CN101730613A - Carrying device and use the vacuum treatment installation of this carrying device - Google Patents

Carrying device and use the vacuum treatment installation of this carrying device Download PDF

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Publication number
CN101730613A
CN101730613A CN200880016319A CN200880016319A CN101730613A CN 101730613 A CN101730613 A CN 101730613A CN 200880016319 A CN200880016319 A CN 200880016319A CN 200880016319 A CN200880016319 A CN 200880016319A CN 101730613 A CN101730613 A CN 101730613A
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CN
China
Prior art keywords
arm
connecting rod
carrying device
rotated
lead arm
Prior art date
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Granted
Application number
CN200880016319A
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Chinese (zh)
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CN101730613B (en
Inventor
南展史
藤村和广
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Ulvac Inc
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Ulvac Inc
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Publication date
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Publication of CN101730613A publication Critical patent/CN101730613A/en
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Publication of CN101730613B publication Critical patent/CN101730613B/en
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Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0258—Two-dimensional joints
    • B25J17/0266—Two-dimensional joints comprising more than two actuating or connecting rods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B25J9/0045—Programme-controlled manipulators having parallel kinematics with kinematics chains having a rotary joint at the base
    • B25J9/0048—Programme-controlled manipulators having parallel kinematics with kinematics chains having a rotary joint at the base with kinematics chains of the type rotary-rotary-rotary
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B25J9/0072—Programme-controlled manipulators having parallel kinematics of the hybrid type, i.e. having different kinematics chains
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

The invention provides a kind of carrying device that does not produce the pollution problems of vacuum plant of causing because of lubricating grease or dust etc. etc., and provide a kind of device that area is set is little and can easily carry out the carrying device of corrosion-resistance treatment with existing technology.Carrying device of the present invention (1) has: conveying unit (21), support and conveyance transport object (20); Connecting rod (16) is used for the power from device body (2) is conveyed to conveying unit (21), and this conveying unit (21) is moved to the horizontal plane direction; Guide (30) is provided between device body portion (2) and the conveying unit (21), is used to guide the moving direction of conveying unit (21).Guide (30) has axle the 1st and the 2nd lead arm (31,32) that connects, the 1st lead arm (31) of one end side of this guide (30) is installed in device body portion (2), and the 2nd lead arm (32) of the other end side is installed in conveying unit (21).The the 1st and the 2nd lead arm (31,32) constitutes respectively and is rotated along vertical direction.

Description

Carrying device and use the vacuum treatment installation of this carrying device
Technical field
The present invention relates to for example carrying device of the processing object substrate of conveyance semiconductor crystal wafer etc., relate in particular to and be suitable for the processing object substrate being carried out handle the carrying device of the turnover of object substrate in the vacuum treatment installation that possesses one or more deposition chamber of various processing processing.
Background technology
In the past, as this kind carrying device, for example be disclosed in the conventional example of TOHKEMY 2005-125479 communique.
Fig. 8 (a)～(c) shows the basic comprising of prior art.
Shown in Fig. 8 (a)～(c), in this carrying device 200, but on the turntable 201 of along continuous straight runs rotation, be fixed with the guide member 202 of strip.And an end of the 1st arm 203 being under the state that is rotated of center with the fulcrum 203a of the base portion 202a that connects guide member 202 and turntable 201, is installed on the CD-ROM drive motor (not shown).
On the extension 202b of guide member 202, be provided with line slideway (linear guide) 204, constitute moving-member 205 and move in the other direction to arrow directions X or its along this line slideway 204.And, at the front end of moving-member 205, the conveyance platform 206 of the transport object 300 that is used for mounting wafer or glass substrate for example is installed.
And, in the other end of above-mentioned the 1st arm 203, an end of axle Zhi Youdi 2 arms 207, and its other end axle props up on moving-member 205, connects via the base portion 202a and the moving-member 205 of the 1st and the 2nd arm 203,207 with guide member 202.
Under the situation of the prior art with this kind formation, if utilize expanding-contracting action to make 203 rotations of the 1st arm, then the 2nd arm 207 rotates along with this action, and thus, moving-member 205 moves along the extension 202b straight line of line slideway 204.
On the other hand, be under the state of its punctured position at the 1st and the 2nd arm 203,207, the CD-ROM drive motor that does not show among the figure is moved, rotation turntable 201 is rotated action thus.
Because in the prior art, it constitutes by line slideway 204 and guide member 202 and supports the weight of the transport object 300 that comprises turntable 201 and the weight of moving-member 205, thereby the 1st and the 2nd arm 203,207 adopt the rigid parts that can make the degree that moving-member 205 moves on line slideway 204, can not be only support the weight of transport object 300 etc. with the 1st and the 2nd arm 203,207.
As a result, in the prior art, under the situation that the weight of transport object 300 increases, line slideway portion (the 1st and the 2nd arm 203,207 and moving-member 205) can't successfully move, exist transport object 300 can't conveyance to the problem of tram.
At this kind problem, in conventional device, the loading of the lubricant (lubricating grease) of the slipper by increasing line slideway portion perhaps adopts larger sized line slideway to overcome.But, if increase the loading of lubricant, then especially in vacuum plant, use under the situation of carrying device, in the vacuum plant or transport object by unnecessary grease contaminated.In addition, if line slideway becomes bigger size, then the weight of device integral body becomes big, must strengthen the power of this motor that partly drives, thereby the whole change of device is big.
And, in the existing carrying device 200 shown in Fig. 8 (a)～(c), the extension 202b of guide member 202 and the line slideway of top 204 thereof are the shape that projects to the place ahead of turntable 201, thereby, even for example moving-member 205 for be positioned at turntable 201 directly over state, also can't make the front position of the radius of turn of device less than extension 202b.So the area (the track area of coverage (footprint)) that is provided with of device does not diminish.
Other prior art for example is disclosed in TOHKEMY 2001-185596, spy and opens 2002-362738, spy and open 2003-209155, spy and open that 2004-323165, spy open 2004-130459, the spy opens 2005-12139 etc.
In these existing apparatus, by using line slideway the action of parallel rod arm mechanism " going up bracket " is communicated to " following bracket ", thus the action of " ancon " of control parallel link arms.But, because under the situation that carrying arm is applied bigger power or under the big situation of the weight change of transport object, line slideway portion can successfully not move, thereby carrying arm can successfully not move, thus exist transport object can't conveyance to the problem of tram.
