CN206970213U - A kind of argon gas EGR in monocrystalline silicon production - Google Patents
A kind of argon gas EGR in monocrystalline silicon production Download PDFInfo
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- CN206970213U CN206970213U CN201720927760.6U CN201720927760U CN206970213U CN 206970213 U CN206970213 U CN 206970213U CN 201720927760 U CN201720927760 U CN 201720927760U CN 206970213 U CN206970213 U CN 206970213U
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- pipeline
- argon gas
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- single crystal
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims abstract description 134
- 229910052786 argon Inorganic materials 0.000 title claims abstract description 67
- 239000007789 gas Substances 0.000 title claims abstract description 64
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 15
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims abstract description 48
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 22
- 229960004643 cupric oxide Drugs 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 21
- 239000003921 oil Substances 0.000 claims abstract description 12
- 238000003860 storage Methods 0.000 claims abstract description 12
- 239000006200 vaporizer Substances 0.000 claims abstract description 8
- 238000005367 electrostatic precipitation Methods 0.000 claims abstract description 5
- 230000007062 hydrolysis Effects 0.000 claims description 5
- 238000006460 hydrolysis reaction Methods 0.000 claims description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 36
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 21
- 229910001868 water Inorganic materials 0.000 abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 16
- 239000001569 carbon dioxide Substances 0.000 abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 13
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 11
- 239000010949 copper Substances 0.000 abstract description 8
- 239000001257 hydrogen Substances 0.000 abstract description 8
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 8
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 abstract description 6
- 229910052802 copper Inorganic materials 0.000 abstract description 6
- 229930195733 hydrocarbon Natural products 0.000 abstract description 4
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 3
- 238000001914 filtration Methods 0.000 abstract description 3
- 150000003376 silicon Chemical class 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 230000009471 action Effects 0.000 abstract description 2
- 239000002699 waste material Substances 0.000 abstract description 2
- 238000005842 biochemical reaction Methods 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 21
- 239000001301 oxygen Substances 0.000 description 21
- 229910052760 oxygen Inorganic materials 0.000 description 21
- 238000000034 method Methods 0.000 description 18
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 238000011084 recovery Methods 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 229910000019 calcium carbonate Inorganic materials 0.000 description 6
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 6
- 239000000292 calcium oxide Substances 0.000 description 6
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 6
- 238000004064 recycling Methods 0.000 description 6
- 238000006555 catalytic reaction Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 239000000920 calcium hydroxide Substances 0.000 description 4
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 4
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 4
- 229910000020 calcium bicarbonate Inorganic materials 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- NKWPZUCBCARRDP-UHFFFAOYSA-L calcium bicarbonate Chemical compound [Ca+2].OC([O-])=O.OC([O-])=O NKWPZUCBCARRDP-UHFFFAOYSA-L 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012717 electrostatic precipitator Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Abstract
The utility model discloses the argon gas EGR in a kind of monocrystalline silicon production, including argon gas storage tank, vaporizer, single crystal growing furnace, vavuum pump, solidfied material processor, cupric oxide reactor, limewash reaction unit, drier and rectifying device；Enter solidfied material processor using vacuum pumped from the high-concentration waste argon gas that single crystal growing furnace ejects and carry out electrostatic precipitation, the solidfied materials such as oil therein, silicon class are filtered out by Electrostatic Absorption；The useless argon gas of early stage 5% drains into air after filtering, later stage 95% give up argon gas by scorching hot cupric oxide reactor make the hydrocarbons such as carbon monoxide, hydrogen, methane high temperature action issue it is biochemical reaction generation carbon dioxide, water, copper, enter back into that the device equipped with limewash is cooled down and chemical reaction removes carbon dioxide therein, moisture is got rid of by drying device, argon gas and nitrogen are fractionated into rectifier unit, the pure argon being fractionated, which is entered back into single crystal growing furnace, to be recycled；Realization rationally utilizes resource, does not pollute air.
