CN101685251B - Camera lens calibration method and system - Google Patents

Camera lens calibration method and system Download PDF

Info

Publication number
CN101685251B
CN101685251B CN2008102002716A CN200810200271A CN101685251B CN 101685251 B CN101685251 B CN 101685251B CN 2008102002716 A CN2008102002716 A CN 2008102002716A CN 200810200271 A CN200810200271 A CN 200810200271A CN 101685251 B CN101685251 B CN 101685251B
Authority
CN
China
Prior art keywords
information
parameter information
surveyed area
zone
correction feature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008102002716A
Other languages
Chinese (zh)
Other versions
CN101685251A (en
Inventor
吕秋玲
赵庆国
黄臣
高燕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Shanghai Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN2008102002716A priority Critical patent/CN101685251B/en
Publication of CN101685251A publication Critical patent/CN101685251A/en
Application granted granted Critical
Publication of CN101685251B publication Critical patent/CN101685251B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Studio Devices (AREA)

Abstract

The present invention provides a camera lens calibration method and system for improving calibration efficiency and saving human resource. The method comprises the following steps: acquiring the position information corresponding to the specified detected area of a die to be detected; utilizing a Camera to be detected to detect an element to be detected; obtaining a practical detected area and corresponding position information and calibration characteristic parameter information; obtaining adjusting parameter information; and adjusting the practical detected area according to the position information, the calibration characteristic parameter information and the adjusting parameter information to enable the practical detected area to coincide with the specified detected area.