At this kind problem, also identical with above-mentioned prior art in conventional device, the loading of the lubricant (lubricating grease) of the slipper by increasing line slideway portion perhaps adopts larger sized line slideway to overcome.But, if increase the loading of lubricant, then especially in vacuum plant, use under the situation of carrying device, in the vacuum plant or transport object by unnecessary grease contaminated.In addition, if line slideway becomes bigger size, then the weight of device integral body becomes big, must strengthen the power of this motor that partly drives, thereby the whole change of device is big.
Sometimes in the corrosive gas atmosphere, use above-mentioned prior art and other one type of prior art syringe.In such cases, though parts surface is carried out anti-corrosion processing, so that the component parts of device does not corrode, but the technology that is used for line slideway is carried out anti-corrosion processing may not be established in present stage, as a result, exist the expense that is used to handle and increase the problem that the cost of manufacture of device also improves.
Patent documentation 1: TOHKEMY 2005-125479 communique
Patent documentation 2: TOHKEMY 2001-185596 communique
Patent documentation 3: TOHKEMY 2002-362738 communique
Patent documentation 4: TOHKEMY 2003-209155 communique
Patent documentation 5: TOHKEMY 2004-323165 communique
Patent documentation 6: TOHKEMY 2004-130459 communique
Patent documentation 7: TOHKEMY 2005-12139 communique
Summary of the invention
The present invention proposes for the problem that solves this kind prior art, and its purpose is, a kind of carrying device that does not produce pollution problems such as lubricated fat such as vacuum plant is provided.
In addition, other purpose of the present invention is, provide a kind of install whole also not quite and especially device the little carrying device of area (the track area of coverage) is set.
And other purpose of the present invention is, a kind of carrying device that can easily implement anti-corrosion processing with existing technology to rotary part (bearing etc.) is provided.
The present invention who proposes in order to reach above-mentioned purpose has: conveying unit, support and the conveyance transport object; Power is passed on mechanism, is used for the power from the device body is conveyed to above-mentioned conveying unit, and this conveying unit is moved to the direction of intersecting with respect to reference direction; And guide, be provided between said apparatus body and the above-mentioned conveying unit, be used to guide the moving direction of above-mentioned conveying unit, wherein, above-mentioned guide constitutes, and has an axle a plurality of lead arm that connect, and this each lead arm is along comprising that the direction of the composition of said reference direction is rotated.
In foregoing invention, in the lead arm of above-mentioned guide of the present invention, the lead arm of an end side of this guide is installed in the said apparatus body, and the lead arm of the other end side is installed in above-mentioned conveying unit.
In foregoing invention, above-mentioned guide of the present invention has the 1st lead arm and the 2nd lead arm, one end of above-mentioned the 1st lead arm is being propped up at the said apparatus body by axle along the state that vertical direction is rotated, and, one end of above-mentioned the 2nd lead arm is propped up the other end in above-mentioned the 1st lead arm with the state that can be rotated along vertical direction by axle, and the other end of above-mentioned the 2nd lead arm is being propped up in above-mentioned conveying unit by axle along the state that vertical direction is rotated.
In foregoing invention, above-mentioned power of the present invention passes on mechanism to have actuating arm and slave arm, one end of above-mentioned actuating arm is can be fixed on the driving shaft of said apparatus body along the state that the horizontal plane direction is rotated, and, the other end at this actuating arm, one end of above-mentioned slave arm is can being propped up by axle along the state that the horizontal plane direction is rotated, and the other end of above-mentioned slave arm is being propped up in above-mentioned conveying unit by axle along the state that the horizontal plane direction is rotated.
In foregoing invention, above-mentioned power of the present invention passes on mechanism to possess: the driving side parallelogram linkage has above-mentioned actuating arm; And the slave end parallelogram linkage, use this driving side parallelogram linkage regulation connecting rod and constitute.
In foregoing invention, above-mentioned guide of the present invention constitutes, and is connected in above-mentioned power and passes on mechanism, limits the relative action of above-mentioned driving side parallelogram linkage and above-mentioned slave end parallelogram linkage.
In foregoing invention, above-mentioned power of the present invention passes on the device body portion side end of mechanism to be installed on the rotating part that is arranged on the said apparatus body.
The present invention is a kind of vacuum treatment installation, possesses: carrying room, have above-mentioned arbitrary carrying device, and a vacuum processing chamber, and constitute with above-mentioned carrying room and be communicated with, use above-mentioned carrying device to join the processing object.
Under situation of the present invention, possesses guide to replace the line slideway of prior art, this guide has an axle a plurality of lead arm that connect, and constitute each lead arm along comprising that the direction of the composition (for example composition of vertical direction) of reference direction is rotated, thereby device integral body is also constant big, especially Zhuan Zhi the area that is provided with diminishes, and in addition, can easily implement anti-corrosion processing with existing technology.In addition, can be along reference direction, especially vertical direction applies power to guide.
In addition,, because the resistance that does not exist the friction as prior art to produce, thereby pass on mechanism successfully to move by the power that arm etc. constitutes because of the slipper of line slideway according to the present invention, transport object by conveyance to the tram.
In addition owing to needn't as prior art, use large-sized line slideway, thereby especially can provide rotation with CD-ROM drive motor the little and also not high carrying device of cost of manufacture.
And, in vacuum plant, use under the situation of carrying device of the present invention, sometimes can not use lubricating grease (oil) as lubricating oil, in this case, use the lubricant (kollag) of dry type.Though use the lubricant of kollag as line slideway now, anti-loading is little and the life-span is also short.
But, use the technology of the bearing of kollag to establish more than the technology of line slideway, anti-loading is big and the life-span is also long.
Because carrying device of the present invention only is made of rotation key element (coming a structure that props up with bearing), thereby must use under the situation of dry lube (kollag), the dry type bearing of establishing on can operation technique, can provide and not pollute transport object or vacuum environment, the carrying device that anti-loading is big and the life-span is also long.
In the present invention, about guide, the lead arm of one end side of this guide is installed in device body portion, and, the lead arm of the other end side is installed under the situation of conveying unit, especially have the 1st lead arm and the 2nd lead arm at guide, one end of above-mentioned the 1st lead arm is being propped up at the said apparatus body by axle along the state that vertical direction is rotated, and, one end of above-mentioned the 2nd lead arm is propped up the other end in above-mentioned the 1st lead arm with the state that can be rotated along vertical direction by axle, and, the other end of above-mentioned the 2nd lead arm is being propped up in above-mentioned conveying unit by axle along the state that vertical direction is rotated, in this case, owing to the power that can further reduce to apply along the vertical direction of guide, and, can simplify the formation of guide, thereby the small-sized carrying device of conveyance transport object more sleekly can be provided.