Description
Technical field
It the utility model is related to a kind of system for applying to monocrystalline silicon production, the argon gas in especially a kind of monocrystalline silicon production
EGR.
Background technology
Show that the whole world there are 10,000 or so single crystal growing furnaces there are more than 8,000 platforms in China at present according to investigations, to the year two thousand twenty, single crystal growing furnace will
Reach 20,000, and a single crystal growing furnace takes around using 5.76 × 10 for average 1 year5L - 8.64×105L argon gas.Market at present
The cost of upper argon gas retracting device is significantly larger than the purchase cost of argon gas, and in face of the cost of great number, many producer more options will
Caused useless argon gas, which is directly thrown into air, during monocrystalline silicon production is not recycled.But result of which will
The continuous waste of our only earth resources is caused, the huge resource for wasting not only let us is fewer and fewer will also to cause me
Environment harm.
Application No. 201210078306.X, argon gas can say the method and apparatus of purifying in entitled monocrystalline silicon production
The method of middle use is：Thick oil removing first is carried out to the argon gas reclaimed from single crystal growing furnace, then high-precision oil removing removes after compressed cooling
Dirt；Then the hydro carbons such as methane and carbon monoxide is made to generate water and carbon dioxide, catalysis with oxygen reaction by high-temperature catalytic reaction
Ensure that oxygen is excessive in reaction；Again by making under catalyst action excessive oxygen react generation with the hydrogen added again after cooling
Water, the argon gas after catalytic reaction twice pass through normal temperature absorbing unit to adsorb water and carbon dioxide；By above-mentioned argon gas
Low-temperature fractionating tower is sent into after cooling, argon gas is produced rectifying with nitrogen and hydrogen and separates, obtain pure liquid argon, then obtained after re-heat
Straight argon product.The invention system is complicated, and equipment price is high, and is constantly consuming oxygen, hydrogen while argon gas is reclaimed,
Increase cost.
Application No. 201580006723.5, the argon gas of entitled manufacturing device of single crystal silicon reclaim exquisite method and argon
Gas reclaims delicate instruments, and this method, which has to import from manufacturing device of single crystal silicon to useless argon gas storage tank, contains nitrogen, oxygen and an oxygen
Change the process of the useless argon gas of carbon, remove the work of the solid content with the pre-processing device for removing the solid content in the useless argon gas
Sequence, the oxygen is converted into respectively by water by catalytic reaction, carbon monoxide will be narrated the process of carbon dioxide is converted into and goes
Except the process that the water, the carbon dioxide and the nitrogen are recycled gas, by the way that catalyst is configured at into twin-stage pressure
In contracting machine, the catalytic reaction only is carried out to obtain in the process of the gas recovery with the heat of compression, is gone in advance with drying machine
After the water, the nitrogen, the carbon dioxide are removed with normal temperature adsorption tower, obtains required argon gas product.The method equipment
Cost is high, in constantly consumption oxygen, hydrogen while argon gas is reclaimed, increases cost.
Utility model content
Therefore, in order to overcome above-mentioned deficiency, the utility model provides a kind of reasonable in design, simple in construction, user herein
Just, caused useless argon gas be recovered by filtration recycling during in a manner of low cost to monocrystalline silicon production, so as to reduce
Argon gas loses, and saves production cost.
The utility model is achieved in that the argon gas EGR constructed in a kind of monocrystalline silicon production, including argon gas are deposited
Storage tank, vaporizer, single crystal growing furnace, vavuum pump, solidfied material processor, cupric oxide reactor, limewash reaction unit, drier, with
And rectifying device；
The argon gas storage tank is connected by pipeline with vaporizer；
The vaporizer is connected with single crystal growing furnace by pipeline and is respectively arranged with valve on the connecting pipe；
The single crystal growing furnace is connected by pipeline with vavuum pump and rectifying device again, while is provided with valve on the pipeline；
The vavuum pump is connected with cupric oxide reactor and limewash reaction unit respectively by pipeline, and respectively in the pipe
Valve is provided with road, while the vavuum pump is also connected by pipeline with solidfied material processor, and threeway is set on the pipeline
Pipeline, and it is provided with valve；
The solidfied material processor is connected by pipeline with cupric oxide reactor, and is provided with valve on the pipeline；
The cupric oxide reactor is connected by pipeline with limewash reaction unit, and is provided with valve on the pipeline；
The limewash reaction unit is connected by pipeline with drier again, and valve is set on the pipeline；
The drier is connected by pipeline with rectifying device again.
