CN101661222A - Substrate conveying device - Google Patents
Substrate conveying device Download PDFInfo
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- CN101661222A CN101661222A CN200910171530A CN200910171530A CN101661222A CN 101661222 A CN101661222 A CN 101661222A CN 200910171530 A CN200910171530 A CN 200910171530A CN 200910171530 A CN200910171530 A CN 200910171530A CN 101661222 A CN101661222 A CN 101661222A
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- roller
- substrate
- conveyance
- conveyance roller
- delivery device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The present invention provides a substrate conveying device, which is used for conveying a processed substrate coated with processing liquid and carried out heat process and for inhibiting the generation of the transfer spot on a processing film after heat process. The substrate conveying device (5) conveys the processed substrate (G) coated with processing liquid and carried out heat process andcomprises: conveying rollers (50), a rotating shaft (51) for performing shaft bearing to the conveying roller (50); and a drive unit for performing rotating drive to the rotating shaft (51), wherein the conveying rollers extend along the width direction of the processed substrate (G) and are supported by the shaft to rotate along the substrate conveying direction, the conveying rollers are layed at interval along the substrate conveying direction. The outer peripheral surfaces of the conveying rollers (50) form continuous concave-convex shapes in the shaft direction, and the convex top ends ofthe outer peripheral surfaces in the shaft direction are made into steeples having the curvature radius less than 3mm.
Description
Technical field
The present invention relates to a kind of base board delivery device that the processed substrates such as glass substrate of flat-panel monitor (FPD) usefulness are carried out conveyance, relate in particular to the base board delivery device that in heating arrangement, is implemented heat treated processed substrate with the conveyance of advection mode.
Background technology
In the manufacturing of FPD, use photoetching technique in order to form circuit pattern on the glass substrate of using at FPD.Utilize photoetching technique to form circuit pattern and carry out according to following steps, that is, coating forms resist film as the liquid against corrosion for the treatment of fluid on glass substrate, in the mode corresponding with circuit pattern resist film is exposed, and it is carried out development treatment.
In photoetching technique, generally after forming resist film and development treatment,, glass substrate is implemented heat treated in order to make the resist film drying.
In above-mentioned heat treated, as the means of conveyance glass substrate, following roller conveying mode is arranged, that is, the two ends of glass substrate are positioned on a plurality of carrying rollers with turning axle, by the rotation conveyance substrate of this carrying roller.
But because the maximization of glass substrate in recent years, only existing, these both sides, two ends of the rectangular glass substrate of mounting can make curved substrate become the problem of concavity.
Therefore,, be not only the conveyance roller 50 at the two ends of supporting substrates G, near the central authorities of substrate G, also by auxiliary ground of conveyance roller 51 (backing roll) supporting substrates G, in order to avoid make it bend to concavity as the record (with reference to Fig. 7) of patent documentation 1 grade.
No. 3960087 communique of [patent documentation 1] Jap.P.
But, there are the following problems, promptly, by the conveyance roller directly to the effective coverage that on glass substrate, is formed with resist film (under) when supporting, because the influence of the thermal capacity that the conveyance roller has, between the part and discontiguous part of the contact of conveyance roller, the rate of drying of resist film produces difference, after the resist drying, on resist film, produce spot.
Summary of the invention
The present invention is the invention of finishing in these cases, its purpose is to provide a kind of base board delivery device, this base board delivery device is to being coated with treating fluid, being implemented heat treated processed substrate and carrying out conveyance, is suppressed on the processing film after the thermal treatment and produces the transfer printing spot.
In order to address the above problem, base board delivery device of the present invention, to being coated with treating fluid, being implemented heat treated processed substrate and carrying out conveyance, it is characterized in that, comprise: the conveyance roller, Width at described processed substrate extends, and can be separated predetermined distance in the substrate transferring direction to lay in the rotation of substrate transferring direction by the axle supporting; Turning axle carries out the axle supporting to described conveyance roller; And driver element, described turning axle is rotated driving, the outer peripheral face of described conveyance roller forms at the consecutive concaveconvex shape of direction of principal axis, and it is the following pinnacle of 3mm that radius-of-curvature is made on the axial protuberance top on the described outer peripheral face.
By constituting as mentioned above, the outer peripheral face of conveyance roller is contacted with processed substrate point, the heat that can the conveyance roller be had passes to substrate by contact portion, perhaps the heat transmission can be disperseed.
Therefore, can make that to pass to the heat of processed substrate from the conveyance roller even and minimum, what can prevent that the conveyance roller from causing produces the transfer printing spot handling on the film.