In the present invention, power passes on mechanism to have actuating arm and slave arm, one end of above-mentioned actuating arm is can be fixed on the driving shaft of said apparatus body along the state that the horizontal plane direction is rotated, and, one end of above-mentioned slave arm is propped up the other end at above-mentioned actuating arm with the state that can be rotated along the horizontal plane direction by axle, and, the other end of above-mentioned slave arm is being propped up in above-mentioned conveying unit by axle along the state that the horizontal plane direction is rotated, in this case, though for example in the carrying device of frog leg (frogleg) type arm mechanism, use gear as limiting mechanism in conveying unit, but in the present invention, can provide a kind of carrying device that does not need the gear of conveying unit and do not have the pollution of the company's of the removing thing (for example wafer or glass substrate) that produces because of dust from gear.
In the present invention, above-mentioned power is passed on mechanism, and possess: the driving side parallelogram linkage has above-mentioned actuating arm; And slave end parallelogram linkage, use this driving side parallelogram linkage regulation connecting rod and constitute, in this case, can utilize 4 arms to support the weight of transport object and conveying unit, thereby thickness and the compact carrying device that does not increase arm can be provided.In addition, owing to utilize 4 arms to support the weight of transport object and conveying unit, thereby can reduce to be applied to the power of arm connection part (joint portion), the carrying device of the mobile smoothness of connection part (joint portion) can be provided.
In this case, if above-mentioned guide constitutes and is connected in above-mentioned power and passes on mechanism, limit the relative action of above-mentioned driving side parallelogram linkage and above-mentioned slave end parallelogram linkage, so, for example, in the carrying device of existing parallelogram linkage type arm No. 2531261, Japan Patent (etc.), constitute the relative action that limits driving side parallelogram linkage and slave end parallelogram linkage by line slideway or gear, but in the present invention, do not need to limit the line slideway or the gear of usefulness.So, the carrying device that does not exist because of the pollution of the transport object (for example wafer or glass substrate) that produces from the oil of the lubricant (lubricating grease) of the slipper of line slideway or from the dust of gear can be provided.
In the present invention, pass on the device body portion side end of mechanism to be installed under the situation of the rotating part that is located at the said apparatus body at above-mentioned power, except above-mentioned effect, in the carrying device of the conveyance direction that can provide rotation to change transport object, owing to do not need to be used for the guide member of the existing line slideway of support fixation, thereby can make the CD-ROM drive motor miniaturization of rotating usefulness, the result can provide the carrying device of small-sized and low cost of manufacture.
On the other hand, according to vacuum treatment installation, wherein this vacuum treatment installation possesses: carrying room has carrying device of the present invention; And vacuum processing chamber, constitute connection at above-mentioned carrying room, use above-mentioned carrying device to join the processing object, thereby the small-sized and difficult vacuum treatment installation that is polluted by dust or wet goods can be provided.
According to the present invention, can provide the carrying device of the pollution problems that does not produce vacuum plant of causing because of lubricating grease or dust etc. etc.
In addition, according to the present invention, can provide a kind of device integral body also constant big, especially Zhuan Zhi the area that is provided with reduces, and can easily implement the carrying device of anti-corrosion processing with existing technology.In addition, can provide a kind of carrying device that can drive by the little motor of driving force.
As a result,, can provide small-sized and difficult and be dyed, the little vacuum treatment installation of area is set by dust or greasy dirt according to the present invention.
Description of drawings
Fig. 1 (a)～(c) shows that the summary of the embodiment of carrying device of the present invention constitutes, and Fig. 1 (a) is a vertical view, and Fig. 1 (b) is a side view, and Fig. 1 (c) is an internal structure figure.
Fig. 2 be show the guide in the same carrying device the installation site overlook key diagram.
Fig. 3 (a)～(c) is the key diagram that shows the action of present embodiment.
The summary that Fig. 4 (a) (b) shows other embodiments of carrying device of the present invention constitutes, and Fig. 4 (a) is a vertical view, and Fig. 4 (b) is a front view.
Fig. 5 is the vertical view that shows the main part of same carrying device.
Fig. 6 is the vertical view that the summary of other embodiment of demonstration carrying device of the present invention constitutes.
Fig. 7 is the vertical view of formation that roughly shows the embodiment of the vacuum treatment installation that possesses carrying device of the present invention.
Fig. 8 (a)～(c) shows that the summary of the carrying device of prior art constitutes, and Fig. 8 (a) is a vertical view, and Fig. 8 (b) faces circle, and Fig. 8 (c) is an internal structure figure.
List of parts
1: carrying device
2: device body portion
3: casing
4: turntable
4a: top
6: CD-ROM drive motor
9: CD-ROM drive motor
10: rotating shaft
13: the 1 arms
14: the 2 arms
16: connecting rod (power is passed on mechanism)
17: moving-member
19: the conveyance platform
20: transport object
30: guide
31: the 1 lead arm
32 (32a, 32b): the 2nd lead arm
34,35,37: fulcrum
36: pillar
The specific embodiment
Below, with reference to accompanying drawing, explain preferred implementation of the present invention.
Fig. 1 (a)～(c) shows that the summary of the embodiment of carrying device of the present invention constitutes, and Fig. 1 (a) is a vertical view, and Fig. 1 (b) is a side view, and Fig. 1 (c) is an internal structure figure.In addition, Fig. 2 be show the guide in the same carrying device the installation site overlook key diagram.
Shown in Fig. 1 (a)～(c), the carrying device 1 of present embodiment constitutes the casing 3 with the drum that becomes device body portion 2, contains turntable 4 in this casing 3.
Turntable 4 forms drum, is installed in the inwall of casing 3 with rotatable state via bearing 5.
Be equipped with CD-ROM drive motor 6 in the bottom surface of casing 3, the front end of rotating shaft 7 that is located at the top of this CD-ROM drive motor 6 is fixed on the turntable 4.And, constitute by CD-ROM drive motor 6 is moved, be that center (clockwise direction or counter clockwise direction) is rotated thereby make turntable 4 rotating shaft 7 with vertical direction in casing 3.
In addition, the space between turntable 4 and casing 3 inwalls is spaced apart in the mode that keeps vacuum state by axle envelope 8.
