五、發明説明（ Α7 Β7 經濟部中央標準局員工消費合作社印製 本發明係關於具有如申請專利範圍第 所述特性之晶圓形物件用夾持器。 =* 伤 夾持器由W095/11518已知。已知夹持 由彈簧力維持於夾持晶圓形物件（晶圓）之位置，夾二係 形物件（晶圓）相對於夾持器之位置未 因而曰曰圓 知央持器中，錐形擴張本體於夹持器爽持二形IS: 夾爪’故夾爪緊㈣鄰物件外緣。經常晶圓形物 件(曰曰圓)無法固定對中夾持器軸，特別當於夾爪之—之區 痕出現於晶圓形物件邊緣時尤為如此。此： 情況下，夾爪無法施加於徑向方向作用力至晶圓形物件内 侧，夹爪反而於載荷彈簧力作用下偏移晶圓形物件超出對 中位置。對於全部夾爪緊密赴鄰晶圓形物件邊緣之例，當 以已知夾持器固持時，有不同固持位置，原因為載荷夹^ 至内侧的個別彈簧之彈性常數並未正好相等故。 例如當晶圓形物件置於固定器上時，石夕晶圓置於進一 步加工處理步驟（钱刻，拋光等）期間固持物件之卡盤上 前述問題引發其他問題，原因為已知央持器唯有於特殊例 才可將晶圓形物件恰好同心置於卡盤轉軸，因而相當盈規 則。對於面對晶圓形物件表面上配備有（可調式）鎖之卡盤 而言’若有所需’可於徑向方向向内移動俾使晶圓形物件 對中（us-A-513 668)，此點不成問題，原因為晶圓形物件 =、,、將對t於不含前述鎖之晶圓形物件卡盤中，晶圓形 物件係純然藉固持’或較佳利用伯努里原理（US-A-4 903 717)或藉貞壓（ 97/G3457)”未放置對"㈣形物 (請先閱讀背面之注意事項再填寫本頁) .i------IT------ -fi— I--i aV. Description of the invention (Α7 Β7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs This invention is about a holder for crystal round objects with the characteristics described in the scope of the patent application. = * Wound holder by W095 / 11518 Known. It is known that the clamping is maintained by the spring force at the position of holding the circular crystal object (wafer), and the position of the second-shaped object (wafer) relative to the holder is not known as the circular holder. In the middle, the conical expansion body is held in the holder with a two-shaped IS: clamping jaws, so the clamping jaws are tightly adjacent to the outer edge of the object. Often crystal round objects (say round) cannot fix the center of the clamp shaft, especially when This is especially true when the area marks of the gripper appear on the edge of the crystal round object. In this case, the gripper cannot apply a radial direction force to the inside of the crystal round object, but the gripper is under the load spring force Offset crystal round objects exceed the centering position. For the case where all the clamping jaws are close to the edge of the adjacent crystal round object, when held by a known holder, there are different holding positions due to the load clamp ^ to the inside of the individual The spring constants are not exactly equal. For example, when a crystal circular object is placed on the holder, the Shi Xi wafer is placed on the chuck that holds the object during further processing steps (money engraving, polishing, etc.). The aforementioned problems cause other problems because of the known central holder. Only in special cases can crystal-shaped objects be placed concentrically on the chuck shaft, which is quite profitable. For chucks equipped with (adjustable) locks on the surface of crystal-shaped objects, Need to be able to move inward in the radial direction to center the crystalline round object (us-A-513 668). This is not a problem because the crystalline round object = ,,, will not include the aforementioned lock. In the crystal round object chuck, the crystal round object is held purely by holding or using Bernoulli's principle (US-A-4 903 717) or by virtue of pressure (97 / G3457). ㈣-shaped object (please read the precautions on the back before filling this page) .i ------ IT ------ -fi— I--ia
