CN101995325A - Appearance detection method and system of image sensor - Google Patents
Appearance detection method and system of image sensor Download PDFInfo
- Publication number
- CN101995325A CN101995325A CN2009101897367A CN200910189736A CN101995325A CN 101995325 A CN101995325 A CN 101995325A CN 2009101897367 A CN2009101897367 A CN 2009101897367A CN 200910189736 A CN200910189736 A CN 200910189736A CN 101995325 A CN101995325 A CN 101995325A
- Authority
- CN
- China
- Prior art keywords
- image
- pixel
- imageing sensor
- photosensitive region
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention provides appearance detection method and system of an image sensor, which is applicable to the technical field of chip manufacture procedures. The method comprises the following steps of: carrying out optical amplification imaging on the image sensor; extracting images of light sensing regions of the image sensor from images obtained through optical application imaging, and further obtaining binary images; judging that the light sensing region of the image sensor has defects if the value of the communication region area of the identical character pixels in the binary images is greater than a standard threshold value; and judging that the appearance of the light sensing region of the image sensor is normal if the value of the communication region area is not greater than the standard threshold value, wherein the pixels corresponding to the standard threshold values have the same color characteristics as the pixels in the communication region. The invention can efficiently and accurately carry out automatic detection on the light sensing region defects on the image sensor, the whole process can be conveniently integrated into the existing automation manufacture procedures, the manual participation is not needed in judgment, and the consistency of the detection standard can be ensured, so the detection quality is improved.
Description
Technical field
The invention belongs to chip process technique field, relate in particular to a kind of appearance detecting method and system of imageing sensor.
Background technology
Charge coupled cell (Charge Coupled Device, CCD) and metal oxide semiconductor device (Complementary Metal-Oxide Semiconductor, CMOS) etc. the quality of imageing sensor directly affects the quality of backend application product, after imageing sensors such as CMOS, CCD are finished encapsulation, all will carry out outward appearance detects, guaranteeing the good of its quality, and the efficient of these imageing sensor Quality Detection and quality also have certain influence to the listing process of its rear end application product.This operation is at present mainly by manually finishing by microscope, but this manual detection mode is subject to the minimum resolution characteristic of human eye, at detection efficiency with detect and have following problem aspect the quality:
1. increase the component exposure time outside, make the quality of chip be subject to the influence of environment dust fall;
2. manual detection needs by microscope, the vision fatiguability, and then judge by accident, fail to judge, the accuracy of influence check;
3. desk checking causes the increase of cost, and check speed also can't promote;
4. the reviewer is subject to subjective influence to the judgement of defective, and standard consistency is relatively poor;
5. therefore general artificial off line (off-line) check that verifies as can't be integrated into existing automated production processing procedure, increases handling time and storage space, and easily increases the unusual probability that human factor causes.
Summary of the invention
The purpose of the embodiment of the invention is to provide a kind of appearance detecting method and system of imageing sensor, is intended to solve the problem that present manual detection efficiency is low, detection is of low quality.
The embodiment of the invention is achieved in that a kind of appearance detecting method of imageing sensor, may further comprise the steps:
Imageing sensor is carried out the optics amplification imaging;
From the entire image that the optics amplification imaging obtains, extract the image of imageing sensor photosensitive region;
The image of photosensitive region is carried out image segmentation obtain bianry image;
If the connected domain area overgauge threshold value of same characteristic features pixel is then judged the photosensitive region defectiveness at imageing sensor in the described bianry image; If the connected domain area of same characteristic features pixel is not more than level threshold value in the above-mentioned bianry image, then the photosensitive region outward appearance of process decision chart image-position sensor is normal; The pixel of described level threshold value correspondence have with described connected domain in the identical color characteristic of pixel.
