CN101030549A - Tcp handler, and method of detecting defective punching hole therefor - Google Patents
Tcp handler, and method of detecting defective punching hole therefor Download PDFInfo
- Publication number
- CN101030549A CN101030549A CNA2007100844414A CN200710084441A CN101030549A CN 101030549 A CN101030549 A CN 101030549A CN A2007100844414 A CNA2007100844414 A CN A2007100844414A CN 200710084441 A CN200710084441 A CN 200710084441A CN 101030549 A CN101030549 A CN 101030549A
- Authority
- CN
- China
- Prior art keywords
- hole
- bad
- tcp
- mentioned
- dash
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/79—Apparatus for Tape Automated Bonding [TAB]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/79—Apparatus for Tape Automated Bonding [TAB]
- H01L2224/799—Means for monitoring the connection process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/40—Details of apparatuses used for either manufacturing connectors or connecting the semiconductor or solid-state body
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Image Analysis (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A TCP processor (2) is provided, which is designed to transmit a carrier belt (5) with a plurality of TCPs to a probe card (8) electrically connected to a test probe (10) and test the TCPs in sequence; the TCP processor (2) comprises: a punch rod (26b) designed to punch off unacceptable products from the carrier belt (5) (except for specified TCPs); a camera (6c) that can take images of the punch holes (53) formed by the punching action; a position information acquisition device, designed to acquire position information of corresponding punch holes (53) according to the image data of the punch holes (53) taken by the camera (6c); and, a bad position detection device, designed to detect whether the positions of the punch holes (53) are bad on the basis of comparison between the position information of the punch holes (53) acquired by the position information acquisition device and reference information. The TCP processor (2) can detect bad position of punch holes.
Description
Technical field
The present invention relates in order to test (band year encapsulation as a kind of TCP in the IC device; Tape carrier package) or COF (chip on the film; Chip on film) (below, utilize TCP, COF and TAB (tape automated bonding; Tape automated bonding) encapsulation technology and the device made is referred to as TCP.) and the TCP treatment facility that uses, relating in particular to can be according to test result, detect and dash at the TCP to regulation that formed defective punching removes the TCP treatment facility of the position in hole when removing, and the defective punching of TCP treatment facility is except that the detection method in hole.
Background technology
In the manufacture process of electronic products such as IC device, need finally electronic product testing equipment that the performance or the function of the IC device of manufacturing or the device in manufacture process interstage etc. are tested, for the TCP situation, be used for the testing equipment of TCP.
The equipment that is used for TCP is made of tester main body, measuring head and TCP treatment facility (below, also can be described as " TCP processor ") usually.This TCP processor (also comprises film by being transmitted in winding.Down together.) on formed the carrier band of a plurality of TCP, carrier band is pressed on the probe of the probe card that is electrically connected with measuring head, the outside terminal of TCP is contacted with probe, test a plurality of TCP successively.Then, utilization is judged as test result towards removal apparatus (defective item jumper bar) TCP of defective item towards removing except that next being with from carrying.
Summary of the invention
But, if remove offset towards dashing of removal apparatus, might with the TCP position adjacent of defective item on the TCP of qualified product cut away.At this moment, might flow out as the TCP of qualified product because of the TCP that makes defective item towards removal apparatus.Especially, in recent years,, cause described problem easily because the TCP density on the carrier band is very high.
In view of this actual conditions, the objective of the invention is to, provide to detect and dash the bad TCP treatment facility in position that removes the hole, and the defective punching of TCP treatment facility removes the detection method in hole.
In order to achieve the above object, the 1st aspect of the present invention is, provide a kind of carrier band that will form a plurality of TCP to be sent to the contact portion that is electrically connected with measuring head, and test the TCP treatment facility of a plurality of TCP successively, it is characterized in that comprising: after the test from carrying with on the TCP of regulation is dashed the removal apparatus that dashes that removes; Can take the camera head of dashing that forms by above-mentioned dash to remove except that the hole; Utilization removes the view data in hole by captured the dashing of above-mentioned camera head, obtains this positional information of dashing the positional information of removing the hole and obtains device; And compare with reference position information by removing hole information by above-mentioned positional information dashing of obtaining that device obtained, detect and dash the bad bad checkout gear in position (inventing 1) in position that removes the hole.