• In HI m 張尺度適用 五、 發明説明（ 2 A7 B7 經濟部中央標準局員工消費合作社印製 θ w處理步驟進仃中晶圓形物件隨同卡盤旋轉時出現質 ®不平衡問題。 本發明之目的係改變已知夾持器構造，故個別夹爪不 會與另-夾爪獨立無關於徑向方向向内移動。 的可使用如申請專利範圍第1項之引言部份之特 點達成。 /本發月申明專利之夾持器之較佳及優異具體例構成申 請專利範圍各附屬項主題。 由於本發明申請專利之央持器中注意使夾爪不會於徑 向方向向内移動距離超過其他夾爪（例如通常為六爽爪） ，故晶圓形物件可經常於可再現（經界w位置固持與夾 持器軸同心，可由夾㈣以特定方式例如與載具轴同心 持於卡盤上。 提供夾爪唯有於徑向方向聯合移動之裝置可視需要製 造。例如可為夾爪以槓桿聯結方式機械偶聯，或如本發明 範圍内之較佳者，以設置於已知爽持器之擴張裝置（觸 95/11518) ’例如較佳為錐形擴張本體其與導桿之徑向内 端或夾爪之導件本體交互作用，因此可連續緊密紕鄰導桿 内端或導件本體。此可藉彈簧載荷於擴張本體之最簡單例 達成，彈*㈣擴張本體連續牴録爪之導桿或導件本體 或設置其上之輥。擴張本體用以於夾持器開啟時移動夾爪 (於徑向方向）向外’由於擴張本體#牴夾爪之（徑向方 向）向内部份（導桿，導件本體或設置其上之輥），故可 防止夾爪彼此獨立移動。夾爪僅能聯合移動。若因任何理 夾 ------------裝-- (詩先聞讀背面之注意事項再填寫本頁)• In HI m scale application V. Description of the invention (2 A7 B7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs θ w Process steps are printed into the medium crystal round object and the chuck rotates with a quality ® imbalance problem. The present invention The purpose is to change the structure of the known gripper, so that the individual gripper will not move independently of the other gripper in the radial direction. The use of the features can be achieved by using the characteristics of the introduction of the first scope of the patent application. / The preferred and excellent specific examples of the holders of the patents issued this month constitute the subject matter of each subsidiary item of the patent application scope. Because the central holder of the patent application of the present invention pays attention to the gripper not to move inward in the radial direction. More than other clamping jaws (for example, usually six cool jaws), the crystal round object can often be reproducible (the warp position w is held concentric with the gripper axis, and can be held by the gripper in a specific way, such as concentrically with the carrier axis. On the chuck. The device that provides the gripper only in the radial direction can be manufactured as required. For example, the gripper can be mechanically coupled by a lever coupling method, or as the better within the scope of the present invention, it can be set In the expansion device of the known holder (touch 95/11518), for example, it is preferably a conical expansion body which interacts with the radially inner end of the guide rod or the guide body of the clamping jaw, so that the guide can be continuously and closely adjacent to the guide. The inner end of the rod or the guide body. This can be achieved by the simplest example of the spring load on the expansion body. The guide rod or guide body or the roller provided on the expansion body can be continuously recorded. The expansion body is used for When the gripper is opened, the gripper jaws (in the radial direction) are moved outwards. Since the expansion body # 牴 of the gripper jaws (radial direction) moves inward (guide rod, guide body or roller provided thereon), It can prevent the clamping jaws from moving independently of each other. The clamping jaws can only be moved in conjunction. If any ------------ install-(please read the notes on the back of the poem before filling in this page)
