pressure of control chamber; The lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa.
Preferably, described device also comprises:
First vacuum unit after being used for according to the preset pumpdown time chamber being carried out the operation of bleeding, triggers the force value detecting unit.
Preferably, described device also comprises:
Second vacuum unit is used for chamber is carried out the operation of bleeding;
Said force value detecting unit comprises:
Pressure perception subelement is used for the force value in the real-time detection chambers.
Preferably, the scope of said set pressure value comprises lower value and higher limit, and described device also comprises:
Inflation unit is used for when said cavity indoor pressure value is lower than lower value, after the charge operation of execution certain hour, and returning pressure value detecting unit;
The unit of bleeding is used for when said cavity indoor pressure value is higher than higher limit, after continuing to carry out the operation of bleeding of certain hour, and returning pressure value detecting unit.
Preferably, said first vacuum unit comprises:
Vacuum pump promotor unit is used for the open vacuum pump;
Inflation valve is closed subelement, is used to close the inflation valve of chamber;
Extraction valve is opened subelement, is used to open the extraction valve of chamber;
First subelement of bleeding is used to carry out the operation of bleeding of Preset Time.
Preferably, said inflation unit comprises:
Inflation valve is opened subelement, is used to open the inflation valve of chamber;
Extraction valve is closed subelement, is used to close the extraction valve of chamber;
Inflate subelement in limited time, be used to carry out the charge operation of certain hour;
The said unit of bleeding comprises:
Second subelement of bleeding is used for opening at vacuum pump, and the inflation valve of chamber is closed, and, under the state that the extraction valve of chamber is opened, proceed the operation of bleeding of certain hour.
Preferably, described device also comprises:
The inflation valve closing unit is used for after starting heating operation, when the inflation valve of chamber is opened, closing inflation valve;
The extraction valve closing unit is used for after starting heating operation, when the extraction valve of chamber is opened, closing extraction valve.
Preferably, described device also comprises:
Add the hot standby unit, be used to wait for that Heating temperature reaches preset value after, finish heating operation when front chamber.
Preferably, said apparatus for production line is a PECVD equipment, and the certain hour of said wait is 0.1 second.
The embodiment of the invention also discloses a kind of method that is controlled to pre-heating technique in the film device, comprising:
Support plate is imported in the preheating cavity;
Preheating cavity is carried out the operation of bleeding;
Obtain the force value in the preheating cavity;
Judge said preheating cavity internal pressure value whether in the scope of set pressure value, the scope of said set pressure value comprises lower value and higher limit; If then start heating operation; If not and said force value be lower than lower value, then carry out the charge operation of certain hour after, return the said step of obtaining preheating cavity internal pressure value; If not and said force value be higher than higher limit, then continue to carry out the operation of bleeding of certain hour after, return the said step of obtaining preheating cavity internal pressure value;
After waiting for that Heating temperature reaches preset value, stop heating operation;
Support plate is spread out of preheating cavity, import process cavity into;
Wherein, the scope of said set pressure value comprises lower value and higher limit, and the lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa.
The embodiment of the invention also discloses a kind of device that is controlled to pre-heating technique in the film device, comprising:
Support plate imports the unit into, is used for importing support plate into preheating cavity;
Vacuum unit is used for preheating cavity is carried out the operation of bleeding;
The force value detecting unit is used to obtain the force value in the preheating cavity;
The force value judging unit; Be used to judge that said preheating cavity internal pressure value is whether in the scope of set pressure value; The scope of said set pressure value comprises lower value and higher limit, and the lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa; If then trigger the heating starting unit; If not and said preheating cavity in force value be lower than lower value, then trigger inflation unit; If not and the force value in the said preheating cavity be higher than higher limit, then trigger the unit of bleeding;
The heating starting unit; Be used to start heating operation, wherein, the scope of said set pressure value is based on paschen's law and draws; Improving gap breakdown voltage, and when pressure-controlling is in the scope of said set pressure value, start said heating operation through the indoor pressure of control chamber;
Inflation unit after being used to carry out the charge operation of certain hour, is returned said force value detecting unit;
The unit of bleeding after being used to continue to carry out the operation of bleeding of certain hour, returns said force value detecting unit;
Add the hot standby unit, be used to wait for that Heating temperature reaches preset value after, stop heating operation;
Support plate spreads out of the unit, is used for support plate is spread out of preheating cavity, imports process cavity into.
