CN101661247B - Film part separating device - Google Patents

Abstract

The present invention relates to a film component separating device, which can evenly separate a film component which is not to be easily separated and is formed with an incision. The film component separating device (FT2) comprises: a containing portion (26) which loads and contains a plurality of film components (8) provided with incisions; air passing ports (31a and 32a) which extend along the gravity direction of the load film components (8); and an air blowing portion (61) which can be movably supported along the gravity direction of extending of the air passing ports (31a and 32a), and eject air between the film components (8) via the air passing ports (31a and 32a), and the air blowing portion (61) moves from the lower direction to the upper direction along the gravity direction, and ejects air at the same time.

Description

Film part separating device

Technical field

The present invention relates to a kind of film part separating device.

Background technology

In order to take out the thin film component of so-called film or thin slice etc., as the film part separating device that many Di its separation is separated, known following patent documentation 1,2 described technology.

Open in the 2003-206041 communique the spy as patent documentation 1, put down in writing following technology, namely, under the state that has loaded in plasma display or liquid crystal indicator etc. the thin slices such as plastics that use, use vacuum attraction pad (4), separate thin slice from many ground topmost and with its taking-up, in this device, utilization is fixed on the nozzle (2) at assigned position place of the side of the plastic sheet heap that loads, and (AB1) is blown into air, thereby promotes the separation between thin slice.

Open in the flat 7-206201 communique the spy as patent documentation 2, put down in writing following technology, namely, extract out and in the device of many ground taking-ups the bottom of the page in quire (P) on will being loaded in mounting surface (1a), the in quire page (P) of the 2nd height on (H2) that is loaded in regulation picked up and promote from both sides, utilize the deflection of page (P) in quire and it is fallen dispersedly and separate downwards, simultaneously, be loaded in the page in quire (P) of the 2nd height (H2) downside, utilization begins the flat gas nozzle (41) that moves up and down in the 2nd height (H2) scope from the height of mounting surface (1a), it is moved back and forth at above-below direction, and air sent in quire between the page (P) and it is separated.

Patent documentation 1: the spy open the 2003-206041 communique (" 0016 ", Fig. 1)

Patent documentation 2: the spy opens flat 7-206201 communique (" 0016 "～" 0020 ", Fig. 1, Fig. 2)

Summary of the invention

Technical task of the present invention is, compares with existing structure, and the thin film component that is difficult for formation otch is separately separated equably.

In order to solve the aforementioned techniques problem, the film part separating device of technical scheme 1 described invention is characterised in that to have:

The resettlement section, its loading is also accommodated many thin film components that are formed with otch;

Gas is by mouth, and it is formed on the aforementioned resettlement section, and extends along the gravity direction that loads aforementioned thin film component; And

Air blowing portion, it is supported for and can moves by the gravity direction that mouth extends along aforementioned gas, passes through mouth to gas jet between the aforementioned thin film component via aforementioned gas, and this air blowing portion passes through mouth along aforementioned gas, mobile downwards from the top along gravity direction on one side, blow on one side.

Technical scheme 2 described inventions are on technical scheme 1 described film part separating device, to it is characterized in that having:

The aforementioned otch that forms on one side in the regulation of polygonal aforementioned thin film component;

Loading part, it is configured in the aforementioned resettlement section, and this loading part loads many aforementioned thin film components under the state of one side alignment that is formed with aforementioned otch;

Raise parts, it is configured on the aforementioned loading part, simultaneously, supports under the state that lifts in the bottom with forming the opposite side of aforementioned otch one avris that makes many aforementioned thin film components loading; And

Aforementioned gas by mouthful, it avoids aforementionedly raising the position of parts and disposing.

Technical scheme 3 described inventions are on technical scheme 1 or 2 described film part separating devices, to it is characterized in that having:

Gas supply device, it is to aforementioned air blowing portion supply gas;

Air blowing portion jacking gear, it makes the movement between lifting position and down position of aforementioned air blowing portion;

The blow-out position pick-up unit, it has and detects aforementioned air blowing portion and move to the lifting position detection part of lifting position and detect the down position detection part that aforementioned air blowing portion moves to down position;

The air blowing control module, it controls aforementioned gas supply device, to controlling from the air blowing of aforementioned air blowing portion; And

The lifting control module, it is according to the testing result of aforementioned blow-out position pick-up unit, control the lifting of aforementioned air blowing portion jacking gear, this lifting control module moves under the situation of aforementioned down position utilizing aforementioned down position detection part to detect aforementioned air blowing portion, aforementioned air blowing portion jacking gear is risen, simultaneously, under the state by aforementioned air blowing control module blow gas, utilizing aforementioned lifting position detection part to detect aforementioned air blowing portion moves under the situation of aforementioned lifting position, aforementioned air blowing portion jacking gear is descended, and, under the state that aforementioned air blowing is stopped, utilize aforementioned lifting position detection part to detect aforementioned air blowing portion and move under the situation of aforementioned lifting position, aforementioned air blowing portion jacking gear is stopped.

Technical scheme 4 described inventions are on any described film part separating device in technical scheme 1 to 3, to it is characterized in that having:

General air blowing parts, these general air blowing parts have: the supply passageway of supply gas; The 1st tributary circuit from aforementioned supply passageway branch; The 1st inflatable mouth, it is formed on the gas throughput direction downstream end of aforementioned the 1st tributary circuit, and with aforementioned gas by mouthful over against; And the supply passageway opening portion, it is to open wide to the outside with part or all of the surface of the opposite side of aforementioned the 1st branched path side of branching out of aforementioned supply passageway to form;

The inaccessible parts in opening portion, it is installed in the aforementioned supply passageway opening portion of aforementioned general air blowing parts, simultaneously inaccessible aforementioned supply passageway opening portion; And

The 2nd blows forms parts, it is installed in the aforementioned supply passageway opening portion of aforementioned general air blowing parts, the 2nd blows forms parts has: the 2nd tributary circuit, under its state in being installed in aforementioned supply passageway opening portion, to extending with the direction of the opposite side of aforementioned the 1st tributary circuit, and from aforementioned supply passageway branch; And the 2nd inflatable mouth, it is formed on the gas throughput direction downstream end of aforementioned the 2nd tributary circuit,

Aforementioned air blowing portion has: 1 direction air blowing portion, and it is at aforementioned general air blowing parts the inaccessible parts in aforementioned opening portion to be installed to form; And 2 direction air blowing portions, it is to install the aforementioned the 2nd at aforementioned general air blowing parts to blow and form parts and form.

Technical scheme 5 described inventions are, on any described film part separating device in technical scheme 1 to 4, it is characterized in that,

Have aforementioned air blowing portion, it is over against disposing by mouth with the aforementioned gas that forms the opposite side of aforementioned otch one side, from form the opposite side of aforementioned otch one side, to the aforementioned thin film component gas jet of loading.

The effect of invention

According to technical scheme 1 described invention, to compare with the situation that does not have structure of the present invention, it can separate equably with being difficult for the thin film component that is formed with otch separately.

According to technical scheme 2 described inventions, compare with the situation that does not have structure of the present invention, the top of the thin film component that loads can be remained near horizontal state.

According to technical scheme 3 described inventions, the gas jet that can descend compare with the situation that does not have structure of the present invention, and meanwhile thin film component is suspended, Yi Bian efficiently it is separated.

According to technical scheme 4 described inventions, to compare with the situation that does not have structure of the present invention, it can reduce manufacturing cost with the universalization of general air blowing parts.In addition, when increasing and decreasing the quantity of resettlement section, air blowing portion is is easily increased and decreased, improve the degree of freedom of structure modify.

According to technical scheme 5 described inventions, and to compare from the situation that forms otch side gas jet, the cut out portion that can reduce the thin film component of loading is twined mutually, reliably it is separated.

Description of drawings

Fig. 1 is that aforementioned replacing container uses and assemble the film part separating device of embodiments of the invention 1 as the oblique view of the printer of an example that has used the image processing system of changing container.

Fig. 2 is in printer shown in Figure 1, the key diagram of the state that side cover is opened.

Fig. 3 is the toner cartridge oblique view that uses in printer shown in Figure 1.

Fig. 4 is toner cartridge key diagram shown in Figure 3, Fig. 4 A is vertical view, Fig. 4 B is the figure that observes from the arrow IVB direction of Fig. 4 A, Fig. 4 C is the IVC-IVC line sectional view of Fig. 4 A, Fig. 4 D is the IVD-IVD line sectional view of Fig. 4 A, Fig. 4 E is the IVE-IVE line sectional view of Fig. 4 A, and Fig. 4 F is the IVF-IVF line sectional view of Fig. 4 B.

Fig. 5 is the key diagram of the turning axle of the stirrer that uses in toner cartridge, and Fig. 5 A is oblique view, and Fig. 5 B is the side view of observing from the arrow VB direction of Fig. 5 A.

Fig. 6 is the thin film component key diagram as an example of the transfer unit main body of the stirrer of embodiment.

Fig. 7 is the overall description figure of film withdrawing device of the embodiment 1 of film component extraction apparatus of the present invention, is that the divided thin film opening apparatus moves to lifting position, and film feeding device moves to the key diagram of the state that takes out initial position.

Fig. 8 is the overall description figure of the film withdrawing device of embodiment 1, is the divided thin film opening apparatus moves to the state of down position from the state of Fig. 7 key diagram.

Fig. 9 is the overall description figure of the film withdrawing device of embodiment 1, is film feeding device moves to the state of extracting position from state shown in Figure 7 key diagram.

Figure 10 is that Figure 10 A is oblique view as the key diagram of the film accepting box of an example of the thin film component accepting container of embodiment 1, and Figure 10 B is the figure that observes from the arrow XB direction of Figure 10 A, and Figure 10 C is the XC-XC line sectional view of Figure 10 A.

Figure 11 is the key diagram from the state of top viewing film accepting box, and Figure 11 A is the key diagram of not accommodating the state of thin film component in the film accepting box, and Figure 11 B is the key diagram of accommodating the state of thin film component in the film accepting box.

Figure 12 is the key diagram of state that is housed in the detection of the film in the film receiving space.

Figure 13 is the key diagram of the operation of assembling air blowing portion, and Figure 13 A is the key diagram of right side air blowing portion and left side air blowing portion, and Figure 13 B is the key diagram of center side air blowing portion.

Figure 14 is the key diagram of the absorption separating mechanism of embodiment 1, and Figure 14 A wants portion's cross sectional side view, and Figure 14 B is the XIVB-XIVB line sectional view of Figure 14 A.

Figure 15 is the key diagram of the position relation of the absorption layer of embodiment 1 and thin film component or base plate, and Figure 15 A is the key diagram of the position relation of absorption layer and thin film component, and Figure 15 B is the key diagram that the position of absorption layer and base plate concerns.

Figure 16 is the figure that utilizes the various functions that the control part on the film withdrawing device of functional block diagram explanation embodiment 1 has.

Figure 17 is the process flow diagram that the air in the film withdrawing device of embodiment 1 is separately handled.

Figure 18 is that the film position in the film withdrawing device of embodiment 1 is set the process flow diagram of handling.

Figure 19 is that the film in the film withdrawing device of embodiment 1 takes out the process flow diagram of handling.

Figure 20 is the Action Specification figure that blows and separately handle.

Figure 21 is that film position is set the Action Specification figure that handles, Figure 21 A is the key diagram that drives the state in the process that rises by coarse adjustment, Figure 21 B is the state from Figure 21 A, make thin film component be detected the key diagram of the state that begins to descend by thin film sensor by coarse adjustment, Figure 21 C is the state from Figure 21 B, by coarse adjustment base plate is descended, thin film sensor detects the key diagram less than the state of thin film component, Figure 21 D is the state from Figure 21 C, take out the key diagram that parts move to the state of extracting position, Figure 21 E is the state from Figure 21 D, base plate drives by fine setting and rises, the key diagram of the state of temporarily locating, Figure 21 F are the states from Figure 21 E, and base plate rises 20 pitch and the key diagram of the state of finally being located.

Figure 22 is that film takes out the key diagram that the absorption in handling is separately moved, Figure 22 A is the key diagram that absorption layer moves to the state of absorption disconnected position, Figure 22 B is the state from Figure 22 A, absorption layer moves to the key diagram of the state of absorption position, Figure 22 C is from the state shown in Figure 22 B, absorption layer moves to the key diagram of the state of absorption disconnected position, and Figure 22 D is from the state shown in Figure 22 C, takes out the key diagram that parts move to the state of rising separation point position.

Figure 23 is the Action Specification figure that does not arrange under the situation of raising parts, and Figure 23 A wants portion's sectional view, and Figure 23 B wants portion's oblique view.

Figure 24 is that explanation does not separate and after being removed fully at thin film component, and the key diagram of the state that unsegregated thin film component falls, Figure 24 A are the key diagrams that takes out the state of many thin film components, and Figure 24 B is the key diagram of the state that falls of the thin film component of downside.

Figure 25 is the key diagram of the film withdrawing device of embodiment 2, is the figure corresponding with Fig. 7 of embodiment 1.

Figure 26 is the film accepting box key diagram of the film withdrawing device of embodiment 2, is the figure corresponding with Figure 15 of embodiment 1.

Embodiment

Below, the object lesson (hereinafter referred to as embodiment) of embodiments of the present invention is described with reference to the accompanying drawings, but the present invention is not limited to following embodiment.