According to foregoing invention (invention 1), to dash the position of removing the hole bad owing to can automatically detect, therefore, can be according to its result, by stopping the TCP treatment facility, or remove the position by adjusting towards dashing of removal apparatus, prevent the generation of the defective item of TCP.
In foregoing invention (invention 1), the said reference positional information both can be a positional information (invention 2) of removing the hole as dashing of benchmark, also can be the positional information (invention 3) by the compulsory figure on the captured carrier band of above-mentioned camera head.In addition, as " compulsory figure ", though exemplified the hole (perforation) that for example cooperates with the tooth of sprocket, or alignment mark etc., be not limited only to this.
In foregoing invention (invention 1), preferably, also comprise when utilizing the bad checkout gear in above-mentioned position to detect defective punching when removing the position in hole, the alarm device that gives the alarm (inventing 2).
In foregoing invention (invention 4), the bad checkout gear in above-mentioned position can be according to the above-mentioned position and the comparison of said reference positional information of dash removing the hole, the detection position side-play amount big the 1st dash the position of removing the hole bad and position offset is little the 2nd dash except that the position in hole bad; Also can stop the driving of TCP treatment facility, and dash and remove the hole site when bad, utilize above-mentioned alarm device give the alarm (inventing 5) when detecting the above-mentioned the 2nd dash removing the hole site when bad when detecting the above-mentioned the 1st.Here, " position offset is big " is meant, for example, produced the defective item of TCP, or the big position offset that just can produce the defective item degree of TCP to horse back; " position offset is little " is meant, for example, though be not the degree that produces the defective item of TCP at once, can begins the little position offset of the degree of recognizing site skew.
According to foregoing invention (invention 5),, can prevent a large amount of generations of the defective item of TCP when dashing the position offset that removes the hole when big; When the position offset that dash to remove the hole hour, not only can keep the testing equipment utilization rate of trying one's best high, and can prevent the generation of the defective item of TCP in advance.
In foregoing invention (invention 1), above-mentionedly also can utilize the bad checkout gear in above-mentioned position according to the above-mentioned positional information and the comparison of said reference positional information of removing the hole of dashing towards removal apparatus, dash the position adjustment (inventing 6) that removes the position.
According to described invention (invention 6), the generation of TCP defective products can be prevented in advance, and the action of testing apparatus needn't be stopped, therefore can improve the throughput of test.
The 2nd aspect of the present invention provides the bad method in position of removing the hole of dashing that a kind of detection forms on carrier band by dash removing in the TCP processing unit, it is characterized in that may further comprise the steps: take by dashing and remove formed dashing and remove the hole; According to the above-mentioned captured view data of removing the hole of dashing, obtain this and dash the positional information of removing the hole; And above-mentioned dash positional information and the reference position information of removing the hole that obtains compared, detect and dash the position of removing the hole bad (inventing 7).
In foregoing invention (invention 7), preferably, also comprise when detecting and dash the step (inventing 8) that the position of removing the hole gives the alarm when bad.
In foregoing invention (invention 7), preferably, also comprise detecting above-mentioned dashing in the bad step in the position of removing the hole: compare by will above-mentionedly dashing positional information and the said reference positional information of removing the hole, the detection position side-play amount big the 1st dash remove the hole site bad and position offset is little the 2nd towards except that the hole site bad; As the step after it, also comprise when detecting the above-mentioned the 1st and dashing except that hole site when bad, stop the TCP treatment facility; Dash to remove the position in hole when bad, the step that gives the alarm (invention 9) when detecting the above-mentioned the 2nd.
In foregoing invention (invention 7), also comprise according to detecting above-mentioned dashing in the bad step in the position of removing the hole the above-mentioned positional information and the comparison of said reference information of removing the hole of dashing, dash the step (inventing 10) of the position adjustment that removes the position.
According to the present invention, it is bad to detect the position of dash removing the hole, can seek to prevent the defective item by dashing the bad caused TCP in position that removes the hole in view of the above.
Description of drawings
Fig. 1 is the whole front elevation of the TCP that comprises the TCP processor of an embodiment of the invention with testing equipment.
Fig. 2 is illustrated in the TCP processor of identical execution mode, utilizes the image of the captured carrier band of camera head (dash and remove the hole).
Fig. 3 is that the defective punching that explanation detects in the TCP of identical execution mode processor removes the flow chart of hole action.