Compared with prior art, the present invention has the following advantages:
At first, the present invention has abandoned the solution thinking of the increase hardware of being taked to heating unit startup sparking problem in the prior art fully, has creatively proposed a kind of mode that adopts the software control chamber pressure, solves the scheme that heating unit starts the sparking problem.Particularly; The present invention with the mode of easy configuration, has reduced the dependence of apparatus for production line to hardware environment through using the scope of software adjustment control traditional heating unit connection sparking; Thereby effectively reduce cost, greatly improved the easy-to-use ability of apparatus for production line.
Moreover flexible to concrete parameter configuration among the present invention, adjustable range is bigger, and power and the actual ordering parameter of material that can be concrete according to heating unit to satisfy application of different requirements, have certain versatility.
Description of drawings
Fig. 1 is the synoptic diagram that infrared lamp is provided with in a kind of PECVD equipment;
Fig. 2 is the reduced-voltage starting circuit structure diagram that adopts power regulating eqiupment;
Fig. 3 is the rough schematic of preheating cavity LHC in the PECVD equipment;
Fig. 4 is the flow chart of steps of preheating cavity technology controlling and process in the prior art;
Fig. 5 is the flow chart of steps of the method for heating and controlling embodiment 1 of a kind of apparatus for production line of the present invention;
Fig. 6 is for the curve synoptic diagram of some gas ignition characteristics that paschen's law is enumerated is described;
Fig. 7 is the flow chart of steps of the method for heating and controlling embodiment 2 of a kind of apparatus for production line of the present invention;
Fig. 8 is the flow chart of steps of the method for heating and controlling embodiment 3 of a kind of apparatus for production line of the present invention;
Fig. 9 is the structured flowchart of the heating control apparatus embodiment 1 of a kind of apparatus for production line of the present invention;
Figure 10 is the structured flowchart of the heating control apparatus embodiment 2 of a kind of apparatus for production line of the present invention.
Embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
The present invention can be used in numerous general or special purpose computingasystem environment or the configuration.For example: multicomputer system, server, network PC, small-size computer, giant-powered computer, comprise DCE of above any system or equipment or the like.
The present invention can describe in the general context of the computer executable instructions of being carried out by computingmachine, for example program element.Usually, program element comprises the routine carrying out particular task or realize particular abstract, program, object, assembly, data structure or the like.Also can in DCE, put into practice the present invention, in these DCEs, by through network of communication connected teleprocessing equipment execute the task.In DCE, program element can be arranged in this locality and the remote computer storage medium that comprises storing device.
For making those skilled in the art understand the present invention better, below be example with the preheating cavity of PECVD equipment, the process control procedure of preheating cavity in the brief account prior art.
The flow chart of steps of preheating cavity technology controlling and process in the rough schematic of reference preheating cavity LHC shown in Figure 3 and the prior art shown in Figure 4; Last inflation valve LHC-PV31 and the extraction valve LHC-IV32 of being provided with usually of LHC30 vacuumizes, fills atmospheric operation to carry out in the LHC.Particularly, the process control procedure of LHC relates to following steps:
The vacuum pump Pump operation start of step 401, LHC;
Need to prove that said T1 is in the prior art for integrated artistic, import into and spread out of that time of preheating cavity disposes based on support plate.
After step 406, waiting temperature reach set(ting)value, finish process control procedure as time LHC.
Can find out that in the prior art, LHC carries out earlier the operation of bleeding, and carries out heating operation again, the result of the operation of bleeding does not influence the startup of heating operation, promptly needs only just to start heating operation after vacuumizing according to T1.
The inventor herein creatively proposes one of core idea of the embodiment of the invention and is: based on paschen's law (Paschen law); Through the indoor pressure of control chamber to improve gap breakdown voltage; And when pressure-controlling is in preset range, start the heating unit heating, thereby the problem of sparking takes place when effectively avoiding heating starting between the wiring copper post.
With reference to figure 5, show the flow chart of steps of the method for heating and controlling embodiment 1 of a kind of apparatus for production line of the present invention, specifically can comprise the steps:
Paschen's law is to characterize the law that concerns between uniform electric field gas gap voltage breakdown, clearance distance and air pressure.Be expressed as:
Voltage breakdown U (kilovolt) be electrode distance d (centimetre) and the function of air pressure P (holder) product.
