CN105789098B - A kind of semi-conductor silicon chip lifting device - Google Patents

A kind of semi-conductor silicon chip lifting device Download PDF

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Publication number
CN105789098B
CN105789098B CN201610304400.0A CN201610304400A CN105789098B CN 105789098 B CN105789098 B CN 105789098B CN 201610304400 A CN201610304400 A CN 201610304400A CN 105789098 B CN105789098 B CN 105789098B
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CN
China
Prior art keywords
power rail
lift arm
semi
silicon chip
lifting device
Prior art date
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Active
Application number
CN201610304400.0A
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Chinese (zh)
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CN105789098A (en
Inventor
张立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Zhongkehanda Technology Co ltd
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Individual
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Publication date
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Priority to CN201610304400.0A priority Critical patent/CN105789098B/en
Publication of CN105789098A publication Critical patent/CN105789098A/en
Application granted granted Critical
Publication of CN105789098B publication Critical patent/CN105789098B/en
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations

Abstract

The present invention is a kind of semi-conductor silicon chip lifting device, including compression bar, lift arm, bracket and power rail, the compression bar is connected with power rail, the lift arm is connected with the other end of power rail, the compression bar, lift arm, power rail are all disposed on bracket, and the power rail is L-shaped, and the junction of the compression bar and power rail is provided with the first nut, the junction of the lift arm and power rail is provided with the second nut, and brake apparatus is provided on the lift arm.The semi-conductor silicon chip lifting device is simple in structure, easy to operation, safe and reliable, and can meet the requirement of semi-conductor silicon chip process equipment.The design of brake apparatus can be such that semi-conductor silicon chip lifting device stops during the work time.

Description

A kind of semi-conductor silicon chip lifting device
Technical field
The present invention relates to a kind of semi-conductor silicon chip lifting devices.
Background technology
Semi-conductor silicon chip process equipment, if dismounting part will increase workload one by one, reduces efficiency when being safeguarded.With The size for semi-conductor silicon chip is increasing, and the part of appliance size and weight of etching machine accordingly increase, and need moving parts Weight is larger, it is difficult to is done directly by manpower, it is necessary to be completed by lifting device.
Invention content
The technical problem to be solved in the present invention is to provide a kind of semiconductor simple in structure, easy to operation, safe and reliable Silicon chip lifting device.
To solve the above problems, the present invention adopts the following technical scheme that:A kind of semi-conductor silicon chip lifting device, including pressure Bar, lift arm, bracket and power rail, the compression bar are connected with power rail, and the lift arm is connected with the other end of power rail It connects, the compression bar, lift arm, power rail are all disposed on bracket, and the power rail is L-shaped, the company of the compression bar and power rail The place of connecing is provided with the first nut, and the junction of the lift arm and power rail is provided with the second nut, is arranged on the lift arm There is brake apparatus.
Preferably, the brake apparatus is the rubber ring of adjustable diameter.
Preferably, the lift arm tail portion is provided with nut.
As there is choosing, circular hole is provided on the bracket.
The beneficial effects of the invention are as follows:The semi-conductor silicon chip lifting device is simple in structure, easy to operation, safe and reliable, and And the requirement of semi-conductor silicon chip process equipment can be met.The design of brake apparatus can make semi-conductor silicon chip lifting device work It stops in the process.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with Obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of semi-conductor silicon chip lifting device of the present invention.
Specific implementation mode
The preferred embodiment of the present invention is described in detail below in conjunction with the accompanying drawings, so that advantages and features of the invention energy It is easier to be readily appreciated by one skilled in the art, so as to make a clearer definition of the protection scope of the present invention.
As shown in fig.1, a kind of semi-conductor silicon chip lifting device, including compression bar 1, lift arm 2, bracket 3 and power rail 4, The compression bar 1 is connected with power rail 4, and the lift arm 2 is connected with the other end of power rail 4, the compression bar 1, lift arm 2, power rail 4 is all disposed on bracket 3, and the power rail 4 is L-shaped, and the junction of the compression bar 1 and power rail 4 is provided with the One nut 5, the lift arm 2 and the junction of power rail 4 are provided with the second nut 6, and braking dress is provided on the lift arm 2 Set 7.
The brake apparatus 7 is the rubber ring of adjustable diameter.2 tail portion of the lift arm is provided with nut 8.The bracket Circular hole 9 is provided on 3.
By moulded rod 1, power rail 4 is driven to promote lift arm 2, needs machine to be stopped when being encountered in the course of work When situation, rotation brake device 7 so that rubber ring reduces diameter, is tightly attached on lift arm 2, reaches braking effect.
The beneficial effects of the invention are as follows:The gear shift rotary switch is reasonable for structure, and design is simple, by switch shaft and knob design Integralization, avoids that switch shaft is twisted off or knob is turned round broken, is also brought conveniently to repair.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any The change or replacement expected without creative work, should be covered by the protection scope of the present invention.Therefore, of the invention Protection domain should be determined by the scope of protection defined in the claims.