In addition, in order to understand the following description easily, in the accompanying drawings, making fore-and-aft direction is X-direction, making left and right directions is Y direction, making above-below direction is Z-direction, make arrow X ,-X, Y ,-Y, Z ,-direction shown in the Z or shown in a side, be respectively the place ahead, rear, right-hand, left, top, below or front side, rear side, right side, left side, upside, downside.

In addition, among the figure in " zero " mark " " expression from the arrow of the paper back side towards the front, in " zero " symbolic representation of mark " * " from the front of paper towards the arrow at the back side.

In addition, in the explanation of using the following drawings, suitably omit the required parts of explanation diagram in addition for easy understanding.

[embodiment 1]

Fig. 1 is that aforementioned replacing container uses and assembled the film part separating device of embodiments of the invention 1 as the oblique view of the printer of an example that has used the image processing system of changing container.

Fig. 2 is in printer shown in Figure 1, the key diagram of the state that side cover is opened.

In Fig. 1, Fig. 2, the full color digital printer U of the embodiment 1 of image processing system of the present invention has image processing system main body U1.In the bottom of earlier figures picture formation apparatus main body U1, support the sheet feed stacker TR1 as an example of medium supply unit, it is housed in the medium that the front document image forms, and can plug along fore-and-aft direction.On the earlier figures picture forms apparatus main body U1, form the row's paper disc TRh as an example of medium discharge portion, its discharge has formed the medium of image.Form the right flank of apparatus main body U1 at the earlier figures picture, can centered by the rear end, support side cover U2 with opening and closing, it is changed with an example that opens and closes parts as container, when the replacing of the toner cartridge TCy, the TCm that carry out yellow, magenta, cyan, these 4 colors of black, TCc, TCk, open and close the example that these toner cartridges are discarded the replacing container of developer as supply or the recovery of new reagent.

Fig. 3 is the oblique view of the toner cartridge that uses in printer shown in Figure 1.

Fig. 4 is the key diagram of toner cartridge shown in Figure 3, Fig. 4 A is vertical view, Fig. 4 B is the figure that observes from the arrow IVB direction of Fig. 4 A, Fig. 4 C is the IVC-IVC line sectional view of Fig. 4 A, Fig. 4 D is the IVD-IVD line sectional view of Fig. 4 A, Fig. 4 E is the IVE-IVE line sectional view of Fig. 4 A, and Fig. 4 F is the IVF-IVF line sectional view of Fig. 4 B.

Below, toner cartridge TCy～TCk that explanation is used in aforementioned printer U, toner cartridge TCy～the TCk of each color is because similarly constitute, so describe for the toner cartridge TCy of yellow usefulness, omits explanation for toner cartridge TCm, TCc, the TCk of other color.

In Fig. 3, Fig. 4, aforementioned toner cartridge TCy～TCk forms the width of horizontal direction greater than the rough cuboid of the flat of vertical direction height.Aforementioned toner cartridge TCy～TCk has: the discarded developer collecting receiving part 1 of front side, and it accommodates the discarded developer of discharging from image processing system main body U1 in inside; The filling developer resettlement section 2 of rear side, it is housed in the developer that forms supply under the situation that consumes developer owing to the image among the image processing system main body U1 in inside; And partition wall 3, it is separated between aforementioned discarded developer collecting receiving part 1 and the filling developer resettlement section 2.

In the inside of aforementioned discarded developer collecting receiving part 1, form the discarded developer containing space 1a that accommodates discarded developer.In the left upper portion of the front end face of aforementioned discarded developer collecting receiving part 1, form waste side inflow entrance 1b, it connects the not shown discarded developer carrying path of carrying discarded developer and connects under situation about being installed on the image processing system main body U1.Therefore, accompanying image forms the action of apparatus main body U1 and discarded developer is transferred in discarded developer carrying path, is discarded in via waste side inflow entrance 1b to discard among the 1a of developer containing space.In addition, at aforementioned waste side inflow entrance 1b, supporting stream inlet valve 1c, it is used under the situation that discarded developer carrying path breaks away from as an example of the inaccessible parts of inflow entrance, inaccessible waste side inflow entrance and prevent that inner discarded developer from spilling.Aforementioned inflow entrance valve 1c is used as an example of elastomeric element when flat volute spring 1d pushes to the direction of obturation, when the developer carrying path is discarded in connection, its front end that goes out of use the developer carrying path is pressed, to discarded developer containing space 1a medial movement.

In addition, at the 1e of leading section right side setting operation portion of discarded developer collecting receiving part 1, it operates toner cartridge TCy～TCk for being controlled by the user.

Inside in aforementioned filling developer resettlement section 2 forms and accommodates the filling developer receiving space 2a of filling developer.Form supply effluent outlet 2b in the lower-left of the rearward end of aforementioned filling developer accepting container 2 side, it is under the situation of being installed on the image processing system main body U1, the connection layout picture forms the not shown inflow entrance of apparatus main body U1 side, and the developer that is housed among the aforementioned developer containing space 2a is flowed out.The outside at aforementioned supply effluent outlet 2b, for when toner cartridge TCy is unloaded from image processing system main body U1, inaccessible supply effluent outlet 2b, can be on fore-and-aft direction supporting stream outlet valve 2c movably, it is as an example of the inaccessible parts of flow export.

On the aft bulkhead 2d of aforementioned filling developer resettlement section 2, rotatably support the follower gear 4 as an example of driven transferring elements.Under toner cartridge TCy was installed to state on the image processing system main body U1, the not shown drive transmission member engagement of aforementioned follower gear 4 and image processing system main body U1 was transmitted and is driven.

In Fig. 4 C～Fig. 4 F, the inside in aforementioned filling developer resettlement section 2 is configured in the stirrer 6 of the upwardly extending example as reagent delivery component in front and back.The front end of aforementioned stirrer 6, an end support portion 3a who rotatably is formed on the concavity on the partition wall 3 supports.The rear end of aforementioned stirrer 6 links with the follower gear 4 that is supported on the aft bulkhead 2d of filling developer resettlement section 2, if driving force is passed to follower gear 4, and then rotation integratedly.

Fig. 5 is the key diagram of the turning axle of the stirrer that uses in toner cartridge, and Fig. 5 A is oblique view, and Fig. 5 B is the side view of observing from the arrow VB direction of Fig. 5 A.

In Fig. 3, Fig. 4, aforementioned stirrer 6 has: turning axle 7, and it extends upward in front and back; And thin film component 8, it is an example that is supported on the transfer unit main body on the turning axle 7 as an example of thin film component.In Fig. 5, aforementioned turning axle 7 has along the turning axle main body 7a of the quadrangular shape of fore-and-aft direction extension.In Fig. 5, in the side of aforementioned turning axle main body 7a, protrude a plurality of mixing part 7b that are formed for stirring developer laterally.In the side of the turning axle main body 7a different with aforementioned mixing part 7b, as an example of transfer unit main body location division, form 2 film positioning convex portion 7c.In the both sides, front and back of aforementioned film positioning convex portion 7c, form film fixed part 7d, it forms the shape of mushroom, as an example of transfer unit main body fixed part.

Fig. 6 is the key diagram as the thin film component of an example of the stirrer transfer unit main body of embodiment 1.

In Fig. 6, aforementioned thin film component 8 has the main film body 8a as the rectangular film shape of a polygonal example.In addition, in embodiment 1, used thickness is the PET about 100 μ m: the film of polyethylene terephthalate system.On the base end part on the supported turning axle 7 of main film body 8a, corresponding with the allocation position of 2 film positioning convex portion 7c of aforementioned turning axle 7, form pilot hole 8b, 8c.Aforementioned pilot hole 8b, 8c are in order to position, and a side is made of circular hole 8b, and opposite side is made of slotted hole 8c.

In the both sides of aforementioned pilot hole 8b, 8c, corresponding with the allocation position of aforementioned film fixed part 7d, form the hole 8d that is fixed.The aforementioned hole 8d that is fixed forms the shape that circular hole is set at the slit central portion, and when film fixed part 7d connected, its elastic deformation and film fixed part 7d is passed simultaneously, after passing, utilized the leading section of the mushroom-shaped of film fixed part 7d to prevent from coming off.In addition, aforementioned pilot hole 8b, 8c and be fixed hole 8d and film positioning convex portion 7c, film fixed part 7d are set at, pilot hole 8b, pilot hole 8c, the axial disposition interval that is fixed between the 8d of hole are different spacings, thereby thin film component 8 front and back can be installed on the turning axle 7 on the contrary.That is to say, in order to prevent the mistake assembling of turning axle 7 and thin film component 8, configuration pilot hole 8b, 8c and be fixed hole 8d and film positioning convex portion 7c, film fixed part 7d.

In the edge portion of the free end side of aforementioned main film body 8a, namely on one side of the free end side of rectangular main film body 8a, across the interval of regulation, forms a plurality of main notchs 11 of carrying, it is the rear side inclination to supply effluent outlet 2b side.In aforementioned main base end side end of carrying notch 11, in order to make otch in use can not tear prolongation, the tongue tear that forms circular hole prevents the 11a of portion.Form a plurality of secondary notchs 12 of carrying between the notch 11 aforementioned main the conveying.Aforementioned auxiliary carry notch 12 with away from supply effluent outlet 2b then more big mode form.That is to say that in order to carry the developer that is housed among the filling developer receiving space 2a to supply effluent outlet 2b efficiently, the secondary notch 12 of carrying is to form away from the supply side mouth 2b mode that then otch is more big.

Along the turning axle 7 of aforementioned main film body 8a axially, the position corresponding with supply effluent entrance 2b arranges anti-blocking piston part 13.The anti-blocking piston part 13 of embodiment 1 is made of the part of surrounding along the 13a of pair of notches portion that radially forms of turning axle 7, also forms tongue tear in the base end side end of the notch 13a of anti-blocking piston part 13 and prevents the 13b of portion.The developer that is attached on the supply effluent entrance 2b is pulverized in the rotation of aforementioned anti-blocking piston part 13 accompanying rotation axles 7 and periodically enter supply effluent outlet 2b.That is to say, for the developer that prevents the supply effluent entrance 2b to the side discharge of tilting from gravity direction stops up, and make the supply stabilization, anti-blocking piston part 13 is set.

Therefore, on the thin film component 8 of embodiment 1, at the avris as free end side, as an example of otch, form main notch 11, secondary notch 12 and the notch 13a of carrying of carrying.

In addition, in order to prevent damaging owing to the power that is subjected to from developer when rotated makes tongue tear, at bigger main notch 11 and 13 places, anti-blocking piston part of carrying of the otch of the power that effect is bigger easily, form tongue tear and prevent the 11a of portion, 13b.

In addition, shown in Fig. 4 D, in embodiment 1, main film body 8a is set to following drift, that is, and and under the state of bending, with the inner peripheral surface of filling developer receiving space 2a contact on one side and rotate on one side.In addition, anti-blocking piston part 13 under the state of bending, on one side contact with the medial surface of filling developer receiving space 2a on one side and rotates, simultaneously, its drift forms to such an extent that be shorter than other main film body 8a.

(explanation of film component extraction apparatus)

Fig. 7 is the overall description figure of film withdrawing device of the embodiment 1 of film component extraction apparatus of the present invention, is that the divided thin film opening apparatus moves to lifting position, and film feeding device moves to the key diagram of the state that takes out initial position.

Fig. 8 is the overall description figure of the film withdrawing device of embodiment 1, is the divided thin film opening apparatus moves to the state of down position from state shown in Figure 7 key diagram.

Fig. 9 is the overall description figure of the film withdrawing device of embodiment 1, is film feeding device moves to the state of extracting position from state shown in Figure 7 key diagram.

In Fig. 7～Fig. 9, have as the film withdrawing device FT of an example of the film component extraction apparatus of embodiment 1: thin film elevating device FT1, it is as an example of thin film component jacking gear; Divided thin film opening apparatus FT2, it is as an example of film part separating device; And film feeding device FT3, it is as an example of thin film component conveying device.

(explanation of thin film elevating device)

In Fig. 7～Fig. 9, aforementioned thin film elevating device FT1 has: tabular base component 21, and it is as an example of jacking gear main body; And foot 22, it extends downwards from base component 21.Left and right directions central authorities at aforementioned base component 21 upper surfaces are anterior, amount to 2 groups accepting box installing component 23 about support, and it is as an example of accepting container support component.Aforementioned each installing component 23 has: guide rail 23a, and it extends upward in front and back as an example of pair of right and left guide portion; And stop the 23b of portion, and it is supported on the rear end of guide rail 23a, and on aforementioned each installing component 23, removably the support film accepting box 24, and this film accepting box 24 is as an example of thin film component accepting container.In addition, in embodiment 1, the aforementioned film accepting box 24 of the left and right sides is mounted with the opposite state of fore-and-aft direction on right side and left side.In addition, in the explanation of following film accepting box 24 because about the film accepting box 24 installed have only direction difference when installing, all the other similarly constitute, so the film accepting box 24 for the left side at length describes, for film accepting box 24 detailed on right side.

Figure 10 is the film accepting box key diagram as an example of the thin film component accepting container of embodiment 1, and Figure 10 A is oblique view, and Figure 10 B is the figure that observes from the arrow XB direction of Figure 10 A, and Figure 10 C is the XC-XC line sectional view of Figure 10 A.

