CN101618848A - Torsion-type MEMS element - Google Patents
Torsion-type MEMS element Download PDFInfo
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- CN101618848A CN101618848A CN200810128291A CN200810128291A CN101618848A CN 101618848 A CN101618848 A CN 101618848A CN 200810128291 A CN200810128291 A CN 200810128291A CN 200810128291 A CN200810128291 A CN 200810128291A CN 101618848 A CN101618848 A CN 101618848A
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- 238000000034 method Methods 0.000 claims description 21
- 230000004308 accommodation Effects 0.000 claims description 9
- 239000000047 product Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 7
- 239000010931 gold Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
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- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The invention discloses a torsion-type MEMS element comprising a supporting structure, a flat plate body and at least two torsion shafts for connecting the flat plate body and the supporting structure; wherein, the flat plate body comprises an active zone and a non-active zone; the non-active zone is provided with a plurality of sacrificed pieces; if the resonant frequency of the torsion-type MEMS element is lower than the standard resonant frequency needed by a product, parts of the sacrificed pieces can be removed to reduce the quality of the torsion-type MEMS element and improve the resonant frequency thereof.
Description
Technical field
The present invention relates to a kind of torsion-type MEMS element, particularly a kind of torsion-type MEMS element of adjusting resonant frequency.
Background technology
In recent years, the downsizing that mainly develops into various mechanical organs (miniaturization) in micro electronmechanical (MEMS) field, utilize the technology of integrated circuit to make microcomputer electric component, typical microcomputer electric component has little gear, little lever or little valve, often cooperate relevant control circuit to operate in running, for example acceleration sensor (accelerometer), pressure and chemical sensor (pressure and chemicalsensors) and actuator (actuator) etc.
Micro electronmechanical product often is material with silicon, see through the multiple tracks semiconductor technology and the silicon material is processed as specific frame for movement uses, for example, torsion-type MEMS element just often with torsional axis (hinge) as actuating structure.Yet, the geometry of torsional axis is for influencing the resonant frequency (resonantfrequency of torsion-type MEMS element, RF) one of principal element, simultaneously, resonant frequency also is the most normal parameter that influences the product dynamic operation in this type of torsion-type MEMS element design, therefore, and when making torsion-type MEMS element, need to see through different processes, make or adjust the torsional axis that meets the resonant frequency area requirement.Be anticipated that, comparatively meticulous when harsh when the resonant frequency area requirement of product specification, see through the geometry that existing gold-tinted technology or etch process decide torsional axis merely and be not easy; Therefore, the special adjustable torsion-type MEMS element of a kind of resonant frequency that proposes of inventor, improve the restriction of existing torsion-type MEMS element technology, and after the torsion-type MEMS element manufacturing process is finished, the further action that the resonant frequency of torsion-type MEMS element is adjusted is to meet the requirement of product resonant frequency scope.
Summary of the invention
Based on the demand, the object of the present invention is to provide a kind of torsion-type MEMS element and adjust the method for this resonant frequency of torsional micro electro-mechanical component, to satisfy the demand that the high standard product is provided.
For reaching above-mentioned purpose, the invention provides a kind of torsion-type MEMS element, it comprises supporting structure, dull and stereotyped main body and at least two torsional axis, wherein this supporting structure have spatial accommodation in order to ccontaining should the flat board main body, and should the flat board main body be by being connected with this supporting structure along these torsional axis of arranging by the first direction at this flat board main quality center, in addition, this flat board main body comprises active area and non-active area, and should the flat board main body comprises a plurality of sacrifice spares (sacrificialelement) that can be used for adjusting resonant frequency in addition and be located at this non-active area.
