CN101701867B - Grating diffraction efficiency tester keeping invariable incident angle - Google Patents
Grating diffraction efficiency tester keeping invariable incident angle Download PDFInfo
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- CN101701867B CN101701867B CN2009102376615A CN200910237661A CN101701867B CN 101701867 B CN101701867 B CN 101701867B CN 2009102376615 A CN2009102376615 A CN 2009102376615A CN 200910237661 A CN200910237661 A CN 200910237661A CN 101701867 B CN101701867 B CN 101701867B
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Abstract
The invention disclose a grating diffraction efficiency tester keeping an invariable incident angle, comprising an external light source system, a prearranged beam splitting monochrometor, a measurement monochrometor and a measurement control system, wherein, the outside of the shell of the prearranged monochrometor is provided with two slits which are respectively an entrance slit and an exit slit; the shell is internally provided with a grating dispersion beam splitting system; a diffraction efficiency measurement monochromator controls the direction of grating diffraction beam propagation by adding a rotatable plane reflecting mirror, adjusts the different diffraction directions due to the different wavelengths to enable the grating diffraction beam to be kept on one direction to enter a converging objective lens, and finally images on a detector in a fixed position to finish measurement. The grating to be measured does not need to be rotated in the measuring process to realize the consistence of the testing conditions, and the incident angle keeps invariable when the diffraction efficiency of different wavelengths is measured; and meanwhile, rotary plane reflecting mirror of the measurement system is controlled by a computer automatically, the automatic degree of the testing process is high, and the testing result is credible.
Description
Technical field
The invention belongs to a kind of grating diffraction efficiency tester in the spectral technique field, particularly a kind of grating diffraction efficiency tester that keeps invariable incident angle.
Technical background
Grating is important branch dispersive optical element on physical optics, and grating diffration efficient is the very important technical performance index of grating, and it directly influences the transfer of energy properties of spectral instrument.Same block of grating all is different for not at the same level time diffraction efficiency of different wavelength and identical wavelength, and according to system requirements grating in the inferior diffraction efficiency of certain grade of a certain wavelength the different technologies index request is proposed in different use occasion meetings, such as more than 60% or more than 70%.So the development of grating and production unit, the grating that it is developed, produces will carry out the test of diffraction efficiency of grating.
Develop and produce the country of grating in the world, grating diffration efficient has all been set up corresponding test method, develop testing tool.In testing tool, generally adopt the version of two monochromators, the prior art the most approaching with the present invention, it is the diffraction efficiency measuring instrument that adopt in Spectra-Physics grating laboratory, more domestic colleges and universities and research unit adopted similar measurement mechanism simultaneously, such as Zhejiang University, Changchun ray machine institute of the Chinese Academy of Sciences etc.As shown in Figure 1, this measuring instrument comprises: the outer light path of light source, premonochromator, measurement monochromator, control system.The outer light path of light source comprises: light source 24, condenser 25,33; Premonochromator comprises: entrance slit 26, plane mirror 27,31, collimating mirror 28, grating 29, image-forming objective lens 30, exit slit 32, housing 41; The measurement monochromator comprises: plane mirror 34, collimating mirror 35, tested grating 36 or standard flat catoptron 37, image-forming objective lens 38, housing 42; Control system comprises: photomultiplier 39, controller 40.
From structure shown in Figure 2 as can be known, the effect of light path and premonochromator is to provide monochromatic source for measuring monochromator outside the light source, and grating in the control system control premonochromator and the tested grating 36 in the measurement monochromator are finished the measurement of diffraction efficiency with respect to the synchronous rotation of wavelength.