Description

Camera lens calibration method and system
Technical field
The present invention relates to integrated circuit and make the field, relate in particular to camera lens calibration method and system.
Background technology
Along with technical progress, the integrated circuit integrated level improves rapidly, this to integrated circuit manufacturing have higher requirement.Be the integrated circuit specification up to specification that guarantees to produce, just need be to the integrated circuit before encapsulating, be that primitive (die) detects, it detects principle: use camera lens (Camera) to detect the regulation zone, judge whether detect the image that obtains meets the requirements, if meet, then die is qualified, otherwise die is defective.
In actual production process, probably owing to reasons such as Camera pollution, damage need be changed Camera, because pixel value (pixel value) and the optical tolerance (optics tolerance) of Different Ca mera have nuance, therefore qualified die is when the Camera detection of using after changing, may obtain the underproof testing result of die, thereby cause the testing result mistake.
Fig. 1~2 are respectively the synoptic diagram that pixel value difference and optical tolerance difference cause the actual detected region shifts; Stipulating surveyed area among the figure, can be the border of die, and in conjunction with this figure as can be known, the pixel value difference can make when detecting, and not only detects the zone of regulation, but also has detected additional areas; And the optical tolerance difference can make the actual detected zone with respect to the scope of regulation surveyed area skew be arranged, and this all may cause the testing result error.
The synoptic diagram of the testing result error that Fig. 3 brings for pixel value and optical tolerance difference.The indicated lines of circle are thicker than other lines among Fig. 3, and promptly the testing result of this qualified die is defective, and this figure shows because Camera pixel value difference and the optical tolerance difference after changing, and the testing result that causes this qualified die is defective.
For avoiding the problem of above-mentioned detection error, after changing Camera, will be in the prior art by manually to adopting checking treatment such as Camera after this replacings focuses, promptly by the artificial actual detected zone of adjusting, make that actual detected is regional to be overlapped with the regulation surveyed area.But because before a qualified die goes out production line, nearly more than 100 are detected step, this makes that the actual detected number of regions that need adjust is numerous, and the checking time in each actual detected zone was about 30~60 minutes, therefore waste time and energy the low and waste of manpower problem of resource of verification efficient with manually carrying out verification adjustment existence.
Summary of the invention
The invention provides camera lens calibration method and system, to improve verification efficient and to save human resources.
The present invention proposes camera lens calibration method, comprise step: the pairing positional information of regulation surveyed area that obtains die to be detected, adopt Camera to be verified to detect primitive to be detected, obtain actual detected zone and this zone corresponding position information and correction feature parameter information, obtain to adjust parameter information, and, adjust the actual detected zone according to described positional information, correction feature parameter information and adjustment parameter information, it is overlapped with the regulation surveyed area.
The present invention also proposes the camera lens check system, comprising: the first information obtains the unit, is used to obtain the pairing positional information of regulation surveyed area of primitive to be detected; The second information acquisition unit is used to adopt Shot Detection to be verified primitive to be detected, obtains actual detected zone and this zone corresponding position information and correction feature parameter information; Adjust parameter and obtain the unit, be used for obtaining to adjust parameter information; Verification unit is used for adjusting the actual detected zone according to described positional information, correction feature parameter information and adjustment parameter information, and it is overlapped with the regulation surveyed area.
The present invention is by obtaining the pairing positional information of regulation surveyed area of die to be detected, adopt Camera to be verified to detect primitive to be detected, obtain actual detected zone and this zone corresponding position information and correction feature parameter information, obtain to adjust parameter information, and according to described positional information, correction feature parameter information and adjustment parameter information, adjustment actual detected zone, it is overlapped with the regulation surveyed area, realized the automatic verification of this Camera, thereby having solved in the prior art desk checking wastes time and energy, reduce verification efficient and waste of manpower problem of resource, improved verification efficient and saved human resources.
Description of drawings
Fig. 1 causes the synoptic diagram of actual detected region shifts for the pixel value difference;
Fig. 2 causes the synoptic diagram of actual detected region shifts for the optical tolerance difference;
The synoptic diagram of the testing result error that Fig. 3 brings for pixel value and optical tolerance difference;
Fig. 4 is the process flow diagram of the Camera method of calibration of embodiment of the invention proposition;
Fig. 5 is the structural representation of the Camera check system of embodiment of the invention proposition.
Embodiment
Prior art makes its actual surveyed area and regulation surveyed area keep overlapping based on the Camera that manually comes after verification is changed, and therefore existing wastes time and energy, and causes the low and waste of manpower problem of resource of verification efficient.For addressing the above problem, the embodiment of the invention proposes the Camera after verification adjustment is automatically changed, and makes its actual surveyed area and regulation surveyed area keep overlapping, to improve verification efficient and to save human resources.
According to the analysis of background technology as can be known, the reason that needs verification to change back Camera is: pixel value and the optical tolerance difference of changing back Camera, make its actual surveyed area and regulation surveyed area that difference be arranged, thereby cause testing result wrong, if therefore can after changing Camera,, adjust the actual detected zone by automatic verification, it is overlapped with the regulation surveyed area, then just realize changing the automatic verification of back Camera.
For the actual detected zone is overlapped with the adjustment of regulation surveyed area, the embodiment of the invention proposes to adopt following thinking to adjust: the regulation surveyed area of die more to be detected and the actual detected zone of adopting replacing back Camera to obtain, obtain the difference of described actual detected zone and regulation surveyed area, and then according to described difference, adjustment actual detected zone, it is overlapped with the regulation surveyed area, thereby realize changing the automatic verification of back Camera.
Based on above-mentioned thinking, the embodiment of the invention proposes following Camera method of calibration, to improve verification efficient and to save human resources.
Fig. 4 is the process flow diagram of the Camera method of calibration of embodiment of the invention proposition, and in conjunction with this figure as can be known, described Camera method of calibration comprises:
Step 1, according to the initial product configuration information (original product setupinformation) of die to be detected, obtain pairing positional information of regulation surveyed area and correction feature (alignment characteristic) parameter information of die to be detected;
Step 2 adopts Camera to be verified to detect described die to be detected, obtains actual detected zone and corresponding position information thereof and correction feature parameter information; Wherein said Camera to be verified is generally the Camera after the replacing.
Step 3 according to described regulation surveyed area and actual detected zone positional information separately and correction feature parameter information separately, obtains to adjust parameter;
