CN105789098B - A kind of semi-conductor silicon chip lifting device - Google Patents
A kind of semi-conductor silicon chip lifting device Download PDFInfo
- Publication number
- CN105789098B CN105789098B CN201610304400.0A CN201610304400A CN105789098B CN 105789098 B CN105789098 B CN 105789098B CN 201610304400 A CN201610304400 A CN 201610304400A CN 105789098 B CN105789098 B CN 105789098B
- Authority
- CN
- China
- Prior art keywords
- power rail
- lift arm
- semi
- silicon chip
- lifting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 17
- 239000010703 silicon Substances 0.000 title claims abstract description 17
- 230000006835 compression Effects 0.000 claims abstract description 15
- 238000007906 compression Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610304400.0A CN105789098B (en) | 2016-05-10 | 2016-05-10 | A kind of semi-conductor silicon chip lifting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610304400.0A CN105789098B (en) | 2016-05-10 | 2016-05-10 | A kind of semi-conductor silicon chip lifting device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105789098A CN105789098A (en) | 2016-07-20 |
CN105789098B true CN105789098B (en) | 2018-11-02 |
Family
ID=56401735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610304400.0A Active CN105789098B (en) | 2016-05-10 | 2016-05-10 | A kind of semi-conductor silicon chip lifting device |
Country Status (1)
Country | Link |
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CN (1) | CN105789098B (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6860790B2 (en) * | 1999-01-17 | 2005-03-01 | Nova Measuring Instruments Ltd. | Buffer system for a wafer handling system |
CN101081683A (en) * | 2006-06-02 | 2007-12-05 | 西门子Vai金属科技有限责任公司 | Hoisting unit for steel processing pans in RH- plants |
CN101730613A (en) * | 2007-05-15 | 2010-06-09 | 株式会社爱发科 | Carrying device and use the vacuum treatment installation of this carrying device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003325582A (en) * | 2002-05-08 | 2003-11-18 | Tatsuto Tokuyasu | Assisting apparatus for lifting up cared person |
CN2624479Y (en) * | 2003-05-15 | 2004-07-07 | 魏淑珍 | Craping tool |
CN201770801U (en) * | 2010-06-23 | 2011-03-23 | 浙江百力达太阳能有限公司 | Silicon wafer loading and automatic lifting device |
CN104668401B (en) * | 2015-01-13 | 2016-09-28 | 无锡万洪电子机械有限公司 | A kind of electronic component pin bending press |
-
2016
- 2016-05-10 CN CN201610304400.0A patent/CN105789098B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6860790B2 (en) * | 1999-01-17 | 2005-03-01 | Nova Measuring Instruments Ltd. | Buffer system for a wafer handling system |
CN101081683A (en) * | 2006-06-02 | 2007-12-05 | 西门子Vai金属科技有限责任公司 | Hoisting unit for steel processing pans in RH- plants |
CN101730613A (en) * | 2007-05-15 | 2010-06-09 | 株式会社爱发科 | Carrying device and use the vacuum treatment installation of this carrying device |
Also Published As
Publication number | Publication date |
---|---|
CN105789098A (en) | 2016-07-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180904 Address after: 323000 1, 139, three village, lighthouse three, Liandu District, Lishui, Zhejiang Applicant after: LISHUI FEITIANREN MACHINERY DESIGN Co.,Ltd. Address before: 233000 shipping technology school, 31 Zhucheng Road, long Zi Hu District, Bengbu, Anhui Applicant before: Zhang Li |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180920 Address after: 362000 No. 296, Dongyuan village Xinyuan street, Dongyuan Town, Quanzhou City, Fujian Province Applicant after: Huang Jianhong Address before: 323000 1, 139, three village, lighthouse three, Liandu District, Lishui, Zhejiang Applicant before: LISHUI FEITIANREN MACHINERY DESIGN Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231014 Address after: 113000 Hongsheng Village, Hongsheng Township, Xinbin Manchu Autonomous County, Fushun City, Liaoning Province Patentee after: Jiahefa Technology Patent Service Center in Xinbin Manchu Autonomous County Address before: 362000 No. 296, Dongyuan village Xinyuan street, Dongyuan Town, Quanzhou City, Fujian Province Patentee before: Huang Jianhong |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231206 Address after: An Baita Town Village sheep in Dongling District of Shenyang city of Liaoning Province in 110167 Patentee after: Shenyang zhongkehanda Technology Co.,Ltd. Address before: 113000 Hongsheng Village, Hongsheng Township, Xinbin Manchu Autonomous County, Fushun City, Liaoning Province Patentee before: Jiahefa Technology Patent Service Center in Xinbin Manchu Autonomous County |
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TR01 | Transfer of patent right |