In Fig. 7～Figure 10, aforementioned film accepting box 24 has the box-shaped container main body 26 of opening wide upward, this box-shaped container main body 26 is as an example of resettlement section, form film receiving space 26a in the inside of container body 26, this film receiving space 26a is as an example of thin film component receiving space.In Figure 10, form directed section 27 at aforementioned container body 26, it stretches out to the side from the bottom as an example of directed section, by aforementioned guide rail 23a guiding.In Figure 10 B, Figure 10 C, form Lift Part by a mouthful 26b in the bottom of aforementioned container body 26, its size is the quadrilateral that connects at above-below direction less than the length of the fore-and-aft direction of film receiving space 26a and the width of left and right directions.

On the two side, front and back 28,29 of aforementioned container body 26, form the gas of slotted hole shape by slotted hole 28a, 29a, it connects at fore-and-aft direction, and extends upward at upper and lower as the example of gas by mouth.In addition, on the left and right sides of aforementioned container body 26 wall 31,32, the gas that forms U word shape at the fore-and-aft direction central portion passes through U-lag 31a, 32a, and it connects at left and right directions, and extend downwards from the top as the example of gas by mouth.In addition, the gas of embodiment 1 is by U-lag 31a, 32a, except the function of gas by mouth, also have for the function of in film receiving space 26a, accommodating, the operator handles the opening of thin film component 8 when taking out thin film component 8, and the maintenance inspection operation that is used for carrying out base plate 36 described later is the function of the opening of so-called upkeep operation.In the front and back both sides of aforementioned gas by U-lag 31a, 32a, form the gas of slotted hole shape by slotted hole 31b, 32b, it makes sidewall 31,32 connect at left and right directions, and extends upward at upper and lower as the example of gas by mouth.

Figure 11 is the key diagram from top viewing film accepting box state, and Figure 11 A is the key diagram of not accommodating the state of thin film component in the film accepting box, and Figure 11 B is the key diagram of accommodating thin film component in the film accepting box.

In Figure 10 A, on aforementioned antetheca 28, rear wall 29 and right side wall 31, form whereabouts film guide hump 33, it protrudes from the upper surface upward as the example of whereabouts thin film component with guide body.Shown in Figure 10 C, aforementioned whereabouts film forms guide surface 33a with guide hump 33, and it rolls tiltedly towards film receiving space 26a as an example of guide surface.

In Fig. 7～Figure 11, in the upper end of the left wall 32 of aforementioned film accepting box 24, support paw 34, it protrudes to film receiving space 26a side as an example of film pressing component.

Figure 12 is the key diagram of state of detection that is housed in the film of film receiving space.

In Figure 10 C, Figure 11 A, Figure 12, in the bottom of aforementioned film receiving space 26a, as the base plate 36 of an example of the loading part that loads thin film component 8, supported with the state that can be in film receiving space 26a moves along above-below direction.Aforementioned base plate 36 forms length less than film receiving space 26a * wide, and greater than the length * wide shape of Lift Part by mouthful 26b.On aforementioned base plate 36, with the Lift Part position corresponding by mouthful 26b on, form lattice portion 36a, it is as an example of reticular part, has a plurality of holes that the above-below direction as an example of air-flow free section connects.

In addition, in Figure 10 C, Figure 11 A, Figure 12, on aforementioned base plate 36, with the right part of the opposite side of a side of the aforementioned paw 34 of configuration, support and raise parts 37.Embodiment 1 raises parts 37, is that so-called isocyanurate foam constitutes by the foaminess polyurethane material as an example of elastomeric element, forms step-like according to the mode that uprises gradually towards the right side height.In earlier figures 11A, the aforementioned parts 37 of raising dispose by U-lag 31a and the gas mode by slotted hole 31b with the gas of avoiding being formed on right side wall 31.That is to say that the gas in the front side passes through between the U-lag 31a by slotted hole 31b and gas, and the gas of rear side passes through to dispose and raise parts 37 between the U-lag 31a by slotted hole 31b and gas.

In Figure 11 b, Figure 12, in the film accepting box 24 of embodiment 1, above base plate 36, load many thin film components 8.At this moment, be configured in the left side, be paw 34 sides according to the main conveying notch 11 of the formation of thin film component 8, the secondary one side of notch 12, notch 13a one side of carrying, the another side that does not form notch one side is configured in the right side, namely raises parts 37 side formulas, and thin film component 8 is housed among the film receiving space 26a.

Therefore, as shown in figure 12, under the state that loads a plurality of thin film components 8, because of scattering of cut out portion, the perhaps so-called burr of chip that produces during the cut out portion moulding, the height in left side is higher than the right side, and is corresponding with it, paw 34 and raise parts 37 and be configured to makes uppermost thin film component 8 to dispose near horizontal state.

In Fig. 7～Fig. 9, Figure 10 C, corresponding by mouthful 26b with Lift Part on aforementioned base component 21, support the base plate jacking gear 41 that extends downwards, it is as an example of loading part jacking gear.The base plate jacking gear 41 of embodiment 1, an example as loading Lift Part has base plate elevating lever 43, and it is corresponding by mouthful 26b with Lift Part, can pass the base side that is formed on the base component 21 along above-below direction and pass through mouth 42.In Figure 10 C, form the thread groove 43a as an example of gear part in the bottom of aforementioned base plate elevating lever 43, aforementioned threads groove 43a and lifting control gear 44 engagements as an example of lifting control gear.By will be from being passed to aforementioned lifter wheel 44 as loading part with the driving of the base plate elevating motor 45 of an example of lifting drive source, and base plate elevating motor 45 is driven, thereby elevating lever 43 is moved up at upper and lower, make base plate 36 liftings.

In addition, in embodiment 1, the amount of movement that elevating lever 43 under the situation about rotating a circle according to lifting control gear 44 moves up at upper and lower, i.e. 1 pitch, the mode corresponding with the thickness of 1 thin film component 8 forms thread groove 43a and lifting control gear 44.And, base plate elevating motor 45, by can finely tune rotation, and the coarse adjustment motor that rotates these 2 rotations constitute, this fine setting rotation is that the rotation amount corresponding with 1 pitch rotated as 1 unit, it is continuous rotation that this coarse adjustment is rotated.As this motor, for example can adopt existing known stepping motor.

In Fig. 7～Fig. 9, in the left and right directions outside of aforementioned installing component 23, support the thin film sensor 46 as an example of film detection part, itself and each accepting box installing component 23 dispose accordingly.Aforementioned thin film sensor 46 has: tabular sensor support parts 46a, and it extends upward as an example of detection part main body; And luminous/sensitization one body 46b, it is supported on the surface of accepting box installing component 23 sides of sensor support parts 46a, has the illuminating part of irradiating and detecting light and the photographic department of accepting the detection light of reflection.That is to say that the thin film sensor 46 of embodiment 1 is the one-piece type sensor of luminous/sensitization, constituted by the optical sensor that detects based on the sensitization intensity that detects light.In addition, in embodiment 1, aforementioned thin film sensor 46 is set at, make detection light pass through the gas of left side wall 32 by the position of U-lag 32a, as shown in figure 12, from the detection light of luminous/sensitization one body 46b irradiation, be irradiated to the gas corresponding with the base end part of paw 34 by the detection position P1 of U-lag 32a upper end, under the situation that has thin film component 8, the edge reflections by by the thin film component 8 of detection position P1 detects thin film component 8 by luminous/sensitization one body 46b sensitization.

(explanation of divided thin film opening apparatus)

In Fig. 7～Fig. 9, at the left and right directions both ends of the rearward end of aforementioned base component 21, as an example of separating device guide member, support the pair of right and left guide member 51 that extends upward.In addition, in the inboard of aforementioned guide member 51, support separate units lifter 52, it is as an example of the air blowing portion jacking gear of divided thin film opening apparatus FT2.Aforementioned separate units lifter 52 has: lifter main body 52a, and it extends upward at upper and lower; And lifting unit 52b, it is supported on the lifter main body 52a, can move along the vertical direction.In addition, the separate units lifter 52 of embodiment 1 is made of so-called cylinder, and it constitutes, and supplies with control by gas and makes lifting unit 52b lifting on above-below direction.

At the tabular separate units pedestal 53 of aforementioned lifting unit 52b upper support, it is as an example of separating device main body.The width of aforementioned separate units pedestal 53 left and right directions forms to such an extent that be shorter than width between the pair of right and left thin film sensor 46, at the left and right directions central portion of rearward end, is supported by aforementioned lifting unit 52b.At the left and right directions both ends of the rearward end of aforementioned separate units pedestal 53, form and be directed through hole 54, it runs through wherein guide member 51 and to its channeling conduct, this is directed through hole 54 as an example of directed section.In the front portion of aforementioned separate units pedestal 53, corresponding with the position of film accepting box 24, form the pair of right and left accepting box by mouth 56,57, it is as the example of resettlement section by portion.Lower surface at aforementioned separate units pedestal 53 supports separately foot 58, and it protrudes downwards as an example of down position stop component.

In Fig. 7～Fig. 9, at the upper surface support air blowing parts 61 of aforementioned unit pedestal 53, it surrounds accepting box by mouth 56,57 as an example of air blowing parts.Aforementioned air blowing parts 61 have the 61a～61g of air blowing portion of a plurality of examples as air blowing portion.That is to say, at the left side accepting box corresponding with aforementioned left side film accepting box 24 by mouthfuls 56 front side, the configuration front left side air blowing 61a of portion, it has with the gas of antetheca 28 by the corresponding nozzle 62a as an example of inflatable mouth of slotted hole 28a, at the rear side of left side accepting box by mouth 56, the configuration left rear side air blowing 61b of portion, it has gas with rear wall 29 by the corresponding nozzle 62b of slotted hole 29a.Similarly, at the right side accepting box by mouthfuls 57 front side and rear side, the configuration forward right side air blowing 61c of portion and the right lateral side air blowing 61d of portion, it has gas with the film accepting box 24 on right side by slotted hole 28a, 29a corresponding nozzle 62c, 62d.In addition, in the outside of each accepting box by the left and right directions of mouth 56,57, configuration is as the left side 61e of air blowing portion and the right side air blowing 61f of portion of an example of 1 direction air blowing portion, its have with the gas of film accepting box 24 by U-lag 32a and gas by slotted hole 32b corresponding nozzle 62e, 62f.Between aforementioned accepting box was by mouthfuls 56,57, configuration was as the center side air blowing 61g of portion of an example of 2 direction air blowing portions, its have with the gas of film accepting box 24 by U-lag 31a and gas by the corresponding nozzle 62g of slotted hole 31b.

Figure 13 is the key diagram of the operation of assembling air blowing portion, and Figure 13 A is the key diagram of right side air blowing portion and left side air blowing portion, and Figure 13 B is the key diagram of center side air blowing portion.

In Figure 13, the 61e of left side air blowing portion, the right side air blowing 61f of portion of embodiment 1, the center side air blowing 61g of portion all have the general air blowing sheet 66 as an example of general air blowing parts.Aforementioned general air blowing sheet 66 forms in inside: supply passageway 66a, and it connects fore-and-aft direction and forms supply gas; The 1st air blowing path 66b, it is from supply passageway 66a branch, as an example of the 1st tributary circuit; And each nozzle 62e～62g, it is formed on the gas conveyance direction downstream side of the 1st air blowing path 66b, these nozzles are as an example of the 1st inflatable mouth, in addition, supply passageway 66a and the surface that branches out the opposite side of the 1st air blowing path 66b side part or all, form the supply passageway opening portion 66c that opens wide to the outside.

In Figure 13 A, utilize the left side air blowing 61e of portion and the right side air blowing 61f of portion, in aforementioned supply passageway opening portion 66c, via the sealing gasket 67 as an example of airtight member, the obturation lid 68 of inaccessible supply passageway opening portion 66c is installed, and it is as an example of the inaccessible parts in opening portion.In addition, distolateral at another of supply passageway 66a, the sealing bolt 69 as inaccessible parts is installed.Therefore, utilize the left side air blowing 61e of portion and the right side air blowing 61f of portion, from supply passageway 66a gas supplied, by each the 1st 66b of air blowing portion, spray from nozzle 62e, 62f.

In Figure 13 B, on the center side air blowing 61g of portion, in the 66c of supply passageway opening portion, via the sealing gasket 70 as an example of airtight member, additional blow gas sheet 71 is installed, it is blown as the 2nd and forms an example of parts.Aforementioned additional blow gas sheet 71 has: as the 2nd air blowing path 71a of an example of the 2nd tributary circuit, it is under the state that is installed on the 66c of supply passageway opening portion, to extending with the direction of the opposite side of the 1st discharge path 66b, and from supply passageway 66a branch; And as the nozzle 62g of an example of the 2nd inflatable mouth, it is formed on the gas throughput direction downstream end of the 2nd air blowing path 71a.In addition, form a plurality of blow vent 70a at aforementioned sealing gasket 70, thus not inaccessible the 2nd air blowing path 71a.Therefore, utilize the center side air blowing 61g of portion, from supply passageway 66a gas supplied, flow through respectively blow path 66a, 71a, 62g blows out from nozzle.

In Fig. 7～Fig. 9, in embodiment 1, the left rear side air blowing 61b of portion is via the flexible pipe 72 as an example of link, be connected with the gas supply device 73 as an example of gas supply device, be supplied to the gas of the left rear side air blowing 61b of portion, be supplied to the right lateral side air blowing 61d of portion and the center side air blowing 61g of portion via connecting path 74, simultaneously, from the side-blown gas 61g of portion of central authorities, be supplied to the front left side air blowing 61a of portion and the forward right side air blowing 61c of portion via connecting path 74.In addition, the aforementioned left side 61e of air blowing portion and the right side air blowing 61f of portion also are connected supply gas via flexible pipe 72 with gas supply device 73.