Wherein the positional information of surveyed area can be the positional information of surveyed area reference point, described reference point has the various definitions mode, generally be the point of selecting to have in actual detected zone and the regulation surveyed area same characteristic features, this feature not can or the less influence that is subjected to changing Camera.A point for example will stipulating to equate with actual detected area pixel value in the surveyed area is as reference point, if the point that wherein has a plurality of pixel values to equate then can be selected one as reference point according to actual performance; Perhaps with the central point in two zones as reference point etc.
Step 4 according to the adjustment parameter that obtains, is adjusted the actual detected zone, and it is overlapped with the regulation surveyed area.
Wherein in the step 3, adjusting parameter can obtain in the following way: calculate the difference of the correction feature parameter of actual detected zone and regulation surveyed area, described difference is defined as adjusting parameter information.
Can obtain in this way in addition: calculate the side-play amount of the reference point location of actual detected zone and regulation surveyed area, described side-play amount is defined as adjusting parameter information.
Adopt which parameter can determine according to actual performance as described correction feature parameter, because the purpose of correction feature parameter is to make actual detected zone and regulation surveyed area to overlap, as long as therefore the parameter that can help this purpose to realize all can be used as the correction feature parameter in fact herein.For this reason, can also be before obtaining the correction feature parameter, the step of selecting the correction feature parameter is arranged, with according to dissimilar surveyed areas, select more effective correction feature parameter, with further raising verification efficient, because the correction feature parameter of acquiescence can be arranged, it is optional therefore selecting the correction feature parameter herein certainly.Provide the example of correction feature parameter below, but this and non-limiting correction feature parameter.For example be as the criterion with reference point, as the correction feature parameter, this moment, corresponding adjustment parameter was the coordinate difference of each frontier point with the coordinate of the frontier point of actual detected zone and regulation surveyed area.
By above-mentioned steps, can realize actual detected zone and regulation surveyed area are overlapped, promptly realized changing the automatic verification of back Camera, improve verification efficient and saved human resources.
In addition for different die, because it is identical changing under the influence major part situation of back Camera to surveyed area, promptly the adjustment parameter of Huo Deing is certain, when detecting die, is not all to need to obtain to adjust parameter by step 3 for each die therefore.Generally, after execution in step 2, store in advance by use, the direct execution in step 4 of acquired adjustment parameter can realize automatic verification, so for major part die to be detected, step 3 is optional, can directly utilize existing adjustment parameter, adjust the actual detected zone, realize the automatic verification of these die.So just need not when detecting each die all execution in step 3, thereby saved the processing resource, and further improved verification efficient.If certainly when detecting each die all execution in step 3 also be fine, do not limit here.If execution in step 3 not in addition, then step 1 positional information that needs to obtain the regulation zone gets final product, and promptly can just obtain the pairing positional information of regulation surveyed area of die to be detected in the step 1.
Provide an embodiment of said method below, among this embodiment, actual detected zone and regulation surveyed area be shaped as rectangle, reference point is an actual detected zone and an equal point of regulation surveyed area pixel value, the correction feature parameter is the coordinates of four drift angles of rectangle with respect to reference point.Then after changing Camera, checking procedure is: at first obtain the reference point location information of the regulation surveyed area of die to be detected, reach the coordinate information with respect to four drift angles of reference point; Detect die to be detected then, obtain the regional and corresponding reference point location information of actual detected and the coordinate information of four drift angles; Calculate the coordinate difference of actual detected zone and each drift angle of regulation surveyed area again, at last according to the reference point coordinate information, reference point and reference point are overlapped, again according to the coordinate difference, adjust the border in actual detected zone, it is overlapped with the regulation surveyed area, thereby realized changing the verification of back Camera automatically, improved verification efficient and saved human resources.
The embodiment of the invention has also proposed the check system of Camera, to realize the Camera after automatic verification is changed, improves verification efficient and saves human resources.
Fig. 5 is the structural representation of the Camera check system of embodiment of the invention proposition, and in conjunction with this figure as can be known, described check system comprises:
The first information obtains unit 10, is used to obtain the pairing positional information of regulation surveyed area of primitive to be detected;
The second information acquisition unit 20 is used to adopt Shot Detection to be verified primitive to be detected, obtains actual detected zone and this zone corresponding position information and correction feature parameter information;
Adjust parameter and obtain unit 30, be used for obtaining to adjust parameter information;
Verification unit 40 is used for adjusting the actual detected zone according to described positional information, correction feature parameter information and adjustment parameter information, and it is overlapped with the regulation surveyed area.
If use the positional information of the positional information of reference point as surveyed area as mentioned above, then described adjustment parameter unit 30 can comprise following subelement: the subelement of difference that is used to calculate the correction feature parameter of actual detected zone and regulation surveyed area; And the subelement that is used for described difference is defined as adjusting parameter information.
Described in addition adjustment parameter unit 30 also can comprise subelement: the subelement of side-play amount that is used to calculate the reference point location of actual detected zone and regulation surveyed area; And the subelement that is used for described side-play amount is defined as adjusting parameter information.
Because above-mentioned correction feature parameter can be determined according to actual performance, as long as the parameter that can help this purpose to realize all can be used as the correction feature parameter, therefore, described check system can also be provided for before obtaining the correction feature parameter, select the unit of correction feature parameter, with according to dissimilar surveyed areas, select more effective correction feature parameter, with further raising verification efficient, certainly because the correction feature parameter of acquiescence can be arranged, therefore this unit that is used for selection correction feature parameter before obtaining the correction feature parameter is optional herein.
In addition for different die, because it is identical changing under the influence major part situation of back Camera to surveyed area, promptly the adjustment parameter of Huo Deing is certain, and therefore described Camera check system might not need to comprise that adjusting parameter obtains unit 30, so this unit is optional.If each die adopts the check system verification that comprises above-mentioned four unit certainly, then its verification accuracy will improve greatly.If do not comprise that in addition adjusting parameter obtains unit 30, then the first information obtains the correction feature parameter information that unit 10 also just can not obtain described regulation zone, and it is optional promptly obtaining this information.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.