The outward appearance detection system of the imageing sensor that the embodiment of the invention provides comprises:
Automatically mobile platform device, optical imaging device, image acquisition units, graphics processing unit;
Described automatic mobile platform device is used to carry imageing sensor to be detected, and described automatic mobile platform shift position during detection is so that imageing sensor to be detected is positioned at the useful effect zone of described optical imaging device;
Described optical imaging device is used to treat the detected image sensor and carries out the optics amplification imaging;
Described image acquisition units is used for intercepting single-frame images from the image video signal of described optical imaging device output;
Described graphics processing unit is used for extracting from the image that described image acquisition units intercepting obtains the image of imageing sensor photosensitive region to be detected; Then the image of photosensitive region is carried out image segmentation and obtain bianry image; If the connected domain area overgauge threshold value of same characteristic features pixel is then judged the photosensitive region defectiveness at imageing sensor in the described bianry image; If the connected domain area of same characteristic features pixel is not more than level threshold value in the above-mentioned bianry image, then process decision chart image-position sensor outward appearance is normal; The pixel of described level threshold value correspondence have with described connected domain in the identical color characteristic of pixel.
In the embodiment of the invention, utilize the appearance images of technological means cut-away view image-position sensors such as optical imagery, image acquisition, and to imageing sensor photosensitive area location, analysis, can carry out the automatic detection of photosensitive area defective efficiently and accurately to imageing sensor, and whole process can be conveniently integrated in the existing automated process, do not need artificial participation during judgement, guaranteed the consistance of standard, the detection quality is improved.
Description of drawings
Fig. 1 is the realization flow figure of the imageing sensor appearance detecting method that provides of the embodiment of the invention;
Fig. 2 is the structure principle chart of the imageing sensor outward appearance detection system that provides of the embodiment of the invention;
Fig. 3 is the pictorial diagram for imageing sensor outward appearance detection system shown in Figure 2.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer,, the present invention is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
In the embodiment of the invention,, according to of photosensitive area location, the analysis of image sensor surface color distribution feature, finish the automatic detection of photosensitive area defective again to one-tenth's image at first to imageing sensor outward appearance optical imagery.
Fig. 1 shows the realization flow of the imageing sensor appearance detecting method that the embodiment of the invention provides, and details are as follows:
In step S101, imageing sensor is carried out the optics amplification imaging.
In step S102, extract the image of photosensitive region the image of the imageing sensor that obtains from optical imagery.
Image sensor surface is divided into two kinds of different zones of color of sensitization and non-sensitization, because the open defect on the photosensitive region can produce directly influence to the imaging effect of imageing sensor, so only carries out outward appearance with regard to photosensitive region in the embodiment of the invention and detects.
During concrete enforcement, the method that can directly detect with profile is carried out edge fitting, determine photosensitive region again according to the area that the border that calculates surrounds, but this method can be malfunctioning when photosensitive region has cut to exist.
As a preferred embodiment of the present invention, can adopt line by line/image of column scan reading images sensor in the rgb value of pixel, and according to the image sensor surface color distribution characteristic of storing in advance, judge whether the pixel that reads belongs to photosensitive region, and then orient the image of imageing sensor photosensitive region.The pixel color information that has comprised image sensor surface photosensitive region and non-photosensitive region in advance in Cun Chu the chip surface color distribution characteristic, as input, can obtain the image of photosensitive region with the imageing sensor image that obtains among the step S101 in conjunction with this image sensor surface color distribution characteristic of storing in advance.
In step S103, the image of photosensitive region is carried out image segmentation obtain bianry image.
If the image of initial optical imagery is a coloured image, also need further be converted to gray level image and carries out image segmentation again.
The user need at first set the threshold value of defective to be detected, such as the gray threshold of stain.After obtaining the image of photosensitive region, carry out image segmentation according to the gray threshold of setting before, cutting apart principle is: each pixel value of judging photosensitive region one by one, gray threshold with setting is a boundary, gray-scale value is changed to white (deceiving) greater than the pixel of threshold value, remaining pixel is changed to black (in vain), thereby obtains bianry image.
In step S104, if the connected domain area overgauge threshold value of same characteristic features pixel in the above-mentioned bianry image is then judged the photosensitive region defectiveness at imageing sensor; If the connected domain area of same characteristic features pixel is not more than level threshold value in the above-mentioned bianry image, then the photosensitive region outward appearance of process decision chart image-position sensor detects normal; The pixel of described level threshold value correspondence have with described connected domain in the identical color characteristic of pixel.
