CN206184214U - Adsorption equipment is used in ammonia purification - Google Patents

Adsorption equipment is used in ammonia purification Download PDF

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Publication number
CN206184214U
CN206184214U CN201621226736.1U CN201621226736U CN206184214U CN 206184214 U CN206184214 U CN 206184214U CN 201621226736 U CN201621226736 U CN 201621226736U CN 206184214 U CN206184214 U CN 206184214U
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China
Prior art keywords
absorber
ammonia
level
class
adsorbent equipment
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CN201621226736.1U
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Chinese (zh)
Inventor
许军州
金向华
陈琦峰
张亿
郑黎
孙浩杰
宗立冬
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Jinhong Gas Co ltd
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Suzhou Jinhong Gas Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

The utility model discloses an adsorption equipment is used in ammonia purification can purify the raw materials ammonia to more than high -purity or even high -purity, sweep mouth, drain including primary adsorption ware, second grade adsorber, tertiary adsorber, adsorber connection stop valve, hot nitrogen, primary adsorption ware top exit linkage second grade adsorber bottom air inlet, second grade adsorber top exit linkage to tertiary adsorber bottom air inlet, hot nitrogen sweep mouthful top and the bottom that is in the adsorber with the drain respectively, install and are connected by stainless steel pipeline with the valve. The utility model discloses strong innovativeness, small investment, superior performance, harmful impurity such as the effectual oxygen of getting rid of in the raw materials ammonia (99.8%) of ability, nitrogen, carbon dioxide, water, sulphide, the total impurity content of high -purity ammonia after getting rid of is less than 5ppm, and festival energy saving bad news, pollute and lack, through the device, the raw materials ammonia lower with economic value changes the higher ammonia of concentration into after adsorbing, improved the value of product.