、1T 「鍊---------- II -1-1 本紙張尺度 t_家縣(CNS ) A4規格（ U* I —^1 · 5 A7 B7 五、發明説明（ 之1比其他夾爪更大力量作用於擴張本體，則 只、體向上移動，其他夾爪由於作用於其上之彈菁力而 向内移動’同樣保持牴住擴張本體。如此本發明中請專利 之夾持器構造中’個別夾爪無法與其他夾爪互*相干地於 徑向方向向内移動。 本發明之其他細節及優點由後文較佳具體例之說明參 照附@顯然易明。第ί圖顯示央持器之抽向剖面，第】圖左 半，夾爪於徑向方向向内移動，相反地，㈣Μ 夾爪係藉擴張機構於徑向方向向外移動；及第2圖顯示夾 持器之頂視圖（殼蓋去除）。 本發月之夾持器包含基體丨其於所示具體例具有圓滑 外形，及夾爪2於所示具體例為六爪，其可於徑向方向相 對於基體1向内及向外移動。 基體1具有大體筒形壁3，蓋4及基板5。基體丨之此等 部件藉螺絲6彼此聯結。基板5也可與壁3一體成形。 基體1之壁3中插入導鞘7,其中夾爪2之徑向方向對正 導桿8可活動導引。導桿8外端有固持件9，固持件上有附 有凸起凸緣11之銷10。銷1〇為夾爪2作用於夾緊晶圓形物 件部份。導桿8於壁3外側部份可由可變長度之膨大伸縮節 (未顯示）遮蓋》 銷10可有一個環由兩個錐形面界限於凸緣Η上方2特 別於WO 95/11518第3圖所示具體例中，夾持器9上尚未說 明之肩3〇也可刪除。 於固持本體9上可有舌狀肩3〇於徑向方向向内指向銷 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇χ297公釐） 衣----------ΐτ------r— /ί > -.- V. (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印裝、 1T "chain ---------- II -1-1 paper size t_ home county (CNS) A4 specification (U * I — ^ 1 · 5 A7 B7 V. Description of the invention (1 ratio The other clamps act on the expansion body with greater force, and only move the body upwards. The other clamps move inward due to the elastic force acting on them. They also hold the expansion body. So the patented folder in the present invention In the holder structure, 'individual grippers cannot move inwardly in the radial direction coherently with other grippers. Other details and advantages of the present invention will be described later with reference to the preferred specific examples. Obviously easy to understand. 第 ί The figure shows the pumping section of the central holder. (Fig. 1) On the left half of the figure, the clamping jaws move inward in the radial direction. Conversely, the ㈣ clamping jaw moves outward in the radial direction by the expansion mechanism; and Figure 2 shows the clamping The top view of the holder (with the cover removed). The holder of this month includes a base body 丨 which has a smooth shape in the specific example shown, and the clamping claw 2 is a six-claw in the specific example shown, which can be in the radial direction Moves inward and outward relative to the base body 1. The base body 1 has a generally cylindrical wall 3, a cover 4, and a base plate 5. The base body 丨 these The pieces are connected to each other by screws 6. The base plate 5 can also be integrally formed with the wall 3. A guide sheath 7 is inserted into the wall 3 of the base body 1, wherein the radial direction of the clamping claw 2 can guide the guide rod 8 movably. Outside the guide rod 8 There is a holder 9 at the end, and a pin 10 with a raised flange 11 is attached to the holder. The pin 10 is a clamping jaw 2 for clamping a part of a crystal round object. Covered by variable-length expansion joints (not shown) The pin 10 may have a ring bounded by two tapered surfaces above the flange 2 2 particularly in the specific example shown in Figure 3 of WO 95/11518. The holder 9 The shoulder 30, which has not been explained above, can also be deleted. On the holding body 9, a tongue-shaped shoulder 30 can be pointed inward in the radial direction. The paper size applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm). Clothing ---------- ΐτ ------ r— / ί > -.- V. (Please read the precautions on the back before filling out this page) Staff Consumer Cooperatives, Central Bureau of Standards, Ministry of Economic Affairs Printing