Embodiment
Below with reference to accompanying drawing, embodiments of the present invention are elaborated.
Fig. 1 is the whole front elevation of the TCP that comprises the TCP processor of an embodiment of the invention with testing equipment; Fig. 2 is illustrated in the TCP processor of identical execution mode, utilizes the image of the captured carrier band of camera head (dash and remove the hole); Fig. 3 is that the defective punching that explanation detects in the TCP of identical execution mode processor removes the flow chart of the action in hole.
At first, the TCP that comprises processor of embodiments of the present invention is described with the overall structure of testing equipment.
As shown in Figure 1, TCP is made of not shown tester main body, the measuring head 10 that is electrically connected with the tester main body and the TCP processor 2 that is arranged on measuring head 10 upsides with testing equipment 1.
On the top of measuring head 10, the probe card 8 with a plurality of probes (contact terminal) 81 that can contact with the TCP outside terminal has been installed.
TCP processor 2 is tested the device of arranging each TCP that forms along the length direction of carrier band 5 on carrier band 5 successively by transmitting carrier band 5.In addition, as shown in Figure 2, formed perforation 52 on the both sides of carrier band 5.
As shown in Figure 1, TCP processor 2 has spool of rolling out 21 and take-up reel 22.On rolling out spool 21 winding up the test before carrier band 5, carrier band 5 rolls out from rolling out spool 21, and after testing, be transmitted so that winding up on take-up reel 22.
Rolling out between spool 21 and the take-up reel 22, be provided with the protection winding 51 that to strip down from carrier band 5 and prop and be directed to 3 supporting reel 23a, 23b and the 23c of take-up reel 22 from rolling out spool 21.Each supporting reel 23a, 23b, 23c respectively can be up and down, make it possible to adjust the tension force of boundary belt 51.
At the downside that rolls out spool 21, be provided with winding guider 24a, roll out restrict rollers 25a, go into side time sprocket wheel 25b and go into side steering roll 25c, be directed by winding guider 24a from rolling out the carrier band 5 that spool 21 rolled out, and, be sent in the thrust unit 3 through rolling out restrict rollers 25a, go into side time sprocket wheel 25b and going into side steering roll 25c.
The downside of take-up reel 22, be provided with winding guider 24b, batch restrict rollers 25f, go out side time sprocket wheel 25e and go out side steering roll 25d, carrier band 5 after testing in thrust unit 3 is directed by tape guide 24b, and through going out side winding guide roller 25d, go out side time sprocket wheel 25e and batching restrict rollers 25f by winding up on take-up reel 22.
Going into side steering roll 25c and going out between the side steering roll 25d, be provided with thrust unit 3.On the framework (thrust unit framework) 36 of thrust unit 3, the servomotor 31 that can make cheese head screw 32 rotations is installed via sprocket wheel 361, simultaneously, the linear movement guide device 37 via 2 Z-directions is equipped with the thrust unit main part 33 that screws togather with cheese head screw 32.This thrust unit main part 33 by the driving of servo 31, can be led by linear movement guide device 37 on one side, on one side about move on (Z axle) direction.
Be provided with and adsorb the adsorption plate 34 that keeps carrier band 5 by attracting air in the bottom of this thrust unit main part 33.Be provided with tension force sprocket wheel 35a at the preceding-stage side of thrust unit main part 33 (left side among Fig. 1), be provided with head sprocket 35b at the rear-stage side (right side among Fig. 1) of thrust unit main part 33.
Be provided with the 1st camera 6a at the preceding-stage side of thrust unit 3 (left side among Fig. 1), be provided with the 2nd camera 6b, be provided with the 3rd camera 6c at the rear-stage side (right side among Fig. 1) of thrust unit 3 at the downside of thrust unit 3.In addition, between thrust unit 3 and the 3rd camera 6c, be provided with mark jumper bar 26a and defective item jumper bar 26b.
Mark jumper bar 26a is according to test result, to corresponding TCP, beat one or more holes on the position of regulation.Defective item jumper bar 26b is judged as test result the TCP of defective item towards removing.Step qualified product jumper bar 26b in the present embodiment has to adjust on X-axis/Y direction and dashes the function of removing the position.