Wherein, use Townsend breakdown condition r (ead-1)=1 (townsend theory) and ionization constant χ and can obtain the voltage breakdown formula with relational expression (Pd).
The curve synoptic diagram of the fire behaviour of some gases that reference is shown in Figure 6 can be known, improves air pressure or reduction air pressure and can both improve gap breakdown voltage to vacuum (for example 10-6 holder), and this notion is significant in practical application.Paschen's law is effective in certain (Pd) scope.But in the too high or high vacuum, discharge process can not be used townsend theory at air pressure, and paschen's law is also inapplicable.
The present invention tests the pressure control range of PECVD equipment on the basis of theoretical data, draws following conclusion (of pressure testing):
1) 100V power supply is when starting the fluorescent tube heating, if pressure-controlling in the scope of 100pa～1000pa, does not then have spark phenomenon;
2) 220V power supply is when starting the fluorescent tube heating, if pressure-controlling in the scope of 200pa～1000pa, does not then have spark phenomenon;
3) 380V power supply is when starting the fluorescent tube heating, if pressure-controlling in the scope of 500pa～1000pa, does not then have spark phenomenon.
Promptly in concrete the realization, according to the requirement of PECVD device product efficient, on the basis of original hardware, the sparking problem when realizing that pressure-controlling just can be solved heating starting fully in above-mentioned scope.
With reference to figure 7, show the flow chart of steps of the method for heating and controlling embodiment 2 of a kind of apparatus for production line of the present invention, specifically can comprise the steps:
In the present embodiment, the scope of said set pressure value comprises lower value and higher limit.
After step 706, wait Heating temperature reach preset value, finish heating operation when front chamber.
Present embodiment has increased the treatment mechanism when the cavity indoor pressure value runaways, particularly compared to embodiment shown in Figure 5; When said cavity indoor pressure value is lower than lower value (like the 100pa in the above-mentioned conclusion (of pressure testing), 200pa and 500pa); Expression air pressure is low excessively, vacuum tightness is too high, can't be suitable for paschen's law, so stop to vacuumize; And the charge operation of execution certain hour, to improve air pressure, to reduce the vacuum tightness in the chamber.And when said cavity indoor pressure value is higher than higher limit (like the 1000pa in the above-mentioned conclusion (of pressure testing)); Expression air pressure is too high, vacuum tightness is low excessively; Can't be suitable for paschen's law equally, operate to reduce air pressure, to improve the vacuum tightness in the chamber so continue bleeding of certain hour.
Need to prove; In the present embodiment; The said preset pumpdown time can be got the empirical value or the experiment conclusion value that can make chamber pressure all promising policy range of pressure values, to save cavity indoor pressure value time of filling repeatedly, bleeding in the scope of set pressure value not.
As another kind of preferred embodiment; Also can not preestablish the said time that vacuumizes; But chamber is carried out in the process of the operation of bleeding; Adopts pressure sensor spare or suchlike equipment, the force value in the real-time detection chambers, promptly above-mentioned steps 701 can replace with: chamber is carried out the operation of bleeding; Step 702 can replace with: the force value in the real-time detection chambers.
Certainly, of the presently claimed invention: the real-time force value in the detection chambers might not be in real time absolute on (mathematical meaning in other words) on the absolute figure meaning; In fact; Even there is the regular hour scope,, then just can think real-time as long as can satisfy the actual detection needs.Because the real-time detection on the absolute sense is unapproachable, even possibly not reach.
Present embodiment can be applicable in the pre-heating technique of many film-forming apparatus (like CVD equipment etc.); Generally speaking; The pre-heating technique of film-forming apparatus relates to biography sheet-vacuumize-heat-send the process of sheet, and a kind of process that is controlled to pre-heating technique in the film device of using the embodiment of the invention then relates to following steps:
S1, support plate is imported in the preheating cavity;
S2, preheating cavity is carried out the operation of bleeding;
S3, obtain the force value in the preheating cavity;
S4, judge said preheating cavity internal pressure value whether in the scope of set pressure value, the scope of said set pressure value comprises lower value and higher limit; If, performing step S5 then; If not and said force value be lower than lower value, performing step S6 then; If not and said force value be higher than higher limit, performing step S7 then;
S5, startup heating operation;
After the charge operation of S6, execution certain hour, return step S3;
S7, continuation are returned step S3 after carrying out the operation of bleeding of certain hour;
After S8, wait Heating temperature reach preset value, stop heating operation;
S9, support plate is spread out of preheating cavity, import process cavity into.