Preferably, in addition to hydrolysis device, the hydrolysis device are connected by pipeline with cupric oxide reactor, and in the pipeline
On be provided with valve.
Preferably, the solidfied material processor is electrostatic precipitation oil expeller, and collection storage device is provided with bottom.
The utility model application method is as follows：
The useless argon gas come out from single crystal growing furnace removes through vacuum pumping to solidfied material processor, the solidfied material processor for electric precipitation
Oily device is removed oil, silicon class solidfied material using the principle of Electrostatic Absorption；The useless argon gas of early stage 5% is drained into air, later stage 95% again
Useless argon gas makes the hydrocarbons such as hydrogen in waste gas, carbon monoxide, methane occur with scorching hot cupric oxide by scorching hot cupric oxide
Chemical reaction generation carbon dioxide, water, copper；Then useless argon gas is removed into carbon dioxide therein by limewash reaction unit,
After being dried into drier, then nitrogen is removed in rectifying, and the pure argon after most handling at last, which is sent back in single crystal growing furnace, to be recycled.
The utility model has the advantages that：
The utility model is designed reasonably, it is simple in construction, it is easy to use, can be reasonably in a manner of low cost to monocrystalline silicon
Caused useless argon gas be recovered by filtration recycling in production process, so as to reduce argon gas loss, saves production cost；
By reasonably designing solidfied material processor, the processor uses electrostatic precipitation oil expeller, the oil of attachment and solidification
Thing is voluntarily fallen into storage tank according to Gravitative Loads, belongs to recycling plant, and filter will be regularly replaced by being different from other filters
Core increases cost.
By reasonably designing cupric oxide reactor, in the reactor, cupric oxide and carbon monoxide, hydrogen, methane etc.
The product copper of chemical reaction generation occurs for hydrocarbons, and oxygen is added under normal temperature condition can make copper continue oxidation generation cupric oxide
Reach the purpose of recycling, unnecessary oxygen is discharged into air.
Simultaneously by reasonably designing hydrolysis device, the source of oxygen is realized, the source of oxygen is then produced using water electrolysis
Oxygen, without removing the oxygen of buy product, the method that oxygen is directly just produced by water electrolysis provides required oxygen, section
The about energy, reduce cost.
And by reasonably designing limewash reaction unit, in the apparatus, using limewash generation calcium carbonate and
Calcium bicarbonate makes it be decomposed into calcium oxide, carbon dioxide by heating, and calcium oxide meets water generation calcium hydroxide and realizes reuse,
Carbon dioxide is discharged into air.
The utility model is in argon gas refines removal process, and the rate of recovery of argon gas reaches more than 90 percent, utilization rate
For 85 percent, recovery precision can reach 99.99%, and cost recovery is 1,000 yuan per ton of price.
Brief description of the drawings
Fig. 1 is Tthe utility model system module diagram；
In figure：101st, argon gas storage tank；102nd, vaporizer；103rd, single crystal growing furnace；104th, vavuum pump；105th, solidfied material is handled
Device；107th, cupric oxide reactor；108th, limewash reaction unit；109th, drier；110th, rectifying device；1、2、3、4、5、6、7、
8th, 9,10,11,12,13, valve.
Embodiment
The utility model is described in detail below in conjunction with accompanying drawing 1, to the technical side in the utility model embodiment
Case is clearly and completely described, it is clear that and described embodiment is only the utility model part of the embodiment, rather than
Whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work
Under the premise of the every other embodiment that is obtained, belong to the scope of the utility model protection.
