CN101700875A - Purification system of anhydrous hydrogen fluoride gas - Google Patents
Purification system of anhydrous hydrogen fluoride gas Download PDFInfo
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- CN101700875A CN101700875A CN200910250320A CN200910250320A CN101700875A CN 101700875 A CN101700875 A CN 101700875A CN 200910250320 A CN200910250320 A CN 200910250320A CN 200910250320 A CN200910250320 A CN 200910250320A CN 101700875 A CN101700875 A CN 101700875A
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- hydrogen fluoride
- fluoride gas
- purification system
- anhydrous hydrogen
- purification tower
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Abstract
The invention relates to a purification system of anhydrous hydrogen fluoride gas, belonging to the field of chemical engineering. The purification system comprises an air inlet pipeline, an air outlet pipeline, a purification tower, a dust collecting device and a back flushing device, wherein the air inlet pipeline is positioned at the lower half part of the purification tower, and the air outlet pipeline is arranged at the upper half part of the purification tower; membrane material resisting the temperature of 20-100 DEG C and the negative pressure of 1000-3000MPa is arranged inside the purification tower; the membrane material has the aperture less than 1mu m, hydrofluoric acid corrosion resistance and the total specific surface area more than 180m2/g; the upper end of the collecting device is connected with the bottom of the purification tower; the back flushing device is positioned at the upper half part or the top of the purification tower, one end of the back flushing device is connected with the purification tower, and the other end is connected with an air compressor. The purification system has the advantages of low cost, easy controlled technical parameters, convenient working condition operation, safety, environmental protection, large-scale continuous production, etc. By adopting the system, under the normal temperature and pressure, the anhydrous hydrogen fluoride gas contains the content of dust particles less than 5g/m3, and the removed dust particles have the size within 200-500nm and mainly comprises fluorine, silicon, phosphorus, ferrum, sulfur, oxygen, etc.
Description
Technical field
The invention belongs to chemical production technical field, be specifically related to a kind of purification system of anhydrous hydrogen fluoride gas.
Background technology
In the prior art, anhydrous hydrogen fluoride gas is mainly produced by inorganic fluoride and acid-respons.Therefore, the various impurity that contained in the inorganic fluoride will cause carrying in the anhydrous hydrogen fluoride gas a large amount of dust granules, particularly contain the following particle of submicron and nano level, it is the subsequent product performance that raw material generated that the existence of these dust granules will directly influence with the anhydrous hydrogen fluoride gas.
In recent years, the purifying method of anhydrous hydrogen fluoride gas mainly comprises production technique and the approach such as continual renovation equipment and raising inorganic fluoride quality of improving.Adopt as domestic relevant enterprise and slightly to wash the production technique that tower and absorption tower (or rectifying tower) combine and effectively to purify the above big dust particle of micron order in the anhydrous hydrogen fluoride gas; Also someone's method of adopting repeatedly floatation process or adding various properties-correcting agent is in order to remove the plurality of impurities in the inorganic fluoride; Patent CN201180092Y relates to the purification process of hydrogen fluoride gas, be characterized in the conversion unit of producing hydrogen fluoride gas, inlet pipe end in carrying the sulfuric acid pipe, by shower nozzle is installed, reach impurity-eliminating effect, its shortcoming is to cause the inlet pipe frequent jams easily, and production technique is difficult to control.Patent CN101139106A utilizes hydrogen fluoride gas and SiF
4The difference of condensation of gas point by the control condensing temperature, reaches desiliconization effect.But, this method complex process, the energy consumption height, and can only remove and take off a kind of siliceous dust granules.
Mainly there are following shortcoming in the production technique of above-mentioned disclosed purification anhydrous hydrogen fluoride gas or equipment: 1, the dust granules in the hydrogen fluoride gas removes unclean, decontamination effect improving is undesirable, particularly, seem powerless for submicron and the small-particle below the nano level; 2, cost an arm and a leg complex manufacturing; 3, energy consumption is very high, and technological parameter fluctuation is bigger, and production process is difficult to control, causes environmental pollution simultaneously easily.
Summary of the invention
For overcoming the prior art deficiency, the present invention is primarily aimed at the dust granules in the anhydrous hydrogen fluoride gas, particularly at submicron and the following particle of nano level, provides a kind of purification system of anhydrous hydrogen fluoride gas.
A kind of purification system of anhydrous hydrogen fluoride gas is characterized in that: this purification system comprises intake ducting, outlet pipe, scavenging tower, dust collecting and back-blowing device; Intake ducting is positioned at the Lower Half of scavenging tower, and outlet pipe is positioned at the first half of scavenging tower; Place the ability temperature in the scavenging tower: the mould material of 20-100 ℃ and anti-negative pressure: 1000-3000MPa, the mould material aperture is less than 1 μ m, and simultaneously, this mould material has hydrofluoric acid corrosion resistance, and the total specific surface area of all mould materials is greater than 180m
2/ g; The collection device upper end is connected with the scavenging tower bottom; Back-blowing device is positioned at the scavenging tower first half or top, and an end links to each other with scavenging tower, and the other end links to each other with air compressor machine.
Described mould material is selected from tetrafluoroethylene, polyvinylidene difluoride (PVDF), polysulfones, polycarbonate, polyethersulfone or sintered plate.
This purification system has that production cost is low, and technical parameter is controlled easily, and operating mode is easy to operate, safety and environmental protection, can the mass-producing continuous production etc. advantage.After using this purification system, dust granules entrained in the anhydrous hydrogen fluoride gas can be eliminated totally substantially.Through surveying, in the anhydrous hydrogen fluoride gas at normal temperatures and pressures dust granules content less than 5g/m
3, the dust granules size that is removed between 200nm-500nm, mainly by fluorine, silicon, phosphorus, iron, sulphur, compositions such as oxygen.
