CN101589297B - 光谱仪 - Google Patents

光谱仪 Download PDF

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Publication number
CN101589297B
CN101589297B CN2008800029661A CN200880002966A CN101589297B CN 101589297 B CN101589297 B CN 101589297B CN 2008800029661 A CN2008800029661 A CN 2008800029661A CN 200880002966 A CN200880002966 A CN 200880002966A CN 101589297 B CN101589297 B CN 101589297B
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CN
China
Prior art keywords
sample
line focus
row
detecting device
data
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CN2008800029661A
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English (en)
Chinese (zh)
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CN101589297A (zh
Inventor
罗伯特·班尼特
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Renishaw PLC
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Renishaw PLC
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Publication of CN101589297A publication Critical patent/CN101589297A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Valve Device For Special Equipments (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Surgical Instruments (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
CN2008800029661A 2007-01-25 2008-01-25 光谱仪 Active CN101589297B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0701477.2A GB0701477D0 (en) 2007-01-25 2007-01-25 Spectroscopic apparatus and methods
GB0701477.2 2007-01-25
PCT/GB2008/000252 WO2008090350A1 (en) 2007-01-25 2008-01-25 Spectroscopic apparatus and methods

Publications (2)

Publication Number Publication Date
CN101589297A CN101589297A (zh) 2009-11-25
CN101589297B true CN101589297B (zh) 2011-06-29

Family

ID=37872808

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008800029661A Active CN101589297B (zh) 2007-01-25 2008-01-25 光谱仪

Country Status (7)

Country Link
EP (1) EP2106538B1 (https=)
JP (1) JP5443171B2 (https=)
CN (1) CN101589297B (https=)
AT (1) ATE467104T1 (https=)
DE (1) DE602008001157D1 (https=)
GB (1) GB0701477D0 (https=)
WO (1) WO2008090350A1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8179526B2 (en) 2007-01-25 2012-05-15 Renishaw Plc Spectroscopic apparatus with dispersive device for collecting sample data in synchronism with relative movement of a focus
GB0803798D0 (en) * 2008-02-29 2008-04-09 Renishaw Plc Spectroscopic apparatus and methods
GB0708582D0 (en) 2007-05-03 2007-06-13 Renishaw Plc Spectroscope apparatus and methods
SE533454C2 (sv) * 2008-12-18 2010-10-05 Portendo Ab Detektion av små mängder av ämnen
JP5765022B2 (ja) * 2011-03-31 2015-08-19 ソニー株式会社 微小粒子分析装置及び微小粒子分析方法
JP5927081B2 (ja) * 2012-08-17 2016-05-25 オリンパス株式会社 分光測定方法
GB201317429D0 (en) * 2013-10-02 2013-11-13 Renishaw Plc Spectroscopy apparatus and method
WO2015049341A1 (en) 2013-10-03 2015-04-09 Renishaw Plc Method of inspecting an object with a camera probe
WO2015125311A1 (ja) * 2014-02-24 2015-08-27 オリンパス株式会社 分光測定方法
CN106461558B (zh) * 2014-05-26 2019-03-08 株式会社日立制作所 光学分析装置
GB201415238D0 (en) * 2014-08-28 2014-10-15 Renishaw Plc Spectroscopy apparatus
GB201503911D0 (en) * 2015-03-09 2015-04-22 Renishaw Plc Transmission raman spectroscopy
LU93225B1 (de) * 2016-09-16 2018-03-19 Leica Microsystems Verfahren zur Erzeugung von Vorschaubildern mit einem Schiefeebenenmikroskop sowie Schiefeebenemikroskop und Bilderzeugungsvorrichtung für ein Schiefeebenemikroskop
DE102017213419A1 (de) * 2017-08-02 2019-02-07 Deere & Company Spektrometeranordnung
US10707051B2 (en) * 2018-05-14 2020-07-07 Gatan, Inc. Cathodoluminescence optical hub
GB2572662B (en) * 2018-10-05 2020-06-03 Res & Innovation Uk Raman spectrometer
WO2020174239A1 (en) 2019-02-27 2020-09-03 Renishaw Plc Spectroscopic apparatus
JP2023135837A (ja) * 2022-03-16 2023-09-29 浜松ホトニクス株式会社 試料測定装置および試料測定方法
GB202404500D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404511D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404510D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173748A (en) * 1991-12-05 1992-12-22 Eastman Kodak Company Scanning multichannel spectrometry using a charge-coupled device (CCD) in time-delay integration (TDI) mode
US5442438A (en) * 1988-12-22 1995-08-15 Renishaw Plc Spectroscopic apparatus and methods
CN2793720Y (zh) * 2005-04-11 2006-07-05 全友电脑股份有限公司 生物晶片扫描装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69203215T2 (de) * 1991-11-16 1995-11-09 Renishaw Plc, Wotton-Under-Edge, Gloucestershire Spektroskopisches Gerät und Verfahren.
JP3708929B2 (ja) * 2003-03-31 2005-10-19 株式会社東芝 パターン欠陥検査方法及びパターン欠陥検査装置
JP4565119B2 (ja) * 2004-10-18 2010-10-20 学校法人早稲田大学 ラマン分光装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442438A (en) * 1988-12-22 1995-08-15 Renishaw Plc Spectroscopic apparatus and methods
US5689333A (en) * 1988-12-22 1997-11-18 Renishaw Plc Spectroscopic apparatus and methods
US5173748A (en) * 1991-12-05 1992-12-22 Eastman Kodak Company Scanning multichannel spectrometry using a charge-coupled device (CCD) in time-delay integration (TDI) mode
CN2793720Y (zh) * 2005-04-11 2006-07-05 全友电脑股份有限公司 生物晶片扫描装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Chris Dyer et al.Application of Continuous Extended Scanning Techniques to the Simultaneous Detection of Raman Scattering and Photoluminescence from Calcium Disilicates using Visible and Near-Infrared Excitation.《JOURNAL OF RAMAN SPECTROSCOPY》.1995,第26卷777-785. *
Michael Bowden et al.Line-Scanned Micro Raman Spectroscopy Using a Cooled CCD Imaging Detector.《JOURNAL OF RAMAN SPECTROSCOPY》.1990,第21卷37-41. *

Also Published As

Publication number Publication date
CN101589297A (zh) 2009-11-25
EP2106538B1 (en) 2010-05-05
ATE467104T1 (de) 2010-05-15
JP5443171B2 (ja) 2014-03-19
JP2010517029A (ja) 2010-05-20
GB0701477D0 (en) 2007-03-07
DE602008001157D1 (de) 2010-06-17
EP2106538A1 (en) 2009-10-07
WO2008090350A1 (en) 2008-07-31

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