Its automatic measuring process is:
(1) controls the continuous rotational angular velocity of grating 29 and tested grating 36 simultaneously by control system, to guarantee premonochromator and to measure the monochromatic light that wavelength is agreed in monochromator output;
(2) tested grating 36 and standard flat catoptron 37 double replacement mutually apace receives respectively the electric current that produces at photomultiplier from the reflected light of the diffraction light of tested grating 36 and standard flat catoptron 37 and calculates their ratio to guarantee photomultiplier 39 in the short time interval;
(3) when grating 29 and tested grating 36 turned to next wavelength, repeating step (1) and step (2) just can obtain the diffraction efficiency of different wave length repeatedly.
The problem that this kind constructional device exists is mainly reflected in: when measuring different wave length, grating 29 and tested grating 36 need forward special angle to, this moment, the incident light direction of tested grating 36 changed, changed the measuring condition of different wave length diffraction efficiency, the comparability of diffraction efficiency between different wave length is reduced, influence measuring accuracy; Survey tested grating and standard flat catoptron mutually double replacement adopt manual mode, after finishing, replacing also need in a small range, carry out small adjustment, entering into photomultiplier fully with the reflected light that guarantees grating diffration light and standard flat catoptron is accepted, whole process is consuming time longer, and precision is not high.
Summary of the invention
The technology of the present invention is dealt with problems: in order to overcome the shortcoming that prior art exists, provide a kind of grating diffraction efficiency tester that keeps invariable incident angle, improved measuring accuracy, Measuring Time is shortened.
Technology side's problem that the present invention will solve is: a kind of grating diffraction efficiency tester that keeps invariable incident angle, comprise outer light source, premonochromator, measurement monochromator and Measurement and Control System, described premonochromator comprises entrance slit, first plane mirror and second plane mirror, collimation concave mirror, collecting objective, grating, first turntable, exit slit, premonochromator housing, first stepper motor; Described measurement monochromator comprises collimation concave mirror, tested grating, standard flat catoptron, web member, second turntable and the 3rd turntable, second stepper motor and the 3rd stepper motor, the 3rd plane mirror and Siping City's face catoptron, collecting objective, measurement monochromator housing; Described Measurement and Control System comprises detector and controller; The left and right sides at described premonochromator housing has entrance slit and exit slit respectively; First plane mirror all becomes 45 degree to place with second plane mirror with incident light, towards a right left side, first plane mirror reflexes to the collimation concave mirror with incident light to the reflecting surface of two catoptrons respectively, and second plane mirror reflexes to exit slit with incident light; Collimation concave mirror and collecting objective symmetrical placement, and the reflecting surface of collimation concave mirror and collecting objective is towards following, the optical axis direction of two mirrors is parallel to sideline, the premonochromator housing left and right sides respectively, the focus of two mirrors lays respectively on entrance slit and the exit slit, the reflection directional light directive grating of collimation concave mirror, grating diffration light directive collecting objective, reflection converging light directive second plane mirror of collecting objective; Grating is fixed on first turntable, by the angle of controller by first step motor control, first turntable; In the measurement light path of described measurement monochromator, reflection collimating mirror and mirror condenser symmetry are installed in upper left side and the lower left of measuring the monochromator housing, the reflecting surface of two mirrors is towards the right side, the optical axis direction of two mirrors is following parallel with going up of housing, the focus of reflection collimating mirror is positioned at the exit slit of premonochromator, the focus of mirror condenser is positioned at the photosurface of detector, the tested grating of reflection collimated light directive or the standard flat catoptron of reflection collimating mirror, the reflection converging light directive detector photosurface of mirror condenser; Tested grating is connected by web member with plane mirror and is fixed on the 3rd turntable, and the 3rd turntable carries out the test of different incidence angles by the second step motor drive different rotation angle; The 3rd plane mirror and Siping City's face catoptron are installed in opposite directions, two mirror reflection faces are respectively towards a right left side, installation direction and incident light are angled, reflected light directive Siping City face catoptron of the 3rd plane mirror, the reflected light directive mirror condenser of Siping City's face catoptron; Second stepper motor and the 3rd stepper motor are controlled by controller; Controller is changed measurement pattern after controlling the 3rd step motor drive the 3rd turntable Rotate 180 degree, switches incident light measurement pattern or oppositely switching by the diffraction light measurement pattern, finishes the test of a diffraction efficiency; The measurement result of detector and diffraction efficiency are calculated by the controller computing and are shown.