Be provided with CD-ROM drive motor 9 in the inside of turntable 4, the rotating shaft 10 of this CD-ROM drive motor 9 is supported by bearing 11, and its front end constitutes, and 4a projects to vertical top above turntable 4.
In addition, the envelope of the spatial axes between the rotating shaft 10 of CD-ROM drive motor 9 and turntable 4 inwalls 12 is spaced apart in the mode that keeps vacuum state.
And, front end at the rotating shaft 10 of this CD-ROM drive motor 9, be fixed with an end of the 1st arm (actuating arm) 13 of linearity, move, thereby the 1st arm 13 is rotated along the horizontal plane direction around this rotating shaft 10 by making CD-ROM drive motor 9 with specific length.
The other end at the 1st arm 13, identical the 2nd arm (slave arm) 14 of axle Zhi Youyu the 1st arm 13, the 2nd arm can be that the center is rotated along the horizontal plane direction with fulcrum 15, constitutes the connecting rod (power is passed on mechanism) 16 that can stretch by the 1st and the 2nd arm 13,14.
In the other end of the 2nd arm 14, axle props up for example flat moving-member 17, and this moving-member can be that the center is rotated along the horizontal plane direction with fulcrum 18.At arm prolonging direction (arrow directions X among the figure) the place ahead side edge part of this moving-member 17, be equipped with and be used for for example conveyance platform 19 of the transport object 20 of wafer or glass substrate etc. of mounting.So having constituted can parallel (level) mobile conveying unit 21 by this moving-member 17 and conveyance platform 19.
And in the present embodiment, the top 4a of turntable 4 is connected by guide 30 with moving-member 17.
This guide 30 has the lead arm (under the situation of present embodiment, being two the 1st and the 2nd lead arm 31,32) of an axle a plurality of linearity that connect.
At this, the 1st lead arm 31 constitutes the one end is located at the top 4a of turntable 4 by axle Zhi Yu support component 33, is the center with fulcrum 34, is rotated along vertical direction.
In the other end of the 1st lead arm 31, axle props up a pair of identical the 2nd lead arm 32 (32a, 32b) that is configured to clip the 1st lead arm 31 relatively, and the 2nd lead arm can be that the center is rotated along vertical direction with fulcrum 35.
And the other end of the 2nd lead arm 32a, 32b is propped up by axle in the mode of the pillar 36 that clips the arm prolonging direction rear side edge part that is installed in moving-member 17, and can be that the center is rotated along vertical direction with fulcrum 37.
These 3 fulcrums 34,35,37 are made of bearing respectively, and the moving direction (arrow directions X or rightabout among the figure) that each rotary middle spindle is adapted to moving-member 17 meets at right angles and level.
Thus, the movably scope (direction) of the 1st of the guide in the present embodiment 30 the and the 2nd lead arm 31,32 only limits to be parallel to the direction of X-direction.
In addition, though do not limit especially in the present invention, but the viewpoint of stability from action, as shown in Figure 2,4a on turntable 4, can be with respect to the rotating shaft 10 of CD-ROM drive motor 9 of rotation usefulness, clip rotary middle spindle O and with the position configuration of the fulcrum 34 of the 2nd lead arm 32 by on the straight line A of rotary middle spindle O.
In addition, in the present embodiment, the 1st lead arm 13 and the 2nd lead arm 14 adopt the rigid parts of the weight of the weight that can support the conveyance platform 19 that comprises transport object 20 and moving-member 17.Thus, power just can not be applied on the vertical direction of guide 30.
Fig. 3 (a)～(c) is the key diagram that shows the action of present embodiment.
Under the situation of present embodiment with this kind formation, in expanding-contracting action, if above-mentioned CD-ROM drive motor 9 is moved, then the 1st lead arm 13 is rotated along the horizontal plane direction around rotating shaft 10, the 2nd lead arm 14 is conveyed to power moving-member 17 thus along with this action is that the center is rotated along the horizontal plane direction with fulcrum 15,18.
At this, in the present embodiment, as mentioned above, because the movable range of the 1st and the 2nd lead arm 31,32 of guide 30 only limits to be parallel to the direction of X-direction, thereby shown in Fig. 3 (a)～(c), moving-member 17 moves along X-direction (or rightabout) is parallel.
In addition, Fig. 3 (a) shows punctured position, and Fig. 3 (b) shows the centre position, and Fig. 3 (c) shows extended position.
On the other hand, under the state (Fig. 3 (a)) that is in this punctured position at moving-member 17, CD-ROM drive motor 9 is driven, make turntable 4 rotations, thereby be rotated action.
As previously discussed, according to present embodiment, because constituting the 1st and the 2nd lead arm 31,32 of guide 30 is propped up by axle in the mode that is rotated along vertical direction respectively, thereby device integral body is also constant big, especially Zhuan Zhi the area that is provided with diminishes, and can easily implement anti-corrosion processing with existing technology.In addition, power is not applied on the vertical direction of guide 30.In addition, because not as the resistance that produces of the friction because of the slipper of line slideway of prior art, thereby the connecting rod 16 that is made of the 1st and the 2nd arm 13,14 is successfully mobile, transport object 20 by conveyance to the tram.
In addition, owing to needn't as prior art, use large-sized line slideway, thereby the CD-ROM drive motor 9 little and also not high carrying devices 1 of cost of manufacture of rotation usefulness especially can be provided.
And, the carrying device of present embodiment is owing to only be made of rotation key element (coming a formation of propping up with bearing), thereby must use under the situation of dry lube (kollag), the dry type bearing of having established on can operation technique, do not pollute transport object 20 or vacuum environment, the carrying device 1 that anti-loading is big and the life-span is also long can be provided.
The summary that Fig. 4 (a) (b) shows other embodiments of carrying device of the present invention constitutes, and Fig. 4 (a) is a vertical view, and Fig. 4 (b) is a front view.In addition, Fig. 5 be show same carrying device major part overlook circle.
Below, to enclosing identical symbol, omit its detailed explanation with the corresponding part of above-mentioned embodiment.
As Fig. 4 (a) (b) shown in, the carrying device 50 of present embodiment constitutes the casing 3 with the drum that becomes above-mentioned identical device body portion 2, contains turntable 4 in this casing 3.
Turntable 4 forms drum, is installed in the inwall of casing 3 with rotatable state via the bearing that does not show among the figure.