Definite method of the connected domain of same characteristic features pixel is in the bianry image: scanning bianry image, first black that writing scan is arrived or white pixel point; Whether the pixel of judging 8 neighborhoods of this pixel is identical color, if exist then note these pixels; Continue to judge in the pixel of 8 neighborhoods that write down pixel whether have the pixel of Unrecorded same color still, exist and then note, and repeat this step until the pixel that does not have same color.
If not finding defective in the pixel connected domain of black or white feature exists, can also and rejudge the bianry image negate, and for a definite imageing sensor, just determined that its defective specifically is in black picture element connected domain or white pixel connected domain when setting the gray threshold of defective to be detected, thus general only in black and white pixel connected domain, judge once get final product.
Fig. 2 shows the structural principle of the imageing sensor outward appearance detection system that the embodiment of the invention provides, and for convenience of description, only shows part related to the present invention.
With reference to Fig. 2, the imageing sensor outward appearance detection system that the embodiment of the invention provides comprises automatic mobile platform device 1, optical imaging device 2, image acquisition units 3, the graphics processing unit 4 that is used to carry imageing sensor to be detected, can also comprise display screen 5, be used to export testing result.
Wherein, automatically can also place anchor clamps on the mobile platform 1, these anchor clamps can hold a plurality of imageing sensors to be detected, automatic mobile platform 1 shift position during detection is carried out the optics amplification imaging so that the imageing sensor a certain to be detected in the anchor clamps is positioned at the useful effect zone of optical imaging device 2 by 2 pairs of these testing image sensors of optical imaging device.Image acquisition units 3 intercepts single-frame images from the image video signal of optical imaging device 2 outputs.
Wherein, graphics processing unit 4 orients the photoreceptor zone from the imageing sensor image, the photosensitive region image is cut apart obtained bianry image and determine that in bianry image the concrete principle of same characteristic features pixel connected domain is as indicated above, gives unnecessary details no longer one by one.
Further, also be provided with a feedback line between image acquisition units 3, the automatic mobile platform 1, when image acquisition units 3 can't intercept out the image of imageing sensor from the single frames entire image, for example the useful effect zone image acquisition units 3 that is not positioned at optical imaging device 2 fully when the detected image sensor is adjusted control signal to automatic mobile platform 1 feedback one position, but mobile platform 1 further goes out required image until image acquisition units 3 normal extraction in the adjustment position automatically.
Further, optical imaging device 2 comprises optical microscope, video camera, light source, light source is fixed on the micro objective below, video camera is fixed on optical microscope eyepiece top, image acquisition units 3 is fixed on the video camera top, the entire image that comprises the imageing sensor image is gathered by video camera after optical microscope amplifies, because video camera is by not only including only the image of imageing sensor to be detected itself in the image of optical microscope gained, also comprise the part outside the optical microscope objective table epigraph sensor, need be extracted the image of imageing sensor by graphics processing unit 4 from the entire image that optical imagery obtains, concrete available method of searching the outline of imageing sensor from entire image realizes.For can accurately reflecting image sensor surface sensitization and non-photosensitive region truly, light source is preferentially selected white light source for use, and as the LED white light source, video camera is preferentially selected colour TV camera for use.
Further, mobile platform 1 comprises XY motion platform, motor and electric machine control system automatically.The XY motion platform is fixed on the objective table of optical microscope, is placed on the XY motion platform after the special anchor clamps that held m*n imageing sensor to be detected are positioned, and rotation, rotation direction and the step pitch of electric machine control system control motor are passed through I
2The C bus links to each other with image acquisition units.
Fig. 3 is the pictorial diagram of imageing sensor outward appearance detection system shown in Figure 2, show automatic mobile platform 1, special anchor clamps 10, optical microscope 21, LED white light source 22, colour TV camera 23, image acquisition units 3, and optical microscope eyepiece 211, optical microphotograph endoscope objective lens 212, the objective table 213 of optical microscope, wherein graphics processing unit 4 adopts software unit to realize, be built in the computing machine, image acquisition units 3 is passed through usb bus transmit image data information with this computing machine, and the feedback line between image acquisition units 3 and the automatic mobile platform 1 then can pass through I
2The C bus realizes.