The present invention's advantage compared with prior art is:
(1) in the existing technology, tested grating is to realize the test of the diffraction efficiency of different wave length by rotating to different angles, and its measuring condition changes along with wavelength, and measurement result is slightly different with actual conditions, and its measuring accuracy is affected.And the present invention is by adding a rotatable plane mirror, the direction of propagation of control different wave length diffracted beam, make that incident angle can remain unchanged when measuring the different wave length diffraction efficiency, improve the comparability of diffraction efficiency measurement result, the more realistic operating position of test result, thus measuring accuracy improved.
(2) adopt control system to carry out replacing between standard flat catoptron and the tested grating among the present invention, than the manual switchover mode in the prior art, the working time is shorter, and precision is higher, and automaticity is higher.
Description of drawings
Fig. 1 is the prior art constructions synoptic diagram;
Fig. 2 is a structural representation of the present invention;
Fig. 3 is the structural representation of middle controller of the present invention;
Fig. 4 is the wiring layout of standard flat catoptron 18 among the present invention, measured grating 15, web member 17 and turntable 19;
Fig. 5 is the structural representation of stepper motor and turntable transmission among the present invention.
Embodiment
As shown in Figure 2, the present invention includes outer light source 1, premonochromator, measurement monochromator and Measurement and Control System.Premonochromator comprises entrance slit 2, first plane mirror 3 and second plane mirror 8, collimation concave mirror 6, collecting objective 7, grating 4, first turntable 5, exit slit 9, premonochromator housing 51, first stepper motor 52; Described measurement monochromator comprises reflection collimating mirror 10, tested grating, 15, standard flat catoptron 18, web member 17, second turntable 12 and the 3rd turntable 19, second stepper motor 22 and the 3rd stepper motor 23, the 3rd plane mirror 11 and Siping City's face catoptron 16, reflecting condensation object lens 14, measures monochromator housing 13; Described Measurement and Control System comprises detector 20 and controller 21; In the left and right sides of described premonochromator housing 51 entrance slit 2 and exit slit 9 are arranged respectively; First plane mirror 3 all becomes 45 degree to place with second plane mirror 8 with incident light, the reflecting surface of two catoptrons is respectively towards a right left side, first plane mirror 3 reflexes to collimation concave mirror 6, the second plane mirrors 8 with incident light incident light is reflexed to exit slit; Collimation concave mirror 6 and collecting objective 7 symmetrical placement, and the reflecting surface of collimation concave mirror 6 and collecting objective 7 is towards following, the optical axis direction of two mirrors is parallel to sideline, premonochromator housing 51 left and right sides respectively, the focus of two mirrors lays respectively on entrance slit 2 and the exit slit 9, the reflection directional light directive grating 4 of collimation concave mirror 6, the diffraction light directive collecting objective 7 of grating 4, reflection converging light directive second plane mirror 8 of collecting objective 7; Grating 4 is fixed on first turntable 5, by the angle of controller 21 by first stepper motor, 52 controls, first turntable 5; In the measurement light path of described measurement monochromator, reflection collimating mirror 10 and reflecting condensation object lens 14 symmetries are installed in upper left side and the lower left of measuring monochromator housing 13, the reflecting surface of two mirrors is towards the right side, the optical axis direction of two mirrors is following parallel with going up of housing 13, the focus of reflection collimating mirror 10 is positioned at the exit slit 9 of premonochromator, the focus of mirror condenser 14 is positioned at the photosurface of detector 20, the tested grating 15 of reflection collimated light directive or the standard flat catoptron 18 of reflection collimating mirror 10, reflection converging light directive detector 20 photosurfaces of reflecting condensation object lens 14; Grating 15 is connected by web member 17 with plane mirror 18 and is fixed on the 3rd turntable 19, and the 3rd turntable 19 carries out the test of different incidence angles by second stepper motor, 23 driven in rotation different angles; The 3rd plane mirror 11 and Siping City's face catoptron 16 are installed in opposite directions, two mirror reflection faces are respectively towards a right left side, installation direction becomes 45 degree, the reflected light directive reflecting condensation object lens 14 of reflected light directive Siping City face catoptron 16, the Siping City's face catoptrons 16 of the 3rd plane mirror 11 with incident light; Second stepper motor 22 and the 3rd stepper motor 23 are by controller 21 controls, and the measurement result of detector 20 and diffraction efficiency are calculated by controller 21 computings and shown.