Therefore, in the divided thin film opening apparatus FT2 of embodiment 1, by making 52 liftings of separate units lifter, separate units pedestal 53 above shown in Figure 7 lifting position and shown in Figure 8 below down position between mobile.Follow this to move, air blowing parts 61 move up at upper and lower with respect to film accepting box 24.In addition, the aforementioned separately lower end of foot 58 at embodiment 1, support, then detects separate units pedestal 53 and moves to down position if separately foot 58 contacts with the surface of base component 21 as the contact down position detecting sensor of an example of down position detection part.In addition, on the 51a of the upper end of guide member 51, support, then detects separate units pedestal 53 and moves to lifting position if the upper surface of separate units pedestal 53 contacts with it as the contact lifting position detecting sensor of an example of lifting position detection part.That is to say, utilize the blow-out position detecting sensor as an example of blow-out position detection part that is constituted by aforementioned lifting position detecting sensor and down position detecting sensor, detect the position of the air blowing 61a～61g of portion.

(explanation of film feeding device)

In Fig. 7～Fig. 9, the film feeding device FT3 of embodiment 1, have and carry with mobile device 81, it is configured in the right-hand of base component 21, and extend upward in front and back, the thin film component 8 that conveying is taken out by film withdrawing device FT, and this conveying extends to mobile device 81 it is assembled in not shown film apparatus for assembling on the turning axle 7.Use on the mobile device 81 in aforementioned conveying, support is as the conveying lifter 82 of an example of contact separation direction moving-member, it can be to be transferred movably on the fore-and-aft direction with mobile device 81 to support at throughput direction, and the conveying jacking gear of Yan Shening makes absorption layer described later mobile with respect to the direction of thin film component 8 contact separations upward.

, carry with advance and retreat unit 83 by carrying with lifter 82 supports with on the lifter 82 in aforementioned conveying, it can move up at upper and lower as carrying an example using driving and reversing mechanism.Separate retrieval unit 84 in aforementioned conveying with advance and retreat unit 83 upper supports, it is as an example that separates withdrawing device, can utilize and carry with advance and retreat unit 83, between Fig. 7, retreating position shown in Figure 8 and in-position shown in Figure 9, left and right directions enterprising retire moving.In addition, the conveying of embodiment 1 is with lifter 82 and carry with advance and retreat unit 83, with aforementioned separate units lifter 52 similarly, constituted by cylinder.

Figure 14 is the key diagram of the absorption separating mechanism of embodiment 1, and Figure 14 A wants portion's cross sectional side view, and Figure 14 B is the XIVB-XIVB line sectional view of Figure 14 A.In Fig. 7～Fig. 9, aforementioned separately retrieval unit 84 has tabular retrieval unit main body 86.In Fig. 7～Fig. 9, corresponding with 2 film accepting boxs 24 at the lower surface of aforementioned retrieval unit main body 86, support pair of right and left absorption separating mechanism resettlement section 87.In Figure 14, each adsorbs the case shape that separating mechanism resettlement section 87 forms hollow, inside in absorption separating mechanism resettlement section 87, support conduct absorption and separately use the absorption of an example of driven wheel separately to use gear 89, it separately uses the absorption of an example of drive source separately to use motor 88 transmission of drive force from the conduct absorption that is supported on retrieval unit main body 86 inside.

In Figure 14 B, the diapire 87a in aforementioned absorption separating mechanism resettlement section 87 is formed on upwardly extending front and back, front and back pair of openings 87b.On aforementioned diapire 87a, in the left side of front openings 87b and the right side of the opening 87b of rear side, as an example of guide member, support the 2 pairs of directing pin 91 in front and back of extending upward.In addition, in aforementioned absorption separating mechanism resettlement section 87, separately with gear 89, dispose the separately tooth bar 92 of an example of direction moving-member of conduct across absorption in the left and right sides.Aforementioned each tooth bar 92 has the gear part 92a of the upwardly extending example as gear part in front and back,, form with absorption and separate the gear teeth 92b as an example of engaging piece that uses that gear 89 meshes separately with gear 89 sides in the absorption of the 92a of aforesaid gears portion.On the 92a of aforesaid gears portion, form as an example of directed section be directed slotted hole 92c, it connects aforementioned directing pin 91, simultaneously, is supported by directing pin 91, can move up in front and back.In the fore-and-aft direction outer end of the 92a of aforesaid gears portion, form the taking-up member supporting 92d of portion that extends to opening 87b side.

In Figure 14 A, Figure 14 B, at the lower surface of the aforementioned taking-up member supporting 92d of portion, support the taking-up parts 93 that pass opening 87b and extend downwards.Aforementioned taking-up parts 93 have base portion 94, and it is removed the 92d of member supporting portion and supports, and moves up in front and back integratedly.In Figure 14 A, support the flexible maintaining part 96 of the tubular that extends downwards at the lower surface of aforementioned base portion 94.Form in the inside of aforementioned flexible maintaining part 96 and flexiblely to allow the 96a of portion, it be in the upwardly extending tubular of upper and lower space, forms the retainer 96b as an example of anti-shedding part in the lower end, and its internal diameter is allowed the 96a of portion less than stretching.

In aforementioned flexible support portion 96 upper support taking-up portion main bodys 97.Aforementioned taking-up portion main body 97 has: columned supported 97a, and it is flexiblely allowed in the 96a of portion being housed at the state that upper and lower moves up; And the absorption layer support portion 97b of an example of conduct absorption support portion, it is formed on the lower end of supported 97a, and diameter is greater than supported 97a.In the upper end of aforementioned supported 97a, as an example of the portion that prevents that come off, form large diameter the be stopped device 97c corresponding with retainer 96b.

In Figure 14 A, form the attraction path 97e that is bent into L word shape in the inside of absorption layer support portion 97b, it makes the side of absorption layer support portion 97b be connected with the attraction mouth 97d of 97b lower end, absorption layer support portion.

In Figure 14, at the lower surface of aforementioned each absorption layer support portion 97b, support the absorption layer 98 as an example of attraction portion.In addition, on a pair of absorption layer 98 in the front and back of embodiment 1, the profile of the absorption layer 98F of front side forms less than the profile of the absorption layer 98R of rear side.Form and the adsorption orifice 98a that attracts mouthful 97e to be connected at aforementioned each absorption layer 98.

In Fig. 7～Fig. 9, Figure 14, in the side of aforementioned absorption layer support portion 97b, connect the flexible pipe 99 as an example that attracts link, flexible pipe 99 with attract the gas suction device 101 of an example in source to link to each other as thin film component.In addition, at the not shown pressure transducer of the middle part of flexible pipe 99 configuration as an example of pressure detecting part, it detects the pressure of the gas that attracts in flexible pipe 99.

Between the lower surface of the upper surface of aforementioned absorption layer support portion 97b and retainer 96b, installation is as the compression spring 102 of an example of elastomeric element, utilizes the elastic force of compression spring 102 and acts on the power that makes the direction that absorption layer support portion 97b separates with retainer 96b.Therefore, take out article body 97 and be supported for, can move up at upper and lower with respect to flexible maintaining part 96, the spacing between base portion 94 and absorption layer 98 lower ends can be stretched.

Figure 15 is the key diagram of the position relation of the absorption layer of embodiment 1 and thin film component or base plate, and Figure 15 A is the key diagram of the position relation of absorption layer and thin film component, and Figure 15 B is the key diagram that the position of absorption layer and base plate concerns.

Therefore, in the film feeding device FT3 of embodiment 1, carry with mobile device 8 and carry with 83 actions of advance and retreat unit by making, can make absorption layer 98 above film accepting box 24, move to from the upper space of thin film component 8 heaps away from the rising separation point position.And, carry with lifter 82 actions by making, can make absorption layer 98 move to be loaded in film accepting box 24 in the extracting position that contacts of thin film component 8.

At this moment, shown in Figure 15 B, in embodiment 1, absorption layer 98 is set to, and with respect to the thin film component 8 that loads, shown in solid line, at the Width central portion of thin film component 8, and is in contact with it in the position of departing from length direction central authorities.Especially, in embodiment 1, absorption layer 98 is set to, and shown in the solid line of Figure 15 B, with the position of the otch of avoiding thin film component 8, namely the position that does not form otch contacts.

In addition, shown in Figure 15 A, be that absorption layer 98 is set to, and contacts with the lattice portion 36a of base plate 36d under the state of sky at thin film component 8.In addition, in embodiment 1, be configured in the aforementioned absorption layer 98 and base plate elevating lever 43 of the opposition side up and down of base plate 36, be set at the position of staggering, if be set at absorption layer 98 to attract with lattice portion 36a state of contact, then pass lattice portion 36a, atmosphere is inhaled into from absorption layer 98.

And by sucking air by air suction apparatus 101, thin film component 8 is adsorbed pad 98 absorption.In this state, if separately carrying out rotating with motor 88, absorption drives, then separately use gear 89 and tooth bar 92 via absorption, absorption layer 98 is between the absorption disconnected position shown in the absorption position shown in the solid line of Figure 15 A and the dotted line, mobile in direction closer to each other, that separate, make thin film component 8 separately.

And by carrying with mobile device 81, carry with lifter 82, carrying the action with advance and retreat unit 83, under the state of absorption layer 98 adsorbent thin film parts 8, it is transported to the tool stand of not shown film apparatus for assembling, and is assembled on the turning axle 7.

(explanation of the control part of embodiment 1)

Figure 16 is the figure that is represented the various functions that the control part in the film withdrawing device of embodiment 1 has by functional block diagram.

In Figure 16, the control part C of the film withdrawing device FT of embodiment 1 is made of so-called microcomputer, and it has: input-output device, and it is the I/O that carries out the input and output of signal and input/output signal level adjustment etc. with the outside; Memory storage ROM, HDD, its storage is for the program of carrying out necessary processing and information etc.; Temporary storing device RAM, it is used for the essential data of interim storage; The arithmetic processing apparatus CPU of central authorities, its carry out be stored in aforementioned memory storage ROM, HDD, RAM etc. in the corresponding processing of program; And not shown oscillator etc., its vibration produces for making the synchronous periodic signal of circuit, being so-called clock.

In Figure 16, the film withdrawing device FT of aforementioned structure, be stored in as the read only memory ROM of an example of aforementioned memory storage or hard disk HDD or as the image in the random access memory ram of an example of temporary storing device etc. by execution and form program, and realize various functions.

(the signal input key element that links to each other with aforementioned control part C)

Output signal to aforementioned control part C input operation part U1 or thin film sensor 46, lifting position detecting sensor SN1, down position detecting sensor SN2, pressure transducer SN3, other signal output key element etc.

U1: operating portion

In Figure 16, the U1 of aforementioned operation portion has the display part U1a that shows image, be used for carrying out the load button U1b～U1d of various inputs etc.In addition, as aforementioned display U1a, for example can use LCD.As aforementioned load button, it has: blowing separately begins key U1b, and it is used for the beginning injection air and the air blowing that film separates is separately moved; Film position is set beginning key U1c, and it sets action for the film position that the uppermost position that begins to make the thin film component 8 on the base plate 36 that is loaded in film accepting box 24 moves to predefined position; Film takes out beginning key U1d, and it is used for beginning to take out also from film accepting box 24, and the film of handle thin films parts 8 takes out action; And other key, be so-called numerical key or directionkeys etc.

46: thin film sensor

Thin film sensor 46 detects the thin film component 8 that is housed in the film accepting box 24 and whether is positioned at detection position P1.

SN1: lifting position detecting sensor

Lifting position detecting sensor SN1 detects the situation that the separate units pedestal 53 that supports air blowing parts 61 moves to lifting position.

SN2: down position detecting sensor

Down position detecting sensor SN2 detects the situation that the separate units pedestal 53 that supports air blowing parts 61 moves to down position.

SN3: pressure transducer

Pressure transducer SN3 detects from the pressure of the gas of absorption layer 98 suctions.

(what be connected with control part C is controlled key element)

The control signal of being controlled key element that control part C output is following.

D1: base plate elevating motor control circuit

As the base plate elevating motor control circuit D1 of loading part lifting with an example of control circuit, the driving by control base plate elevating motor 45 makes base plate 36 liftings.

D2: separate the lifting control circuit

Separately lifting control circuit D2 by control separate units lifter 52, makes separate units pedestal 53 or 61 liftings of air blowing parts.

D3: air blowing control circuit

As the air blowing control circuit D3 of an example of air blowing control circuit, control air blowing from air blowing parts 61 by control gas supply device 73.

D4: carry and use mobile control circuit

Carry with mobile control circuit D4 control and carry with mobile device 81, making absorption layer 98 is that throughput direction is mobile at fore-and-aft direction.

D5: carry and use the lifting control circuit

Carry with lifting control circuit D5 control and carry with lifter 82, absorption layer 98 is moved up at upper and lower.

D6: carry with the advance and retreat control circuit

Carry with advance and retreat control circuit D6 control and carry with advance and retreat unit 83, make absorption layer 98 mobile in the left and right directions direction of namely advancing and retreat.

D7: control circuit is separately used in absorption

Absorption is separately controlled absorption separately with motor 88 with control circuit D7, makes a pair of absorption layer 98 mobile in the direction of separation closer to each other.