As shown in figure 1, single crystal growing furnace 103 closes all valves after starting in addition to valve 1,3,6,7, vavuum pump 104 is utilized
It will be vacuumized in stove, most of air in single crystal growing furnace 103 and small part argon gas drained into air, this process needs 4 hours；When
When vacuum reaches 10 support in stove, valve 7 is closed, while opens valve 2,8,11,13, is filled with the argon gas from recovery circulation,
Insufficient section comes out the argon gas after normal temperature vaporization to supply using liquid argon storage tank, and this process needs 2 hours；When vacuum in stove
Reach 15 supports, silicon material is heated, melted, this process is time-consuming 8 hours；Then crystal pulling 4 hours, cool down 6 ~ 8 hours, argon gas from
Into single crystal growing furnace to 24 ~ 26 hours or so the time left, finally close stove and shut down the time without argon gas as 6 hours.Whole blow-on
During argon gas ceaselessly refining recovery, recycle, close above-mentioned all valves after blowing out, open valve 4,5,9,
10th, material carries out secondary chemical reaction in 12 pairs of cupric oxide reactors and lime water reactor, is returned to original state.
In said process, the useless argon gas that argon concentration is up to 90 percent drains into solidfied material processor by vavuum pump
Electrostatic precipitation oil removing is carried out, removes the solidfied materials such as oil in useless argon gas, silicon class.Adsorb oil, solidfied material in electrostatic precipitator
Bottom storage tank is fallen into by deadweight, periodically carries out cleaning dedusting oil removing when not in use.
Useless argon gas after solidfied material has been handled is chemically reacted into the reactor equipped with scorching hot cupric oxide, CuO+ H2
→ Cu + H2O, CuO + CO → Cu + CO2, 4CuO + CH4→ 4Cu + CO2↑+ 2H2O, the mistake of this chemical reaction
Journey disposably removes the foreign gases such as the hydrogen in useless argon gas, carbon monoxide, methane, and the copper for being reduced out is at normal temperatures
Add oxygen and can and be oxidized to cupric oxide, reused, process was not only simple but also environmentally friendly.
Gas from said process out includes：Carbon dioxide, water, nitrogen, argon gas, this mixed gas is passed through into lime
Water reactor removes carbon dioxide therein, and the chemical reaction of generation is：Ca(OH)2 + CO2→ CaCO3↓ +H2O, CaCO3
+ CO2 +H2O →Ca(HCO3)2, it is dried into drying device, eventually enters into rectifier unit and remove nitrogen, be fractionated
Be we extract the pure argon of recycling.The pure argon of recovery endlessly enters single crystal growing furnace and repeats to make
With when yield deficiency, Open valve 1 supplements the argon gas required in single crystal growing furnace.
Above-mentioned all valves are closed after blowing out, open valve 4,5,9,10,12.Using apparatus for electrolyzing by oxygen and hydrogen
Gas carries out separation electrolysis equation：2H2O → 2H2↑ + O2↑, the oxygen separated is sent into the device equipped with cupric oxide,
Sufficient oxygen is chemically reacted at normal temperatures with copper： 2Cu + O2→ 2CuO, unnecessary oxygen passes through after the completion of reaction
Vavuum pump drains into air.