In reality, carry out the preheating of next batch substrate if desired, can also carry out charge operation to preheating cavity, to change the vacuum tightness in the chamber, return to predetermined atmospheric pressure value.
More preferably, as a kind of typical film-forming apparatus---in a kind of concrete application of PECVD equipment, said charge operation all can be 0.1 second with the certain hour of the operation awaits of bleeding.
With reference to figure 8; Show the flow chart of steps of the method for heating and controlling embodiment 3 of a kind of apparatus for production line of the present invention; For making those skilled in the art understand the present invention better, specify below in conjunction with the process control procedure of LHC in the PECVD equipment, present embodiment can comprise the steps:
The inflation valve LHC-PV of step 802, chamber closes;
The extraction valve LHC-IV of step 803, chamber opens;
In the present embodiment, said preset time T 2 can be got the empirical value or the experiment conclusion value that can make chamber pressure satisfy range of pressure values, to save cavity indoor pressure value time of filling repeatedly, bleeding in the scope of set pressure value not.
Can accomplish the operation of chamber being carried out according to the preset pumpdown time of bleeding through above step.
In reality, said force value can directly record through the pressure transmitter that is arranged on the LHC.
The inflation valve LHC-PV of step 808, chamber opens;
The extraction valve LHC-IV of step 809, chamber closes;
Behind step 810, the wait certain hour, return step 805;
After step 814, wait Heating temperature reach preset value, finish heating operation when front chamber.
More preferably, in concrete the realization, the infrared lamp among the LHC also can adopt the reduced-voltage starting circuit (as shown in Figure 2) of band thyristor power regulating eqiupment, starts the problem of sparking with further shielding infrared lamp.
Need to prove; For aforesaid each method embodiment, for simple description, so it all is expressed as a series of combination of actions; But those skilled in the art should know; The present invention does not receive the restriction of described sequence of operation, because according to the present invention, some step can adopt other orders or carry out simultaneously.Secondly, those skilled in the art also should know, the embodiment described in the specification sheets all belongs to preferred embodiment, and related action and unit might not be that the present invention is necessary.
With reference to figure 9, show the structured flowchart of the heating control apparatus embodiment 1 of a kind of apparatus for production line of the present invention, specifically can comprise with lower unit:
Force value detecting unit 91 is used to obtain the force value in the chamber;
Force value judging unit 92 is used to judge that said cavity indoor pressure value is whether in the scope of set pressure value, if then trigger heating starting unit 93;
In a kind of preferred embodiment of the present invention, said device can also comprise:
First vacuum unit 90 after being used for according to the preset pumpdown time chamber being carried out the operation of bleeding, triggers force value detecting unit 91.
In another kind of preferred embodiment of the present invention, said device can also comprise:
Second vacuum unit is used for chamber is carried out the operation of bleeding;
In this case, said force value detecting unit 91 can be known subelement for feeling of stress, is used for the force value in the real-time detection chambers.
In reality, said pressure perception subelement can be any pressure sensor or suchlike detection means.
In concrete the realization, the scope of said set pressure value comprises lower value and higher limit, described device be included in also that said cavity indoor pressure value triggers not in the scope of set pressure value the time with lower unit:
The unit 95 of bleeding is used for when said cavity indoor pressure value is higher than higher limit, after continuing to carry out the operation of bleeding of certain hour, and returning pressure value detecting unit 91.