In addition, preferably on the outer peripheral face that is formed concaveconvex shape of described conveyance roller, being at least more than the 2mm apart from size between the consecutive protuberance of direction of principal axis top is at least more than the 1mm with respect to the concave depth size on described protuberance top.
By as above stipulate between the protuberance top apart from size and concave depth size, the conveyance roller is close to the contact site and the noncontact portion of substrate, make from the amount of heat transfer even (difference of amount of heat transfer reduced) of conveyance roller, can remove the transfer printing spot to substrate.
In addition, described conveyance roller, the a plurality of tubular roller parts that have specified length at direction of principal axis are installed on the described turning axle, and each roller part is connected with adjacent roller part, the roller part of one end of described conveyance roller is fixed described turning axle, and other roller part is only fixed the adjacent roller part that is connected.
By constituting as mentioned above, be heated and when producing thermal expansion, the end side that never is fixed on the conveyance roller on the turning axle is extended on direction of principal axis at the conveyance roller.And, when when returning normal temperature, producing thermal shrinkage, can shrink from the end side of the conveyance roller of elongation, return to original state.
Therefore,, do not produce the bending of outer circumferential surface section or the gap of roller part seam each other etc. yet, do not have bad influence suppressing the transfer printing spot even the conveyance roller is heated and cools off and produce and expand flexiblely.
In addition, preferred described roller part, the one end forms the pin thread shape, and the other end forms the female screw shape, and described roller part interconnects by screw threads for fastening and adjacent roller part respectively.
By above-mentioned screw threads for fastening, roller part is connected to each other, and can not produce the gap of coupling part thus.
In addition, preferably in described conveyance roller, a plurality of roller parts that are connected with a described roller part on being fixed on described turning axle, respectively by in the direction rotation opposite with the sense of rotation of described turning axle and with adjacent roller part screw threads for fastening.
By constituting as mentioned above, can make when the conveyance substrate, even it is not turning axle is driven in rotation, lax by the roller part connecting portion each other of screw threads for fastening yet.
In addition, preferably in described conveyance roller, the axial length dimension that is formed with the part of concaveconvex shape on the outer peripheral face is at least more than the width of the effective coverage that is coated with treating fluid on the described processed substrate.
Thus, can make and offer the thermal capacity of handling film (effective coverage) by a conveyance roller and do not have difference about equally.
In addition, preferably separate in a plurality of conveyance rollers that predetermined distance lays in described substrate transferring direction, on its outer peripheral face, form at the consecutive concaveconvex shape of direction of principal axis by interconnected, make concavo-convex position difference between adjacent conveyance roller.
By disposing the conveyance roller as mentioned above, the track to the contact site of the conveyance roller of substrate is disperseed, can further prevent the generation of transfer printing spot.
The invention effect
According to the present invention, can access a kind ofly to being coated with treating fluid, being implemented the base board delivery device that heat treated processed substrate carries out conveyance, this base board delivery device can suppress after the thermal treatment to produce the transfer printing spot on the film handling.
Description of drawings
Fig. 1 is the vertical view that has as the resist coating development processing apparatus of the roller conveying mechanism of base board delivery device of the present invention.
Fig. 2 is the cut-open view that has as the in-plane of the heat treated unit (HT) of the roller conveying mechanism of base board delivery device of the present invention.
Fig. 3 is the cut-open view of side surface direction of the heat treated unit (HT) of Fig. 2.
Fig. 4 is overall diagram and the partial enlarged drawing thereof that is installed in a conveyance roller on the turning axle.
Fig. 5 is the partial sectional view of roller part.
Fig. 6 is the synoptic diagram of the concavo-convex configuration example of the adjacent conveyance roller of expression.
Fig. 7 is the vertical view of existing base board delivery device.
The figure of the shape of the roller part that Fig. 8 uses among the embodiment for expression.
Symbol description
5 roller conveying mechanisms (base board delivery device)
50 conveyance rollers
51 turning axles
52 roller parts
56 protuberance tops
57 recesses
60 bearings
G glass substrate (processed substrate)
The R radius-of-curvature
Embodiment
Below, describe preferred implementation of the present invention with reference to the accompanying drawings in detail.Base board delivery device of the present invention is applicable to the heat treated unit (HT) 28 in the resist coating development processing apparatus 100 shown in Figure 1.
At first, the workflow of simple declaration resist coating development processing apparatus 100.
In resist coating development processing apparatus 100, at first pass through the carrying arm 11a of carrying device 11, with the upstream-side-end of the substrate G conveyance in the box C that is positioned on the mounting table 12 at box station 1 to the carrying line A for the treatment of stations 2, then conveyance on carrying line A is carried out the organic removal processing that substrate G is contained at Excimer uv illumination unit (e-UV) 21.