Be provided with among the figure CD-ROM drive motor that does not show in turntable 4, the front end of the rotating shaft 51 of this CD-ROM drive motor constitutes that 4a projects to vertical top above turntable 4.
In addition, under the situation of present embodiment, the rotating shaft 51 of CD-ROM drive motor is located at the position of leaving predetermined distance with respect to the pivot of turntable 4 at the rear side with respect to substrate transferring direction (arrow Y direction among the figure).
At the front end of this driving shaft 51, be fixed with an end of the 1st underarm 61 of linearity with specific length, constitute the 1st underarm 61 thus and be rotated along the horizontal plane direction.
In addition, 4a on turntable 4 can be provided with in the mode of giving prominence to along vertical direction along the driven shaft 52 that the horizontal plane direction is rotated.
Under the situation of present embodiment, this driven shaft 52 is located at the position of leaving predetermined distance with respect to above-mentioned driving shaft 51 at the front side with respect to substrate transferring direction (arrow Y direction among the figure).In addition, in this example, driving shaft 51 and driven shaft 52 are located on the straight line by the diameter of turntable 4.
At the front end of driven shaft 52, for example be fixed with have the length of support identical with the 1st underarm 61 from linearity the 2nd underarm an end, the 2nd underarm 62 can rotate along the horizontal plane direction thus.
And the other end of the other end of the 1st underarm 61 and the 2nd underarm 62 is connected on for example tabular engagement link parts 63.
Shown in Fig. 4 (b), in the present embodiment, be provided with the 1st and the 2nd fulcrum 64,65 in the mode that connects engagement link parts 63, position at the downside of the 1st fulcrum 64, the other end of the 1st underarm 61 is rotatably propped up by axle, and at the position of the downside of the 2nd fulcrum 65, the other end of the 2nd underarm 62 is rotatably propped up by axle.
And, by the 1st and the 2nd underarm 61,62, the 1st and the 2nd fulcrum 64,65 of engagement link parts 63, the driving shaft 51 of turntable 4 and driven shaft 52 constitute the 1st (driving side) parallelogram linkage R1.
And, at the position of the upside of the 1st fulcrum 64 of engagement link parts 63, length of support from the 1st upper arm 71 of the linearity longer than the 1st and the 2nd underarm 61,62 therein belly propped up by axle, the 1st upper arm can be rotated along the horizontal plane direction.
One end of the 1st upper arm 71 is for example rotatably propped up on tabular moving-member 73 by axle.
This moving-member 73, position at substrate transferring direction front side, the conveyance platform 76 that is used to support transport object 20 is installed, constitute conveying unit 77, in the present embodiment, an end of the 1st upper arm 71 is according to can being that the center is propped up by axle along the mode that the horizontal plane direction is rotated with the following fulcrum 74 that is located at moving-member 73.At this, the distance of the fulcrum 64 of the 1st upper arm 71 and 74 of fulcrums (length of support from) constitutes length of support with the 1st and the 2nd above-mentioned underarm 61,62 from identical.
And an end of the 1st upper arm 71 (leading section of extension 71a) is connected on the guide 80 described later.
On the other hand, in the end of the upside of the 2nd fulcrum 65 of engagement link parts 63, axle has an end of the 2nd upper arm 72 of linearity, and this end can be rotated along the horizontal plane direction.Under the situation of present embodiment, the 2nd upper arm 72 have the length of support identical with above-mentioned the 1st and the 2nd underarm 61,62 from.
In addition, the other end of the 2nd upper arm 72 is according to can being that the center is propped up by axle along the mode that the horizontal plane direction is rotated with the following fulcrum 75 that is located at above-mentioned moving-member 73.
And, by the 1st and the 2nd underarm 71,72, engagement link parts 63, the fulcrum 74,75 of moving-member 73 constitutes the 2nd (slave end) parallelogram linkage R2.
In the present embodiment, the 1st has identical formation with the 2nd parallelogram linkage R1, R2, is connected by total respectively engagement link parts 63, moves.
And, in the present embodiment, be provided with the guide 80 of following explanation.
The guide 80 of present embodiment is made of the base component 81 and the guiding linkage 90 of L word shape.
At this, the body 82 of the linearity of base component 81 and forming as one with respect to the upwardly extending connection part 83 in the side of these body 82 orthogonals.
And the end of the connection part 83 of base component 81 is can be propped up by axle along the mode that the horizontal plane direction is rotated with respect to the following fulcrum 84 that is located at the 2nd underarm 62.
On the other hand, the end of the body 82 of base component 81 connects with the guiding linkage 90 with following formation.
At this, guiding linkage 90 is made of the 1st lead arm the 91, the 2nd lead arm the 92, the 3rd lead arm 93 of linearity respectively.
The 1st lead arm 91 is made by bar-shaped parts, constitutes under the state of a pair of support component 85 (85a, 85b) of one end on the end that clips the body 82 of being located at base component 81, and be that the center is rotated along vertical direction with fulcrum 94.
The 2nd lead arm 92 is made by a pair of identical parts of the other end that is configured to clip the 1st lead arm 91 relatively, and the one end is according to can being that the center is propped up by axle along the mode that vertical direction is rotated with fulcrum 95.
On the other hand, the 3rd lead arm 93 is made by bar-shaped parts, constitutes the one end under the state that is clipped by the 2nd lead arm 92, is that the center is rotated along vertical direction with fulcrum 96.
And the other end of the 3rd lead arm 93 is according to can being that the center is propped up by axle along the mode that the horizontal plane direction is rotated with the fulcrum 97 of the bottom of the end of the extension 71a that is located at the 1st upper arm 71.
3 fulcrums 94,95,96 of this guiding linkage 90 are made of bearing respectively, and usually identical with the moving direction (arrow Y direction or rightabout among the figure) of moving-member 73 and mode level is set the length of extension 71a of position, the 1st upper arm 71 of the shape of base component 81 of L word shape and big or small, fulcrum 84 with each rotary middle spindle.
And, by this kind formation, make the movably scope (direction) of the 1st～the 3rd lead arm 91,92,93 of the guiding linkage 90 in the present embodiment only limit to be parallel to the direction of X-direction.
And in the present embodiment, the direction of rotation that constitutes the 1st parallelogram linkage R1 and the 2nd parallelogram linkage R2 is opposite, and, equate with Y direction angulation.