Limewash removes the calcium carbonate of carbon dioxide production simultaneously and calcium bicarbonate is decomposed life in the state of heating
Into calcium oxide and water, calcium oxide meets water and becomes calcium hydroxide again, becomes the product of our needs again, and chemical equation is：Ca
(HCO3)2→ CaCO3↓ + CO2↑ + H2O, CaCO3→CaO + CO2↑, CaO+H2O →Ca(OH)2, it is raw after the completion of reaction
Into carbon dioxide drained into by vavuum pump in air.Check function is respectively provided between valve, is closed after the completion of gas emptying
Close and state valve, whole argon recovery systems are in original state again, wait for quietly recycling useless argon gas next time.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments in the case where not departing from spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (3)
- A kind of 1. argon gas EGR in monocrystalline silicon production, it is characterised in that：Including argon gas storage tank（101）, vaporizer （102）, single crystal growing furnace（103）, vavuum pump（104）, solidfied material processor（105）, cupric oxide reactor（107）, limewash reaction Device（108）, drier（109）And rectifying device（110）；The argon gas storage tank（101）Pass through pipeline and vaporizer（102）Connection；The vaporizer（102）Pass through pipeline and single crystal growing furnace（103）Connect and be provided with valve on the connecting pipe；The single crystal growing furnace（103）Pass through pipeline and vavuum pump respectively（104）And rectifying device（110）Connection, while in the pipeline On be provided with valve；The vavuum pump（104）By pipeline respectively with cupric oxide reactor（107）With limewash reaction unit（108）Connection, And valve is provided with the pipeline respectively, while the vavuum pump（104）Also pass through pipeline and solidfied material processor（105）Even Connect, triplate line is set on the pipeline, and is provided with valve；The solidfied material processor（105）Pass through pipeline and cupric oxide reactor（107）Connection, four-way pipe is set on the pipeline Road, and it is provided with valve on the pipeline；The cupric oxide reactor（107）Pass through pipeline and limewash reaction unit（108）Connection, and be provided with the pipeline Valve；The limewash reaction unit（108）Pass through pipeline and drier again（109）Connection, valve is set on the pipeline；The drier（109）Pass through pipeline and rectifying device again（110）Connection.
- A kind of 2. argon gas EGR in monocrystalline silicon production according to claim 1, it is characterised in that：Also include hydrolysis dress Put（106）, the hydrolysis device（106）Pass through pipeline and cupric oxide reactor（107）Connection, and it is provided with valve on the pipeline Door.
- A kind of 3. argon gas EGR in monocrystalline silicon production according to claim 1, it is characterised in that：At the solidfied material Manage device（105）For electrostatic precipitation oil expeller, and collection storage device is provided with bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720927760.6U CN206970213U (en) | 2017-07-28 | 2017-07-28 | A kind of argon gas EGR in monocrystalline silicon production |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720927760.6U CN206970213U (en) | 2017-07-28 | 2017-07-28 | A kind of argon gas EGR in monocrystalline silicon production |
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| Publication Number | Publication Date |
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| CN206970213U true CN206970213U (en) | 2018-02-06 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109078442A (en) * | 2018-09-18 | 2018-12-25 | 湖北和远气体股份有限公司 | A kind of crystal pulling furnace richness argon tail gas oil removing system |
| CN110608367A (en) * | 2019-09-30 | 2019-12-24 | 苏州苏净保护气氛有限公司 | Argon recycling system and method |
| CN111403784A (en) * | 2020-03-23 | 2020-07-10 | 中铁轨道交通装备有限公司 | Apparatus for removing carbon monoxide, hydrogen fuel cell having the same, and vehicle |
| CN112320164A (en) * | 2020-12-09 | 2021-02-05 | 浙江佳乐科仪股份有限公司 | Garbage classification collection transfer vehicle |
-
2017
- 2017-07-28 CN CN201720927760.6U patent/CN206970213U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109078442A (en) * | 2018-09-18 | 2018-12-25 | 湖北和远气体股份有限公司 | A kind of crystal pulling furnace richness argon tail gas oil removing system |
| CN110608367A (en) * | 2019-09-30 | 2019-12-24 | 苏州苏净保护气氛有限公司 | Argon recycling system and method |
| CN111403784A (en) * | 2020-03-23 | 2020-07-10 | 中铁轨道交通装备有限公司 | Apparatus for removing carbon monoxide, hydrogen fuel cell having the same, and vehicle |
| CN112320164A (en) * | 2020-12-09 | 2021-02-05 | 浙江佳乐科仪股份有限公司 | Garbage classification collection transfer vehicle |
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