Simultaneously, the present invention provides a kind of method of adjusting resonant frequency of torsional micro electro-mechanical component in addition.At first, torsion-type MEMS element is provided, it comprises supporting structure, dull and stereotyped main body, and at least two torsional axis connect this flat board main body and this supporting structure, this flat board main body comprises active area and non-active area, and this non-active area is provided with a plurality of sacrifice spares, then this torsion-type MEMS element being carried out resonant frequency detects, to know the actual resonance frequency of this torsion-type MEMS element, and this actual resonance frequency and the standard resonant frequency of this torsion-type MEMS element compared, when if this actual resonance frequency of this torsion-type MEMS element is lower than this standard resonant frequency, then remove at least one sacrifice spare, reduce the quality of this torsion-type MEMS element, to adjust this actual resonance frequency extremely near this standard resonant frequency.
Description of drawings
Fig. 1 to Fig. 2 is the structural representation according to the torsion-type MEMS element that the preferred embodiments of the present invention illustrated.
Fig. 3 is the schematic flow sheet according to the method for the adjustment resonant frequency of torsional micro electro-mechanical component that the preferred embodiments of the present invention illustrated.
Fig. 4 is removed the back structural representation for illustrating torsion-type MEMS element of the present invention top sacrifice part.
Fig. 5 and Fig. 6 are the structural representation according to the torsion-type MEMS element that another preferred embodiment of the present invention illustrated.
Description of reference numerals
10 torsion-type MEMS elements, 12 dull and stereotyped main bodys
14 torsional axis, 16 supporting structures
18 spatial accommodations, 20 active area
22 non-active area 24 are sacrificed part
241 sacrifice mass 242 connecting rods
26 minute surfaces, 30 torsion-type MEMS elements
32 dull and stereotyped main body 34 torsional axis
36 supporting structures, 38 spatial accommodations
40 active area, 42 non-active area
44 sacrifice part 441 sacrifices mass
442 connecting rods, 50 spaces
The specific embodiment
See also and followingly describe in detail bright and accompanying drawing, further to understand feature of the present invention and technology contents about of the present invention.Yet the accompanying drawing usefulness with aid illustration only for reference is limited the present invention.
Please refer to Fig. 1 to Fig. 2, Fig. 1 to Fig. 2 is the structural representation according to the torsion-type MEMS element that the preferred embodiments of the present invention illustrated.As shown in Figure 1, torsion-type MEMS element 10, it includes dull and stereotyped main body 12 and two torsional axis 14.The torsional axis 14 of torsion-type MEMS element 10 is that arrange by the first direction of the mass centre of dull and stereotyped main body 12 on the edge, connect dull and stereotyped main body 14 in supporting structure 16, and dull and stereotyped main body 12 is arranged in the spatial accommodation 18 of supporting structure 16, and dull and stereotyped main body 12 is to be that centre of twist axle (resonant axis) freely swings with torsional axis 14 in spatial accommodation 18.
The front definition of dull and stereotyped main body 12 has active area 20 and non-active area 22, in this preferred embodiment, non-active area 22 is arranged at the periphery of active area 20, can utilize metal deposition process to deposit in active area 22 as the reflecting layer of titanium/gold (Ti/Au), copper/gold (Cu/Au) or aluminium materials such as (Al) uses as the minute surface shown in this preferred embodiment 26, so not as limit, also various device or element can be set on the active area 22, look the specification demand of product, install other micro electronmechanical moving part or electronic circuit systems.Please in the lump with reference to figure 1 and Fig. 2, dull and stereotyped main body 12 includes a plurality of sacrifice spares 24 in addition and is located at non-active area 22, each is sacrificed part 24 and comprises sacrifice mass (sacrificial mass) 241 and at least one connecting rod 242, in this preferred embodiment, sacrificing mass 241 is to be fixed on dull and stereotyped main body 12 by four connecting rods 242, be noted that at this, the function of connecting rod 242 be fixing sacrifice mass 241 to dull and stereotyped main body 12 in principle the design of connecting rod 242 be firmly to be fixed on dull and stereotyped main body 12 and to reverse Shi Buhui in dull and stereotyped main body 12 and cause extra moment with sacrificing mass 241, and avoid sacrificing mass 241 produces resonance separately when dull and stereotyped main body 12 is reversed phenomenon, therefore, when making torsion-type MEMS element of the present invention 10, the visual product demand of the quantity of connecting rod 242 and adjusting, the diagram that is not subject to this preferred embodiment limits.
