CN101640233B - 用磁控溅射法生产CdS/CdTe太阳能电池的装置 - Google Patents
用磁控溅射法生产CdS/CdTe太阳能电池的装置 Download PDFInfo
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- CN101640233B CN101640233B CN200910164225XA CN200910164225A CN101640233B CN 101640233 B CN101640233 B CN 101640233B CN 200910164225X A CN200910164225X A CN 200910164225XA CN 200910164225 A CN200910164225 A CN 200910164225A CN 101640233 B CN101640233 B CN 101640233B
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CN200910164225XA CN101640233B (zh) | 2009-08-21 | 2009-08-21 | 用磁控溅射法生产CdS/CdTe太阳能电池的装置 |
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CN200910164225XA CN101640233B (zh) | 2009-08-21 | 2009-08-21 | 用磁控溅射法生产CdS/CdTe太阳能电池的装置 |
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CN101640233A CN101640233A (zh) | 2010-02-03 |
CN101640233B true CN101640233B (zh) | 2011-11-30 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102199752B (zh) * | 2010-03-22 | 2013-02-20 | 昆明物理研究所 | 非晶态碲化镉薄膜的磁控溅射生长法 |
US20120024695A1 (en) * | 2011-03-14 | 2012-02-02 | Primestar Solar, Inc. | Systems and methods for high-rate deposition of thin film layers on photovoltaic module substrates |
CN102903787A (zh) * | 2011-07-29 | 2013-01-30 | 刘莹 | 一种制备肖特基结单面电极太阳能电池铝背电极的设备 |
CN103268906B (zh) * | 2013-05-22 | 2016-06-01 | 中国科学技术大学 | 硫化镉薄膜及具有硫化镉薄膜的太阳能电池的制备方法 |
CN109182970A (zh) * | 2018-10-22 | 2019-01-11 | 哈尔滨工业大学 | 一种热氧化铝氮共掺碲化锌薄膜制备p-型氧化锌的方法 |
CN111676452A (zh) * | 2020-06-29 | 2020-09-18 | 哈尔滨奥瑞德光电技术有限公司 | 一种高效镀超硬膜的方法 |
CN114005905B (zh) * | 2021-10-22 | 2023-10-17 | 成都中建材光电材料有限公司 | 一种碲化镉太阳能电池的连续生产装备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5536333A (en) * | 1992-05-12 | 1996-07-16 | Solar Cells, Inc. | Process for making photovoltaic devices and resultant product |
CN101116190A (zh) * | 2005-02-08 | 2008-01-30 | 太阳能系统及设备有限公司 | 用于不使用CdCl2大规模生产CdTe/CdS薄膜太阳能电池的方法 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5536333A (en) * | 1992-05-12 | 1996-07-16 | Solar Cells, Inc. | Process for making photovoltaic devices and resultant product |
CN101116190A (zh) * | 2005-02-08 | 2008-01-30 | 太阳能系统及设备有限公司 | 用于不使用CdCl2大规模生产CdTe/CdS薄膜太阳能电池的方法 |
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Owner name: CHENGDU SINO PHOTONICS APOLLO SOLAR ENERGY CO., LT Free format text: FORMER OWNER: SICHUAN APOLLO SOLAR SCIENCE + TECHNOLOGY CO., LTD Effective date: 20100409 |
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Address after: 610207, No. three, No. 485, Tengfei Economic Development Zone, Shuangliu County Southwest Airlines, Chengdu, Sichuan Patentee after: CNBM (CHENGDU) OPTOELECTRONIC MATERIAL CO., LTD. Address before: 610207, No. three, No. 485, Tengfei Economic Development Zone, Shuangliu County Southwest Airlines, Chengdu, Sichuan Patentee before: Chengdu COE Apollo Solar Co., Ltd. |