經濟部中夬榡準局員工消費合作衽，5-製 。此等肩3〇更籍被‘ 體][之基 s之，附接於肩上之鈕狀撐體可於基 反5藉旋轉基體！而向上時作為晶圓形物件撐體。 接於導桿㈣《附 壁15及16形、〇向内端。導件本體12之導溝13係由二 其:tesu形成，壁粗略沿徑向方向前進且模製於基體1之 丞板5上向内凸起。 有個擴張裝置2G供於徑向方向向内壓迫夾爪2由第旧 左侧所示準備位I M I至由彈簧（未顯示）壓迫位置（例如 螺开> 壓縮彈箬鸪@ ^ , ' ;導桿8上方，或環形螺形彈簧或橡膠 I其設置環繞導件本體12之外表面17)β 則述載何夾爪於徑向方向向内之彈簧裝置也可為氣力 彈簧’其作用成可使夾纽徑向方向向内載荷。 所不具體例中，擴張裝置2〇包含附有錐形護套面22之 擴張本體2!，其透過輥18作用於導件本㈣，輥係支撑成 可於導件本體12自由移動，因此可透過導桿8作用於夹爪2 二為了引動擴張本體21，於基體1之蓋部件4之一肩設置有 氣力馬達24,較㈣氣力汽缸，时活塞桿25 I 本體21。 赖报 若使用本發明之夹持器，待固定位於一表面上的晶圓 形物件例㈣晶圓，則首先全部汽缸24被作動而移動擴張 本體21向下至其接觸基板5内側（第1圖右邊）。現在夾爪2 處於其徑向方向最外方位置。此時夾持器由手或機器人移 動至銷10位於待固持物件外周邊旁的夾爪2上。—曰 出 此種情況’擴張本體21向上移動故銷10接觸晶圓形物件 請 聞 讀 背 之 注— 意 事 項 再， t 裝 、旅The Consumer Cooperation of the China Prospective Bureau of the Ministry of Economic Affairs, 5-system. These shoulders 30 have been ‘body ’s’ base, the button-shaped support attached to the shoulder can be used to rotate the base body! When it is up, it acts as a crystal circular object support. Attached to the guide rod ㈣ "Coanda 15 and 16 shape, 0 inward end. The guide groove 13 of the guide body 12 is formed of two: tesu, and the wall advances roughly in the radial direction and is molded inwardly on the cymbal plate 5 of the base body 1. There is an expansion device 2G for compressing the jaw 2 inward in the radial direction from the preparation position IMI shown on the left side to the compression position by the spring (not shown) (for example, screw open > compression springs @ ^, '; Above the guide rod 8, or a ring-shaped spiral spring or rubber I, which is arranged to surround the outer surface of the guide body 12, 17) β, the spring device containing the clamping jaws inward in the radial direction can also be a pneumatic spring. The clamp can be loaded inward in the radial direction. In the specific example, the expansion device 20 includes an expansion body 2 with a tapered sheath surface 22, which acts on the guide body through a roller 18, and the roller system is supported to be freely movable on the guide body 12, so The guide rod 8 can act on the clamping jaw 2. In order to actuate the expansion body 21, a pneumatic motor 24 is provided on one of the shoulders of the cover member 4 of the base 1. Compared with a pneumatic cylinder, the piston rod 25 I is the main body 21. If Lai Bao uses the holder of the present invention to fix a wafer-shaped object such as a wafer on a surface, first all the cylinders 24 are actuated to move the expansion body 21 down to the inside of the contact substrate 5 (the first Right). The jaw 2 is now in its outermost position in the radial direction. At this time, the gripper is moved by a hand or a robot to the gripper pin 2 of the pin 10 located beside the outer periphery of the object to be held. — Say this situation ’The expansion body 21 moves up, so the pin 10 contacts the crystal-shaped object. Please read the note on the back. — Note the items.