Each camera 6a, 6b, 6c are connected with not shown image processing apparatus.The 1st camera 6a takes carrier band 5, and view data is sent in the image processing apparatus, is used for having or not of TCP judged.The 2nd camera 6b takes the tip portion of the probe 81 of the outside terminal of TCP and probe card 8, and view data is sent in the image processing apparatus, is used for the position alignment of TCP and probe 81 etc.The 3rd camera 6c takes carrier band 5, and image is sent in the image processing apparatus, is used for as described later judgement and dash removes having or not of hole and obtain and dash the positional information of removing the hole.Each camera 6a, 6b, the captured image of 6c can be gone up at monitor (not shown) and show.
On the position relative, be provided with backlight 61 with the 2nd camera 6b that clips conveyer belt 5.When utilizing when should backlight 61 light shining on the carrier band 5, then remove hole 53 transmitted lights from being formed at dashing on the carrier band 5, can utilize the 2nd camera 6b to obtain clearly to dash image (with reference to Fig. 2) except that hole 53.
Above-mentioned image processing apparatus can remove the view data in hole 53 according to obtained the dashing of the 3rd camera 6c, calculates this and dashes the barycentric coodinates (absolute coordinate) of removing hole 53.In addition, above-mentioned image processing apparatus can be stored the reference coordinate of removing the hole of dashing as benchmark, and can and dash the barycentric coodinates of removing hole 53 according to this reference coordinate, calculates and dashes the position offset that removes hole 53.In addition, above-mentioned image processing apparatus is stored the fiducial value of 2 class position offsets, i.e. the 1st big fiducial value (X of position offset
1, Y
1) and the 2nd little fiducial value (X of position offset
2, Y
2).
In addition, TCP processor 2 has warning devices (not shown) such as loud speaker, buzzer, emergency warning lamp.
In the testing apparatus 1 of above-mentioned explanation, the TCP on the carrier band 5 is sent on the probe card 8, and utilizes thrust unit 3 to be pressed on the probe card 8.Therefore, the outside terminal of TCP become with probe card 8 on probe 81 contacted states.Under this state, be applied on the TCP from the test signal of tester main body, the response signal of reading from TCP is sent to the tester main body by measuring head 10.Come the performance of test tcp etc. based on this response signal, carry out TCP is judged (defective item judgement) by judging (qualified product judgement) or failure.
For the above-mentioned TCP that has carried out the failure judgement, utilize defective item jumper bar 26b to dash and remove, remove from carrier band 5.Here, with reference to the flow chart of accompanying drawing 3, the detection action that the defective punching of TCP processor 2 is removed the hole describes.
Image processing apparatus is judged and is dashed have or not (the step S03) that removes hole 53 according to the view data that receives.Do not have dash to remove under the situation in hole 53 (the "No" branch of step S03) being judged as, omit step S11 described later.Have towards removing under the situation in hole 53 (the "Yes" branch of step S03) in judgement, obtain this and dash the barycentric coodinates (step S04) of removing hole 53.
Then, image processing apparatus is according to becoming dashing of the benchmark reference coordinate of removing the hole and the barycentric coodinates of removing hole 53 of dashing that obtained, calculate and dash except that the X-direction in hole 53 and position offset (the Δ X of Y direction, Δ Y) (step S05), judge that whether its position offset (Δ X, Δ Y) is more than or equal to the 1st fiducial value (X
1, Y
1) (step S06).Particularly, judge whether to satisfy at least Δ X 〉=X
1, Δ Y 〉=Y
1In one.The 1st reference values X
1For example can be 0.5mm, the 1st fiducial value Y
1For example can be 0.2mm.
At position offset (Δ X, Δ Y) more than or equal to the 1st fiducial value (X
1, Y
1) situation under (the "Yes" branch of step S06), owing to position offset the TCP defective item has taken place greatly or the probability height of defective item takes place, therefore, stop the action (step S07) of TCP processor 2.Because therefore stopping automatically of this TCP processor 2, need not be waited for by near operator's (scarcely testing equipment 1) manually stopping, and can prevent to produce in a large number the defective item of TCP.
And do not reach the 1st fiducial value (X at position offset (Δ X, Δ Y)
1, Y
1) situation under (the "No" branch of step S06), image processing apparatus continue to judge that whether the side-play amount (Δ X, Δ Y) of position is more than or equal to the 2nd fiducial value (X
2, Y
2) (step S08).Concrete, judge whether to satisfy at least Δ X 〉=X
2, Δ Y 〉=Y
2In one.The 2nd reference values X
2For example can be 0.3mm, the 2nd fiducial value Y
2For example can be 0.1mm.