Description of drawings:
Fig. 1 is the purification system synoptic diagram of anhydrous hydrogen fluoride
1, scavenging tower; 2, intake ducting; 3, outlet pipe; 4, back-blowing device; 5, mould material; 6, dust collecting
Embodiment
This purification system comprises intake ducting, outlet pipe, scavenging tower, dust collecting and back-blowing device.Intake ducting is positioned at the Lower Half of scavenging tower, and an end is connected by bend pipe with scavenging tower, and during use, the other end links to each other with the Reaktionsofen of preparation hydrogen fluoride gas; Outlet pipe is positioned at the first half of scavenging tower, and an end links to each other by straight tube with scavenging tower, and during use, the other end links to each other with follow-up using system; Placing in the scavenging tower can heatproof degree: 20-100 ℃ and the mould material of anti-negative pressure: 1000-3000MPa, and simultaneously, this mould material has hydrofluoric acid corrosion resistance, and its aperture is less than 1 μ m, and specific surface area is greater than 180m
2/ g, preferred tetrafluoroethylene, polyvinylidene difluoride (PVDF), polysulfones, polycarbonate, polyethersulfone and sintered plate mould material; Dust collecting is shaped as hydraucone, wherein hydraucone down, upper end and scavenging tower bottom is connected, and is mainly used in the collection dust granules; Back-blowing device is positioned at the scavenging tower first half or top, and an end links to each other by straight tube with scavenging tower, and the other end links to each other with air compressor machine, is mainly used in the adsorbed dust granules of purge scavenging tower inner membrane material.
Adopt inorganic fluoride and sulfuric acid in the relieving haperacidity stove, to react the anhydrous hydrogen fluoride gas (reaction conditions commercial run routinely carries out) that obtains carrying dust granules, after inlet pipe imports scavenging tower, send the anhydrous hydrogen fluoride gas that has removed dust granules by the air outlet.Every 2 hours by the back-blowing device purge once, the purge time is 2 minutes, and the dust granules that institute's purge gets off is collected by dust collecting and discharged from the bottom.Through surveying, the anhydrous hydrogen fluoride gas of sending by this purification system is dust granules content≤5g/m at normal temperatures and pressures
3, the dust granules size of institute's filtering is in the 200-500nm scope, and is mainly elementary composition by fluorine, sulphur, oxygen, silicon, phosphorus, iron etc.
In the scavenging tower membrane material characteristic parameter: temperature 20-100 ℃, negative pressure: 1000-3000Mpa, hydrofluoric acid corrosion resistance, the aperture is less than 1 μ m, and specific surface area is greater than 180m
2/ g.
Claims (2)
1. purification system of anhydrous hydrogen fluoride gas, it is characterized in that: this purification system comprises intake ducting, outlet pipe, scavenging tower, dust collecting and back-blowing device; Intake ducting is positioned at the Lower Half of scavenging tower, and outlet pipe is positioned at the first half of scavenging tower; Place the ability temperature in the scavenging tower: the mould material of 20-100 ℃ and anti-negative pressure: 1000-3000MPa, the mould material aperture is less than 1 μ m, and simultaneously, this mould material has hydrofluoric acid corrosion resistance, and the total specific surface area of all mould materials is greater than 180m
2/ g; The collection device upper end is connected with the scavenging tower bottom; Back-blowing device is positioned at the scavenging tower first half or top, and an end links to each other with scavenging tower, and the other end links to each other with air compressor machine.
2. purification system of anhydrous hydrogen fluoride gas according to claim 1 is characterized in that: described mould material is selected from tetrafluoroethylene, polyvinylidene difluoride (PVDF), polysulfones, polycarbonate, polyethersulfone or sintered plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910250320A CN101700875A (en) | 2009-12-04 | 2009-12-04 | Purification system of anhydrous hydrogen fluoride gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910250320A CN101700875A (en) | 2009-12-04 | 2009-12-04 | Purification system of anhydrous hydrogen fluoride gas |
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| CN101700875A true CN101700875A (en) | 2010-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200910250320A Pending CN101700875A (en) | 2009-12-04 | 2009-12-04 | Purification system of anhydrous hydrogen fluoride gas |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103674615A (en) * | 2013-12-17 | 2014-03-26 | 福建省邵武市永晶化工有限公司 | Sampling device and sampling method for anhydrous hydrogen fluoride |
| CN109289444A (en) * | 2018-07-25 | 2019-02-01 | 浙江森田新材料有限公司 | A kind of anhydrous hydrofluoric acid production line converter exhausting method |
| CN112938899A (en) * | 2021-02-26 | 2021-06-11 | 绿菱电子材料（天津）有限公司 | Purification method of high-purity electronic grade hydrogen bromide |
-
2009
- 2009-12-04 CN CN200910250320A patent/CN101700875A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103674615A (en) * | 2013-12-17 | 2014-03-26 | 福建省邵武市永晶化工有限公司 | Sampling device and sampling method for anhydrous hydrogen fluoride |
| CN103674615B (en) * | 2013-12-17 | 2016-05-04 | 福建省邵武市永晶化工有限公司 | A kind of anhydrous hydrogen fluoride sampler and sampling method |
| CN109289444A (en) * | 2018-07-25 | 2019-02-01 | 浙江森田新材料有限公司 | A kind of anhydrous hydrofluoric acid production line converter exhausting method |
| CN112938899A (en) * | 2021-02-26 | 2021-06-11 | 绿菱电子材料（天津）有限公司 | Purification method of high-purity electronic grade hydrogen bromide |
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Application publication date: 20100505 |