Description

A kind of ammonia purification adsorbent equipment
Technical field
The utility model is related to gas purification facilities field, more particularly to a kind of ammonia purification adsorbent equipment.
Background technology
Solar energy can be widely used in family's electricity generation system and large-scale business as one kind cleaning, efficient regenerative resource The numerous areas such as industry photovoltaic project, high-purity ammonia is in CVD(Chemical vapor deposition)During for production silicon nitride film nitrogen is provided Source, is the indispensable important process gas of Wafer Cleaning process, naturally also essential important of photovoltaic industry ELECTRICAL MATERIALS gas.
Current internal sources ammonia market is a lot of, and content is in 99.8% or so, and high-purity and the above ammonia(99.999%- 99.9995%)It is relatively little;High-purity and the above ammonia price is also all very high both at home and abroad simultaneously.Therefore by raw material ammonia Purification is imperative suitable for the high-purity ammon gas of solar energy industry, it is quite necessary to researches and develops new equipment and is used to purify raw material ammonia Gas.
The content of the invention
The purpose of this utility model is to provide a kind of ammonia purification adsorbent equipment;Disclosed multi-stage absorption tandem arrangement energy Adsorption capacity, the adsorption deeply of intensifier, the use value of increase raw material ammonia of device are enough improved, higher purity is obtained (6N、7N)Ammonia.
The technical solution of the utility model is:A kind of ammonia purification adsorbent equipment, including the primary adsorption being sequentially connected Device, second class absorber and three-level absorber;The first class absorber includes first class absorber housing and positioned at primary adsorption Porous ceramics adsorbent equipment in device housing;The second class absorber includes second class absorber housing and positioned at second class absorber A molecular sieve in housing;The three-level absorber includes three-level adsorber housing body and in three-level adsorber housing body No. two molecular sieves;The first class absorber is connected to raw material ammonia inlet pipe;The three-level absorber is connected to high-purity ammonia outlet pipe;It is described First class absorber is provided with sewage draining exit;The second class absorber is provided with sewage draining exit;The three-level absorber is provided with sewage draining exit;Described one Aperture of the aperture of number molecular sieve more than No. two molecular sieves.
In the utility model, first class absorber, second class absorber, three-level absorber pass sequentially through stainless steel pipes connection; Adsorber housing body can also be able to be other shapes for cylinder, preferably cylindrical also to avoid absorption dead beneficial to gas flowing Adsorbent equipment is set in angle, housing.The utility model sets porous ceramics adsorbent equipment, second class absorber in first class absorber And a molecular sieve and No. two molecular sieves are respectively provided with three-level absorber, can progressively filter miscellaneous in raw material ammonia The aperture of No. one molecular sieve of matter, especially forms gradient removal of impurities, beneficial to refining effect more than the aperture of No. two molecular sieves. Preferably, the filtering accuracy of porous ceramics adsorbent equipment is 0.05~0.1 micron, the model 13X of molecular sieve, No. two points The model 4A of son sieve;Raw material ammonia is entered by raw material ammonia inlet pipe, a large amount of moisture content, grease in absorption raw material ammonia thick first, The impurity such as dust, particulate matter, then substantial amounts of moisture content, sulphur gas thing and carbon dioxide in raw material ammonia are removed, last depth removes raw material A small amount of moisture content, sulphur gas thing and carbon dioxide in ammonia;Three groups of absorbers can all remove the impurity such as grease, oxygen nitrogen in various degree, It is up-to-standard through the high-purity ammon after three adsorbent equipment series connection absorption, area can be used into client by high-purity ammonia outlet pipe.
In the utility model, stop valve is designed with the raw material ammonia inlet pipe, high-purity ammonia outlet pipe;The primary adsorption Stop valve is designed between device, second class absorber and between second class absorber, three-level absorber;Be conducive to the control of air current flow System, so as to ensure refining effect.
In the utility model, the first class absorber, second class absorber and three-level absorber are designed with hot nitrogen and are purged into Mouthful;The impurity for adsorbing adsorbent equipment can be accelerated to be discharged from sewage draining exit using hot nitrogen purging, adsorption efficiency is not only improved, increased Refining effect, moreover it is possible to which the adsorbent equipment for being is recycled, reduces equipment cost.Preferably, described hot nitrogen purging entrance and row Dirty mouth is respectively at the top and bottom of each absorber, can increase purging effect.
In the utility model, the first class absorber top is connected with second class absorber bottom, the second class absorber top Portion is connected with three-level absorber bottoms;The raw material ammonia inlet pipe is connected with first class absorber bottom, high-purity ammonia outlet pipe It is connected with three-level absorber top.Gas is entered by absorber bottoms, top is discharged, and improves Impurity removal effect, raw material ammonia It is a large amount of miscellaneous that gas contains in after first class absorber, second class absorber, the absorption of three-level adsorbers serial, removing raw material ammonia Matter, such impurity includes oxygen, nitrogen, grease, sulfide, particle, powder and aqueous vapor and carbon dioxide, the high-purity ammon after removal Gas total impurities content is less than 5ppm, can meet commercial Application demand.
Because above-mentioned technical proposal is used, the utility model has following advantages compared with prior art:
1. the utility model devises a kind of ammonia purification adsorbent equipment, can effectively remove raw material ammonia(99.8%) In the objectionable impurities such as oxygen, nitrogen, carbon dioxide, water, sulfide, the high-purity ammonia total impurities content after removal is less than 5ppm, reaches To 6N grades, the demand of commercial Application can be met, while can also be prepared for the purification of the ammonia of higher purity;
2. device of the present utility model saves energy consumption, and pollution is few, can be by the relatively low ammonia of economic worth by the device Concentration ammonia higher is changed into after absorption, the value of product is improve, preferable economic benefit is created;
3. device of the present utility model can continue gas supply conduit, to solving without more factory building and investment, and high efficiency The source of the gas effect of the industry is more obvious, disclosure satisfy that absorption method is not also to air in photovoltaic industry and other field Environment is polluted, and is adapted to industrialized production.
Brief description of the drawings
Fig. 1 is the structural representation of the ammonia purification adsorbent equipment of embodiment one.
Wherein:1st, first class absorber;2nd, second class absorber;3rd, three-level absorber;4th, raw material ammonia inlet pipe;5th, high-purity ammonia Outlet pipe;6th, stop valve;7th, hot nitrogen blow valve port;8th, sewage draining exit.
Specific embodiment
As shown in figure 1, a kind of ammonia purification adsorbent equipment, is mainly formed by three groups of adsorbent equipment tandem compounds, including First class absorber 1, second class absorber 2, the three-level absorber 3 being sequentially connected by stainless steel pipes;First class absorber top exit Connection second class absorber bottom air inlet, second class absorber top exit is connected to three-level absorber bottoms air inlet;One-level is inhaled Adnexa is connected to raw material ammonia inlet pipe 4;Three-level absorber is connected to high-purity ammonia outlet pipe 5;Raw material ammonia inlet pipe, high-purity ammonia outlet pipe, Stop valve 6 is designed between first class absorber, second class absorber and between second class absorber, three-level absorber, is conducive to gas The control of flowing, so as to ensure refining effect;Hot nitrogen purging population 7, sewage draining exit 8 respectively positioned at each absorber top, Bottom;For sake of simplicity, in accompanying drawing at same parts mark one.
In above-mentioned ammonia purification adsorbent equipment, first class absorber includes first class absorber housing and positioned at primary adsorption Porous ceramics adsorbent equipment in device housing;Second class absorber includes second class absorber housing and positioned at second class absorber housing An interior molecular sieve;Three-level absorber includes three-level adsorber housing body and No. two molecules in three-level adsorber housing body Sieve;Porous ceramics adsorbent equipment is alundum (Al2O3) adsorbent equipment, and filtering accuracy is 0.05 micron, a model for molecular sieve 13X, No. two model 4A of molecular sieve.Porous ceramics adsorbent equipment, a molecular sieve and No. two molecular sieve sheets are as existing Product, it passes through conventional meanses in absorber.Raw material ammonia is adsorbed by first class absorber, second class absorber, three-level After device series connection absorption, remove a large amount of impurity for containing in raw material ammonia, such impurity comprising oxygen, nitrogen, grease, sulfide, Particle, powder and aqueous vapor and carbon dioxide.Alundum (Al2O3) adsorbent is loaded wherein in first class absorber to be inhaled as porous ceramics The impurity such as adsorption device, a large amount of moisture content, grease, dust, particulate matter in main thick absorption raw material ammonia;Loaded in second class absorber and divided Son sieve (13X) is main to remove substantial amounts of moisture content, sulphur gas thing and carbon dioxide in raw material ammonia as adsorbent equipment;Three-level absorber Molecular sieve (4A) is loaded as adsorbent equipment, a small amount of moisture content, sulphur gas thing and carbon dioxide in major depth removal raw material ammonia. Three groups of absorbers can all remove the impurity such as grease, oxygen nitrogen in various degree.High-purity ammon quality after being adsorbed through three adsorbent equipments It is qualified, area can be used into client through pipeline by shutoff valve.
Hot nitrogen purging is used for molecular sieve adsorption regeneration.Ammonia at by absorber goes removal of impurity effect to decline When, hot nitrogen purging will be carried out by blow valve port, while waste gas is discharged from sewage draining exit, adsorption efficiency is not only improved, increase is carried Pure effect, moreover it is possible to which the adsorbent equipment for being is recycled, reduces equipment cost.
By can effectively remove raw material ammonia after device of the present utility model(99.8%)In oxygen, nitrogen, carbon dioxide, The objectionable impurities such as water, sulfide, the high-purity ammonia total impurities content after removal is less than 5ppm, can meet the demand of client, while Also can be prepared for the purification of the ammonia of higher purity.The present apparatus saves energy consumption, and pollution is few, by the device, by economic worth compared with Low ammonia changes into concentration ammonia higher after absorption, improves the value of product, creates preferable economic benefit.
Embodiment two
A kind of ammonia purification adsorbent equipment, it is consistent with embodiment one, mainly formed by three groups of adsorbent equipment tandem compounds, Including the first class absorber, second class absorber, the three-level absorber that are sequentially connected by stainless steel pipes, difference is porous ceramics Adsorbent equipment is alundum (Al2O3) adsorbent equipment, and filtering accuracy is 0.1 micron, a model 13X for molecular sieve, No. two molecules The model 4A of sieve;By can effectively remove raw material ammonia after device of the present utility model(99.8%)In oxygen, nitrogen, dioxy Change the objectionable impurities such as carbon, water, sulfide, the high-purity ammonia total impurities content after removal is less than 5ppm, can meet the demand of client, Can also be prepared for the purification of the ammonia of higher purity simultaneously.