Present embodiment can be applicable in the thermal pretreatment unit of many film-forming apparatus (like CVD equipment etc.); Generally speaking; The thermal pretreatment unit of film-forming apparatus comprises biography sheet subelement, vacuumizes subelement, heating subelement and send slice, thin piece unitary function, and a kind of device that is controlled to pre-heating technique in the film device of using the embodiment of the invention then relates to lower unit:
Vacuum unit is used for preheating cavity is carried out the operation of bleeding;
The force value detecting unit is used to obtain the force value in the preheating cavity;
The force value judging unit is used to judge said preheating cavity internal pressure value whether in the scope of set pressure value, and the scope of said set pressure value comprises lower value and higher limit; If then trigger the heating starting unit; If not and said preheating cavity in force value be lower than lower value, then trigger inflation unit; If not and the force value in the said preheating cavity be higher than higher limit, then trigger the unit of bleeding;
The heating starting unit is used to start heating operation;
Inflation unit after being used to carry out the charge operation of certain hour, is returned said force value detecting unit;
The unit of bleeding after being used to continue to carry out the operation of bleeding of certain hour, returns said force value detecting unit;
Add the hot standby unit, be used to wait for that Heating temperature reaches preset value after, stop heating operation;
Support plate spreads out of the unit, is used for support plate is spread out of preheating cavity, imports process cavity into.
For making those skilled in the art understand the present invention better, below be example with the process control procedure of the preheating cavity LHC of PECVD equipment, the heating control apparatus embodiment 2 in conjunction with Figure 10 specifies apparatus for production line of the present invention specifically can comprise with lower unit:
Vacuum pump promotor unit 901 is used for the open vacuum pump;
Inflation valve is closed subelement 902, is used to close the inflation valve of chamber;
Extraction valve is opened subelement 903, is used to open the extraction valve of chamber;
Force value detecting unit 91 is used to obtain the force value in the chamber;
Force value judging unit 92 is used to judge that said cavity indoor pressure value is whether in the scope of set pressure value, if then trigger heating starting unit 93; If not, when then the chamber pressure value being lower than lower value, after triggering inflation valve unlatching subelement 941, extraction valve are closed subelement 942 and are inflated subelement 943 in limited time, returning pressure value detecting unit 91; Perhaps, when the chamber pressure value is higher than higher limit, directly triggers second and bleed behind the subelement 944 returning pressure value detecting unit 91;
Inflation valve is opened subelement 941, is used to open the inflation valve of chamber;
Extraction valve is closed subelement 942, is used to close the extraction valve of chamber;
Inflate subelement 943 in limited time, be used to carry out the charge operation of certain hour; Preferably, the time of said operation is 0.1 second.
Inflation valve closing unit 95 is used for after starting heating operation, when the inflation valve of chamber is opened, closing inflation valve;
Extraction valve closing unit 96 is used for after starting heating operation, when the extraction valve of chamber is opened, closing extraction valve.
Add hot standby unit 97, be used to wait for that Heating temperature reaches preset value after, finish heating operation when front chamber.
Because device embodiment of the present invention is basically corresponding to preceding method embodiment, so the not detailed part of the description among the said apparatus embodiment can just not given unnecessary details at this referring to the related description among the preceding method embodiment.
Each embodiment in this specification sheets all adopts the mode of going forward one by one to describe, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
At last; Also need to prove; In this article; Relational terms such as first and second grades only is used for an entity or operation are made a distinction with another entity or operation, and not necessarily requires or hint relation or the order that has any this reality between these entities or the operation.
More than the method for heating and controlling of a kind of apparatus for production line provided by the present invention and a kind of heating control apparatus of apparatus for production line have been carried out detailed introduction; Used concrete example among this paper principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that on embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.
Claims (20)
1. the method for heating and controlling of an apparatus for production line is characterized in that, comprising:
Obtain the force value in the chamber, said chamber is a preheating cavity;
If said preheating cavity internal pressure value is in the scope of set pressure value; Then start heating operation; Wherein, The scope of said set pressure value is based on paschen's law and draws, and improving gap breakdown voltage, and when pressure-controlling is in the scope of said set pressure value, starts said heating operation through the indoor pressure of control chamber; The lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa.
2. the method for claim 1 is characterized in that, before the step of obtaining the cavity indoor pressure value, also comprises:
Chamber is carried out the operation of bleeding according to the preset pumpdown time.
3. the method for claim 1 is characterized in that, described method also comprises:
Chamber is carried out the operation of bleeding;
The said step of obtaining the cavity indoor pressure value comprises:
Force value in the real-time detection chambers.
