CN101582389B - 柔性伸缩杆机构 - Google Patents
柔性伸缩杆机构 Download PDFInfo
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- CN101582389B CN101582389B CN2009100399909A CN200910039990A CN101582389B CN 101582389 B CN101582389 B CN 101582389B CN 2009100399909 A CN2009100399909 A CN 2009100399909A CN 200910039990 A CN200910039990 A CN 200910039990A CN 101582389 B CN101582389 B CN 101582389B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 109
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- 238000004134 energy conservation Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009100399909A CN101582389B (zh) | 2009-06-04 | 2009-06-04 | 柔性伸缩杆机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009100399909A CN101582389B (zh) | 2009-06-04 | 2009-06-04 | 柔性伸缩杆机构 |
Publications (2)
Publication Number | Publication Date |
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CN101582389A CN101582389A (zh) | 2009-11-18 |
CN101582389B true CN101582389B (zh) | 2011-01-19 |
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CN2009100399909A Expired - Fee Related CN101582389B (zh) | 2009-06-04 | 2009-06-04 | 柔性伸缩杆机构 |
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CN (1) | CN101582389B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102751228B (zh) * | 2011-06-28 | 2014-11-26 | 清华大学 | 一种利用弹簧夹子的晶圆夹持装置 |
CN102380834A (zh) * | 2011-11-16 | 2012-03-21 | 宁波市新泽谷机械有限公司 | 一种工件夹取机构 |
CN105559607A (zh) * | 2014-11-10 | 2016-05-11 | 佛山市顺德区美的饮水机制造有限公司 | 感应器安装结构及家用电器 |
CN110815286B (zh) * | 2019-12-05 | 2023-06-27 | 浙江清华柔性电子技术研究院 | 柔性伸缩器件及机械臂 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW383444B (en) * | 1997-06-18 | 2000-03-01 | Sez Semiconduct Equip Zubehoer | Gripper for wafer-shaped articles |
JP2003297905A (ja) * | 2003-05-12 | 2003-10-17 | Anelva Corp | 基板処理装置におけるリングチャックの取り扱い方法 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW383444B (en) * | 1997-06-18 | 2000-03-01 | Sez Semiconduct Equip Zubehoer | Gripper for wafer-shaped articles |
JP2003297905A (ja) * | 2003-05-12 | 2003-10-17 | Anelva Corp | 基板処理装置におけるリングチャックの取り扱い方法 |
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CN101582389A (zh) | 2009-11-18 |
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