CN101630719B - 一种阻变存储器及其制备方法 - Google Patents
一种阻变存储器及其制备方法 Download PDFInfo
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- CN101630719B CN101630719B CN2009100896121A CN200910089612A CN101630719B CN 101630719 B CN101630719 B CN 101630719B CN 2009100896121 A CN2009100896121 A CN 2009100896121A CN 200910089612 A CN200910089612 A CN 200910089612A CN 101630719 B CN101630719 B CN 101630719B
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- parylene
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- 229920000052 poly(p-xylylene) Polymers 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000002052 molecular layer Substances 0.000 claims abstract description 18
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 13
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 13
- 238000002360 preparation method Methods 0.000 claims abstract description 12
- 229920000642 polymer Polymers 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 10
- 229920006254 polymer film Polymers 0.000 claims description 23
- 239000010410 layer Substances 0.000 claims description 22
- 238000001259 photo etching Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical group ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- 229910015621 MoO Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 2
- 238000011049 filling Methods 0.000 claims description 2
- 239000011229 interlayer Substances 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 12
- 239000002904 solvent Substances 0.000 abstract description 5
- 238000000206 photolithography Methods 0.000 abstract description 4
- 239000006227 byproduct Substances 0.000 abstract description 2
- 229920005597 polymer membrane Polymers 0.000 abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002082 metal nanoparticle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
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- 239000011232 storage material Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
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CN2009100896121A CN101630719B (zh) | 2009-07-24 | 2009-07-24 | 一种阻变存储器及其制备方法 |
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CN2009100896121A CN101630719B (zh) | 2009-07-24 | 2009-07-24 | 一种阻变存储器及其制备方法 |
Publications (2)
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CN101630719A CN101630719A (zh) | 2010-01-20 |
CN101630719B true CN101630719B (zh) | 2011-01-26 |
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CN2009100896121A Expired - Fee Related CN101630719B (zh) | 2009-07-24 | 2009-07-24 | 一种阻变存储器及其制备方法 |
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Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102222512B (zh) * | 2010-04-13 | 2014-01-08 | 北京大学 | 一种柔性有机阻变存储器及其制备方法 |
CN101944569A (zh) * | 2010-08-06 | 2011-01-12 | 北京大学 | 一种利用mim电容结构制备非挥发性存储器的方法 |
CN102487123B (zh) * | 2010-12-06 | 2013-11-06 | 中国科学院微电子研究所 | 一种纳米尺度非挥发性阻变存储器单元及其制备方法 |
CN102306705A (zh) | 2011-09-16 | 2012-01-04 | 北京大学 | 一种大容量多值阻变存储器 |
CN102593359B (zh) * | 2012-03-13 | 2014-05-07 | 福州大学 | 一种多功能集成的有机阻变存储装置及其制备方法 |
CN102593142B (zh) * | 2012-03-15 | 2014-08-13 | 北京大学 | 一种防串扰的柔性透明存储阵列及其制备方法 |
CN102569337B (zh) * | 2012-03-15 | 2014-11-05 | 北京大学 | 一种防串扰的柔性透明存储阵列及其制备方法 |
CN102610755B (zh) * | 2012-03-26 | 2014-03-26 | 北京大学 | 一种超低功耗有机阻变存储器件及其制备方法 |
CN103258957B (zh) | 2013-05-13 | 2016-05-25 | 北京大学 | 一种有机阻变存储器及制备方法 |
CN103258958B (zh) * | 2013-05-13 | 2015-09-23 | 北京大学 | 有机阻变存储器及其制备方法 |
CN103887431B (zh) * | 2014-02-11 | 2017-01-04 | 北京大学 | 一种多值非易失性有机阻变存储器及制备方法 |
CN112510148B (zh) * | 2020-12-08 | 2023-03-17 | 扬州大学 | 一种阻变存储器及其制备方法 |
CN113421963A (zh) * | 2021-06-10 | 2021-09-21 | 北京大学 | 一种低功耗三维阻变存储器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1150596C (zh) * | 1999-03-12 | 2004-05-19 | 加利福尼亚技术学院 | 形成聚对二甲苯mems的方法和器件 |
US7482687B2 (en) * | 2000-08-31 | 2009-01-27 | Micron Technology, Inc. | Etch stop in a damascene interconnect structure |
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- 2009-07-24 CN CN2009100896121A patent/CN101630719B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1150596C (zh) * | 1999-03-12 | 2004-05-19 | 加利福尼亚技术学院 | 形成聚对二甲苯mems的方法和器件 |
US7482687B2 (en) * | 2000-08-31 | 2009-01-27 | Micron Technology, Inc. | Etch stop in a damascene interconnect structure |
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CN101630719A (zh) | 2010-01-20 |
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Inventor after: Huang Ru Inventor after: Kuang Yongbian Inventor after: Tang Yu Inventor after: Zhang Lijie Inventor before: Kuang Yongbian Inventor before: Huang Ru Inventor before: Tang Yu Inventor before: Zhang Lijie |
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