Under the situation of present embodiment with this kind formation, in expanding-contracting action, if driving shaft 51 is moved, then the 1st underarm 61 around driving shaft 51 along for example clockwise direction rotation of horizontal plane direction, the 2nd underarm 62 is along with this action is rotated along the horizontal plane direction around driven shaft 52, thereby the engagement link parts 63 of the 1st parallelogram linkage R1 keep the state parallel with the Y direction on one side, one side along continuous straight runs move.
At this, in the present embodiment, the movable range of the 1st of guide 90～the 3rd lead arm 91,92,93 only limits to be parallel to the direction of X-direction, and the 2nd parallelogram linkage R2 is rotated in opposite direction and in the mode that equates with Y direction angulation with respect to the 1st parallelogram linkage R1, thereby by driving shaft 51 is moved, thereby moving-member 73 is moved along Y direction (or rightabout) is parallel.
On the other hand,, make turntable 4 rotations, thereby carry out the spinning movement in the present embodiment by being under the state of this punctured position at moving-member 73.
According to above-described present embodiment, same with above-mentioned embodiment, can provide small-sized and be difficult for the vacuum treatment installation that lubricated fat or dust etc. pollute.
And according to present embodiment, especially the guiding linkage 90 owing to guide 80 is made of a plurality of lead arm 91～93, thereby can easily implement anti-corrosion processing with existing technology.
Fig. 6 is the vertical view that shows that the summary of other embodiment of carrying device of the present invention constitutes, below to enclosing identical symbol with the corresponding part of above-mentioned embodiment, omit its detailed explanation.
As shown in Figure 6, the carrying device 60 of present embodiment is combined in above-mentioned guiding linkage 90 in the transport mechanism 100 of following explanation.
At first, this transport mechanism 100 its 1st parallelogram connection-rod group 101 and the 2nd parallelogram connection-rod group 102 are arranged.
The 1st parallelogram connection-rod group 101 has fulcrum A～D, is made of connecting rod 110, connecting rod 111, connecting rod 112, connecting rod 113.At this, connecting rod 111 and connecting rod 113 use the parts than connecting rod 110 and connecting rod 112 length.
On the other hand, the 2nd parallelogram connection-rod group 102 is used the total connecting rod 110 at fulcrum A, the D of the 1st parallelogram connection-rod group, and connecting rod 114, connecting rod 115, the connecting rod 116 identical with connecting rod 110 respectively by length constitute.
The total connecting rod 110 of the 1st parallelogram connection-rod group 101 and the 2nd parallelogram connection-rod group 102 is according to can being that install along the mode that the horizontal plane direction is rotated at the center with the fulcrum A and the fulcrum D at its two ends, in addition, in the 1st parallelogram connection-rod group the connecting rod 112 relative with connecting rod 110 according to can being that install along the mode that the horizontal plane direction is rotated at the center with the fulcrum B and the fulcrum C at its two ends.
And, at the fulcrum A of an end of the common connecting rod 110 of the 1st and the 2nd parallelogram connection-rod group 101,102, the connecting rod 114 that constitutes the connecting rod 111 of the 1st parallelogram connection-rod group and constitute the 2nd parallelogram connection-rod group for example constitutes under by the state with 90 ° angle limits and is rotated.
That is, this connecting rod 111 and connecting rod 114 are fastened, constitute L type connecting rod, and this fastening part is according to can being that install along the mode that the horizontal plane direction is rotated at the center with fulcrum A.
And, constitute, for example give the rotary driving force of horizontal direction to the L type connecting rod that constitutes by this connecting rod 111 and connecting rod 114 at fulcrum A.
In addition, at the fulcrum D of the other end of the common connecting rod 110 of the 1st and the 2nd parallelogram connection-rod group 101,102, the connecting rod 116 that constitutes the connecting rod 113 of the 1st parallelogram connection-rod group and constitute the 2nd parallelogram connection-rod group for example constitutes under by the state with 90 ° angle limits and is rotated.
That is, constitute the connecting rod 113 of the 1st parallelogram connection-rod group 101 and constitute the connecting rod 116 of the 2nd parallelogram connection-rod group 102 fastened, constitute L type connecting rod, this fastening part is according to can being that install along the mode that the horizontal plane direction is rotated at the center with fulcrum D.
On the other hand, in the 2nd parallelogram connection-rod group 102, an end of the connecting rod 115 relative with above-mentioned connecting rod 110 at the fulcrum E of the other end that is positioned at connecting rod 114 installing along the mode that the horizontal plane direction is rotated.
In addition, the end of connecting rod 116 that constitutes above-mentioned L type connecting rod at fulcrum F installing along the mode that the horizontal plane direction is rotated with respect to the other end of above-mentioned connecting rod 115.
At this, as described below, fulcrum F is located on the leading section of the 3rd lead arm 93 that guides linkage 90.
Under the situation of present embodiment, guide linkage 90 to have and constitute the 1st～the 3rd lead arm 91～93 that is rotated along vertical direction respectively, be configured to by above-mentioned fulcrum A and be positioned on the conveyance datum line 120 parallel with X-axis, and, on the fixing base component that does not show in the drawings of above-mentioned support component 85 (85a, 85b).
In addition, above-mentioned fulcrum A is for example identical with guiding linkage 90, is located on the base component, constitutes thus to guide linkage 90 not change with respect to the relative position relation of fulcrum A.
So, by this kind formation, making that guiding linkage 90 and the 2nd parallelogram connection-rod group 102 are flexible, the fulcrum F of the leading section of the 3rd lead arm 93 moves in conveyance datum line 120 upper edge X-directions or rightabout.
In addition, on the 1st and the 2nd above-mentioned parallelogram connection-rod group 101,102, be connected with following parallel rod type linkage 126.
This parallel rod type linkage 126 has last wrist connection rod set 127 and following wrist connection rod set 128.
At this, last wrist connection rod set 127 has the connecting rod 111 of the 1st above-mentioned parallelogram connection-rod group 101, by parallel relative connecting rod 111 and connecting rod 117, connecting rod 123 and 124 constitute respectively.On the other hand, following wrist connection rod set 128 is by parallel relative connecting rod 118 and 119, connecting rod 124 and conveyance platform 116 (fulcrum I, J) constitute respectively.
And, fulcrum A, B at the both ends of above-mentioned connecting rod 111, connecting rod 123,124 is installed, this connecting rod 123,124 can be rotated along the horizontal plane direction respectively, and, fulcrum G, H in the end of a side opposite with fulcrum A, the B of connecting rod 123,124 are equipped with connecting rod 117, and this 117 can be rotated along the horizontal plane direction respectively.