As shown in Figure 3, controller 21 of the present invention comprises detector data output 43, prime amplifier 44, lock-in amplifier 45, A/D converter 46, controlling computer 47, stepper motor PCI control card 48, servo-driver 49; Controlling computer 47 is sent instruction by program to stepper motor PCI control card 48, start servo-driver 49 outputs three tunnel drive signals 50, first stepper motor 52 in second stepper motor 22 in the drive measurement monochromator and the 3rd stepper motor 23 and the premonochromator, order about second turntable 12, the 3rd turntable 19 and first turntable 5 and turn to needed angle, finish the diffraction efficiency of grating of a certain wavelength and measure the light path adjusting; Detector 20 was converted to output electric signal 43 with radiant quantity after adjusting finished, prime amplifier 44 amplifies the output electric signal 43 of detector 20, send lock-in amplifier 45 demodulation to, lock-in amplifier 45 is sent to A/D converter 46 with restituted signal and finishes the conversion of simulating signal to digital signal, the digital signal that controlling computer 47 is accepted from A/D converter 46, carry out computing and result and show, finish the diffraction efficiency of grating of this wavelength and measure.
Shown in Fig. 4,5, in the measurement light path of measurement monochromator of the present invention, standard flat catoptron 18 and tested grating 15 link together by screw 53 and screw on web member 17 vertical plates, and all web member 17 is outward dorsad for the reflecting surface A of standard flat catoptron 18 and the delineation face B of tested grating 15; Web member 17 is fixed on the 3rd turntable 19 through screw 54 by the screw on the horizonal base plate; The reflecting surface of standard flat catoptron 18 is parallel with the portrayal face of tested grating 15.Stepper motor 23 is fixed on the motor cabinet 55, and worm screw 58 is fixed on the worm screw seat 57.Controller 21 controls the 3rd stepper motor 23 drives worm screw 58 by shaft coupling 56 and rotates, change measurement pattern behind worm screw 58 transmissions the 3rd turntable 19 Rotate 180 degree, switch incident light measurement pattern or oppositely switching by the diffraction light measurement pattern, finish the test of a diffraction efficiency.
The course of work of the present invention is as follows:
(1) continuous spectrum that sends of outer light source 1 enters in the premonochromator via entrance slit 2, first plane mirror 3 reflexes to collimation concave mirror 6 with incident light and collimates, the collimation directional light incides grating 4, controller 21 is by the rotational angle of first stepper motor, 52 controls, first turntable 5, and making wavelength is λ
0Monochromatic light can focus on exit slit 9 by behind reflection converging light directive second plane mirror 8 of collecting objective 7, premonochromator is finished monochromatic beam split.