Claims (1)

1. a kind of semi-conductor silicon chip lifting device, it is characterised in that:Including compression bar, lift arm, bracket and power rail, the compression bar It is connected with power rail, the lift arm is connected with the other end of power rail, and the compression bar, lift arm, power rail are all arranged On bracket, the power rail is L-shaped, and the junction of the compression bar and power rail is provided with the first nut, the lift arm with The junction of power rail is provided with the second nut, and brake apparatus is provided on the lift arm;The brake apparatus is adjustable The rubber ring of diameter;The lift arm tail portion is provided with nut;It is provided with circular hole on the bracket.
CN201610304400.0A 2016-05-10 2016-05-10 A kind of semi-conductor silicon chip lifting device Active CN105789098B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610304400.0A CN105789098B (en) 2016-05-10 2016-05-10 A kind of semi-conductor silicon chip lifting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610304400.0A CN105789098B (en) 2016-05-10 2016-05-10 A kind of semi-conductor silicon chip lifting device

Publications (2)

Publication Number Publication Date
CN105789098A CN105789098A (en) 2016-07-20
CN105789098B true CN105789098B (en) 2018-11-02

Family

ID=56401735

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610304400.0A Active CN105789098B (en) 2016-05-10 2016-05-10 A kind of semi-conductor silicon chip lifting device

Country Status (1)

Country Link
CN (1) CN105789098B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6860790B2 (en) * 1999-01-17 2005-03-01 Nova Measuring Instruments Ltd. Buffer system for a wafer handling system
CN101081683A (en) * 2006-06-02 2007-12-05 西门子Vai金属科技有限责任公司 Hoisting unit for steel processing pans in RH- plants
CN101730613A (en) * 2007-05-15 2010-06-09 株式会社爱发科 Carrying device and use the vacuum treatment installation of this carrying device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003325582A (en) * 2002-05-08 2003-11-18 Tatsuto Tokuyasu Assisting apparatus for lifting up cared person
CN2624479Y (en) * 2003-05-15 2004-07-07 魏淑珍 Craping tool
CN201770801U (en) * 2010-06-23 2011-03-23 浙江百力达太阳能有限公司 Silicon wafer loading and automatic lifting device
CN104668401B (en) * 2015-01-13 2016-09-28 无锡万洪电子机械有限公司 A kind of electronic component pin bending press

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6860790B2 (en) * 1999-01-17 2005-03-01 Nova Measuring Instruments Ltd. Buffer system for a wafer handling system
CN101081683A (en) * 2006-06-02 2007-12-05 西门子Vai金属科技有限责任公司 Hoisting unit for steel processing pans in RH- plants
CN101730613A (en) * 2007-05-15 2010-06-09 株式会社爱发科 Carrying device and use the vacuum treatment installation of this carrying device

Also Published As

Publication number Publication date
CN105789098A (en) 2016-07-20

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Effective date of registration: 20180904

Address after: 323000 1, 139, three village, lighthouse three, Liandu District, Lishui, Zhejiang

Applicant after: LISHUI FEITIANREN MACHINERY DESIGN Co.,Ltd.

Address before: 233000 shipping technology school, 31 Zhucheng Road, long Zi Hu District, Bengbu, Anhui

Applicant before: Zhang Li

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Effective date of registration: 20180920

Address after: 362000 No. 296, Dongyuan village Xinyuan street, Dongyuan Town, Quanzhou City, Fujian Province

Applicant after: Huang Jianhong

Address before: 323000 1, 139, three village, lighthouse three, Liandu District, Lishui, Zhejiang

Applicant before: LISHUI FEITIANREN MACHINERY DESIGN Co.,Ltd.

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Effective date of registration: 20231014

Address after: 113000 Hongsheng Village, Hongsheng Township, Xinbin Manchu Autonomous County, Fushun City, Liaoning Province

Patentee after: Jiahefa Technology Patent Service Center in Xinbin Manchu Autonomous County

Address before: 362000 No. 296, Dongyuan village Xinyuan street, Dongyuan Town, Quanzhou City, Fujian Province

Patentee before: Huang Jianhong

TR01 Transfer of patent right
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Effective date of registration: 20231206

Address after: An Baita Town Village sheep in Dongling District of Shenyang city of Liaoning Province in 110167

Patentee after: Shenyang zhongkehanda Technology Co.,Ltd.

Address before: 113000 Hongsheng Village, Hongsheng Township, Xinbin Manchu Autonomous County, Fushun City, Liaoning Province

Patentee before: Jiahefa Technology Patent Service Center in Xinbin Manchu Autonomous County

TR01 Transfer of patent right