Please refer to Fig. 3, Fig. 3 is the schematic flow sheet according to the method for the adjustment resonant frequency of torsional micro electro-mechanical component that the preferred embodiments of the present invention illustrated, and is to implement after these manufacturing steps of torsion-type MEMS element of the present invention finish.The method of this adjustment resonant frequency of torsional micro electro-mechanical component comprises following step.
Step 100: torsion-type MEMS element is provided.This torsion-type MEMS comprises supporting structure, dull and stereotyped main body, and at least two torsional axis connect this flat board main body and this supporting structure, and this flat board main body comprises active area and non-active area, and this non-active area is provided with a plurality of sacrifice spares;
Step 102: this torsion-type MEMS element is carried out resonant frequency detect.Carrying out resonant frequency when detecting, driving force need be provided, make this torsion-type MEMS element be subjected to this driving force to order about and resonate, to know the actual resonance frequency of this torsional axis;
Step 104: this actual resonance frequency and the standard resonant frequency of comparing this torsion-type MEMS element, and whether this standard resonant frequency will be decided according to the product of this torsion-type MEMS element desire application, meet in the scope of this required standard resonant frequency of product to confirm this actual resonance frequency; After comparison,, when for example the actual resonance frequency of this microcomputer electric component is lower than this standard resonant frequency, then carry out step 106 if this actual resonance frequency of this microcomputer electric component drops on outside the scope of this standard resonant frequency; After comparison,, then carry out step 108 if the resonant frequency of this microcomputer electric component drops in the scope of this standard resonant frequency;
Step 106: remove at least one sacrifice spare 24 of being located on this flat board main body, to adjust this actual resonance frequency extremely near this standard resonant frequency.As shown in Figure 4, can utilize laser beam fusing to sacrifice the connecting rod 242 of part 24, or utilize small-bore air gun to blow disconnection extension bar 242, or with instrument contact sacrifice part 24, so that interrupt connecting rod 242 with stress, make that sacrificing mass 241 breaks away from from the non-active area 22 of torsion-type MEMS element 10, be provided with these originally and be removed the places of sacrificing part 241 and then stay and be space 50, make the total quality of torsion-type MEMS element 10 reduce, to improve its actual resonance frequency;
Step 108: this microcomputer electric component that will meet product standard is delivered to other follow-up processing steps, for example encapsulates or the combination of elements relevant with other, to be made into operational electronic product.
In said method, the driving force that drives this torsion-type MEMS element can comprise modes such as electromagnetic force, electrostatic force, hot driving force or piezoelectricity, and torsion-type MEMS element of the present invention can cooperate relevant component arrangement, resonates in response to different driving power source.For instance, if torsion-type MEMS element of the present invention is to utilize electromagnetic force to drive, when making this torsion-type MEMS element, can be with the back side of this torsion-type MEMS element, after the structure fabrication for the treatment of this torsion-type MEMS element is finished, the below that the external electromagnetic coil or the magnet of a correspondence is arranged on this torsion-type MEMS element in addition, to provide this torsion-type MEMS element resonance required driving force, yet the installing of this external electromagnetic coil or magnet is not limited in the manufacturing process of this torsion-type MEMS element, also can after finishing the making step of this torsion-type MEMS element, add separately to this torsion-type MEMS element again.