D8: gas attracts control circuit

Attract the gas of an example of control circuit to attract control circuit D8 control gas suction device 101 as gas, control makes its adsorbent thin film parts 8 from the attraction of the gas of absorption layer 98.

(function of aforementioned control part C)

In Figure 16, aforementioned control part C has function and realizes that the unit is so-called program module, and it carries out the processing corresponding with the output signal of exporting key element from aforementioned each signal, to aforementioned each controlling element output control signal.The function that the following describes the various functions that realize aforementioned control part C realizes the unit.

C1: jacking gear control module

Jacking gear control module C1 as an example that loads the lifting control module, base plate rising control module C12 when having base plate initial position setting unit C11 and taking-up, this jacking gear control module C1 control thin film elevating device FT1, adjustment is housed in the uppermost position of thin film component 8 heaps in the film accepting box 24, base plate 36 is risen, make on the position of following thin film component 8 to rise.

C11: base plate initial position setting unit

Base plate initial position setting unit C11 has film detecting unit C11A, coarse adjustment control module C11B, fine setting control module C11C, it is controlled base plate 36 and moves it, so that the position of the uppermost thin film component 8 of thin film component 8 heaps, be set in the initial position of predefined regulation.In addition, in embodiment 1, aforementioned initial position is set at following position, namely, pressure under the state of the uppermost thin film component 8 of absorption layer 98 absorption more than or equal to can beginning with the predefined position that keep-ups pressure that adsorbed state keeps carrying, makes base plate 36 20 pitch that rise, namely the amount suitable with the thickness of 20 thin film components 8 makes thin film component 8 be adsorbed pad 98 and presses.

C11A: film detecting unit

Film detecting unit C11A detects whether detect thin film component 8 at detection position P1 according to the detection signal of thin film sensor 46, and whether the top of namely detecting thin film component 8 heaps arrives detection position P1.

C11B: coarse adjustment control module

Coarse adjustment control module C11B has the coarse adjustment rising and arrives judgement unit C11B1 and coarse adjustment decline arrival judgement unit C11B2, and according to the testing result of film detecting unit C11A, the coarse adjustment driving of control base plate elevating motor 45 is continuous drive.

C11B1: coarse adjustment is risen and is arrived judgement unit

Coarse adjustment rise to arrive judgement unit C11B1, according to the testing result of film detecting unit C11A, drives base plate elevating motor 45 and in the process of rising base plate 36, whether the top of differentiating thin film component 8 heaps arrives detection position P1 in coarse adjustment.That is to say whether the edge of differentiating uppermost thin film component 98 arrives detection position P1 and detected by thin film sensor 46.In addition, in embodiment 1, utilizing coarse adjustment rising arrival judgement unit C11B1 differentiation to arrive under the situation of detection position P1, coarse adjustment control module C11B drives 45 reverse rotations of base plate elevating motor, drives by coarse adjustment and makes base plate 36 declines.

C11B2: coarse adjustment descends and arrives judgement unit

Coarse adjustment descend to arrive judgement unit C11B2, according to the testing result of film detecting unit C11A, drives base plate elevating motor 45 and makes in the process that base plate 36 descends in coarse adjustment, and whether the top of differentiating thin film component 8 heaps arrives the below of detection position P1.That is to say, after in the process that makes it to rise by the coarse adjustment driving, detecting thin film component 8, under the situation that base plate elevating motor 45 is stopped, since stop before rotation and excessively advance, when being overshoot, by the coarse adjustment driving base plate is descended, differentiate the below whether thin film component 8 moves to detection position P1, whether detected by thin film sensor 46.In addition, in embodiment 1, differentiate it and move under the situation below the P1 of detection position utilizing coarse adjustment descend to arrive judgement unit C11B2, coarse adjustment control module C11B stops base plate elevating motor 45, and the movement of base plate 36 is stopped.

C11C: fine setting control module

Fine setting control module C11C has trim locations and arrives judgement unit C11C1 and press with rising control module C11C2, this fine setting control module C11C is according to the testing result of film detecting unit C11A, the fine setting of control base plate elevating motor 45 drives, be that unit control drives with 1 pitch namely, making base plate 36 is the unit lifting with 1 pitch.

C11C1: trim locations arrives judgement unit

Trim locations arrives judgement unit C11C1 arrives judgement unit C11B2 according to coarse adjustment decline differentiation result, the state that stops from the decline of base plate 36, driving by fine setting in the process that makes base plate 36 risings, differentiating the top that is loaded in the thin film component 8 in the base plate 36 and whether arrive predefined fine setting in-position.The trim locations of embodiment 1 arrives judgement unit C11C1 in the process of 1 pitch of every rising, and according to the testing result of pressure transducer SN3, differentiation utilizes the pressure in the absorption layer 98 attraction processes whether to be less than or equal to pre-set threshold and namely keep-ups pressure.In addition, in embodiment 1, utilizing trim locations to reach under the situation of judgement unit C11C1 differentiation arrival trim locations, make to the movement of trim locations to stop.In addition, in embodiment 1, aforementioned keep-uping pressure is set to-45[kPa], but the value that keep-ups pressure can change arbitrarily corresponding to design or specification etc.

C11C2: press and use the rising control module

Press with rising control module C11C2, under the situation that moves to the fine setting in-position, fine setting drives base plate elevating motor 45, makes predefined the pressing of base plate 36 risings use ascending amount.Embodiment 1 presses with rising control module C11C2, under the situation that moves to the fine setting in-position, drive by fine setting base plate 36 is risen as pressing with i.e. 20 pitch of an example of ascending amount, make thin film component 8 topmost with absorption layer 98 contact pressure more than or equal to the predefined pressure that separate, the setting of end base plate initial position.In addition, in embodiment 1, the thickness of thin film component 8 is about 100 μ m=0.1mm as previously mentioned, and 20 pitch that rise are 2mm.

C12: base plate rising control module during taking-up

Base plate rising control module C12 during taking-up, under the situation of the absorption that utilizes absorption layer 98 beginning thin film components 8, conveying, when carrying 1 thin film component 8, control base plate elevating motor 45 and base plate 36 is risen.Base plate rising control module C12 during the taking-up of embodiment 1 when carrying 1 thin film component 8, drives base plate elevating motor 45 with 1 pitch fine setting corresponding with thin film component 8 thickness, makes the rise thickness of 1 thin film component 8 of base plate 36.In addition, in embodiment 1, the thickness of thin film component 8 is about 100 μ m=0.1mm as previously mentioned, and 1 pitch that rises is 0.1mm.

C2: separating device control module

Separating device control module C2 has: air blowing control module C21, and it is as an example of air blowing control module; The lifting control module C22 of air blowing portion, it is as an example of lifting control module; Lifting number of times counting unit C23, it is as an example of lifting number of times counting unit; And separately finishing judgement unit 24, this separating device control module C2 control divided thin film opening apparatus FT2 to the thin film component 8 heap gas jet that are housed in the mounted film accepting box 24, many Di separates its separation.

C21: air blowing control module

Air blowing control module C21 controls gas supply device 73, and control blows out from the gas of the 61a～61g of air blowing portion.

C22: air blowing portion lifting control module

The lifting control module C22 of air blowing portion has lifting position and arrives judgement unit C22A, down position arrival judgement unit C22B and lifting direction switch control unit C22C, the lifting control module C22 of this air blowing portion control separate units lifter 52 makes the 61a of the air blowing portion～61g lifting that is supported on the separate units pedestal 53.That is to say, by making 53 liftings of separate units pedestal, the 61a～61g of air blowing portion is moved up along the gas of film accepting box 24 by slotted hole 28a, 29a, 31b, 32b or gas by U-lag 31a, 32a at upper and lower.

C22A: lifting position arrives judgement unit

Lifting position arrives judgement unit C22A according to the result of lifting position detecting sensor SN1, differentiates separate units pedestal 53 and whether moves to Fig. 7, air blowing portion lifting position shown in Figure 9.

C22B: down position arrives judgement unit

Down position arrives judgement unit C22B according to the result of down position detecting sensor SN2, and whether differentiation separate units pedestal 53 moves to air blowing subordinate shown in Figure 8 is fallen the position.

C22C: lifting direction switch control unit

Lifting direction switch control unit C22C switches the lifting direction of separate units lifter 52 according to the differentiation result of lifting position arrival judgement unit C22A and down position arrival judgement unit C22B.The lifting direction switch control unit C22C of embodiment 1, in carrying out the process of being sprayed the separately action of carrying out by gas, move in differentiation under the situation of air blowing portion lifting position, moving direction is switched to descent direction from ascent direction, move under the situation that the position falls in the air blowing subordinate differentiating it, moving direction is switched to ascent direction from descent direction.In addition, the lifting direction switch control unit C22C of embodiment 1 if do not carrying out moving to air blowing portion lifting position under the state that gas sprays, does not then carry out the switching of lifting direction and stops, and separately action finishes to blow.

C23: lifting number of times counting unit

The number of times of the air blowing of the lifting number of times counting unit C23 61a of portion～61g lifting is that lifting times N 1 is counted.In addition, in embodiment 1, will be counted as lifting times N 1 by the detected number of times of down position detecting sensor SN2.

C24: separately finish judgement unit

Separately finish judgement unit 24 and have lifting end number of times storage unit C24A, its number of times of storing predefined end lifting is that lifting finishes times N a, finish times N 1 according to lifting number of times and lifting by lifting number of times counting unit C23 counting, differentiate the lifting that whether finishes the 61a～61g of air blowing portion, whether finish separately action.In addition, in embodiment 1, lifting end times N a is set to and is equivalent to 30 minutes number of times of branch ETAD expected time of arrival and departure.

C3: conveying device control module

Conveying device control module C3 have carry with mobile control unit C31, as the conveying of an example of contact separation control module with lifting control module C32, carry with advance and retreat control module C33, suction device control module C34, film and take out control module C35, this conveying device control module C3 control film feeding device FT3 utilizes taking-up parts 93 many to separate, attract and carry the thin film component 8 that is housed in the film accepting box 24.

C31: carry and use mobile control unit

Carry and use mobile control unit C31 via carrying with mobile control circuit D4, control is carried with mobile device 81, and absorption layer 98 is moved at throughput direction.

C32: carry and use the lifting control module

Carry with lifting control module C32 and carry with lifter 82 via carrying with lifting control circuit D5 control, make and take out parts 93 lifting moving on above-below direction.

C33: carry with the advance and retreat control module

Carry with advance and retreat control module C33 and carry with advance and retreat unit 83 via carrying with advance and retreat control circuit D6 control, making and taking out parts 93 is that right and left moves up in the advance and retreat direction.

C34: suction device control module

Suction device control module C34 attracts control circuit D8 control gas suction device 101 via gas, and control utilization is taken out the absorption of 93 pairs of thin film components 8 of parts.In addition, in embodiment 1, aforementioned gas suction device 101 is set to, and utilizes and stablizes vacuum pressure-75[kPa] attract.In addition, the suction device control module C34 of embodiment 1 constitutes, and applies malleation from taking out when parts 93 come off at the thin film component 8 that makes absorption, namely applies the pressure that is higher than atmospheric pressure, and blow out air makes it come off, peel off.

C35: film takes out control module

Film taking-up control module C35 has sylphon detecting unit C35A, sylphon is informed separately control module C35C of unit C35B, absorption, controls the taking-up of the thin film component from film accepting box 24 8 that is undertaken by taking-up parts 93.

C35A: sylphon detecting unit

Whether the thin film component 8 that sylphon detecting unit C35A detects in the film accepting box 24 does not exist.The sylphon detecting unit C35A of embodiment 1, move under the state that contacts the extracting position that adsorbs and take out with the top of thin film component 8 at the absorption layer 98 that takes out parts 93, pressure transducer SN3 is not less than or equal under the situation about keep-uping pressure when being carried out the state of gas attraction by gas suction device 101, be following situation, namely, judge that thin film component 8 does not exist, absorption layer 98 contacts with the lattice portion 36b of base plate 36, pass the hole of lattice portion 36b and suck air, pressure directly becomes atmospheric pressure, rather than is less than or equal to and keep-ups pressure.

C35B: sylphon is informed the unit

Sylphon informs that unit C35B is being differentiated under the thin film component 8 non-existent situations by sylphon detecting unit C35A, shows the image of informing thin film component 8 non-existent situations in display part U1a.

C35C: absorption is control module separately

Absorption is control module C35C separately, separately uses control circuit D7 control absorption separately with motor 88 via absorption, makes closer to each other between each absorption layer 98, separation.That is to say, under the state of the uppermost thin film component 8 of absorption layer 98 absorption, by making absorption layer 98 closer to each other, separation, make uppermost thin film component 8 separate and separate with the thin film component 8 that loads thereunder.In addition, separate among the control module C35C in the absorption of embodiment 1, the amount of movement of each absorption layer 98 is set less than the radius of absorption layer 98.By making amount of movement less than radius, can prevent from being adsorbed with the absorption layer 98 of thin film component 8 and the slip between the thin film component 8, realize separating the shortening of required time simultaneously.

(explanation of the process flow diagram of embodiment 1)

Below, the process flow diagram of the treatment scheme of the film withdrawing device FT of use embodiment 1 describes.

(the separately explanation of the flow process of processing of blowing)

Figure 17 is the flow process that the air blowing that utilizes the film withdrawing device of embodiment 1 to carry out is separately handled.