Excimer uv illumination unit (e-UV) 21 finish substrate G after organic removal is handled on carrying line A by conveyance, implement to scrub to clean and handle and dried scrubbing clean unit (SCR) 22.
Scrub clean unit (SCR) 22 finish scrub clean to handle and dried after substrate G on carrying line A by conveyance, in drying unit (DH) 23 enforcement heat treated, dewater.
Substrate G after drying unit (DH) 23 is finished heat treated by conveyance, implements hydrophobization in coherent unit (AD) 24 and handles on carrying line A.Substrate G after coherent unit (AD) 24 is finished the hydrophobization processing by conveyance, cools off at cooling unit (COL) 25 on carrying line A.
Cooling unit (COL) 25 cooled substrate G on carrying line A by conveyance, form resist films at resist coating element (CT) 26.Forming resist film at resist coating element (CT) 26 is to make substrate G conveyance on carrying line A by one side, to substrate G supply resist liquid carry out on one side.
Substrate G after resist coating element (CT) 26 forms resist film by conveyance, is exposed in the reduced atmosphere at drying under reduced pressure unit (DP) 27 on carrying line A, implements the dried of resist film thus.
Substrate G after the dried of drying under reduced pressure unit (DP) 27 enforcement resist films by conveyance, implements heat treated at heat treated unit (HT) 28 on carrying line A, remove the solvent that contains in the resist film.The heat treated of substrate G is carried out on one side by roller conveying described later mechanism 5 conveyance on carrying line A on one side.
Substrate G after heat treated unit (HT) 28 finishes heat treated by conveyance, cools off at cooling unit (COL) 29 on carrying line A.
Cooling unit (COL) 29 cooled substrate G on carrying line A by conveyance after end of downstream side, carrying arm 43 conveyances by interface station 4 are to universal stage (RS) 44.
Then, utilize carrying arm 43,, be used to remove the exposure-processed of the peripheral part (unwanted part) of resist film in peripheral exposure device (EE) enforcement the peripheral exposure device (EE) of substrate G conveyance to external device (ED) piece 90.Then, by carrying arm 43, substrate G conveyance to exposure device 9, is implemented the exposure-processed of predetermined pattern on resist film.
In addition, conveyance was in exposure device 9 after substrate G was housed in buffer pocket on the universal stage (RS) 44 sometimes temporarily.By carrying arm 43, will finish substrate G conveyance after the exposure-processed to the machine at quarter (TITLER) of external device (ED) piece 90, the information of utilizing machine at quarters (TITLER) mark to stipulate.
The substrate G of information that is marked with regulation by machine at quarter (TITLER) by conveyance, handles in the coating that developing cell (DEV) 30 is implemented developer solution successively on carrying line B, flushing is handled and dried.The coating of developer solution is handled, flushing is handled and dried is for example carried out in the following order: one side conveyance substrate G on carrying line B, on substrate G, be covered with developer solution on one side, then, conveyance temporarily stops, and substrate tilts with predetermined angular and developer solution is flowed down, under this state, go up the supply washing fluid to substrate G, wash-out developer, then, make substrate G return to flat-hand position on one side and carry out conveyance once more, to substrate G dry up pathogenic dryness body on one side.
Handle in the coating that developing cell (DEV) 30 is finished developer solution, flushing is handled and dried after substrate G on carrying line B by conveyance, implement heat treated at heat treated unit (HT) 31, remove solvent and moisture that resist film contained.The heat treated of substrate G is while utilizing roller conveying described later mechanism 5 conveyance on carrying line B to carry out.The i ray UV illumination unit of the decolouring processing of carrying out developer solution can be set between developing cell (DEV) 30 and heat treated unit (HT) 31 in addition.Substrate G after heat treated unit (HT) 31 finishes heat treated by conveyance, cools off at cooling unit (COL) 32 on carrying line B.
Substrate G after cooling unit (COL) 32 is cooled by conveyance, checks at inspection unit (IP) 35 on carrying line B.Utilization is arranged on the carrying arm 11a of the carrying device 11 at box station 1, will be housed in mounting on the regulation box C on the mounting table 12 by the substrate G that checks.
Then, the heat treated unit (HT) 28 that has base board delivery device of the present invention as roller conveying mechanism 5 is described.In addition, heat treated unit (HT) 31 has the 28 identical structures with heat treated unit (HT).
Fig. 2 is the cut-open view of the in-plane of expression heat treated unit (HT) 28 (heat treatment apparatus), and Fig. 3 is the cut-open view of its side surface direction.