) A4W ( 210x^iT 五 、發明説明（5 ) A7 B7 經濟部中央標準局員工消費合作社印製) A4W (210x ^ iT V. Description of Invention (5) A7 B7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs
周邊。 當物件停放於基體上時可靠地進行夹持原因為 銷H)游離端之凸緣U具有上邊界表su，其斜向向上（ 形護套形式)。當銷10向内移動時，晶圓形物件被升高， 原因為其於斜向表面U，上向上滑動至㈣緊密晚^ 之外周邊為止。 冲柳1千 若晶圓形物件如同發晶圓之例為非正圓形物件，則若 干夾爪2無法緊密毗鄰部件外周邊。 本發明之夾持器中，無論何種具體例，擴張裝置如不 僅可用於夾持晶圓形物件前移動爽爪2(於裡向方向）向外 ，同時也如同 95/11518已知之夾持器，也可防止個別 央爪2向内（徑向方向）移動超過其他夾爪2 ^ 所示具體例令，此係藉不僅對正氣力馬達24同時也對 正彈簧26至擴張裝置20之擴張本體21。當氣力馬達24未加 壓時，彈簧26保持擴張本體21更為牴住夾爪2 ^如所示具 體例，此係與擴張本體21是否緊密晚鄰夾爪2之輕，導桿8 之導件本體12，導桿或其他聯結於夾爪2之部件無關。 。^荷擴張本體21之彈簧26如該具體例所示可為螺旋壓 縮彈簧。但也可提供另一具彈簧如氣力彈簧，其可維持擴 張本體21牴住夾爪2或聯結於夾爪2之部件如輥18。另有一 個具體例其中氣力馬達21例如為作動擴張本體21之汽紅藉 施加相對低壓而用作氣力彈簧。 要緊地，作用於擴張本體21保持擴張本體牴住夾爪2 或夾爪2聯結部件之彈力不可過大，故對正擴張 之 — (請先閱讀背面之注意事項再填寫本頁) I n In (I . 尊 • —81 1 I Ml .Surrounding. The reason for reliable clamping when the object is parked on the substrate is that the flange U of the free end has an upper boundary table su, which is inclined upward (in the form of a sheath). When the pin 10 is moved inward, the crystal-shaped object is lifted because it slides upward on the oblique surface U until it is close to the outer periphery. 1 thousand willows If the crystal circular object is a non-circular object, as in the case of a wafer, the jaw 2 cannot closely abut the outer periphery of the component. Regardless of the specific example of the holder of the present invention, the expansion device can not only be used to move the refreshing claw 2 (in the inward direction) outward before holding the crystal-shaped object, but also the holder as known in 95/11518 It can also prevent individual central claws 2 from moving inward (radial direction) beyond the other clamping claws 2 ^ The specific example shown is to align not only the pneumatic motor 24 but also the expansion of the spring 26 to the expansion device 20体 21. When the pneumatic motor 24 is not pressurized, the spring 26 keeps the expansion body 21 more gripping the gripper 2 ^ As shown in the specific example, this is whether it is close to the expansion body 21 at a later time than the lightness of the gripper 2 and the guide 8 The body 12, the guide rod, or other components connected to the gripper 2 are irrelevant. . The spring 26 of the expansion body 21 may be a helical compression spring as shown in this specific example. However, it is also possible to provide another spring such as a pneumatic spring, which can maintain the expanded body 21 to grip the jaw 2 or a component such as a roller 18 coupled to the jaw 2. In another specific example, the pneumatic motor 21 is used as a pneumatic spring by applying a relatively low pressure to, for example, a steam red which operates the expansion body 21. Importantly, the elastic force acting on the expansion body 21 to keep the expansion body holding the clamping jaw 2 or the coupling parts of the clamping jaw 2 must not be too large, so the expansion is positive — (Please read the precautions on the back before filling this page) I n In ( I. respect • 81 1 I Ml.