Next please refer to Fig. 5 and Fig. 6, Fig. 5 and Fig. 6 are the structural representation according to the torsion-type MEMS element 30 that another preferred embodiment of the present invention illustrated.As Fig. 5 and shown in Figure 6, torsion-type MEMS element 30 comprises supporting structure 36, dull and stereotyped main body 32 and at least two torsional axis 34.The torsional axis 34 of torsion-type MEMS element 30 is that arrange by the first direction of the mass centre of dull and stereotyped main body 32 on the edge, and connect dull and stereotyped main body 32 in supporting structure 36, dull and stereotyped main body 32 is arranged in the spatial accommodation 38 of supporting structure 36, making dull and stereotyped main body 32 in spatial accommodation 38, is that centre of twist axle freely swings with torsional axis 34.In addition, the front definition of dull and stereotyped main body 36 has active area 40 and non-active area 42, and torsion-type MEMS element 30 has a plurality of sacrifice spares 44 and is located in the non-active area 42, wherein respectively sacrifice part 44 and comprise sacrifice mass 441 and at least one connecting rod 442 respectively, in this preferred embodiment, sacrificing mass 441 is to be fixed on the dull and stereotyped main body 36 by four connecting rods 442.Compare with last preferred embodiment, sacrifice spare in this preferred embodiment 44 is slightly change in appearance, the circle that is changed into this preferred embodiment by the rectangular sacrificial part 24 shown in the last preferred embodiment is sacrificed part 44, change on its external form does not influence its purposes, its purpose all is the quality that will be used to change torsion-type MEMS element of the present invention, and then adjusts its resonant frequency.In addition, position, connection relationship and the function of each element of the thin portion of this preferred embodiment are identical with last preferred embodiment, and relevant explanation please refer to the description of last preferred embodiment, just repeats no more at this.
In general, torsion-type MEMS element of the present invention can be by a series of semiconductor technology, for example photoetching process, etch process, CMP process, and see through the design of optical mask pattern, can utilize with photomask, these on the dull and stereotyped main body that defines torsion-type MEMS element of the present invention on the wafer simultaneously, torsional axis and dull and stereotyped main body are sacrificed part.If be used to make the wafer that torsion-type MEMS element of the present invention is a normal thickness, utilize technological design to realize, torsion-type MEMS element of the present invention below is emptied, the space that makes it can not be subjected to arrest limit and the FREE TORSION motion is arranged, and after producing a plurality of torsion-type MEMS elements on the same wafer, at this moment, each torsion-type MEMS element all can FREE TORSION move on the wafer, the resonant frequency that can carry out wafer scale detects, detect the resonant frequency of these torsion-type MEMS elements, adjust respectively according to other demand again, to meet the demand of product specification; Otherwise, as if the LED reverse mounting type that is that is used to make these torsion-type MEMS elements of the present invention, consider this structure material of LED reverse mounting type as torsion-type MEMS element, there is no enough spaces at the LED reverse mounting type thickness direction can empty, thereby may not have enough spaces the motion of this torsion-type MEMS element FREE TORSION is provided, then can test one by one again, to adjust each independently resonant frequency of torsion-type MEMS cutting apart these torsion-type MEMS elements for behind the element independently.
Hence one can see that, the invention provides the adjustable torsion-type MEMS element of a kind of resonant frequency, after comparing after tested, when if the resonant frequency of torsion-type MEMS element reality of the present invention is lower than the required standard resonant frequency of product specification, then consider position and symmetry that these sacrifice part, select the sacrifice spare of right quantity and position, utilize laser beam or additive method (sacrificing part in this) to make the connecting rod fracture as stress application, remove and will sacrifice mass to dull and stereotyped main body, reduce the quality of whole little torsion element, to improve its resonant frequency.Therefore, substandard torsion-type MEMS element can avoid scrapping a way, and improve its finished product rate after removing unnecessary sacrifice spare originally.Moreover the position that these sacrifice parts of the present invention is not limited to be located at the active area periphery shown in the aforementioned preferred embodiments, and its quantity, position, shape, size all can be adjusted according to circumstances, only otherwise the operation or the element that influence on the active area get final product; Shown in the preferred embodiments of the present invention, utilizing metal deposition process titanium deposition/gold, copper/gold or aluminium etc. to be used as micromirror as the material of reflection layer in the active area uses, so be not limited thereto, other mechanical moving part, sensing element or electronic circuit etc., the purposes of visual product and select required element to be located in the active area.
The above only is the preferred embodiments of the present invention, and all equivalent variations and modifications of doing according to claim of the present invention all should belong to covering scope of the present invention.