Heat treated unit (HT) 28 has: as the roller conveying mechanism 5 to the base board delivery device of directions X one side's side conveyance substrate G; With around or take in the housing 6 that the mode of roller conveying mechanism 5 is provided with; In housing 6, carry out the heating arrangements 7 of the substrate G of roller conveying with heating by roller conveying mechanism 5.
In roller conveying mechanism 5, a plurality of roughly columned conveyance roller 50 that extends in Y direction (Width of substrate G) separates predetermined distance and lays on directions X (substrate transferring direction).Conveyance roller 50 can be rotated at directions X by 51 supportings of turning axle respectively.
Turning axle 51 is connected directly or indirectly with drive sources (driver element) such as not having illustrated motor, be rotated by drive source drives, thus, substrate G on a plurality of conveyance rollers 50 to directions X one side's side by conveyance.
As shown, the conveyance path of this roller conveying mechanism 5 or conveyance face constitute the part of carrying line A (being carrying line B) in heat treated unit (HT) 31.
Housing 6 forms slim case shape, substrate G can be accommodated with the approximate horizontal state.At the opposed side wall portion of the directions X of this housing 6, the slit-shaped of extending in the Y direction that has that substrate G can pass through moves into mouthfuls 61 and take out of mouthfuls 62.
The conveyance roller 50 of roller conveying mechanism 5 is configured in the housing 6, and by being arranged at the bearing 60 at the relative side wall portion of Y direction of housing 6, the turning axle 51 that supports above-mentioned conveyance roller 50 can rotate it.
The wall portion of housing 6, here refer to upper wall portions, bottom wall portion with at the relative side wall portion of Y direction, have double-wall structure, this structure possesses and is spaced from each other inwall 63 and the outer wall 64 that the space is provided with.
Heating arrangements 7 possesses the 1st and the 2nd planar heater 71,72 that is arranged on along the conveyance path by the 5 conveyance substrate G of roller conveying mechanism in the housing 6.
The the 1st and the 2nd planar heater 71,72 is arranged on the back side (lower surface) side and surface (upper surface) side of the substrate G of 5 conveyances of roller conveying mechanism in the mode near the substrate of 5 conveyances of roller conveying mechanism.Thus, can realize the slimming of housing 6.
The 1st planar heater 71 forms the rectangle of extending in the Y direction, is separately positioned between each conveyance roller 50, arranges a plurality of at directions X.Thus, can realize the further slimming of housing 6.The 1st planar heater 71 for example is supported in the relative side wall portion on the Y direction of housing 6 and installs.
The 2nd planar heater 72 forms the rectangle of extending in the Y direction, arranges a plurality of in the mode corresponding with the arrangement pitches of the 1st planar heater 71 at directions X.
The 2nd planar heater 72 is mounted and is bearing in upper wall portions in housing 6.The interval in the conveyance path of the 1st planar heater 71 and the substrate G by 5 conveyances of roller conveying mechanism equates with the interval in the conveyance path of the 2nd planar heater 72 and the substrate G by 5 conveyances of roller conveying mechanism.
In addition, for example upper wall portions and bottom wall portion at the directions X both ends of housing 6 are provided with exhausr port 67 respectively, and exhaust apparatus 68 is connected with exhausr port 67.And,, carry out exhaust in the housing 6 via exhausr port 67 by the action of exhaust apparatus 68.
On the other hand, for example upper wall portions and the bottom wall portion at the directions X central portion of housing 6 is provided with as the air entry 69 that carries out air-breathing suction mechanism in housing.By differently air entry 69 being arranged on the directions X central portion of housing 6 with exhausr port 67, can prevent the delay of the environmental gas in the housing 6 reliably, the heat that can make heating arrangements 7 thus diffusion in housing 6 effectively, and sublimate adhering in housing 6 that produce, that resist film is contained can prevent heat treated the time.
Then, describe the conveyance roller 50 that roller conveying mechanism 5 is had in detail.Fig. 4 is overall diagram (Fig. 4 (a)) and the partial enlarged drawing (Fig. 4 (b)) thereof that is installed in 1 conveyance roller 50 on the turning axle 51.
As shown in Figure 4,1 conveyance roller 50 is connected and constitutes at direction of principal axis by a plurality of (having 14 the in the drawings) roller part 52 that has specified length at direction of principal axis.Each roller part 52 forms tubular, is installed on the turning axle 51 in the mode that coats turning axle 51.
In addition, the outer circumferential surface section 53 of roller part 52 is formed by low materials of pyroconductivity such as resins (preferred PEEK), makes the heat of the substrate G by heating arrangements 7 heating be difficult to transmission.Turning axle 51 is formed by high strength such as aluminium, stainless steel, pottery and the lower material of pyroconductivity.