The processing of each ST (step) of the flow process of Figure 17 separates program and carries out according to the air blowing in hard disk of the control part C that is stored in film withdrawing device FT etc.In addition, this handles with other various processing of film withdrawing device FT parallel, carries out by parallel processing.

The flow process of Figure 17 begins when the power supply of contacting thin-film withdrawing device FT.

Whether in the ST1 of Figure 17, differentiating has air blowing separately to begin the input of key U1b.Under the situation that is (Y), enter ST2, under the situation of denying (N), repeat ST1.

In ST2, carry out following processing (1), (2), enter ST3.

(1) supply begins blowing out of gas from the gas of gas supply device 73 from the 61a～61g of air blowing portion.

(2) lifting times N 1 is initialized as 0.

In ST3, make 52 actions of separate units lifter, the 61a～61g of air blowing portion that is supported on the separate units pedestal 53 begins to descend.Then, enter ST4.

In ST4, whether the differentiation air blowing 61a～61g of portion arrives air blowing subordinate shown in Figure 8 is fallen the position.That is to say that whether differentiation is lowered by position-detection sensor SN2 detects.Under the situation that is (Y), enter ST5, under the situation of denying (N), repeat ST4.

In ST5, differentiate lifting times N 1 and whether finish times N a more than or equal to lifting.Under the situation that is (Y), enter ST6, under the situation of denying (N), enter ST7.

In ST6, stop to blow out of gas, enter ST7.

In ST7, processing (1), (2) below carrying out enter ST8.

(1) the lifting direction of switching separate units lifter 52 begins to be supported on the rising of the 61a～61g of air blowing portion on the separate units pedestal 52.

(2) lifting times N 1 is added 1.Be N1=N1+1.

In ST8, differentiate the air blowing 61a～61g of portion and whether arrive air blowing portion lifting position shown in Figure 7.That is to say whether differentiation is detected by lifting position detecting sensor SN1.Under the situation that is (Y), enter ST9, under the situation of denying (N), repeat ST8.

In ST9, differentiate and whether carrying out blowing out of gas, whether namely blow stops.Under the situation that is (Y), return ST3, under the situation of denying (N), enter ST10.

In ST10, stop the lifting of the 61a～61g of air blowing portion, return ST1.

(film position is set the explanation of the flow process of handling)

Figure 18 utilizes the film position of the film withdrawing device of embodiment 1 to set the flow process of handling.

The processing of each ST (step) of the flow process of Figure 18 is according to the film position setting program in hard disk of the control part C that is stored in film withdrawing device FT etc. and carry out.In addition, this handles with other various processing of film withdrawing device FT parallel, carries out by parallel processing.In addition, the film position of embodiment 1 is set and is handled, and for the film accepting box 24 on right side and the film accepting box 24 in left side, carries out individually respectively.

Flow process shown in Figure 180 begins when the power connection of film withdrawing device FT.

Among the ST21 of Figure 18, differentiate the input that whether exists film position to set beginning key U1c.Under the situation that is (Y), enter ST22, under the situation of denying (N), repeat ST21.

In ST22, by the coarse adjustment driving base plate elevating motor 45 is just being changeed, make base plate 36 begin to rise by coarse adjustment.Enter ST23 then.

In ST23, differentiate thin film sensor 46 and whether detect thin film component 8.Under the situation that is (Y), enter ST24, under the situation of denying (N), repeat ST23.

In ST24, make 45 counter-rotatings of base plate elevating motor by the coarse adjustment driving, make base plate 36 begin to descend by coarse adjustment.Enter ST25 then.

In ST25, differentiate thin film sensor 46 and whether detect less than thin film component 8.Under the situation that is (Y), enter ST26, under the situation of denying (N), repeat ST25.

In ST26, the coarse adjustment that stops base plate elevating motor 45 drives, and the coarse adjustment that stops base plate 36 is moved.Then, enter ST27.

In ST27, drive and carry with mobile device 81 and conveying advance and retreat unit 83, make and take out the taking-up initial position that parts 93 are kept away from film accepting box 24 from Fig. 7, taking-up parts 93 shown in Figure 8, move the rising separation point position that moves to the top, the top of thin film component 8 heaps that are housed in the film accepting box 24 to absorption layer shown in Figure 9 98.Enter ST28 then.

In ST28, differentiate and whether do not finish to the movement of rising separation point position, namely take out parts 93 and whether arrive the rising separation point position.Under the situation that is (Y), enter ST29, under the situation of denying (N), repeat ST28.

In ST29, make and carry with lifter 82 actions, make and take out parts 93 and descend from the rising separation point position, to adsorbent thin film parts 8 extracting position of its taking-up is moved.Enter ST30 then.

In ST30, differentiate the movement of whether finishing to extracting position, that is, whether arrive extracting position.Under the situation that is (Y), enter ST31, under the situation of denying (N), repeat ST30.

In ST31, the absorption of the thin film component 8 that the attraction that beginning is undertaken by gas suction device 101, beginning are undertaken by absorption layer 98.Enter ST32 then.

In ST32, whether the detected pressures of differentiating pressure transducer SN3 is less than or equal to keep-ups pressure.That is to say, differentiate the interim location of whether finishing base plate 36.Under the situation of denying (N), enter ST33, under the situation that is (Y), enter ST34.

In ST33, fine setting drives base plate elevating motor 45, makes its i.e. thickness of a thin film component 8 of 1 pitch that rises.Return ST32 then.

In ST34, fine setting drives base plate elevating motor 45, makes 20 pitch of base plate 36 risings.That is to say, make base plate 36 from 20 pitch of state rising of interim location, move it to the state of the final location of thin film component and absorption layer 98 butts.Enter ST35 then.

In ST35, stop the attraction to be undertaken by gas suction device 101, stop the attraction of being undertaken by gas absorption pad 98.Enter ST36 then.

In ST36, make to carry with mobile device 81, conveying lifter 82, conveying and move with advance and retreat unit 83, begin to take out parts 93 movement to the taking-up initial position via the rising separation point position.Enter ST37 then.

In ST37, differentiate whether arrive the taking-up initial position.Under the situation that is (Y), enter ST38, under the situation of denying (N), repeat ST37.

In ST38, stop to take out the movement of parts, return ST21.

(film takes out the process description of handling)

Figure 19 is that the film that utilizes the film withdrawing device of embodiment 1 to carry out takes out the flow process of handling.

The processing of each ST (step) of the flow process of Figure 19 is carried out according to the film taking-up program in hard disk of the control part C that is stored in film withdrawing device FT etc.In addition, this handles with other various processing of film withdrawing device FT parallel, carries out by parallel processing.

Flow process shown in Figure 19 begins when the power connection of film withdrawing device FT.

In the ST51 of Figure 19, differentiate the input that whether exists film to take out beginning key U1d.Under the situation that is (Y), enter ST52, under the situation of denying (N), repeat ST51.

In ST52, make to carry and use mobile device 81, conveying with 83 actions of advance and retreat unit, taking-up parts 93 are moved to the rising separation point position from the taking-up initial position.Enter ST53 then.

In ST53, differentiate taking-up parts 53 and whether arrive the rising separation point position.Under the situation that is (Y), enter ST54, under the situation of denying (N), repeat ST53.

In ST54, make and carry with lifter 82 actions, begin to take out the movement of parts 93 from the rising separation point position to extracting position.Enter ST55 then.

In ST55, differentiate taking-up parts 93 and whether arrive extracting position.Under the situation that is (Y), enter ST56, under the situation of denying (N), repeat ST55.

In ST56, make gas suction device 101 action, the absorption of the thin film component 8 that beginning is undertaken by absorption layer 98.Enter ST57 then.

In ST57, whether differentiate the detected pressure of pressure transducer SN3 more than or equal to keep-uping pressure.Under the situation that is (Y), enter ST58, under the situation of denying (N), enter ST67.

In ST58, make absorption separately with motor 88 actions, attract thin film components 8 and press under the pressure status that is equivalent to 20 pitch at absorption layer 98, make it from the absorption position separated from one another shown in the solid line of Figure 15 A, after the approximating absorption disconnected position shown in the dotted line, separate to absorption position, and then approach the absorption disconnected position.Enter ST59 then.

In ST59, control is carried with lifter 82, and taking-up parts 93 are moved to the rising separation point position from extracting position.Enter ST60 then.

In ST60, differentiate taking-up parts 93 and whether arrive the rising separation point position.Under the situation that is (Y), enter ST61, under the situation of denying (N), repeat ST60.

In ST61, carry out following processing (1) (2), enter ST62.

(1) makes absorption separately with motor 88 actions, move it to absorption layer 98 absorption position separated from one another.

(2) fine setting drives base plate elevating motor 45, makes 1 pitch of base plate 36 risings namely be equivalent to the distance of the thickness of a thin film component 8.

In ST62, make to carry with mobile device 81, conveying and move with advance and retreat unit 83 with lifter 82 and conveying, adsorbed thin film component 8 is moved to the tool stand of not shown film apparatus for assembling, on not shown film apparatus for assembling, it is moved to the assembling position that is assembled on the turning axle 7.Enter ST63 then.

In ST63, differentiate whether arrive assembling position.Under the situation that is (Y), enter ST64, under the situation of denying (N), repeat ST63.

In ST64, control gas suction device 101, the attraction that stops the thin film component 8 to be undertaken by absorption layer 98 keeps, and thin film component 8 is broken away from from absorption layer 98.Enter ST65 then.

In ST65, make and carry mobile device 81, carry and use lifter 82 and conveying with 83 actions of advance and retreat unit, taking-up parts 93 are moved to the taking-up initial position from assembling position.Enter ST66 then.

In ST66, differentiate taking-up parts 93 and whether arrive the taking-up initial position.Under the situation that is (Y), return ST52, under the situation of denying (N), repeat ST66.

In ST67, processing (1), (2) below carrying out enter ST68.

(1) shows that in display part U1a the thin film component 8 in the film accepting box 24 is empty situation, inform the operator.

(2) control gas suction device 101 stops the attraction of absorption layer 98.

In ST68, carry out following processing (1), (2), enter ST69.

(1) makes conveying with lifter 82 actions, taking-up parts 93 are moved to the rising separation point position.

(2) make 45 actions of base plate elevating motor, make base plate 36 move to the bottom position that base plate 36 contacts with the bottom of film receiving space 26a.

In ST69, differentiate taking-up parts 93 and whether arrive the rising separation point position.Under the situation that is (Y), enter ST70, under the situation of denying (N), repeat ST69.

In ST70, make conveying mobile device 81, carry with 83 actions of advance and retreat unit, taking-up parts 93 are moved to taking out initial position.Enter ST71 then.

In ST71, differentiate whether arrive the taking-up initial position.Under the situation that is (Y), return ST51, under the situation of denying (N), repeat ST71.

(effect of embodiment 1)

Figure 20 is the Action Specification figure that blows and separately handle.

In the film withdrawing device FT of the embodiment 1 with aforementioned structure, if under the film accepting box 24 of accommodating thin film component 8 is installed to state on the accepting box installing component 23, blow and separately begin the input of key U1b, then be maintained under the state of bottom position at base plate 36, one side blow gas is Yi Bian make the 61a of air blowing portion～61g lifting.Therefore, from the gas that the 61a～61g of air blowing portion blows out, pass gas and pass through U-lag 31a, 32a by slotted hole 28a, 29a, 31b, 32b, gas, be blown in the film receiving space 26a.In Figure 20, at this moment, in thin film component 8 heaps, the 61a of air blowing portion～61g is mobile downwards from the top on one side, on one side gas jet, be loaded in the state that thin film component 8 above thin film component 8 heaps becomes suspension, thin film component 8 is separated from each other and separates.Suppose on one side from below rise upward under the situation of spraying on one side owing to be loaded in thin film component 8 heaps of top, the thin film component 8 of below is difficult for being raised, and is difficult for suspension.

Therefore, in embodiment 1, compare with the situation of spraying on one side that rises upward from the below on one side, can make thin film component 8 separated from one another and separate efficiently.Especially, even form main notch 11, secondary notch 12, the such otch of notch 13a carried carried, caught on and not segregative nicked thin film component 8 heaps by burr each other, also can separate by making its suspension, thereby reliably make its separation efficiently and separate.

Especially, in the air blowing of embodiment 1 is separately handled, shown in ST4～ST6, finish times N a if in the decline process, reach lifting, then stop to blow out of gas.Therefore, while in higher the descending blow gas and carry out after separating of separating power, stop the separately action of the thin film component 8 that caused by gas, return air blowing portion lifting position and finish separately action.

In addition, in the divided thin film opening apparatus FT2 of embodiment 1, the left side air blowing 61e of portion and the right side air blowing 61f of portion, by general air blowing sheet 66, sealing gasket 67, inaccessible lid 68 and sealing bolt 69 assemblings, the center side air blowing 61g of portion is by general air blowing sheet 66, sealing gasket 70 and 71 assemblings of additional blow gas sheet.That is to say, make maximum textural element namely as general air blowing sheet 66 universalizations of assembly, compare with the situation of making separate part, can reduce manufacturing cost.

Especially, in embodiment 1, film accepting box 24 is 2 structure, and make film accepting box 24 more than or equal to 3 situation under, for example, consider the 3rd film accepting box 24 is configured under the situation in left side of left side film accepting box 24, the sealing gasket 67 by will the current 61e of left side air blowing portion, inaccessiblely cover 68 and sealing bolt 69, be replaced by sealing gasket 70 and additional blow gas sheet 71, the nozzle 62 towards the left side can be set more easily.Therefore, utilize the air blowing portion that makes general air blowing sheet 66 unitized embodiment 1, become and after the setting of film withdrawing device FT, easily to tackle the increase of film accepting box, the structure of minimizing, improve the degree of freedom of structure modify.