(Δ X, Δ Y) do not reach the 2nd fiducial value (X at position offset
2, Y
2) situation under (the "No" branch of step S08), omit step S11 described later.
And at position offset (Δ X, Δ Y) more than or equal to the 2nd fiducial value (X
2, Y
2) situation under, TCP processor 2 give the alarm (step S09).According to this alarm, the operator can know that dashing the position of removing hole 53 is just beginning to occur skew.
Then, defective item jumper bar 26b is adjusted at dashing on X-direction and/or the Y direction and removes the position according to above-mentioned position offset (Δ X, Δ Y), makes it get back to normal position (step S10).The automatic adjustment that removes the position of dashing by this defective item jumper bar 26b can prevent the generation of TCP defective item in advance, and owing to do not need to stop the action of TCP processor 2, therefore, can improve test throughput.
In addition, the dashing of defective item jumper bar 26b removed the position can not only aforesaid automatic adjustment, can also manual adjustment.At this moment, based on above-mentioned alarm, the operator can temporarily stop the action of TCP processor 2, and dashing of manual adjustment defective item jumper bar 26b removes the position.At this moment, also can prevent the generation of TCP defective item in advance.In addition, under dashing,, can keep the high workload rate by not allowing TCP processor 2 stop automatically except that the little situation of the position offset in hole 53.
TCP processor 2 judges whether at the locational TCP of the 3rd camera 6c (comprising the situation about removing of dashing) be last TCP (step S11), when being judged as last TCP (the "Yes" branch of step S11), finishes to dash the bad test operation in position that removes the hole.And when being judged as the TCP that is not last (the "No" branch of step S11), transmit carrier band 5, and return step S01, repeat above-mentioned action.
Utilize the TCP processor 2 of action as mentioned above, can detect that to dash the position of removing the hole bad, in view of the above, can seek to prevent a large amount of generations of the defective item of TCP, or prevent the generation of defective item in advance.
More than Shuo Ming execution mode is the content of recording and narrating in order to understand the present invention easily, rather than the content of recording and narrating in order to limit the present invention.Therefore, each factor shown in the above-mentioned execution mode comprises whole design alterations or the equivalent that belongs in the technical scope of the present invention.
For example, utilize camera 6c and by image processing apparatus obtain to dash the barycentric coodinates of removing hole 53 not only can be absolute coordinate, also can be relative coordinate with respect to the perforation 52 of regulation.At this moment, the position coordinates (barycentric coodinates) of the perforation 52 of regulation also can obtain with utilize the 3rd camera 6c and image processing apparatus in the same manner towards the barycentric coodinates of removing hole 53.
In addition, fiducial value that dash to remove the side-play amount of hole site also can have only a kind of, at this moment, when position offset during more than or equal to fiducial value, can allow the action of TCP processor 2 stop, and also can give the alarm.
Industrial applicability
The present invention is for preventing because of the defective work of punching except the bad TCP that causes in position in hole The outflow aspect is useful.
Claims (10)
1, a kind of carrier band that will be formed with a plurality of TCP is sent to the contact portion that is electrically connected with measuring head, and can test the TCP treatment facility of a plurality of TCP successively, it is characterized in that comprising:
Can be after test from carrier band towards the removal apparatus that dashes except that the TCP that stipulates;
Can take the camera head of dashing that forms by above-mentioned dash to remove except that the hole;
According to removing the view data in hole, obtain corresponding positional information of dashing the positional information of removing the hole and obtain device by captured the dashing of above-mentioned camera head; With
Remove hole information by dashing of obtaining by above-mentioned positional information that device obtained and compare, detect the bad bad checkout gear in position in position that dashes except that the hole with reference position information.
2. TCP treatment facility according to claim 1 is characterized in that: the said reference positional information is the positional information of removing the hole of dashing as benchmark.
3. TCP treatment facility according to claim 1 is characterized in that: the said reference positional information is the positional information by the compulsory figure on the captured carrier band of above-mentioned camera head.
4. TCP treatment facility according to claim 1 is characterized in that: also be included in the position that utilizes the bad checkout gear in above-mentioned position to detect dash to remove the hole when bad, the warning device that gives the alarm.