(2) the monochromatic converging light of exit slit 9 outgoing enters the measurement monochromator, arrives tested grating 15 after reflection collimating mirror 10 becomes directional light, and tested grating 15 is λ with wavelength
0Monochromatic light be diffracted into the 3rd plane mirror 11, controller 21 forwards specific angle to by second stepper motor, 22 controls, second turntable 12, make that plane mirror 11 and tested grating 15 diffracted beam angles are 45 degree, and diffracted beam reflected to Siping City's face catoptron 16, the reflected light of Siping City's face catoptron 16 is able to parallel and optical axis incidents reflecting condensation object lens 14, reflecting condensation object lens 14 focus on detector 20 with the incident directional light and finish the diffraction intensity measurement, record voltage V at this moment
1Controller 21 forwards 180 degree to fast by three stepper motors, 23 controls the 3rd turntable 19, tested grating 15 is switched to standard flat catoptron 18, so far the collimation directional light that reflects collimating mirror 10 is mapped to standard flat catoptron 18, because the diffraction light direction of tested grating 15 is different with the reflected light direction of standard flat catoptron 18, need control second turntable 12 once more and forward certain angle to, make that the plane mirror 11 and the folded light beam angle of standard flat catoptron 18 are 45 degree, reflected light is reflected to Siping City's face catoptron 16 by predetermined direction, make the reflected light of Siping City's face catoptron 16 be able to parallel and optical axis incidents reflecting condensation object lens 14 once more, reflecting condensation object lens 14 focus on detector 20 with the incident directional light and finish standard flat mirror reflection luminous intensity measurement, record voltage V at this moment
2Controller 21 calculates wavelength X
0Diffraction efficiency=V
1/ V
2
(3) measure different wave length λ
1Diffraction efficiency the time, grating 4 need turn to specific direction in the premonochromator.Since in premonochromator of the present invention, collimation concave mirror 6 stationkeeping, and the parallel beam direction of its reflection immobilizes, so the incident light direction of grating 4 is constant; Variant wavelength monochromatic light transmits to different directions behind grating 4 diffraction, the monochromatic light that only is parallel to collecting objective 7 optical axis directions could be converged to the exit slit 9 of stationkeeping and then be used by follow-up measurement, this monochromatic light is only diffraction light, parallel and collecting objective 7 optical axises in its direction of propagation.Because the stationkeeping of collecting objective 7, its optical axis direction is fixed, and promptly the diffraction light direction is fixed.When grating 4 forwarded different directions to, the grating normal direction will change, though incident light and diffraction light direction immobilize, incident angle of grating (angle of incident light and normal) and angle of diffraction (angle of diffraction light and normal) but change thereupon.Realize wavelength X
1The monochromatic light outgoing, grating need forward special angle to, makes grating incident angle and emergence angle satisfy grating equation: d (sin θ-sin φ)=m λ
1, d is a grating constant in the formula, and θ is an incident angle, and φ is an angle of diffraction, and m is that the order of diffraction is inferior, λ
1Be required outgoing wavelength.Realize wavelength X
1The monochromatic light outgoing after, repeating step (2) is finished the diffraction efficiency of different wave length and is measured.
(4) when needs are measured the diffraction efficiency of grating of different incidence angles, controller 20 controls the 3rd turntable 19 forwards tested grating 15 to, the normal direction that makes tested grating 15 changes with the angle of the optical axis direction of reflection collimating mirror 10 thereupon, promptly changed incident angle, repeating step (1) and step (2) can be finished diffraction efficiency of grating measurement under the different incidence angles.