4. like claim 2 or 3 described methods, it is characterized in that the scope of said set pressure value comprises lower value and higher limit, described method also comprises:
If said cavity indoor pressure value is lower than lower value, then carry out the charge operation of certain hour after, return the said step of obtaining the cavity indoor pressure value;
If said cavity indoor pressure value is higher than higher limit, after then continuing to carry out the operation of bleeding of certain hour, return the said step of obtaining the cavity indoor pressure value.
5. method as claimed in claim 2 is characterized in that, according to the preset pumpdown time chamber is carried out the operation of bleeding through following steps:
Vacuum pump is opened;
The inflation valve of chamber is closed;
The extraction valve of chamber is opened;
Carry out the operation of bleeding of Preset Time.
6. method as claimed in claim 4 is characterized in that, when said cavity indoor pressure value is lower than lower value, carries out the charge operation of certain hour through following steps:
The inflation valve of chamber is opened;
The extraction valve of chamber is closed;
Carry out the charge operation of certain hour;
When said cavity indoor pressure value is higher than higher limit, continue to carry out the operation of bleeding of certain hour through following steps:
Open at vacuum pump, the inflation valve of chamber is closed, and, under the state that the extraction valve of chamber is opened, proceed the operation of bleeding of certain hour.
7. method as claimed in claim 6 is characterized in that, after starting heating operation, also comprises:
If opening, the inflation valve of chamber then closes inflation valve;
If opening, the extraction valve of chamber then closes extraction valve.
8. method as claimed in claim 7 is characterized in that, also comprises:
After waiting for that Heating temperature reaches preset value, finish heating operation when front chamber.
9. method as claimed in claim 8 is characterized in that, said apparatus for production line is a PECVD equipment, and the certain hour of said wait is 0.1 second.
10. the heating control apparatus of an apparatus for production line is characterized in that, comprising:
The force value detecting unit is used to obtain the force value in the chamber, and said chamber is a preheating cavity;
The force value judging unit is used to judge that said preheating cavity internal pressure value is whether in the scope of set pressure value, if then trigger the heating starting unit;
The heating starting unit; Be used to start heating operation, wherein, the scope of said set pressure value is based on paschen's law and draws; Improving gap breakdown voltage, and when pressure-controlling is in the scope of said set pressure value, start said heating operation through the indoor pressure of control chamber; The lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa.
11. device as claimed in claim 10 is characterized in that, also comprises:
First vacuum unit after being used for according to the preset pumpdown time chamber being carried out the operation of bleeding, triggers the force value detecting unit.
12. device as claimed in claim 10 is characterized in that, also comprises:
Second vacuum unit is used for chamber is carried out the operation of bleeding;
Said force value detecting unit comprises:
Pressure perception subelement is used for the force value in the real-time detection chambers.
13. like claim 11 or 12 described devices, it is characterized in that the scope of said set pressure value comprises lower value and higher limit, described device also comprises:
Inflation unit is used for when said cavity indoor pressure value is lower than lower value, after the charge operation of execution certain hour, and returning pressure value detecting unit;
The unit of bleeding is used for when said cavity indoor pressure value is higher than higher limit, after continuing to carry out the operation of bleeding of certain hour, and returning pressure value detecting unit.
14. device as claimed in claim 11 is characterized in that, said first vacuum unit comprises:
Vacuum pump promotor unit is used for the open vacuum pump;
Inflation valve is closed subelement, is used to close the inflation valve of chamber;
Extraction valve is opened subelement, is used to open the extraction valve of chamber;
First subelement of bleeding is used to carry out the operation of bleeding of Preset Time.
15. device as claimed in claim 13 is characterized in that, said inflation unit comprises:
Inflation valve is opened subelement, is used to open the inflation valve of chamber;
Extraction valve is closed subelement, is used to close the extraction valve of chamber;
Inflate subelement in limited time, be used to carry out the charge operation of certain hour;
The said unit of bleeding comprises:
Second subelement of bleeding is used for opening at vacuum pump, and the inflation valve of chamber is closed, and, under the state that the extraction valve of chamber is opened, proceed the operation of bleeding of certain hour.
16. device as claimed in claim 15 is characterized in that, also comprises:
The inflation valve closing unit is used for after starting heating operation, when the inflation valve of chamber is opened, closing inflation valve;
The extraction valve closing unit is used for after starting heating operation, when the extraction valve of chamber is opened, closing extraction valve.