In the embodiment of the invention, utilize technological means such as optical imagery, image acquisition to intercept the appearance images of imageing sensor to be detected, and treat detected image sensor photosensitive district and locate, analyze, cooperating by automatic mobile platform device and graphics processing unit simultaneously, can finish the automatic detection of photosensitive area defective efficiently and accurately to a plurality of imageing sensors, and whole process can be conveniently integrated in the existing automated process, do not need artificial participation during judgement, guaranteed the consistance of standard, the detection quality is improved.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the appearance detecting method of an imageing sensor is characterized in that, may further comprise the steps:
Imageing sensor is carried out the optics amplification imaging;
From the imageing sensor image that the optics amplification imaging obtains, extract the image of photosensitive region;
The image of photosensitive region is carried out image segmentation obtain bianry image;
If the connected domain area overgauge threshold value of same characteristic features pixel is then judged the photosensitive region defectiveness at imageing sensor in the described bianry image; If the connected domain area of same characteristic features pixel is not more than level threshold value in the above-mentioned bianry image, then the photosensitive region outward appearance of process decision chart image-position sensor is normal; The pixel of described level threshold value correspondence have with described connected domain in the identical color characteristic of pixel.
2. the appearance detecting method of imageing sensor as claimed in claim 1 is characterized in that, the described step of extracting the image of imageing sensor photosensitive region from the entire image that the optics amplification imaging obtains is specially:
Line by line/image of column scan reading images sensor in the rgb value of pixel;
According to the image sensor surface color distribution characteristic of storing in advance, judge whether the pixel that reads belongs to photosensitive region; Described image sensor surface color distribution characteristic includes the pixel color information of image sensor surface photosensitive region and non-photosensitive region.
3. the appearance detecting method of imageing sensor as claimed in claim 1 is characterized in that, definite method of the connected domain of same characteristic features pixel is in the described bianry image:
The scanning bianry image, first black that writing scan is arrived or white pixel point;
Whether the pixel of judging 8 neighborhoods of this pixel is identical color, if exist then note these pixels;
Continue to judge in the pixel of 8 neighborhoods that write down pixel whether have the pixel of Unrecorded same color still, exist and then note, and repeat this step until the pixel that does not have same color.
4. the appearance detecting method of imageing sensor as claimed in claim 1, it is characterized in that, if the entire image that obtains of optics amplification imaging is a coloured image, then the image of photosensitive region to be carried out before image segmentation obtains bianry image in step, described method is further comprising the steps of:
With the image transitions of photosensitive region is gray level image.
5. an imageing sensor outward appearance detection system is characterized in that, comprising:
Automatically mobile platform device, optical imaging device, image acquisition units, graphics processing unit;
Described automatic mobile platform device is used to carry imageing sensor to be detected, and described automatic mobile platform shift position during detection is so that imageing sensor to be detected is positioned at the useful effect zone of described optical imaging device;
Described optical imaging device is used to treat the detected image sensor and carries out the optics amplification imaging;
Described image acquisition units is used for intercepting single-frame images from the image video signal of described optical imaging device output;
Described graphics processing unit is used for extracting from the image that described image acquisition units intercepting obtains the image of imageing sensor photosensitive region to be detected; Then the image of photosensitive region is carried out image segmentation and obtain bianry image; If the connected domain area overgauge threshold value of same characteristic features pixel is then judged the photosensitive region defectiveness at imageing sensor in the described bianry image; If the connected domain area of same characteristic features pixel is not more than level threshold value in the above-mentioned bianry image, then process decision chart image-position sensor outward appearance is normal; The pixel of described level threshold value correspondence have with described connected domain in the identical color characteristic of pixel.