Shown in Fig. 4 (a), on turning axle 51, be connected with the conveyance roller 50 of a plurality of roller parts 52, only roller part 52A is fixing to turning axle 51 on the 50a of one end, and 52 of other roller parts are connected and fixed adjacent roller part 52.And the other end 50b of conveyance roller 50 is fastened on the adjacent roller part 52, and is unfixing to turning axle 51.
By above-mentioned formation, in heat treated unit (HT) 28, conveyance roller 50 is heated and when producing thermal expansion, the other end 50b side that never is fixed on the conveyance roller 50 on the turning axle 51 is extended on direction of principal axis.And, when thermal shrinkage takes place when returning to normal temperature, shrink from the other end 50b side of the conveyance roller 50 of elongation, can return to original state.
Therefore, even make conveyance roller 50 be heated and cool off and expand flexiblely, do not produce the bending of outer circumferential surface section or the gap in roller part 52 seam each other etc. yet.
In addition, in Fig. 4 (b), an end 54 of each roller part 52 forms the pin thread shape, and the other end 55 forms the female screw shape, and each roller part 52 interconnects by screw threads for fastening and adjacent roller part 52.Under the situation that connects roller part 52,, screw in the end 54 of the roller part 52 that appends connection in the direction opposite with the sense of rotation of turning axle 51 to being installed in the end 55 of the roller part 52 on the turning axle 51 earlier.Thus, in the time of can driving in the rotation of conveyance roller 50, make roller part 52 connection each other not lax.
And, on conveyance roller 50, at the axial length dimension of the part that forms concaveconvex shape on the outer peripheral face for forming more than the width of the effective coverage of resist film in coating on the glass substrate G.Thus, can make the thermal capacity that offers resist film (effective coverage) from 1 conveyance roller 50 not have difference about equally.
Then, use Fig. 5 that roller part 52 is described.Fig. 5 is the partial sectional view of roller part 52.As shown in Figure 5, the outer peripheral face 53 of roller part 52 forms in direction of principal axis consecutive regularly concavo-convex (corrugated).The axial protuberance top 56 of outer peripheral face 53 is the parts that contact with glass substrate G, and its shape is made radius of curvature R and is preferably the following pinnacle of 3mm, roughly puts with glass substrate G to contact.
And, about the shape of recess 57, be not limited to shape (radius of curvature R is the following paddy shape of 3mm) illustrated and the convex form symmetry, also can be the smooth paddy shape of paddy shape or base that does not have the acute angle of top curved surface.
In addition, on the outer peripheral face 53 of conveyance roller 50,56 form at least (preferred 4mm) more than the 2mm, below the 8mm, form at least more than the 1mm on the consecutive protuberance of direction of principal axis top with respect to the depth dimensions L2 of the recess 57 on protuberance top 56 apart from size L1.
As mentioned above, approaching by the contact site to substrate G (protuberance top 56) and the noncontact portion (recess 57) that make above-mentioned conveyance roller 50, amount of heat transfer even (difference of the amount of heat transfer of contact site and noncontact portion is reduced) can be made, the transfer printing spot can be eliminated from conveyance roller 50 to substrate G.
And, on a plurality of conveyance rollers 50 that constitute as mentioned above, what form on its outer peripheral face can be identical in 50 concavo-convex positions of adjacent conveyance roller at the consecutive concaveconvex shape of direction of principal axis, but represent as schematically shown in Figure 6 that preferably interconnected one-tenth is in adjacent 50 concavo-convex positions of conveyance roller difference.
By above-mentioned such conveyance roller 50 that disposes, can disperse the track of the contact site of 50 couples of substrate G of conveyance roller, prevent the generation of transfer printing spot.
In the heat treated unit (HT) 28 that constitutes in the above described manner, substrate G in the transport mechanism conveyance of drying under reduced pressure unit (DP) 27 sides (being developing cell (DEV) 30 sides in heat treated unit (HT) 31), when when moving into mouthfuls 61, be transmitted to roller conveying mechanism 5, on one side utilize this roller conveying mechanism 5 to carry out conveyance, utilize and by heating controller (not shown) carry out temperature controlled 1st and 2nd planar heater 71,72 housing 6 in heat on one side.
At this, the conveyance roller 50 of conveyance glass substrate G in heat treated, as mentioned above, its outer peripheral face 53 forms in direction of principal axis consecutive regularly concavo-convex (corrugated), it is the following pinnacle of 3mm that the shape on protuberance top 56 is made radius of curvature R, forms with glass substrate G point to contact.Therefore, in conveyance, the heat that conveyance roller 50 has does not pass to glass substrate G by contact portion.