17. device as claimed in claim 16 is characterized in that, also comprises:
Add the hot standby unit, be used to wait for that Heating temperature reaches preset value after, finish heating operation when front chamber.
18. device as claimed in claim 17 is characterized in that, said apparatus for production line is a PECVD equipment, and the certain hour of said wait is 0.1 second.
19. a method that is controlled to pre-heating technique in the film device is characterized in that, comprising:
Support plate is imported in the preheating cavity;
Preheating cavity is carried out the operation of bleeding;
Obtain the force value in the preheating cavity;
Judge said preheating cavity internal pressure value whether in the scope of set pressure value, the scope of said set pressure value comprises lower value and higher limit; If then start heating operation; If not and said force value be lower than lower value, then carry out the charge operation of certain hour after, return the said step of obtaining preheating cavity internal pressure value; If not and said force value be higher than higher limit, then continue to carry out the operation of bleeding of certain hour after, return the said step of obtaining preheating cavity internal pressure value;
After waiting for that Heating temperature reaches preset value, stop heating operation;
Support plate is spread out of preheating cavity, import process cavity into;
Wherein, the scope of said set pressure value comprises lower value and higher limit, and the lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa.
20. a device that is controlled to pre-heating technique in the film device is characterized in that, comprising:
Support plate imports the unit into, is used for importing support plate into preheating cavity;
Vacuum unit is used for preheating cavity is carried out the operation of bleeding;
The force value detecting unit is used to obtain the force value in the preheating cavity;
The force value judging unit; Be used to judge that said preheating cavity internal pressure value is whether in the scope of set pressure value; The scope of said set pressure value comprises lower value and higher limit, and the lower value of the scope of said set pressure value when 100V supplies power is 100Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 220V supplies power is 200Pa, and higher limit is 1000Pa; Perhaps, the lower value of the scope of said set pressure value when 380V supplies power is 500Pa, and higher limit is 1000Pa; If then trigger the heating starting unit; If not and said preheating cavity in force value be lower than lower value, then trigger inflation unit; If not and the force value in the said preheating cavity be higher than higher limit, then trigger the unit of bleeding;
The heating starting unit; Be used to start heating operation, wherein, the scope of said set pressure value is based on paschen's law and draws; Improving gap breakdown voltage, and when pressure-controlling is in the scope of said set pressure value, start said heating operation through the indoor pressure of control chamber;
Inflation unit after being used to carry out the charge operation of certain hour, is returned said force value detecting unit;
The unit of bleeding after being used to continue to carry out the operation of bleeding of certain hour, returns said force value detecting unit;
Add the hot standby unit, be used to wait for that Heating temperature reaches preset value after, stop heating operation;
Support plate spreads out of the unit, is used for support plate is spread out of preheating cavity, imports process cavity into.
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| CN200910241956A CN101748393B (en) | 2009-12-16 | 2009-12-16 | Heating control method of production line equipment and device |
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| CN102560435A (en) * | 2010-12-15 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Heating control method, device, system and PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
| CN103853055B (en) * | 2012-11-28 | 2016-12-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | The real-time control method of reaction chamber baking and device |
| CN104746033B (en) * | 2013-12-30 | 2017-02-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Vacuuming control method and system of ITO-PVD equipment |
| CN103906336A (en) * | 2014-04-14 | 2014-07-02 | 中国科学院工程热物理研究所 | Gas discharge plasma generating device with adjustable pressure and temperature |
| CN106292786A (en) * | 2015-06-02 | 2017-01-04 | 英属开曼群岛商精曜有限公司 | Voltage reduction method and decompression device thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1944308A (en) * | 2006-10-31 | 2007-04-11 | 浙江大学 | Method for depositing hydrogenized non-crystal silicon carbon alloy film on glass substrate |
| CN201157906Y (en) * | 2008-03-03 | 2008-12-03 | 山东大学 | Heat pressed sintering furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1944308A (en) * | 2006-10-31 | 2007-04-11 | 浙江大学 | Method for depositing hydrogenized non-crystal silicon carbon alloy film on glass substrate |
| CN201157906Y (en) * | 2008-03-03 | 2008-12-03 | 山东大学 | Heat pressed sintering furnace |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016, building 2, block M5, East Jiuxianqiao Road, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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