At this, fulcrum G is configured on the above-mentioned conveyance datum line 120.In addition, fulcrum G is for example identical with fulcrum A, is located on the base component (not shown), and the relative position relation that constitutes with respect to fulcrum A does not change.
On the other hand, the connecting rod of following wrist connection rod set 128 118 and above-mentioned connecting rod 112 are fastened with for example 90 ° angle, constitute L type connecting rod, and this fastening part is according to can being that install along the mode that the horizontal plane direction is rotated at the center with fulcrum B.
And, the connecting rod 119 relative with connecting rod 118 is can be installed in the fulcrum H of wrist connection rod set 127 along the mode that the horizontal plane direction is rotated, and the leading section of this connecting rod 118,119 is can be installed on fulcrum I, the J that is located at conveyance platform 116 along the mode that the horizontal plane direction is rotated.
Under the situation of present embodiment, the length of support of length of connecting rod 123,124 (length of support from) and conveyance platform 116 constitutes identical respectively from (distance between fulcrum I and the J).In addition, connecting rod 111,117, the length of connecting rod 118,119 (length of support from) also constitutes identical respectively.Thus, fulcrum I, the J on the conveyance platform 116 is positioned on the conveyance datum line 120.
In addition, on a side's of conveyance platform 116 leading section, be equipped with and be used for for example end effector (end effector) 125 of the transport object of wafer etc. of mounting.
And, in the present embodiment, be provided with the dead point as described below that is used for by fixed point (dead point) position and pass through mechanism 135.
At this, fastening part at the L type arm that constitutes by connecting rod 112,118, be equipped with connecting rod 112 and become one and can be the connecting rod 130 that the center is rotated along the horizontal plane direction with fulcrum B, and, be equipped with connecting rod 110 and become one and can be the connecting rod 131 that the center is rotated along the horizontal plane direction with fulcrum A.
In addition, constitute, connecting rod 131 is identical size with respect to the setting angle of connecting rod 110 and connecting rod 130 with respect to the setting angle of connecting rod 112.
And the fulcrum L in the end of the fulcrum K of the end of a side opposite with the fulcrum B of connecting rod 130 and a side opposite with the fulcrum A of connecting rod 131 is separately installed with connecting rod 134, and this connecting rod 134 can be rotated along the horizontal plane direction.The length identical (distance between fulcrum is identical) of the length of this connecting rod 134 and connecting rod 111.
And, constitute the dead point by mechanism 135 by this connecting rod 111,130,134,131.
In addition, under the situation of present embodiment, preferred connecting rod 131 becomes the best with respect to the setting angle and the connecting rod 130 of connecting rod 110 according to device formations, movable range etc. with respect to the setting angle of connecting rod 112 setting angle.By the viewpoint of dead-centre position, preferably this setting angle is about 30 °～about 60 ° from stably.
In present embodiment with this kind formation, if make L type connecting rod 111,114 with fulcrum A be the center along CW (turning clockwise) direction anglec of rotation θ, then connecting rod 114 is that the center is along CW direction anglec of rotation θ with connecting rod 111 with fulcrum A.
At this moment, fulcrum F is moved to the direction near fulcrum A along conveyance datum line 120 point-blank by guiding linkage 90 in the action of connecting rod 114 and connecting rod 116.
Thus, the 2nd parallelogram connection-rod group 102 is the tetragonal shape of keeping parallelism on one side, Yi Bian change shape, connecting rod 110 is that the center is along CCW (being rotated counterclockwise) direction anglec of rotation θ with fulcrum A.
Under the situation of present embodiment, owing to constitute the 1st parallelogram connection-rod group 101 by connecting rod 110, connecting rod 111, connecting rod 112, connecting rod 113, if thereby connecting rod 110 is that the center is along CCW direction anglec of rotation θ with fulcrum A, then connecting rod 112 is that the center is along CCW direction anglec of rotation θ with fulcrum B, thus connecting rod 118 with connecting rod 112 with fulcrum B center, along CCW direction anglec of rotation θ.
If consider with this a series of action to be benchmark with fulcrum B, then connecting rod 111 is that the center is along CW direction anglec of rotation θ with fulcrum B, simultaneously, connecting rod 118 with fulcrum B be the center along CCW direction anglec of rotation θ, thereby connecting rod 118 is that the center is along the CCW direction anglec of rotation 2 θ with respect to connecting rod 111 with fulcrum B.
And, in the present embodiment, constitute the last wrist connection rod set 127 of parallelogram by connecting rod 111,117,123,124, if thereby with fulcrum A be the center along the CW direction with connecting rod 111 anglec of rotation θ, then connecting rod 117 also with fulcrum G be the center along CW direction anglec of rotation θ, connecting rod 124 keeps the state parallel with connecting rod 123 and moves thus.
Meanwhile, as mentioned above, connecting rod 118 is that the center is along the CCW direction anglec of rotation 2 θ with respect to connecting rod 111 with fulcrum B.
And, if connecting rod 111 with fulcrum A be the center along CW direction anglec of rotation θ, then determine the position of connecting rod 118 and connecting rod 124, just can determine down the shape of the parallelogram of wrist connection rod set 128 uniquely, thereby transport mechanism 100 extends action.
As a result, end effector 125 moves to X-direction on conveyance datum line 120.
In addition, when end effector 125 on the conveyance datum line 120 when the direction opposite with X-axis moves, connecting rod 111 is rotated along the direction (CCW direction) opposite with above-mentioned action.
So,, carry out the expanding-contracting action of transport mechanism 100, thereby can make conveyance platform 116 and end effector 125 parallel moving on conveyance datum line 120 by making connecting rod 111 rotations.
Yet, be that the center makes along the CW direction under the situation of connecting rod 111 rotations with fulcrum A, the mobile connecting rod 110 that makes by guiding linkage 90 is rotated along the CCW direction, but can not determine the direction of rotation of connecting rod 112 forcibly, thereby can't determine connecting rod 112 to be the center to be rotated along which direction of CW, CCW direction with fulcrum B.
But, under the situation of present embodiment, constituting and the dead point is set by mechanism 135, connecting rod 131 is that the center is rotated along the CCW direction with fulcrum A with the action of connecting rod 110 integratedly, thereby connecting rod 130 is that the center is rotated along the CCW direction with fulcrum B.