6. imageing sensor outward appearance detection system as claimed in claim 5, it is characterized in that, described graphics processing unit line by line/image of column scan reading images sensor in the rgb value of pixel, judge that whether the pixel that reads belongs to photosensitive region, orients the image of imageing sensor photosensitive region from the image of described imageing sensor; Described image sensor surface color distribution characteristic includes the pixel color information of image sensor surface photosensitive region and non-photosensitive region.
7. imageing sensor outward appearance detection system as claimed in claim 5 is characterized in that described graphics processing unit at first scans bianry image, first black that writing scan is arrived or white pixel point; Whether the pixel of judging 8 neighborhoods of this pixel then is identical color, if exist then note these pixels; Continue to judge in the pixel of 8 neighborhoods that write down pixel whether have the pixel of Unrecorded same color still, exist and then note, and repeat this step until the pixel that does not have same color.
8. imageing sensor outward appearance detection system as claimed in claim 5, it is characterized in that, described graphics processing unit, image acquisition units, automatically also be provided with a feedback line between the mobile platform, when described graphics processing unit can't extract the image of imageing sensor to be detected from the single frames entire image of institute's image acquisition units intercepting, described graphics processing unit by institute's image acquisition units to institute automatically a mobile platform feed back a position and adjust control signal, but described automatic mobile platform is further adjusted the position and is gone out required image until described graphics processing unit normal extraction.
9. imageing sensor outward appearance detection system as claimed in claim 5 is characterized in that described optical imaging device comprises optical microscope, video camera, light source; Described light source is fixed on the micro objective below, and described video camera is fixed on described optical microscope eyepiece top, and described image acquisition units is fixed on described video camera top; Described graphics processing unit adopts the mode of the outline of searching imageing sensor to extract the image of imageing sensor from the entire image that the optical microscope imaging obtains;
Described automatic mobile platform comprises XY motion platform, motor and electric machine control system; Described XY motion platform is fixed on the objective table of described optical microscope, places the anchor clamps that can hold a plurality of imageing sensors to be detected on the described XY motion platform, rotation, rotation direction and the step pitch of described electric machine control system control motor.
10. imageing sensor outward appearance detection system as claimed in claim 5 is characterized in that described light source is the LED white light source, and described video camera is a colour TV camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101897367A CN101995325A (en) | 2009-08-25 | 2009-08-25 | Appearance detection method and system of image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101897367A CN101995325A (en) | 2009-08-25 | 2009-08-25 | Appearance detection method and system of image sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101995325A true CN101995325A (en) | 2011-03-30 |
Family
ID=43785783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101897367A Pending CN101995325A (en) | 2009-08-25 | 2009-08-25 | Appearance detection method and system of image sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101995325A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102621158A (en) * | 2011-07-15 | 2012-08-01 | 苏州谷夫道自动化科技有限公司 | Automatic detection device and method of unqualified magnet ring |
| CN102739924A (en) * | 2012-05-31 | 2012-10-17 | 浙江大华技术股份有限公司 | Image processing method and system |
| CN105352975A (en) * | 2015-12-02 | 2016-02-24 | 湖南拓达结构监测技术有限公司 | Bridge cable appearance detecting method |
| CN108827181A (en) * | 2018-03-14 | 2018-11-16 | 浙江大学山东工业技术研究院 | A kind of plate surface detection method of view-based access control model |
| CN113695968A (en) * | 2021-07-28 | 2021-11-26 | 成都永峰科技有限公司 | Method for preventing cutter collision |