Claims (8)

1. a camera lens calibration method is characterized in that, comprising:
Obtain the pairing positional information of regulation surveyed area of primitive to be detected, described primitive is the integrated circuit before the encapsulation;
Adopt Shot Detection to be verified primitive to be detected, obtain actual detected zone and this zone corresponding position information and correction feature parameter information;
Obtain to adjust parameter information, described acquisition is adjusted parameter information and is specifically comprised: the pairing correction feature parameter information of regulation surveyed area that obtains primitive to be detected earlier; Surveyed area and actual detected zone positional information separately and correction feature parameter information separately according to the rules obtain to adjust parameter information then;
According to described positional information, correction feature parameter information and adjustment parameter information, adjust the actual detected zone, it is overlapped with the regulation surveyed area.
2. the method for claim 1 is characterized in that, described positional information is the positional information of reference point in the zone; And described acquisition adjustment parameter information specifically comprises:
Calculate the difference of the correction feature parameter of actual detected zone and regulation surveyed area;
Described difference is defined as adjusting parameter information.
3. the method for claim 1 is characterized in that, described positional information is the positional information of reference point in the zone; And described acquisition adjustment parameter information specifically comprises:
Calculate the side-play amount of actual detected area reference point position and regulation surveyed area reference point location;
With described side-play amount, be defined as adjusting parameter information.
4. as each described method in the claim 1~3, it is characterized in that, also be included in obtain the correction feature parameter before, select the step of correction feature parameter.
5. a camera lens check system is characterized in that, comprising:
The first information obtains the unit, is used to obtain the pairing positional information of regulation surveyed area of primitive to be detected, and described primitive is the integrated circuit before the encapsulation;
The second information acquisition unit is used to adopt Shot Detection to be verified primitive to be detected, obtains actual detected zone and this zone corresponding position information and correction feature parameter information;
Adjust parameter and obtain the unit, be used for obtaining to adjust parameter information, described adjustment parameter obtains the unit and specifically comprises: the subelement that is used to obtain the pairing correction feature parameter information of regulation surveyed area of primitive to be detected; And be used for surveyed area and actual detected zone positional information separately and correction feature parameter information separately according to the rules, obtain to adjust the subelement of parameter information;
Verification unit is used for adjusting the actual detected zone according to described positional information, correction feature parameter information and adjustment parameter information, and it is overlapped with the regulation surveyed area.
6. system as claimed in claim 5 is characterized in that, described positional information is the positional information of reference point in the zone; And the subelement of described acquisition adjustment parameter information, specifically comprise:
Be used to calculate the subelement of difference of the correction feature parameter of actual detected zone and regulation surveyed area;
Be used for described difference is defined as adjusting the subelement of parameter information.
7. system as claimed in claim 5 is characterized in that, described positional information is the positional information of reference point in the zone; And the subelement of described acquisition adjustment parameter information, specifically comprise:
Be used to calculate the subelement of the side-play amount of actual detected area reference point position and regulation surveyed area reference point location;
Be used for described side-play amount is defined as adjusting the subelement of parameter information.
8. as each described system in the claim 5~7, it is characterized in that, also comprise being used for before obtaining the correction feature parameter, select the unit of correction feature parameter.
CN2008102002716A 2008-09-23 2008-09-23 Camera lens calibration method and system Expired - Fee Related CN101685251B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008102002716A CN101685251B (en) 2008-09-23 2008-09-23 Camera lens calibration method and system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2008102002716A CN101685251B (en) 2008-09-23 2008-09-23 Camera lens calibration method and system

