CN101956175B - 真空连续镀膜系统以及使用该系统装卸掩膜板的方法 - Google Patents
真空连续镀膜系统以及使用该系统装卸掩膜板的方法 Download PDFInfo
- Publication number
- CN101956175B CN101956175B CN201010187994A CN201010187994A CN101956175B CN 101956175 B CN101956175 B CN 101956175B CN 201010187994 A CN201010187994 A CN 201010187994A CN 201010187994 A CN201010187994 A CN 201010187994A CN 101956175 B CN101956175 B CN 101956175B
- Authority
- CN
- China
- Prior art keywords
- mask plate
- vacuum
- gate valve
- plated film
- plating unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 36
- 238000000576 coating method Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 30
- 238000003860 storage Methods 0.000 claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims description 106
- 238000007747 plating Methods 0.000 claims description 88
- 238000000605 extraction Methods 0.000 claims description 19
- 238000001771 vacuum deposition Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Images
Landscapes
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010187994A CN101956175B (zh) | 2010-05-25 | 2010-05-25 | 真空连续镀膜系统以及使用该系统装卸掩膜板的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010187994A CN101956175B (zh) | 2010-05-25 | 2010-05-25 | 真空连续镀膜系统以及使用该系统装卸掩膜板的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101956175A CN101956175A (zh) | 2011-01-26 |
CN101956175B true CN101956175B (zh) | 2012-10-17 |
Family
ID=43483758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010187994A Expired - Fee Related CN101956175B (zh) | 2010-05-25 | 2010-05-25 | 真空连续镀膜系统以及使用该系统装卸掩膜板的方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101956175B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103969945B (zh) * | 2013-01-25 | 2018-08-24 | 上海微电子装备(集团)股份有限公司 | 刮伤掩模修补装置及方法 |
TWI494455B (zh) * | 2013-02-07 | 2015-08-01 | Combined mask | |
CN103451668A (zh) * | 2013-08-07 | 2013-12-18 | 无锡市恒通石油机械有限公司 | 一种用于酸洗工件的滚轮架 |
CN106498345B (zh) * | 2016-11-15 | 2019-07-12 | 陈玲婷 | 一种设有前后门的镀膜箱设备 |
CN106498346B (zh) * | 2016-11-15 | 2019-07-19 | 何莹莹 | 一种镀膜箱设备 |
CN106399965B (zh) * | 2016-11-15 | 2019-01-11 | 徐州天力模具制造有限公司 | 一种设有前后门且自动推料的镀膜箱设备 |
CN106746720B (zh) * | 2016-12-02 | 2019-01-22 | 徐州市凯诺机械有限公司 | 一种玻璃基板镀膜机构 |
CN106672660B (zh) * | 2017-03-09 | 2019-08-30 | 合肥京东方光电科技有限公司 | 掩膜版装载装置及显示面板制备系统 |
CN109673158B (zh) * | 2017-08-17 | 2021-04-02 | 应用材料公司 | 用于在真空涂布工艺中处理若干掩模的方法、用于通过在基板上沉积数个不同材料层来处理基板的方法和用于涂布基板的设备 |
CN109023234B (zh) * | 2018-08-09 | 2020-08-28 | 深圳市华星光电半导体显示技术有限公司 | 一种掩膜板更换装置及更换方法 |
KR102481920B1 (ko) * | 2019-12-19 | 2022-12-26 | 캐논 톡키 가부시키가이샤 | 처리체 수납 장치와, 이를 포함하는 성막 장치 |
CN113025986A (zh) * | 2021-03-02 | 2021-06-25 | 南京昀光科技有限公司 | 掩膜版清洗运送系统和方法 |
CN115287604A (zh) * | 2022-08-26 | 2022-11-04 | 中能兴盛(香河)机电设备有限公司 | 一种连续蒸镀系统及使用方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5303671A (en) * | 1992-02-07 | 1994-04-19 | Tokyo Electron Limited | System for continuously washing and film-forming a semiconductor wafer |
CN2797387Y (zh) * | 2005-02-16 | 2006-07-19 | 友威科技股份有限公司 | 内藏静电除尘机构连续式真空镀膜机 |
CN201713575U (zh) * | 2010-05-25 | 2011-01-19 | 东莞宏威数码机械有限公司 | 真空连续镀膜系统 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3188956B2 (ja) * | 1992-02-07 | 2001-07-16 | 東京エレクトロン株式会社 | 成膜処理装置 |
JP2608533B2 (ja) * | 1996-05-20 | 1997-05-07 | セイコー電子工業株式会社 | 単結晶薄膜半導体成長方法 |
-
2010
- 2010-05-25 CN CN201010187994A patent/CN101956175B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5303671A (en) * | 1992-02-07 | 1994-04-19 | Tokyo Electron Limited | System for continuously washing and film-forming a semiconductor wafer |
CN2797387Y (zh) * | 2005-02-16 | 2006-07-19 | 友威科技股份有限公司 | 内藏静电除尘机构连续式真空镀膜机 |
CN201713575U (zh) * | 2010-05-25 | 2011-01-19 | 东莞宏威数码机械有限公司 | 真空连续镀膜系统 |
Non-Patent Citations (2)
Title |
---|
JP特开平5-217919A 1993.08.27 |
JP特开平8-274037A 1996.10.18 |
Also Published As
Publication number | Publication date |
---|---|
CN101956175A (zh) | 2011-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101956175B (zh) | 真空连续镀膜系统以及使用该系统装卸掩膜板的方法 | |
CN201713575U (zh) | 真空连续镀膜系统 | |
CN202290464U (zh) | Oled玻璃基板涂胶自动化系统 | |
KR101141837B1 (ko) | 증착 마스크의 세정 장치 및 세정 방법 | |
CN203445124U (zh) | 平板显示装置 | |
CN1832220A (zh) | 制造薄膜晶体管的方法、薄膜晶体管和显示装置 | |
CN101132055A (zh) | 一种能提高有机电致发光器件亮度和效率的器件及制法 | |
CN101656223B (zh) | 多抓手重复智能抓取释放装置 | |
CN102184934B (zh) | 掩膜板真空对位装置 | |
TW201508969A (zh) | 顯示設備製造方法 | |
CN1930698A (zh) | 切割和传送已切割的oled施主薄板 | |
US20160079569A1 (en) | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same | |
CN1093829C (zh) | 卷筒传送方法及其装置 | |
CN202208188U (zh) | 适用于多面体的往复式数码喷印平台 | |
CN104846337A (zh) | 一种蒸镀设备及蒸镀生产线 | |
CN202297385U (zh) | 基板涂胶系统 | |
CN101971700B (zh) | 用于动态移动基板的等离子体处理的线性等离子体源 | |
CN104098260A (zh) | 显示面板用切割设备和使用切割设备制造显示设备的方法 | |
CN201490175U (zh) | 重复智能抓取释放装置 | |
KR101318175B1 (ko) | 필름 공급장치 | |
CN100591799C (zh) | 成膜装置、薄膜的制造装置及成膜方法 | |
CN205361852U (zh) | 一种胶水带帽保护线圈的装置 | |
CN204834579U (zh) | 一种面向柔性芯片的多顶针剥离装置 | |
JP2011183249A (ja) | 蒸着マスクの洗浄装置 | |
KR102190638B1 (ko) | 디스플레이용 기판 증착 시스템 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20121017 |
|
RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20121017 |
|
PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20121017 |
|
RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20121017 |
|
PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20121017 |
|
RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20210905 Granted publication date: 20121017 |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121017 Termination date: 20130525 |