,I HI 本紙張尺度適 % β·，a'i Λ —--------五、發明説明（ A7 B7 經濟部中央標準局員工消費合作社印製 彈簧26施加大力於夾爪2上造成夾爪處於載荷夾爪向内的 彈黃作用下’此等彈簧對正夾爪而使夾爪不再向内移動， 原因為若分如此無法使用夾持器牢固夾持晶圓形物件。 利用本發明之夾持器設計，其中所示具體例之夾爪2 藉擴張裝置20彼此偶聯而對正錐形擴張本體21，故個別夾 爪2不會（於徑向方向）向内移動至超過其他夾爪2，可痛保 晶圓形物件經常固定相對於夾持器之可界定且可再現位置 ，特別與夾持器軸14同心，即使晶圓形物件之外緣非正確 圓形亦如此。 摘要言之’本發明之較佳具體例說明如下。 一種晶圓形物件（矽晶圓）夾持器具有若干徑向可調 式夾爪2。夾爪2由彈簧載荷，故當夾持物件時夾爪緊密毗 鄰物件外緣。 為了移動夾爪2至外侧，有個附有錐形擴張本體21之 擴張裝置2G。此外夾爪2彼此偶聯故不會獨立移動至内側 ’及其確保個別夾爪2不會比另—夾爪2移動至内侧之距離 更遠。例如可藉錐形擴張本體21載荷彈簧26達成，彈簧可 連續對抗聯結至夾爪之部件，例如設置於其導件本體U之 幸昆18。如此可靠的防止個別夾爪2於徑向#向移動至内側 距離比另-夾爪2更^如此部件由夾持㈣定於界定位 --------------裝— (請先閱讀背面之注意事項再填寫本頁) 、π 本紙張尺度適用中酬家標準) A4規格----~~_ m_ -------- 經濟部中央標準局員工消費合作社印製 MUi4 A7 B7 五、發明説明（7 ) 元件標號對照 1 基體 2 夾爪 3 壁 4 蓋 5 基板 6 螺絲 7 導鞘 8 導桿 9 固持件 10 銷 11 凸緣 12 導件本體 13 導溝 15 > 16 壁 17 外表面 20 擴張裝置 18 輥 21 擴張本體 22 錐形護套面 24 汽缸 25 活塞桿 1Γ 表面 26 彈簧 i 訂- ^ ~線 (詩先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -10-, I HI The paper size is suitable for% β ·, a'i Λ ——————— 5. Description of the invention (A7 B7 Printed spring 26 by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, exerts great force on the gripper 2 The jaws are under the action of the loading jaws inwardly yellowing. 'These springs align the jaws so that the jaws no longer move inward, because if this is the case, it is impossible to use a clamp to firmly hold the crystal round object. With the gripper design of the present invention, the grippers 2 of the specific example shown are coupled to each other by the expansion device 20 to align the tapered expansion body 21, so that the individual grippers 2 do not move inward (in the radial direction). Up to other gripper claws, crystallized circular objects are often fixed in a definable and reproducible position relative to the holder, especially concentric with the holder axis 14, even if the outer edge of the crystal circular object is not properly circular The same is true. The summary says that the preferred specific examples of the present invention are described below. A wafer-shaped object (silicon wafer) holder has a number of radially adjustable clamping jaws 2. The clamping jaws 2 are loaded by a spring, so The gripper is closely adjacent to the outer edge of the object when holding the object. In order to move the gripper 2 to the outside, there is An expansion device 2G with a tapered expansion body 21. In addition, the clamping jaws 2 are coupled to each other so they do not move independently to the inside 'and it ensures that individual clamping jaws 2 will not move farther than the other-the clamping jaws 2 move to the inside For example, it can be achieved by loading the spring 26 with the conical expansion body 21, and the spring can continuously resist the components connected to the jaw, such as Xingkun 18 provided on the guide body U. This reliably prevents individual jaws 2 in the radial direction # The distance to the inner side is more than that of the other-clamping claw 2. Therefore, the part is positioned by the clamp and fixed to the boundary. -------------- install— (Please read the precautions on the back before filling in this Pages), π This paper size applies to the median home standard) A4 specifications ---- ~~ _ m_ -------- printed by MUi4 A7 B7, employee consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (7 ) Component number comparison 1 base body 2 jaw 3 wall 4 cover 5 base plate 6 screw 7 guide sheath 8 guide rod 9 holder 10 pin 11 flange 12 guide body 13 guide groove 15 > 16 wall 17 outer surface 20 expansion device 18 Roller 21 Expansion body 22 Conical sheath surface 24 Cylinder 25 Piston rod 1Γ Surface 26 Spring i Order-^ ~ 线 (诗Notes on the back read and re-fill of this page) This paper scale applicable Chinese National Standard (CNS) A4 size (210X297 mm) -10-