Claims (10)

1. a kind of ammonia purification adsorbent equipment, it is characterised in that:Including be sequentially connected first class absorber, second class absorber with And three-level absorber;
The first class absorber includes first class absorber housing and the absorption dress of the porous ceramics in first class absorber housing Put;
The second class absorber includes second class absorber housing and a molecular sieve in second class absorber housing;
The three-level absorber includes three-level adsorber housing body and No. two molecular sieves in three-level adsorber housing body;
The first class absorber is connected to raw material ammonia inlet pipe;The three-level absorber is connected to high-purity ammonia outlet pipe;The one-level is inhaled Adnexa is provided with sewage draining exit;The second class absorber is provided with sewage draining exit;The three-level absorber is provided with sewage draining exit;A number molecule Aperture of the aperture of sieve more than No. two molecular sieves.
2. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The first class absorber, secondary absorption Device, three-level absorber pass sequentially through stainless steel pipes connection.
3. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The first class absorber housing, two grades Adsorber housing body, three-level adsorber housing body are all cylinder.
4. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The mistake of the porous ceramics adsorbent equipment Filter precision is 0.05~0.1 micron;The model 13X of a number molecular sieve;The model 4A of No. two molecular sieves.
5. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The raw material ammonia inlet pipe, high-purity ammon Stop valve is designed with gas outlet pipe.
6. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The first class absorber, secondary absorption Stop valve is provided between device;Stop valve is provided between the second class absorber, three-level absorber.
7. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The first class absorber, secondary absorption Device and three-level absorber are designed with hot nitrogen purging entrance.
8. ammonia purification adsorbent equipment according to claim 7, it is characterised in that:The hot nitrogen purges entrance and sewage draining exit It is respectively at the top and bottom of absorber.
9. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The top of the first class absorber and two The bottom connection of level absorber;The top of the second class absorber is connected with the bottom of three-level absorber.
10. ammonia purification adsorbent equipment according to claim 1, it is characterised in that:The raw material ammonia inlet pipe and one-level The bottom connection of absorber, high-purity ammonia outlet pipe is connected with the top of three-level absorber.
CN201621226736.1U 2016-11-15 2016-11-15 Adsorption equipment is used in ammonia purification Active CN206184214U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621226736.1U CN206184214U (en) 2016-11-15 2016-11-15 Adsorption equipment is used in ammonia purification

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Application Number Priority Date Filing Date Title
CN201621226736.1U CN206184214U (en) 2016-11-15 2016-11-15 Adsorption equipment is used in ammonia purification

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110330034A (en) * 2019-06-12 2019-10-15 新沂市新维气体有限公司 A kind of ammonia purifying plant step by step being conveniently replaceable absorption material
CN116983815A (en) * 2023-09-26 2023-11-03 上海良薇机电工程有限公司 Adsorption filtering device and method and semiconductor process system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110330034A (en) * 2019-06-12 2019-10-15 新沂市新维气体有限公司 A kind of ammonia purifying plant step by step being conveniently replaceable absorption material
CN110330034B (en) * 2019-06-12 2021-01-15 新沂市新南环保产业技术研究院有限公司 Ammonia purification device step by step convenient to change and adsorb material
CN116983815A (en) * 2023-09-26 2023-11-03 上海良薇机电工程有限公司 Adsorption filtering device and method and semiconductor process system
CN116983815B (en) * 2023-09-26 2024-02-06 上海良薇机电工程有限公司 Adsorption filtering device and method and semiconductor process system

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CB03 Change of inventor or designer information

Inventor after: Jin Xianghua

Inventor after: Xu Junzhou

Inventor after: Chen Qifeng

Inventor after: Zong Lidong

Inventor before: Xu Junzhou

Inventor before: Jin Xianghua

Inventor before: Chen Qifeng

Inventor before: Zhang Yi

Inventor before: Zheng Li

Inventor before: Sun Haojie

Inventor before: Zong Lidong

CB03 Change of inventor or designer information
CP03 Change of name, title or address

Address after: 215152 Anmin Road, Panyang Industrial Park, Huangdai Town, Xiangcheng District, Suzhou City, Jiangsu Province

Patentee after: Jinhong Gas Co.,Ltd.

Address before: 215152 No. 6 Anmin Road, Panyang Industrial Park, Huangdi Town, Xiangcheng District, Suzhou City, Jiangsu Province

Patentee before: SUZHOU JINHONG GAS Co.,Ltd.

CP03 Change of name, title or address