| CN117115197A (en) * | 2023-08-09 | 2023-11-24 | 幂光新材料科技（上海）有限公司 | Intelligent processing method and system for design data of LED lamp bead circuit board |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1563957A (en) * | 2004-04-09 | 2005-01-12 | 浙江大学 | Automatic detection meethod and system for smooth surface flaw |
| CN2870157Y (en) * | 2005-10-14 | 2007-02-14 | 彩虹集团电子股份有限公司 | Comprehensive checking-repairing apparatus of plasma display screen panel |
| CN1940994A (en) * | 2005-09-27 | 2007-04-04 | 夏普株式会社 | Defect detecting device, image sensor device, and image sensor module |
| CN101419663A (en) * | 2008-06-05 | 2009-04-29 | 华中科技大学 | Indicating light status real time monitor and identification method for power equipment fault indicator |
-
2009
- 2009-08-25 CN CN2009101897367A patent/CN101995325A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1563957A (en) * | 2004-04-09 | 2005-01-12 | 浙江大学 | Automatic detection meethod and system for smooth surface flaw |
| CN1940994A (en) * | 2005-09-27 | 2007-04-04 | 夏普株式会社 | Defect detecting device, image sensor device, and image sensor module |
| CN2870157Y (en) * | 2005-10-14 | 2007-02-14 | 彩虹集团电子股份有限公司 | Comprehensive checking-repairing apparatus of plasma display screen panel |
| CN101419663A (en) * | 2008-06-05 | 2009-04-29 | 华中科技大学 | Indicating light status real time monitor and identification method for power equipment fault indicator |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102621158A (en) * | 2011-07-15 | 2012-08-01 | 苏州谷夫道自动化科技有限公司 | Automatic detection device and method of unqualified magnet ring |
| CN102739924A (en) * | 2012-05-31 | 2012-10-17 | 浙江大华技术股份有限公司 | Image processing method and system |
| CN102739924B (en) * | 2012-05-31 | 2014-04-16 | 浙江大华技术股份有限公司 | Image processing method and system |
| CN105352975A (en) * | 2015-12-02 | 2016-02-24 | 湖南拓达结构监测技术有限公司 | Bridge cable appearance detecting method |
| CN105352975B (en) * | 2015-12-02 | 2017-10-10 | 湖南拓达结构监测技术有限公司 | A kind of bridge cable appearance detecting method |
| CN108827181A (en) * | 2018-03-14 | 2018-11-16 | 浙江大学山东工业技术研究院 | A kind of plate surface detection method of view-based access control model |
| CN113695968A (en) * | 2021-07-28 | 2021-11-26 | 成都永峰科技有限公司 | Method for preventing cutter collision |
| CN117115197A (en) * | 2023-08-09 | 2023-11-24 | 幂光新材料科技（上海）有限公司 | Intelligent processing method and system for design data of LED lamp bead circuit board |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105592270B (en) | image brightness compensation method, device and terminal device | |
| CN101995325A (en) | Appearance detection method and system of image sensor | |
| JP6348289B2 (en) | Inspection apparatus and inspection method | |
| US20140063288A1 (en) | Imaging apparatus, electronic device and method providing exposure compensation | |
| US20140198202A1 (en) | Inspection method for display panel | |
| JPWO2013175703A1 (en) | Display device inspection method and display device inspection device | |
| US7936948B2 (en) | System and method for merging differently focused images | |
| CN114445330A (en) | Method and system for detecting appearance defects of components | |
| CN115018797A (en) | Screen defect detection method, screen defect detection device and computer-readable storage medium | |
| JP2009229197A (en) | Linear defect detecting method and device | |
| US20110122459A1 (en) | Scanning and Capturing digital Images Using Document Characteristics Detection | |
| KR101748768B1 (en) | Image generating method and apparatus for machine vision test, method and apparatus for simulating machine vision test, and machine vision testing system | |
| CN110441318A (en) | A kind of chemical fibre spinneret hole defect inspection method based on machine vision | |
| JP2008014842A (en) | Method and apparatus for detecting stain defects | |
| JP3695120B2 (en) | Defect inspection method | |
| CN101843090B (en) | White/black pixel correction device and method, and imaging system | |
| KR101559338B1 (en) | System for testing camera module centering and method for testing camera module centering using the same | |
| JP2002024802A (en) | Image processing system | |
| JPH11166898A (en) | Device and method for inspecting rod for flaw | |
| JPH08254499A (en) | Displaying/appearance inspection device | |
| JP2005249946A (en) | Defect inspecting apparatus for display device | |
| CN112669272A (en) | AOI rapid detection method and rapid detection system | |
| JP4967132B2 (en) | Defect inspection method for object surface | |
| JPH0979946A (en) | Inspection device for display device | |
| CN220022902U (en) | Chip detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20110330 |