5. TCP treatment facility according to claim 4, it is characterized in that: the bad checkout gear in above-mentioned position can be by the above-mentioned comparison that dash to remove hole site information and said reference positional information, detect position offset big the 1st dash remove the hole site bad and position offset is little the 2nd dash except that the hole site bad;
Dash to remove the hole site when bad when detecting the above-mentioned the 1st, stop the driving of TCP treatment facility;
Dash to remove the hole site when bad when detecting the above-mentioned the 2nd, utilize above-mentioned warning device to give the alarm.
6. TCP treatment facility according to claim 1 is characterized in that: above-mentionedly can dash the position adjustment except that the position according to the bad checkout gear in above-mentioned position to the above-mentioned comparison that dash to remove hole site information and said reference positional information towards removal apparatus.
7. one kind is detected utilization towards removing the formed bad detection method of removing in position of dashing on carrier band in the TCP treatment facility, it is characterized in that may further comprise the steps:
Shooting removes formed dashing except that the hole by dashing;
According to the above-mentioned captured view data of removing the hole of dashing, obtain the corresponding positional information of removing the hole of dashing; With
According to above-mentioned dashing except that the positional information in hole and the comparison of reference position information of obtaining, it is bad to detect the position that dashes except that the hole.
8. TCP treatment facility according to claim 7 dashes and removes the bad detection method in hole site, it is characterized in that,
Also comprise when detecting the position of dash removing the hole when bad, the step that gives the alarm.
9. TCP treatment facility according to claim 7 dashes and removes the bad detection method in hole site, it is characterized in that:
Detecting above-mentioned dashing in the bad step in the position of removing the hole, according to the above-mentioned positional information and the comparison of said reference positional information of removing the hole of dashing, detect position offset big the 1st dash remove the hole site bad and position offset is little the 2nd dash except that the hole site bad,
As step thereafter, also comprise when detecting the above-mentioned the 1st and dash to remove the hole site when bad, stop the driving of TCP treatment facility; And dash to remove the hole site when bad when detecting the above-mentioned the 2nd, the step that gives the alarm.
10. TCP treatment facility according to claim 7 dashes and removes the bad detection method in hole site, it is characterized in that:
Also comprise according in detecting the bad step in above-mentioned position of dash removing the hole, dashing the positional information of removing the hole and the comparison that the said reference positional information is carried out, dash step except that the position adjustment of position to above-mentioned.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006058085 | 2006-03-03 | ||
| JP2006058085A JP2006186395A (en) | 2006-03-03 | 2006-03-03 | Tcp handler, and method of detecting defective punching hole therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101030549A true CN101030549A (en) | 2007-09-05 |
| CN100483664C CN100483664C (en) | 2009-04-29 |
Family
ID=36739206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100844414A Expired - Fee Related CN100483664C (en) | 2006-03-03 | 2007-03-02 | Tcp handler, and method of detecting defective punching hole therefor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006186395A (en) |
| KR (1) | KR100870045B1 (en) |
| CN (1) | CN100483664C (en) |
| TW (1) | TW200744833A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101685251B (en) * | 2008-09-23 | 2011-07-20 | 中芯国际集成电路制造(上海)有限公司 | Camera lens calibration method and system |
| CN102650517A (en) * | 2012-04-19 | 2012-08-29 | 浙江洁美电子科技有限公司 | Laser depth measuring device for square holes of pressed-hole carrier tapes |
| TWI418798B (en) * | 2009-03-31 | 2013-12-11 | Nihon Micronics Kk | A semiconductor inspection device and alignment method with alignment function |
| TWI456212B (en) * | 2010-09-21 | 2014-10-11 | Tesec Kk | TCP test set |