During structure of the present invention was implemented, outer light source 1 adopted the cavate black matrix, and temperature is set at 500K, and this moment, black matrix was stronger in LONG WAVE INFRARED 8～12 μ m radiation; Duralumin is adopted in collimation concave mirror 6, collecting objective 7 substrates, surface gold-plating, and focal length is 300mm, bore 75mm, F# are 4; Duralumin is adopted in first plane mirror 3, second plane mirror 8, the 3rd plane mirror 11, Siping City's face catoptron 16 and 18 substrates of standard flat catoptron, surface gold-plating, reach more than 98% at LONG WAVE INFRARED 8～12 μ m reflectivity, surface precision PV is less than 0.5 λ; Entrance slit 2, exit slit 9 are that to regulate incident and output intensity, the width-adjustable scope is at 0.01～3mm by gear precision transmission control slit opening width; It is the vertical shaft parabolic lens of duralumin that reflection collimating mirror 10 adopts substrate, surface gold-plating, vertical shaft amount 30mm, focal length 80mm; It is the vertical shaft parabolic lens of duralumin that reflecting condensation object lens 14 adopt substrate, surface gold-plating, vertical shaft amount 50mm, focal length 100mm; First turntable 5, second turntable 12 and the 3rd turntable 19 are the worm gear of aldary for material, by the step motor drive worm drive, and rotatable 360 degree; First stepper motor 5, second stepper motor 22 and the 3rd stepper motor 23 adopt thunder match 57HS09 stepper motor; Web member 17 materials are duralumin.The material of measuring monochromator housing 13 is the 45# steel, thickness 8mm; Detector 20 is the HgCdTe infrared eye; Prime amplifier 44 adopts the 8KKMH0402 prime amplifier; Lock-in amplifier 45 adopts HB-212 binary channels two-phase lock-in amplifier; Controlling computer 47 adopts grinds auspicious industrial computer; Stepper motor PCI control card 48 adopts MPC07 4 axis sport controller, servo-driver 49 to adopt the M325 servo driving.
Claims (7)
1. grating diffraction efficiency tester that keeps invariable incident angle, comprise outer light source (1), premonochromator, measurement monochromator and Measurement and Control System, it is characterized in that: described premonochromator comprises entrance slit (2), first plane mirror (3) and second plane mirror (8), collimation concave mirror (6), collecting objective (7), grating (4), first turntable (5), exit slit (9), premonochromator housing (51), first stepper motor (52); Described measurement monochromator comprises reflection collimating mirror (10), tested grating (15), standard flat catoptron (18), web member (17), second turntable (12) and the 3rd turntable (19), second stepper motor (22) and the 3rd stepper motor (23), the 3rd plane mirror (11) and Siping City's face catoptron (16), reflecting condensation object lens (14), measures monochromator housing (13); Described Measurement and Control System comprises detector (20) and controller (21); Entrance slit (2) and exit slit (9) are arranged respectively in the left and right sides of described premonochromator housing (51); First plane mirror (3) all becomes 45 degree to place with second plane mirror (8) with incident light, the reflecting surface of two catoptrons is respectively towards a right left side, first plane mirror (3) reflexes to collimation concave mirror (6) with incident light, and second plane mirror (8) reflexes to exit slit with incident light; Collimation concave mirror (6) and collecting objective (7) symmetrical placement, and the reflecting surface of collimation concave mirror (6) and collecting objective (7) is towards following, the optical axis direction of two mirrors is parallel to premonochromator housing (51) sideline, the left and right sides respectively, entrance slit (2) is positioned on the focus of the system that collimates concave mirror (6) and first plane mirror (3) composition, exit slit (9) is positioned on the focus of composition system of collecting objective (7) and second plane mirror (8), the reflection directional light directive grating (4) of collimation concave mirror (6), the diffraction light directive collecting objective (7) of grating (4), reflection converging light directive second plane mirror (8) of collecting objective (7); Grating (4) is fixed on first turntable (5), by the angle of controller (21) by first stepper motor (52) control first turntable (5); In the measurement light path of described measurement monochromator, reflection collimating mirror (10) and reflecting condensation object lens (14) symmetry are installed in upper left side and the lower left of measuring monochromator housing (13), the reflecting surface of two mirrors is towards the right side, the optical axis direction of two mirrors is following parallel with going up of housing (13), the focus of reflection collimating mirror (10) is positioned at the exit slit (9) of premonochromator, the focus of reflecting condensation object lens (14) is positioned at the photosurface of detector (20), the tested grating of reflection collimated light directive (15) or the standard flat catoptron (18) of reflection collimating mirror (10), reflection converging light directive detector (20) photosurface of reflecting condensation object lens (14); Tested grating (15) is connected by web member (17) with plane mirror (18) and is fixed on the 3rd turntable (19), and the 3rd turntable (19) carries out the test of different incidence angles by the 3rd stepper motor (23) driven in rotation different angles; The 3rd plane mirror (11) and Siping City's face catoptron (16) are installed in opposite directions, two mirror reflection faces are respectively towards a right left side, installation direction becomes miter angle with incident light, reflected light directive Siping City's face catoptron (16) of the 3rd plane mirror (11), the reflected light directive reflecting condensation object lens (14) of Siping City's face catoptron (16); Second stepper motor (22) and the 3rd stepper motor (23) are by controller (21) control, controller (21) control the 3rd stepper motor (23) is changed measurement pattern after driving the 3rd turntable (19) Rotate 180 degree, switch incident light measurement pattern or oppositely switching by the diffraction light measurement pattern, finish the test of a diffraction efficiency; The measurement result of detector (20) and diffraction efficiency are calculated by controller (21) computing and are shown.