In addition, in the concaveconvex shape of outer peripheral face 53, being at least more than the 2mm apart from size L1 of 56 on protuberance top (be preferably 4mm), below the 8mm, and the depth dimensions L2 of recess 57 is at least 1mm above (being preferably more than the 2mm).Thus, the contact site and the noncontact portion to substrate G of conveyance roller 50 are close, and become evenly (difference of amount of heat transfer reduces) to the amount of heat transfer that substrate G transmits from conveyance roller 50, can suppress the generation of transfer printing spot.
Utilize the substrate G of roller conveying mechanism 5 conveyances, when when taking out of mouthfuls 62, be sent on the transport mechanism of cooling unit (COL) 29 sides (in heat treated unit (HT) 31 for cooling unit (COL) 32 sides), the transport mechanism by flat flow carries out conveyance.
Embodiment according to the invention described above, the outer peripheral face 53 of conveyance roller 50 is formed at the consecutive regularly concaveconvex shape of direction of principal axis, by it is contacted with glass substrate G point, the heat that the conveyance roller is had passes to substrate by contact portion or heat transmission is disperseed.
Especially by being set at least apart from size L1 of 56 on protuberance top (is preferably 4mm) more than the 2mm, below the 8mm, the depth dimensions L2 of recess 57 is set at least (is preferably more than the 2mm) more than the 1mm, thus, contact site and the noncontact portion of 50 couples of substrate G of conveyance roller are close, make from conveyance roller 50 to become evenly (difference of amount of heat transfer is reduced), eliminate the transfer printing spot to the amount of heat transfer that substrate G transmits.
In addition, in the above-described embodiment, base board delivery device of the present invention is applied to heat treated unit (HT), but is not limited to heating arrangement, also can be applicable to the cooling device of cooling unit (COL) 25,29,32 etc.
That is, even from the conveyance roller when the substrate G that utilizes after cooling unit (COL) cools off heat treated to the amount of heat transfer that substrate G transmits, can carry out cooling processing in the mode that does not produce temperature difference.
[embodiment]
Then, according to embodiment base board delivery device of the present invention is further specified.In the present embodiment, use actual the experimentizing in heat treated unit of the structure shown in the above-mentioned embodiment, verified its effect thus.
In experiment, shown in Fig. 8 (a), same with above-mentioned embodiment, the outer peripheral face of roller part forms at the consecutive concaveconvex shape of direction of principal axis, the protuberance top has the radius of curvature R of regulation, use such roller part to carry out the conveyance of glass substrate, the state (the transfer printing spot that has or not the conveyance roller to cause) of the resist film after the observation heat treated.As the condition of heat treated, conveyance speed is 44mm/sec, and thermal pretreatment is carried out 45sec under 160 ℃, cures processing and carry out 90sec under 110 ℃, and hot blast temperature is set at 115 ℃.
A plurality of conditions among the embodiment and estimate and have or not the result of transfer printing spot as shown in table 1 under this condition.Wherein, the no spot of the expression of zero in the evaluation result, △ represents not have substantially spot, * expression has spot.
[table 1]
| Protuberance top R | L1 between the protuberance top | Recess depths L2 | The transfer printing spot | |
| Condition 1 | ??5mm | ??4mm | ??4mm | ??× |
| |
??4mm | ??4mm | ??4mm | ??△ |
| Condition 3 | ??3mm | ??4mm | ??4mm | ??○ |
| |
??0.5mm | ??4mm | ??4mm | ??○ |
| |
??0.5mm | ??4mm | ??2mm | ??○ |
| Condition 6 | ??0.5mm | ??2mm | ??2mm | ??○ |
| Condition 7 | ??0.5mm | ??1mm | ??2mm | ??△ |
| Condition 8 | ??0.5mm | ??2mm | ??1mm | ??○ |
| Condition 9 | ??0.5mm | ??2mm | ??0.5mm | ??△ |
Experimental result shown in the result of condition 1～condition 4, under the radius of curvature R on protuberance top is situation below the 3mm, can obtain confirming the good result of transfer printing spot.This is considered to, and when the radius of curvature R on protuberance top is 4mm when above, the protuberance top is the line contact with contacting of real estate, and the discontiguous part in protuberance top between, the rate of drying of resist liquid is exerted an influence, produce the transfer printing spot.
In addition, shown in the result of condition 3～condition 9, being at least more than the 2mm apart from size L1 between the protuberance top (is preferably 4mm), is at least 1mm when above at recess depths size L2, the result that can obtain.
And, about between the protuberance top apart from size L1, can think, when too near the time, near line contact, when becoming big at interval, become inhomogeneous to the amount of heat transfer of substrate transmission from the conveyance roller.In addition, can think, too with respect to the concave depth size L2 on protuberance top.