| CN113894445A (en) * | 2021-12-09 | 2022-01-07 | 广东佛智芯微电子技术研究有限公司 | Chip surface punching method based on integration of optical detection and automatic correction |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5000338B2 (en) * | 2007-03-09 | 2012-08-15 | 芝浦メカトロニクス株式会社 | Electronic component punching apparatus and punching method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2998515B2 (en) * | 1993-09-17 | 2000-01-11 | 安藤電気株式会社 | TAB test equipment for image recognition of TAB before and after measurement |
| JPH08148532A (en) * | 1994-11-18 | 1996-06-07 | Ando Electric Co Ltd | Tab tester for correcting position of punch unit |
| JP2001311761A (en) * | 2000-04-28 | 2001-11-09 | Ando Electric Co Ltd | Positioning method for tab automatic handler and tab automatic handler |
| TW523854B (en) * | 2001-03-27 | 2003-03-11 | Ando Electric | TCP handler |
| JP2003246548A (en) | 2002-02-25 | 2003-09-02 | Konica Corp | Image forming device |
| JP2004093346A (en) * | 2002-08-30 | 2004-03-25 | Ando Electric Co Ltd | Handler for tcp |
-
2006
- 2006-03-03 JP JP2006058085A patent/JP2006186395A/en active Pending
-
2007
- 2007-02-12 TW TW096105055A patent/TW200744833A/en not_active IP Right Cessation
- 2007-02-26 KR KR1020070018989A patent/KR100870045B1/en not_active IP Right Cessation
- 2007-03-02 CN CNB2007100844414A patent/CN100483664C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101685251B (en) * | 2008-09-23 | 2011-07-20 | 中芯国际集成电路制造(上海)有限公司 | Camera lens calibration method and system |
| TWI418798B (en) * | 2009-03-31 | 2013-12-11 | Nihon Micronics Kk | A semiconductor inspection device and alignment method with alignment function |
| TWI456212B (en) * | 2010-09-21 | 2014-10-11 | Tesec Kk | TCP test set |
| CN102650517A (en) * | 2012-04-19 | 2012-08-29 | 浙江洁美电子科技有限公司 | Laser depth measuring device for square holes of pressed-hole carrier tapes |
| CN113894445A (en) * | 2021-12-09 | 2022-01-07 | 广东佛智芯微电子技术研究有限公司 | Chip surface punching method based on integration of optical detection and automatic correction |
| CN113894445B (en) * | 2021-12-09 | 2022-02-15 | 广东佛智芯微电子技术研究有限公司 | Chip surface punching method based on integration of optical detection and automatic correction |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100870045B1 (en) | 2008-11-24 |
| TWI322080B (en) | 2010-03-21 |
| JP2006186395A (en) | 2006-07-13 |
| CN100483664C (en) | 2009-04-29 |
| KR20070090754A (en) | 2007-09-06 |
| TW200744833A (en) | 2007-12-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101030549A (en) | Tcp handler, and method of detecting defective punching hole therefor | |
| JP4563205B2 (en) | Inspection method and apparatus for mounted electronic component | |
| US8640582B2 (en) | Method for manufacturing flexible substrate and flexible substrate punching device | |
| CN101032200A (en) | Pick and place machine with improved component pick up inspection | |
| EP2096447A3 (en) | Vehicular data recording apparatus | |
| CN1080927C (en) | Method for detecting wafer defects | |
| CN1300572C (en) | Detecting device of printed circuit board for mounting electronic element and figure poorness identification method | |
| JP4870054B2 (en) | Substrate processing apparatus, surface mounting machine, printing machine, inspection machine, and coating machine | |
| CN112394069A (en) | Display panel abnormality detection method and device | |
| JP2007309886A (en) | Analyzer | |
| JP4216515B2 (en) | Die pickup device | |
| KR20090054917A (en) | Pattern inspection device | |
| KR100605451B1 (en) | Pattern inspection apparatus | |
| JP2009097958A (en) | Apparatus and method for defect detection | |
| JP2004515830A (en) | Quadratic dispersion plot technique for defect detection | |
| JP4706064B2 (en) | OVD foil inspection apparatus and OVD foil inspection method | |
| KR20200112639A (en) | Semiconductor manufacturing apparatus and method for manufacturing semiconductor device | |
| JP4233813B2 (en) | Processing method of sheet-like molded body | |
| JP5464092B2 (en) | Image inspection method and image inspection apparatus | |
| TWI475189B (en) | Wiring board measuring device and wiring board measurement method | |
| JP6099359B2 (en) | Deflection amount detection device and deflection amount detection method | |
| KR101086333B1 (en) | Detection method of surface defect on strip | |
| JP4013302B2 (en) | Inspection method of carrier tape | |
| KR100884583B1 (en) | Speed detection system and method | |
| JP4221783B2 (en) | Pattern defect inspection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090429 Termination date: 20110302 |