2. a kind of grating diffraction efficiency tester that keeps invariable incident angle according to claim 1 is characterized in that: described controller (21) comprises detector data output (43), prime amplifier (44), lock-in amplifier (45), A/D converter (46), controlling computer (47), stepper motor PCI control card (48), servo-driver (49); Controlling computer (47) is sent instruction to stepper motor PCI control card (48), start servo-driver (49) output three tunnel drive signals (50), first stepper motor (52) in second stepper motor (22) in the drive measurement monochromator and the 3rd stepper motor (23) and the premonochromator, order about second turntable (12), the 3rd turntable (19) and first turntable (5) and turn to needed angle, finish the diffraction efficiency of grating of a certain wavelength and measure the light path adjusting; Detector (20) was converted to output electric signal (43) with radiant quantity after adjusting finished, prime amplifier (44) amplifies the output electric signal (43) of detector (20), send lock-in amplifier (45) demodulation to, lock-in amplifier (45) is sent to A/D converter (46) with restituted signal and finishes the conversion of simulating signal to digital signal, controlling computer (47) is accepted the digital signal from A/D converter (46), carry out computing and result and show, finish the diffraction efficiency of grating of this wavelength and measure.
3. a kind of grating diffraction efficiency tester that keeps invariable incident angle according to claim 1, it is characterized in that: in the measurement light path of described measurement monochromator, the reflecting surface (A) of described standard flat catoptron (18) and the delineation face (B) of tested grating (15) are parallel.
4. a kind of grating diffraction efficiency tester that keeps invariable incident angle according to claim 1, it is characterized in that: described standard flat catoptron (18) and tested grating (15) link together by the screw on screw and web member (17) vertical plate, and all web member (17) is outward dorsad for the delineation face of the reflecting surface of standard flat catoptron (18) and tested grating (15); Web member (17) by the screw on the horizonal base plate through screw retention on the 3rd turntable (19).
5. a kind of grating diffraction efficiency tester that keeps invariable incident angle according to claim 1 is characterized in that: described outer light source (1) is the cavate black matrix.
6. a kind of grating diffraction efficiency tester that keeps invariable incident angle according to claim 1 is characterized in that: described detector (20) is the HgCdTe infrared eye.
7. a kind of grating diffraction efficiency tester that keeps invariable incident angle according to claim 1 is characterized in that: the slit width adjustable extent of described entrance slit (2) and exit slit (9) is at 0.01～3mm.
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| CN104502067B (en) * | 2014-12-25 | 2017-01-25 | 中国科学院长春光学精密机械与物理研究所 | Relative diffraction efficiency tester for Fourier transformation plane grating |
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| CN113036599B (en) * | 2021-03-04 | 2022-11-11 | 中国科学院光电技术研究所 | Method for improving output power of Littman structure tunable external cavity semiconductor laser |
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