According to the above, confirmed that being at least more than the 2mm apart from size L1 between the protuberance top (is preferably 4mm), recess depths size L2 is at least under the above situation of 1mm, can suppress the transfer printing spot.
[comparative example]
As a comparative example, the roller part that the protuberance top of the roller outer peripheral face of use shown in Fig. 8 (b), Fig. 8 (c) has smooth Rack size carries out heat treated under heat treated condition same as the previously described embodiments, observes to have or not the transfer printing spot.
Condition of comparative example (condition 9,10) and evaluation have or not the table 2 that the results are shown in of transfer printing spot under this condition.And, the no spot of zero expression of the evaluation result of table 2, △ represents not have substantially spot, * expression has spot.
[table 2]
| Protuberance top width L3 | L1 between the protuberance top | Recess depths L2 | The transfer printing spot | |
| Condition 9 (Fig. 7 (b) shape) | ??5mm | ??5mm | ??3mm | ??× |
| Condition 10 (Fig. 7 (b) shape) | ??10mm | ??30mm | ??3mm | ??× |
Shown in the table 2, the width L3 on the protuberance top that contacts with glass substrate is 5mm (condition 9) or 10mm (condition 10), particularly, as as condition 10, have than between the bigger protuberance of width L3 apart from the roller part of L1, can confirm between to the contact site of glass substrate and noncontact portion, to produce significant transfer printing spot.
According to the result of above embodiment, confirmed to utilize base board delivery device of the present invention can suppress to apply uneven generation widely.
Claims (7)
1. base board delivery device to being coated with treating fluid, being implemented heat treated processed substrate and carrying out conveyance, is characterized in that, comprising:
The conveyance roller, in the Width extension of described processed substrate, and the quilt axle supports and can separate the predetermined distance laying in the substrate transferring direction in the rotation of substrate transferring direction;
Turning axle carries out the axle supporting to described conveyance roller; With
Driver element is rotated driving to described turning axle,
The outer peripheral face of described conveyance roller forms at the consecutive concaveconvex shape of direction of principal axis,
It is the following pinnacle of 3mm that radius-of-curvature is made on axial protuberance top on the described outer peripheral face.
2. base board delivery device as claimed in claim 1 is characterized in that:
On the outer peripheral face that is formed concaveconvex shape of described conveyance roller, being at least more than the 2mm apart from size between the consecutive protuberance of direction of principal axis top is at least more than the 1mm with respect to the concave depth size on described protuberance top.
3. base board delivery device as claimed in claim 1 is characterized in that:
Described conveyance roller, a plurality of tubular roller parts that have specified length at direction of principal axis are installed on the described turning axle, and each roller part is connected with adjacent roller part,
The roller part of one end of described conveyance roller is fixed described turning axle, and other roller part is only fixed the adjacent roller part that is connected.
4. base board delivery device as claimed in claim 3 is characterized in that:
Described roller part, the one end forms the pin thread shape, and the other end forms the female screw shape, and described roller part interconnects by screw threads for fastening and adjacent roller part respectively.
5. base board delivery device as claimed in claim 4 is characterized in that:
In described conveyance roller, a plurality of roller parts that are connected with a described roller part on being fixed on described turning axle, respectively by in the direction rotation opposite with the sense of rotation of described turning axle and with adjacent roller part screw threads for fastening.
6. as each described base board delivery device in the claim 1～5, it is characterized in that:
In described conveyance roller, the axial length dimension that is formed with the part of concaveconvex shape on the outer peripheral face is at least more than the width of the effective coverage that is coated with treating fluid on the described processed substrate.