Claims (12)
1. torsion-type MEMS element comprises:
Supporting structure, it has spatial accommodation;
Dull and stereotyped main body is located in this spatial accommodation, and this flat board main body comprises active area and non-active area, and wherein this non-active area is provided with a plurality of sacrifice spares; And
At least two torsional axis connect this flat board main body to this supporting structure, and described torsional axis is arranged along the first direction that traverses this flat board main quality center.
2. torsion-type MEMS element as claimed in claim 1, wherein said sacrifice spare can remove from this non-active area of this flat board main body.
3. torsion-type MEMS element as claimed in claim 1, wherein respectively this sacrifice spare comprises and sacrifices mass and this sacrifice mass of at least one connection in the connecting rod of this flat board main body.
4. torsion-type MEMS element as claimed in claim 1, wherein this non-active area is located at the periphery of this active area.
5. torsion-type MEMS element as claimed in claim 1 wherein should the flat board main body comprise minute surface, was located at this active area.
6. method of adjusting resonant frequency of torsional micro electro-mechanical component comprises:
Torsion-type MEMS element is provided, and it comprises supporting structure, dull and stereotyped main body, and at least two torsional axis connect this flat board main body and this supporting structure, and this flat board main body comprises active area and non-active area, and this non-active area is provided with a plurality of sacrifice spares;
This torsion-type MEMS element is carried out resonant frequency detect, knowing the actual resonance frequency of this torsion-type MEMS element, and this actual resonance frequency and the standard resonant frequency of this torsion-type MEMS element are compared; And
When this actual resonance frequency of this torsion-type MEMS element is lower than this standard resonant frequency, then remove at least one sacrifice spare, reduce the quality of this torsion-type MEMS element, to adjust this actual resonance frequency extremely near this standard resonant frequency.
7. method as claimed in claim 6, wherein respectively this sacrifice spare comprises the connecting rod of sacrificing mass and this sacrifice mass of at least one connection and this flat board main body.
8. method as claimed in claim 7, the step that wherein removes this at least one sacrifice spare are to utilize laser beam this connecting rod that fuses so that should sacrifice mass from this torsion-type MEMS element should non-active area disengaging.
9. method as claimed in claim 7, the step that wherein removes this at least one sacrifice spare are that stress application is sacrificed part in this, so that this connecting rod ruptures and make this sacrifice mass break away from from this non-active area of this torsion-type MEMS element.
10. method as claimed in claim 6 wherein should the flat board main body be to be centre of twist axle and twisting vibration with described torsional axis.
11. method as claimed in claim 6, wherein this non-active area is located at the periphery of this active area.
12. method as claimed in claim 6 wherein should the flat board main body comprise minute surface, was located at this active area.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101282917A CN101618848B (en) | 2008-07-04 | 2008-07-04 | Torsion-type MEMS element |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008101282917A CN101618848B (en) | 2008-07-04 | 2008-07-04 | Torsion-type MEMS element |
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| CN101618848A true CN101618848A (en) | 2010-01-06 |
| CN101618848B CN101618848B (en) | 2012-04-11 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107055453A (en) * | 2013-05-31 | 2017-08-18 | 京瓷办公信息系统株式会社 | The manufacture method of light deflector |
| CN110501812A (en) * | 2019-09-05 | 2019-11-26 | 上海汽车集团股份有限公司 | A kind of MEMS scanning mirror |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7190854B1 (en) * | 2000-05-24 | 2007-03-13 | Active Optical Networks, Inc. | Methods for forming an array of MEMS optical elements |
| US6483962B1 (en) * | 2000-05-24 | 2002-11-19 | Vlad J. Novotny | Optical cross connect switching array system with optical feedback |
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2008
- 2008-07-04 CN CN2008101282917A patent/CN101618848B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107055453A (en) * | 2013-05-31 | 2017-08-18 | 京瓷办公信息系统株式会社 | The manufacture method of light deflector |
| CN110501812A (en) * | 2019-09-05 | 2019-11-26 | 上海汽车集团股份有限公司 | A kind of MEMS scanning mirror |
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| CN101618848B (en) | 2012-04-11 |
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