Figure 21 is that film position is set the Action Specification figure that handles, Figure 21 A is the key diagram of the state in the uphill process by the coarse adjustment driving, Figure 21 B is the key diagram that the state from Figure 21 A begins to be detected by thin film sensor by coarse adjustment the state that thin film component begins to descend, Figure 21 C is the state from Figure 21 B, by coarse adjustment base plate is descended, thin film sensor detects the key diagram less than the state of thin film component, Figure 21 D is the state from Figure 21 C, make and take out the key diagram that parts move to the state of extracting position, Figure 21 E is the state from Figure 21 D, base plate is risen and the key diagram of the state that temporarily positions by driving, Figure 21 F is the state from Figure 21 E, makes base plate rise 20 pitch and the key diagram of the state that finally is positioned.

If the thin film component in being housed in film accepting box 24 8 is blown under the state separately, carry out the input that film position is set beginning key U1c, then shown in ST21～ST22 of Figure 18, base plate elevating motor 45 carries out coarse adjustment and drives, shown in the state shown in Figure 21 A, base plate 36 rises.

In Figure 21 B, if uppermost thin film component 8 is detected by thin film sensor 46, then the rising of base plate 36 stops.At this moment, for being constituted by transparent material and light passes easily and is difficult for by thin film sensor 46 detected thin film components 8, in embodiment 1, being set at will be corresponding with the edge and the detection position P1 that compare the thin film component 8 that makes light reflection, scattering easily with the central portion of thin film component 8, can carry out the detection of thin film component 8 accurately.

In Figure 21 B, utilizing thin film sensor 46 to detect thin film components 8, make under the state that the rising of base plate 36 stops, because the inertia of the base plate elevating motor 45 of continuous drive, become the state that excessively advances upward in the position of base plate 36 sometimes.Corresponding, carry out the processing of ST24～ST26 of Figure 18, by coarse adjustment base plate 36 is descended, detect less than thin film component until thin film sensor 46.

In Figure 21 B, Figure 21 C, base plate 36 descends, if thin film sensor 46 detects less than thin film component 8, then the decline of base plate 36 stops.Therefore, by rising and the decline that utilizes coarse adjustment, coarse localization is the state that the top of thin film component 8 moves to detection position P 1.

In Figure 21 C, Figure 21 D, if carry out the coarse localization of base plate 36, then carry out the processing of ST27～ST31 of Figure 18, shown in Figure 21 D, take out parts 93 and move to extracting position, absorption layer 98 is near the top of thin film component 8.In this state, carry out the processing of the ST31 of Figure 18, carry out thin film component 8 to the attraction of absorption layer 98 by the attraction of gas.In this state, be the degree that thin film component 8 separates with absorption layer 98 or slightly contacts sometimes, thin film component 9 does not fit tightly with absorption layer 98.

Therefore, carry out the processing of ST32～ST33 of Figure 18,1 pitch ground of 361 pitch of base plate is risen, be less than or equal to until the detected pressure of pressure transducer SN3 and keep-up pressure, if being less than or equal to, it keep-ups pressure, then shown in Figure 21 E, become the thin film component 8 of the top and the state of the interim location that absorption layer 98 fits tightly.

In Figure 21 E, 21F, be less than or equal to if thin film component 8 fits tightly with absorption layer 98 and keep-up pressure, then carry out the processing of the ST34 of Figure 18, base plate 36 20 pitch that rise.Therefore, shown in Figure 21 F, take out compression spring 102 elastic deformations of parts 93 and become the state of compression, thin film component 8 is separately taken out on the parts 93 by being pressed in pressure by predefined absorption.Therefore, absorption layer 98 be positioned in be adsorbed usefulness separately pressure by the place, final position that is pressed on the thin film component 8.

Therefore, in embodiment 1, set in the processing in film position, at first, by the coarse adjustment driving base plate 36 is risen, after coarse localization, finally locate by the fine setting driving, compare with initial situation about just positioning by the fine setting driving, can realize locating high speed.

In addition, when coarse adjustment drives, utilizing after thin film sensor 4 detects thin film component 8, base plate 36 is descended.That is to say, under the situation that base plate 36 is risen, because the loading of thin film component 8 heaps is inhomogeneous, the fluctuation of the degree etc. that is overshoot of excessively advancing of the burr of the bending of thin film component, otch, base plate 36, the fluctuation of height takes place sometimes, only use the testing result of thin film sensor 46, can't obtain enough precision sometimes.Corresponding, in embodiment 1, utilizing after thin film sensor 46 detects, make base plate 36 descend until thin film sensor 46 detect less than, the position of thin film component 8 is stable with respect to detection position P1 easily.That is to say, carry out the situation of fine setting with not making it to descend after base plate 36 rises and compare, can suppress the influence of various fluctuations, accurately, stably be located in the final position.

Figure 22 is that film takes out the key diagram that the absorption in handling is separately moved, Figure 22 A is the key diagram that absorption layer moves to the state of absorption disconnected position, Figure 22 B is from the state shown in Figure 22 A, absorption layer moves to the key diagram of the state of absorption position, Figure 22 C is from the state shown in Figure 22 B, absorption layer moves to the key diagram of the state of absorption disconnected position, and Figure 22 D is from the state shown in Figure 22 C, takes out the key diagram that parts move to the state of rising separation point position.

Set in the processing in aforementioned film position, if under the state of finally being located in the position of uppermost thin film component 8, carry out the input that film takes out beginning key U1d, then carry out the processing of ST52～ST56 of Figure 19, take out parts 93 and move to the extracting position shown in Figure 21 F, utilize the attraction of gas that thin film component 8 is adsorbed on the absorption layer 98.Under the situation of thin film component 8 non-NULLs, carry out the processing of ST58, each absorption layer 98 approaches the direction of separating towards each other and moves.That is to say, as shown in figure 22, absorption layer 98 is under the state that attracts thin film component 8 and utilization absorption separately to press with pressure, after moving to the absorption disconnected position shown in Figure 22 A, return the absorption position shown in Figure 22 B, move to the absorption disconnected position shown in Figure 22 C again.

Its result is adsorbed 8 bendings of uppermost thin film component, reduction, the bendings of pad 98 absorption above Figure 22 A～Figure 22 C, separate with the thin film component 8 of downside and separated.Then, carry out the processing of the ST59 of Figure 19, shown in Figure 22 D, take out parts 93 and be moved upward, 1 thin film component 8 is taken out.

Thin film component 8 after the taking-up utilizes the processing of ST60～ST63 of Figure 19, is transported to assembling position, stops the attraction of gas, and thin film component 8 breaks away from from absorption layer 98, assembles.Then, take out parts 93 and return extracting position again, carry out the processing of next thin film component 8.At this moment, by the processing of ST61, the amount that base plate 36 risings are corresponding with thin film component 8 thickness that take out for following thin film component 8, also can be separated, take out equally to utilize absorption separately press the state of absorption layer 98 with pressure.

If thin film component 8 is removed, the thin film component 8 in the film accepting box 24 becomes empty state, and then absorption layer 98 contacts with the lattice portion 36a that air passes freely through, and pressure transducer SN3 becomes atmospheric pressure.Therefore, carry out the processing of ST67～ST70 of Figure 19, inform that thin film component 8 becomes empty, simultaneously, make base plate elevating lever 43 or take out the position that parts 93 return original state separately, the end film takes out to be handled.And, in embodiment 1, if any side that detects in the left and right sides film accepting box 24 is sky, then finishes film and take out processing.

Then, if the operator pulls down the film accepting box 24 of thin film component 8 change skies, the new film accepting box 24 that contains thin film component 8 heaps is installed, then after carrying out separately processing of aforementioned air blowing, film position setting processing successively, is carried out film and take out processing.

Therefore, in embodiment 1, make base plate 36 20 pitch that rise set handling by film position, make thin film component 8 utilize absorption separately pressure be adsorbed pad 98 and press, absorption layer 98 adsorb and the state of exerting pressure under, carry out approaching the separately action of absorption that separates.Thus, under not with the absorption situation that separately pressure is pressed, only utilize attractive force and by absorption layer 98 adsorbent thin film parts 8, the possibility of absorption affinity deficiency absorption layer 98 and thin film component 8 position deviations when existence is separately moved because of absorption, but in embodiment 1, be not only the attractive force of gas, can also utilize absorption separately to press with pressure, make thin film component 8 bendings reliably, and separate and separate with following thin film component 8.

In addition, in embodiment 1, in the action that repeats each absorption layer 98 separation closer to each other and with thin film component 8 separately after, it is not each absorption layer 98 state separated from one another, but make under the state of thin film component 8 bendings approaching, make its rising, thin film component 8 is taken out.That is to say, according to the mode of carrying out usually, each absorption layer 98 is returned under the situation that makes it again to rise after the state of separation, when it returns released state, owing to the thin film component 8 with downside such as burr or otch tangles under the situation that makes its rising, the situation that exists the thin film component 8 of downside to be raised together.Especially, if the thin film component of embodiment 18 forms otch, return each absorption layer 98 state separated from one another, then each otch of thin film component 8 possibility of twining mutually increases.Relative therewith, in embodiment 1, keep crooked and separated state rises absorption layer 98 with thin film component 8, the thin film component 8 that can reduce separation twines mutually again and waits and many situations that thin film component 8 is removed.

In addition, in embodiment 1, front side absorption layer 98F forms with different sizes with the absorption layer 98R of rear side, and the rigidity of rubber- like absorption layer 98F, 98R is so-called deflection difference.Therefore, under the big or small identical situation of 2 absorption layers 98 of supposition, under the state that attracts thin film component 8, when taking out separately moving that parts 93 approach mutually, separate, if the deflection of absorption layer 98 a little less than, then soft elastic deformation takes place and absorbs amount of movement in the part at absorption layer 98, thereby has the situation that can't make thin film component 8 bendings reliably.Relative therewith, in the embodiment 1 of the size that changes absorption layer 98F, 98R, the deflection difference of absorption layer 98F, 98R, the situation identical with size compared, and it can make thin film component 8 bendings reliably, makes each thin film component 8 separate and separate easily.

In addition, in embodiment 1, the amount of movement of absorption layer 98 can prevent absorption layer 98 with respect to the slip of thin film component 8 less than the radius of absorption layer 98, shortens the time separately.

In addition, in embodiment 1, it constitutes, and forms lattice portion 36a at base plate 36, can detect having or not of thin film component 8 by measuring gaseous tension.That is to say, under the situation that does not form lattice portion 36a, if under absorption layer 98 and base plate 36 state of contact, carry out the attraction of gas, then with the state of the attraction of carrying out thin film component 8 similarly, pressure changes, and the attraction that can't differentiate thin film component 8 still is to contact with base plate 36.Therefore, in the structure that does not form lattice portion 36a, the quantity of the sensor that has or not that detects thin film component 8 or management thin film component 8 must be set and differentiate and have or not, may make structure complicated, relative therewith, in embodiment 1, it is the simple structure that forms lattice portion 36a at base plate 36, can easily detect having or not of thin film component 8.

In addition, in embodiment 1, it is set at absorption layer 98 is adsorbed in the position of the otch of avoiding thin film component 8, with make absorption layer 98 contact situation in the mode that strides across otch to compare, can reduce owing to air leaks from otch making absorption insufficient, and because the air of leakage makes pressure transducer SN3 flase drop measure situation into sylphon.

In addition, in the film accepting box 24 of embodiment 1, it constitutes, and the end of thin film component 8 is supported by paw 34, under the situation of thin film component 8 arrival detection position P1, can utilize paw 34 to position in base plate 36 risings, detects thin film component 8 reliably.In addition, even base plate 36 rises and overshoot, thin film component 8 is also supported and can not fly out upward.

In addition, paw 34 is pressed formation otch one distolateral of thin film component 8.Suppose that under the situation that the ora terminalis of a side thin film component 8 that does not form otch is pressed by paw 34 when taking out upward when taking out that parts 93 rise and with thin film component 8, the ora terminalis of thin film component 8 can be by paw 34 hooks and bending becomes the opposing of vertical motion.Relative therewith, in embodiment 1, in a side that forms otch, thin film component 8 is pressed by paw 34, when taking out parts 93 and rise, the part of the short palisade that is surrounded by cut out portion can be crooked individually, because by the bending separately of the part of the short palisade of paw 34 hooks, so integral body is not crooked, the resistance of the action in the time of can reducing to make it to rise.Therefore, when utilize taking out parts 93 adsorbent thin film parts 8 and making it to rise, can reduce thin film component 8 by paw 34 hooks and situation about coming off from absorption layer 98, thereby take out thin film component 8 reliably.

In addition, in aforementioned air blowing is separately handled, under the state that separates between each thin film component 8, because otch or burr and can produce fluctuation at thickness direction in thin film component 8 heaps, produce the gap between each thin film component 8.Therefore, as thin film component 8 heaps, its avris that forms otch is thicker than another avris that does not form otch, highly increases.On the film accepting box 24 of embodiment 1, the situation that is thicker than another avris with an avris is corresponding, parts 37 are raised in another avris configuration at base plate 36, another avris of thin film component 8 heaps is elevated, as shown in figure 12, become in the top of thin film component 8 heaps, thin film component 8 is disposed with horizontality.Especially, in embodiment 1, raise parts 37 and constituted by resilient material, the number of thin film component 8 increases, and the weight of thin film component 8 heaps increases, under the situation that taking-up parts 93 are pressed upward, elastic deformation takes place in it, produces to keep the top near the effect of horizontal state.Perhaps, if thin film component 8 is removed, the number of thin film component 8 reduces, and then its elasticity is recovered, and still keeps topmost near horizontal state.