As a result, because connecting rod 112 is that the center is rotated along the CCW direction with fulcrum B with connecting rod 130 integratedly, thereby can break away from the fixed point position.
Similarly, when constituting connecting rod 111, connecting rod 134, connecting rod 130, the connecting rod 131 of dead point and become a linearity (fixed point position) by mechanism 135, the action of the connecting rod 110～113 by constituting the 1st parallelogram connection-rod group 101 makes connecting rod 130 can break away from the fixed point position.
So, according to present embodiment, the direction of rotation of connecting rod 118 is no longer unstable in the fixed point position, can stably be rotated around fulcrum B.
As previously discussed, identical according to present embodiment with above-mentioned embodiment, can provide small-sized and be difficult for the vacuum treatment installation that lubricated fat or dust etc. pollute.
In addition, according to present embodiment, especially the guiding linkage 90 of guide 80 is made of a plurality of lead arm 91～93, thereby can easily implement anti-corrosion processing with existing technology.
And, according to present embodiment, because the total connecting rod 111 that constitutes the 1st parallelogram connection-rod group 101, constitute the dead point by mechanism 135, thereby connecting rod 118 to be rotated in the fixed point position no longer unstable, stably be rotated around fulcrum B, the result can make down wrist connection rod set 128 stably cross the fixed point position and move.
Other formation and action effect are identical with above-mentioned embodiment, thereby omit its detailed explanation.
Fig. 7 is the vertical view of formation that roughly shows the embodiment of the vacuum treatment installation that possesses carrying device of the present invention.
As shown in Figure 7, in the vacuum treatment installation 40 of present embodiment, around the carrying room 41 that disposes above-mentioned carrying device 1, be equipped with the vacuum treated deposition chamber 42,43,44 of carrying out film forming etc. side by side via the gate valve that does not show among the figure, with be used to move into as the wafer of transport object move into chamber 45, and be used to take out of wafer take out of chamber 46.
This deposition chamber 42～44, move into chamber 45, take out of chamber 46 and connect on the vacuum pumping system that does not show in the drawings.
In vacuum treatment installation 40 with this kind formation, be taken into by carrying device 1 and be accommodated in the wafer 47 that is untreated of moving into chamber 45, conveyance is to for example deposition chamber 43.
And carrying device 1 receives the wafer of having handled 48 from deposition chamber 43, with for example deposition chamber 42 of its conveyance to other by carrying out above-mentioned action.
Below similarly, use carrying device 1, in deposition chamber 42～44, move into chamber 45, take out of between the chamber 46, wafer 47 and handled the handing-over of wafer 48 is untreated.
In addition, the carrying device 50 of other that state or carrying device 60 also carry out same action with under the situation that replaces carrying device 1 in the use.
According to present embodiment, the small-sized of the transport object of conveyance conveyance sleekly can be provided and the little vacuum treatment installation of area is set with this kind formation.In addition, can provide the vacuum treatment installation that is difficult for by dust or wet goods pollution.
In addition, the present invention is not limited to above-mentioned embodiment, can carry out various changes.
For example, in the above-described embodiment, by can being constituted guide by the arm that axle props up along the state that vertical direction is rotated, but the present invention is not limited to this, and the direction of rotation of arm is not limited to vertical direction, also can tilt with respect to vertical direction.
In addition, the quantity of the lead arm of guide is not limited to two or three, also can be made of the lead arm more than three.In this case, the shape of lead arm also is not limited to linearity.
On the other hand, in the above-described embodiment, though power passes on mechanism by being constituted by the pitman arm that axle props up along the mode that the horizontal plane direction is rotated, the direction of rotation that also can make arm etc. is the direction angle arbitrarily that tilts with respect to the horizontal plane.

Claims (8)

1. carrying device has:
Conveying unit supports and the conveyance transport object;
Power is passed on mechanism, is used for the power from the device body is conveyed to described conveying unit, and this conveying unit is moved to the direction of intersecting with respect to reference direction; And
Guide is provided between described device body portion and the described conveying unit, is used to guide the moving direction of described conveying unit,
Wherein,
Described guide constitutes, and has an axle a plurality of lead arm that connect, and this each lead arm is along comprising that the direction of the composition of described reference direction is rotated.
2. carrying device as claimed in claim 1 is characterized in that,
In the lead arm of described guide, the lead arm of an end side of this guide is installed in described device body portion, and the lead arm of the other end side is installed in described conveying unit.
3. carrying device as claimed in claim 1 is characterized in that,
Described guide has the 1st lead arm and the 2nd lead arm, one end of described the 1st lead arm is propped up in described device body portion by axle with the state that can be rotated along vertical direction, and, one end of described the 2nd lead arm is propped up the other end in described the 1st lead arm with the state that can be rotated along vertical direction by axle, and the other end of described the 2nd lead arm is being propped up in described conveying unit by axle along the state that vertical direction is rotated.
4. carrying device as claimed in claim 1 is characterized in that,
Described power passes on mechanism to have actuating arm and slave arm, one end of described actuating arm is can be fixed on the driving shaft of described device body portion along the state that the horizontal plane direction is rotated, and, the other end at this actuating arm, one end of described slave arm is being propped up by axle along the state that the horizontal plane direction is rotated, and the other end of described slave arm is being propped up in described conveying unit by axle along the state that the horizontal plane direction is rotated.
5. carrying device as claimed in claim 4 is characterized in that,
Described power is passed on mechanism, and possess: the driving side parallelogram linkage has described actuating arm; And the slave end parallelogram linkage, use this driving side parallelogram linkage regulation connecting rod and constitute.
6. carrying device as claimed in claim 5 is characterized in that,
Described guide constitutes, and is connected in described power and passes on mechanism, limits the relative action of described driving side parallelogram linkage and described slave end parallelogram linkage.
7. carrying device as claimed in claim 1 is characterized in that,
Described power passes on the device body portion side end of mechanism to be installed on to be located at the rotating part of described device body portion.
8. a vacuum treatment installation is characterized in that, it is equipped with:
Carrying room has carrying device as claimed in claim 1; And
Vacuum processing chamber constitutes with described carrying room and is communicated with, and uses described carrying device to join the processing object.
CN2008800163196A 2007-05-15 2008-05-14 Transfer device and vacuum processing apparatus using the same Active CN101730613B (en)

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JP128904/2007 2007-05-15
PCT/JP2008/058811 WO2008140093A1 (en) 2007-05-15 2008-05-14 Transfer apparatus, and vacuum treating apparatus

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