Publications (2)

Publication Number Publication Date
CN101685251A CN101685251A (en) 2010-03-31
CN101685251B true CN101685251B (en) 2011-07-20

Family

ID=42048466

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008102002716A Expired - Fee Related CN101685251B (en) 2008-09-23 2008-09-23 Camera lens calibration method and system

Country Status (1)

Country Link
CN (1) CN101685251B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102932593B (en) * 2012-10-10 2015-04-22 深圳市航盛电子股份有限公司 Method and system for automatic centering of camera
CN105678763B (en) * 2016-01-05 2018-11-27 博众精工科技股份有限公司 A kind of stable straight line/circle characteristic detection method and device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1378261A (en) * 2001-03-27 2002-11-06 安藤电气株式会社 Carrier band packaging processor
CN101030549A (en) * 2006-03-03 2007-09-05 株式会社爱德万测试 Tcp handler, and method of detecting defective punching hole therefor
CN101097398A (en) * 2006-06-30 2008-01-02 鸿富锦精密工业(深圳)有限公司 Lens testing device and method
CN101149558A (en) * 2006-09-22 2008-03-26 鸿富锦精密工业(深圳)有限公司 Method for detecting lens module performance
CN101191994A (en) * 2006-12-01 2008-06-04 鸿富锦精密工业(深圳)有限公司 Optical look angle measuring systems and its measuring method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1378261A (en) * 2001-03-27 2002-11-06 安藤电气株式会社 Carrier band packaging processor
CN101030549A (en) * 2006-03-03 2007-09-05 株式会社爱德万测试 Tcp handler, and method of detecting defective punching hole therefor
CN101097398A (en) * 2006-06-30 2008-01-02 鸿富锦精密工业(深圳)有限公司 Lens testing device and method
CN101149558A (en) * 2006-09-22 2008-03-26 鸿富锦精密工业(深圳)有限公司 Method for detecting lens module performance
CN101191994A (en) * 2006-12-01 2008-06-04 鸿富锦精密工业(深圳)有限公司 Optical look angle measuring systems and its measuring method

Also Published As

Publication number Publication date
CN101685251A (en) 2010-03-31

Similar Documents

Publication Publication Date Title
CN105511123B (en) A kind of High Precision Automatic Systems for optical inspection and method based on mechanical arm
CN101937292B (en) Object detection calibration system of an optical touch screen and method thereof
CN103279956B (en) A kind of method detecting chip mounter components and parts positioning precision
EP3119078A3 (en) Image capturing device and auto-focus method thereof
US7932938B2 (en) Method, apparatus and system providing adjustment of pixel defect map
CN103235939A (en) Datum point positioning method based on machine vision
CN105701492A (en) Machine vision identification system and implementation method thereof
CN105303573B (en) Pin detection method and system for gold needle type element
CN104376573A (en) Image spot detecting method and system
CN101685251B (en) Camera lens calibration method and system
CN103207514A (en) Lens detecting device and method
CN110992313A (en) Camera image center detection and center adjustment method based on machine vision
CN101995325A (en) Appearance detection method and system of image sensor
CN102968177A (en) Gesture sensing method and device
CN103471618B (en) A kind of image collecting device error of coordinate assay method of vision detection system
CN104980718A (en) Color correction devices and methods
US20150116486A1 (en) Terminal device, image measuring system and method of inspection of workpiece
CN106197365A (en) A kind of optical axis included angle detection method of multiple stage viewing field of camera splicing
US9407830B2 (en) Framework and method for controlling illumination of object being photographed
CN104504386A (en) Modular AOI (automated optical inspection) positioning method, system and burning IC (integrated circuit) equipment
CN103905762A (en) Method for automatically detecting projection picture for projection module
JP2008005194A (en) Detecting device and detecting method for defective pixel
CN103905722A (en) Image processing device and image processing method
CN113643995A (en) Detection method and device
TW201413214A (en) Optical detection system for inclination angle and laying position and detection method thereof

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110720

Termination date: 20180923