Figure 23 is the Action Specification figure that does not arrange under the situation of raising parts, and Figure 23 A wants portion's sectional view, and Figure 23 B wants portion's oblique view.

Suppose to raise under the situation of parts 37 in configuration not, shown in Figure 23 A, in the top of thin film component 8 heaps, an avris that forms thin film component 8 owing to otch or burr etc. is higher than the state of another avris, and it is removed parts 93 and adsorbs and take out.In this state, shown in Figure 23 A, 23B, take out parts 93 and make the thin film component 8 that is pressed become bending and the state of warpage easily.Under the state of thin film component 8 warpages, if it is mobile and separate in direction closer to each other, that separate respectively to take out parts 93, then shown in Figure 23 B, because make the thin film component 8 warpages ground of warpage to the vertical direction bending, so thin film component 8 is not flexible, its result is difficult for separately.Relative therewith, in embodiment 1, parts 37 are raised in utilization, uppermost thin film component 8 is held with the state near horizontality, under absorption layer 98 state of contact, the warpage of thin film component 8 reduces, and compares with the situation of raising parts 37 is not set, and can separate easily and reliably.

Figure 24 is explanation after thin film component does not take out fully separately and with it, the key diagram of the state that not distinct thin film component falls, Figure 24 A is the key diagram of the state that is removed of many thin film components, and Figure 24 B is the key diagram of the state that falls of the thin film component of downside.

As shown in figure 22, parts are 93 closer to each other, separating action makes thin film component 8 separately even utilize to take out, because burr or otch etc., thin film component 8 is also separated by many ground sometimes, but shown in Figure 24 A many thin film components 8 of taking-up.If take out many thin film components 8, then in uphill process, the thin film component 8 of downside is easy to generate by the elastic recovery of self and returns smooth membranaceous power from case of bending, from being adsorbed thin film component 8 disengagings of filling up 98 absorption and easily falling.The thin film component 8 that falls, the fluctuation of the direction of the power during owing to air-flow on every side or elasticity recovery etc. can not fallen under gravity direction sometimes, but are departed from the direction all around.In embodiment 1, even thin film component 8 departs from the direction all around, it also contacts with the guide surface 33a of the whereabouts film that is configured in film accepting box 24 upper ends with guide hump 33, is directed to the inboard of film receiving space 26a.Therefore, can adsorb the thin film component 8 that is directed face 33a guiding and returns common position by absorption layer 98, reliably with its taking-up by taking-up action afterwards.

[embodiment 2]

Figure 25 is the key diagram of the film withdrawing device of embodiment 2, is the figure corresponding with Fig. 7 of embodiment 1.

Figure 26 is the key diagram of film accepting box of the membrane unit of embodiment 2, is the figure corresponding with Figure 15 of embodiment 1.

Below, embodiments of the invention 2 are described, in the explanation of this embodiment 2, the label for identical with the corresponding textural element mark of the textural element of previous embodiment 1 omits its detailed explanation.

What time different with previous embodiment 1 this embodiment is below 2, and other side then constitutes similarly to Example 1.

In Figure 25, in the film withdrawing device FT of embodiment 2, to compare with embodiment 1, the flexible pipe 72 ' of the left side air blowing 61e of portion and the right side air blowing 61f of portion is connected with gas suction device 101, rather than is connected with gas supply device 73.That is to say, as shown in figure 26, in the film accepting box 24 of embodiment 2, gas from the front left side air blowing 61a of portion, the left rear side air blowing 61b of portion, the forward right side air blowing 61c of portion, the right lateral side air blowing 6d of portion and the center side air blowing 61g of portion, pass gas and pass through U-lag 31a by slotted hole 28a, 29a, 31b, gas, be blown in the film receiving space 26a, simultaneously, air in the film receiving space 26a, pass gas and pass through slotted hole 32b by U-lag 32a, gas, discharge from the left side air blowing 61e of portion and the right side air blowing 61f of portion.

(effect of embodiment 2)

In the film withdrawing device FT of the embodiment 2 with aforementioned structure, corresponding with film accepting box 24, on one side from another distolateral air supply of thin film component 8, on one side from a distolateral suction gas.Shown in embodiment 1, if from forming a side injection air of otch, then notch branch rocks, twine mutually with the cut out portion of up and down thin film component 8, existence can't distinct possibility, but in embodiment 2, can draw air at one side side draught that forms otch, reduce rocking of cut out portion, further improve separately ability.

In addition, shown in embodiment 1, under the situation of the left and right sides, front and back supply gas, gas supplied upward or the below flow, under situation about flowing upward, exist uppermost thin film component 8 to rock, attitude is unstable easily, is difficult for by thin film sensor 46 detected situations.Relative therewith, in embodiment 2, from a distolateral attraction, can reduce the unsettled situation of attitude of thin film component 8d.

(variation)

More than describe embodiments of the invention in detail, but the invention is not restricted to previous embodiment, in the main idea scope of the present invention that claims are put down in writing, can carry out various distortion.Following illustration variation of the present invention (H01)～(H011).

(H01) in the aforementioned embodiment, the thin film component 8 that uses for the stirrer at the toner cartridge of image processing system carries out illustration, is not limited to this structure, also is applicable to the thin film component arbitrarily that is formed with otch, slit.The present invention goes for forming otch at an avris, and does not form the thin film component of otch at another avris, but also be applicable to the thin film component that forms otch in both sides, or form the thin film component of otch in the part of an avris especially.That is to say that the shape of otch or position are not limited to the illustrative structure of embodiment, can adopt shape, position arbitrarily.

(H02) in the aforementioned embodiment, thin film sensor 46 or lifting position detecting sensor SN1, down position detecting sensor SN2 etc. are not limited to the illustrative structure of embodiment, can use sensor arbitrarily.For example, can detect thin film component 8 at the lower surface pressure sensor of paw or touch sensor, or replace lifting position detecting sensor SN1 and down position detecting sensor SN2 and use optical sensor.In addition, also can not use sensor, but according to the computing displacements such as driving time of base plate elevating motor 45 or separate units lifter 52, locate.

(H03) in the aforementioned embodiment, employing can be installed the structure of 2 film accepting boxs 24, but is not limited to this structure, also can adopt and only install 1, or adopt the structure that can install more than or equal to 3.

(H04) in the aforementioned embodiment, the size that preferably makes absorption layer 98 is the different sizes in front and back, but also can adopt identical size.

(H05) in the aforementioned embodiment, preferred disposition is raised parts 37, but also can omit.In addition, the shape of raising parts 37 is not limited to step-like shape, and also can adopt section is triangle or quadrilateral, shape arbitrarily such as trapezoidal.In addition, the material of raising parts 37 is preferably the resilient material of polyurethane or Foamex, rubber etc., but also can adopt any materials beyond the resilient material according to design or specification etc.In addition, the position of configuration or size also can change arbitrarily.

(H06) in the aforementioned embodiment, paw 34 or whereabouts film guide hump 33 preferably is set, but also can omits.In addition, paw 34 or whereabouts film also can change arbitrarily with position, size, the shape of guide hump 33.

(H07) in the aforementioned embodiment, lattice portion 36a is shaped as, form rectangle at the central portion of base plate, but be not limited to this structure, for example, also can be only with the regional corresponding a plurality of pores of face formation of absorption layer 98 contacts.In addition, be not limited to pore shape, also can form the arbitrary shape that gas can pass freely through, for example the through hole littler than the profile of absorption layer 98.

(H08) in the aforementioned embodiment, when carrying out the uppermost location of thin film component 8 when making base plate 36 liftings, coarse adjustment is driven and finely tunes the driving combination and make location high precision int and high speed, but be not limited to this structure, in the scope that precision and speed are allowed, can adopt method of adjustment arbitrarily.For example, under the situation of allowing in the time, can only drive by fine setting and position, under the situation that precision is allowed, can only use coarse adjustment to drive.Follow with it, employed drive source also is not limited to stepping motor, can use any drive source such as DC motor or cylinder arbitrarily.

(H09) in the aforementioned embodiment, as gas by mouthful, illustration with the structure of long hole shape or U-lag combination of shapes, but be not limited to this structure, for example also can adopt is oblong-shaped entirely, or is flute profile entirely, can also adopt the arbitrary shape of circular hole or square hole, polygonal hole etc.

(H010) in the aforementioned embodiment, when locating the uppermost position of thin film component 8, make it rise 20 pitch and carry out final localization process from interim positioning states, but be not limited to this processing, also can make the position of interim location be the position of final location, in addition, the distance that makes its rising also can the change at random corresponding to the thickness of employed thin film component 8 etc.

(H011) in the aforementioned embodiment, adopt to take out parts 93 in the mobile structure of the direction that approaches mutually, separates, but be not limited to this structure, also can be according to a side be fixed, and opposite side mode near with a side joint, that separate is constituted.In addition, also can be according to rear side the mutual different mode of amount of movement being constituted in the front side.

Claims (4)

1. film part separating device is characterized in that having:

The resettlement section, its loading is also accommodated many thin film components that are formed with otch;

Gas is by mouth, and it is formed on the aforementioned resettlement section, and extends along the gravity direction that loads aforementioned thin film component; And

Air blowing portion, it is supported for and can moves by the gravity direction that mouth extends along aforementioned gas, passes through mouth to gas jet between the aforementioned thin film component via aforementioned gas, this air blowing portion passes through mouth along aforementioned gas, mobile downwards from the top along gravity direction on one side, blow on one side

This film part separating device has general air blowing parts, and these general air blowing parts have: the supply passageway of supply gas; The 1st tributary circuit from aforementioned supply passageway branch; The 1st inflatable mouth, it is formed on the gas throughput direction downstream end of aforementioned the 1st tributary circuit, and with aforementioned gas by mouthful over against; And the supply passageway opening portion, it is to open wide to the outside with part or all of the surface of the opposite side of aforementioned the 1st branched path side of branching out of aforementioned supply passageway to form;

The inaccessible parts in opening portion, it is installed in the aforementioned supply passageway opening portion of aforementioned general air blowing parts, simultaneously inaccessible aforementioned supply passageway opening portion; And

The 2nd blows forms parts, it is installed in the aforementioned supply passageway opening portion of aforementioned general air blowing parts, the 2nd blows forms parts has: the 2nd tributary circuit, under its state in being installed in aforementioned supply passageway opening portion, to extending with the direction of the opposite side of aforementioned the 1st tributary circuit, and from aforementioned supply passageway branch; And the 2nd inflatable mouth, it is formed on the gas throughput direction downstream end of aforementioned the 2nd tributary circuit,

Aforementioned air blowing portion has: 1 direction air blowing portion, and it is at aforementioned general air blowing parts the inaccessible parts in aforementioned opening portion to be installed to form; And 2 direction air blowing portions, it is to install the aforementioned the 2nd at aforementioned general air blowing parts to blow and form parts and form.

2. film part separating device as claimed in claim 1 is characterized in that, has:

The aforementioned otch that forms on one side in the regulation of polygonal aforementioned thin film component;

Loading part, it is configured in the aforementioned resettlement section, and this loading part loads many aforementioned thin film components under the state of one side alignment that is formed with aforementioned otch;

Raise parts, it is configured on the aforementioned loading part, simultaneously, supports under the state that lifts in the bottom with forming the opposite side of aforementioned otch one avris that makes many aforementioned thin film components loading; And

Aforementioned gas by mouthful, it avoids aforementionedly raising the position of parts and disposing.

3. film part separating device as claimed in claim 1 is characterized in that, has:

Gas supply device, it is to aforementioned air blowing portion supply gas;

Air blowing portion jacking gear, it makes the movement between lifting position and down position of aforementioned air blowing portion;

The blow-out position pick-up unit, it has and detects aforementioned air blowing portion and move to the lifting position detection part of lifting position and detect the down position detection part that aforementioned air blowing portion moves to down position;

The air blowing control module, it controls aforementioned gas supply device, to controlling from the air blowing of aforementioned air blowing portion; And

The lifting control module, it is according to the testing result of aforementioned blow-out position pick-up unit, control the lifting of aforementioned air blowing portion jacking gear, this lifting control module moves under the situation of aforementioned down position utilizing aforementioned down position detection part to detect aforementioned air blowing portion, aforementioned air blowing portion jacking gear is risen, simultaneously, under the state by aforementioned air blowing control module blow gas, utilizing aforementioned lifting position detection part to detect aforementioned air blowing portion moves under the situation of aforementioned lifting position, aforementioned air blowing portion jacking gear is descended, and, under the state that aforementioned air blowing is stopped, utilize aforementioned lifting position detection part to detect aforementioned air blowing portion and move under the situation of aforementioned lifting position, aforementioned air blowing portion jacking gear is stopped.

4. film part separating device as claimed in claim 1 is characterized in that,

Have aforementioned air blowing portion, it is over against disposing by mouth with the aforementioned gas that forms the opposite side of aforementioned otch one side, from form the opposite side of aforementioned otch one side, to the aforementioned thin film component gas jet of loading.

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