7. as each described base board delivery device in the claim 1～5, it is characterized in that:
Separate in a plurality of conveyance rollers that predetermined distance lays in described substrate transferring direction, on its outer peripheral face, form at the consecutive concaveconvex shape of direction of principal axis by interconnected, make concavo-convex position difference between adjacent conveyance roller.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008220769 | 2008-08-29 | ||
| JP2008220769A JP4675401B2 (en) | 2008-08-29 | 2008-08-29 | Substrate transfer device |
| JP2008-220769 | 2008-08-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101661222A true CN101661222A (en) | 2010-03-03 |
| CN101661222B CN101661222B (en) | 2012-05-30 |
Family
ID=41789315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101715301A Expired - Fee Related CN101661222B (en) | 2008-08-29 | 2009-08-28 | Substrate conveying device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4675401B2 (en) |
| KR (1) | KR20100026985A (en) |
| CN (1) | CN101661222B (en) |
| TW (1) | TWI387554B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103329257A (en) * | 2011-04-15 | 2013-09-25 | 株式会社爱发科 | Conveyance mechanism for article being processed |
| CN103842273A (en) * | 2011-10-05 | 2014-06-04 | 三益精工株式会社 | High load and high precision polygonal guide, and picker actuator using same |
| CN106395380A (en) * | 2016-10-31 | 2017-02-15 | 深圳市凯盛科技工程有限公司 | Tooth-shaped roller bed for conveying ultrathin glass substrates |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202017102678U1 (en) * | 2016-12-08 | 2017-05-26 | RENA Technologies GmbH | Transport roller, transport device and substrate treatment plant |
| CN117162358B (en) * | 2023-11-02 | 2024-03-01 | 中电科风华信息装备股份有限公司 | Full-automatic feeding and discharging bubble removing machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3954229B2 (en) * | 1999-01-28 | 2007-08-08 | 富士フイルム株式会社 | Heating device |
| JP4217339B2 (en) * | 1999-03-30 | 2009-01-28 | 芝浦メカトロニクス株式会社 | Substrate transfer device and processing device |
| JP2002274642A (en) * | 2001-03-16 | 2002-09-25 | Sumitomo Precision Prod Co Ltd | Substrate processor |
| JP3960087B2 (en) * | 2001-05-30 | 2007-08-15 | 東京エレクトロン株式会社 | Transport device |
| JP3742604B2 (en) * | 2002-05-14 | 2006-02-08 | 伸一 真木 | Transport unit |
| JP4014210B2 (en) * | 2003-03-19 | 2007-11-28 | 東京エレクトロン株式会社 | Substrate processing equipment |
| JP3949065B2 (en) * | 2003-02-10 | 2007-07-25 | 東京応化工業株式会社 | Inline processing equipment |
| JP2004262626A (en) * | 2003-03-03 | 2004-09-24 | Sharp Corp | Transfer roller element, transferring device, and cleaning facility |
| JP2004299850A (en) * | 2003-03-31 | 2004-10-28 | Dainippon Printing Co Ltd | Processing method and processing device |
| JP2006196783A (en) * | 2005-01-14 | 2006-07-27 | Sharp Corp | Substrate surface processing apparatus |
| JP4918770B2 (en) * | 2005-09-22 | 2012-04-18 | 旭硝子株式会社 | Plate material processing apparatus and plate material manufacturing method |
| JP2007088289A (en) * | 2005-09-22 | 2007-04-05 | Sharp Corp | Device and method for processing substrate |
| JP4537324B2 (en) * | 2006-01-24 | 2010-09-01 | 東京エレクトロン株式会社 | Substrate cooling device, substrate cooling method, control program, computer-readable storage medium |
| JP4537323B2 (en) * | 2006-01-24 | 2010-09-01 | 東京エレクトロン株式会社 | Substrate cooling device |
| JP4987352B2 (en) * | 2006-05-17 | 2012-07-25 | ゲットナー・ファンデーション・エルエルシー | Substrate transfer device |
| JP2008285243A (en) * | 2007-05-15 | 2008-11-27 | Shimada Phys & Chem Ind Co Ltd | Substrate conveying roller and substrate cleaning device equipped therewith |
-
2008
- 2008-08-29 JP JP2008220769A patent/JP4675401B2/en not_active Expired - Fee Related
-
2009
- 2009-08-07 KR KR1020090072703A patent/KR20100026985A/en active IP Right Grant
- 2009-08-18 TW TW098127726A patent/TWI387554B/en not_active IP Right Cessation
- 2009-08-28 CN CN2009101715301A patent/CN101661222B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103329257A (en) * | 2011-04-15 | 2013-09-25 | 株式会社爱发科 | Conveyance mechanism for article being processed |
| CN103329257B (en) * | 2011-04-15 | 2016-11-09 | 株式会社爱发科 | It is of target objects by conveyer |
| CN103842273A (en) * | 2011-10-05 | 2014-06-04 | 三益精工株式会社 | High load and high precision polygonal guide, and picker actuator using same |
| CN103842273B (en) * | 2011-10-05 | 2016-01-13 | 三益精工株式会社 | High heavy burden high precision polygon guiding device and utilize its pickup actuator |
| CN106395380A (en) * | 2016-10-31 | 2017-02-15 | 深圳市凯盛科技工程有限公司 | Tooth-shaped roller bed for conveying ultrathin glass substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20100026985A (en) | 2010-03-10 |
| TWI387554B (en) | 2013-03-01 |
| JP4675401B2 (en) | 2011-04-20 |
| CN101661222B (en) | 2012-05-30 |
| JP2010056359A (en) | 2010-03-11 |
| TW201014770A (en) | 2010-04-16 |
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